CN104001998B - Array micro group electrode preparation method and the device optimized based on negative electrode - Google Patents
Array micro group electrode preparation method and the device optimized based on negative electrode Download PDFInfo
- Publication number
- CN104001998B CN104001998B CN201410192639.4A CN201410192639A CN104001998B CN 104001998 B CN104001998 B CN 104001998B CN 201410192639 A CN201410192639 A CN 201410192639A CN 104001998 B CN104001998 B CN 104001998B
- Authority
- CN
- China
- Prior art keywords
- electrode
- group
- negative electrode
- array
- sphere
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000002360 preparation method Methods 0.000 title claims abstract description 31
- 238000012545 processing Methods 0.000 claims abstract description 28
- 238000000034 method Methods 0.000 claims abstract description 25
- 238000003754 machining Methods 0.000 claims abstract description 21
- 239000000126 substance Substances 0.000 claims abstract description 11
- 238000013461 design Methods 0.000 claims abstract description 9
- 238000009413 insulation Methods 0.000 claims abstract description 7
- 230000005684 electric field Effects 0.000 claims abstract description 6
- 238000004458 analytical method Methods 0.000 claims abstract description 5
- 239000003792 electrolyte Substances 0.000 claims abstract description 5
- 239000003822 epoxy resin Substances 0.000 claims abstract description 4
- 239000003292 glue Substances 0.000 claims abstract description 4
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 claims abstract description 4
- 229920000647 polyepoxide Polymers 0.000 claims abstract description 4
- 230000001105 regulatory effect Effects 0.000 claims abstract description 4
- 230000005855 radiation Effects 0.000 claims description 7
- 238000003491 array Methods 0.000 claims description 6
- 238000005457 optimization Methods 0.000 claims description 6
- 239000004568 cement Substances 0.000 claims description 3
- 238000010276 construction Methods 0.000 claims description 3
- 239000007769 metal material Substances 0.000 claims description 3
- 239000002674 ointment Substances 0.000 claims description 2
- 239000000463 material Substances 0.000 abstract description 7
- 238000005516 engineering process Methods 0.000 description 11
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 4
- 229910052721 tungsten Inorganic materials 0.000 description 4
- 239000010937 tungsten Substances 0.000 description 4
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 238000009826 distribution Methods 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- -1 accurate filter Substances 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 238000010892 electric spark Methods 0.000 description 2
- 230000003628 erosive effect Effects 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000012993 chemical processing Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000002848 electrochemical method Methods 0.000 description 1
- 230000005518 electrochemistry Effects 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- UAJUXJSXCLUTNU-UHFFFAOYSA-N pranlukast Chemical compound C=1C=C(OCCCCC=2C=CC=CC=2)C=CC=1C(=O)NC(C=1)=CC=C(C(C=2)=O)C=1OC=2C=1N=NNN=1 UAJUXJSXCLUTNU-UHFFFAOYSA-N 0.000 description 1
- 229960004583 pranlukast Drugs 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
Landscapes
- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
Abstract
An array group electrode preparation method of optimizing based on negative electrode, comprises the following steps: (1) array electrode blank is made; (2) group's electrode holder surface applies one deck epoxy resins insulation glue, and described array group electrode blank is exposed; (3), according to blahk structure size, array of designs group's electrode electro Chemical machining gap electric field physical model, sets machining voltage U, electrolytic conductivity parameter κ; Prepare the face of cylinder, side negative electrode and sphere negative electrode according to setup parameter; (4) face of cylinder, side negative electrode is submerged into electrolyte together with array electrode blank, test processing based on sunykatuib analysis parameter, by regulating machining voltage implementation tool electrode axis to the control of diameter dimension uniformity, realize the preparation of required size array micro group electrode electro Chemical. And provide a kind of based on negative electrode optimize array group electrode preparation facilities. The present invention widens machinable material, technique is simple, working (machining) efficiency is higher, cost is low.
Description
Technical field
The invention belongs to microfabrication, special processing technology field, especially a kind of fine group's electricityUtmost point preparation method and device.
