CN107502864A - A kind of crucible cover and its cover method and crucible - Google Patents

A kind of crucible cover and its cover method and crucible Download PDF

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Publication number
CN107502864A
CN107502864A CN201710706664.3A CN201710706664A CN107502864A CN 107502864 A CN107502864 A CN 107502864A CN 201710706664 A CN201710706664 A CN 201710706664A CN 107502864 A CN107502864 A CN 107502864A
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China
Prior art keywords
crucible
openend
cover
lid
cavity
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Granted
Application number
CN201710706664.3A
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Chinese (zh)
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CN107502864B (en
Inventor
罗程远
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BOE Technology Group Co Ltd
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BOE Technology Group Co Ltd
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Priority to CN201710706664.3A priority Critical patent/CN107502864B/en
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/12—Organic material

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

The present invention provides a kind of crucible cover and its covers method and crucible.The crucible cover is used to cover in crucible openend, including lid, lid is provided with adhesive structure in the region of the end-face wall of corresponding crucible openend, adhesive structure is in contact with the end-face wall of crucible openend, adhesive structure can make lid and the adhesive of crucible openend, so that lid covers to the sealing of crucible openend.The crucible cover sets adhesive structure by the region of the corresponding crucible openend end-face wall in lid, can make lid and the adhesive of crucible openend, be covered with carrying out sealing to crucible openend, it is achieved thereby that the sealing to deposition material in crucible；And then during evaporation chamber is put into after deposition material is put into crucible and before evaporation by the crucible for filling deposition material, deposition material is avoided to be in contact with the gas in ambient atmosphere environment, then deposition material is avoided to be aoxidized by the gas in atmospheric environment, it is ensured that the performance of the device of formation is deposited.

