CN106862685B - A kind of electrolysis electric discharge machining method using plane foil electrode - Google Patents
A kind of electrolysis electric discharge machining method using plane foil electrode Download PDFInfo
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- CN106862685B CN106862685B CN201710103774.0A CN201710103774A CN106862685B CN 106862685 B CN106862685 B CN 106862685B CN 201710103774 A CN201710103774 A CN 201710103774A CN 106862685 B CN106862685 B CN 106862685B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
- B23H5/00—Combined machining
- B23H5/02—Electrical discharge machining combined with electrochemical machining
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
- B23H9/00—Machining specially adapted for treating particular metal objects or for obtaining special effects or results on metal objects
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Abstract
The invention belongs to micro processing fields, in particular to a kind of electrolysis electric discharge machining method and its device using plane foil electrode, the process of the designed device includes: that cell reaction generates bubble, bubble coalescence conjunction is formed with insulating layer, plane electrode Bending Deformation is formed with discharge channel, the ablation of material with dish out, deionization and electrode deformation restore five stages, realize the Fine Feed of electrode position in processing, solves the problems, such as the control of electrolysis electrical discharge machining intermediate gap, compared with the processing method of traditional single-point electric discharge, the electro-discharge machining of entire plane may be implemented in plane foil electrode, substantially increase processing efficiency, apparatus structure is simple, it is low in cost, make high-precision, low cost, efficient fine machining method is possibly realized, with important theory significance and engineering application value.
Description
Technical field
The invention belongs to micro processing field, in particular to a kind of electrolysis electrical spark working using plane foil electrode
Work method and device thereof.
Background technique
With microscopic dimensions product answering extensively in fields such as MEMS, Microfluidics, biomedical test macros
With the processing of miniature components receives great attention.In order to seek efficient, high-precision, economic cost in modern industry
Low miniature parts machining scheme, researcher is using special processing technologies such as electrical discharge machining, Electrolyzed Processings and is based on
Research is unfolded in the micrometer-nanometer processing technology of photoetching technique.In small lot processing, special processing technology is more more economical than photoetching technique
Material benefit.Special processing technology is reached using energy such as electric energy, thermal energy, luminous energy, electrochemical energy, chemical energy, sound energy and special machine energy
To the purpose of removal material.Processing method by thermal energy includes laser processing and electrical discharge machining, and laser processing is usually used in making pottery
The manufacture of porcelain, polymer and metal material, but this processing technology needs expensive equipment and very high maintenance cost, and processes
The presence of middle heat affected area limits its application in Precision Machining.Micro EDM and Wire-cut Electrical Discharge Machining are same
Sample removes material using thermal energy, is widely applied in miniature parts processing, but the disadvantage is that be only capable of processing conductive material.
The Ultrasonic machining of material can be removed by special machine and abrasive flow machining achieves good effect in crisp and hard material manufacture,
And without considering the electric conductivity of rapidoprint, but because can not processing flexibility material limit its application.By the electrolysis of chemical energy
The processing that complicated miniature structure can be achieved is processed, and surface smoothness is good, but the disadvantage is that scale error is big, can not process depth
The bigger structure of width.Various workpieces material can be processed, without considering material hardness, intensity, leading in needs based on industrial application
Electrical processing method starts the concern for causing industry.
Electrolysis electrical discharge machining makes to form high-potential gracient between electrode and workpiece by the bubble that electrochemical reaction is formed, and draws
Rise spark disruptive discharge, with the effects of the TRANSIENT HIGH TEMPERATURE of spark discharge and shock wave come achieve the purpose that remove workpiece.Electrolysis electricity
The advantages of spark processing has both Electrolyzed Processing and electrical discharge machining is electrolysed electrical discharge machining compared with traditional special process method
It is not limited by the strength of materials, hardness and electric conductivity, in conductive material and non-conducting material, hard brittle material and flexible material processing
In can all apply.
