CN103008807B - Electrochemical discharge machining device and method based on force feedback control feeding system - Google Patents
Electrochemical discharge machining device and method based on force feedback control feeding system Download PDFInfo
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Abstract
The invention discloses an electrochemical discharge machining device and an electrochemical discharge machining method based on a force feedback control feeding system, and belongs to the field of special machining. According to the device and method, a tool electrode is fixed on a Z-axis of a machine tool through a clamp; a force sensor is installed on the Z-axis of the machine tool; the force sensor is connected with a data acquisition card; the data acquisition card is introduced into a machine tool numerical control system; the machine tool numerical control system controls the electrochemical discharge and feeding through a machine tool servo system; the force sensor detects a contact force signal of the tool electrode with a workpiece; after being subjected to relevant processing, the signal is acquired by the data acquisition card and accessed into a numerical control system; and the numerical control system then controls the feeding or withdrawing of the electrochemical discharge machining according to the signal. If the contact force is smaller than a set reference force, the system feeds in a set feeding speed; and if the contact force is larger than the reference force, the system withdraws for a certain distance in a set withdrawing speed.
Description
Technical field
The present invention relates to the apparatus and method of in a kind of special process field, non-conductive fragile material being carried out to microfabrication, particularly relate to a kind of electrochemical discharge processing unit (plant) based on force-feedback control feed system and method.
Background technology
In recent years, non-conductive fragile material, such as, various glass, pottery etc. are obtained for be applied widely, glass material has resistance to chemical attack, transparent, the feature such as low conductivity and good biocompatibility, thus is used in micro-accelerator, microreactor, micropump, medicine equipment and optical system; And ceramic material has the excellent properties such as high strength, high rigidity, high temperature resistant, wear-resistant, anticorrosive, good insulating, day by day demonstrate application prospect widely in fields such as mechano-electronic, Aero-Space, chemical machinery, ceramic engine, bioceramic and precision instruments, exploitation and the research of non-conductive fragile material process technology have been subject to the great attention of countries in the world.Compared with other processing method of non-conductive fragile material, electrochemical discharge processing (Electrochemical DischargeMachining, ECDM) technology has, surface quality advantages of higher little compared with high working (machining) efficiency, macroscopical active force, thus becomes the Perfected process of non-conductive fragile material microfabrication.
In electrochemical discharge processing unit (plant), tool-electrode connects the negative pole of power supply, auxiliary electrode connects the positive pole of power supply, the alkaline electrolyte solutions such as electrolyte solution many employings NaOH (NaOH) or potassium hydroxide (KOH), processing work is immersed in electrolyte solution, electrolyte solution liquid level is higher than surface of the work about 2mm, tool-electrode is positioned at the top of processing work and the end of tool-electrode and surface of the work keep in touch or be positioned near surface of the work, the end of tool-electrode and auxiliary electrode are also immersed in electrolyte solution simultaneously, after apply voltage between tool-electrode and auxiliary electrode, just have cell reaction in electrolyte solution to occur, the reaction occurred at auxiliary electrode is:
4(OH)
-→2H
2O+2O
2↑+4e
-，
Auxiliary electrode generates oxygen; The reaction that tool-electrode occurs is:
2H
2O+2e
-→2(OH)
-+H
2↑
Tool-electrode produces bubble hydrogen, bubble hydrogen can be attached to the surface of tool-electrode after generating, and constantly merge along with increasing of bubble, finally form a hydrogen membrane on tool-electrode surface, hydrogen membrane produces insulating effect to electrode, therefore between tool-electrode and electrolyte solution, form electrical potential difference, after this electrical potential difference exceedes the critical voltage value of spark discharge, spark discharge phenomenon will occur.Time distance between tool-electrode and workpiece is less than 25 μm, workpiece material will constantly discharge under the heat of generation and the effect of chemical attack by ablation.
