KR100422487B1 - Evaporation Apparatus for Manufacturing Organic Electro-Luminescent Display Device using Electromagnet and Evaporation Method using the same - Google Patents

Abstract

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a deposition apparatus used to fabricate an organic electroluminescent display (OELD) and a vacuum deposition method using the same, and to aligning by using a shadow mask seating table having an electromagnet and a permanent magnet simultaneously. Even when the glass substrate and the shadow mask are arranged in parallel and the three-axis position shifting means is applied to the shadow mask seating table, accurate alignment is possible.After alignment, the glass substrate and the shadow mask holder unit including a permanent magnet are used. After the mask is in close contact, the shadow mask seating table is moved out of the working position, and then the deposition process is performed in the same chamber. Therefore, accurate alignment and excellent deposition efficiency can be achieved at the same time.

Description

Evaporation Apparatus for Manufacturing Organic Electroluminescent Device Using Electromagnet and Evaporation Method Using The Same {Evaporation Apparatus for Manufacturing Organic Electro-Luminescent Display Device using Electromagnet and Evaporation Method using the same}

The present invention provides a deposition apparatus for manufacturing an organic electroluminescent display (OLED), a deposition method using the same, and more specifically, a shadow mask for pattern formation on a glass substrate by using an electromagnet and a permanent magnet. The present invention relates to an apparatus and a method capable of performing a vacuum deposition process after precisely aligning and adhering closely.

The organic light emitting display device (OELD) is a display device using a light emitting image generated when an electric field is applied to an electroluminescent element (hereinafter referred to as an EL element), which is a semiconductor material such as ZnS, CaS, or the like. Since the publication of SHARP's high-brightness long-life thin-film EL device, many studies have advanced the practical use of EL display.Kodak's CWTang manufactures thin-film EL device using organic dye and After reporting that green light emission is possible, research on organic EL having low driving voltage and advantageous process was activated.

Organic electroluminescent devices developed to replace inorganic electroluminescent display devices (GaN, ZnS, SiC), which have many disadvantages such as high driving voltage or low efficiency in blue light emission, are organic thin films and are light emitting layers and carrier transport layers. As a single-molecule organic EL device, andhrasene, Alq3 (alumina chinolium complex), and cyclopentadiene derivatives are mainly used as the single-molecule organic EL devices, and these single-molecule devices have a low driving voltage and a thin thickness close to 100 nm. Although it has advantages as a thin film material, it has disadvantages such as high heat safety and molecular rearrangement due to Joule heat generation when voltage is supplied.

On the other hand, PPP (poly <p-phenylene>) and PPV (poly <p-phenylen vinylene>) are used as the polymer organic EL devices. These devices have advantages of thermal stability and low driving voltage, There are disadvantages in terms of efficiency.

The stacked structure of an organic EL device (OELD) can be largely divided into a single-layer and a multi-layer. First, the single-layer type is composed of an electrode / light emitting layer / electrode. Cathode is a metal having a small work function (Ca, Mg, Al, etc. are used. The reason why the metal having a low work function is used as the electron injection electrode is that a high current density can be obtained in electron injection by lowering a barrier formed between the electrode and the electroluminescent organic material.

On the other hand, the anode is an electrode for hole injection, which has a high work function and uses a transparent metal oxide so that emitted light can come out of the device, and ITO (indium tin oxide) is most widely used, and is about 30 nm. It has a thickness of about. While ITO has the advantage of being optically transparent, it has the disadvantage of being difficult to control. The use of a metal having a high workfunction as the anode material is because it can prevent the reduction of efficiency through non-luminescence recombination at the anode.

Subsequently, glass is used as a substrate material, and as a light emitting layer (EML) material, monomolecular organic EL such as Alq3 and Anthracene, poly (p-phenylenevinylene) (PPV), polythiophene (PT), etc. Polymeric organic EL materials, their derivatives, are used, and a thin film thickness (100 nm) of the EML layer is required for charge emission at a low driving voltage.

On the other hand, in the multilayer type, an electron transport layer called an ETL (Electron tansporting Layer) and an hole transport layer called an HTL (Hole Transporting Layer) are added to a single layer stacked structure. ETL uses oxadiazole derivatives and HTL uses diamine derivatives TPD and photoconductive polymer poly (9-vinylcarbazole).

The combination of the transport layer increases the quantum efficiency (photons out per charge injected), and the driving voltage can be lowered through the two-step injection process of passing through the transport layer without carriers directly injected, electrons and holes injected into the light emitting layer Recombination can be controlled by blocking the transport layer on the opposite side when moving to the opposite electrode through the light emitting layer. This has the advantage that the luminous efficiency can be improved.

Also, in order to improve the luminous efficiency and to obtain the desired color, dopants of several percent of organic materials are usually doped in the light emitting layer, and the cathode is composed of a metal alloy in order to withstand high electrical conductivity, low work function and corrosion. It is formed by co-evaporation of other metals.

Therefore, the electrode and the organic light emitting layer on the glass substrate must be deposited according to a predetermined pattern and the shadow mask is used as a shielding means for this. That is, by depositing a shadow mask having a desired pattern shape on the substrate and then depositing the electrode, a light emitting layer having a desired pattern may be formed. In the present invention, a substrate on which an anode (ITO) pattern is formed is used, and a shadow mask is used to deposit the organic layer having the pattern thereon.

