CN103909288B - A kind of electrophoresis assisting ultrasonic machinery composite fine drilling machining device - Google Patents
A kind of electrophoresis assisting ultrasonic machinery composite fine drilling machining device Download PDFInfo
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- CN103909288B CN103909288B CN201410135249.3A CN201410135249A CN103909288B CN 103909288 B CN103909288 B CN 103909288B CN 201410135249 A CN201410135249 A CN 201410135249A CN 103909288 B CN103909288 B CN 103909288B
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- fine
- electrophoresis
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B41/00—Boring or drilling machines or devices specially adapted for particular work; Accessories specially adapted therefor
- B23B41/14—Boring or drilling machines or devices specially adapted for particular work; Accessories specially adapted therefor for very small holes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
- B24B1/04—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes subjecting the grinding or polishing tools, the abrading or polishing medium or work to vibration, e.g. grinding with ultrasonic frequency
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
Abstract
The present invention is a kind of electrophoresis assisting ultrasonic machinery composite fine drilling machining device.Including vertical slide block, fine ultrasonic chief axis, fine ultrasonic chief axis power source generator and control panel, electrophoresis accessory power supply, fine ultrasonic platform power generator and control panel, micro- three-dimensional movement platform, fine ultrasound works platform, drill bit, electrophoresis auxiliary electrode.The present invention assists in supersonic vibration and adds the solution with ultra micro abrasive particle in micro- drilling course of processing, by electrophoresis circle auxiliary electrode, boost voltage is added on micro drill, make to produce between the two auxiliary electric field, drive fine abrasive grains motion or be adsorbed onto on micro drill, by adjusting the size of voltage, indirectly adjust adhesion on drill bit for the abrasive particle, abrasive particle is made to play ablation to workpiece, the abrasive particle simultaneously consolidating also shields to drill bit, reduce tool wear, and abrasive particle impacts to workpiece under the driving of supersonic vibration, improve material removal efficiency, improve drilling working (machining) efficiency.
Description
Technical field
The present invention is a kind of electrophoresis assisting ultrasonic machinery composite fine drilling machining device, particularly one kind be related to metal or
Micro- drilling machining device of nonmetallic difficult-to-machine material, belongs to fine structure Combined Machining Technology field.
Background technology
With industrial development, because of the superiority of the performance of micro parts, Modern Industry Products constantly to light, thin,
Short, little direction is developed, and its component part also increasingly tends to miniaturization and precise treatment, and micro structure application in a device is increasingly wide
General, same occurs in that more and more parts with micro hole.According to statistics, the processing in hole accounts for the 1/3 of machining total amount,
Account for the 1/4 of machining total time.
In hole machined, especially the processing with micro hole is the most difficult, and various micropore has high intensity, high temperature resistant, resistance to
Application in the difficult-to-machine material of corrosion is but more and more extensive, but the machinability of these materials is very poor, such as titanium alloy, hard
Matter alloy, carbon fibre composite, nickel base superalloy, automotive fuel nozzle, chemical fibre filament nozzle etc..The major diameter of micro hole
More larger than generally, lead to their drilling more difficult, be primarily due to that drill thrust is big, drilling temperature is high, bit wear is serious, bore
The head reason such as service life is short.
And in micro hole machining, the requirement to drill bit is high, not only to there are preferable rigidity and intensity, simultaneously to use
Life-span also has higher requirements, though Chinese scholars have development high-performance, long-life coated drill, high cost, to drilling machine
Required precision is high, once occur fracture to can also result in workpiece scrapping.This is also that domestic a lot of enterprise bores in difficult-to-machine material
The reason in hole not easily using drill bits such as hard alloys.