Processing utilizing electrochemical discharge carries out in drill process to non-conductive fragile material, and hydrogen membrane does not have a constant state, and processing different depth shows different state, thus causes material removing rate to change always.In order to improve working (machining) efficiency and the crudy of electrochemical discharge processing, need ensure that tool-electrode feed speed equals the process velocity of hole depth, this proposes important requirement to feed system as far as possible.
The conventional feeding mode of electrochemical discharge processing generally comprises constant speed feed and gravity feeding, and these feeding modes exist many drawbacks.Constant speed feed, namely machine tool chief axis drives tool-electrode with constant speed feeding.In the course of work of electrochemical discharge processing, the process velocity in hole is not constant, but constantly declines along with the increase of working depth.After processing certain depth, when the speed that constant speed feed is arranged is greater than the process velocity of hole depth, the distortion of tool-electrode, the breaking of breakage and workpiece can be caused; When the speed that constant speed feed is arranged is too small, working (machining) efficiency is low, and can cause the bad phenomenon such as sideflash is violent, borehole enlargement, and have a strong impact on the quality of electrochemical discharge processing, therefore constant speed feed cannot meet the requirement of electrochemical discharge processing.Gravity feeding refers to that the constant power of applying one makes a kind of feeding mode of tool-electrode and workpiece close contact.Although gravity feed energy ensures that feed speed equals the speed of hole machined, but after processing certain depth, in gravity feeding, tool-electrode is close to workpiece, and the electric discharge of electrochemical discharge processing occurs between tool-electrode and electrolyte solution, need, in machining hole, tool-electrode end face and workpiece have certain electrolyte solution and air film gap of insulating between bottom surface, hole, the fresh electrolyte solution that gravity feeding cannot provide electrochemical discharge machining to need and insulation air film gap, the processing of tool-electrode end face is difficult to proceed, process velocity significantly reduces, tool-electrode sideflash aggravates, the Quality Down of machining hole.
Therefore, those skilled in the art is devoted to develop a kind of method that can improve the electrochemical discharge processing of crudy.
Summary of the invention
Because the above-mentioned defect of prior art, the present invention proposes a kind of electrochemical discharge processing unit (plant) based on force-feedback control feed system and method.The present invention uses the contact force signal of force snesor testing tool electrode and workpiece, and the input signal being feed system with the contact force signal detected is to control the feeding process of electrochemical discharge processing.
For achieving the above object, the invention provides a kind of electrochemical discharge processing unit (plant) based on force-feedback control feed system, comprise electrolyte solution, processing work, tool-electrode, auxiliary electrode, processing power source, machine tool numerical control system, Servo System of Machine Tools, this processing work is non-conductive fragile material, as glass or pottery, also comprise force snesor, data collecting card, the sectional fixture of tool-electrode and force snesor, the output of described force snesor is connected with the input of described data collecting card, the output of described data collecting card is connected to described machine tool numerical control system, described force snesor is for detecting the contact force between described tool-electrode and processing work, and output corresponds to the voltage signal of described contact force to described data collecting card, described data collecting card is used for sampling to described voltage signal and the described voltage signal through over-sampling being sent to described machine tool numerical control system, the described described voltage signal through over-sampling is converted to described contact force by described machine tool numerical control system, described machine tool numerical control system controls the feed speed of described Servo System of Machine Tools according to described contact force.
Preferably, processing power source is pulse dc power.
Preferably, tool-electrode is arranged on the supply side of the Z axis of lathe by the sectional fixture of tool-electrode and force snesor.
Preferably, force snesor is arranged on the Z axis of lathe.
Preferably, also comprise amplifier, the output signal of described force snesor accesses digital control system after amplifier process.