At this time, the shadow mask and the glass substrate should be aligned to match the predesigned pattern. To this end, the shadow mask is moved to match the marks formed on the glass substrate and the shadow mask while observing with a CCD camera. To the glass substrate.

Conventional manufacturing equipment uses a detachable device that raises and lowers the shadow mask in order to closely contact the shadow mask to the glass substrate surface. In this case, the entire surface of the shadow mask center portion should be closely attached to the glass substrate to form a circuit pattern. The shadow mask attaching and detaching apparatus described above is in close contact with the bottom surface of the glass substrate while supporting only the edge of the shadow mask. Therefore, a phenomenon in which the central portion of the shadow mask made of a thin metal plate sag due to gravity occurs. In particular, the larger the area of the shadow mask (that is, the larger the size of the manufactured OELD), the more the central sag phenomenon becomes more severe, and the glass substrate surface and the shadow mask are separated from each other, thereby preventing accurate circuit pattern formation.

In order to overcome this drawback, a device is developed in which a permanent magnet is placed on an upper portion of the glass substrate, and the substrate is brought into close contact with the substrate by pulling down the aligned metallic shadow mask by lowering the permanent magnet while the glass substrate is aligned with the shadow mask. However, even in such a device, the shadow mask sag still remains when the substrate and the shadow mask are aligned (that is, before the permanent magnet pulls the mask), and thus, the disadvantage that the exact alignment is difficult is not overcome.

Applicant of the present invention has disclosed a shadow mask detachment apparatus using a shadow mask seating table having an electromagnet and a permanent magnet in order to overcome this disadvantage. With this device, the goal of accurate alignment can be achieved, but the seating table is fixed under the substrate and deposition cannot be performed. Therefore, in the alignment chamber having the above-described detachable device, the substrate and the shadow mask are aligned, the substrate and the mask are in close contact with each other, and then the substrate is moved back to the deposition chamber for deposition. Therefore, as the chamber or time required for deposition increases, not only the overall production efficiency decreases, but also the manufacturing cost increases.

The present invention has been conceived to overcome these disadvantages, by using a shadow mask seating table having an electromagnet and a permanent magnet at the same time, so that the glass substrate and the shadow mask are arranged in parallel even when aligned, and the 3-axis position on the shadow mask seating table. Accurate alignment is possible by applying the moving means.After alignment, the glass mask is closely contacted with the glass substrate using the shadow mask holder unit including the permanent magnet, and then the shadow mask seating table is moved out of the working position and deposited in the same chamber. Allow the process to run. Therefore, accurate alignment and excellent deposition efficiency can be achieved at the same time.

An object of the present invention is to provide a deposition apparatus for manufacturing an organic light emitting device having a shadow mask detachable device using a permanent magnet and an electromagnet.

Another object of the present invention is to provide a deposition apparatus and a method which can easily perform the shadow mask position control at the time of accurate alignment and alignment, adhesion, and deposition of the glass substrate and the shadow mask.

Another object of the present invention is to enable good adhesion with the glass substrate over the entire area irrespective of the size of the shadow mask, and to enable excellent substrate-mask alignment by keeping the glass substrate and the mask parallel in alignment. It is to provide a vapor deposition apparatus.

It is still another object of the present invention to provide an apparatus and method capable of performing a deposition process in the same chamber after moving a shadow mask seating table outside a working position after alignment and adhesion of a shadow mask to a glass substrate. .

Another object of the present invention to provide a deposition method that can improve the deposition quality and deposition efficiency of the organic light emitting device by performing the position control of the mask using the above apparatus.

1 is a block diagram of an arrangement and deposition apparatus of an organic light emitting device according to the prior art (using only permanent magnets).

2 is a cross-sectional view showing the overall configuration of a vapor deposition apparatus according to the present invention.

3 is an enlarged cross-sectional view showing only a main part of the deposition apparatus.

4A is a detailed block diagram of the magnet block and the substrate holder of the shadow mask holder unit.

Figure 4b is a detailed configuration of the shadow mask seating table.

5 is a diagram illustrating a process of simultaneously performing mask-substrate alignment and deposition in one chamber using the deposition apparatus according to the present invention.

6 is an overall configuration diagram of a deposition apparatus according to a second embodiment of the present invention.

7 shows a process of performing deposition using the equipment according to the second embodiment.

8 shows a process for separating the mask from the substrate after the deposition process is completed.

* Description of the symbols for the main parts of the drawings *

100 chamber 110: stopper

200: shadow mask holder unit 210: (permanent) magnetic block

220: support rod 230: substrate holder

250: hollow block 260: (permanent) magnetic block

270: first support rod 280: second support rod

300: shadow mask seating table 310: electromagnet block

320: shadow mask seating plate 400: linear guide means

410: linear rail 500: CCD camera

600: shadow mask 700: glass substrate

In order to achieve the above object, the organic light emitting device deposition apparatus according to the present invention has the following configuration.

Vacuum chamber;

A shadow mask holder unit disposed on an upper portion of the vacuum chamber to support a glass substrate and having a permanent magnet to closely contact the aligned shadow mask on the glass substrate;

A three-axis position shifting means disposed under the shadow mask holder unit for mounting the shadow mask and controlled by a controller connected to the outside to align the glass substrate on the upper part with the mounted glass substrate, and one or more permanent magnets and electromagnets A shadow mask seating table comprising a;

Optical alignment means for checking the alignment of the glass substrate and the shadow mask;

Linear guide means for moving the shadow mask seating table from side to side within a vacuum chamber;

It is disposed outside the vacuum chamber and includes a control unit for controlling the polarity and magnitude of the current applied to the position, the linear guide means, and the electromagnet three-axis position moving means.