Background technology
Along with the development of Aero-Space, electronics industry, precision instrument and modern medical equipment, there is battle arrayThe parts of row micro hole structure have important application prospect in a lot of fields, as aviation is startedMachine Air Conduct Damper Bushing, the joints of optical fibre, accurate filter, chemical fibre spinneret, printerNozzle, printed circuit board (PCB) etc., the aperture size in these holes is generally tens to hundreds of micron, darkTens to several thousand of tens microns to several millimeters, quantity are not etc. Processing for this class formation isRealize its key in commercial Application. Micro-EDM Machining Technology and micro-electrochemical machining process technologyWith the processing characteristic of himself, can carry out the processing of fine array hole. But, fine array electricThe preparation of the utmost point is the key link that realizes these two kinds of methods.
Micro-electrode array is preparation method comprise: LIGA technology, UV-LIGA technology, electric sparkLine patterning method, electric spark backcopy process, electrochemical erosion method etc. LIGA technology is because needs makeWith the synchronous x ray generator of costliness as light source, so cost is very high; UV-LIGAAlthough technology cost decreases compared with LIGA technology, its technical process is still complicated, and LIGATechnology and the main worked copper/nickel of UV-LIGA technology and alloy material thereof, can not process high temperature resistant heightHardness tungsten material; Electric Discharge Wire-cutting Technology can only be processed square structure; Electric spark backcopy process workOrder is more, equipment complexity, and working (machining) efficiency is low, and target exists serious loss; FlatPlate+semicolumn electrochemical cathode etch can only the row of processing shape group electrode, for array electrodeInapplicable.
Electrochemical method is that the principle based on anodic solution is removed material, and in processing, material is removedForm with ion is carried out, and can realize atomic level and remove in principle, and machining accuracy is higher; AndIn processing, do not have the effect of power, after processing there is not distortion in micro tool electrode; Therefore electrificationMethod can be used for the preparation of micro tool electrode, and electrochemical erosion method was prepared micro-electrode in the pastResearch method [CN100544874C], can process by the row of realization shape group electrode, but micro-for arrayThin electrode preparation method rarely has report.
The present invention is based on experimental study basis and produce, early-stage Study experiment is found, parallel when adoptingWhen plate tool cathode processing row shape group electrode (Fig. 1), electrode surface electric current distribution is as Fig. 2Shown in.
Summary of the invention
In order to overcome, the machinable material of existing fine group's electrode preparation method and device is limited, workSkill complexity, the deficiency that working (machining) efficiency is lower, cost is high, the invention provides one and widen and can processMaterial, the array micro of optimizing based on negative electrode that technique is simple, working (machining) efficiency is higher, cost is lowGroup's electrode preparation method and device.
The technical solution adopted for the present invention to solve the technical problems is:
Based on negative electrode optimize an array group electrode preparation method, described preparation method comprise withLower step:
(1) array electrode blank is made: the array that metal material is cut into equilateral polygon sectionStructure, its cross section size dimension is a, electrode length L and spacing d;
(2) group's electrode holder surface applies one deck epoxy resins insulation glue, described array group electrodeBlank is exposed;
(3) according to blahk structure size, array of designs group's electrode electro Chemical machining gap electric field thingReason model, sets machining voltage U, electrolytic conductivity parameter κ; Side cylinderThe face of cylinder radius R of face negative electrode, axial line distance array electrode lateral distance D1, revolvesCorner α; The spherical radius Φ R of sphere negative electrode, in negative electrode centre of sphere distance arrays blankHeart electrode distance B 2, spherical radiation angle β prepares side cylinder according to setup parameterFace negative electrode and sphere negative electrode;
(4) surrounding of described group's electrode holder is installed the face of cylinder, four sides negative electrode, described groupSphere negative electrode, described array micro group electrode blank are arranged in the top of electrode holderBeing centered close on same plumb line of center and described sphere negative electrode; The face of cylinder, sideNegative electrode is submerged into electrolyte together with array electrode blank, based on sunykatuib analysis parameterTest processing, by regulating machining voltage implementation tool electrode axis to diameter chiVery little uniformity control, realizes the preparation of required size array micro group electrode electro Chemical.