Electrochemical discharge processing method based on force-feedback control feed system involved in the present invention, by the contact force between force snesor testing tool electrode and workpiece, this contact force and the reference load set in advance compare by machine tool numerical control system, and then pass through feeding or the rollback of Servo System of Machine Tools control tool electrode.This control method can ensure that feed speed is approximately equal to the speed of hole depth processing, the fresh electrolyte that can electrochemical discharge machining be provided to need when process velocity is very little again and insulation air film gap.
Said method of the present invention comprises the following steps:
(1) force snesor is arranged on the Z axis of lathe, tool-electrode is fixed on the supply side of the Z axis of described lathe by the sectional fixture of tool-electrode and force snesor, described tool-electrode to processing work with setting speed feeding, described force snesor detects the contact force between described tool-electrode and described processing work, and exports the voltage signal corresponding with described contact force to data collecting card;
(2) described data collecting card is sampled to the described voltage signal that described force snesor exports;
(3) the described voltage signal through over-sampling is sent in the machine tool numerical control system of described lathe by described data collecting card, and described machine tool numerical control system converts described contact force to the described voltage signal through described sampling;
(4) compared by the reference load of described contact force and setting, if described contact force is less than described reference load, then described Servo System of Machine Tools controls the feeding of the Z axis of described lathe according to the feed speed arranged; If described contact force is greater than described reference load, then described Servo System of Machine Tools is according to the Z axis rollback of lathe described in the rollback speeds control arranged;
(5) feeding depth of the Z axis of described lathe reaches target depth, and feed system stops; If the feeding depth of the Z axis of described lathe does not reach described target depth, then repeat step (1)-(4), until reach described target depth.
Preferably, in step (4), compared by the reference load of this contact force and setting, if this contact force is less than described reference load, then Servo System of Machine Tools controls the feeding of machine Z-axis according to the feed speed arranged; If this contact force is greater than reference load, then Servo System of Machine Tools is according to the rollback speeds control machine Z-axis rollback arranged, and the distance of machine Z-axis rollback is 10-20 μm.
Compared with the conventional feed system of processing with electrochemical discharge, be mainly based on the electrochemical discharge processing unit (plant) of force-feedback control feed system and the advantage of method:
By force-feedback control feed system, the contact forces avoiding tool-electrode and workpiece is excessive and cause tool-electrode to be out of shape, rupture and damage, when also can ensure processing through hole, workpiece such as can not to break because contact force is excessive at the bad phenomenon, greatly enhances the workpiece surface quality that electrochemical discharge is processed like this.
By force-feedback control feed system, be provided with tool-electrode backout routine, ensure that tool-electrode end face and workpiece have certain gap between bottom surface, hole, electrolyte solution can middlely in this gap circulate, insulation air film also can be formed in this gap, the processing bits produced in process can be discharged with comparalive ease under the effect of electrolyte solution shuttling movement, greatly can improve the stability of electrochemical discharge processing.
After adopting force-feedback control feeding, sample frequency is higher, and the feed speed of system is approximately equal to the process velocity of hole depth, and makes electrochemical discharge process stable carrying out, so the efficiency of electrochemical discharge processing obtains large increase.
Electrochemical discharge processing unit (plant) based on force-feedback control feed system of the present invention and method are in drill process, after machining hole arrives certain depth, tool-electrode end face spark discharge processing still can be carried out more stablely, this ensure that high temperature and the chemical etching processing of machining area are stably carried out, thus improve the stability of processing, the depth capacity of machining hole have also been obtained increase.
