CN106947944A - One kind evaporation crucible, vapor deposition source, evaporation coating device and evaporation coating method - Google Patents
One kind evaporation crucible, vapor deposition source, evaporation coating device and evaporation coating method Download PDFInfo
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- CN106947944A CN106947944A CN201710370616.1A CN201710370616A CN106947944A CN 106947944 A CN106947944 A CN 106947944A CN 201710370616 A CN201710370616 A CN 201710370616A CN 106947944 A CN106947944 A CN 106947944A
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- Prior art keywords
- evaporation
- crucible
- cover plate
- magnetic
- outlet
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
Abstract
The embodiment of the present invention provides a kind of evaporation crucible, vapor deposition source, evaporation coating device and evaporation coating method, is related to vacuum vapor plating field, can solve the problem that existing evaporation crucible can not effectively control the opening time of air bleeding valve, so that the problem of influenceing evaporation process.Including：Crucible body, is provided with least one evaporation outlet in crucible body.Magnetic cover plate, lid is located at evaporation exit position, make it that the deposition material inside crucible body completely cuts off with outside air.Electromagnetic assembly, including magnet coil, are arranged in crucible body, and magnet coil can form magnetic field in the state of electric current is passed through, and the active force in magnetic field can push away magnetic cover plate evaporation outlet.
Description
Technical field
The present invention relates to vacuum vapor plating field, more particularly to a kind of evaporation crucible, vapor deposition source, evaporation coating device and evaporation
Method.
Background technology
Vacuum vapor plating refers in vacuum environment, after material heating evaporation to be filmed or distillation, makes it in low temperature
Workpiece or substrate surface condense or deposited, with the technique for forming coating.Material to be filmed evaporation crucible inside heating evaporation or
After distillation, rise and sent by being deposited with the evaporation outlet above crucible, substrate to be deposited is static to be fixed on evaporation outlet port
Place is at the uniform velocity exported by being deposited with, and the material to be filmed evaporated gradually cools after leaving the heating of evaporation crucible, evaporation motion
Speed be gradually lowered, finally deposit to form film layer on the surface of substrate to be deposited.It is for organic display device, such as organic
Electro-luminescence display device (Organic Light-Emitting Diode, OLED), the main manufacture craft of its luminescent layer is
It is vacuum vapor plating.
During evaporation process, it is often necessary to use some active metals as deposition material, active metal is easy to
Occurs oxidation reaction with air in atmospheric environment, active metal re-evaporation and is deposited on the table of substrate to be deposited after being aoxidized
Face, will realize to the function of OLED and have undesirable effect, even result in the failure of OLED.
Authorization Notice No. is proposes a kind of crucible and its evaporation coating method in CN103695847B patent of invention, in crucible plug
Top sets steam vent and the air bleeding valve matched with the steam vent, and into crucible, filling is deposited with material in inert gas environment
Expect the outlet of rear enclosed crucible, the crucible for closing outlet is placed in evaporation chamber and vacuum environment is formed, inside evaporation crucible
Pressure be more than vacuum evaporation chamber pressure, air bleeding valve promote upspring opening crucible outlet, make it that deposition material outwards steams
Send out and complete the evaporation of the film layer on substrate to be deposited.
But, this evaporation crucible, can only be by inside and outside pressure difference promotion row when being deposited with progress evaporation operation in chamber
Air valve, includes uncertainty, it is difficult to which the unlatching to air bleeding valve carries out effective control, if the closure between air bleeding valve and steam vent
Tension or pressure difference are smaller, then air bleeding valve may be caused not open in time, or even influence the progress of evaporation process.
The content of the invention
The embodiment of the present invention provides a kind of evaporation crucible, vapor deposition source, evaporation coating device and evaporation coating method, can solve the problem that existing
Evaporation crucible can not effectively control the opening time of air bleeding valve, so that the problem of influenceing evaporation process.
To reach above-mentioned purpose, embodiments of the invention are adopted the following technical scheme that：
The one side of the embodiment of the present invention is deposited with crucible there is provided one kind, including：Crucible body, is set in crucible body
There is at least one evaporation outlet.Magnetic cover plate, lid is located at evaporation exit position, to cause the deposition material inside crucible body
Completely cut off with outside air.Electromagnetic assembly, including magnet coil, are arranged in crucible body, and magnet coil is being passed through the shape of electric current
Magnetic field can be formed under state, the active force in magnetic field can push away magnetic cover plate evaporation outlet.
Specifically, inwall of the magnet coil along crucible body is provided with one group, the magnet coil in the state of electric current is passed through
The force direction in the magnetic field of formation is perpendicular to the plane where magnetic cover plate.
Optionally, magnet coil be provided with crucible body it is multigroup, be parallel to each other between plurality of electromagnetic coil and with steam
Circumferentially disposed centered on plating outlet, the force direction in the magnetic field of plurality of electromagnetic coil formation hangs down in the state of electric current is passed through
Directly in the plane where magnetic cover plate.
It is preferred that, electromagnetic assembly also includes the iron core for being arranged on magnet coil center.
Further, it is located at the side periphery in crucible body in evaporation outlet and is additionally provided with magnetically attractive part, magnetically attractive part
Adsorb magnetic cover plate.
It is preferred that, evaporation outlet is at least provided with magnetic material layer in the marginal portion being in contact with magnetic cover plate.
It is preferred that, the thickness of magnetic cover plate is between 0.1mm-5mm.