Further, in described step (4), in conjunction with online microscopic examination survey tool electrodeDiameter changes, and realizes the preparation of required size array micro group electrode electro Chemical.
Further, in described step (3), face of cylinder tool cathode inner surface, sphere negative electrodeInner surface applies one deck insulating cement.
In described step (3), adopt finite element optimization method design cathode construction: Offered targetFunction F unction is the poor minimum of the each electrode current density of anode surface, set size Φ R,Under D2 and spherical radiation angle β prerequisite, optimize analysis and obtain the tool cathode face of cylinder, side radius R,Axial line distance array electrode lateral distance D1, anglec of rotation α; Based on optimize analyze obtain R,D1 and α, then suboptimization obtains negative electrode spherical radius Φ R, in negative electrode centre of sphere distance arrays blankHeart electrode distance B 2, spherical radiation angle β; Prepare tool cathode according to optimum results.
An array micro group electrode preparation facilities of optimizing based on negative electrode, comprises lathe, electrolysisGroove and processing power source, the intracavity bottom of described electrolytic cell is provided with for placing array micro to be processedGroup's electrode holder of group's electrode blank, the surrounding of described group's electrode holder is installed four side cylindersFace negative electrode is arranged sphere negative electrode, described array micro group electricity above described group's electrode holderBeing centered close on same plumb line of the center of utmost point blank and described sphere negative electrode, described sphere the moonThe utmost point is arranged on described lathe, described sphere negative electrode, the face of cylinder, side negative electrode and described processing electricityThe negative pole in source connects, the sun of described array micro group electrode blank to be processed and described processing power sourceThe utmost point connects.
Further, at described face of cylinder tool cathode inner surface, sphere cathode inner surface, group's electricityUtmost point fixture applies one deck insulation glue-line.
Further, described device also comprises online microscope, and described online microscope is positioned at instituteState the side of electrolytic cell, the side of described electrolytic cell is provided with observation window.
Compare with existing process technology, the present invention has the following advantages:
1) can process the consistent array micro group electrode of diameter dimension, group electrode material can be tungsten,The material that processing method cannot be processed in the past such as carbide alloy;
2) group's electrode diameter is convenient controls, and can process large length-diameter ratio electrode, limited by process equipmentLittle.
3) working (machining) efficiency is high, without special template, and disposable multiple electrodes that are shaped;
Therefore, this inventive method technical process is simple, and realizability and navigability are good, costLow.
Brief description of the drawings
Fig. 1 is existing parallel plate cathode electrochemistry processing row shape group electrode schematic diagram.
Fig. 2 is that Fig. 1 adds electrode surface electric current distribution tendency chart in man-hour.
Fig. 3 is structural representation prepared by the array micro group electrode based on negative electrode optimization of the present inventionFigure.
Fig. 4 is that negative electrode is optimized array micro group electrode structural chart.
Fig. 5 is the flow chart of array micro group electrode preparation method.
Fig. 6 is the rule figure that group electrode diameter changed along with process time.
Fig. 7 is the array micro group electrode structural chart after processing.
Fig. 8 is the blank sectional view of the array group electrode of various different cross sections.
Detailed description of the invention
Below in conjunction with accompanying drawing, the invention will be further described.
With reference to Fig. 3～Fig. 8, a kind of array group electrode preparation method of optimizing based on negative electrode, comprisesFollowing steps:
(1) array electrode blank is made: metal material is cut into equilateral polygon section display knotStructure, its cross section size dimension is a, electrode length L, spacing d.
(2) group's electrode base surface applies one deck epoxy resins insulation glue, keeps regular polygon to cutTell row group electrode blank in person exposed.
