CN109158719B - A kind of electrochemical micromachining device of electrostatically actuated supplementary feeding - Google Patents
A kind of electrochemical micromachining device of electrostatically actuated supplementary feeding Download PDFInfo
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- CN109158719B CN109158719B CN201811011738.2A CN201811011738A CN109158719B CN 109158719 B CN109158719 B CN 109158719B CN 201811011738 A CN201811011738 A CN 201811011738A CN 109158719 B CN109158719 B CN 109158719B
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- 238000005459 micromachining Methods 0.000 title claims abstract description 38
- 238000012545 processing Methods 0.000 claims abstract description 100
- 230000005686 electrostatic field Effects 0.000 claims abstract description 34
- 238000003754 machining Methods 0.000 claims description 19
- 238000005452 bending Methods 0.000 claims description 7
- 230000007246 mechanism Effects 0.000 claims description 7
- 239000003792 electrolyte Substances 0.000 claims description 6
- 230000009286 beneficial effect Effects 0.000 abstract description 2
- 238000000034 method Methods 0.000 description 15
- 230000006872 improvement Effects 0.000 description 9
- 230000005611 electricity Effects 0.000 description 8
- 230000008569 process Effects 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 230000007812 deficiency Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000003672 processing method Methods 0.000 description 3
- 230000003044 adaptive effect Effects 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 230000033001 locomotion Effects 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 238000010129 solution processing Methods 0.000 description 2
- 241000167880 Hirundinidae Species 0.000 description 1
- 238000002679 ablation Methods 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 238000013528 artificial neural network Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000010892 electric spark Methods 0.000 description 1
- 230000003028 elevating effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000029142 excretion Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000004807 localization Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000000541 pulsatile effect Effects 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
- B23H3/00—Electrochemical machining, i.e. removing metal by passing current between an electrode and a workpiece in the presence of an electrolyte
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
- B23H11/00—Auxiliary apparatus or details, not otherwise provided for
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
- B23H3/00—Electrochemical machining, i.e. removing metal by passing current between an electrode and a workpiece in the presence of an electrolyte
- B23H3/02—Electric circuits specially adapted therefor, e.g. power supply, control, preventing short circuits
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- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
Abstract
The present invention provides a kind of electrochemical micromachining devices of electrostatically actuated supplementary feeding, including electrostatically actuated supplementary feeding system, the electrostatically actuated supplementary feeding system includes the plane electrode of workpieces processing, processing power source, drive the electrostatic field plate and accessory power supply of the plane electrode, the both ends of the processing power source respectively with the plane electrode, workpiece connection, the both ends of the accessory power supply respectively with the plane electrode, the connection of electrostatic field plate, the outer surface of the electrostatic field plate is equipped with the insulating film for making the accessory power supply be not involved in Electrolyzed Processing, the accessory power supply generates electrostatic field only to drive the plane electrode to deform.The beneficial effects of the present invention are: generating electrostatic field by accessory power supply to drive plane electrode to deform, to realize electrostatically actuated supplementary feeding, Fine Feed is realized under the actuating of electrostatic force using plane electrode piece, very good solution electrochemical micromachining voltage limitation and the problem that keeps electrostatically actuated deflection too small.
Description
Technical field
The present invention relates to a kind of electrochemical micromachining of electrolytic machining device more particularly to electrostatically actuated supplementary feeding dresses
It sets.
Background technique
Electrochemical micromachining is the form processing based on redox (electric charge transfer), it is however generally that the size of metal ion
About 0.1nm, relative to spark discharge, not only precision is higher, flatness is good, but also process does not have export license.Based on this
Electrochemical micromachining it is micro-, in terms of nanoprocessing have very big development potentiality.In electrochemical micromachining, main problem is
The control of precision and efficiency.In order to obtain micron-sized precision, processing gap will usually be controlled in several micron ranges.Fine electricity
Solution processing model belongs to double layer capacity model, and processing gap decides equivalent capacity, the size of equivalent resistance, decides processing model
It encloses and machining accuracy.Therefore work in-process should meet small―gap suture requirement, ensure that gap is stablized again.