Supersonic vibration auxiliary drilling (UVAD) in the Micro-role Drilling processing of difficult-to-machine material, also known as Ultrasonic Vibration Drilling,
It is the effective ways of micro hole machining, is widely used by industrial quarters, the method is built upon the bases such as Theory of Vibration and cutting theory
The drilling machining method of the novelty on plinth, belongs to a branch of vibrocutting.Ultrasonic Vibration Drilling changes traditional drilling
Cutting scheme, in terms of aperture and deep hole machining, has irreplaceable advantage.Substantial amounts of theoretical and test shows supersonic vibration
The chip breaking chip removal effect of drilling, crudy, cutter life etc. all have greatly improved and improve.
Mechanical drilling cannot process the material also harder than cutter, and chip space is little, particularly deep hole processing when, chip is difficult
In discharge, thus leading to the damage of drill bit, in order to obtain certain cutting speed, need using very high rotating speed, general requirement
In 10 000 ~ 150 000 r/min, and require main shaft turn error very little (<1 μm), such equipment cost is held high
Expensive, and standard machinery drilling cannot avoid generation burr.
, due to the loss of discharging gap and electrode, the circularity in hole and aperture precision are all poor for spark machined micropore, and
Chip removal is difficult;The geometric accuracy of laser boring and the accuracy of form and position be not high, and relatively costly.Common drilling drill bit is easily on workpiece
Skidding, scaling loss;And in Ultrasonic Vibration Drilling processing, shortcoming is that processing temperature is high, tool wear is serious, processes under complex working condition
Unstable, working (machining) efficiency is slower.
In capillary processing, due to being limited by pore size, it is difficult to hinge, the top gem of a girdle-pendant, the finishing process such as grinds and improve processing matter
Amount, is typically all once drilled to, this just proposes high requirement to drilling technique.
Content of the invention
It is an object of the invention to proposing a kind of electrophoresis assisting ultrasonic machinery composite fine drilling machining device.The present invention adopts
It is combined micro- drilling with electrophoresis assisting ultrasonic machinery micro hole is processed, using the electrophoretic characteristic of ultra micro abrasive particle, assisting ultrasonic
Vibrate micro- drilling, improve working (machining) efficiency, improve the utilization rate of abrasive material and the crudy improving micropore inner surface.
The technical scheme is that:The electrophoresis assisting ultrasonic machinery composite fine drilling machining device of the present invention, including
There are vertical slide block, fine ultrasonic chief axis, fine ultrasonic chief axis power source generator and control panel, electrophoresis accessory power supply, fine super
Sound platform power generator and control panel, kinetic control system, micro- three-dimensional movement platform, fine ultrasound works platform, drill bit,
Ultra micro abrasive particle, electrophoresis auxiliary electrode, work tank, drill bit is arranged on rotatable fine ultrasonic chief axis by fixture, fine
Ultrasonic chief axis make drill bit closely coupled with fine ultrasonic chief axis by fixture, and fine ultrasonic chief axis are arranged on vertical slipway, stand
Formula slide unit can drive fine ultrasonic chief axis to move up and down in order to carry out when processing slightly to knife, fine ultrasound works stage+module
In work tank, workpiece is installed on fine ultrasound works platform, and is immersed in the abrasive material working solution of work tank, bores
The processing part of head is similarly immersed in the abrasive material working solution of work tank, and work tank is installed on micro- three-dimensional movement platform
On, kinetic control system controls micro- three-dimensional movement platform in three direction motions of X, Y, Z axis, and fine ultrasonic platform power occurs
Device and control panel are connected with fine ultrasound works platform, fine ultrasonic chief axis and fine ultrasonic chief axis power source generator and control
Panel connects, and the anode of electrophoresis accessory power supply is connected with drill bit, and the negative electrode of electrophoresis accessory power supply is connected with electrophoresis auxiliary electrode, electricity
Swimming auxiliary electrode is fixed on work tank by electrophoresis auxiliary clamp, forms auxiliary electricity between drill bit and electrophoresis auxiliary electrode
, make the blade that the ultra micro abrasive particle in working solution is adsorbed onto near drill bit in the presence of electric field force or is attached directly to drill bit
On.