Processing gap control is always to be electrolysed the problem of electrical discharge machining, and ball-screw adds AC servo motor or straight at present
Line motor is the servo drive of mainstream, and with advances in technology, the precision of both driving mechanisms is also being continuously improved, and is matched
The linear motor for closing high-accuracy grating scale can achieve higher feed accuracy, but independent use still can not fully meet electrolysis
The feeding of electrical discharge machining elaborate servo and the requirement for stablizing processing.Meanwhile the fluid for improving small processing gap electrolyte inside is dynamic
Mechanical condition establishes reasonable flow field, and guaranteeing that electrolysate excludes smoothly is also the important of raising electrolysis EDM Performance
Means.With the proposition of micro- factory's concept, start to occur dedicated for processing the device of micro- part, basic skills is will be traditional
Digital control system miniaturization, can effectively solve the problems, such as this using MEMS in process.
For example, CN105269094A provides a kind of ultrasonic vibration assist electricity towards the processing of non-conductive hard brittle material
Solve wire electric discharge machine method and device.Processing method of the present invention is using ultrasonic vibration along the axial excitation work of wire electrode
Cell reaction occurs in the electrolytic solution for part, wire electrode and auxiliary electrode, makes that hydrogen is precipitated around wire electrode, and then formation air film makes
Wire electrode and electrolyte insulate.Processing unit (plant) of the present invention includes bed piece, electrolysis-wire electric discharge machining device, ultrasonic vibration
Unit and workbench；Bed piece is equipped with wire storage tube, driving wheel, tensioning apparatus, wheel bracket；Electrolysis-Wire EDM
Device includes the clamping device of fixed workpiece, workpiece, main shaft, wire drive device, wire electrode, the working liquid container for filling electrolyte, auxiliary
Help electrode, electrolysis-electric spark power supply；Auxiliary electrode connects electrolysis-electric spark power supply anode, and wire electrode passes through external wire feeder
Cathode is connect, the program is suitable only for wire cutting.
In addition, to provide a kind of complex-curved no recast layer list/group hole Multi-station electrical spark-electrolysis multiple by CN103611994A
Close machining tool, including machine body, cathod system, working solution circulating system, power-supply system and control system, power-supply system its
Control circuit controls the switching of different wave power supply according to different process requirements, and power supply signal is applied to tool electricity through output circuit
Pole and workpiece power-supply system carry out tool-electrode independently-powered using single loop or multiloop power supply mode；Working solution circulation
The specific demand of fliud flushing free switching, the program inside and outside pipe electrode needed for switching device can realize electric spark-electrolysis Compound Machining
Precision machine tool and high sensor and the algorithm of complexity is needed to control gap.
Summary of the invention
In view of technical problem of the existing technology, the present invention provides a kind of electrolysis using plane foil electrode
Spark discharge processing unit (plant), comprising: fixed structure, feeding adjusting device, the pulse power, plane foil electrode and work
Part, solution tank, feeding adjusting device are fixed on fixed structure, and plane foil electrode is installed under feeding adjusting device
Side, workpiece are installed in solution tank, are located at plane foil base part, and feeding adjusting device is driven using servo motor,
It can realize that the macro feeding of electrode upright position makes foil and 5 μm -50 μm of workpiece spacing by process control；Foil
A capacitor C is formed with workpiece, foil and workpiece are respectively the two poles of the earth of capacitor C, and the two poles of the earth connect shape with the pulse power respectively
At electrolytic cell, pulse power voltage is about 5v-100v, is loaded with electrolyte inside solution tank, can adjust electrolysis by pump
The height of liquid.It is specific as shown in Figure 1.
It is preferred that workpiece material can be metal such as 304 stainless steels, affiliated electrolyte is passivation electrolyte sodium nitrate, electrolyte leaching
No workpiece.Sodium nitrate solution is 20g/l, and solvent is deionized water.
Wherein, for plane lamina electrode as tool-electrode, zigzag or channel-shaped electrode, tool-electrode is can be used in tool-electrode
Deformation quantity it is directly proportional to length be inversely proportional to the thickness, it is little with wide association, it is general select electrode plane electrode be with a thickness of
30 μm, width is 2500 μm, the rectangular shape that length is 6000 μm, is pressed from both sides by being installed on the fixation device below feeding adjusting device
It holds, preferred embodiment is that plane electrode one end is fixed on clamping device, and the other end is unlocked, rides on clamping device.
