WO2018214783A1

WO2018214783A1 - Vapor deposition crucible, vapor deposition source, vapor deposition device, and vapor deposition method

Info

Publication number: WO2018214783A1
Application number: PCT/CN2018/086845
Authority: WO
Inventors: 罗程远
Original assignee: 京东方科技集团股份有限公司
Priority date: 2017-05-23
Filing date: 2018-05-15
Publication date: 2018-11-29
Also published as: CN106947944A

Abstract

Embodiments of the present invention provide a vapor deposition crucible, a vapor deposition source, a vapor deposition device, and a vapor deposition method, pertaining to the field of vacuum evaporation film deposition, and solving the problem of a negative impact on vapor deposition processes resulting from the inability to effectively control the opening time of exhaust valves in existing vapor deposition crucibles. The crucible comprises: a crucible body provided with at least one vapor deposition outlet; a magnetic cover piece disposed at the position of the vapor deposition outlet to isolate a vapor deposition material inside the crucible body from the outside air; an electromagnetic assembly comprising an electromagnetic coil and disposed in the crucible body, the electromagnetic coil being capable of forming a magnetic field when a current flows therethrough, and the force of the magnetic field being capable of pushing the magnetic cover piece away from the vapor deposition outlet.

Description

Evaporating rhodium, vapor deposition source, vapor deposition device and evaporation method

Technical field

The invention relates to the field of vacuum evaporation coating, in particular to an evaporation ruthenium, an evaporation source, an evaporation device and an evaporation method.

Background technique

Vacuum evaporation coating refers to a process of forming a coating on a low temperature workpiece or substrate surface by heating or evaporating or sublimating the material to be film formed in a vacuum environment. After the film-forming material is heated to evaporate or sublimate inside the vapor-deposited crucible, it is raised and sent out through the evaporation outlet above the vapor-deposited crucible, and the vapor-deposited substrate is statically fixed at the vapor deposition outlet or uniformly passed through the evaporation outlet, and evaporated. After the film-forming material leaves the evaporation crucible, the temperature is gradually lowered, and the speed of the evaporation movement is gradually lowered, and finally a film layer is deposited on the surface of the substrate to be vapor-deposited. For an organic display device, such as an Organic Light-Emitting Diode (OLED), the main fabrication process of the light-emitting layer is a vacuum evaporation coating.

During the evaporation process, it is often necessary to use some active metal as the evaporation material. The active metal is easily oxidized with air in the atmosphere, and the active metal is oxidized and then evaporated and deposited on the surface of the substrate to be vapor-deposited. It can adversely affect the functional realization of OLED devices and even lead to failure of OLED devices.

In the invention patent of CN103695847B, a crucible and an evaporation method thereof are provided, and an exhaust hole and an exhaust valve matched with the exhaust hole are arranged at the top of the plug, and the crucible is filled in an inert gas atmosphere. After the plating material is closed, the crucible outlet is closed, and the crucible of the closed outlet is placed in the evaporation chamber to form a vacuum environment. The pressure inside the vapor deposition crucible is stronger than the pressure of the vacuum evaporation chamber, and the exhaust valve pushes the bouncing to open the crucible outlet to The evaporation material is evaporated outward and the film evaporation on the substrate to be vapor-deposited is completed.

However, when the vapor deposition ruthenium is vapor-deposited in the vapor deposition chamber, the exhaust valve can only be pushed by the internal and external pressure difference, including uncertainty, and it is difficult to effectively control the opening of the exhaust valve, if the exhaust valve If the closure is too tight or the pressure difference is small, it may cause the exhaust valve to fail to open in time and even affect the evaporation process.

Summary of the invention

Embodiments of the present invention provide an evaporation ruthenium, a vapor deposition source, a vapor deposition device, and an evaporation method, which can solve the problem that the existing vapor deposition ruthenium cannot effectively control the opening time of the exhaust valve, thereby affecting the vapor deposition process.

In order to achieve the above object, embodiments of the present invention adopt the following technical solutions:

In an aspect of an embodiment of the present invention, an evaporation crucible is provided, comprising: a crucible body, wherein at least one vapor deposition outlet is disposed on the crucible body. The magnetic cover sheet is disposed at the vapor deposition outlet position to isolate the vapor deposition material inside the crucible body from the outside air. The electromagnetic component, including the electromagnetic coil, is disposed in the body of the body, and the electromagnetic coil can form a magnetic field under the state of passing current, and the force of the magnetic field can push the magnetic cover piece away from the evaporation outlet.

Specifically, the electromagnetic coil is disposed along the inner wall of the crucible body, and the direction of the magnetic field formed by the electromagnetic coil is perpendicular to the plane of the magnetic cover sheet when the current is supplied.