However for domestic development of manufacturing status, servo drive is mainly servo motor or linear motor,
Precision is about several microns, is not able to satisfy the required precision of micro-electrochemical machining；In recent years with advances in technology, cooperate high-accuracy light
The appearance of the linear motor of grid ruler, improves machine tool accuracy, and precision can achieve 0.01 micron.But the precision of processing unit (plant) is got over
Its high price is also more expensive, and because it is not increased income, also relatively difficult on control algorithm design.So needing one kind can be with
Processing cost is reduced, easy processing unit (plant) is designed, to realize commercial introduction.
Ma Xiaoyu etc. improves Electrolyzed Processing precision using interval rollback processing method, guarantees to add when working depth is deeper
Work precision, in microelectrode feeding, micro-pore diameter can be obtained accurately by changing voltage, pulse duty factor and speed etc. online
Control.The 12um narrow slot for processing even width is moved back and forth using electrode in being in harmony etc..In the stabilization for improving electrochemical micromachining
Property, precision aspect, at present research be guaranteed by shaking and retracting small―gap suture process, wide arc gap be discharged scrap, however shake
It is difficult with the control algorithm design of rollback, it is difficult to accomplish to match with power supply.Install piezoelectric ceramics benefit in University On The Mountain Of Swallows's workpieces processing additional
The vibration that cathode is completed with electrostatic pressure, completes Nano grade deep hole machining.But the preparation of the processing method electrode of electrostatic pressure is tired
Difficulty, and efficiency is lower.The researchs such as Wang Xi discovery processing cathode stress is inversely proportional with processing gap, by collecting surface stress
Data are simultaneously sent into data in neural network the on-line measurement for realizing gap, improve processing efficiency.In discharging gap controlling party
Although the existing processing method in face can obtain lesser processing gap, to carry out micro-nano these method parts of processing
The stage of theoretical simulation is also rested on, and is applied in real system, generally requires a large amount of data, this needs multiple groups to sample
Device ability accurate description change procedure, therefore whole equipment cost is very high.
Electrostatic drive is applied to micro-electrochemical machining electric spark Compound Machining by yellow auspicious peaceful wait of Harbin Institute of Technology, and electrostatic force makes
Electrode slice bending, achievees the purpose that Fine Feed.This method compensates for the deficiency of machine tool accuracy, and can improve interpolar excretion
Situation improves processing efficiency and processing stability.But this method directly generates electrostatic force using processing power source, adds to reach
The electrostatic distortion amount of work demand, needs stronger electric field, thus is applied with higher voltage processing, typically larger than 60V.And high electricity
The dispersion corrosion of pressure electrochemical micromachining is more serious, localization ablation ability is weak, while spark discharge processing can also make electrode slice
Loss, makes that its machining accuracy is lower, effect is poor.Adding for conventional electrochemical micromachining is used to reach high-accuracy processing effect
Work voltage processes (supply voltage of electrochemical micromachining is usually 20V or so), then the electrostatic force of its generation is too small, driving electrodes
The bending deformation quantity of piece is too small, and electrostatic drive is not worked but, and the effect reached in actual processing is also not ideal enough.
Therefore, how to solve the limitation of electrochemical micromachining voltage and keep electrostatically actuated deflection too small to be those skilled in the art
Member's technical problem urgently to be resolved.
Summary of the invention
In order to solve the problems in the prior art, the present invention provides a kind of micro-electrochemical machinings of electrostatically actuated supplementary feeding to add
Tooling is set.
The present invention provides a kind of electrochemical micromachining device of electrostatically actuated supplementary feeding, including electrostatically actuated assist into
To system, the electrostatically actuated supplementary feeding system includes the plane electrode of workpieces processing, processing power source, the driving plane electricity
The electrostatic field plate and accessory power supply of pole, the both ends of the processing power source are connect with the plane electrode, workpiece respectively, described auxiliary
The both ends of power supply are helped to connect respectively with the plane electrode, electrostatic field plate, the outer surface of the electrostatic field plate, which is equipped with, makes institute
The insulating film that accessory power supply is not involved in Electrolyzed Processing is stated, the accessory power supply generates electrostatic field only to drive the plane electrode to become
Shape.