There is provided the evaporation crucible of a kind of vapor deposition source, including any of the above-described for the another aspect of the embodiment of the present invention.
The another further aspect of the embodiment of the present invention is there is provided a kind of evaporation coating device, including evaporation chamber, also including being arranged on evaporation
Above-mentioned vapor deposition source in chamber.Motion bar is additionally provided with evaporation chamber, motion bar is fixedly connected with magnetic cover plate, and can
Magnetic cover plate is driven to be moved horizontally in evaporation chamber.
The another aspect of the embodiment of the present invention there is provided a kind of evaporation coating method, including, in an inert atmosphere to crucible sheet
Deposition material is filled in vivo, and the evaporation exit lid after the completion of filling in crucible body sets magnetic cover plate, to cause crucible body
Interior deposition material completely cuts off with outside air.Evaporation crucible is moved into evaporation chamber, heating evaporation crucible, in crucible body
Deposition material is by thermal evaporation.Electric current formation magnetic field is passed through to the magnet coil of electromagnetic assembly, and the active force in magnetic field is by magnetic cover plate
Evaporation outlet is pushed away to cause the deposition material of heated gasification by being deposited with outlet outwards evaporation.
The embodiment of the present invention provides a kind of evaporation crucible, vapor deposition source, evaporation coating device and evaporation coating method, including：Crucible body,
At least one evaporation outlet is provided with crucible body.Magnetic cover plate, lid is located at evaporation exit position, to cause crucible sheet
The deposition material in internal portion completely cuts off with outside air.Electromagnetic assembly, including magnet coil, are arranged in crucible body, electromagnetic wire
Circle can form magnetic field in the state of electric current is passed through, and the active force in magnetic field can push away magnetic cover plate evaporation outlet.In crucible
The evaporation exit lid of body sets magnetic cover plate, make it that deposition material completely cuts off outside air before heating evaporation, it is to avoid evaporation
Oxidation reaction occurs for material air, when heating is deposited with crucible and proceeds by evaporation operation, to the electromagnetism of electromagnetic assembly
Electric current is passed through in coil to form magnetic field, passes through control electric current polarity and intensity, you can by the active force in magnetic field by magnetic lid
Piece pushes away evaporation outlet, make it that deposition material exports outside evaporation by being deposited with, improves the controllability of magnetic cover plate,
Improve evaporation effect.
Brief description of the drawings
In order to illustrate more clearly about the embodiment of the present invention or technical scheme of the prior art, below will be to embodiment or existing
The accompanying drawing to be used needed for having technology description is briefly described, it should be apparent that, drawings in the following description are only this
Some embodiments of invention, for those of ordinary skill in the art, on the premise of not paying creative work, can be with
Other accompanying drawings are obtained according to these accompanying drawings.
Fig. 1 is a kind of structural representation for being deposited with crucible provided in an embodiment of the present invention；
Fig. 2 is passed through the polarity of current induced magnetic field for magnet coil and magnetic induction line moves towards schematic diagram；
Fig. 3 is a kind of set-up mode of the magnet coil in crucible body in evaporation crucible provided in an embodiment of the present invention
(Fig. 1 top view direction)；
Fig. 4 is another set-up mode of the magnet coil in crucible body in evaporation crucible provided in an embodiment of the present invention
(Fig. 1 top view direction)；
Fig. 5 for it is provided in an embodiment of the present invention evaporation crucible in electromagnetic assembly also including iron core structural representation (Fig. 1's
Top view direction)；
Fig. 6 also includes the structural representation of magnetically attractive part for provided in an embodiment of the present invention be deposited with crucible；
One of the structural representations of Fig. 7 also to include magnetic material layer in evaporation crucible provided in an embodiment of the present invention；
Fig. 8 is deposited with crucible also two of the structural representation including magnetic material layer to be provided in an embodiment of the present invention；
Fig. 9 is a kind of structural representation of vapor deposition source provided in an embodiment of the present invention；
Figure 10 is a kind of structural representation of evaporation coating device provided in an embodiment of the present invention；
Figure 11 is a kind of flow chart of evaporation coating method provided in an embodiment of the present invention.
Reference：
01- is deposited with crucible；02- vapor deposition sources；03- is deposited with chamber；04- motion bars；10- crucible bodies；20- magnetic cover plates；
30- deposition materials；40- electromagnetic assemblies；41- magnet coils；42- iron cores；50- magnetically attractive parts；60- magnetic material layers；W- magnetic
The thickness of cover plate；The outlet of a- evaporations.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete
Site preparation is described, it is clear that described embodiment is only a part of embodiment of the invention, rather than whole embodiments.It is based on
Embodiment in the present invention, it is every other that those of ordinary skill in the art are obtained under the premise of creative work is not made
Embodiment, belongs to the scope of protection of the invention.
The embodiment of the present invention provides a kind of evaporation crucible, as shown in figure 1, including：Crucible body 10, in crucible body 10
It is provided with least one evaporation outlet a.Magnetic cover plate 20, lid is located at evaporation outlet a positions, to cause inside crucible body 10
Deposition material 30 and outside air completely cut off.Electromagnetic assembly 40, including magnet coil 41, are arranged in crucible body 10, electromagnetism
Coil 41 can form magnetic field in the state of electric current is passed through, and the active force in magnetic field can push away magnetic cover plate 20 evaporation outlet a.