Optionally, the electromagnetic coil is provided with a plurality of groups in the body of the cymbal, and the plurality of sets of electromagnetic coils are parallel to each other and are circumferentially disposed with the vapor deposition outlet as a center, and the magnetic field formed by the plurality of sets of electromagnetic coils under the state of passing current The force directions are perpendicular to the plane in which the magnetic cover sheets are located.

Preferably, the electromagnetic assembly further includes an iron core disposed at a center of the electromagnetic coil.

Further, a magnetic absorbing member is further disposed around a side of the vapor deposition outlet located in the sputum body, and the magnetic absorbing member adsorbs the magnetic cover sheet.

Preferably, the vapor deposition outlet is provided with a magnetic material layer at least at an edge portion in contact with the magnetic cover sheet.

Preferably, the magnetic cover sheet has a thickness of between 0.1 mm and 5 mm.

In another aspect of an embodiment of the present invention, there is provided an evaporation source comprising the vapor deposition crucible of any of the above.

In still another aspect of an embodiment of the present invention, an evaporation apparatus is provided, including an evaporation chamber, and further comprising the vapor deposition source disposed in the evaporation chamber. A movable rod is further disposed in the vapor deposition chamber, and the movable rod is fixedly connected with the magnetic cover sheet, and can move the magnetic cover sheet horizontally in the evaporation chamber.

According to still another aspect of the present invention, there is provided an evaporation method comprising: filling a vapor deposition material into a crucible body under an inert gas atmosphere, and covering the vapor deposition outlet of the crucible body with a magnetic cover sheet after filling is completed, The evaporation material in the body is isolated from the outside air. The vapor deposition crucible is transferred into the vapor deposition chamber, and the vapor deposition material is heated and vaporized, and the vapor deposition material in the crucible body is heated and vaporized. A current is applied to the electromagnetic coil of the electromagnetic component to form a magnetic field, and the force of the magnetic field pushes the magnetic cover sheet away from the evaporation outlet such that the vaporized material that is heated and vaporized evaporates outward through the evaporation outlet.

Embodiments of the present invention provide a vapor deposition crucible, an evaporation source, a vapor deposition device, and an evaporation method, including: a crucible body having at least one vapor deposition outlet disposed on the crucible body. The magnetic cover sheet is disposed at the vapor deposition outlet position to isolate the vapor deposition material inside the crucible body from the outside air. The electromagnetic component, including the electromagnetic coil, is disposed in the body of the body, and the electromagnetic coil can form a magnetic field under the state of passing current, and the force of the magnetic field can push the magnetic cover piece away from the evaporation outlet. A magnetic cover sheet is disposed at the vapor deposition outlet of the crucible body, so that the vapor deposition material is insulated from the outside air before heating and evaporating, and the evaporation reaction material is prevented from being exposed to the air, and when the evaporation is performed and the vapor deposition operation is started, By inputting a current into the electromagnetic coil of the electromagnetic component to form a magnetic field, by controlling the polarity and intensity of the current, the magnetic cover sheet can be pushed away from the evaporation outlet by the force of the magnetic field, so that the evaporation material passes through the evaporation outlet. The evaporation improves the controllability of the magnetic cover sheet and enhances the evaporation effect.

DRAWINGS

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the embodiments or the description of the prior art will be briefly described below. Obviously, the drawings in the following description are only It is a certain embodiment of the present invention, and other drawings can be obtained from those skilled in the art without any creative work.

1 is a schematic structural view of an evaporating crucible according to an embodiment of the present invention;

2 is a schematic diagram showing the polarity of the magnetic field generated by the electromagnetic coil and the magnetic line direction;

FIG. 3 is a schematic view showing the arrangement of the electromagnetic coil in the vapor deposition crucible in the crucible body according to the embodiment of the present invention (the top view direction of FIG. 1);

4 is another arrangement manner of the electromagnetic coil in the vapor deposition crucible in the crucible body according to the embodiment of the present invention (the top view direction of FIG. 1);

5 is a schematic structural view of an electromagnetic component in an evaporation crucible further including an iron core according to an embodiment of the present invention (the top view direction of FIG. 1);

6 is a schematic structural view of a vapor deposition crucible further including a magnetic absorbing member according to an embodiment of the present invention;

FIG. 7 is a schematic structural diagram of a layer of a magnetic material further included in an evaporation crucible according to an embodiment of the present invention; FIG.

FIG. 8 is a second schematic structural diagram of a layer of a magnetic material in an evaporation crucible according to an embodiment of the present invention; FIG.

FIG. 9 is a schematic structural diagram of an evaporation source according to an embodiment of the present invention; FIG.