According to method provided by the invention, the end face of tool-electrode and the surface of processing work to remain on processing work within 25 μm, bottom surface, hole, maintain certain machining gap.The present invention propose the electrochemical discharge processing unit (plant) based on force-feedback control feed system and method in, ensure that the gap on tool-electrode end face and workpiece between bottom surface, hole is core of the present invention by force-feedback control feed system.Adopt force-feedback control feed system, ensure that tool-electrode end face and workpiece have certain gap between bottom surface, hole, fresh electrolyte solution easily enters in this gap, insulation air film also can be formed in this gap, improve the stability of tool-electrode end face air film, the electric discharge of electrochemical discharge processing end face can stably be carried out; Adopt force-feedback control feed system, the processing produced in process bits can be discharged with comparalive ease under the effect of electrolyte solution shuttling movement.Apply between tool-electrode and auxiliary electrode after voltage, tool-electrode just there is spark discharge produce, adopt force-feedback control feed system, workpiece is made to be within the scope of electrochemical discharge processing all the time, along with constantly carrying out of process, the material of workpiece is constantly removed, after the degree of depth that the electrochemical discharge machining exceeding conventional feeding mode when the degree of depth of machining hole can arrive, the electric discharge of tool-electrode end face still can continue stable carrying out, and tool-electrode side is also suppressed to some extent, thus effectively increase the stability of electrochemical discharge processing and the depth capacity of machining hole.
Be described further below with reference to the technique effect of accompanying drawing to design of the present invention, concrete structure and generation, to understand object of the present invention, characteristic sum effect fully.
Accompanying drawing explanation
Fig. 1 is the structural representation based on the electrochemical discharge processing unit (plant) of force-feedback control feed system in a preferred embodiment of the present invention;
Fig. 2 is the schematic diagram that the tool-electrode in a preferred embodiment of the present invention contacts with processing work;
Fig. 3 is the flow chart of method in a preferred embodiment of the present invention.
Detailed description of the invention
As shown in Figure 1, in the present embodiment, the electrochemical discharge processing unit (plant) based on force-feedback control feed system of the present invention comprises sectional fixture 6, processing power source 7, force snesor 8, machine Z-axis 9, Servo System of Machine Tools 10, machine tool numerical control system 11, the data collecting card 12 of electrolyte solution 1, tool-electrode 2, processing work 3, auxiliary electrode 4, electrolytic bath 5, tool-electrode and sensor.Wherein, the contact site (distance is about 25 μm) of B place representational tool electrode and processing work, electrolyte solution 1 is NaOH (NaOH) electrolyte solution, tool-electrode 2 connects power cathode, auxiliary electrode 4 connects positive source, and tool-electrode 2 and processing work 3 are immersed in NaOH (NaOH) electrolyte solution 1 simultaneously.Use pulse dc power as processing power source 7 in the present embodiment, machining voltage is 50V, frequency is 500Hz, dutycycle is set to 50%, and the mass concentration of NaOH (NaOH) solution is 30%, and tool-electrode 2 material is tungsten, electrode diameter is 200 μm, force snesor 8 adopts high accuracy strain transducer, and connects amplifier supporting with it and carry out processing signals, and workpiece material is quartz glass or the microcrystalline mica pottery of 1mm thickness.
After processing power source 7 applies voltage between tool-electrode 2 and auxiliary electrode 4, tool-electrode 2 surface has bubble hydrogen to produce, along with being on the increase of bubble, bubble is by constantly merging, air film is formed on tool-electrode 2 surface, insulating effect due to air film makes to form electrical potential difference between tool-electrode 2 and NaOH (NaOH) solution, after this electrical potential difference exceedes critical voltage value, between tool-electrode 2 and sodium hydroxide solution (NaOH), just have spark discharge occur, the heat energy that electric discharge produces and chemical attack are by workpiece material ablation.Now, start based on force-feedback control feed system, the distance in work in-process retaining tool electrode end surface and work pieces process face is about 25 μm.Force snesor 8 detects the contact force signal of testing tool electrode and workpiece, and exports the voltage signal corresponding with described contact force; The voltage signal that data collecting card 12 pairs of force snesor export is sampled, and sample frequency is 18kHz; The voltage signal obtained of sampling is incorporated in machine tool numerical control system 11, machine tool numerical control system 11 converts the size of former contact force to this signal, the contact force error range that the contact force of sensor measurement and machine tool numerical control system are converted to, in ± 5mN, therefore can think that the two is equivalent; And the reference load of this contact force and setting is compared, Servo System of Machine Tools 10 controls feeding or the rollback of machine Z-axis 9 according to the instruction that machine tool numerical control system 11 provides, thus drives feeding or the rollback of tool-electrode.