As a further improvement of the present invention, the cathode of the processing power source is connect with the plane electrode, the processing
The anode of power supply is connect with the workpiece, and the cathode of the accessory power supply is connect with the plane electrode, the accessory power supply
Anode connect with the electrostatic field plate, the voltage of the accessory power supply is adjustable.
As a further improvement of the present invention, the voltage of the accessory power supply is continuously adjusted from 0 to 600V.
As a further improvement of the present invention, the pulse width of the accessory power supply is greater than or equal to the processing power source
Pulse width.
As a further improvement of the present invention, first is in series between the cathode of the processing power source and the plane electrode
Current-limiting resistance is in series with the second current-limiting resistance between the cathode of the accessory power supply and the plane electrode.
As a further improvement of the present invention, the electrostatically actuated supplementary feeding system further includes the first transistor, second
The anode of transistor, first diode, the second diode, the processing power source is connect with the drain electrode of the first transistor, institute
The source electrode for stating the first transistor is connect with the anode of the first diode, and the cathode of the first transistor and the workpiece connect
It connects, the anode of the accessory power supply is connect with the drain electrode of the second transistor, the source electrode of the second transistor and described the
The anode of two diodes connects, and the cathode of second diode is connect with the electrostatic field plate.
As a further improvement of the present invention, the electrostatically actuated supplementary feeding system further includes that the first pulse signal occurs
Device, the second pulse signal generator and controller, the controller respectively with first pulse signal generator, the second pulse
Signal generator connection, first pulse signal generator are connect with the grid of the first transistor, second pulse
Signal generator is connect with the grid of the second transistor.
As a further improvement of the present invention, the plane electrode includes having the processing department in machining shape area and positioned at institute
The variable shaped beam for stating processing department both ends, when Electrolyzed Processing, the processing department not bending deformation, the deformation beam deformed.
As a further improvement of the present invention, the electrochemical micromachining device further includes lathe, and the lathe is equipped with Z
Axis elevating mechanism, the Z-axis lifting mechanism are connected with plane electrode fixed frame, and the variable shaped beam of described plane electrode one end is to fix
Variable shaped beam is held, the variable shaped beam of the plane electrode other end is free end variable shaped beam, and the fixing end variable shaped beam is fixed on described
On plane electrode fixed frame, the free end variable shaped beam is to be slidably connected with the plane electrode fixed frame, when Electrolyzed Processing,
The free end variable shaped beam is slided along the plane electrode fixed frame level.
As a further improvement of the present invention, the lathe is equipped with workbench, and the workbench is equipped with work tank,
Electrolyte is equipped in the work tank, when Electrolyzed Processing, the electrostatic field plate, workpiece, plane electrode are submerged in institute
It states within electrolyte.
The beneficial effects of the present invention are: through the above scheme, generating electrostatic field by accessory power supply to drive plane electrode
Deformation, to realize electrostatically actuated supplementary feeding, realizes Fine Feed under the actuating of electrostatic force using plane electrode piece, comes more
Mend the deficiency of machine tool accuracy, the limitation of very good solution electrochemical micromachining voltage and make electrostatically actuated deflection is too small to ask
Topic, reduces the complexity of servo-system, to reduce manufacturing cost.
Detailed description of the invention
Fig. 1 is a kind of general illustration of the electrochemical micromachining device of electrostatically actuated supplementary feeding of the present invention.
Fig. 2 is a kind of electrostatically actuated supplementary feeding system of the electrochemical micromachining device of electrostatically actuated supplementary feeding of the present invention
System schematic diagram.
Fig. 3 is a kind of schematic diagram of the plane electrode of the electrochemical micromachining device of electrostatically actuated supplementary feeding of the present invention.