FIG. 10 is a schematic structural diagram of an evaporation device according to an embodiment of the present invention; FIG.

FIG. 11 is a flowchart of an evaporation method according to an embodiment of the present invention.

Reference mark:

01-vapor deposition 02; 02-vapor deposition source; 03- evaporation chamber; 04-motion rod; 10-坩埚 body; 20-magnetic cover sheet; 30-vapor deposition material; 40-electromagnetic assembly; 42-core; 50-magnetic absorbing member; 60-magnetic material layer; W-magnetic cover sheet thickness; a-vapor deposition outlet.

detailed description

The technical solutions in the embodiments of the present invention are clearly and completely described in the following with reference to the accompanying drawings in the embodiments of the present invention. It is obvious that the described embodiments are only a part of the embodiments of the present invention, but not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without creative efforts are within the scope of the present invention.

An embodiment of the present invention provides an evaporation crucible, as shown in FIG. 1, comprising: a crucible body 10, and at least one vapor deposition outlet a is disposed on the crucible body 10. The magnetic cover sheet 20 is disposed at a position of the vapor deposition outlet a such that the vapor deposition material 30 inside the crucible body 10 is isolated from the outside air. The electromagnetic assembly 40, including the electromagnetic coil 41, is disposed in the crucible body 10, and the electromagnetic coil 41 can form a magnetic field in a state in which a current is supplied, and the force of the magnetic field can push the magnetic cover sheet 20 away from the vapor deposition outlet a.

It should be noted that, first, at least one vapor deposition outlet a is disposed on the crucible body 10, and as shown in FIG. 1, the crucible body 10 is provided with one vapor deposition outlet a, and further, a plurality of vapor deposition may be provided. Exit a. In the embodiment of the present invention, the vapor deposition method for the vapor deposition source is not particularly limited, and the point evaporation source, the line evaporation source, or the surface evaporation source may be used. For the dot evaporation source, as shown in FIG. 1, a vapor deposition outlet a is provided on the upper surface of the vapor deposition crucible 10, and the vapor evaporated vapor deposition material 30 is evaporated and diffused outward from the vapor deposition outlet a, and is deposited on It is disposed on the substrate to be vapor-deposited outside the vapor deposition outlet a to realize vapor deposition of the corresponding film layer on the substrate to be vapor-deposited. For example, when the vapor deposition source is a wire evaporation source, a plurality of vapor deposition outlets a linearly arranged may be disposed on the upper surface of the crucible body 10, and the plurality of vapor deposition outlets a are provided with the vapor deposition material 30. The crucible body 10 is internally penetrated, so that the sublimated vaporized vapor deposition material 30 can be evaporated and diffused outward in a linear state by a plurality of vapor deposition outlets a linearly arranged. Similarly, when the vapor deposition source is a surface vapor deposition source, a plurality of vapor deposition outlets a arranged in a matrix form are disposed on the upper surface of the crucible body 10, and other arrangement relationships and vapor deposition processes are the same as the line evaporation source. I will not repeat them here.

Second, the crucible body 10 refers to a housing and reaction chamber for setting the vapor deposition material 30 and evaporating the vapor deposition material 30 by heat sublimation during evaporation in the vapor deposition process and evaporating from the vapor deposition outlet a. In the embodiment, the other structure of the cymbal body 10 is not specifically limited. For example, it may be a structure in which the lower cavity and the upper cover are fixedly connected by a screw fastening connector as shown in FIG. 1 , and may be other structures. The connection method and structure may be such that the vapor deposition material 30 can be placed in the vapor deposition material 30 and the vapor deposition material 30 can be distilled out from the vapor deposition outlet a.

Thirdly, in the embodiment of the present invention, the size and shape of the magnetic cover sheet 20 are not specifically limited. As long as the cover is provided at the vapor deposition outlet a, the vapor deposition outlet a can be completely covered to ensure the interior of the crucible body 10. The vapor deposition material 30 does not contact the outside air through the vapor deposition outlet a. When the plurality of vapor deposition outlets a are disposed on the crucible body 10, one of the magnetic cover sheets 20 may be disposed, and one magnetic cover sheet 20 is simultaneously covered. A plurality of vapor deposition outlets a may be provided, and each of the vapor deposition outlets a may be covered. When a plurality of magnetic cover sheets 20 are disposed, the plurality of magnetic cover sheets 20 may be connected to each other to be pushed away simultaneously under the action of a magnetic field, or may be separately provided, and a plurality of magnetic cover sheets may be separately provided under a magnetic field force. 20 can be pushed away from the vapor deposition outlet a alone. Further, the material of the magnetic cover sheet 20 includes at least a magnetic material and can be adsorbed or repelled by the force of the magnetic field.