Still a further object of the present invention is to provide a kind of electrolysis electric discharge machining method using plane foil electrode, make
With processing unit (plant) above-mentioned, comprising: (1) cell reaction generates bubble, (2) bubble coalescence merges and insulating layer formation, (3) plane
Electrode bending deformation and discharge channel formed, the ablation of (4) material and is dished out, (5) deionization and electrode deformation recovery.
The concrete scheme of the processing method include: (1) cell reaction generate bubble, after cell reaction starts, hydrogen and
Oxygen bubble generates on plane foil electrode and workpiece respectively；(2) when supply voltage is higher than certain threshold value, plane
The speed of the generation hydrogen of electrode is greater than the speed of hydrogen emersion liquid level of electrolyte, and hydrogen starts to collect around in plane electrode,
Until being formed about a gas-insulated layer in plane electrode；(3) this insulating layer can block the electricity of interpolar in a short time
Stream causes interpolar to form high field, since the effect of high field makes to form electrostatic force between the two poles of the earth, flat thin metal
Plate electrode bends deformation under the action of electrostatic force to workpiece direction, reduces interpolar distance so as to cause electric between the two poles of the earth
Field intensity continues to increase, and when workpiece and sufficiently small plane electrode distance, dielectric is breakdown, generates spark discharge, reaches
Remove the purpose of material.(4) instantaneous specific a large amount of heat is pointed out in electric discharge, by the workpiece material thawing and gasification of point of discharge, together
When generate very big explosive force the workpiece material for being melted and gasify dished out, form the pit that discharges.(5) present invention in workpiece and
While forming spark discharge between electrode, the charge of interpolar is also released, and is gradually reduced interpolar electrostatic force, flat thin metal
The deformation of plate electrode also restores therewith, and the distance between workpiece and electrode is made to become larger again, avoids the generation of irregular electric arc,
Also contribute to the discharge of scrap in electro-discharge machining.After the deformation of electrode restores completely, it is returned to the state of cell reaction, is repeated
This process, plane foil electrode are formed under the action of the pulse power using the gas-insulated layer in cell reaction
High field, so that the driving in electrostatic force realizes that Fine Feed carries out electro-discharge machining.
It is preferred that step (1) the cell reaction stage, as shown in Fig. 2, include fed by regulating device it is close to workpiece,
Plane foil electrode (tool) electrode is immersed in electrolyte, tool-electrode is connected with pulse power cathode, as electricity
Solve the cathode of reaction.The anode of the pulse power is connect with workpiece, as the anode of cell reaction, after the pulse power is powered, tool
Potential difference is generated between electrode and auxiliary electrode, cation is mobile to tool-electrode (cathode) in electrolyte, and anion is to workpiece
(anode) movement is moved, makes to chemically react in electrolyte.Plane foil (cathode) surrounding as tool-electrode starts
Hydrogen gas bubbles are generated, and the generation rate of hydrogen gas bubbles and pulse power voltage, pulsewidth have relationship, voltage is higher, and bubble generates
Rate is faster, and pulsewidth is bigger, and it is faster that bubble generates rate.
It is preferred that step (2) bubble coalescence merge that be formed with insulating layer include: the gas when pulse power voltage and pulsewidth are higher
When bubble generates rate greater than certain threshold limit value, the rate of the generation hydrogen of tool-electrode is greater than hydrogen emersion liquid level of electrolyte
Rate, hydrogen starts to collect around in tool-electrode, and as shown in Fig. 3 (a), bubble gradually merges after aggregation, until
Tool-electrode is formed about a gas-insulated layer, as shown in Fig. 3 (b).Since gas-insulated layer resistance is very big, charge is caused to exist
Workpiece surface aggregation near plane electrode and insulating layer, forms a plane-parallel capacitor, hinders insulating layer in a short time
The electric current of disconnected interpolar, interpolar form high field.