It should be noted that first, at least one evaporation outlet a is provided with crucible body 10, as shown in figure 1, earthenware
An evaporation outlet a is provided with crucible body 10, in addition it is also possible to be provided with multiple evaporation outlet a.It is right in the embodiment of the present invention
It is not specifically limited in the evaporation mode of vapor deposition source, point vapor deposition source, line vapor deposition source or face vapor deposition source.For a vapor deposition source,
As shown in figure 1, being provided with an evaporation outlet a in the upper surface of evaporation crucible 10, the gaseous state deposition material 30 of distillation evaporation is
By the evaporation outlet outside evaporation and diffusions of a, and it is deposited on the substrate to be deposited being arranged on outside evaporation outlet a, so as to realize pair
The evaporation of corresponding film layer on substrate to be deposited.For example, can be the upper table in crucible body 10 when vapor deposition source is line vapor deposition source
The multiple evaporations outlet a linearly arranged, crucible sheets of multiple evaporation outlet a with being provided with deposition material 30 are provided with face
The internal run-through of body 10, so, the gaseous state deposition material 30 for the evaporation that distils can pass through linearly aligned multiple evaporation outlet a
With the outside evaporation and diffusion of linear condition.Similarly, when vapor deposition source is face vapor deposition source, it is provided with the upper surface of crucible body 10
The multiple evaporations arranged in matrix form export a, and other set relation and evaporation process identical with line vapor deposition source, herein no longer
Repeat.
Second, crucible body 10 refers to being used to set deposition material 30 and causes evaporation by heating during evaporation
For crucible sheet in the accommodating and reaction chamber that material 30 is evaporated by heat sublimation and steamed by evaporation outlet a, the embodiment of the present invention
The other structures of body 10 are not specifically limited, for example, can be to be as shown in Figure 1 by passing through between lower cavity and upper cover
The structure that screw threads for fastening connector is fixedly connected, or other connected modes and structure, as long as evaporation material can be put into
Material 30 simultaneously enables to deposition material 30 to be steamed by evaporation outlet a in a heated state.
3rd, the embodiment of the present invention of size dimension and shape in to(for) magnetic cover plate 20 are not specifically limited, as long as
When ensureing that lid is located at evaporation outlet a, evaporation outlet a can be completely covered, to ensure the evaporation material inside crucible body 10
Material 30 will not export a and contacting external air by being deposited with, when being provided with multiple evaporation outlet a in crucible body 10,
Magnetic cover plate 20 can set one, and a magnetic cover plate 20 covers multiple evaporation outlet a simultaneously, can also set multiple, point
It is other that each evaporation outlet a correspondence is covered., can phase between multiple magnetic cover plates 20 when magnetic cover plate 20 is provided with multiple
Connect while pushed away from, can also individually be set under magnetic force, under magnetic force, multiple magnetic lids
Piece 20 individually pushed away from evaporation outlet a.In addition, at least include magnetic material in the material of magnetic cover plate 20, can be by
The active force absorption in magnetic field is repelled.
4th, the magnet coil 41 in electromagnetic assembly 40 can produce magnetic field in the state of electric current is passed through, and be passed through electricity
The direction of stream and size influence are produced in the force direction and intensity in magnetic field, the embodiment of the present invention for electric in electromagnetic assembly 40
The step mode of magnetic coil 41 is not specifically limited, and generally power connector end can be set outside crucible body 10, by leading
Line will be electrically connected between power connector end and magnet coil 41, and being passed through external control power supply to power connector end can control electromagnetism
The energization (power connection structure of magnet coil 41 not shown in Fig. 1) of coil 41.Crucible is deposited with heating and starts evaporation behaviour
When making, the distillation of deposition material 30 is evaporated and required diffusion concentration is reached inside crucible body 10, by controlling external control
The sense of current and size of power supply so that the magnetic force in direction as shown by the arrows in Figure 1 is produced in magnet coil 41, it is right
Magnetic cover plate 20 applies thrust, so that magnetic cover plate 20 pushed away from evaporation outlet a in the presence of magnetic force.Magnetic cover plate
20 are pushed away from after evaporation outlet a, and the deposition material 30 for the evaporation that distils can outwards be steamed by evaporation outlet a, and in base to be deposited
Deposition forms evaporation film layer on plate.
In addition, being located at the magnetic being deposited with outlet a to before heating is deposited with crucible and starts evaporation operation, improve lid
The closure of cover plate 20, can be with to reduce the risk that deposition material 30 inside crucible body 10 and air contact are aoxidized
Fixed-direction and the electric current of size are passed through to magnet coil 41 in advance so that the magnetic force that magnet coil 41 is produced is to magnetic
Cover plate 20 keeps a certain size absorption affinity, heating evaporation crucible and starts in vapor deposition source after evaporation operation, then change and be passed through
Electric current and direction in magnet coil 41, so as to change the direction of magnetic force so that magnetic force is to magnetic cover plate 20
Absorption affinity be changed into repulsive force, by magnetic cover plate 20 push away evaporation outlet a.