Fourthly, the electromagnetic coil 41 in the electromagnetic assembly 40 can generate a magnetic field in a state in which a current is supplied, and the direction and magnitude of the current flowing affect the direction and strength of the force generating the magnetic field, which is in the electromagnetic assembly 40 in the embodiment of the present invention. The energization mode of the electromagnetic coil 41 is not specifically limited. Generally, a power connection end may be disposed outside the body 10, and the power connection end and the electromagnetic coil 41 may be electrically connected through a wire, and an external control power source may be connected to the power connection end to be controlled. The energization of the electromagnetic coil 41 (the power supply connection structure of the electromagnetic coil 41 is not shown in Fig. 1). When the vapor deposition is heated and the vapor deposition operation is started, the vapor deposition material 30 is sublimated and evaporated to a desired diffusion concentration inside the crucible body 10, and the current direction and magnitude of the external control power source are controlled, so that the electromagnetic coil 41 is generated as shown in the figure. The magnetic field force in the direction indicated by the arrow in 1 applies a thrust to the magnetic cover sheet 20 so that the magnetic cover sheet 20 is pushed away from the vapor deposition outlet a by the magnetic field force. After the magnetic cover sheet 20 is pushed away from the vapor deposition outlet a, the vapor deposition material 30 which is sublimated and evaporated can be evaporated outward from the vapor deposition outlet a, and deposited on the substrate to be vapor-deposited to form a vapor deposition film layer.

Further, in order to improve the sealing property of the magnetic cover sheet 20 provided at the vapor deposition outlet a before heating the vapor deposition and starting the vapor deposition operation, the vapor deposition material 30 inside the crucible body 10 is reduced in oxidation with the air. At the risk, the electromagnetic coil 41 can be preliminarily supplied with a current in a fixed direction and magnitude, so that the magnetic field force generated by the electromagnetic coil 41 maintains a certain amount of adsorption force on the magnetic cover sheet 20, and the vapor deposition enthalpy is heated in the vapor deposition source to start steaming. After the plating operation, the current and direction into the electromagnetic coil 41 are changed, thereby changing the direction of the magnetic field force, so that the magnetic force exerting force on the magnetic cover sheet 20 is converted into a repulsive force, and the magnetic cover sheet 20 is pushed away from the steam. Plated outlet a.

An embodiment of the present invention provides an evaporation crucible comprising: a crucible body, wherein at least one vapor deposition outlet is disposed on the crucible body. The magnetic cover sheet is disposed at the vapor deposition outlet position to isolate the vapor deposition material inside the crucible body from the outside air. The electromagnetic component, including the electromagnetic coil, is disposed in the body of the body, and the electromagnetic coil can form a magnetic field under the state of passing current, and the force of the magnetic field can push the magnetic cover piece away from the evaporation outlet. A magnetic cover sheet is disposed at the vapor deposition outlet of the crucible body, so that the vapor deposition material is insulated from the outside air before heating and evaporating, and the evaporation reaction material is prevented from being exposed to the air, and when the evaporation is performed and the vapor deposition operation is started, By inputting a current into the electromagnetic coil of the electromagnetic component to form a magnetic field, by controlling the polarity and intensity of the current, the magnetic cover sheet can be pushed away from the evaporation outlet by the force of the magnetic field, so that the evaporation material passes through the evaporation outlet. The evaporation improves the controllability of the magnetic cover sheet and enhances the evaporation effect.

Specifically, as shown in Fig. 1, the electromagnetic coil 41 is disposed along the inner wall of the crucible body 10, and the direction of the magnetic field formed by the electromagnetic coil 41 in the state in which the current is supplied is perpendicular to the plane in which the magnetic cover sheet 20 is located.

As shown in FIG. 1, a set of electromagnetic coils 41 are disposed along the inner wall of the crucible body 10, and currents of respective polarities and magnitudes are supplied to the electromagnetic coil 41 so that corresponding magnetic poles are generated at both ends of the electromagnetic coil 41 and at the two magnetic poles. The magnetic field force, as shown in FIG. 2, is the direction of the magnetic field force direction, and the magnetic field force direction is perpendicular or approximately perpendicular to the plane of the magnetic cover sheet 20 at the position acting on the magnetic cover sheet 20, thereby making the cover The magnetic cover sheet 20 disposed at the position of the vapor deposition outlet a is pushed away from the vapor deposition outlet a by the action of the magnetic field force to ensure the opening control of the vapor deposition outlet a.