Description

A kind of crucible cover and its cover method and crucible
Technical field
The present invention relates to evaporation coating technique field, in particular it relates to a kind of crucible cover and its cover method and crucible.
Background technology
Active matrix organic light-emitting diode shows product (AMOLED) due to higher colour gamut can be achieved, ultra-thin, flexible The display of change, it is gradually of great interest.Especially curved surface and flexible OLED, function and good user due to uniqueness Experience receives numerous favors.
At present, the main manufacture craft of OLED luminescent layers is evaporation, i.e., organic material is heated into one under vacuum Constant temperature degree, organic material is ascended to heaven after evaporating to substrate surface, form film.During evaporation, often in organic material Add the doped structure that some active metal materials (such as lithium (Li), calcium (Ca)) are formed in device architecture.During evaporation, It is generally necessary to which deposition material is first put into crucible, then crucible is put into evaporation chamber again, to crucible in chamber is deposited Carrying out heating could be deposited.
As shown in figure 1, traditional crucible includes crucible body 6 and crucible cover 5, crucible cover 5 covers opening in crucible body 6 Mouthful end, a less opening 51 would generally be opened up on crucible cover 5, heating evaporation is carried out so as to which crucible is put into evaporation chamber When, deposition material can be evaporated from the opening 51 on crucible cover 5 and be plated to substrate surface.Due to the work in organic vapor deposition material Property metal material reacts oxidation easily in atmospheric environment, so using traditional crucible, deposition material is put into the mistake of crucible Cheng Zhonghe inevitably makes deposition material and the gas phase in atmospheric environment during crucible is put into evaporation chamber Contact, this is easy to make the active metal material in deposition material to be aoxidized.Oxidized active metal material passes through evaporation After technique is prepared into device function layer, the performance of device will be influenceed.
Therefore, how to make deposition material during crucible is loaded before evaporation and crucible is put into evaporation chamber During not oxidized turn into current urgent problem to be solved.
The content of the invention
The present invention is for above-mentioned technical problem present in prior art, there is provided a kind of crucible cover and its covers method and earthenware Crucible.The crucible cover sets adhesive structure by the region of the corresponding crucible openend end-face wall in lid, can make lid and crucible Openend adhesive, covered with carrying out sealing to crucible openend, it is achieved thereby that the sealing to deposition material in crucible；And then During the crucible for filling deposition material is put into evaporation chamber after deposition material is put into crucible and before evaporation, avoid Deposition material is in contact with the gas in ambient atmosphere environment, then avoids deposition material from being aoxidized by the gas in atmospheric environment, It ensure that the performance for the device that evaporation is formed.
The present invention provides a kind of crucible cover, and for covering in crucible openend, including lid, the lid is described in correspondence The region of the end-face wall of crucible openend is provided with adhesive structure, the adhesive structure and the end face of the crucible openend Wall is in contact, and the adhesive structure can make the lid and crucible openend adhesive, so that the lid is to the crucible Openend sealing covers.
Preferably, the adhesive structure includes the first cavity being opened in the lid, and first cavity penetrates institute State the thickness of lid, first cavity includes the first opening of the end-face wall in face of the crucible openend and back to institute State the second opening of end-face wall.
Preferably, the adhesive structure also includes elastic seal ring, and the elastic seal ring is set in first opening On, the elastic seal ring is used to fit with the end-face wall of the crucible openend, with to first cavity and institute The contact position for stating end-face wall is sealed.
Preferably, the adhesive structure also includes elastic plug, and the elastic plug is covered in the described second opening, used Sealed in the described second opening；Springhole is offered on the elastic plug, the springhole can be in outside extruding force Effect is lower to open.
Preferably, first cavity includes at least two, and first cavity is spacedly distributed on the lid.
Preferably, the connector back to crucible openend side of the lid, the connection are arranged in addition to Part be used for evaporation chamber in motion bar be connected, the connector can under the drive of the motion bar with the crucible opening End departs from.
The present invention also provides a kind of crucible, including above-mentioned crucible cover.
Preferably, in addition to it is used for the crucible body for containing deposition material, the crucible cover is used to cover in the crucible The openend of body, to be covered to the sealing of the openend of the crucible body；
It is provided with the end-face wall of the openend of the crucible body in the position of the first cavity of the corresponding crucible cover Second cavity, second cavity can be empty with described first after the crucible cover is covered on the openend of the crucible body Chamber is docked and penetrated.
The present invention also provides a kind of method that covers using above-mentioned crucible cover, including：
Lid is covered in crucible openend；
The adhesive structure on the lid is set to be in contact with the end-face wall of the crucible openend and adhesive, with to the earthenware Crucible openend carries out sealing and covered.
Preferably, the adhesive structure made on the lid is in contact and inhaled with the end-face wall of the crucible openend Close, with the crucible openend is carried out sealing cover including：