It is preferred that step (3) plane electrode Bending Deformation formed with discharge channel: interpolar formed high field after, charge
Start to assemble at the plane-parallel capacitor both ends that plane lamina electrode and workpiece form, gradually rises the voltage of interpolar, work as pole
Between voltage when reaching certain threshold value, plane lamina electrode is in a critical equilbrium position, when charge continues to assemble, voltage
After continuing increase, Bending Deformation takes place under the driving of electrostatic force in plane lamina electrode, make the distance of electrode and workpiece by
Decrescence small, as shown in Fig. 4 (a), interpolar is gradually increased away from interpolar electric field strength while being gradually reduced, when interpolar electric field strength foot
Enough big and interpolar away from it is sufficiently small when, the planar electrode surface as cathode starts runaway electron, high-strength between plane-parallel capacitor
It is quickly moved under the action of degree electric field to the workpiece surface as anode, electronics occurs with the particle of interpolar in the process of movement
Collision, is ionized into cation and electronics for contrasted between solid dielectric, and the gas-insulated layer between plane lamina electrode and workpiece is breakdown, puts down
Discharge channel is formed between face electrode and workpiece, as shown in Fig. 4 (b).
It is preferred that step (4) material ablation and dish out include: between plane electrode and workpiece formed discharge channel after, arteries and veins
Rush power supply continue to interpolar apply voltage, make in discharge channel electronics high speed to workpiece (anode) move, cation at a high speed to
Plane lamina electrode (cathode) movement, charged particle collide during high speed exercise, and the heat for colliding generation makes to discharge
Temperature in channel quickly increases, and points out instantaneously specific a large amount of heat in electric discharge, the workpiece material of point of discharge is melted and gasified,
Very big explosive force is generated simultaneously the workpiece material for being melted and gasifying is dished out, form electric discharge pit as shown in Figure 5.
It is preferred that step ((5) deionization and electrode deformation recovery include: interpolar formed discharge channel carry out material ablation
During, the charge on plane lamina electrode is promptly released into interpolar, reduces the voltage of interpolar, causes to be applied to flat thin
Electrostatic force on plate electrode is also gradually reduced, when electrostatic force is less than the elastic force of bending cantilever, the deformation of plane lamina electrode
Start to restore, electrode is moved to the direction far from workpiece, and interpolar distance becomes larger, and discharge channel is stretched, the grain in channel
Son is mutually neutralized and is gradually decreased, until being restored to the state before electric discharge.At the same time, electrolyte flows into interpolar, makes point of discharge
Temperature reduce, and the scrap dished out after ablation is washed away into interpolar out, so that interpolar is restored to cell reaction state, entrance is next
The discharge cycle of electrostatic drive electrolysis electrical discharge machining.The characteristics of plane electrode deformation restores after present invention formation discharge channel adds
The speed deionization of interpolar realizes Fine Feed and micro- rollback using the deformation of plane lamina electrode, can effectively reduce electrolysis electricity
The generation of irregular electric arc in spark processing, improves electrolysis EDM Performance.Meanwhile plane lamina electrode drives in electrostatic force
Reciprocating motion under dynamic also makes the process-cycle more regular, and interpolar is made to realize adaptive electro-discharge machining, the workpiece after processing
As shown in Figure 6.
As the preferred embodiment of processing method, the present invention pass through first fine electric spark linear cutter or fusion sediment at
Type method processes micro-electrode on plane foil, is mounted on feed arrangement using the metal bridge architecture of bending cantilever
Lower section, designed feed arrangement adjust the macro feed motion for realizing electrode position by motor.It is controlled by pulse signal
Switch mosfet charges between plane foil electrode and workpiece to control, and makes to connect sheet metal using electrostatic force
Metal bridge-type malformation with bending cantilever is subjected to displacement, and realizes the Fine Feed of electrode upright position.
Compared with the prior art, the beneficial effects of the invention include:
The present invention proposes a kind of use plane foil electrode for the problem of electrolysis electrical discharge machining intermediate gap control
Electrolysis electric discharge machining method and its device, design micro- servo feed mechanism using electrostatic theory, and using the pulse power with
The adaptive discharge mechanism of electrostatic drive Fine Feed realizes electro-discharge machining, processes gap by changing, improves the flowing of working solution
Situation guarantees that electrolysis electrical discharge machining product is smoothly discharged, solve servo feed precision not enough, the control of processing gap it is not smart
Really, the problems such as etched matter discharge is difficult, the processing method phase to meet the requirement of fine precision processing, with the electric discharge of traditional single-point
Than the electro-discharge machining of entire plane may be implemented in plane foil electrode, substantially increases processing efficiency, apparatus structure letter
It is single, it is low in cost, make it possible high-precision, low cost, efficient fine machining method, with important theory significance and
Engineering application value.
