CN101633065B - Microscale pulse electrolysis jet processing system and processing method thereof - Google Patents

Abstract

The invention relates to a microscale pulse electrolysis jet processing system and a processing method thereof, which belongs to the technical field of electrolysis processing. The microscale pulse electrolysis jet processing system comprises a pulse direct-current power supply, an electrolyte jet injection device, an electrolyte circulating and filtering system, a workpiece installing and fixing system and a worktable motion control system, wherein a filter core body and a nozzle are arranged in the electrolyte jet injection device, are made of metal materials, thereby not only increasing filter effect and eliminating an electrolyte pulsation phenomenon, but also leading the electrolyte to be sufficiently polarized negatively under the function of a high-voltage pulse direct-current electric field and then to transmitted to a position to be processed of a processing workpiece in a high-speed flowing mode, electrochemical anode dissolution is generated at the injection point, the high-quality and efficient processing of microstructures such as small holes, narrow grooves, dimpling pits, and the like are realized by using the numerical control motion of a machine tool worktable.

Description

Micro-scale pulse electrolytic jet processing system and processing method

1. Technical field

The invention relates to a microscale pulse electrolytic jet processing system and a processing method, belonging to the technical field of electrolytic processing. the

2. Background technology

With the rapid development of precision instrument products in the direction of high performance, high reliability, and integration, a large number of microstructures of various shapes appear in product parts. For the processing of micro-structures such as micro-holes, narrow grooves, slits, micro-pits, and micro-scratches between 1.5mm, a variety of micro-scale processing methods have been developed, mainly including micro-cutting technology and micro-special processing technology. Among them, micro-special processing technology occupies a dominant position, mainly including micro-EDM, micro-electrolytic machining, laser processing, LIGA technology, electron beam processing, ion beam processing and their composite and combined processing. Each manufacturing technology has its significant advantages, but also has its own limitations, such as electron beam processing, ion beam processing is easy to achieve ultra-precision micro-processing, high processing accuracy, and because the processing is carried out in a vacuum, the surface quality of the processing It is also good, but the processing cost is high; LIGA technology can produce a three-dimensional metal microstructure with an aspect ratio greater than 500 and a surface roughness in the submicron range, which has attracted much attention from researchers today, but it must use high strength, high precision Straight X-ray light sources and special masks are extremely expensive, and it is difficult to process microstructures on inclined surfaces, stepped surfaces, and free-form surfaces. At the same time, because LIGA technology uses electroforming technology, metal parts that can be processed by it The types of materials are also limited, typically nickel and copper, and therefore limited in industrial applications. Although laser micromachining and micro-EDM have made remarkable progress in recent years, it is easy to realize the automation of the processing process, which is extremely beneficial to the processing of parts with special microstructures and difficult-to-cut materials. However, due to the constraints of processing principles, the processing surface is easy Microcracks, residual stress and metamorphic layers are produced, which affects the reliability of parts, thus limiting the application of this technology in some products. In order to prevent surface defects after processing, people are interested in improving process conditions and optimizing processes. Parameters have made many efforts, but so far have not been able to fundamentally solve the problem. Electrolytic machining, especially electro-hydraulic beam (or electro-jet) small-hole machining, has high efficiency and is a recognized "three-no" (no recasting layer, no residual stress, and no microcracks) processing technology. The United States, Britain, Russia and other countries have already maturely applied to small hole processing of aero-engine blades and other parts, and my country has also begun to apply it in recent years, and has successfully solved the problem of recasting layer. During the processing, the workpiece to be processed is connected to the positive pole, and a metal wire or metal tube is connected to the negative pole in the nozzle of the insulated glass tube in a convergent shape. A 100-1000V high-voltage direct current is applied between the positive and negative poles, and the small-flow acid-resistant high-pressure pump will purify the The electrolytic hydraulic pressure enters the conductive sealing head and enters the glass tube electrode. After being "negatively polarized", it shoots at the workpiece to be processed at high speed for "cutting" processing. However, the glass nozzle used in its processing is easily broken, which affects the stability of the processing. In addition, the design and manufacture of the glass tube nozzle is extremely complicated, which virtually increases the technical cost of industrial applications. the

3. Contents of the invention

The purpose of the present invention is to provide a micro-scale pulse electrolytic jet processing system and processing method with simple structure, stable performance and high processing precision. the