The embodiment of the present invention provides a kind of evaporation crucible, including：Crucible body, at least one is provided with crucible body
Evaporation outlet.Magnetic cover plate, lid is located at evaporation exit position, to cause the deposition material and outside air inside crucible body
Isolation.Electromagnetic assembly, including magnet coil, are arranged in crucible body, and magnet coil being capable of shape in the state of electric current is passed through
Into magnetic field, the active force in magnetic field can push away magnetic cover plate evaporation outlet.Magnetic lid is set in the evaporation exit lid of crucible body
Piece, make it that deposition material completely cuts off outside air before heating evaporation, it is to avoid oxidation reaction occurs for deposition material ingress of air,
When heating is deposited with crucible and proceeds by evaporation operation, electric current is passed through into the magnet coil of electromagnetic assembly to form magnetic field, is led to
Cross control electric current polarity and intensity, you can magnetic cover plate is pushed away by evaporation outlet by the active force in magnetic field, to be deposited with material
The material evaporation outside by being deposited with outlet, improves the controllability of magnetic cover plate, improves evaporation effect.
Specifically, as shown in figure 1, inwall of the magnet coil 41 along crucible body 10 is provided with one group, being passed through electric current
The force direction in the magnetic field of the formation of magnet coil 41 is perpendicular to the plane where magnetic cover plate 20 under state.
As shown in figure 1, inwall of one group of magnet coil 41 along crucible body 10 is set, corresponding pole is passed through to magnet coil 41
Property and size electric current so that produce corresponding magnetic pole and the magnetic fields between two magnetic poles at the two ends of magnet coil 41
Power, as shown in Fig. 2 dotted arrow is magnetic fields force direction, magnetic fields force direction is acting on the position of magnetic cover plate 20
Plane vertical or approximately perpendicular to the place of magnetic cover plate 20 is put, so that lid is located at the magnetic lid at evaporation outlet a positions
Piece 20 pushed away from evaporation outlet a under the impetus of magnetic force, to ensure the unlatching control to evaporation outlet a.
Optionally, as shown in figure 3, magnet coil 41 be provided with crucible body 10 it is multigroup, plurality of electromagnetic coil 41 it
Between be parallel to each other and by be deposited with outlet a centered on it is circumferentially disposed, in the state of electric current is passed through plurality of electromagnetic coil 41 formation
The force direction in magnetic field is each perpendicular to the plane where magnetic cover plate 20.
So, multigroup magnet coil 41 that is circumferentially disposed and being parallel to each other centered on being deposited with outlet a is passed through identical
Direction and the electric current of size, while formed perpendicular to the place plane of magnetic cover plate 20 and made towards the magnetic field in evaporation outlet a directions
Firmly, the magnetic force of plurality of electromagnetic coil 41 promotes magnetic cover plate 20 and magnetic cover plate 20 is pushed away into evaporation outlet a jointly.
In addition, when including multiple evaporation outlet a in crucible body 10, as shown in figure 4, including in crucible body 10
Three evaporation outlet a, wherein, magnetic cover plate 20 is respectively covered with each evaporation outlet a, in each evaporation outlet a
Place, circumferentially disposed multigroup magnet coil 41 being parallel to each other centered on being deposited with outlet a, to ensure each evaporation outlet a
The magnetic cover plate 20 that place is set can leave evaporation outlet a under the impetus of the magnetic force of magnet coil 41.
It is preferred that, as shown in figure 5, electromagnetic assembly 40 also includes the iron core 42 for being arranged on the center of magnet coil 41.
So, as shown in figure 5, passing through the centrally disposed iron core 42 in each magnet coil 41 so that composition
Electromagnetic assembly 40 is in the case where being passed through same current, and magnetic force is obtained compared to the electromagnetic assembly for only including magnet coil 41
To effective enhancing, thrust of the electromagnetic assembly 40 to magnetic cover plate 20 is improved.
Further, as shown in fig. 6, being located at the side periphery in crucible body 10 in evaporation outlet a is additionally provided with magnetically attractive
Part 50, the absorption magnetic of magnetically attractive part 50 cover plate 20.
Magnetically attractive part 50 can produce adsorption to magnetic material, and the material of magnetic cover plate 20 includes the material that is magnetic
Material, therefore, magnetically attractive part 50 can adsorb magnetic cover plate 20.So, deposition material 30 is being put into crucible body 10
Afterwards, lid is located at the magnetic cover plate 20 being deposited with outlet a positions by the adsorption of magnetically attractive part 50, can be with being deposited with out
Closing is compressed between mouth a, so as to before heating is deposited with crucible and starts to be deposited with operation, improve magnetic cover plate 20 to deposition material
30 sealing function.On this basis, heating is deposited with crucible and started after evaporation operation in vapor deposition source, and electromagnetic assembly 40 needs
While overcoming magnetically attractive part 50 to the adsorption of magnetic cover plate 20, it is further provided the thrust to magnetic cover plate 20 is made
With to enable magnetic cover plate 20 to pushed away from evaporation outlet a.
It is preferred that, as shown in fig. 6, magnetically attractive part 50 is flaky magnet.Flaky magnet can form the electricity in magnetic field to be powered
Magnet, or the permanent magnet of sheet.
So, the electromagnet or permanent magnet of sheet are used as magnetically attractive part 50, on the one hand, can reduce to crucible body
10 inner spaces are tied up；On the other hand, the acting surface between magnetically attractive part 50 and magnetic cover plate 20 can be increased as far as possible
Product, so as to improve adsorption of the magnetically attractive part 50 to magnetic cover plate 20.
It should be noted that the electromagnetic assembly 40 and magnetically attractive part 50 that are arranged on inside crucible body 10, when making
The material used is usually the deposition material 30 that the fusing points such as iron, copper are far above active metal, therefore, inside to crucible body 10
Deposition material 30 carry out heating evaporation during, be arranged on electromagnetic assembly 40 and magnetically attractive part inside crucible body 10
50 will not occur distillation evaporation in the case of heated, crucible body 10 will not be caused damage, evaporation is not interfered with equally yet
The purity of the deposition material 30 of state.