Detailed description of the invention
Fig. 1, plane foil are electrolysed electric discharge machining apparatus schematic diagram.
Fig. 2, cell reaction form bubble schematic diagram.
Fig. 3, insulating layer form schematic diagram, wherein 3 (a) bubble coalescence schematic diagrames, 3 (b) bubbles merge, and insulating layer is formed
Schematic diagram.
Fig. 4, discharge channel form schematic diagram, wherein 4 (a) motor Bending Deformation schematic diagrames, the formation of 4 (b) discharge channels are shown
It is intended to.
Fig. 5, material form pit schematic diagram after being removed.
Fig. 6, the workpiece schematic diagram after process finishing.
Fig. 7, workpieces processing schematic diagram, wherein Fig. 7 (a) is the workpiece block schematic illustration before processing；Fig. 7 (b) is after processing
Workpiece photo.
Specific embodiment
The specific embodiment of the method for the present invention is discussed in detail with reference to the accompanying drawing, but the present invention is not limited to this:
Embodiment 1
A kind of electrolysis spark discharge processing unit (plant) using plane foil electrode, comprising: fixed structure, feeding are adjusted
Regulating device, the pulse power, plane foil electrode and workpiece, solution tank, feeding adjusting device are fixed on fixed structure, are put down
Face foil electrode is installed below feeding adjusting device, and workpiece is installed in solution tank, is located at plane foil electrode
Lower section, feeding adjusting device are driven using servo motor, and it is thin can to realize that the macro feeding of electrode upright position makes by process control
Sheet metal and workpiece spacing are 5 μm -50 μm；Foil and workpiece form a capacitor C, and foil and workpiece are respectively electricity
Hold the two poles of the earth of C, the two poles of the earth connect to form electrolytic cell with the pulse power respectively, and pulse power voltage is about 5v-100v, in solution tank
Portion is loaded with electrolyte, and the height of electrolyte can be adjusted by pump.
The workpiece material can be metal, and affiliated electrolyte is passivation electrolyte sodium nitrate, and electrolyte submerges workpiece.
Wherein, tool-electrode can be used zigzag or channel-shaped electrode (size range of microprotrusion be 20 μm, and groove width can be
20 μm), as shown in Fig. 2, being clamped by being installed on the fixation device below feeding adjusting device, preferred embodiment is plane electrode one end
It is fixed on clamping device, the other end is unlocked, rides on clamping device.
Embodiment 2
Using the processing method of 1 processing unit (plant) of embodiment, preferred step (1) cell reaction stage, as shown in Fig. 2, packet
It includes, is fed by regulating device close to workpiece, plane foil electrode (tool) electrode is immersed in electrolyte, tool
Electrode is connected with pulse power cathode, the cathode as cell reaction.The anode of the pulse power is connect with workpiece, anti-as electrolysis
The anode answered generates potential difference after the pulse power is powered between tool-electrode and auxiliary electrode, cation is to tool in electrolyte
Electrode (cathode) is mobile, and anion moves (anode) movement to workpiece, makes to chemically react in electrolyte.As tool-electrode
Start to generate hydrogen gas bubbles, and the generation rate of hydrogen gas bubbles and pulse power voltage, arteries and veins around plane foil (cathode)
Width has relationship, and voltage is higher, and bubble generation rate is faster, and pulsewidth is bigger, and it is faster that bubble generates rate.
It is preferred that step (2) bubble coalescence merge that be formed with insulating layer include: the gas when pulse power voltage and pulsewidth are higher
When bubble generates rate greater than certain threshold limit value, the rate of the generation hydrogen of tool-electrode is greater than hydrogen emersion liquid level of electrolyte
Rate, hydrogen starts to collect around in tool-electrode, and as shown in Fig. 3 (a), bubble gradually merges after aggregation, until
Tool-electrode is formed about a gas-insulated layer, as shown in Fig. 3 (b).Since gas-insulated layer resistance is very big, charge is caused to exist
Workpiece surface aggregation near plane electrode and insulating layer, forms a plane-parallel capacitor, hinders insulating layer in a short time
The electric current of disconnected interpolar, interpolar form high field.