A micro-scale pulse electrolysis jet processing system, including a high-voltage pulse power supply, an electrolyte jet injection device, an electrolyte circulation filtration system, workpiece installation and workbench motion control system, characterized in that: the electrolyte jet injection device includes a cylinder The injection device housing with a shaped cavity, the nozzle installed at the bottom of the injection device housing, the filter core body installed in the injection device housing, and the filter screen wrapped on the cylindrical surface of the filter core body, the filter core body will be the cylinder of the injection device housing The shaped cavity is divided into two parts, the annular cavity between the injection device housing and the filter body is the outer cavity, and the cylindrical cavity formed by the filter body and the nozzle is the inner cavity; the electrolyte can only pass through the injection device. The liquid inlet on the device shell enters the outer cavity, and then enters the inner cavity through the filter screen from many small holes evenly distributed on the filter body, and finally shoots to the workpiece to be processed through the nozzle; the above-mentioned injection device shell The body is connected to the Z-direction feed shaft through an insulating mounting seat; the above-mentioned injection device shell, nozzle, and filter body are all metal conductive materials, and the exposed parts of the injection device shell and nozzle are insulated, and the positive pole of the high-voltage pulse power supply passes through the workpiece. The installation fixture is connected with the workpiece, and the negative electrode is connected with the filter core body, and the above workpiece installation fixture is also made of metal conductive material. the

A pulse electrolysis jet processing method using the above pulse electrolysis jet processing system, characterized in that: during processing, the electrolyte is under the action of a hydraulic pump, passes through a two-stage filter, and then enters the injection device casing and the injection device from the liquid inlet connector. In the outer cavity formed by the filter element body, the outer cavity is filled and enters the inner cavity formed by the filter element body and the nozzle through the filter screen, and is fully "negatively polarized" under the action of a high-voltage pulse power supply, and then shoots from the nozzle to the workpiece at high speed. In the machining site, an electrochemical anodic solution is produced at the injection point to remove material. The electrolyte spraying device adopts the method of micro-feeding without feeding or less than or equal to the initial gap, combined with the numerical control movement of the machine table and the Z-direction feed axis, so as to realize the microstructure of small holes, narrow grooves, and micro-pits. High quality and efficient processing. the

Beneficial effects: the electrolytic jet processing system in the present invention is specially designed to realize the micro-scale pulse electrolytic jet processing technology, including high-voltage pulse power supply, electrolytic jet injection device, electrolyte circulation and filtration system, workpiece installation and fixation, and workbench motion control system . Among them, the electrolyte injection device is the key to realize the filtration of the electrolyte before forming the injection liquid beam, eliminate the pulsation phenomenon caused by pressure components such as hydraulic pumps, and fully "negative polarization". The key structure is the filter body in the injection device. The innovative design, the filter body and the nozzle are made of metal materials (such as brass materials), with good electrical conductivity, the electrolyte fills the inner cavity of the entire filter body during processing, and the electrolyte can be made It is fully "negatively polarized", and because the filter body divides the cavity of the injection device housing into an inner cavity and an outer cavity, the existence of the filter makes the flow of electrolyte between the inner and outer cavities need to overcome greater resistance, which can effectively The electrolyte filters and reduces or even eliminates the pulsation phenomenon, so that the electrolyte can form a stable electrolyte jet after passing through the nozzle, and has the crushing length required for processing, so that the nozzle and the workpiece can maintain a certain initial gap during processing. Driven by the Z-axis, the injection device can make a feed movement smaller than the initial gap, and the nozzle does not go deep into the processing area, which can improve the depth-to-diameter ratio of electrolytic jet processing, so that small holes and narrow gaps can be realized by means of the planar movement of the worktable. High-quality processing of various microstructures such as grooves, scribe lines, and pits improves the flexibility of electrolytic jet processing. Since the entire spraying device is made of metal materials, and the outer surface is sprayed with insulating paint, it is possible to avoid the phenomenon that the glass nozzle is easily broken during the electro-hydraulic beam small hole processing, thereby improving the stability of the processing process. In addition, the use of high-voltage pulse power supply can also improve the localization of electrolytic jet machining to a certain extent, thereby improving the machining accuracy. The entire electrolytic jet machining device system is simple in structure and use, combined with electrolytic jet machining technology, it is expected to achieve high-quality and efficient processing of various microstructures, and has important application prospects. the

4. Description of drawings

Fig. 1 is the structural representation of pulse electrolytic jet processing device of the present invention;

Fig. 2 is a system diagram of the pulse electrolytic jet processing device of the present invention. the