At present the processing of micro hole is mainly used mechanical drilling processing, spark machined, Electrolyzed Processing, ultrasonic plus
The processing methods such as work, electron beam/ion beam processing, Laser Processing and Compound Machining.Wherein supersonic vibration auxiliary Drill Techniques, be
A kind of advanced machining technology that modern age occurs, makes to produce between drill bit and workpiece controlled by ultrasonic vibration installation in boring procedure
The relative motion of system.This motion can fundamentally change the cutting scheme of drill bit, makes the vibration of drill bit that the change of matter to occur, by
Acyclic free vibration becomes the regular forced vibration under periodic excitation it is suppressed that the irregular of drill bit shakes
Dynamic, improve cutting force.
Ultrasonic Vibration Drilling processing and the compound micro- drilling processing both complex machining process of electrophoresis assisting ultrasonic machinery,
Ultrasonic Vibration Drilling processing is so that drill bit is moved with respect to surface to be machined, and electrophoresis assisting ultrasonic machinery is combined micro- drilling and adds
Work, is to form auxiliary electric field with auxiliary circular electrode in the solution using the drill bit of supersonic vibration, according to the electrophoresis of fine abrasive grains
Characteristic, makes abrasive particle be adsorbed onto on drill bit, indirectly adjusts adhesion on drill bit for the abrasive particle by adjusting voltage, using dither
Ultrasonic vibrator and have combinative ultra micro abrasive material, not only have conventional ultrasound vibration drilling processing Related Mechanism, due to
It is attached to the abrasive particle at blade and ablation is also acted as to workpiece, micrometric displacement reciprocating motion is carried out to part to be processed surface, changes
It has been apt to drilling performance, improved drilling working (machining) efficiency and the capillary processing realizing difficult-to-machine material.
The present invention compared with prior art, has the advantage that:
1)The drill bit of supersonic vibration of the present invention or workpiece, due to due to supersonic vibration, produce in the displacement of very little
Very big acceleration, produces very big energy in local, workpiece is made with percussion, auxiliary micro- drilling processing simultaneously, improvement is gone
Effect except material.
2)Apply adjustable dc voltage between micro drill of the present invention and electrophoresis auxiliary electrode, form auxiliary electric field, to ultra micro
The draw of abrasive particle generation electric field force can be ultra micro grain motion and is adsorbed onto drill bit or near workpieces, is shaken due to ultrasonic
Dynamic effect, makes abrasive particle impact workpiece, improves working (machining) efficiency, crudy and surface roughness.
3)The present invention passes through to adjust the size of voltage, makes abrasive particle on being attached to drill bit blade, due to electrophoretic effect, abrasive particle
There is adhesion and between drill bit, during processing, ablation can also be played to workpiece.
4)The present invention carries out electrophoresis process auxiliary drive abrasive material and moves near drill bit or be attached at drill bit blade in processing,
Have ablation to workpiece, improve cutting characteristic, make up the deficiencies in the prior art, realize hard brittle material plane micro structure and
The processing of three-dimensional microstructures;
5)The present invention adds ultra micro abrasive particle in process solutions, and supersonic vibration drives lower impact workpiece, improves working (machining) efficiency;
6)The present invention can carry out drilling processing to nonmetallic difficult-to-machine material plane micro structure and complex three-dimensional structure;
The present invention is that one kind can assist micro- drilling using electrophoresis with supersonic vibration, workpiece to be machined is carried out plane complicated
Micro- drilling processing, improves cutting ability, reduces cutting force, reduce the roughness of finished surface, reduce residual stress, improve drilling
The efficiency of processing and the electrophoresis assisting ultrasonic machinery composite fine drilling machining device realizing the processing to difficult-to-machine material micropore.