Optionally, as shown in FIG. 3, the electromagnetic coil 41 is disposed in the stack body 10, and the plurality of sets of the electromagnetic coils 41 are parallel to each other and are circumferentially disposed with the vapor deposition outlet a as a center, and the current is applied. The direction of the magnetic field formed by the plurality of sets of electromagnetic coils 41 is perpendicular to the plane in which the magnetic cover sheet 20 is located.

In this way, a plurality of sets of electromagnetic coils 41 which are circumferentially disposed and which are parallel to each other with the vapor deposition outlet a as a center thereof are supplied with currents of the same direction and magnitude, and are formed perpendicular to the plane of the magnetic cover sheet 20 and toward the vapor deposition outlet a. The magnetic field force, the magnetic field forces of the plurality of sets of electromagnetic coils 41 together push the magnetic cover sheet 20 and push the magnetic cover sheet 20 away from the vapor deposition outlet a.

In addition, when the crucible body 10 includes a plurality of vapor deposition outlets a, as shown in FIG. 4, the crucible body 10 includes three vapor deposition outlets a, wherein each of the vapor deposition outlets a is respectively covered with magnetic At each of the vapor deposition outlets a, a plurality of sets of mutually parallel electromagnetic coils 41 are disposed circumferentially around the vapor deposition outlet a to ensure that the magnetic cover sheets 20 provided at each of the vapor deposition outlets a can The vapor deposition outlet a is driven by the action of the magnetic field force of the electromagnetic coil 41.

Preferably, as shown in FIG. 5, the electromagnetic assembly 40 further includes a core 42 disposed at the center of the electromagnetic coil 41.

Thus, as shown in FIG. 5, by providing the core 42 at the center of each of the electromagnetic coils 41, the electromagnetic component 40 of the composition is subjected to the same current, and the magnetic field force is compared with only the electromagnetic coil 41. The electromagnetic components are effectively enhanced to increase the thrust of the electromagnetic cover 40 to the magnetic cover sheets 20.

Further, as shown in FIG. 6, a magnetic absorbing member 50 is further provided around the side of the vapor deposition outlet a located inside the crucible body 10, and the magnetic absorbing member 50 adsorbs the magnetic cover sheet 20.

The magnetic absorbing member 50 can generate an absorbing force to the magnetic material, and the material of the magnetic cover sheet 20 includes the magnetic material. Therefore, the magnetic absorbing member 50 can adsorb the magnetic cover sheet 20. In this way, after the vapor deposition material 30 is placed in the crucible body 10, the magnetic cover sheet 20 that is placed at the position of the vapor deposition outlet a is subjected to the adsorption force of the magnetic flux absorbing member 50, and can be separated from the vapor deposition outlet a. The pressure is tightly closed to improve the sealing effect of the magnetic cover sheet 20 on the vapor deposition material 30 before the vapor deposition is performed and the vapor deposition operation is started. On the basis of this, after the vapor deposition enthalpy is heated in the evaporation source and the vapor deposition operation is started, the electromagnetic assembly 40 needs to further provide the magnetic cover sheet 20 while overcoming the adsorption force of the magnetic absorbing member 50 on the magnetic cover sheet 20. The thrust acts to enable the magnetic cover sheet 20 to be pushed away from the vapor deposition outlet a.

Preferably, as shown in FIG. 6, the magnetic absorbing member 50 is a sheet magnet. The sheet magnet may be an electromagnet that is energized to form a magnetic field, or may be a sheet-shaped permanent magnet.

In this way, the sheet-shaped electromagnet or the permanent magnet acts as the magnetic absorbing member 50, and on the one hand, the crowding of the inner space of the dam body 10 can be reduced; on the other hand, the magnetic absorbing member 50 and the magnetic cover sheet can be increased as much as possible. The area of action between 20 increases the absorbing force of the magnetically absorbing member 50 on the magnetic cover sheet 20.

It should be noted that the electromagnetic component 40 and the magnetic absorbing member 50 disposed inside the cymbal body 10 are usually made of a material such as iron or copper which has a melting point much higher than that of the active metal. Therefore, in the confrontation During the heating and evaporation of the vapor deposition material 30 inside the body 10, the electromagnetic assembly 40 and the magnetic absorbing member 50 disposed inside the crucible body 10 do not undergo sublimation evaporation when heated, and do not cause damage to the crucible body 10, Also, the purity of the vapor deposition material 30 in the evaporated state is not affected.

Preferably, as shown in FIG. 7, the vapor deposition outlet a is provided with a magnetic material layer 60 at least at an edge portion in contact with the magnetic cover sheet 20.