It is preferred that step (3) plane electrode Bending Deformation formed with discharge channel: interpolar formed high field after, charge
Start to assemble at the plane-parallel capacitor both ends that plane lamina electrode and workpiece form, gradually rises the voltage of interpolar, work as pole
Between voltage when reaching certain threshold value, plane lamina electrode is in a critical equilbrium position, when charge continues to assemble, voltage
After continuing increase, Bending Deformation takes place under the driving of electrostatic force in plane lamina electrode, make the distance of electrode and workpiece by
Decrescence small, as shown in Fig. 4 (a), interpolar is gradually increased away from interpolar electric field strength while being gradually reduced, when interpolar electric field strength foot
Enough big and interpolar away from it is sufficiently small when, the planar electrode surface as cathode starts runaway electron, high-strength between plane-parallel capacitor
It is quickly moved under the action of degree electric field to the workpiece surface as anode, electronics occurs with the particle of interpolar in the process of movement
Collision, is ionized into cation and electronics for contrasted between solid dielectric, and the gas-insulated layer between plane lamina electrode and workpiece is breakdown, puts down
Discharge channel is formed between face electrode and workpiece, as shown in Fig. 4 (b).
It is preferred that step (4) material ablation and dish out include: between plane electrode and workpiece formed discharge channel after, arteries and veins
Rush power supply continue to interpolar apply voltage, make in discharge channel electronics high speed to workpiece (anode) move, cation at a high speed to
Plane lamina electrode (cathode) movement, charged particle collide during high speed exercise, and the heat for colliding generation makes to discharge
Temperature in channel quickly increases, and points out instantaneously specific a large amount of heat in electric discharge, the workpiece material of point of discharge is melted and gasified,
Very big explosive force is generated simultaneously the workpiece material for being melted and gasifying is dished out, form electric discharge pit as shown in Figure 5.
It is preferred that step (5) deionization and electrode deformation recovery include: interpolar formed discharge channel carry out material ablation
During, the charge on plane lamina electrode is promptly released into interpolar, reduces the voltage of interpolar, causes to be applied to flat thin
Electrostatic force on plate electrode is also gradually reduced, when electrostatic force is less than the elastic force of bending cantilever, the deformation of plane lamina electrode
Start to restore, electrode is moved to the direction far from workpiece, and interpolar distance becomes larger, and discharge channel is stretched, the grain in channel
Son is mutually neutralized and is gradually decreased, until being restored to the state before electric discharge.At the same time, electrolyte flows into interpolar, makes point of discharge
Temperature reduce, and the scrap dished out after ablation is washed away into interpolar out, so that interpolar is restored to cell reaction state, entrance is next
The discharge cycle of electrostatic drive electrolysis electrical discharge machining.The characteristics of plane electrode deformation restores after present invention formation discharge channel adds
The speed deionization of interpolar realizes Fine Feed and micro- rollback using the deformation of plane lamina electrode, can effectively reduce electrolysis electricity
The generation of irregular electric arc in spark processing, improves electrolysis EDM Performance.Meanwhile plane lamina electrode drives in electrostatic force
Reciprocating motion under dynamic also makes the process-cycle more regular, and interpolar is made to realize adaptive electro-discharge machining, the workpiece after processing
As shown in Figure 6.
Embodiment 3
As the preferred embodiment of 2 processing method of embodiment, the present invention passes through fine electric spark linear cutter or molten first
Thaw collapse product the method for forming process micro-electrode on plane foil, using bending cantilever metal bridge architecture be mounted on into
To the lower section of device, designed feed arrangement adjusts the macro feed motion for realizing electrode position by motor.Believed by pulse
Number control switch mosfet charge between plane foil electrode and workpiece to control, and using electrostatic force make connection gold
The metal bridge-type malformation with bending cantilever for belonging to piece is subjected to displacement, and realizes the Fine Feed of electrode upright position.