The permanent magnet of the shadow mask holder unit is composed of one or more permanent magnets arranged at predetermined intervals throughout the holder unit, the shadow mask seating table is provided with one or more electromagnets and permanent magnet assemblies disposed throughout, The magnetic force of the seating table can be adjusted by changing the magnitude and / or polarity of the current applied to the electromagnet.

According to a first embodiment of the present invention, a shadow mask holder unit includes a magnet block including a permanent magnet, a support rod fixed to an upper part of the magnet block to move the magnet block in the chamber, and a top and bottom with respect to the magnet block. It consists of a substrate holder that can be moved elastically.

The substrate holder is connected to the four elastic springs inserted into the through-grooves formed at the four corners of the magnetic block again, four shanghai rods inserted into the elastic springs to move up and down elastically with respect to the magnetic block, and two shandong rods. It consists of two substrate support bars (bar) having a locking step for hanging the edge of the glass substrate.

The magnet block includes a top plate having magnet seating grooves formed at predetermined intervals on a bottom surface thereof, a bottom plate spaced at a predetermined interval corresponding to the top plate, a plurality of permanent magnets interposed vertically between the top plate and the bottom plate, and the top plate. It is installed between the bottom plate and consists of a spaced frame that supports their edges.

On the other hand, according to the second embodiment of the present invention, the shadow mask holder unit is a hollow block, a magnetic block disposed in the hollow block and including a permanent magnet, and fixed to the hollow block upper portion of the hollow block in the chamber up and down A first support rod for moving, a second support rod fixed to an upper portion of the magnet block to move the magnet block up and down inside the hollow block, and a substrate holder capable of elastically moving up and down with respect to the hollow block. The holder is coupled to four elastic springs inserted into the through grooves formed at the four corners of the hollow block, four shanghai bars inserted into the elastic springs and elastically moved up and down with respect to the magnetic block, and two shanghai bars. It consists of two substrate support bars (bar) having a locking step for hanging the edge of the glass substrate.

The shadow mask seating table includes an electromagnet block having one or more electromagnet-permanent magnet assemblies and moved by three-axis positioning means, and a mask seating plate for seating the shadow mask. Each electromagnet / permanent magnet assembly consists of an electromagnet core, a permanent magnet disposed under the electromagnet core, a roll surrounding the electromagnet core and the permanent magnet, and a coil wound around the roll. The three-axis position shifting means operates to move the shadow mask seating table in the x, y, and θ directions.

In addition, the linear guide means comprises a linear rail on which the seating table is seated, and a driving means (driving motor) for moving the seating table along the linear rail.

The deposition method using the above-described apparatus may be implemented in the following two methods according to the two embodiments described above.

First, the first method using the apparatus according to the first embodiment of the present invention consists of the following steps.

After mounting the shadow mask on the seating table by the vacuum robot, the seating table is moved out of the working position by the linear guide means, and the glass substrate is mounted and fixed on the shadow mask holder unit using the vacuum robot. After moving the table back to the working position, a shadow mask is brought into close contact with the seating table by flowing a current to the electromagnet in a positive direction (a direction causing the magnetism to have the same polarization direction as that of the seating table). Moving to a first step;

A second step of aligning the glass substrate and the shadow mask by controlling the position of the seating table using the three-axis position shifting means while checking using the optical alignment means;

A third step of applying a reverse current to the electromagnet so that the magnetic force of the seating table is smaller than the magnetic force of the holder unit so that the shadow mask moves upward and closely adheres to the glass substrate;

A fourth step of moving the seating table out of the deposition workspace using the linear guide means; And,

The fifth step is to carry out the deposition in a vacuum.

After the shadow mask is in close contact with the glass substrate by the magnetic force of the holder unit in step 3, the sixth step of moving the holder unit on which the substrate + mask is mounted to the upper chamber of the deposition position, and blocking the current applied to the electromagnet It may further comprise. In this case, since the shadow mask has already moved near the holder unit and is within the magnetic range of the permanent magnet in the holder unit, even if the electric current flowing through the electromagnet is blocked, it is not drawn back to the seating table.

The method of mounting and fixing the glass substrate in the first step is to move the magnetic block upward so that the glass substrate is moved to the substrate support bar with the shank rod of the substrate holder moved downward by the stopper and the elastic spring at the top of the chamber. When the magnetic block is inserted down, the magnetic block is lowered, and then the contact between the stopper and the shandong rod is released, and the shandong rod is moved up by the elastic spring. As a result, the inserted glass substrate is in close contact with and fixed to the magnet block. . Of course, since the magnetic block is lowered more than when the glass substrate is inserted, it is closer to the shadow mask to be disposed below.

On the other hand, the second method using the apparatus according to the second embodiment of the present invention is constituted as follows.

A first step of mounting and fixing a glass substrate on the shadow mask holder unit in a state where the magnetic block is positioned above the hollow block, and mounting the shadow mask on a seating table;

A second step of aligning the glass substrate and the shadow mask by controlling the position of the seating table using the three-axis position shifting means while confirming using the optical alignment confirming means;

A third step of moving the magnetic block below the hollow block and applying a reverse current to the electromagnet so that the magnetic force applied by the seating table is smaller than the magnetic force of the holder unit so that the shadow mask moves upward and closely adheres to the glass substrate;

A fourth step of moving the seating table out of the deposition workspace using the linear guide means; And,

The fifth step is to perform deposition in the chamber under vacuum.