(3) according to blahk structure size, array of designs group's electrode electro Chemical machining gap electric field thingReason model, sets machining voltage U, electrolytic conductivity parameter κ, adopts limitedUnit's optimization method design cathode construction (as Fig. 4), Offered target function F unctionFor the poor minimum of the each electrode current density of anode surface, set size Φ R, D2 andUnder the β prerequisite of spherical radiation angle, optimize and analyze the cylinder that obtains the face of cylinder, side negative electrodeRadius surface R, axial line distance array electrode lateral distance D1, anglec of rotation α; Based onOptimize and analyze R, the D1 and the α that obtain, then suboptimization obtains the sphere of sphere negative electrodeRadius Φ R, negative electrode centre of sphere distance arrays blank central electrode distance B 2, sphere spokeFiring angle;
(4) surrounding of described group's electrode holder is installed the face of cylinder, four sides negative electrode, described groupSphere negative electrode, described array micro group electrode blank are arranged in the top of electrode holderBeing centered close on same plumb line of center and described sphere negative electrode; The face of cylinder, sideNegative electrode is submerged into electrolyte together with array group electrode blank, joins based on sunykatuib analysisNumber is tested processing, by regulating machining voltage implementation tool electrode axis to diameterDimensional uniformity control, in conjunction with online microscopic examination survey tool electrode diameterChange, realize the preparation of required size array micro group electrode electro Chemical.
The cross section of array electrode blank of the present invention is square, equilateral triangle, regular pentagonOr regular hexagon. As shown in Figure 8, (a) being equilateral triangle, is (b) square; (c) beRegular hexagon; (d) be regular pentagon.
The fine group of sphere negative electrode optimization display electrode electro Chemical processing method stream involved in the present inventionJourney is as Fig. 5.
In the present invention, adopt the face of cylinder, spherical shape tool cathode, by optimal design cylinderFace diameter, axial line distance array group electrode lateral distance, the anglec of rotation, spherical diameter, angle of flare,Distance group's eletrode tip distance, can prepare the consistent array micro group electrode knot of diameter dimensionStructure, to be applied in microfabrication.
Secondly, the present invention adopts sphere tool cathode upper, workpiece under arrangement, haveEffect has been avoided tool cathode to produce bubble and has been coated on group electrode surface, suppresses group's electrode surface materialRemoval, impact group's electrode forming shape and surface quality.
Face of cylinder tool cathode inner surface, sphere cathode inner surface, group's electrode base apply one deckInsulating cement, the in the situation that of same charge, can improve process velocity, is coated with insulating layer coating screen simultaneouslyCover part electric field, contributed to the uniformity of Electric Field Distribution in negative electrode optimal design.
The present invention adopts online microscopic examination, on-line measurement group electrode shape Changing Pattern and chiVery little size, can control in real time to electrode forming, reduces mortality prepared by group's electrode.
With reference to Fig. 3, a kind of array micro group electrode preparation facilities of optimizing based on negative electrode, comprisesLathe 1, electrolytic cell 4 and processing power source 7, the intracavity bottom of described electrolytic cell 4 is provided with for puttingPut group's electrode holder 3 of array micro group electrode blank to be processed, described group's electrode holder 3Surrounding is installed the face of cylinder, four sides negative electrode 5, cloth Place above described group's electrode holder 3Face negative electrode 6, the center of described array micro group electrode blank and the center of described sphere negative electrode 6Be positioned on same plumb line, described sphere negative electrode 6 is arranged on described lathe 1, described sphereNegative electrode 6 is connected with the negative pole of described processing power source 7, described array micro group electrode hair to be processedThe anodic bonding of base and described processing power source 7.
Further, described device also comprises online microscope 8, and described online microscope 8 is positioned atThe side of described electrolytic cell 4, the side of described electrolytic cell 4 is provided with observation window.
Further, described face of cylinder tool cathode inner surface, sphere cathode inner surface, groupElectrode holder applies one deck insulation glue-line.