Brief description
Fig. 1 utilizes structural representation during ultrasonic chief axis vibration machining for the present invention;
Fig. 2 is the partial enlarged drawing at A in Fig. 1;
Fig. 3 utilizes the structural representation during vibration machining of ultrasound works platform for the present invention;
Fig. 4 is the partial enlarged drawing at B in Fig. 3.
Specific embodiment
Embodiment:
The structural representation of the present invention as shown in Figure 1,2,3, 4, electrophoresis assisting ultrasonic of the present invention machinery composite fine drilling
Processing unit (plant), includes vertical slide block 1, fine ultrasonic chief axis 2, fine ultrasonic chief axis power source generator and control panel 3, electrophoresis
Accessory power supply 4, fine ultrasonic platform power generator and control panel 5, kinetic control system 6, micro- three-dimensional movement platform 7, micro-
Thin ultrasound works platform 8, drill bit 10, ultra micro abrasive particle 12, electrophoresis auxiliary electrode 13, work tank 14, drill bit 10 is pacified by fixture
It is contained on rotatable fine ultrasonic chief axis 2, fine ultrasonic chief axis 2 make drill bit 10 and fine ultrasonic chief axis 2 by special fixture
Closely coupled, fine ultrasonic chief axis 2 are arranged on vertical slipway 1, and vertical slipway 1 can drive fine ultrasonic chief axis to transport about 2
Move in order to carry out when processing slightly to knife, fine ultrasound works platform 8 is arranged in work tank 14, and workpiece 9 is installed in fine
On ultrasound works platform 8, and it is immersed in the abrasive material working solution of work tank 14, the processing part similarly submergence of drill bit 10
In the abrasive material working solution of work tank 14, otherwise abrasive particle cannot be adsorbed by electrophoretic characteristic, work tank 14 is installed on micro- three
On maintenance and operation moving platform 7, kinetic control system 6 controls micro- three-dimensional movement platform 7 in three direction motions of X, Y, Z axis, and micro- three-dimensional is flat
The minimum resolution of platform 7 is 0.1 micron, and fine ultrasonic platform power generator and control panel 5 are put down with fine ultrasound works
Platform 8 connects, and fine ultrasonic chief axis 2 are connected with fine ultrasonic chief axis power source generator and control panel 3, electrophoresis accessory power supply 4
Anode is connected with drill bit 10, and the negative electrode of electrophoresis accessory power supply 4 is connected with electrophoresis auxiliary electrode 13, and electrophoresis auxiliary electrode 13 passes through electricity
Swimming auxiliary clamp 11 is fixed on work tank 14, forms auxiliary electric field, make work between drill bit 10 and electrophoresis auxiliary electrode 13
Make the ultra micro abrasive particle 12 in liquid to be adsorbed onto near drill bit 10 in the presence of electric field force or be attached directly on the blade of drill bit 10,
Improve the concentration of machining area abrasive material.The minimum resolution of above-mentioned micro- three-dimensional platform is 0.1 micron.Ultra micro abrasive particle shown in figure
12 are suspended in working solution, and mean diameter is less than 1 micron.Ultra micro abrasive particle(12)Itself is simultaneously not charged.Due to its surface energy relatively
Larger, the negative charge in solution can be adsorbed onto grain surface, this just makes whole abrasive particle show negative electricity characteristic.Ultra micro abrasive particle
12 mean diameter is less, and its electrophoretic characteristic is more obvious.Electrophoresis is according to ultra micro abrasive particle with the micro- drilling processing of supersonic vibration auxiliary
Electrophoretic characteristic, larger grain motion is driven by auxiliary electric field and is adsorbed onto near drill bit, on the one hand made by supersonic vibration
Abrasive particle produces percussion to workpiece, and another aspect electrophoretic effect can make to adsorb and be attached at blade compared with fine grit, due to
Compared with the attachment of fine grit, there is certain adhesion, not only ablation is played to workpiece, may also operate as protecting the work of blade
With reducing tool wear, improving the service life of working (machining) efficiency, crudy and drill bit;In the new system of processing of the present invention
Main shaft and processing platform all can reach the effect of supersonic vibration by supersonic generator, and micro drill is in the week of supersonic vibration
Phase property forces to play the irregular vibrato of suppression in rule vibration, improves processing characteristics, reduces cutting force.Simultaneously because
Electrophoretic characteristic and supersonic vibration impact, can make to carry out disturbance to solution in processing so that the ultra micro abrasive particle in solution with respect to
Surface to be machined moves, and reaches the purpose of abrasive particle self renewal.