On the other hand, in both the first method and the second method, in order to separate the shadow mask from the substrate after the deposition process of the fifth step is completed, ① return the seating table to the deposition workspace using the linear guide means, ② After the shadow mask holder unit is lowered down, the magnetic force of the seating table is increased by applying a forward current to the electromagnet of the seating table, and further comprising a mask separation step of dropping the shadow mask onto the shadow mask seating table. Can be.

In addition, in the second method, in addition to the mask separation step as described above, ① return the seating table to the deposition workspace by using the linear guide means, ② lower the shadow mask holder unit down, and then the magnet block is placed on the upper side of the hollow block. It may further comprise a mask separation step of moving to the shadow mask to separate the shadow mask from the substrate and drop onto the shadow mask seating table, during the process of ②, a reverse current may be applied to the electromagnet. As described below, the magnetic force of the holder unit and the seating table is too strong to prevent the thin mask from being bent or deformed.

Hereinafter, with reference to the accompanying drawings will be described an embodiment of the present invention;

1 is a block diagram of an arrangement and deposition apparatus of an organic light emitting device according to the related art (using only permanent magnets), and includes a chamber 10 and a shadow mask holder unit disposed in the chamber and having permanent magnets. 20, a glass substrate holder 30, a shadow mask holder 40, a CCD camera 50, and a three-dimensional alignment means (not shown). Looking at the alignment process of the glass substrate and the shadow mask, first, the glass substrate 60 is mounted on the glass substrate holder 30, the shadow mask 70 is mounted on the mask holder, and then observed with a CCD camera 50. The dimensional alignment means is operated to move the substrate holder 30 and / or the mask holder 40 until the alignment mark M of the glass substrate and the alignment mark M 'on the mask coincide. After the alignment, the shadow mask holder unit 20 is moved downward, and then the mask is pulled by using the magnetic force of the permanent magnet to be in close contact with the glass substrate. After that, the deposition is carried out in a vacuum.

In this case, in the alignment step, the center portion sags because only the periphery is supported by the holder, so that the glass substrate and the mask are not parallel to the cross mark portion. To solve this problem, although the tension holding device 80 is provided to pull both ends of the shadow mask to tension it, it does not completely solve the deflection phenomenon. Therefore, the permanent magnet is lowered while the middle part of the mask is struck and the shadow is dropped. If the mask is attached to the glass, the center of the stroke may be raised and the alignment may be poor, and the shadow mask may be stretched or skewed even during the tension maintenance, and the vacuum robot may be damaged due to the weight of the tension holding device. There was a difficulty in transporting.

2 is a cross-sectional view showing the overall configuration of the deposition apparatus according to the first embodiment of the present invention, and includes a vacuum chamber 100, a shadow mask holder unit 200, and a shadow mask seating table (located inside the vacuum chamber). 300 and linear guide means 400, and four CCD cameras which are located inside or outside the chamber and are optical confirmation means for checking the alignment of the substrate and the mask.

In addition, a deposition source (source or Effusion Cell) used for deposition is disposed below the chamber, and after the shadow mask is aligned, the seating table is moved out of the deposition workspace, and organic matter contained in the deposition source is evaporated on the substrate by heating the deposition source. Is deposited. For reference, it is preferable to rotate the substrate and the shadow mask in the aligned state.

In the drawing, an opening is formed on the left side wall of the chamber for replacing the glass substrate, and the opening is opened and closed by the valve 810. In addition, the glass substrate may be automatically loaded and unloaded into the shadow mask unit holder 200 by an external robot. The driving motor 420 disposed on the lower right side constitutes a linear guide means together with the linear rail 410 and serves to move the shadow mask seating table 300 to the left and right.

The three-axis position moving means 340 included in the seating table finely moves the electromagnet block 310 placed thereon in the x, y, and θ directions to perform alignment of the shadow mask and the glass substrate. Each component will be described in more detail with reference to FIGS. 3 and 4 below.

3 is an enlarged cross-sectional view of only a main part of the deposition apparatus, and includes a part of the vacuum chamber 100, the shadow mask holder unit 200, the shadow mask seating table 300, the linear guide means 400, and the chamber. Four CCD cameras 500 are shown, located either inside or outside. For simplicity, the configuration of the lower chamber is omitted.

The shadow mask holder unit 200 is again a magnet block 210 including a permanent magnet, a support rod 220 fixed to the upper part of the magnetic block to move the magnetic block in the chamber, and elastically up and down with respect to the magnetic block The substrate holder 230 is movable.

The substrate holder 230 is connected to four elastic springs 231 inserted into the through-holes formed at four corners of the magnetic block, four shanghai bars 232 fitted into the elastic springs, and two shanghai bars. It consists of two glass substrate support bars 233 extending along one side of the magnetic block and having a glass substrate locking jaw 234 at the end thereof. In addition, four substrate holder stoppers 110 are formed on the upper surface of the chamber at positions corresponding to the upper portions of the shandong copper rods 232 of the substrate holder 230. Detailed configuration and operation thereof will be described in detail with reference to FIGS. 4A and 5.

The shadow mask seating table 300 may be moved by the three-axis position shifting means 340, and the electromagnet block 310 having a plurality of electromagnets and permanent magnet assemblies therein and a shadow mask seat for seating a mask. The plate 320 may be further provided with a mask transfer handle 330 for transferring the shadow mask 600 on the mask seating plate 320.