In the present embodiment, select tungsten as raw material, adopt the mode of Wire EDM, willSectional dimension 0.5mm × 0.5mm, spacing 1mm, high 5mm, 3 × 3 are processed in tungsten piece endArray format, as shown in Figure 3 group's electrode 2 structures. Next, 3 × 3 arrays are installed on to electricitySeparate on the interior group of liquid bath electrode holder, and connect processing power source anode, sphere tool cathode is installed onOn lathe Z axis, connect workpiece anode, lathe drives tool cathode motion, excellent according to finite elementChange condition (it is 6V that machining voltage is set when optimization, electrolytic conductivity), adjusts tool cathodeAnd relative position between group's electrode, gets D1=33.6mm, R=30mm, α=8.9 °, D2=25.6mm,ΦR＝16.8mm，β＝37°。
In electrolytic bath, be full of the NaOH of concentration 4%, the electrolyte submergence face of cylinder/sphere instrumentNegative electrode and array group electrode blank, open online microscopic system, connects and arrange processing power sourceMachining voltage is 6V, and microscopic system detects and record micro-electrode diameter dimension and shape becomesChange, observe and find that first seamed edge place material dissolves, along with processing is carried out, group's electrode sections shapeBe tending towards gradually circular, electrode diameter is with reducing gradually process time subsequently, its Changing PatternAs shown in Figure 6. In the time that diameter dimension reaches necessary requirement, cut off processing power source, obtain requiredArray micro group electrode, structure as shown in Figure 7.
Claims (7)
1. an array group electrode preparation method of optimizing based on negative electrode, is characterized in that: described preparation method comprises the following steps:
(1) array group electrode blank is made: metal material is cut into the array structure of equilateral polygon section, its cross section size dimension is a, electrode length L and spacing d;
(2) group's electrode holder surface applies one deck epoxy resins insulation glue, and described array group electrode blank is exposed;
(3), according to blahk structure size, array of designs group's electrode electro Chemical machining gap electric field physical model, sets machining voltage U, electrolytic conductivity parameterκ; The face of cylinder radius R of the face of cylinder, side negative electrode, axial line distance array group electrode blank lateral distance D1, anglec of rotation α; The spherical radius Φ R of sphere negative electrode, negative electrode centre of sphere distance arrays group electrode blank central electrode distance B 2, spherical radiation angleβ，Prepare the face of cylinder, side negative electrode and sphere negative electrode according to setup parameter;
(4) surrounding of described group electrode holder is installed the face of cylinder, four sides negative electrode, above described group's electrode holder, arranges sphere negative electrode, being centered close on same plumb line of the center of described array group electrode blank and described sphere negative electrode; The face of cylinder, side negative electrode is submerged into electrolyte together with array electrode blank, test processing based on sunykatuib analysis parameter, by regulating machining voltage implementation tool electrode axis to the control of diameter dimension uniformity, realize the preparation of required size array micro group electrode electro Chemical.
2. a kind of array group electrode preparation method of optimizing based on negative electrode as claimed in claim 1, it is characterized in that: in described step (4), change to diameter in conjunction with online microscopic examination survey tool electrode axis, realize the preparation of required size array micro group electrode electro Chemical.
3. a kind of array group electrode preparation method of optimizing based on negative electrode as claimed in claim 1 or 2, is characterized in that: in described step (3), face of cylinder tool cathode inner surface, sphere cathode inner surface apply one deck insulating cement.
4. a kind of array group electrode preparation method of optimizing based on negative electrode as claimed in claim 1 or 2, it is characterized in that: in described step (3), adopt finite element optimization method design cathode construction: Offered target function F unction is the poor minimum of the each electrode current density of anode surface, setting size Φ R, D2 and spherical radiation angleβUnder prerequisite, optimize analysis and obtain the tool cathode face of cylinder, side radius R, axial line distance array group electrode blank lateral distance D1, anglec of rotation α; Analyze based on optimizing R, the D1 and the α that obtain, then suboptimization obtains negative electrode spherical radius Φ R, negative electrode centre of sphere distance arrays group electrode blank central electrode distance B 2, spherical radiation angleβ; Prepare tool cathode according to optimum results.