Label names in the figure: 1. Liquid inlet connector, 2. Z-direction feed shaft, 3. Insulation mounting seat, 4. Plug, 5. Sealing gasket, 6. Filter element body, 7. Filter screen, 8. Injection device Shell, 9, nozzle, 10, electrolytic jet injection device, 11, working box, 12, workpiece, 13, workpiece installation fixture, 14, X, Y two-way feed table, 15, liquid return pipe, 16, electrolyte Groove, 17, primary filter, 18, overflow pressure regulating valve, 19, hydraulic pump, 20, ball valve, 21, hydraulic gauge, 22, secondary filter, 23, high voltage pulse power supply. the

5. Specific implementation

The device for implementing the micro-scale electrolysis jet processing technology of the present invention includes a high-voltage pulse power supply, an electrolysis jet injection device, an electrolyte circulation and filtration system, a workpiece installation and fixation system, and a workbench motion control system. the

The electrolyte circulating filtration system in the processing system includes a primary filter 17, a secondary filter 22, an overflow pressure regulating valve 18, a hydraulic pump 19, a ball valve 20, a liquid inlet connector 1, a working box 11, and a liquid return Tube 15 and electrolyte tank 16. During processing, the electrolyte passes through the primary filter 17, overflow pressure regulating valve 18, ball valve 20, and secondary filter 21 under the action of the hydraulic pump 19, enters the electrolytic jet injection device 10 through the liquid inlet connector 23, and then passes through the The nozzle 9 shoots at the surface of the workpiece to be processed at high speed, and the processed electrolyte flows into the bottom of the working box 11, and flows back to the electrolyte tank 16 through the liquid return pipe 15 for recycling. During processing, the pressure and flow of the electrolyte are regulated through the overflow pressure regulating valve 18 and the ball valve 20, and the change of the pressure of the electrolyte is displayed through the hydraulic gauge 21. the

The high-pressure electrolyte jet injection device in the processing system includes an insulating mount 3 , a plug 4 , a sealing gasket 5 , a filter core body 6 , a filter screen 7 , an injection device housing 8 , and a nozzle 9 . The electrolyte enters the annular outer cavity formed by the filter element body 6 and the injection device body 8 through the liquid inlet connector 23. After the outer cavity is filled, it penetrates the filter screen 7 and enters the inner cavity of the filter element body 6 under pressure, and passes through the nozzle. 9 High-speed shooting to the surface of the workpiece to be processed. Both the nozzle 9 and the filter core body 6 are made of brass material with good electrical conductivity. The nozzle 9 is installed in the cylindrical groove on the inner wall of the bottom of the injection device housing 8. The filter core body 6 is pressed on the nozzle 9 to fix the nozzle in the Z direction. The pulse direct current power supply 23 negative electrode is connected with the filter core body 6 in the injection device, and the inner cavity body formed by the filter core body and the nozzle is all negatively charged, so that the electrolyte can be fully "negatively polarized" therein. The innovative design of the filter body not only enables the electrolyte to be filtered again, but also further eliminates the pulsation caused by pressure devices such as hydraulic pumps. The unique metal nozzle structure design can not only ensure that the electrolyte jet beam has a stable crushing that meets the processing requirements length, and there will be no nozzle breakage during processing, which greatly improves processing stability. The outer surface of the injection device body is sprayed with an insulating layer to ensure the overall insulation of the entire injection device, so that short circuits, discharges, etc. are avoided during processing, and the safety of processing is improved. the

The workpiece installation and fixation and workbench motion control system in the processing system includes a Z-direction feed axis 2, a workpiece 12, a workpiece installation fixture 13 and an X, Y two-way feed workbench 14. The workpiece 12 is connected to the positive pole of the high-voltage pulse power supply 23 through the workpiece installation fixture 13, and there is a high-voltage pulsed DC electric field between the injection device shell 8, and the negatively polarized electrolyte jet generates electrification on the surface of the workpiece to be processed under the action of the high-voltage pulsed DC electric field. The anode dissolves and removes the material. There is an initial processing gap between the workpiece 12 and the nozzle 9, and the electrolytic jet injection device 10 is connected to the Z-direction feed shaft 2 through the insulating mounting seat 3. As the processing progresses, the Z-direction feed shaft 2 can be controlled to move toward the workpiece 12 smaller than the initial Micro-feeding of gaps to increase aspect ratio. The workpiece 12 and the workpiece mounting fixture 13 are fixed on the X, Y two-way feed table 14, and by controlling the X, Y two-way feed table 14, microstructures such as narrow grooves and engraved lines can be processed on the workpiece. the

