CN104384637A - Glass processing method and system - Google Patents
Glass processing method and system Download PDFInfo
- Publication number
- CN104384637A CN104384637A CN201410516579.7A CN201410516579A CN104384637A CN 104384637 A CN104384637 A CN 104384637A CN 201410516579 A CN201410516579 A CN 201410516579A CN 104384637 A CN104384637 A CN 104384637A
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- glass
- electrode
- tool
- chemical solution
- ultrasonic
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
- B23H5/00—Combined machining
- B23H5/02—Electrical discharge machining combined with electrochemical machining
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
- B23H7/00—Processes or apparatus applicable to both electrical discharge machining and electrochemical machining
- B23H7/26—Apparatus for moving or positioning electrode relatively to workpiece; Mounting of electrode
- B23H7/30—Moving electrode in the feed direction
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
- B23H7/00—Processes or apparatus applicable to both electrical discharge machining and electrochemical machining
- B23H7/38—Influencing metal working by using specially adapted means not directly involved in the removal of metal, e.g. ultrasonic waves, magnetic fields or laser irradiation
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
Abstract
The invention relates to a glass processing method and a glass processing system. According to the method, a glass workpiece is soaked into a chemical solution so as to be positively charged, a tool electrode is negatively charged, rotatably moves, ultrasonically vibrates and acts on the glass workpiece, the chemical solution becomes a discharge channel between a positive electrode and a negative electrode, and hydraulic impact waves generated by the thermodynamic effect and the ultrasonic vibration of a discharge moment and electrochemical anodic dissolution co-act on the action part of the tool electrode to form a processing surface. The glass processing system comprises a direct current power supply, the tool electrode which is connected with the negative electrode of the direct current power supply, an ultrasonic vibrator which is connected with the tool electrode, an adjusting supporting seat which drives the ultrasonic vibrator to move up and down, an additional electrode which is connected with the positive electrode of the direct current power supply and positively charges the glass workpiece, and a chemical solution tank which is used for holding the glass workpiece. The glass processing method and the glass processing system have the advantages that higher-accuracy and higher-efficiency glass micro-pore groove processing can be realized; meanwhile, an implementation method is low in cost, and an implementation system is simple in structure and is easy to mount and maintain.
Description
Technical field
The present invention relates to glass processing, particularly relate to one and utilize spark discharge, electrochemical corrosion and ultrasonic vibration acting in conjunction in glass, and the processing method of a kind of glass implemented and system of processing.
Background technology
Along with development and the application of MEMS, glass be processed into one of important technology in microsensor preparation process.
At present, glass is processed micropore, the method for microflute mainly contains the method such as chemical attack, mechanical lapping.Chemical attack generally needs to coordinate mask lithography technique, is difficult to controlled working precision in process, and easily destroy the flatness of glass surface, the micropore of processing, the tapering of microflute are obvious.Mechanical grinding method covers diamond dust on glass, and utilize the drill bit of High Rotation Speed to carry out grinding to glass and complete boring, this method length consuming time, repeatable accuracy are low, easily cause the breakage of glass.
Summary of the invention
The object of the present invention is to provide processing method and the system of processing of a kind of glass microporous, microflute, to solve the precision that exists in existing glass processing and efficiency is not high and the problem of cracky.
In order to realize foregoing invention object, method of the present invention is: glass pieces to be processed being dipped in upward by machined surface has in the chemical solution of electrochemical corrosion effect to glass, and make glass pieces positively charged, make tool-electrode positively charged simultaneously and rotate and ultrasonic vibration, described tool-electrode acts on the machined surface of described glass pieces, described chemical solution becomes discharge channel, the glass material that tool-electrode makes use is removed under the hydraulic shock ripple of discharge thermodynamic activity instantaneously and ultrasonic vibration generation and the acting in conjunction of Anodic dissolving, form the machined surface of setting.
In order to carry out electrochemical reaction better, the alkaline sodium salt solution of chemical solution preferred concentration range 30-40%.
Because general glass is non-conductive, electric discharge processing is implemented in order to apply an electric field between glass pieces and tool-electrode, a preferred method arranges the supplemantary electrode 15 be connected with DC power anode, and this supplemantary electrode 15 adopts thickness to be the metal platinized platinum of 0.5-1mm, to ensure good electric conductivity.Tool-electrode then adopts the tungsten carbide material with resistance to elevated temperatures.