It is preferred that, as shown in fig. 7, evaporation outlet a is at least provided with magnetic in the marginal portion being in contact with magnetic cover plate 20
Property material layer 60.
Under normal circumstances, crucible body 10 can be made by the higher metal of a variety of fusing points or non-metallic material.Work as earthenware
When crucible body 10 is the non magnetic material in nonmetallic materials or metal material, in order to improve magnetically attractive part 50 to magnetic cover plate 20
Adsorption, be provided with magnetic material layer 60 at the evaporation outlet a positions in the outside of crucible body 10, wherein, magnetic material
The bed of material 60 is arranged at the marginal portion that evaporation outlet a is in contact with magnetic cover plate 20.
It should be noted that as shown in fig. 7, it is the through hole directly processed in the upper surface of crucible body 10 to work as evaporation outlet a
When, magnetic material layer 60 is arranged at evaporation outlet a and refers to and be deposited with out with the marginal portion that magnetic cover plate 20 is in contact
Mouth a peripheries and the subregion being in contact with magnetic material layer 60.Under normal circumstances, can be by the area surface of magnetic material layer 60
The area slightly larger than magnetic cover plate 20 that product is set, as shown in figure 8, working as evaporation outlet a to protrude from the upper surface of crucible body 10
And during spout with the internal run-through of crucible body 10, magnetic material layer 60 is arranged at evaporation outlet a and the phase of magnetic cover plate 20
The marginal portion of contact refers to the position enclosed along the edge one of evaporation outlet a spout thickness.For example, it is preferable to, it can make
With center there is the adsorbent sheet with evaporation outlet a through holes of the same size to be used as magnetic material layer 60.
It is preferred that, as shown in fig. 7, the thickness W of magnetic cover plate 20 is arranged between 0.1mm-5mm.
So, on the one hand, ensure that 20 couples of evaporation outlet a of magnetic cover plate closure；On the other hand, magnetic is reduced
The own wt of property cover plate 20.If the thickness W of magnetic cover plate 20 is less than 0.1mm, may be due to the thickness W mistakes of magnetic cover plate 20
It is thin, it is difficult to ensure to export evaporation a closing, and easily because the influence of external environment causes magnetic cover plate 20 to offset or fall
Fall.If the thickness W of magnetic cover plate 20 is more than 5mm, may be blocked up due to the thickness W of magnetic cover plate 20, cause its own weight big,
Being accomplished by electromagnetic assembly 40 provides larger electric current generation stronger magnetic force, magnetic cover plate 20 can be pushed away into evaporation
A is exported, increases the power consumption of electromagnetic assembly 40, in addition, being also easy to cause because magnetic force is not enough, is failed magnetic lid in time
The problem of piece 20 pushes away evaporation outlet a.
It is preferred that, the material of crucible body 10 includes aluminium nitride, boron nitride, titanium and its alloy.
Crucible body 10 is using the material of aluminium nitride, boron nitride, titanium and its alloy is included, in heating crucible body 10,
The Stability Analysis of Structures of crucible body 10, will not be adversely affected to evaporation process.
The another aspect of the embodiment of the present invention is there is provided a kind of vapor deposition source, as shown in figure 9, the evaporation including any of the above-described
Crucible 01.
The vapor deposition source of the embodiment of the present invention, includes the evaporation crucible 01 of any of the above-described, when the evaporation of the embodiment of the present invention
When source is operated for the evaporation process that adulterates, multiple evaporation crucibles 01 can also be included.For example, vapor deposition source as shown in Figure 9, including
Two evaporation crucibles 01.Wherein, the deposition material 30 placed in two evaporation crucibles 01 can be different material.Such one
Come, when the vapor deposition source using the embodiment of the present invention is doped evaporation operation, be put into steaming in two evaporation crucibles 01 respectively
Two kinds of different deposition materials needed for film forming are plated, magnetic cover plate are covered at the evaporation outlet a of two evaporation crucibles 01 respectively
20.Then two evaporation crucibles 01 are being placed into evaporation chamber side by side and heated, heating reaches uniform temperature and evaporation crucible
The distillation evaporation of deposition material 30 in 01, which reaches, starts evaporation operation after certain diffusion concentration, now pass through electromagnetic assembly respectively
Magnetic cover plate 20 is pushed away evaporation outlet a by 40 so that the deposition material 30 of the evaporating state in evaporation crucible 01 can be by steaming
Plating outlet a is outwards steamed, and is deposited on substrate to be deposited, you can form the doping evaporation film doped with two kinds of deposition materials 30
Layer.
The another further aspect of the embodiment of the present invention as shown in Figure 10, including is deposited with chamber 03, also there is provided a kind of evaporation coating device
Including the above-mentioned vapor deposition source 02 being arranged in evaporation chamber 03.Motion bar 04, motion bar are additionally provided with evaporation chamber 03
04 is fixedly connected with magnetic cover plate 20, and magnetic cover plate 20 can be driven to be moved horizontally in evaporation chamber 03.