As shown in Figure 2, be the schematic diagram that the tool-electrode in a preferred embodiment of the present invention contacts with processing work, comprise tool-electrode 2, processing work 3, air film 13, bubble 14, processing bits 15.Tool-electrode 2 surface has bubble hydrogen 14 to produce, and along with being on the increase of bubble, bubble, by constantly merging, forms air film 13 on tool-electrode 2 surface; In the present embodiment, tool-electrode 2 end face and workpiece 3 there is certain gap between bottom surface, hole, fresh electrolyte solution easily enters in this gap, insulation air film 13 also can be formed in this gap, improve the stability of tool-electrode end face air film, the electric discharge of electrochemical discharge processing end face can stably be carried out; On the other hand, the processing bits 15 produced in process can be discharged with comparalive ease under the effect of electrolyte solution shuttling movement.
As shown in Figure 3, in the control flow chart based on the electrochemical discharge processing method of force-feedback control feed system, the contact force F between force snesor testing tool electrode and workpiece, and export the voltage signal corresponding with described contact force; Data collecting card is sampled to the voltage signal that force snesor exports; The voltage signal obtained of sampling is incorporated in machine tool numerical control system, and this voltage signal is converted to corresponding contact force, and itself and the reference load arranged is compared; If this contact force is less than reference load, then system is according to the feed speed feeding arranged; If this contact force is greater than reference load, then system is according to the rollback speed rollback certain distance arranged, and the distance of machine Z-axis rollback is 10-20 μm; When feeding depth reaches target depth, feed system stops; If the feeding depth miss the mark degree of depth of system, then continue processing, repeat feed rate-determining steps, until reach target depth.
In the electrochemical discharge processing unit (plant) based on force-feedback control feeding proposed in the present invention and method, force feedback system is adopted to control feed speed, ensure that tool-electrode end face and workpiece have certain gap between bottom surface, hole, electrolyte solution can middlely in this gap circulate, insulation air film also can be formed in this gap, improve the stability of tool-electrode end face air film, the end face electric discharge allowing electrochemical discharge process and chemical etching stably carry out, and the processing produced in process bits can easily be discharged under the effect of electrolyte solution shuttling movement.Force feedback system is adopted to control feeding, workpiece is made to be within the range of work of spark discharge all the time, along with constantly carrying out of process, the material of workpiece is just constantly removed, after the degree of depth of machining hole exceedes the degree of depth that Conventional electrochemical electric discharge machining can reach, the electric discharge of tool-electrode end face still can continue stable carrying out, and also suppresses to some extent tool-electrode side, thus effectively increases stability and the working depth of electrochemical discharge processing.
Find in implementation process, in 0-300 μm of depth bounds based on the electrochemical discharge processing method of force-feedback control feeding and the process velocity of Conventional electrochemical discharge-treating method very nearly the same.But after working depth is more than 400 μm, in conventional feeding mode electrochemical discharge processing, because machining gap is almost 0, owing to being difficult to the fresh electrolyte solution providing electrochemical discharge machining to need and air film gap of insulating, the processing of tool-electrode end face electrochemical discharge is difficult to proceed, process velocity significantly reduces, and tool-electrode sideflash aggravates, the Quality Down of machining hole.But based on the electrochemical discharge working depth of force-feedback control feeding more than 400 μm after, owing to possessing the fresh electrolyte solution and insulation air film gap that electrochemical discharge machining needs, the electric discharge of tool-electrode end face still can continue stable carrying out.
