CN101011765A - Subtly processing method of electrolyte axial flow and special electrode nozzle therefor - Google Patents
Subtly processing method of electrolyte axial flow and special electrode nozzle therefor Download PDFInfo
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- CN101011765A CN101011765A CN 200710019451 CN200710019451A CN101011765A CN 101011765 A CN101011765 A CN 101011765A CN 200710019451 CN200710019451 CN 200710019451 CN 200710019451 A CN200710019451 A CN 200710019451A CN 101011765 A CN101011765 A CN 101011765A
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Abstract
The invention relates to trickle electrochemical machining. The liquid level of the electrolyte cell is lower than the machining surface, extracting electrolyte form the cell using its pump, using special electrode nozzle to introduce the electrolyte flowing slowly to the machining area along the radial of the tool electrode and finally returning back to the electrolyte cell from the machining area. The special electrode is made of nozzle clamper, electrode annular tube, nozzle liner and nozzle bushing. It can improve the machining stability, machining precision and micro degree.
Description
Technical field
The present invention relates to a kind of fine machining method and special electrode nozzle thereof of electrolyte axial flow, belong to the micro-electrochemical machining processing technique field.
Background technology
At present, very urgent to the Micrometer-Nanometer Processing Technology demand of accurate micro electro mechanical device, electrochemical Machining Technology is fit to the requirement and the characteristics of microfabrication very much.Micro-electrochemical machining processing is the dispersion corrosion of control Electrolyzed Processing because material removal amount is few, and size is little, and the pole clearance between the electrode has only tens microns; Therefore machining gap very easily stops up, so that causes short circuit, damages tool-electrode.Stop up machining gap for avoiding elaboration products to generate precipitation, can select the low concentration acidic electrolysis bath for use, make the product of workpiece electrochemical reaction be ionic condition and incorporate in the electrolyte.If the renewal but electrolyte can not circulate, the ion concentration in the machining gap can constantly increase cause producing concentration polarization around the electrode, and the micro-bubble that produces in the processing also can be adsorbed on the tool cathode the carrying out smoothly of influence processing.Therefore, in order to guarantee the continous-stable of micro-electrochemical machining processing, the mode that circulates that must appropriate design electrolyte.The tool-electrode diameter of micro-electrochemical machining processing has only several microns to tens microns, can't produce fluid hole on tool cathode, and the type of flow of drag flow or anti-stream all can not realize.And the mode of employing effluent allows electrolyte wash away the vibration that machining gap can cause micro-electrode from the side, has a strong impact on the stability of machining accuracy and process.If, can not take away the product of electrochemical reaction again, the electrolyte of the processing district that upgrades in time for the stable electrolyte that makes that guarantees fine tool-electrode is static.
Electrolyte axial flow micro-electrochemical machining processing method of the present invention and device, make electrolyte along tool-electrode axially gently flow into machining area, can avoid the vibration of tool-electrode, take away metal ion and micro-bubble in the micro-electrochemical machining process simultaneously.Electrolyte circulates in process, can significantly improve the stability of process, guarantees carrying out smoothly of processing, realizes micron-sized micro-electrochemical machining processing.
Summary of the invention
The present invention is directed to that electrolyte can't upgrade in time in the micro-electrochemical machining processing, the problem of process poor stability, propose a kind of fine machining method and special nozzle thereof of electrolyte axial flow, can on the high-performance metal workpiece, realize high-quality micron order fine structure processing.
A kind of micro-electrochemical machining processing method of electrolyte axial flow, the circulate electrolyte mode that it is characterized in that it is: make liquid level in the electrolytic bath be lower than the machined surface of workpiece, utilize the micro solution pump that electrolyte is extracted out from electrolytic bath after filter is sent into special electrode nozzle, utilize special electrode nozzle to make axially mild the flow into processing district of electrolyte, flow back to the electrolytic bath from the processing district more at last along tool-electrode.