As shown in Figure 10, motion bar 04, the other end and the magnetic cover plate of motion bar 04 are internally provided with evaporation chamber 03
20 are fixedly connected, by adjusting moving horizontally for motion bar 04, can drive the magnetic cover plate 20 being fixedly connected therewith in evaporation
Moved horizontally in chamber 03.So, on the one hand, the magnetic force that produces is by magnetic cover plate after the energization of electromagnetic assembly 40
20 push away evaporation outlet a when, because magnetic cover plate 20 is connected with motion bar 04, motion bar 04 can limit the shifting of magnetic cover plate 20
Dynamic position, it is to avoid magnetic cover plate 20 is flown out in crucible body 10 in the case where the thrust being subject to is larger by evaporation outlet a
Wall causes impact damage, after the magnetic force of electromagnetic assembly 40 promotes magnetic cover plate 20 to depart from evaporation outlet a, control activity
Bar 03 drives magnetic cover plate 20 to move horizontally the region left where evaporation outlet.On the other hand, by controlling motion bar
04, to control the movement of magnetic cover plate 20, can be such that magnetic cover plate 20 is used as the anti-shield at evaporation outlet a, so that no longer
Need additionally to set anti-shield in evaporation coating device.Such as being run into during evaporation needs steaming for interim interruption deposition material 30
Or during analogue, need to only control motion bar 04 to drive magnetic cover plate 20 to move back at evaporation outlet a, you can to evaporation outlet a
Blocked.Because the effect of electromagnetic assembly 40 is to produce magnetic force in the energized state magnetic cover plate 20 is pushed away into evaporation
Export a, therefore, magnetic cover plate 20 is pushed away evaporation outlet a after electromagnetic assembly 40 stop energization, that is, no longer produce to
Magnetic cover plate 20, is now moved back at evaporation outlet a and evaporation outlet a is carried out by the magnetic force of upper promotion by motion bar 04
When blocking, magnetic cover plate 20 can be realized blocks closing to evaporation outlet a.
In addition, in evaporation operating process, by motion bar 04 using magnetic cover plate 20 as anti-shield in use, equally
In order to improve the closure that 20 pairs of evaporations of magnetic cover plate export a absorption can be provided by magnetically attractive part 50 to magnetic cover plate 20
Effect, and when needing to remove anti-shield, magnetic cover plate 20 is provided by electromagnetic assembly 40 and pushes away effect.
The another further aspect of the embodiment of the present invention is there is provided a kind of evaporation coating method, as shown in figure 11, including, S101, in indifferent gas
Deposition material 30 is filled under body environment into crucible body 10, lid is set at the evaporation outlet a of crucible body 10 after the completion of filling
Magnetic cover plate 20, make it that the deposition material 30 in crucible body 10 completely cuts off with outside air.S102, will evaporation crucible 01 move into
It is deposited with chamber 03, heating evaporation crucible 01, the deposition material 30 in crucible body 10 is by thermal evaporation.S103, to electromagnetic assembly
40 magnet coil 41 is passed through electric current formation magnetic field, the active force in magnetic field magnetic cover plate 20 is pushed away into evaporation outlet a with cause by
Thermal evaporation deposition material 30 is outwards evaporated by being deposited with outlet a.
As shown in figure 11, when carrying out evaporation operation to substrate to be deposited, first in an inert atmosphere to crucible sheet
Filling deposition material 30 in body 10, because deposition material 30 is usually some active metal materials, such as lithium (Li), calcium (Ca)
Deng when being contacted with the oxygen in air easily the structure of matter and work(after oxidation reaction, oxidation occur for these active metal materials
Can act on can all change, it is therefore desirable to be filled in the environment of inert gas, moreover, in crucible body after the completion of filling
Lid sets magnetic cover plate 20 at 10 evaporation outlet a, make it that the deposition material 30 in crucible body 10 completely cuts off with outside air, to the greatest extent
It is possible to avoid deposition material 30 from being contacted with the oxygen in outside air and occur oxidation reaction.By the evaporation crucible of closed state
After 01 moves into evaporation chamber 03, heating evaporation crucible 01, deposition material 30 in crucible body 10 is distilled by thermal evaporation
Gaseous state is evaporated to, gaseous deposition material 30 spreads in the inner space of crucible body 10, increases over time crucible body 10
The concentration of gaseous deposition material 30 of inner space is improved constantly, the shape needed for the gaseous concentration of deposition material 30 reaches film forming
During state, electric current formation magnetic field is passed through to the magnet coil 41 of electromagnetic assembly 40, magnetic cover plate 20 is pushed away steaming by the active force in magnetic field
Plating outlet a, is pushed away after magnetic cover plate 20, and evaporation outlet a is connected with extraneous evaporation chamber 03, by thermal evaporation deposition material 30
Outwards evaporated, and be gradually deposited on substrate to be deposited, the film layer formed needed for evaporation by being deposited with outlet a.
During substrate film forming to be deposited, such as running into needs steaming or analogue for interim interruption deposition material 30
When, the movement of motion bar 04 can be controlled, to drive magnetic cover plate 20 to be moved horizontally at evaporation outlet a, evaporation outlet a is entered
Row is blocked, when magnetic cover plate 20 blocks evaporation outlet a, stops outwards steaming gaseous deposition material 30 at evaporation outlet a.Treat
Motion bar 04 is driven after magnetic cover plate 20 moves horizontally and leave at evaporation outlet a, and gaseous deposition material 30 recovers to be gone out by evaporation
The state that mouth a is outwards steamed and deposited on substrate to be deposited.Above-mentioned for being deposited with crucible, vapor deposition source and evaporation coating device
In the illustrating of structural relation and the course of work, it is described in detail for evaporation coating method, here is omitted.