Fig. 4 is a kind of electrostatically actuated supplementary feeding system of the electrochemical micromachining device of electrostatically actuated supplementary feeding of the present invention
The schematic diagram of the electrochemical micromachining process of system.
Fig. 5 is a kind of pulse schematic diagram of the electrochemical micromachining device of electrostatically actuated supplementary feeding of the present invention.
Fig. 6 is a kind of pulse schematic diagram of the electrochemical micromachining device of electrostatically actuated supplementary feeding of the present invention.
Specific embodiment
The invention will be further described for explanation and specific embodiment with reference to the accompanying drawing.
As shown in Figures 1 to 6, a kind of electrochemical micromachining device of electrostatically actuated supplementary feeding, including electrostatically actuated are auxiliary
Feed system is helped, the electrostatically actuated supplementary feeding system includes the plane electrode 1 of workpieces processing 3, processing power source 5, driving institute
State the electrostatic field plate 2 and accessory power supply 6 of plane electrode 1, the both ends of the processing power source 5 respectively with the plane electrode 1, work
Part 3 connects, and the both ends of the accessory power supply 6 are connect with the plane electrode 1, electrostatic field plate 2 respectively, the electrostatic field plate
2 outer surface is equipped with the insulating film 4 for making the accessory power supply 6 be not involved in Electrolyzed Processing, and the accessory power supply 6 only generates electrostatic field
To drive the plane electrode 1 to deform.
As shown in Figures 1 to 6, the cathode of the processing power source 5 is connect with the plane electrode 1, the processing power source 5
Positive to connect with the workpiece 3, the cathode of the accessory power supply 6 is connect with the plane electrode 1, the accessory power supply 6
Positive to connect with the electrostatic field plate 2, the voltage of the accessory power supply 6 is adjustable, and the processing power source 5, accessory power supply 6 are preferred
For the pulse power.
As shown in Figures 1 to 6, the voltage of the accessory power supply 6 is continuously adjusted from 0 to 600V.
As shown in Figures 1 to 6, the pulse width of the accessory power supply 6 is wide more than or equal to the pulse of the processing power source 5
Degree.
As shown in Figures 1 to 6, the first current limliting electricity is in series between the cathode and the plane electrode 1 of the processing power source 5
Resistance 7, is in series with the second current-limiting resistance 8 between the cathode and the plane electrode 1 of the accessory power supply 6.
As shown in Figures 1 to 6, the electrostatically actuated supplementary feeding system further includes the first transistor 9, second transistor
10, the anode of first diode 13, the second diode 14, the processing power source 5 is connect with the drain electrode of the first transistor 9,
The source electrode of the first transistor 9 is connect with the anode of the first diode 13, the cathode of the first transistor 13 and institute
The connection of workpiece 3 is stated, the anode of the accessory power supply 6 is connect with the drain electrode of the second transistor 10, the second transistor 10
Source electrode connect with the anode of second diode 14, the cathode of second diode 14 and the electrostatic field plate 2 connect
It connects.
As shown in Figures 1 to 6, the electrostatically actuated supplementary feeding system further includes the first pulse signal generator 11,
Two pulse signal generators 12, controller, controller are control circuit or control centre, and the controller is respectively with described the
One pulse signal generator 11, the connection of the second pulse signal generator 12, first pulse signal generator 11 and described the
The grid of one transistor 9 connects, and second pulse signal generator 12 is connect with the grid of the second transistor 10.
As shown in Figures 1 to 6, the plane electrode 1 includes having the processing department 101 in machining shape area and adding positioned at described
The variable shaped beam 102 at 101 both ends of the Ministry of worker is that a variable shaped beam 102 is equipped with mounting hole 103, does not set on another variable shaped beam 102
Mounting hole 103 is set, when Electrolyzed Processing, the processing department not bending deformation, the deformation beam deformed.