In order to temperature during controlled discharge preferably and remove the speed that material removes from glass body, the direct current power source voltage between positive and negative electrode is 60-120V; The rotating speed of tool-electrode controls at 10-100r/s, and amplitude controlling is at 15-25 μm, and supersonic frequency controls at 10-20kHz.
In order to realize foregoing invention object, a kind of glass processing system: comprise tool-electrode (13), supplemantary electrode (25), ultrasonic vibrator (4), regulate bearing (3), dc source (15), chemical solution tank (16) and can the workbench (20) of planar movement, described ultrasonic vibrator (4) is arranged on described adjustment bearing (3), described tool-electrode (13) is connected to ultrasonic vibrator (4) and goes up and be connected with the negative pole of described dc source (15), and described supplemantary electrode (25) is located at glass processing part side
and andglass processing part
jointlybe placed in described chemical solution tank (16), described chemical solution tank (16) is placed on described workbench (20).
A preferred ultrasonic vibrator (4) comprises motor (45), pedestal (46) and ultrasonic oscillating unit, described motor (45) is fixed on and regulates on bearing (3), described pedestal (46) one end is connected with the rotating shaft of described motor (45), one end is provided with and holds inner chamber (461), and described ultrasonic oscillating unit part is arranged in this accommodation inner chamber (461) and is connected with pedestal (46).
Further, ultrasonic oscillating unit comprises the Connection Block (41) be connected with pedestal (46), the lower endpiece (40) of Connection Block (41) upper end, piezoelectric ceramic piece (49), conducting strip (44) and upper endpiece (48) is from bottom to top connected in turn with by screw (47), and being threaded connection the ultrasonic transformer (42) being fixed on Connection Block (41) lower end, described tool-electrode (13) is connected to the lower end of described ultrasonic transformer (42).
A preferred tool-electrode regulates bearing (3) to comprise fixed support (31), screw mandrel (32), nut bracket (33), gripper shoe (34) and motor (35), described screw mandrel (32) rotatably support is in fixed support (31) and be connected with described motor (35) rotating shaft, and nut bracket (33) is rotatably connected in screw mandrel (32) and is connected with described gripper shoe (34).
The thermodynamic activity that the present invention mainly produces with spark discharge removes glass material, by voltage and the rotating speed of electrode corresponding to control tool electrode, material removal amount can be controlled more accurately, and removed from glass body by the hydraulic shock ripple effect acceleration removal material that Anodic dissolves and ultrasonic vibration produces, play spark machined, electrical-chemistry method and Ultrasonic machining speciality separately, achieve the glass microporous of degree of precision and efficiency, the processing of microflute, the system architecture simultaneously implementing the inventive method is simple, be easy to install, maintenance, and cost is low.
Accompanying drawing explanation
Fig. 1 is the structural representation of glass processing system of the present invention.
Detailed description of the invention
As Fig. 1, the concrete glass processing system of an enforcement the inventive method, have a tool-electrode 13, this tool-electrode 13 is connected on ultrasonic vibrator 4, and is electrically connected with the negative electrode of dc source 15.This tool-electrode 13 is using as the instrument processing micropore or microflute on glass, and be arranged on an adjustment bearing 3 by the ultrasonic vibrator 4 be attached thereto, so that by regulating bearing 3 adding man-hour to the micropore of glass or microflute, can with the feed motion regulating bearing 3 do depth direction.The solution with electrochemical corrosion effect is equipped with in chemical solution tank 16, processed glass processing part 24 to be fixed in chemical solution tank 16 by fixture 23 by machined surface upward direction and to be immersed in chemical solution, the supplemantary electrode 25 be connected with dc source 15 positive electrode is placed in side, glass pieces 24 back side, make glass pieces 24 positively charged, chemical solution tank 16 is placed in and can does on the workbench 20 of plane motion.