The linear guide means 400 for moving the shadow mask seating table 300 to the left and right under the shadow mask holder unit 200 is a linear rail 410 and a linear rail for moving the electromagnet block 310 to the left and right. It consists of a drive motor (420 of FIG. 2) as a drive means for moving an electromagnet block (mounting table).

4A is a detailed block diagram of the magnet block 210 and the substrate holder 230 of the shadow mask holder unit 200.

The magnet block 210 includes a top plate 212 made of metal such as nickel having a plurality of magnet seating grooves 211 formed thereon, and a bottom plate 213 spaced apart from each other at a predetermined distance in parallel with the top plate 212. It consists of a plurality of permanent magnets 214 inserted in the vertical direction between the upper plate and the lower plate, and a separation frame 215 connected to the periphery of the upper plate and the lower plate to support the upper plate and the lower plate in a spaced state. In addition, four through holes 216 are formed at four corners of the upper plate, the lower plate, and the support frame to insert the elastic spring 231 and the shandong copper rod 232 of the substrate holder 230.

In the arrangement of the permanent magnets 214 in the shadow mask holder unit 200, the polarity direction of each permanent magnet is not limited, and it is preferable to arrange all the permanent magnets in the same polarity direction for the convenience of manufacture (in the drawings, all permanent magnets). The lower part is arranged so that the north pole and the upper part are the south pole.

The substrate holder 230 includes four elastic springs 231 inserted into the through grooves 216 of the magnetic block, four shanghai bars 232 inserted into the elastic springs, and two magnets connected to the lower shank bars. It consists of two substrate support bars (233) extending along the sides of the block, each substrate support bar (233) end of each substrate support bar (233) is a substrate latching jaw 234 to hang on one side of the glass substrate Formed. In the drawing, the connecting bolt 235 is used to connect the substrate support bar 233 to the shandong rod 232. The head portion of the shandong rod 232 has a diameter larger than that of the elastic spring. In addition, when the shandong copper rod is moved downward, the elastic force is received upward by the interference of the movable rod head and the elastic spring. In addition, the head of the shandong copper rod is supported by a stop means (not shown) located in the upper portion of the through groove to prevent the movable rod from leaving the top plate.

In FIG. 4A, the glass substrate 700 is supported by the substrate holder and is in close contact with the lower plate 213 of the magnet block.

Figure 4b is a detailed configuration of the shadow mask seating table 300, the electromagnetic block 310 and the shadow mask seating plate 320 having a similar configuration (top, bottom, spaced frame) similar to the magnet block 210 described above. ) Is shown. The electromagnet block 310 is provided with a plurality of electromagnet and permanent magnet assembly 340 disposed in the vertical direction.

Each electromagnet / permanent magnet assembly 340 includes an electromagnet core 341 located at the top, a permanent magnet 342 located at the bottom of the electromagnet core, a roll 343 and a roll surrounding the electromagnet core and the permanent magnet. It consists of a coil 344 wound around. The electromagnet core is a magnetic material capable of generating magnetic force by electric current, and a ferrite-based magnetic material or nickel may be used. By changing the magnitude and polarity of the current flowing through the coil, the magnetic force of the permanent magnet can be strengthened or weakened, and thus the total magnetic force of the electromagnet block can be freely changed.

For example, as shown in FIG. 4B, when the permanent magnet 342 is disposed so that the N pole is upward, and a forward current is applied to the electromagnet, the upper part of the electromagnet core is also formed as the N pole, the magnetic force of the permanent magnet and the magnet of the electromagnet are In addition, the magnetic force of the seating table as a whole increases. On the contrary, if the S pole is formed on the upper side of the electromagnet core by applying a reverse current, the magnetic force of the permanent magnet is reduced, thereby reducing the overall magnetic force.

Like the permanent magnet 214 arrangement of the shadow mask holder unit 200, there is no limitation in the direction of polarization of the permanent magnet 342 in the arrangement of the electromagnet and the permanent magnet assembly. Likewise, all the permanent magnets 342 are disposed in the same polar direction. It is preferable. In this case, however, the winding directions of the coils wound around the electromagnets should be the same so that all electromagnets and permanent magnet assemblies generate the same magnetic force when a current having a certain polarity is applied.

In addition, it is preferable to maximize the magnetic force in the shadow mask direction by providing a magnetic shield surrounding the periphery and the bottom of the electromagnet 341.

In the drawings, the electromagnet / permanent magnet assembly of the above-described type is used, but the present invention is not limited thereto, and any form may be used as long as it is made of at least one permanent magnet and at least one electromagnet for strengthening or weakening the magnetic force of the permanent magnet. will be. For example, it may consist of one large plate-shaped permanent magnet and one or more electromagnets disposed thereon.

5 is a diagram illustrating a process of simultaneously performing mask-substrate alignment and deposition in one chamber using the deposition apparatus according to the present invention.

Figure 5a is a process of loading the shadow mask 600 on the shadow mask seating table 300 of the deposition apparatus according to the present invention. In order to protect the thin shadow mask, a mask is placed on the mask seating plate 320 and then loaded on the upper surface of the shadow mask seating table 300 using a vacuum robot.