A kind of micro-electrochemical machining processing special electrode nozzle of electrolyte axial flow is characterized in that by the nozzle chuck, cover in the electrode sleeve pipe, nozzle, and the nozzle overcoat constitutes; And electrode sleeve pipe upper end is connected with the nozzle chuck, and the lower end is used to install micro-electrode; Arbitrage is installed on the nozzle chuck with the upper end in the nozzle, is positioned at the electrode outside of sleeve; Nozzle overcoat utilization upper end is installed in the nozzle and puts, and is positioned at the nozzle cover outside; Nozzle has put electrolyte entrance outward, and the nozzle overcoat overlaps except that the installation position contacts with nozzle is interior, and remainder does not contact, and forms the electrolyte channel that communicates with electrolyte entrance, and electrolyte channel is the convergence shape, and micro-electrode is pointed in outlet.
Technical characterictic of the present invention is:
1, the liquid level in the electrolytic cell is lower than the machined surface of workpiece, when determining the relative position between the electrode before processing, can make the short circuit tool setting not be subjected to the influence of electrolyte, guarantees the accurate location between tool-electrode and the workpiece.Required electrolyte is supplied with by micro pump in the processing, therefore just can make workpiece break away from the immersion of acid solution fast as long as micro pump is closed down, thereby reduce time and the zone that workpiece is corroded, and also is convenient to take out workpiece after the process finishing.
2, electrolyte adopts and circulates mode in the process, can guarantee upgrading in time of processing district electrolyte.Micro pump is extracted electrolyte out in working groove, sends into the various solid impurities in the filtering solution in the filter then, avoids small solid impurity to block machining gap and causes intereelectrode short-circuit.Electrolyte enters electrode nozzle after coming out from filter, the nozzle chuck is fixed on the machine tool chief axis, links to each other with pulse power negative pole, and the pulse current of processing is conducted to tool-electrode.The endoporus installing electrodes sleeve pipe of chuck, owing to be not subjected to the external force effect in the processing, micron-sized tool-electrode can directly insert and utilize the size cooperation fixing in the sleeve pipe.The gap mass flowing nozzle of the electrolyte that micro pump provides between interior overcoat axially flows through the processing district gently along tool-electrode, takes away metal ion and microbubble that processing produces, is back in the electrolytic bath.The percussion of electrolyte is born by cover in the nozzle fully, and tool-electrode can not be affected.
Therefore beneficial effect of the present invention is: provide the processing method and the special electrode nozzle of electrolyte axial flow for realizing micron-sized Electrolyzed Processing, can strengthen the stability of processing effectively, improved the precision and the fine degree of processing.
Description of drawings
Fig. 1 is the schematic diagram of the micro-electrochemical machining processing unit (plant) of electrolyte axial flow.
Fig. 2 is the structural representation of electrode nozzle.
Label title among Fig. 1: 1, fine electrolytic machining tool main shaft, 2, current sensor, 3, the pulse power, 4, filter, 5, micro pump, 6, electrolytic bath, 7, the X-Y two-dimentional work bench, 8, the workpiece anode, 9, tool cathode, 10, electrode nozzle.
Label title among Fig. 2: 11, nozzle chuck, 12, the electrode sleeve pipe, 13, cover in the nozzle, 14, the nozzle overcoat.
The specific embodiment
Implement the present invention's's " micro-electrochemical machining processing method of electrolyte axial flow " device, as shown in Figure 1.Comprise the main shaft 1 and the workbench 7 of fine electrolytic machining tool, current sensor 2, micro-electrochemical machining add working pulse power source 3, electrolyte filter 4, acid and alkali-resistance micro pump 5, electrolytic bath 6, processed workpiece anode 8, fine tool cathode 9 and electrode nozzle 10.Wherein electrode nozzle overlaps 13 by nozzle chuck 11 in the electrode sleeve pipe 12, nozzle, and nozzle overcoat 14 constitutes.