As shown in Figures 1 to 6, the electrochemical micromachining device further includes lathe 17, and the lathe 17 is equipped with Z axis liter
Descending mechanism 18, the Z-axis lifting mechanism 18 are connected with plane electrode fixed frame 19, the variable shaped beam 102 of described 1 one end of plane electrode
For fixing end variable shaped beam 1021, the variable shaped beam 102 of 1 other end of plane electrode is free end variable shaped beam 1022, the fixation
End variable shaped beam 1021 is fixed on the plane electrode fixed frame 19, and the free end variable shaped beam 1022 and the plane electrode are solid
Determining frame 19 is to be slidably connected, and when Electrolyzed Processing, the free end variable shaped beam 1022 is horizontal along the plane electrode fixed frame 19
Sliding.
As shown in Figures 1 to 6, the lathe 17 is equipped with workbench, and the workbench is equipped with work tank 15, described
Electrolyte 16 is equipped in work tank 15, when Electrolyzed Processing, the electrostatic field plate 2, workpiece 3, plane electrode 1 are submerged in
Within the electrolyte 16.
A kind of electrochemical micromachining device of electrostatically actuated supplementary feeding provided by the invention, processing power source 5 are with adding
The high frequency pulse power supply of work electric current and voltage detecting function, anode connect workpiece 3, and cathode connects plane electrode 1, can be according to detection
Electric current and voltage judge machining state for short circuit or normal Electrolyzed Processing, voltage is continuously adjusted from 0 to 40V, passes through control
The first transistor 9 in circuit adjusts pulse frequency, limits maximum processing electric current by the first current-limiting resistance 7, and passes through the
One diode 13 prevents electric current reverse flow.In electrochemical machining process, the machining state detected by the pulse power, by lathe
17 control system for processing provides reasonable feeding control command, and the movement of Z-axis lifting mechanism 18 of control lathe 17 adjusts gap,
Belong to macro feeding.Electrostatic drive system then belongs to Fine Feed, is controlled by accessory power supply 6, can adaptively adjust plane electrode 1 and work
Gap between part 3 reaches optimal process state.Processing power source 5 and accessory power supply 6 are uniformly controlled by control system for processing.
Electrostatically actuated supplementary feeding system schematic as shown in Fig. 2, electrostatically actuated supplementary feeding system by controllable auxiliary
Power supply 6 is helped to power, anode connects electrostatic field plate 2, and cathode connects plane electrode 1 and (is connected to plane electricity jointly with the cathode of processing power source 5
Pole 1).Wherein electrostatic field plate 2 applies one layer of insulating film 4, and accessory power supply 6 is made to be not involved in Electrolyzed Processing, only generates electrostatic field
Drive plane electrode 1.In order to reach the deflection of electrostatic drive, 6 voltage of accessory power supply is continuously adjusted from 0 to 600V, general to adjust
Section is greater than 60V.In order to keep whole system safer, also increase a diode as processing power source 5, in accessory power supply 6,
That is the second diode 8 is that the electric current of processing power source 5 when insulating in order to prevent or controlling failure flows into accessory power supply 6, causes to damage
It is bad.
The schematic diagram of plane electrode 1 is as shown in figure 3, by variable shaped beam 102, the processing department 102 with machining shape area, installation
Hole 103 forms.There are the various shape of process requirements, such as text, pattern, array hole in 1 middle section of plane electrode, shown in Fig. 3
For array hole.1 both ends of plane electrode are variable shaped beam 102, and variable shaped beam 102 deforms when processing, machining shape area's not bending deformation.Peace
When dress, the variable shaped beam 102 for having mounting hole 103 is fixing end variable shaped beam 1021, is fitted without the variable shaped beam 102 in hole 103 as freely
Variable shaped beam 1022 is held, fixing end variable shaped beam 1021 is fixedly connected, the branch of the plane electrode fixed frame 19 of free end variable shaped beam 1022
Seat supports make its level, and can slide on the support.