The foregoing is only a specific embodiment of the invention, but protection scope of the present invention is not limited thereto, any
Those familiar with the art the invention discloses technical scope in, change or replacement can be readily occurred in, should all be contained
Cover within protection scope of the present invention.Therefore, protection scope of the present invention should be based on the protection scope of the described claims.
Claims (10)
1. one kind evaporation crucible, it is characterised in that including：
Crucible body, is provided with least one evaporation outlet in the crucible body；
Magnetic cover plate, lid is located at the evaporation exit position, to cause the deposition material inside the crucible body and the external world
Air exclusion；
Electromagnetic assembly, including magnet coil, are arranged in the crucible body, and the magnet coil is in the state of electric current is passed through
Magnetic field can be formed, the active force in the magnetic field can push away the magnetic cover plate evaporation outlet.
2. evaporation crucible according to claim 1, it is characterised in that inwall of the magnet coil along the crucible body
One group is provided with, the force direction in the magnetic field of the magnet coil formation is perpendicular to the magnetic in the state of electric current is passed through
Plane where cover plate.
3. evaporation crucible according to claim 1, it is characterised in that the magnet coil is set in the crucible body
Have multigroup, be parallel to each other between multigroup magnet coil and circumferentially disposed centered on the evaporation outlet, be passed through electric current
In the state of the force direction in magnetic field of multigroup magnet coil formation be each perpendicular to plane where the magnetic cover plate.
4. evaporation crucible according to claim 3, it is characterised in that the electromagnetic assembly also includes being arranged on the electromagnetism
The iron core of hub of a spool.
5. evaporation crucible according to claim 1, it is characterised in that be located in the evaporation outlet in the crucible body
A side periphery be additionally provided with magnetically attractive part, the magnetically attractive part adsorbs magnetic cover plate.
6. evaporation crucible according to claim 5, it is characterised in that the evaporation outlet at least with the magnetic cover plate
The marginal portion being in contact is provided with magnetic material layer.
7. evaporation crucible according to claim 1, it is characterised in that the thickness of the magnetic cover plate 0.1mm-5mm it
Between.
8. a kind of vapor deposition source, it is characterised in that including the evaporation crucible as described in claim any one of 1-7.
9. a kind of evaporation coating device, it is characterised in that including evaporation chamber, also including be arranged in the evaporation chamber such as right
It is required that the vapor deposition source described in 8；
Motion bar is additionally provided with the evaporation chamber, the motion bar is fixedly connected with the magnetic cover plate, and can be driven
The magnetic cover plate is moved horizontally in the evaporation chamber.
10. a kind of evaporation coating method, it is characterised in that including,
Deposition material is filled into crucible body in an inert atmosphere, is gone out after the completion of filling in the evaporation of the crucible body
Lid sets magnetic cover plate at mouthful, make it that the deposition material in the crucible body completely cuts off with outside air；
Evaporation crucible is moved into evaporation chamber, the deposition material in the evaporation crucible, the crucible body is heated by hot gas
Change；
Electric current formation magnetic field is passed through to the magnet coil of electromagnetic assembly, the magnetic cover plate is pushed away the steaming by the active force in magnetic field
Plating is exported so as to must be passed through the evaporation outlet outwards evaporation by the thermal evaporation deposition material.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710370616.1A CN106947944A (en) | 2017-05-23 | 2017-05-23 | One kind evaporation crucible, vapor deposition source, evaporation coating device and evaporation coating method |
| PCT/CN2018/086845 WO2018214783A1 (en) | 2017-05-23 | 2018-05-15 | Vapor deposition crucible, vapor deposition source, vapor deposition device, and vapor deposition method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710370616.1A CN106947944A (en) | 2017-05-23 | 2017-05-23 | One kind evaporation crucible, vapor deposition source, evaporation coating device and evaporation coating method |
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| Publication Number | Publication Date |
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| CN106947944A true CN106947944A (en) | 2017-07-14 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201710370616.1A Pending CN106947944A (en) | 2017-05-23 | 2017-05-23 | One kind evaporation crucible, vapor deposition source, evaporation coating device and evaporation coating method |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN106947944A (en) |
| WO (1) | WO2018214783A1 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107502864A (en) * | 2017-08-17 | 2017-12-22 | 京东方科技集团股份有限公司 | A kind of crucible cover and its cover method and crucible |