The micro-scale electrolytic jet processing method of the present invention is to utilize the above-mentioned electrolytic jet processing system to connect the positive pole of the high-voltage pulse power supply 23 to the workpiece mounting fixture 13 to make the workpiece positively charged, and connect the negative pole of the pulse power supply 23 to the filter core body 6 , so that the filter body 6 and the nozzle 9 are negatively charged, so that the electrolyte can be fully "negatively polarized" after entering the injection device 10 through the liquid inlet connector 1 under the action of the hydraulic pump 19, and after passing through the nozzle 9, a stable broken length is formed. The jet beam of electrolyte solution shoots to the part to be processed of the workpiece 12, and removes the metal material based on the principle of electrochemical anodic dissolution. With the help of the CNC movement of the machine table 14 and the Z-direction feed axis 2, small holes with high surface quality, Processing of microstructures such as narrow grooves and micro pits. The micro-scale pulse electrolytic jet processing technology based on the processing system of the present invention has the characteristics of high processing stability, good surface quality and high processing precision. the

As shown in Figure 1, the inner wall of the bottom of the injection device housing 8 is provided with a cylindrical groove for placing the nozzle 9, the nozzle 9 is installed in the groove, and the axial direction is pressed and fixed by the filter core body 6, so that the injection device housing 8 Acting as the mounting seat of the nozzle 9, the filter core body 6 acts as a pressing element, and has a simple structure. Since the nozzle 9 is installed on the inner wall of the injection device housing 8, it is easy to prevent water leakage and has better sealing performance. the

Claims (3)

1. microscale pulse electrolysis jet system of processing comprises high-voltage pulse power source, electrolyte jet injection apparatus, circulate electrolyte filtration system, workpiece installs and fixes and the working table movement control system,

It is characterized in that:

Above-mentioned electrolyte jet injection apparatus comprises injection apparatus housing (8), the nozzle (9) that is installed on the injection apparatus housing bottom with circular cylindrical cavity, be installed on the filter body (6) in the injection apparatus housing (8) and be wrapped in filter screen (7) on the filter body external cylindrical surface, filter body (6) has been divided into two parts with the circular cylindrical cavity of injection apparatus housing, annular chamber between injection apparatus housing (8) and filter body (6) is an outer chamber, and the circular cylindrical cavity that filter body (6) and nozzle (9) form is an inner chamber body;

Electrolyte only can enter outer chamber by the inlet that is arranged on the injection apparatus housing (8), and then enters inner chamber body through numerous apertures of filter screen (7) on being distributed in filter body (6), after the position to be processed of nozzle (9) directive workpiece (12);

Above-mentioned injection apparatus housing (8) links to each other to feed shaft (2) with Z by insulating mounting seat (3);

Above-mentioned injection apparatus housing (8), nozzle (9), filter body (6) are the metallic conduction material, wherein the exposed parts of injection apparatus housing (8) and nozzle (9) is handled through insulation, the positive pole of high-voltage pulse power source (23) links to each other with workpiece (12) by workpiece sectional fixture (13), negative pole links to each other with filter body (6), and above-mentioned workpiece sectional fixture (13) also is the metallic conduction material.

2. microscale pulse electrolysis jet system of processing according to claim 1, it is characterized in that: injection apparatus housing (8) bottom interior wall is provided with the cylinder shape groove of laying nozzle (9), nozzle (9) is installed in this groove, axially is fixed by filter body (6).

3. pulse electrolysis jet processing method of utilizing the described pulse electrolysis jet of claim 1 system of processing is characterized in that:

Electrolyte is under the effect of hydraulic pump (19) in the process, through entering the outer chamber of injection apparatus housing (8) and filter body (6) formation from feed liquor connector (1) behind the two-stage filter, enter in the inner chamber body of filter body (6) and nozzle (9) formation by filter screen (7) after being full of outer chamber, quilt abundant " negative polarization " back is from the position to be processed of the high fast direction workpiece of nozzle (9) (12) under high-voltage pulse power source (23) effect, produce the electrochemistry anodic solution at the spray site place and remove material, by platen (14) and Z numerical control campaign, thereby realize aperture to feed shaft (2), narrow groove, the high-quality and efficient processing of micro-structurals such as nick hole.

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