During present system work, discharge process between supplemantary electrode 25 and tool-electrode 13, chemical solution is made to become discharge channel, the thermodynamic activity produced by the moment electric spark of electric discharge removes glass material, the Anodic dissolution of glass surface also accelerated material removal simultaneously, for being remove dissolved material from glass body further, have employed ultrasonic vibrator 4, tool-electrode 13 is connected with ultrasonic vibrator 4, tool-electrode is vibrated with the ultrasonic vibration of ultrasonic vibrator 4, and the tool-electrode 13 of ultrasonic vibration can produce hydraulic shock ripple to glass pieces, accelerate the removal of glass melting thing and the renewal of chemical solution discharge channel, spark discharge and Anodic dissolution are gone round and begun again, carry out continually and steadily, thus process to act on tool-electrode 13 in glass pieces and hold the micropore or microflute that shape is consistent.
Ultrasonic vibrator 4 primarily of motor 45, pedestal 46 and ultrasonic oscillating unit composition, the rotating shaft of motor 45 and the upper end of pedestal 46 be connected, be with moving base 46 to rotate; The lower end of pedestal 46 is provided with and holds inner chamber 461, and holding inner chamber 461 is a blind hole, and ultrasonic oscillating unit to be partially accommodated in this accommodation inner chamber 461 and to be connected to the lower end of pedestal 46.A radial entrance hole 462 arranged for guiding wire is provided with in the upper end holding inner chamber 461.
Ultrasonic oscillating unit forms primarily of Connection Block 41, upper endpiece 48, lower endpiece 40, piezoelectric ceramic piece 49 and conducting strip 44.Connection Block 41 is a columniform shaft member, is provided with radial protrusion in the middle in the shaft shoulder 411 on the face of cylinder, and this shaft shoulder is used for being connected with pedestal 46.
The upper and lower end face of Connection Block 41 is respectively equipped with screwed hole 412, 413, lower endpiece 40 is placed on the upper surface of Connection Block 41, piezoelectric ceramic piece 49 and conducting strip 44 is placed successively on the upside of lower endpiece 41, and on the upside of conducting strip 44, place another piezoelectric ceramic piece 49, conducting strip 44 is made to be clamped between two piezoelectric ceramic pieces 49, the piezoelectric ceramic piece 49 of upside connects upper endpiece 48, above-mentioned upper endpiece 48, the center of lower endpiece 40 and piezoelectric ceramic piece 49 and conducting strip 44 is all provided with the hole for installing, accommodation inner chamber on the above-mentioned each part of screw 47 cross-under is rotatably connected in above-mentioned screwed hole 412, the each part being placed in Connection Block 41 upper surface is connected on Connection Block 41 and is contained in the accommodation inner chamber 461 of pedestal lower end.The wire be connected with ultrasonic-frequency power supply 43 is introduced by entrance hole 462 and is held in inner chamber 461 and be connected with conducting strip 44, conducting strip 44 is made to receive the high-frequency alternating voltage signal of ultrasonic-frequency power supply, and produce by the electrostriction effect of piezoelectric ceramic piece the dither that amplitude is 0.2-0.3 μm, by upper coarse and lower fine ultrasonic transformer, Amplitude amplification is passed to tool-electrode to 15-25 μm again, the dither of tool-electrode 13 will make chemical solution produce hydraulic shock ripple, to accelerate melted material to remove from glass body.
Connection Block 41 lower surface connects ultrasonic transformer 42 by the screwed hole 413 that it is arranged, the upper end of this ultrasonic transformer 42 is the threaded joints 421 suitable with screwed hole 412, lower end is luffing portion 422, luffing portion 422 is the roughly cone progressively narrowed downwards, with the radial section by reducing gradually, vibrational energy density is increased, the lower surface in luffing portion 422 is provided with the hole for being connected with tool-electrode 13, tool-electrode 13 is plugged in this hole, and makes it to be connected on ultrasonic transformer 42 by a holding screw 423.Tool-electrode 13 is connected with the negative pole of dc source 15 by ultrasonic transformer 42.
The ultrasonic vibrator 4 with above-mentioned ultrasonic oscillating unit moves up and down with adjustment bearing 3, this adjustment bearing 3 has a fixed support 31, screw mandrel 32 rotatably support is on fixed support 31, stepper motor 35 is fixed on fixed support 31, the rotating shaft of this motor is connected with screw mandrel 32 upper end, nut bracket 33 is provided with the screw corresponding with screw thread on screw mandrel 32, nut bracket 33 is screwed on screw mandrel 32 by screw, gripper shoe 34 is connected with nut bracket 33, and whole ultrasonic vibrator 4 is fixed in gripper shoe 34 by motor 4 and makes it be connected on adjustment bearing 3.When stepper motor 35 rotates, screw mandrel 32 rotates thereupon, nut bracket 33 does moving up and down along screw mandrel 32 axis, and drive gripper shoe 34 and be fixed on the ultrasonic vibrator 4 in gripper shoe and the tool-electrode 13 be connected on ultrasonic vibrator 4 moves up and down, to meet tool-electrode 13 when processing micropore or microflute, do the feeding of depth direction.