Typically, the crucible body 10 can be made from a wide variety of metallic or non-metallic materials having a relatively high melting point. When the crucible body 10 is a non-metal material or a non-magnetic material in a metal material, in order to increase the adsorption force of the magnetic attraction member 50 on the magnetic cover sheet 20, a magnetic material is disposed at a position of the vapor deposition outlet a outside the crucible body 10. The layer 60, wherein the magnetic material layer 60 is provided at least at an edge portion where the vapor deposition outlet a is in contact with the magnetic cover sheet 20.

It should be noted that, as shown in FIG. 7, when the vapor deposition outlet a is a through hole directly processed on the upper surface of the crucible body 10, the magnetic material layer 60 is disposed at least at the edge where the vapor deposition outlet a is in contact with the magnetic cover sheet 20. Partially refers to a partial region that is in contact with the magnetic material layer 60 around the vapor deposition outlet a. In general, the area of the magnetic material layer 60 may be slightly larger than the area of the magnetic cover sheet 20, as shown in FIG. 8, when the vapor deposition outlet a protrudes from the upper surface of the crucible body 10 and penetrates the interior of the crucible body 10. At the time of the spout, the magnetic material layer 60 is provided at least at the edge portion where the vapor deposition outlet a is in contact with the magnetic cover sheet 20, and is located at a position along the edge of the thickness of the discharge port of the vapor deposition outlet a. For example, it is preferable to use an adsorption sheet having a through hole having a size corresponding to the size of the vapor deposition outlet a as the magnetic material layer 60.

Preferably, as shown in FIG. 7, the thickness W of the magnetic cover sheet 20 is set between 0.1 mm and 5 mm.

In this way, on the one hand, the sealing property of the magnetic cover sheet 20 to the vapor deposition outlet a can be ensured; on the other hand, the weight of the magnetic cover sheet 20 can be reduced. If the thickness W of the magnetic cover sheet 20 is less than 0.1 mm, it may be that the thickness W of the magnetic cover sheet 20 is too thin, it is difficult to ensure the sealing of the vapor deposition outlet a, and the magnetic cover sheet 20 is easily offset or dropped due to the influence of the external environment. drop. If the thickness W of the magnetic cover sheet 20 is greater than 5 mm, the thickness W of the magnetic cover sheet 20 may be too thick, resulting in a large weight. Therefore, the electromagnetic assembly 40 is required to provide a large current to generate a strong magnetic field force. The magnetic cover sheet 20 is pushed away from the vapor deposition outlet a, which increases the power consumption of the electromagnetic assembly 40. Further, it is likely to cause a problem that the magnetic cover sheet 20 cannot be pushed away from the vapor deposition outlet a in time due to insufficient magnetic field force.

Preferably, the material of the crucible body 10 includes aluminum nitride, boron nitride, titanium, and alloys thereof.

The crucible body 10 uses a material including aluminum nitride, boron nitride, titanium, and alloys thereof. When the crucible body 10 is heated, the structure of the crucible body 10 is stable without adversely affecting the evaporation process.

In another aspect of an embodiment of the present invention, an evaporation source is provided, as shown in FIG. 9, comprising the vapor deposition crucible 01 of any of the above.

The vapor deposition source of the embodiment of the present invention includes the vapor deposition crucible 01 of any of the above, and when the vapor deposition source of the embodiment of the present invention is used for the doping vapor deposition process, a plurality of vapor deposition crucibles 01 may be further included. For example, the evaporation source shown in FIG. 9 includes two vapor deposition crucibles 01. The vapor deposition material 30 placed in the two vapor deposition crucibles 01 may be different materials. In this way, when performing the doping vapor deposition operation using the vapor deposition source of the embodiment of the present invention, two different vapor deposition materials required for vapor deposition into a film are respectively placed in the two vapor deposition crucibles 01, respectively. The magnetic cover sheet 20 is covered at the vapor deposition outlet a of the two vapor deposition crucibles 01. Then, two vapor deposition crucibles 01 are placed side by side in the evaporation chamber and heated, and the evaporation reaches a certain temperature, and the vapor deposition material 30 in the vapor deposition crucible is evaporated to a certain diffusion concentration, and then the vapor deposition operation is started. The magnetic cover sheet 20 is pushed away from the vapor deposition outlet a by the electromagnetic assembly 40, so that the vapor deposition material 30 in the evaporation state in the vapor deposition crucible 01 can be evaporated outward through the evaporation outlet a and deposited on the substrate to be vapor-deposited. A doped vapor deposited film layer doped with two vapor deposition materials 30 can be formed.

In still another aspect of an embodiment of the present invention, an evaporation apparatus is provided, as shown in FIG. 10, including an evaporation chamber 03, and further includes the above-described vapor deposition source 02 disposed in the vapor deposition chamber 03. A movable rod 04 is further disposed in the vapor deposition chamber 03. The movable rod 04 is fixedly coupled to the magnetic cover sheet 20, and can move the magnetic cover sheet 20 horizontally in the vapor deposition chamber 03.