A kind of electrochemical micromachining device of electrostatically actuated supplementary feeding provided by the invention, process are as follows:
1, processing power source 5 is connected to plane electrode 1 and workpiece 3, carries out Electrolyzed Processing.Accessory power supply 6 is connected to plane electricity
Pole 1 and electrostatic field plate 2 carry out electrostatically actuated.
2, when accessory power supply 6 and processing power source 5 all do not apply, when being in open-circuit condition, entire system of processing is in not
Machining state, the non-bending deformation of plane electrode 1 keep horizontal.
3, after accessory power supply 6 applies, an electric field is formed between plane electrode 1 and electrostatic field plate 2, as shown in figure 4,
The variable shaped beam 102 at 1 both ends of plane electrode is made to bend deformation under the action of electric field force, to make plane electrode 1 and work
The distance of part 3 reduces, and when 6 voltage of accessory power supply increases, the charge in plane electrode 1 continues to increase, and attraction is gradually increased, and becomes
102 deflection of ellbeam so that plane electrode 1 and workpiece 3 apart from smaller, reach processing gap, and applies at this time also with becoming larger
Processing power source 5 can carry out Electrolyzed Processing to workpiece 3.
It is consistent when the pulse frequency and pulse width of accessory power supply 6 and processing power source 5 are controlled by control centre,
As shown in figure 5, reaching processing gap then after the deformation of plane electrode 1, processing power source 5 applies automatically carries out adaptive electricity up
Solution processing, an accessory power supply pulse carry out pulsatile once Electrolyzed Processing.
When the pulse width of accessory power supply 6 is greater than the pulse width of processing power source 5, as shown in fig. 6, then plane electrode 1
After primary deformation, multiple pulses Electrolyzed Processing can be carried out.
When turning off accessory power supply 6, strong electrostatic field will disappear, and plane electrode 1 replys reset condition, and stays on workpiece 3
Lower cutter trade.And so on, the Continuous maching that plane electrode 1 carries out on workpiece 3, until processing required product.
A kind of electrochemical micromachining device of electrostatically actuated supplementary feeding provided by the invention is to be electrolysed electricity in high-frequency impulse
On the basis of source, increase controllable accessory power supply 6, accessory power supply 6 is preferably high-voltage electrostatic field accessory power supply, the accessory power supply 6
It is not involved in processing, is only used for the electrostatically actuated Fine Feed of plane electrode 1.
A kind of electrochemical micromachining device of electrostatically actuated supplementary feeding provided by the invention, using electrostatically actuated assist into
The advantages that inheriting traditional Precision of Micro-ECM height well to the mode of Electrolyzed Processing, do not influenced by tool materials.With
Traditional electrochemical micromachining method is compared, and the present invention realizes Fine Feed under the actuating of electrostatic force using plane electrode 1, to make up
The deficiency of machine tool accuracy, reduces the complexity of servo-system, to reduce manufacturing cost.And invention introduces auxiliary
Power supply 6 can generate the voltage of hundreds of V, considerably increase the curvature range of electrostatic drive, obtain adaptive Fine Feed sufficiently
It plays.The method of electrostatically actuated plane electrode 1 ensure that the minimum in processing gap, and the reciprocating motion of plane electrode 1 has
The discharge for helping scrap, greatly improves machining accuracy.
The above content is a further detailed description of the present invention in conjunction with specific preferred embodiments, and it cannot be said that
Specific implementation of the invention is only limited to these instructions.For those of ordinary skill in the art to which the present invention belongs, In
Under the premise of not departing from present inventive concept, a number of simple deductions or replacements can also be made, all shall be regarded as belonging to of the invention
Protection scope.