Embodiment 4
HIT printed words have been cut out on the red copper thin slice of 30 μ m-thicks according to size shown in Fig. 7 (a) using one machine tool structure of figure
Plane electrode, this electrode is installed in electrostatic drive electrochemical machining system and carries out machining experiment.Fig. 7 (b) is after processing
Workpiece photo, workpiece material are stainless steel, and working depth is 100 μm, and process time is 30 minutes, embody electrostatic drive electrolysis
Advantage high in machining efficiency.
With it is traditional use the method for cylindrical metal bar electrode single-point electro-discharge machining compared with, use plane electrode electrostatic drive
The characteristics of Fine Feed of electrode position not only may be implemented in dynamic electrolysis, improves the discharged condition of interpolar, and plane electrode multiple spot discharges
The processing efficiency of two-dimensional structure part can also be greatly improved.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all in essence of the invention
Made any modifications, equivalent replacements, and improvements etc., should all be included in the protection scope of the present invention within mind and principle.
Claims (7)
1. a kind of electrolysis electric discharge machining method using plane foil electrode uses a kind of following use flat thin gold
Belong to the electrolysis spark discharge processing unit (plant) of plate electrode, including fixed structure, feeding adjusting device, the pulse power, flat thin gold
Belong to plate electrode and workpiece, solution tank, feeding adjusting device are fixed on fixed structure, plane foil electrode is installed on feeding
Below regulating device, workpiece is installed in solution tank, is located at plane foil base part, and feeding adjusting device uses servo
Motor driven realizes that the macro feeding of electrode upright position makes plane foil electrode and 5 μ of workpiece spacing by process control
m-50μm；Plane foil electrode and workpiece form a capacitor C, and plane foil electrode and workpiece are respectively capacitor C
The two poles of the earth, the two poles of the earth connect to form electrolytic cell with the pulse power respectively, and pulse power voltage is 5v-100v, contain inside solution tank
There is electrolyte, the height of electrolyte adjusted by pump characterized by comprising
(1) cell reaction generates bubble: after cell reaction starts, hydrogen and oxygen bubble respectively in plane foil electrode and
It is generated on workpiece；
(2) bubble coalescence merging is formed with insulating layer: when supply voltage is higher than certain threshold value, plane foil electrode
The speed for generating hydrogen is greater than the speed of hydrogen emersion liquid level of electrolyte, and hydrogen starts to gather near plane foil electrode
Collection, until being formed about a gas-insulated layer in plane foil electrode；
(3) deformation of plane foil electrode bending is formed with discharge channel: this insulating layer blocks interpolar in a short time
Electric current causes interpolar to form high field, since the effect of high field makes to form electrostatic force between the two poles of the earth, flat thin gold
Belong to plate electrode to bend deformation under the action of electrostatic force to workpiece direction, reduces interpolar distance so as to cause between the two poles of the earth
Electric field strength continues to increase, and when workpiece and sufficiently small plane foil electrode distance, dielectric is breakdown, generates electrical fire
Flower electric discharge；
(4) ablation of material with dish out: it is largely hot in momentary aggregate at the beginning of point of discharge, the melt workpiece material of point of discharge is gentle
Change, while generating very big explosive force and the workpiece material for being melted and gasifying is dished out, forms electric discharge pit；
(5) deionization and electrode deformation restore: while forming spark discharge between workpiece and electrode, the charge of interpolar
It is released, is gradually reduced interpolar electrostatic force, the deformation of plane foil electrode also restores therewith, makes between workpiece and electrode
Distance become larger again, avoid the generation of irregular electric arc, it helps the discharge of scrap in electro-discharge machining.
2. processing method according to claim 1, which is characterized in that workpiece material is metal, and the electrolyte is passivation
Electrolyte sodium nitrate, electrolyte submerge workpiece.
3. processing method according to claim 1 or 2, which is characterized in that plane foil electrode as tool-electrode,
Tool-electrode uses zigzag or channel-shaped electrode, specially flat by the gripping apparatus grips being installed below feeding adjusting device
Face foil electrode one end is fixed on clamping device, and the other end is unlocked, rides on clamping device.