5B illustrates a glass substrate loading process. When the supporting rod 220 moves upward to move the magnet block 210, the upper portion of the shandong rod 232 of the substrate holder 230 is placed on the upper surface of the chamber 100. Interfering with the disposed stopper 110 moves downward. Therefore, the substrate support bar 233 moves downward to be spaced apart from the magnet block 210 to some extent. In this state, the substrate is loaded by pushing the substrate 700 into the locking step 234 of the substrate support bar 233. After the substrate is loaded, the magnet block 210 moves downward again, and as shown in FIG. 4C, the substrate support bar 233 is raised by the elastic restoring force of the spring 231, so that the glass substrate is lowered from the magnet block 210. Close to

In this case, as shown in Figure 5c, the seating table 300 mounted with the shadow mask is already located below the substrate. In addition, the shadow mask 600 by the permanent magnet of the magnet block 210 is moved down by the current is applied to the electromagnet 341 of the electromagnet block in the forward direction, which is a direction to strengthen the magnetic force of the permanent magnet 342 is close to the shadow mask ) Should not be dragged upwards (as shown in Figure 4b).

5C illustrates a process of aligning the shadow mask and the glass substrate.

In the state where the shadow mask is in close contact with the seating table 300 by applying a forward current to the electromagnet, the seating table 300 is checked until the alignment mark of the shadow mask coincides with the alignment mark of the glass substrate while checking with the CCD camera 500. Drive the three-axis position shift means to finely adjust the seating table in the x, y and θ directions.

After the alignment, the controller (not shown) flows a reverse current through the electromagnet to reduce the magnetic force of the seating table. Therefore, the shadow mask is pulled up by the magnetic block 210 having a relatively high magnetic force to be in close contact with the glass substrate.

After the substrate and the shadow mask are in close contact, it is preferable to raise the substrate and the magnetic block to the deposition position and block the applied reverse current. Even if the current is cut off, the shadow mask is already under the magnetic field of the magnetic block 210, so it is not dragged down to the seating table again. Rather, the deposition characteristic of the substrate-mask is changed by the heat generated when the current is continuously applied. It's also useful for preventing things.

In the present embodiment, the maximum magnetic flux on the surface of the substrate is about 300 gauss while the substrate is in close contact with the permanent magnet block 210, and the magnetic flux of the electromagnet block on the seating table is about 300 gauss before applying the current. It was about 400 gauss when applied and about 200 gauss when reverse current was applied. Therefore, after the shadow mask is in close contact with the substrate, even if the current is blocked, the close contact state of the substrate-mask is maintained.

5D illustrates a deposition step, in which the driving motor (not shown) of the linear guide means 400 is driven while the substrate 700 and the mask 600 are aligned and in close contact with each other. By moving to the right, you get out of the working area.

In this state, when the deposition source under the chamber is heated, the organic matter contained in the deposition source is evaporated by heating to deposit on the substrate. All of the above steps are done in vacuo, and during the deposition step the substrate and shadow mask are rotated in an aligned state to achieve even deposition.

Meanwhile, when the deposition process is completed, the mask must be separated from the substrate in order to perform deposition on another substrate. That is, the mask must be removed, the new (non-deposited) substrate must be remounted, and alignment and deposition performed.

This mask separation process is not shown, but in the following manner.

First, the seating table that was outside the work area during the deposition process is returned to the deposition work space. ② The shadow mask holder unit is lowered, and then the magnetic force of the seating table is increased by applying a forward current to the electromagnet of the seating table. The shadow mask is dropped onto the shadow mask seating table.

6 is an overall configuration diagram of a deposition apparatus according to a second embodiment of the present invention.

All other components except the shadow mask holder unit are the same as those of the apparatus according to the first embodiment, and thus redundant description is omitted.

The shadow mask holder unit 200 according to the second embodiment is a hollow block 250 having a hollow rectangular parallelepiped shape, a magnet block 260 disposed inside the hollow block and including a permanent magnet, and fixed to an upper portion of the hollow block. A first support rod 270 for moving the hollow block up and down in the chamber, and a second support rod 280 inserted into the first support rod and fixed at an upper end of the magnet block to move the magnet block up and down within the hollow block; And a substrate holder 230 capable of elastically moving up and down with respect to the hollow block, wherein the substrate holder 230 has four elastic springs 231 inserted into through holes formed at four corners of the hollow block 250. And four shanghai-dong rods 232 inserted into the elastic spring and elastically moving up and down with respect to the magnet block, and coupled to two shanghai-dong rods, and having a locking jaw for hanging the edge of the glass substrate. It made of; (233 bar) 2 of the substrate support bar.

The shadow mask holder unit according to the second embodiment is provided with a hollow block 250 in addition to the permanent magnet block 260, and in the hollow block in addition to the first support rod 270 that performs shangdong of the entire holder unit. It is different from the first embodiment in that it has a second supporting rod 280 for moving only the magnetic block up and down.

7 shows a process of performing deposition using the equipment according to the second embodiment. Unlike FIG. 5, the shadow mask holder unit includes a hollow block and a magnetic block, and thus the relative positions of the two blocks change at each step, and thus, the shadow mask holder unit will be described.

First, FIG. 7A illustrates loading the shadow mask to be used, and mounts the shadow mask on the seating table using the robot and the mask carrier handle 330. In this process, the magnetic block 260 is positioned above the hollow block 250 so that the magnetic force of the permanent magnet does not reach the mask.

Next, after mounting the substrate on the holder unit in a process similar to that of FIG. 5B, the substrate is moved downward to enter an alignment step as shown in FIG. 7B.