On tool-electrode 13 pairs of glass processing parts, the upper micropore of diverse location, the processing of microflute are realized by travelling table 20, workbench 20 is provided with mutually vertical and is in the Liang Ge screw nut driving mechanism (not shown) of differing heights, make workbench 20 can do movement in plane, such tool-electrode 13 can carry out moving adjustment relative to workbench 20, moves to the position need carrying out the processing of micropore or microflute.
In order to the chemical solution of supplementary consumption, water influent pipeline 19 between chemical solution tank 16 and chemical solution case 21 arranges liquid pump 18, with when the supplementary described chemical solution of needs, supplied by liquid pump 18, and controlled valve 26 is set on chemical solution tank 16 with the liquid back pipe road of chemical solution case 21, with when not working or overhauling, the chemical solution in chemical solution tank 16 is discharged in chemical solution case 21.
In addition, in order to the thermodynamic activity that the moment electric spark controlling overdischarge preferably produces, the direct current power source voltage between positive and negative electrode is preferably 60-120V.In order to better carry out electrochemical reaction, chemical solution preferred concentration is the alkaline sodium salt solution of 30-40%, and adopts the metal platinized platinum of 0.5-1mm as supplemantary electrode, adopts tungsten carbide material tools electrode 13.The rotating speed of preferred tool-electrode is 10-100r/s simultaneously, and amplitude is 15-25 μm, and supersonic frequency is 10-20kHz.
Like this, when present system processes micropore or microflute in glass pieces, by the relative movement of workbench 20, tool-electrode 13 is made to aim at the position of the required processing of glass pieces, then tool-electrode 13 is made to do the feed motion in micropore or depth of mini longitudinal channels direction by the rotation of stepper motor 35 in adjustment seat 3, thus complete processing, in glass pieces, formation acts on tool-electrode 13 and holds the micropore or microflute that shape is consistent.
Claims (10)
1. the processing method of a glass, it is characterized in that, glass pieces to be processed being dipped in upward by machined surface has in the chemical solution of electrochemical corrosion effect to glass, and make glass pieces positively charged, make tool-electrode electronegative simultaneously and rotate and ultrasonic vibration, described tool-electrode acts on the machined surface of described glass pieces, described chemical solution becomes discharge channel, the glass material that tool-electrode makes use is removed under the hydraulic shock ripple of discharge thermodynamic activity instantaneously and ultrasonic vibration generation and the acting in conjunction of Anodic dissolving, form the machined surface of setting.
2. the processing method of a kind of glass according to claim 1, is characterized in that, the alkaline sodium salt solution of described chemical solution preferred concentration range 30-40%.
3. the processing method of a kind of glass according to claim 1, is characterized in that, the back side of described glass pieces is provided with the supplemantary electrode connecting DC power anode, and described supplemantary electrode employing thickness is the metal platinized platinum of 0.5-1mm.
4. the processing method of a kind of glass according to claim 1, is characterized in that described tool-electrode adopts tungsten carbide material to make.
5. the processing method of a kind of glass according to claim 1 or 4, is characterized in that, the rotating speed of described tool-electrode is 10-100r/s, and amplitude is 15-25 μm, and supersonic frequency is 10-20kHz.
6. the processing method of a kind of glass according to claim 1, is characterized in that, the direct current power source voltage between positive and negative electrode is 60-120V.
7. a glass processing system, it is characterized in that, comprise tool-electrode (13), supplemantary electrode (25), ultrasonic vibrator (4), regulate bearing (3), dc source (15), chemical solution tank (16) and can the workbench (20) of planar movement, described ultrasonic vibrator (4) is arranged on described adjustment bearing (3), described tool-electrode (13) is connected to ultrasonic vibrator (4) and goes up and be connected with the negative pole of described dc source (15), described supplemantary electrode (25) be located at glass processing part side and and glass processing part be jointly placed in described chemical solution tank (16), described chemical solution tank (16) is placed on described workbench (20).