As shown in FIG. 10, a movable rod 04 is disposed inside the vapor deposition chamber 03, and the other end of the movable rod 04 is fixedly connected to the magnetic cover sheet 20. By adjusting the horizontal movement of the movable rod 04, the magnetic cover piece of the fixed connection can be driven. 20 is then moved horizontally within the vapor deposition chamber 03. In this way, on the one hand, when the magnetic field force generated after the electromagnetic assembly 40 is energized pushes the magnetic cover sheet 20 away from the vapor deposition outlet a, since the magnetic cover sheet 20 is connected with the movable rod 04, the movable rod 04 can restrain the magnetic cover sheet. The moving position of 20 prevents the magnetic cover sheet 20 from being impacted by the vapor deposition outlet a from the inner wall of the body 10 when the thrust is large, and the magnetic force of the electromagnetic component 40 pushes the magnetic cover 20 After leaving the vapor deposition outlet a, the control movable rod 03 can move the magnetic cover sheet 20 horizontally away from the area where the vapor deposition outlet is located. On the other hand, by controlling the movement lever 04 to control the movement of the magnetic cover sheet 20, the magnetic cover sheet 20 can be used as a shield at the vapor deposition outlet a, so that it is no longer necessary to additionally provide an anti-shield in the vapor deposition device. . In the evaporation process, if it is necessary to temporarily interrupt the evaporation of the vapor deposition material 30 or the like, the movable rod 04 is controlled to move the magnetic cover sheet 20 back to the evaporation outlet a, and the vapor deposition outlet a can be performed. Occlusion. Since the electromagnetic component 40 functions to generate a magnetic field force in the energized state to push the magnetic cover sheet 20 away from the vapor deposition outlet a, the electromagnetic assembly 40 is stopped after the magnetic cover sheet 20 is pushed away from the vapor deposition outlet a. That is, the upward magnetic force is no longer generated. When the magnetic cover sheet 20 is moved back to the vapor deposition outlet a by the movable rod 04 to block the vapor deposition outlet a, the magnetic cover sheet 20 can realize the vapor deposition outlet a. The occlusion is closed.

Further, when the magnetic cover sheet 20 is used as a visor by the movable lever 04 during the vapor deposition operation, the magnetic closure member 50 can also be used to improve the sealing property of the vapor deposition outlet a by the magnetic absorbing member 50. The cover sheet 20 provides adsorption and provides a push-off effect on the magnetic cover sheet 20 by the electromagnetic assembly 40 when it is desired to remove the shield.

According to still another aspect of the present invention, an evaporation method is provided. As shown in FIG. 11, the method includes: S101, filling the vapor deposition material 30 into the crucible body 10 in an inert gas environment, and filling the crucible body 10 after the filling is completed. The magnetic cover sheet 20 is covered at the vapor deposition outlet a such that the vapor deposition material 30 in the crucible body 10 is isolated from the outside air. S102, the vapor deposition crucible 01 is moved into the vapor deposition chamber 03, and the vapor deposition crucible 01 is heated, and the vapor deposition material 30 in the crucible body 10 is heated and vaporized. S103, a current is supplied to the electromagnetic coil 41 of the electromagnetic assembly 40 to form a magnetic field, and the force of the magnetic field pushes the magnetic cover sheet 20 away from the vapor deposition outlet a to cause the vaporized material 30 that is heated and vaporized to evaporate outward through the vapor deposition outlet a.

As shown in FIG. 11, when the vapor deposition substrate is subjected to a vapor deposition operation, the vapor deposition material 30 is first filled into the crucible body 10 in an inert gas atmosphere, since the evaporation material 30 is usually an active metal material such as lithium (Li). ), calcium (Ca), etc., these active metal materials are prone to oxidation reaction when they are in contact with oxygen in the air, and the structure and function of the substance change after oxidation, so it is necessary to fill in an inert gas environment, and, in filling After completion, the magnetic cover sheet 20 is covered at the evaporation outlet a of the crucible body 10, so that the vapor deposition material 30 in the crucible body 10 is isolated from the outside air, and the vapor deposition material 30 is prevented from coming into contact with oxygen in the outside air as much as possible. An oxidation reaction occurs. After the vapor deposition crucible 01 in the closed state is transferred into the vapor deposition chamber 03, the vapor deposition crucible 01 is heated, and the vapor deposition material 30 in the crucible body 10 is heated and vaporized, and sublimated and evaporated into a gaseous state, and the gaseous vapor deposition material 30 is in a crucible. The internal space of the body 10 is diffused, and the concentration of the gaseous vapor deposition material 30 in the internal space of the body 10 is continuously increased with the increase of time. When the concentration of the gaseous vapor deposition material 30 reaches the state required for film formation, the electromagnetic force to the electromagnetic assembly 40 is increased. The coil 41 is energized to form a magnetic field, and the force of the magnetic field pushes the magnetic cover sheet 20 away from the vapor deposition outlet a, and after being pushed away from the magnetic cover sheet 20, the vapor deposition outlet a communicates with the external vapor deposition chamber 03, and is heated and vaporized. The vapor deposition material 30 is evaporated outward through the vapor deposition outlet a, and is gradually deposited on the substrate to be vapor-deposited to form a film layer required for vapor deposition.