Claims (8)
1. a kind of electrochemical micromachining device of electrostatically actuated supplementary feeding, it is characterised in that: including electrostatically actuated supplementary feeding
System, the electrostatically actuated supplementary feeding system include plane electrode, processing power source, the driving plane electrode of workpieces processing
Electrostatic field plate and accessory power supply, the both ends of the processing power source connect with the plane electrode, workpiece respectively, the auxiliary
The both ends of power supply are connect with the plane electrode, electrostatic field plate respectively, and the outer surface of the electrostatic field plate is described equipped with making
Accessory power supply is not involved in the insulating film of Electrolyzed Processing, and the accessory power supply generates electrostatic field only to drive the plane electrode to become
Shape, the cathode of the processing power source are connect with the plane electrode, and the anode of the processing power source is connect with the workpiece, described
The cathode of accessory power supply is connect with the plane electrode, and the anode of the accessory power supply is connect with the electrostatic field plate, institute
The voltage for stating accessory power supply is adjustable, and the first current-limiting resistance is in series between the cathode of the processing power source and the plane electrode,
The second current-limiting resistance is in series between the cathode of the accessory power supply and the plane electrode.
2. the electrochemical micromachining device of electrostatically actuated supplementary feeding according to claim 1, it is characterised in that: described auxiliary
The voltage of power supply is helped to be continuously adjusted from 0 to 600V.
3. the electrochemical micromachining device of electrostatically actuated supplementary feeding according to claim 1, it is characterised in that: described auxiliary
The pulse width of power supply is helped to be greater than or equal to the pulse width of the processing power source.
4. the electrochemical micromachining device of electrostatically actuated supplementary feeding according to claim 1, it is characterised in that: described quiet
Electric actuation supplementary feeding system further includes the first transistor, second transistor, first diode, the second diode, the processing
The anode of power supply is connect with the drain electrode of the first transistor, the sun of the source electrode of the first transistor and the first diode
Pole connection, the cathode of the first transistor are connect with the workpiece, anode and the second transistor of the accessory power supply
Drain electrode connection, the source electrode of the second transistor connect with the anode of second diode, the yin of second diode
Pole is connect with the electrostatic field plate.
5. the electrochemical micromachining device of electrostatically actuated supplementary feeding according to claim 4, it is characterised in that: described quiet
Electric actuation supplementary feeding system further includes the first pulse signal generator, the second pulse signal generator and controller, the control
Device processed is connect with first pulse signal generator, the second pulse signal generator respectively, and first pulse signal occurs
Device is connect with the grid of the first transistor, and the grid of second pulse signal generator and the second transistor connects
It connects.
6. the electrochemical micromachining device of electrostatically actuated supplementary feeding according to claim 1, it is characterised in that: described flat
Face electrode includes the processing department with machining shape area and the variable shaped beam positioned at the processing department both ends, when Electrolyzed Processing, institute
State processing department not bending deformation, the deformation beam deformed.
7. the electrochemical micromachining device of electrostatically actuated supplementary feeding according to claim 6, it is characterised in that: described micro-
Thin electrolytic machining device further includes lathe, and the lathe is equipped with Z-axis lifting mechanism, and the Z-axis lifting mechanism is connected with plane
Electrode fixed frame, the variable shaped beam of described plane electrode one end are fixing end variable shaped beam, the variable shaped beam of the plane electrode other end
For free end variable shaped beam, the fixing end variable shaped beam is fixed on the plane electrode fixed frame, the free end variable shaped beam with
The plane electrode fixed frame is to be slidably connected, and when Electrolyzed Processing, the free end variable shaped beam is fixed along the plane electrode
The sliding of frame level.
8. the electrochemical micromachining device of electrostatically actuated supplementary feeding according to claim 7, it is characterised in that: the machine
Bed is equipped with workbench, and the workbench is equipped with work tank, is equipped with electrolyte in the work tank, works as Electrolyzed Processing
When, the electrostatic field plate, workpiece, plane electrode are submerged within the electrolyte.
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| CN201811011738.2A CN109158719B (en) | 2018-08-31 | 2018-08-31 | A kind of electrochemical micromachining device of electrostatically actuated supplementary feeding |
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| CN201811011738.2A CN109158719B (en) | 2018-08-31 | 2018-08-31 | A kind of electrochemical micromachining device of electrostatically actuated supplementary feeding |
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