| WO2018214783A1 (en) * | 2017-05-23 | 2018-11-29 | 京东方科技集团股份有限公司 | Vapor deposition crucible, vapor deposition source, vapor deposition device, and vapor deposition method |
| CN110098144A (en) * | 2019-04-11 | 2019-08-06 | 深圳市华星光电半导体显示技术有限公司 | A kind of crucible fetching device |
| CN114182209A (en) * | 2022-01-18 | 2022-03-15 | 福建华佳彩有限公司 | OLED material evaporation crucible device and use method thereof |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114423881A (en) * | 2019-09-19 | 2022-04-29 | 应用材料公司 | Evaporation source, shutter device and evaporation method |
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Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3524426A (en) * | 1968-02-29 | 1970-08-18 | Libbey Owens Ford Glass Co | Apparatus for coating by thermal evaporation |
| JP2003129229A (en) * | 2001-10-23 | 2003-05-08 | Toray Ind Inc | Method and apparatus for producing film with metal oxide film |
| CN202559877U (en) * | 2012-03-05 | 2012-11-28 | 北京华兴长泰物联网技术研究院有限责任公司 | Box cover locking device, controllable storage box comprising the device, and medicine and consumable access system |
| CN102994787A (en) * | 2012-12-10 | 2013-03-27 | 西安诺博尔稀贵金属材料有限公司 | Method for vacuum melting of silver cadmium alloy ingot |
| CN103695847A (en) * | 2013-12-24 | 2014-04-02 | 京东方科技集团股份有限公司 | Crucible and evaporation method thereof |
| CN104988462A (en) * | 2015-07-23 | 2015-10-21 | 京东方科技集团股份有限公司 | Crucible device |
| CN105129424A (en) * | 2015-09-27 | 2015-12-09 | 黄山学院 | Automatic feed device |
| CN105200373A (en) * | 2015-09-14 | 2015-12-30 | 京东方科技集团股份有限公司 | Filling device and filling method for evaporation system of organic light emitting diode (OLED) |
| CN206126643U (en) * | 2016-08-30 | 2017-04-26 | 无锡舜阳新能源科技股份有限公司 | Electro -magnet actuation formula crucible hoist |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1047868C (en) * | 1996-11-07 | 1999-12-29 | 神达电脑股份有限公司 | Electromagnetic switch for electronic product |
| CN2497249Y (en) * | 2001-09-19 | 2002-06-26 | 广东科龙电器股份有限公司 | Automatic-opening refrigerator |
| JP2006059640A (en) * | 2004-08-19 | 2006-03-02 | Tdk Corp | Vapor deposition device and vapor deposition method |
| JP2011052301A (en) * | 2009-09-04 | 2011-03-17 | Hitachi Zosen Corp | Evaporation/sublimation method for vapor deposition material for vacuum deposition, and crucible apparatus for vacuum deposition |
| JP2013211138A (en) * | 2012-03-30 | 2013-10-10 | Hitachi High-Technologies Corp | Evaporation source and vacuum deposition device using the same |
| KR101520639B1 (en) * | 2013-05-31 | 2015-05-15 | 에스엔유 프리시젼 주식회사 | Apparatus for vaporization using induction heating and system for vaccum deposition including the same |
| CN205774774U (en) * | 2016-06-22 | 2016-12-07 | 合肥鑫晟光电科技有限公司 | A kind of evaporation coating device |
| CN106947944A (en) * | 2017-05-23 | 2017-07-14 | 京东方科技集团股份有限公司 | One kind evaporation crucible, vapor deposition source, evaporation coating device and evaporation coating method |
-
2017
- 2017-05-23 CN CN201710370616.1A patent/CN106947944A/en active Pending
-
2018
- 2018-05-15 WO PCT/CN2018/086845 patent/WO2018214783A1/en active Application Filing
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3524426A (en) * | 1968-02-29 | 1970-08-18 | Libbey Owens Ford Glass Co | Apparatus for coating by thermal evaporation |
| JP2003129229A (en) * | 2001-10-23 | 2003-05-08 | Toray Ind Inc | Method and apparatus for producing film with metal oxide film |
| CN202559877U (en) * | 2012-03-05 | 2012-11-28 | 北京华兴长泰物联网技术研究院有限责任公司 | Box cover locking device, controllable storage box comprising the device, and medicine and consumable access system |
| CN102994787A (en) * | 2012-12-10 | 2013-03-27 | 西安诺博尔稀贵金属材料有限公司 | Method for vacuum melting of silver cadmium alloy ingot |
| CN103695847A (en) * | 2013-12-24 | 2014-04-02 | 京东方科技集团股份有限公司 | Crucible and evaporation method thereof |
| CN104988462A (en) * | 2015-07-23 | 2015-10-21 | 京东方科技集团股份有限公司 | Crucible device |
| CN105200373A (en) * | 2015-09-14 | 2015-12-30 | 京东方科技集团股份有限公司 | Filling device and filling method for evaporation system of organic light emitting diode (OLED) |
| CN105129424A (en) * | 2015-09-27 | 2015-12-09 | 黄山学院 | Automatic feed device |
| CN206126643U (en) * | 2016-08-30 | 2017-04-26 | 无锡舜阳新能源科技股份有限公司 | Electro -magnet actuation formula crucible hoist |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2018214783A1 (en) * | 2017-05-23 | 2018-11-29 | 京东方科技集团股份有限公司 | Vapor deposition crucible, vapor deposition source, vapor deposition device, and vapor deposition method |
| CN107502864A (en) * | 2017-08-17 | 2017-12-22 | 京东方科技集团股份有限公司 | A kind of crucible cover and its cover method and crucible |
| CN107502864B (en) * | 2017-08-17 | 2019-08-23 | 京东方科技集团股份有限公司 | A kind of crucible cover and its lid conjunction method and crucible |
| CN110098144A (en) * | 2019-04-11 | 2019-08-06 | 深圳市华星光电半导体显示技术有限公司 | A kind of crucible fetching device |
| CN110098144B (en) * | 2019-04-11 | 2021-07-23 | 深圳市华星光电半导体显示技术有限公司 | Crucible taking and placing device |
| CN114182209A (en) * | 2022-01-18 | 2022-03-15 | 福建华佳彩有限公司 | OLED material evaporation crucible device and use method thereof |
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| Publication number | Publication date |
|---|---|
| WO2018214783A1 (en) | 2018-11-29 |
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Application publication date: 20170714 |