During the film formation of the substrate to be vapor-deposited, if it is necessary to temporarily interrupt the evaporation of the vapor deposition material 30 or the like, the movement of the movable rod 04 can be controlled to drive the magnetic cover sheet 20 to move horizontally to the evaporation outlet a. At the same time, the vapor deposition outlet a is shielded, and when the magnetic cover sheet 20 blocks the vapor deposition outlet a, the vapor deposition outlet a stops the outward evaporation of the gaseous vapor deposition material 30. After the movable rod 04 moves the magnetic cover sheet 20 horizontally away from the vapor deposition outlet a, the gaseous vapor deposition material 30 resumes a state of being evaporated outward from the vapor deposition outlet a and deposited on the substrate to be vapor-deposited. In the above detailed description of the structural relationship and working process of the vapor deposition crucible, the vapor deposition source, and the vapor deposition apparatus, the vapor deposition method has been described in detail, and will not be described herein.

The above is only a specific embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art can easily think of changes or substitutions within the technical scope of the present invention. It should be covered by the scope of the present invention. Therefore, the scope of the invention should be determined by the scope of the appended claims.

Claims

An evaporation crucible characterized by comprising:

a body of the crucible having at least one vapor deposition outlet disposed on the crucible body;

a magnetic cover sheet disposed at the vapor deposition outlet position to isolate the vapor deposition material inside the crucible body from outside air;

An electromagnetic component, including an electromagnetic coil, disposed in the body, the electromagnetic coil capable of forming a magnetic field in a state of passing an electric current, the force of the magnetic field pushing the magnetic cover slip away from the vapor deposition outlet .
The evaporating crucible according to claim 1, wherein the electromagnetic coil is disposed along a wall of the crucible body, and a direction of a magnetic field formed by the electromagnetic coil is perpendicular to a state in which a current is supplied. The plane in which the magnetic cover sheet is located.
The vapor deposition crucible according to claim 1, wherein the electromagnetic coil is provided in the plurality of sets in the body, and the plurality of sets of the electromagnetic coils are parallel to each other and centered on the vapor deposition outlet. To the setting, the direction of the magnetic force formed by the plurality of sets of the electromagnetic coils in the state of the current flowing is perpendicular to the plane in which the magnetic cover sheet is located.
The evaporating crucible according to claim 3, wherein the electromagnetic assembly further comprises an iron core disposed at a center of the electromagnetic coil.
The vapor deposition crucible according to claim 1, wherein a magnetic absorbing member is further provided around a side of the evaporation outlet located in the body, and the magnetic absorbing member adsorbs the magnetic cover sheet.
The vapor-deposited crucible according to claim 5, wherein the vapor deposition outlet is provided with a magnetic material layer at least at an edge portion in contact with the magnetic cover sheet.
The vapor-deposited crucible according to claim 1, wherein the magnetic cover sheet has a thickness of between 0.1 mm and 5 mm.
An evaporation source comprising the vapor deposition crucible according to any one of claims 1-7.
An evaporation device, comprising: an evaporation chamber, further comprising an evaporation source according to claim 8 disposed in the evaporation chamber;

A movable rod is further disposed in the vapor deposition chamber, and the movable rod is fixedly connected to the magnetic cover sheet, and can move the magnetic cover sheet horizontally in the evaporation chamber.
An evaporation method, characterized in that

Filling the vapor deposition material into the crucible body under an inert gas atmosphere, and after the filling is completed, a magnetic cover sheet is disposed at the vapor deposition outlet of the crucible body to isolate the vapor deposition material in the crucible body from the outside air;

Transfering the vapor deposition ruthenium into the vapor deposition chamber, heating the vapor deposition ruthenium, and vapor-depositing material in the ruthenium body is heated and vaporized;

Applying a current to the electromagnetic coil of the electromagnetic assembly forms a magnetic field, and the force of the magnetic field pushes the magnetic cover sheet away from the vapor deposition outlet such that the vaporized material that is heated and vaporized evaporates outward through the evaporation outlet.