In the alignment step, as in the first embodiment of FIG. 5, a forward current is applied to the electromagnet of the seating table so that the mask is in close contact with the table. During the alignment process, the magnetic block 260 of the holder unit is kept on top of the hollow block 250 so that the magnetic force does not reach the mask. In this state, alignment is performed by driving a three-axis position shifting means (not shown) while observing with a CCD camera.

After the alignment, the mask holding process as shown in FIG. 7C is performed to bring the mask into close contact with the substrate. That is, the magnetic block 260 is moved below the hollow block 250 while applying a reverse current to the electromagnet. Since the magnetic force by the permanent magnet (magnet block) is stronger than the magnetic force of the electromagnet, the mask 600 is pulled up to closely contact the substrate 700, and after the contact, the mask holder unit is moved to an upper deposition position. In the deposition position, the distance between the seating table and the mask becomes far, so that the magnetic force of the seating table is hardly affected. Therefore, the applied reverse current may be removed.

FIG. 7D shows a deposition process. After the mask holder unit with the substrate + mask is raised to the deposition position, the seating table 300 is moved out of the (deposition) work space using a linear guide means, and even deposition is performed. In order to perform the deposition while rotating the holder unit.

8 shows a process for separating the mask from the substrate after the deposition process is completed.

The illustrated process is according to the second embodiment of the above-described substrate-mask separation method.

First, when deposition is completed, the seating table 300 is returned to the work space (ie, the lower part of the mask holder unit), and the mask holder unit is lowered to the same height as in the alignment step (FIG. 8A). Next, when the magnetic block 260 inside the hollow block 250 is moved upward, the magnetic force caused by the (permanent) magnetic block is weakened so that the mask is separated from the substrate and falls down (FIG. 8B). The dropped shadow mask is mounted on the seating table again, and a new substrate is mounted to repeat the process of FIGS. 7B to 7D. At this time, since the magnet (electromagnet + permanent magnet) of the seating table and the magnet (magnet block) of the mask holder unit pull the mask with strong magnetic force equal to each other, the mask may be bent or deformed during separation if the mask is thin. Therefore, in order to prevent this, it is possible to weaken the magnetic force by applying a reverse current to the electromagnet.

In addition, when there is no fear of mask deformation, the mask may be separated by simply applying a forward current to the electromagnet to increase the magnetic force without moving the magnet block.

After removal, the holder unit moves back to the upper part of the chamber to replace the substrate, and after moving to the upper part, the seating table can maintain the mask without the influence of the electromagnet, so that any applied reverse or forward current may be removed. (FIG. 8C).

In the present invention as described above, by using a mask seating table having an electromagnet and a permanent magnet, not only the shadow mask and the glass substrate can be excellently aligned, but also the seating table is placed after the shadow mask is aligned and adhered to the substrate. By using the linear guide means to move out, the mask-substrate alignment and the deposition process can be simultaneously performed in one chamber.

Therefore, not only the number of chambers required for fabricating the organic light emitting display device can be reduced, but also the manufacturing time and manufacturing cost can be drastically reduced.

Claims (17)