4. processing method according to claim 3, which is characterized in that step (1) the cell reaction stage, including, by into
It is close to workpiece to regulating device, tool-electrode is immersed in electrolyte, tool-electrode is connected with pulse power cathode, pulse
The anode of power supply is connect with workpiece, as the anode of cell reaction, after the pulse power is powered, piece pole and plane foil
Potential difference is generated between electrode, cation is mobile to tool-electrode in electrolyte, and anion is mobile to workpiece, sends out in the electrolytic solution
Biochemical reaction；Step (2) bubble coalescence merges that be formed with insulating layer include: the bubble when pulse power voltage and pulsewidth are higher
When generating rate greater than certain threshold limit value, the rate of the generation hydrogen of tool-electrode is greater than hydrogen emersion liquid level of electrolyte
Rate, hydrogen start to collect around in tool-electrode, and bubble gradually merges after aggregation, until being formed about in tool-electrode
One gas-insulated layer.
5. processing method according to claim 1, which is characterized in that the foil electrode bending deformation of step (3) plane
It is formed with discharge channel, comprising: after interpolar forms high field, charge starts to form in plane foil electrode and workpiece
Plane-parallel capacitor both ends aggregation, gradually rise the voltage of interpolar, when interpolar voltage reach certain threshold value when, flat thin
Metal plate electrode is in a critical equilbrium position, when charge continues to assemble, after voltage continues increase, and plane foil electricity
Bending Deformation takes place under the driving of electrostatic force in pole, is gradually reduced the distance of electrode and workpiece, and interpolar is away from being gradually reduced
While interpolar electric field strength be gradually increased, when interpolar electric field strength is sufficiently large and interpolar away from it is sufficiently small when, as the flat of cathode
Face foil electrode surface starts runaway electron, to as anode under the action of high field between plane-parallel capacitor
Workpiece surface quickly moves, and electronics collides with the particle of interpolar in the process of movement, by contrasted between solid dielectric be ionized into just from
Son and electronics, the gas-insulated layer between plane foil electrode and workpiece is breakdown, plane foil electrode and workpiece
Between form discharge channel；The ablation of step (4) material and dish out include: between plane foil electrode and workpiece formed put
After electric channel, the pulse power continues to apply voltage to interpolar, makes the electronics high speed in discharge channel to workpiece motion s, cation is high
Speed collides during high speed exercise to plane foil electrode movement, charged particle, and the heat for colliding generation makes to put
Temperature in electric channel quickly increases, and momentary aggregate is largely warm at point of discharge, and the melt workpiece material of point of discharge is gentle
Change, while generating very big explosive force and the workpiece material for being melted and gasifying is dished out.
6. processing method according to claim 1, which is characterized in that step (5) deionization and electrode deformation recovery includes:
During interpolar forms discharge channel progress material ablation, the charge on plane foil electrode is promptly released into pole
Between, the voltage of interpolar is reduced, the electrostatic force being applied on plane foil electrode is caused also to be gradually reduced, when electrostatic force is small
When being bent the elastic force of cantilever, the deformation of plane foil electrode starts to restore, and electrode is moved to the direction far from workpiece,
Interpolar distance becomes larger, and discharge channel is stretched, and the particle in channel is mutually neutralized and gradually decreased, until being restored to electric discharge
Preceding state, at the same time, electrolyte flow into interpolar, reduce the temperature of point of discharge, and the scrap dished out after ablation is washed away
Interpolar out makes interpolar be restored to cell reaction state, into the discharge cycle of next electrostatic drive electrolysis electrical discharge machining.
7. processing method according to claim 1, which is characterized in that pass through fine electric spark linear cutter or molten first
Thaw collapse product the method for forming process micro-electrode on plane foil, using bending cantilever metal bridge architecture be mounted on into
To the lower section of regulating device, designed feeding adjusting device adjusts the macro feed motion for realizing electrode position by motor；It is logical
Extra pulse signal control switch mosfet charges between plane foil electrode and workpiece to control, and utilizes electrostatic force
It is subjected to displacement the metal bridge-type malformation with bending cantilever for connecting sheet metal, realizes the Fine Feed of electrode upright position.
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