More than describe preferred embodiment of the present invention in detail.Should be appreciated that the ordinary skill of this area just design according to the present invention can make many modifications and variations without the need to creative work.Therefore, all technical staff in the art, all should by the determined protection domain of claims under this invention's idea on the basis of existing technology by the available technical scheme of logical analysis, reasoning, or a limited experiment.
Claims (4)
1. the electrochemical discharge processing unit (plant) based on force-feedback control feed system, comprise electrolyte solution, tool-electrode, auxiliary electrode, processing power source, machine tool numerical control system, Servo System of Machine Tools, it is characterized in that, also comprise force snesor, data collecting card, the sectional fixture of tool-electrode and force snesor, the output of described force snesor is connected with the input of described data collecting card, the output of described data collecting card is connected to described machine tool numerical control system, described force snesor is for detecting the contact force between described tool-electrode and processing work, and output corresponds to the voltage signal of described contact force to described data collecting card, described data collecting card is used for sampling to described voltage signal and the described voltage signal through over-sampling being sent to described machine tool numerical control system, the described described voltage signal through over-sampling is converted to described contact force by described machine tool numerical control system, described machine tool numerical control system controls the feed speed of described Servo System of Machine Tools according to described contact force, distance between described tool-electrode and described processing work is less than 25 μm,
Described tool-electrode is fixed on the supply side of machine Z-axis by the sectional fixture of described tool-electrode and force snesor, by mobile feeding or the rollback driving described tool-electrode of the Z axis of described lathe;
Described force snesor is arranged on the Z axis of lathe;
Described machine tool numerical control system is used for the reference load of described contact force and setting to compare, if described contact force is less than described reference load, then described Servo System of Machine Tools controls the feeding of the Z axis of described lathe according to the feed speed arranged; If described contact force is greater than described reference load, then described Servo System of Machine Tools is according to the Z axis rollback of lathe described in the rollback speeds control arranged, and the distance of the Z axis rollback of described lathe is 10-20 μm.
2. the electrochemical discharge processing unit (plant) based on force-feedback control feed system according to claim 1, is characterized in that, described processing work is non-conductive fragile material.
3. the electrochemical discharge processing unit (plant) based on force-feedback control feed system according to claim 2, is characterized in that, described non-conductive fragile material is glass or pottery.
4. based on an electrochemical discharge processing method for force-feedback control feed system, it is characterized in that, described method comprises the steps:
(1) be arranged on the Z axis of lathe by force snesor, tool-electrode is fixed on the supply side of the Z axis of described lathe by the sectional fixture of tool-electrode and force snesor, the distance between described tool-electrode and processing work is less than 25 μm; Described tool-electrode is to processing work with the speed feeding of setting, and described force snesor detects the contact force between described tool-electrode and described processing work, and exports the voltage signal corresponding with described contact force to data collecting card;
(2) described data collecting card is sampled to the described voltage signal that described force snesor exports;
(3) the described voltage signal through over-sampling is sent in the machine tool numerical control system of described lathe by described data collecting card, and described machine tool numerical control system converts described contact force to the described voltage signal through described sampling;
(4) compared by the reference load of described contact force and setting, if described contact force is less than described reference load, then described Servo System of Machine Tools controls the feeding of the Z axis of described lathe according to the feed speed arranged; If described contact force is greater than described reference load, then described Servo System of Machine Tools is according to the Z axis rollback of lathe described in the rollback speeds control arranged;
(5) feeding depth of the Z axis of described lathe reaches target depth, and feed system stops; If the feeding depth of the Z axis of described lathe does not reach described target depth, then repeat step (1)-(4), until reach described target depth;
In described step (4), compared by the reference load of described contact force and setting, if described contact force is less than described reference load, then described Servo System of Machine Tools controls the feeding of the Z axis of described lathe according to the feed speed arranged; If described contact force is greater than described reference load, then described Servo System of Machine Tools is according to the Z axis rollback of lathe described in the rollback speeds control arranged, and the distance of the Z axis rollback of described lathe is 10-20 μm.
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