First cavity of the adhesive structure is vacuumized.
Beneficial effects of the present invention：Crucible cover provided by the present invention, by the corresponding crucible openend end face of lid The region of wall sets adhesive structure, can make lid and the adhesive of crucible openend, be covered with carrying out sealing to crucible openend, so as to Realize the sealing to deposition material in crucible；And then evaporation will be filled after deposition material is put into crucible and before evaporation During the crucible of material is put into evaporation chamber, deposition material is avoided to be in contact with the gas in ambient atmosphere environment, then Deposition material is avoided to be aoxidized by the gas in atmospheric environment, it is ensured that the performance of the device of formation is deposited.
Crucible provided by the present invention, by using above-mentioned crucible cover, crucible cover can be realized to being deposited in crucible body The sealing of material；So as to avoid deposition material from being in contact with the gas in ambient atmosphere environment, and then avoid deposition material big Gas oxidation in compression ring border, it is ensured that the performance of the device of formation is deposited.
Brief description of the drawings
Fig. 1 is the structure sectional view of crucible in the prior art；
Fig. 2 is the structure sectional view that crucible cover covers in crucible openend in the embodiment of the present invention 1；
Fig. 3 is the structure sectional view of crucible in the embodiment of the present invention 2.
Description of reference numerals therein：
1. crucible；2. lid；3. adhesive structure；31. the first cavity；310. first openings；311. second openings；32. bullet Property sealing ring；33. elastic plug；4. connector；5. crucible cover；51. opening；6. crucible body；61. the second cavity.
Embodiment
To make those skilled in the art more fully understand technical scheme, below in conjunction with the accompanying drawings and it is embodied Mode is to a kind of crucible cover provided by the present invention and its covers method and crucible is described in further detail.
Embodiment 1：
The present embodiment provides a kind of crucible cover, as shown in Fig. 2 for covering in the openend of crucible 1, including lid 2, lid 2 are provided with adhesive structure 3, adhesive structure 3 and the end face of the openend of crucible 1 in the region of the end-face wall of the corresponding openend of crucible 1 Wall is in contact, and adhesive structure 3 can make lid 2 and the openend adhesive of crucible 1, so that lid 2 covers to the sealing of the openend of crucible 1.
Wherein, the end-face wall of the openend of crucible 1 refers to the wall of crucible 1 in the end face of the openend of crucible 1.
Adhesive structure 3 is set by the region of the openend end-face wall of corresponding crucible 1 in lid 2, lid 2 and crucible can be made 1 openend adhesive, covered with carrying out sealing to the openend of crucible 1, it is achieved thereby that the sealing to deposition material in crucible 1；Enter And the process of evaporation chamber is put into after deposition material is put into crucible 1 and before evaporation by the crucible 1 for filling deposition material In, avoid deposition material from being in contact with the gas in ambient atmosphere environment, then avoid deposition material by the gas in atmospheric environment Body aoxidizes, it is ensured that the performance of the device of formation is deposited.
In the present embodiment, adhesive structure 3 includes the first cavity 31 being opened in lid 2, the first cavity 31 insertion lid 2 Thickness, the first opening that the first cavity 31 includes the end-face wall in face of the openend of crucible 1 310 and opens back to the second of end-face wall Mouth 311.By setting the first cavity 31, when lid 2 and the openend of crucible 1 cover, by will be taken out in the first cavity 31 Vacuum, lid 2 and the close adhesive in the openend of crucible 1 can be made, so as to realize that sealing of the lid 2 to the openend of crucible 1 covers.
In the present embodiment, adhesive structure 3 also includes elastic seal ring 32, and elastic seal ring 32 is set in the first opening 310 On, elastic seal ring 32 is used to fit with the end-face wall of the openend of crucible 1, with to contact position of first cavity 31 with end-face wall Put and sealed.The setting of elastic seal ring 32, the first opening 310 and the contact of the openend end-face wall of crucible 1 can be made more to step up It is close, avoid the contact position of the first opening 310 and the openend end-face wall of crucible 1 from leaking air, help to realize lid 2 to crucible The sealing of 1 openend covers.
In the present embodiment, adhesive structure 3 also includes elastic plug 33, and elastic plug 33 is covered in the second opening 311, used Sealed in the second opening 311；Springhole is offered on elastic plug 33, springhole can be opened under the effect of outside extruding force Open.The setting of elastic plug 33, the sealing to the second opening 311 can be realized, prevents the gas in atmospheric environment from being opened from second Mouth 311 enters in crucible 1, and the deposition material in crucible 1 is caused to aoxidize.The setting of springhole on elastic plug 33, is easy to take out Vacuum plant is stretched in the first cavity 31 from springhole, with to being vacuumized in the first cavity 31, to realize that lid 2 is right The sealing of the openend of crucible 1 covers.
In the present embodiment, the first cavity 31 includes at least two, and the first cavity 31 is spacedly distributed on lid 2.So Set, after lid 2 can be made to cover on the openend of crucible 1, its pressure between the openend end-face wall of crucible 1 everywhere is balanced, So as to enhance sealing property of the lid 2 to the openend of crucible 1.
In the present embodiment, crucible cover also includes the connector 4 back to the openend side of crucible 1 for being arranged on lid 2, connection Part 4 is used to be connected with the motion bar in evaporation chamber, and connector can depart under the drive of motion bar with the openend of crucible 1.When Fill deposition material crucible 1 be put into evaporation chamber in after, evaporation when need to remove crucible cover from the openend of crucible 1, So that substrate surface to be plated is deposited in the deposition material in crucible 1 after the heating, the setting of connector 4, it is easy in motion bar Lid 2 is removed from the openend of crucible 1 under drive.