5. an array micro group electrode preparation facilities of optimizing based on negative electrode, comprise lathe, electrolytic cell and processing power source, it is characterized in that: the intracavity bottom of described electrolytic cell is provided with the group's electrode holder for placing array micro group electrode blank to be processed, the surrounding of described group's electrode holder is installed the face of cylinder, four sides negative electrode, above described group's electrode holder, arrange sphere negative electrode, being centered close on same plumb line of the center of described array micro group electrode blank and described sphere negative electrode, described sphere negative electrode is arranged on described lathe, described sphere negative electrode, the face of cylinder, side negative electrode is connected with the negative pole of described processing power source, the anodic bonding of described array micro group electrode blank to be processed and described processing power source.
6. a kind of array micro group electrode preparation facilities of optimizing based on negative electrode as claimed in claim 5, is characterized in that: apply one deck insulation glue-line at described face of cylinder tool cathode inner surface, sphere cathode inner surface, group's electrode holder.
7. a kind of array micro group electrode preparation facilities of optimizing based on negative electrode as described in claim 5 or 6, it is characterized in that: described device also comprises online microscope, described online microscope is positioned at the side of described electrolytic cell, and the side of described electrolytic cell is provided with observation window.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410192639.4A CN104001998B (en) | 2014-05-08 | 2014-05-08 | Array micro group electrode preparation method and the device optimized based on negative electrode |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410192639.4A CN104001998B (en) | 2014-05-08 | 2014-05-08 | Array micro group electrode preparation method and the device optimized based on negative electrode |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104001998A CN104001998A (en) | 2014-08-27 |
| CN104001998B true CN104001998B (en) | 2016-05-11 |
Family
ID=51363062
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410192639.4A Expired - Fee Related CN104001998B (en) | 2014-05-08 | 2014-05-08 | Array micro group electrode preparation method and the device optimized based on negative electrode |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104001998B (en) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104772540B (en) * | 2015-04-29 | 2017-05-24 | 常州工学院 | Electrochemical machining method for copper-aluminum composite electrode surface texturing |
| CN106914666B (en) * | 2017-05-10 | 2019-01-25 | 常州工学院 | A kind of preparation method and array inclined hole cathode of Electrolyzed Processing array inclined hole cathode |
| CN107175376B (en) * | 2017-06-29 | 2019-02-19 | 张玉炜 | A kind of progress control method of precision ECM processing |
| CN107695467B (en) * | 2017-11-20 | 2023-06-27 | 浙江工业大学 | Preparation method and device for pressure type circulating jet flow electrolytic machining micro array electrode |
| CN110238470A (en) * | 2019-07-22 | 2019-09-17 | 北京理工大学 | A kind of electric discharge machining method of combination electrode and multistage microstructural |
| CN111299728B (en) * | 2020-03-27 | 2021-02-02 | 常州工学院 | Cathode tool for numerical control electrolytic machining of spherical chute |
| CN112025006B (en) * | 2020-09-02 | 2022-01-04 | 湖南泰嘉新材料科技股份有限公司 | Band saw blade surface treatment device |
| CN117182215B (en) * | 2023-11-07 | 2024-01-23 | 成都宝利根创科电子有限公司 | Electrode assembly and processing method and using method thereof |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03256619A (en) * | 1990-03-02 | 1991-11-15 | Sintokogio Ltd | Manufacture of electrode for electric discharge machining |
| US5507925A (en) * | 1994-10-28 | 1996-04-16 | Corning Incorporated | Electrochemical drilling of substrates |
| JP2003225830A (en) * | 2002-01-31 | 2003-08-12 | Ebara Corp | Electrochemical machining device and method |
| JP2003260618A (en) * | 2002-03-06 | 2003-09-16 | Sankyo Seiki Mfg Co Ltd | Electro-chemical machining method, and electro-chemical machine |
| JP2005231023A (en) * | 2004-01-23 | 2005-09-02 | Minebea Co Ltd | Electrode tool for electrochemical machining and its manufacturing method |