8. a kind of glass processing system according to claim 1, it is characterized in that, described ultrasonic vibrator (4) comprises motor (45), pedestal (46) and ultrasonic oscillating unit, described motor (45) is fixed on and regulates on bearing (3), described pedestal (46) one end is connected with the rotating shaft of described motor (45), one end is provided with and holds inner chamber (461), and described ultrasonic oscillating unit part is arranged in described accommodation inner chamber (461) and is connected with pedestal (46).
9. a kind of glass processing system according to claim 1, it is characterized in that, described ultrasonic oscillating unit comprises the Connection Block (41) be connected with pedestal (46), the lower endpiece (40) of Connection Block (41) upper end, piezoelectric ceramic piece (49), conducting strip (44) and upper endpiece (48) is from bottom to top connected in turn with by screw (47), and being threaded connection the ultrasonic transformer (42) being fixed on Connection Block (41) lower end, described tool-electrode (13) is connected to the lower end of described ultrasonic transformer (42).
10. a kind of glass processing system according to claim 1, it is characterized in that, described tool-electrode regulates bearing (3) to comprise fixed support (31), screw mandrel (32), nut bracket (33), gripper shoe (34) and motor (35), described screw mandrel (32) rotatably support is in fixed support (31) and be connected with described motor (35) rotating shaft, and nut bracket (33) is rotatably connected in screw mandrel (32) and is connected with described gripper shoe (34).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410516579.7A CN104384637A (en) | 2014-09-30 | 2014-09-30 | Glass processing method and system |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410516579.7A CN104384637A (en) | 2014-09-30 | 2014-09-30 | Glass processing method and system |
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| CN104384637A true CN104384637A (en) | 2015-03-04 |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104907648A (en) * | 2015-07-08 | 2015-09-16 | 上海交通大学 | Arc profile cutting discharge processing method based on combined arc breaking and efficient chip removal |
| CN104907669A (en) * | 2015-06-15 | 2015-09-16 | 上海交通大学 | Discharge cutting mechanism based on fluids, mechanical movement composite arc interruption and efficient chip removing |
| CN104923869A (en) * | 2015-04-30 | 2015-09-23 | 南京航空航天大学 | Controllable vibrating electrode electric spark and electrolytic combined machining method for micro holes and vibrating system |
| CN105034180A (en) * | 2015-07-01 | 2015-11-11 | 西安理工大学 | Micro-arc discharging micro-fine cutting device and method for SiC single crystal wafer |
| CN105215487A (en) * | 2015-10-23 | 2016-01-06 | 山东大学 | A kind of fine high-efficiency machining method towards non-conductive hard brittle material and device |
| CN105364236A (en) * | 2015-11-27 | 2016-03-02 | 扬州大学 | Ultrasonic-modulation micro electro-chemical machining experiment system |
| CN107283010A (en) * | 2017-08-10 | 2017-10-24 | 山东大学 | Rotary ultrasonic electrode micro-electrochemical machining spark cutting processing unit (plant) and method |
| CN114378381A (en) * | 2020-10-21 | 2022-04-22 | 航天科工惯性技术有限公司 | Blind groove processing device and blind groove processing method for quartz glass |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104923869A (en) * | 2015-04-30 | 2015-09-23 | 南京航空航天大学 | Controllable vibrating electrode electric spark and electrolytic combined machining method for micro holes and vibrating system |
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| CN105215487A (en) * | 2015-10-23 | 2016-01-06 | 山东大学 | A kind of fine high-efficiency machining method towards non-conductive hard brittle material and device |
| CN105364236A (en) * | 2015-11-27 | 2016-03-02 | 扬州大学 | Ultrasonic-modulation micro electro-chemical machining experiment system |
| CN107283010A (en) * | 2017-08-10 | 2017-10-24 | 山东大学 | Rotary ultrasonic electrode micro-electrochemical machining spark cutting processing unit (plant) and method |
| CN114378381A (en) * | 2020-10-21 | 2022-04-22 | 航天科工惯性技术有限公司 | Blind groove processing device and blind groove processing method for quartz glass |
| CN114378381B (en) * | 2020-10-21 | 2023-09-08 | 航天科工惯性技术有限公司 | Blind groove machining device and blind groove machining method for quartz glass |
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