It should be noted that before evaporation, the crucible 1 for filling deposition material is put into evaporation chamber；Then it is right first Vacuumized in evaporation chamber；Then, the motion bar band follower link being deposited in chamber makes lid 2 be taken off with the openend of crucible 1 From；Crucible 1 can be heated afterwards, the deposition material evaporation in crucible 1 is arrived into substrate surface to be plated.Wherein, steaming is worked as After being evacuated in plating chamber, due in the first cavity 31 and vacuum, so lid 2 and the openend end-face wall of crucible 1 it Between pressure go to zero, now, motion bar can easily band follower link lid 2 be removed from the openend of crucible 1；So as to Ensure that during crucible 1 is put into evaporation chamber before evaporation, deposition material in crucible 1 also will not with atmospheric environment Gas is in contact, and then avoids deposition material from being oxidized before evaporation.
Said structure based on crucible cover, the present embodiment also provide a kind of method that covers of crucible cover, including：
Step S101：Lid is covered in crucible openend.
Step S102：The adhesive structure on lid is set to be in contact with the end-face wall of crucible openend and adhesive, with to crucible Openend carries out sealing and covered.
The step specifically includes：First cavity of adhesive structure is vacuumized.
It should be noted that the deposition material that is put into crucible and big compression ring are avoided during in order to be covered in crucible cover Gas in border is in contact, and generally deposition material is put into crucible in inert gas environment, and in inert gas environment Crucible cover is covered in crucible openend.Lid cover after to being vacuumized in the first cavity, you can make lid and crucible The close adhesive of openend end-face wall, so as to during deposition material is put into crucible and crucible cover is covered in crucible openend During prevent deposition material to be in contact with the gas in atmospheric environment, and then avoid deposition material by the gas in atmospheric environment Body aoxidizes, it is ensured that the performance of the device of formation is deposited.
The beneficial effect of embodiment 1：Crucible cover provided in embodiment 1, by the corresponding crucible openend of lid The region of end-face wall sets adhesive structure, can make lid and the adhesive of crucible openend, be covered with carrying out sealing to crucible openend, It is achieved thereby that the sealing to deposition material in crucible；And then it will be filled after deposition material is put into crucible and before evaporation During the crucible of deposition material is put into evaporation chamber, deposition material is avoided to be in contact with the gas in ambient atmosphere environment, Then deposition material is avoided to be aoxidized by the gas in atmospheric environment, it is ensured that the performance of the device of formation is deposited.
Embodiment 2：
The present embodiment provides a kind of crucible, as shown in figure 3, including the crucible cover 5 in embodiment 1.
In the present embodiment, crucible also includes being used for the crucible body 6 for containing deposition material, and crucible cover 5 is used to cover in earthenware The openend of crucible body 6, to be covered to the sealing of the openend of crucible body 6.Right in the end-face wall of the openend of crucible body 6 The position of the first cavity 31 of crucible cover 5 is answered to be provided with the second cavity 61, the second cavity 61 can be covered in crucible sheet in crucible cover 5 Dock and penetrate with the first cavity 31 after on the openend of body 6.Second cavity 61 sets in the openend end-face wall of crucible body 6 Put, can be evacuated while the first cavity 31 is evacuated, so that crucible cover 5 and 6 even closer jail of crucible body Admittedly be pulled together, and then improve the sealing property between crucible cover 5 and crucible body 6.
Wherein, the size of the opening for being docked with the first cavity 31 of the second cavity 61 is equal to the first of the first cavity 31 The size of opening 310, it can so make the docking port of the second cavity 61 and the first cavity 31 by being set in the of the first cavity 31 Elastic seal ring 32 in one opening 310 seals well, avoids the phenomenon that leaked air at docking port.
It should be noted that the size of the opening for being docked with the first cavity 31 of the second cavity 61 might be less that The size of first opening 310 of one cavity 31, it can so make the end-face wall and crucible body of the first opening 310 of the first cavity 31 The end-face wall of 6 openends fits, and now, passes through the elastic seal ring 32 being set in the first opening 310 of the first cavity 31 The excellent sealing of the second cavity 61 and the joint of the first cavity 31 can equally be realized.
The beneficial effect of embodiment 2：Crucible provided in embodiment 2, by using the crucible cover in embodiment 1, energy Enough realize sealing of the crucible cover to deposition material in crucible body；So as to avoid deposition material and the gas in ambient atmosphere environment It is in contact, and then avoids deposition material from being aoxidized by the gas in atmospheric environment, it is ensured that the performance of the device of formation is deposited.
It is understood that the principle that embodiment of above is intended to be merely illustrative of the present and the exemplary implementation that uses Mode, but the invention is not limited in this.For those skilled in the art, the essence of the present invention is not being departed from In the case of refreshing and essence, various changes and modifications can be made therein, and these variations and modifications are also considered as protection scope of the present invention.