| CN100411794C (en) * | 2006-06-12 | 2008-08-20 | 南京航空航天大学 | Group-pore electrolytic machining method and apparatus |
| CN100544874C (en) * | 2006-10-20 | 2009-09-30 | 南京航空航天大学 | Electrochemical corrosion processing method with micro fine cylindrical group electrode |
| CN100544872C (en) * | 2008-07-09 | 2009-09-30 | 南京航空航天大学 | Adopt the electrolytic machining method for micro-pit group and the bipolar electrode thereof of bipolar electrode |
-
2014
- 2014-05-08 CN CN201410192639.4A patent/CN104001998B/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| CN104001998A (en) | 2014-08-27 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN104001998B (en) | Array micro group electrode preparation method and the device optimized based on negative electrode | |
| Cheng et al. | Study of gas film quality in electrochemical discharge machining | |
| CN105312692B (en) | Online electrochemical preparation device and method of high-rotation precision micro cylindrical electrode | |
| CN100544874C (en) | Electrochemical corrosion processing method with micro fine cylindrical group electrode | |
| Liu et al. | Development of microelectrodes for electrochemical micromachining | |
| CN105328285B (en) | A kind of the online of rotating accuracy bulb columnar electrode high prepares trimming device and method | |
| CN101085483A (en) | Combinational processing method for micro-array axle hole | |
| Patro et al. | Numerical and experimental analysis of high-aspect-ratio micro-tool electrode fabrication using controlled electrochemical machining | |
| CN103521864A (en) | On-line preparation method of line electrode of minuteness group lines | |
| CN205096664U (en) | High gyration precision bulb cylindrical electrode's online preparation trimming device | |
| Madhavi et al. | Investigation on machining of holes and channels on borosilicate and sodalime glass using μ-ECDM setup | |
| CN106270839A (en) | Many materials electric discharging machining electrode and processing method thereof | |
| CN104057163A (en) | Gas film shielding superfine electrolytic processing method and special device thereof | |
| Gupta | Effect of electrolyte level during electro chemical discharge machining of glass | |
| CN104511669B (en) | Electrochemical machining method of disc array group electrodes with large length-to-diameter ratio | |
| Wang et al. | Fabrication of multiple electrodes and their application for micro-holes array in ECM | |
| CN105839169A (en) | Electro-deposition high-throughput preparation device and method for materials | |
| Wang et al. | Fabrication of disk microelectrode arrays and their application to micro-hole drilling using electrochemical micromachining | |
| Zhang et al. | A micro-machining system based on electrochemical dissolution of material | |
| CN105108250A (en) | Method for flexibly online preparing micro line group electrode | |
| CN109158719B (en) | A kind of electrochemical micromachining device of electrostatically actuated supplementary feeding | |
| CN103252544B (en) | Method and device for manufacturing of carbon nanometer tube electrode with length controllable and detection of conductivity of carbon nanometer tube electrode | |
| Shen et al. | Sinking ECDM micro-milling of micro-channels with a customized electrode | |
| CN202007125U (en) | System for batch preparation of three-dimensional microstructures with large aspect ratio | |
| CN109500463B (en) | Method and device for preparing micron-scale tool electrode with large length-diameter ratio on line through vertical liquid film |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20200724 Address after: 510000 unit 2414-2416, building, No. five, No. 371, Tianhe District, Guangdong, China Patentee after: GUANGDONG GAOHANG INTELLECTUAL PROPERTY OPERATION Co.,Ltd. Address before: The city Zhaohui six districts Chao Wang Road Hangzhou City, Zhejiang province 310014 18 Patentee before: ZHEJIANG University OF TECHNOLOGY Effective date of registration: 20200724 Address after: 221300 Tiefu Street, Tiefu Town, Pizhou City, Jiangsu Province (Cultural Center) Patentee after: PIZHOU TIEFU JIULONG PUBLIC SERVICE Co.,Ltd. Address before: 510000 unit 2414-2416, building, No. five, No. 371, Tianhe District, Guangdong, China Patentee before: GUANGDONG GAOHANG INTELLECTUAL PROPERTY OPERATION Co.,Ltd. |
|
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160511 |