Concrete implementation step of the present invention is as follows:
1, electrode nozzle utilizes collet to be installed on the machine tool chief axis, and be connected with the circulate electrolyte pipeline, fine tool-electrode inserts in the electrode sleeve pipe, the workpiece anode is fixed in and is installed in the electrolytic bath on the X-Y two-dimentional work bench, and move to the Working position of tool-electrode below, and keep certain distance between the tool-electrode;
2, the positive and negative electrode of the pulse power links to each other with tool cathode with the workpiece anode respectively, adds required low concentration acidic electrolysis bath in electrolytic bath, and liquid level is lower than the machined surface of workpiece;
3, the pulse power is opened the back by the setting of tool setting parameter, applies pulse voltage between workpiece anode and tool cathode;
4, tool-electrode is with main shaft feeding vertically downward; When contacting with workpiece, instrument is short-circuited, current sensor senses to current signal can produce sudden change, by computer control turn-off pulse power supply, and stop the tool-electrode motion, thereby utilize the method for short circuit tool setting to determine that the gap is zero position between electrode and the workpiece;
5, tool-electrode rollback number is micron as the initial manufacture gap, and sets the processing feed speed of lathe;
6, the machined parameters setting is opened and pressed to the pulse power, for micro-electrochemical machining processing provides processing electric current.Start the micro solution pump electrolyte is extracted out, send into electrode nozzle through behind the filter, flow out in the gap of overcoat in the nozzle, is back in the electrolytic bath along tool-electrode again, guarantees that the circulation of electrolyte in the processing is upgraded.
7, the digital control system of lathe begins to process feeding according to processing request driven tool electrode (or workpiece); When detected processing electric current exceeds the current range of stable processing, illustrate that machining state is undesired, power supply disconnects, suspends processing, and feeding is continued after the adjustment feed speed in the gap of electrode rollback number micron;
8, after the machining of fine structure, the pulse power disconnects, and cell liquor pump is closed down, and the tool-electrode rollback takes out workpiece to initial position.
Claims (2)
1, a kind of micro-electrochemical machining processing method of electrolyte axial flow, the circulate electrolyte mode that it is characterized in that it is: make liquid level in the electrolytic bath be lower than the machined surface of workpiece, utilize the micro solution pump that electrolyte is extracted out from electrolytic bath after filter is sent into special electrode nozzle, utilize special electrode nozzle to make axially mild the flow into processing district of electrolyte, flow back to the electrolytic bath from the processing district more at last along tool-electrode.
2, a kind of micro-electrochemical machining of electrolyte axial flow processing special electrode nozzle is characterized in that by nozzle chuck (11), cover (13) in the electrode sleeve pipe (12), nozzle, and nozzle overcoat (14) constitutes; And electrode sleeve pipe (12) upper end is connected with the nozzle chuck, and the lower end is used to install micro-electrode; Cover (13) utilizes the upper end to be installed on the nozzle chuck (11) in the nozzle, is positioned at electrode sleeve pipe (12) outside; Nozzle overcoat (14) utilizes the upper end to be installed on the interior cover of nozzle (13), is positioned at nozzle cover (13) outside; The nozzle overcoat has electrolyte entrance on (14), and cover (13) is except that the installation position contact in nozzle overcoat (14) and the nozzle, and remainder does not contact, and forms the electrolyte channel that communicates with electrolyte entrance, and electrolyte channel is the convergence shape, exports the sensing micro-electrode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200710019451 CN101011765A (en) | 2007-01-25 | 2007-01-25 | Subtly processing method of electrolyte axial flow and special electrode nozzle therefor |
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| Application Number | Priority Date | Filing Date | Title |
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| CN 200710019451 CN101011765A (en) | 2007-01-25 | 2007-01-25 | Subtly processing method of electrolyte axial flow and special electrode nozzle therefor |
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- 2007-01-25 CN CN 200710019451 patent/CN101011765A/en active Pending
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