Claims (10)

  1. A kind of 1. crucible cover, for covering in crucible openend, including lid, it is characterised in that the lid is described in correspondence The region of the end-face wall of crucible openend is provided with adhesive structure, the adhesive structure and the end face of the crucible openend Wall is in contact, and the adhesive structure can make the lid and crucible openend adhesive, so that the lid is to the crucible Openend sealing covers.
  2. 2. crucible cover according to claim 1, it is characterised in that the adhesive structure includes being opened in the lid First cavity, first cavity penetrate the thickness of the lid, and first cavity is included in face of the crucible openend First opening of the end-face wall and the second opening back to the end-face wall.
  3. 3. crucible cover according to claim 2, it is characterised in that the adhesive structure also includes elastic seal ring, described Elastic seal ring is set in first opening, and the elastic seal ring is used for the end-face wall with the crucible openend Fit, to be sealed to first cavity and the contact position of the end-face wall.
  4. 4. crucible cover according to claim 2, it is characterised in that the adhesive structure also includes elastic plug, the bullet Property plug cover described second opening on, for described second opening seal；Bullet is offered on the elastic plug Property hole, the springhole can outside extruding force effect under open.
  5. 5. crucible cover according to claim 2, it is characterised in that first cavity includes at least two, described first Cavity is spacedly distributed on the lid.
  6. 6. crucible cover according to claim 1, it is characterised in that also include being arranged on the lid back to the crucible The connector of openend side, the connector are used to be connected with the motion bar in evaporation chamber, and the connector can be described Depart under the drive of motion bar with the crucible openend.
  7. 7. a kind of crucible, it is characterised in that including the crucible cover described in claim 1-6 any one.
  8. 8. crucible according to claim 7, it is characterised in that also include being used for the crucible body for containing deposition material, institute State crucible cover to be used to cover in the openend of the crucible body, to cover the sealing of the openend of the crucible body；
    The position of the first cavity of the corresponding crucible cover is provided with second in the end-face wall of the openend of the crucible body Cavity, second cavity can cover rear and first cavity pair on the openend of the crucible body in the crucible cover Connect and penetrate.
  9. 9. a kind of cover method using crucible cover as claimed in any one of claims 1 to 6, it is characterised in that including：
    Lid is covered in crucible openend；
    The adhesive structure on the lid is set to be in contact with the end-face wall of the crucible openend and adhesive, to open the crucible Mouth end carries out sealing and covered.
  10. 10. crucible cover according to claim 9 covers method, it is characterised in that the adhesive made on the lid Structure is in contact and adhesive with the end-face wall of the crucible openend, with the crucible openend is carried out sealing cover including：
    First cavity of the adhesive structure is vacuumized.
CN201710706664.3A 2017-08-17 2017-08-17 A kind of crucible cover and its lid conjunction method and crucible Active CN107502864B (en)

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CN201710706664.3A CN107502864B (en) 2017-08-17 2017-08-17 A kind of crucible cover and its lid conjunction method and crucible

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Application Number Priority Date Filing Date Title
CN201710706664.3A CN107502864B (en) 2017-08-17 2017-08-17 A kind of crucible cover and its lid conjunction method and crucible

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CN107502864B CN107502864B (en) 2019-08-23

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110098144A (en) * 2019-04-11 2019-08-06 深圳市华星光电半导体显示技术有限公司 A kind of crucible fetching device

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63190163A (en) * 1987-01-31 1988-08-05 Sumitomo Electric Ind Ltd Hermetic structure in vapor source crucible
JPH02290963A (en) * 1989-04-28 1990-11-30 Matsushita Electric Ind Co Ltd Crucible for vapor deposition
CN103695847A (en) * 2013-12-24 2014-04-02 京东方科技集团股份有限公司 Crucible and evaporation method thereof
CN104988462A (en) * 2015-07-23 2015-10-21 京东方科技集团股份有限公司 Crucible device
CN106947944A (en) * 2017-05-23 2017-07-14 京东方科技集团股份有限公司 One kind evaporation crucible, vapor deposition source, evaporation coating device and evaporation coating method

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63190163A (en) * 1987-01-31 1988-08-05 Sumitomo Electric Ind Ltd Hermetic structure in vapor source crucible
JPH02290963A (en) * 1989-04-28 1990-11-30 Matsushita Electric Ind Co Ltd Crucible for vapor deposition
CN103695847A (en) * 2013-12-24 2014-04-02 京东方科技集团股份有限公司 Crucible and evaporation method thereof
CN104988462A (en) * 2015-07-23 2015-10-21 京东方科技集团股份有限公司 Crucible device
CN106947944A (en) * 2017-05-23 2017-07-14 京东方科技集团股份有限公司 One kind evaporation crucible, vapor deposition source, evaporation coating device and evaporation coating method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110098144A (en) * 2019-04-11 2019-08-06 深圳市华星光电半导体显示技术有限公司 A kind of crucible fetching device
CN110098144B (en) * 2019-04-11 2021-07-23 深圳市华星光电半导体显示技术有限公司 Crucible taking and placing device

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