Vacuum chamber; A shadow mask holder unit disposed on the vacuum chamber and moving up and down, the shadow mask holder unit supporting a glass substrate and having a permanent magnet for closely contacting the aligned shadow mask on the glass substrate; A three-axis position shift means disposed under the shadow mask holder unit for mounting the shadow mask and controlled by an externally connected control unit for aligning the shadow mask on the upper part with the mounted glass substrate, one or more permanent magnets and electromagnets A shadow mask seating table comprising a; Optical alignment checking means for checking an alignment state of the glass substrate and the shadow mask; Linear guide means for moving the shadow mask seating table from side to side within a vacuum chamber; And a control unit arranged outside the vacuum chamber to control the polarity and the magnitude of the current applied to the three-axis position shifting means, the linear guide means, and the electromagnet. The method of claim 1, The shadow mask holder unit is composed of a magnet block including a permanent magnet, a support rod fixed to the upper part of the magnet block to move the magnet block up and down in the chamber, and a substrate holder capable of elastically moving up and down with respect to the magnet block. , The substrate holder includes four elastic springs inserted into the through grooves formed at four corners of the magnetic block, four shanghai rods inserted into the elastic springs to move up and down elastically with respect to the magnetic block, and two shanghai bars. Evaporation apparatus for manufacturing an organic light emitting device, characterized in that consisting of two substrate support bars (bar) having a locking step for hanging the edge of the glass substrate. The method of claim 2, The magnet block includes a top plate having magnet seating grooves formed at predetermined intervals on a bottom surface thereof, a bottom plate spaced at a predetermined interval corresponding to the top plate, a plurality of permanent magnets interposed in the vertical direction between the top plate and the bottom plate, and Evaporation apparatus for manufacturing an organic light emitting device, characterized in that formed between the upper plate and the lower plate to support the edge of the separation frame. The method of claim 1, The shadow mask seating table includes an electromagnet block having one or more electromagnet and permanent magnet assemblies and moved by three-axis position moving means, and a mask seat for seating the shadow mask. Each electromagnet / permanent magnet assembly comprises an electromagnet core, a permanent magnet disposed under the electromagnet core, a roll surrounding the electromagnet core and the permanent magnet, and a coil wound around the roll. Deposition apparatus for device fabrication. The method of claim 1, The linear guide means is a deposition apparatus for manufacturing an organic light emitting device, characterized in that the linear rail on which the seating table is seated, and driving means for moving the seating table from side to side along the linear rail under the control of the controller. The method of claim 1, The shadow mask holder unit includes a hollow block, a magnetic block disposed in the hollow block and including a permanent magnet, a first support rod fixed to the hollow block to move the hollow block up and down in the chamber, and the first block. Is inserted into the support rod and is fixed to the upper end of the magnetic block consists of a second support rod for moving the magnetic block up and down inside the hollow block, and a substrate holder that can be moved up and down with respect to the hollow block, The substrate holder has four elastic springs inserted into the through grooves formed at four corners of the hollow block, four shangong rods inserted into the elastic springs to move up and down elastically with respect to the magnetic block, and two shanghai bars. Evaporation apparatus for manufacturing an organic light emitting device, characterized in that consisting of two substrate support bars (bar) having a locking step for hanging the edge of the glass substrate. As a method using the deposition apparatus according to any one of claims 1 to 5, A first step of mounting and fixing a glass substrate on the shadow mask holder unit and mounting the shadow mask on a seating table; A second step of aligning the glass substrate and the shadow mask by controlling the position of the seating table using the three-axis position shifting means while confirming using the optical alignment confirming means; A third step of applying a reverse current to the electromagnet so that the magnetic force of the seating table is smaller than the magnetic force of the holder unit so that the shadow mask moves upward and closely adheres to the glass substrate; A fourth step of moving the seating table out of the deposition workspace using the linear guide means; And, A deposition method for fabricating an organic light emitting display device, comprising the fifth step of performing deposition in the chamber in a vacuum state. The method of claim 7, wherein After the shadow mask is in close contact with the glass substrate by the magnetic force of the holder unit in the third step, further comprising a sixth step of raising the substrate and the magnetic block to the deposition position and blocking the reverse current applied to the electromagnet Evaporation method for fabricating an organic light emitting device. The method according to claim 7 or 8, Mounting and fixing the glass substrate in the first step, Moving the magnetic block upward and inserting the glass substrate onto the latching jaw of the substrate support bar in a state in which the shandong rod of the substrate holder is moved downward by interfering with a stopper provided at the top of the chamber; When the magnetic block is lowered down, the contact between the stopper and the shanghai rod is released and the shanghai rod is moved up by the elastic spring, and as a result, the inserted glass substrate is in close contact with and fixed to the magnetic block. Deposition method for device fabrication. The method of claim 9, During the mounting and fixing of the glass substrate in the first step, fabricating an organic light emitting display device increases the magnetic force of the electromagnet block by applying a forward current to the electromagnet so that the shadow mask adheres and is fixed on the seating table. Evaporation method. As a method using the deposition apparatus according to claim 6, A first step of mounting and fixing a glass substrate on the shadow mask holder unit in a state in which the magnetic block is positioned above the hollow block, and mounting the shadow mask on a seating table; A second step of aligning the glass substrate and the shadow mask by controlling the position of the seating table using the three-axis position shifting means while confirming using the optical alignment confirming means; A third step of moving the magnetic block below the hollow block and applying a reverse current to the electromagnet so that the magnetic force applied by the seating table is smaller than the magnetic force of the holder unit so that the shadow mask moves upward and closely adheres to the glass substrate; A fourth step of moving the seating table out of the deposition workspace using the linear guide means; And, A deposition method for fabricating an organic light emitting display device, comprising the fifth step of performing deposition in the chamber in a vacuum state. The method of claim 11, After the shadow mask is in close contact with the glass substrate by the magnetic force of the holder unit in the third step, further comprising the sixth step of raising the holder unit to the deposition position and blocking the reverse current applied to the electromagnet Evaporation method for fabricating an organic light emitting device. The method according to claim 11 or 12, Mounting and fixing the glass substrate in the first step, Moving the hollow block upward and inserting the glass substrate onto the latching jaw of the substrate support bar in a state in which the shandong rod of the substrate holder is moved downward by interfering with a stopper provided at the top of the chamber; When the hollow block is lowered down, the contact between the stopper and the shanghai rod is released, and the shanghai rod is moved up by the elastic spring, and as a result, the inserted organic glass substrate is in close contact with and fixed to the magnetic block. Deposition method for device fabrication. The method of claim 13, During the mounting and fixing of the glass substrate in the first step, fabricating an organic light emitting display device increases the magnetic force of the electromagnet block by applying a forward current to the electromagnet so that the shadow mask adheres and is fixed on the seating table. Evaporation method. The method according to claim 11 or 12, After the deposition process of the fifth step is completed, to separate the shadow mask from the substrate, ① return the seating table to the deposition workspace using the linear guide means, (2) after lowering the shadow mask holder unit downward, the magnetic block is moved to the upper portion of the hollow block to separate the shadow mask from the substrate, and further comprising a seventh step of dropping onto the shadow mask seating table. Evaporation method for manufacturing an electroluminescent device. The method of claim 15, During the process of ②, the deposition method for manufacturing an organic light emitting device, characterized in that for applying a reverse current to the electromagnet. The method according to claim 11 or 12, After the deposition process of the fifth step is completed, to separate the shadow mask from the substrate, ① return the seating table to the deposition workspace using the linear guide means, (2) further comprising an eighth step of lowering the shadow mask onto the shadow mask seating table by lowering the shadow mask holder unit downwards, thereby increasing the magnetic force of the seating table by applying a forward current to the electromagnet of the seating table; Evaporation method for manufacturing an organic light emitting device, characterized in that.