Above-mentioned fine ultrasonic chief axis 2 and fine ultrasound works platform 8 respectively can be in fine ultrasonic chief axis power source generators
And under the control of control panel 3 and fine ultrasonic platform power generator and control panel 5, drive drill bit 10 and workpiece 9 to produce
Supersonic vibration, can produce supersonic vibration simultaneously and can also independently produce supersonic vibration.
In the present embodiment, above-mentioned drill bit 10 is micro drill used by common microfabrication, can not have the situation of supersonic vibration
Under, carry out standard machinery micro- drilling processing.Above-mentioned electrophoresis accessory power supply 4 is adjustable DC power supply.Above-mentioned workpiece 9 is metal or non-
Metal difficult-to-machine material.
For ease of processing, above-mentioned electrophoresis auxiliary electrode 13 is fixed on work tank 14 by electrophoresis auxiliary clamp 11, leads to
The position crossing adjustment electrophoresis auxiliary clamp 11 makes 13 drill bits 10 of electrophoresis auxiliary electrode around wherein.Above-mentioned work tank 14 leads to
Cross auxiliary clamp 15 to be installed in micro- three-dimensional movement platform 7.
The operation principle of the present invention is:As shown in Figure 1,2,3, 4, electrophoresis assisting ultrasonic machinery composite fine drilling processing dress
When putting processing, fine ultrasonic chief axis 2 can move up and down under the drive of vertical slide block 1, and fine ultrasonic chief axis 2 correspond to below
Work tank 14 and ultrasound works platform 8, ultrasound works platform 8 is fixed in work tank 14, and workpiece 9 is fixed on ultrasound works
On platform, it is immersed in working solution, also must be immersed in working solution during drill bit 10 processing, no person cannot play electrophoretic effect
Auxiliaring effect, whole workbench is fixed in micro- three-dimensional movement platform 7 by auxiliary clamp 15, in the course of processing, first by micro- three
Maintenance and operation moving platform 7 and vertical slide block 1 are responsible for feeding and to knife, open electrophoresis accessory power supply 4, control ultra micro abrasive particle 12 to start to brill
Head nearby moves, and when starting processing, opens ultrasonic-frequency power supply generator, fine ultrasonic chief axis 2 and fine ultrasonic platform 8 are permissible respectively
Control in fine ultrasonic chief axis power source generator and control panel 3 and fine ultrasonic platform power generator and control panel 5
Lower drive drill bit 10 and workpiece 9 produce supersonic vibration, can produce supersonic vibration simultaneously and independently can also produce supersonic vibration, and then
Carry out the machinery composite fine drilling processing of electrophoresis assisting ultrasonic.
The machinery composite fine drilling processing of electrophoresis assisting ultrasonic, the mainly electrophoretic characteristic according to ultra micro abrasive particle, by auxiliary
Help electric field driven grain motion and be adsorbed onto near drill bit, on the one hand make abrasive particle produce impact to workpiece by supersonic vibration and make
With another aspect electrophoretic effect can make to adsorb and be attached at blade compared with fine grit, because the attachment compared with fine grit has one
Fixed adhesion, not only plays ablation to workpiece, may also operate as protecting the effect of blade, reduces tool wear, improves
The service life of working (machining) efficiency, crudy and drill bit;Simultaneously because electrophoretic characteristic and supersonic vibration impact, it is right in processing to make
Solution carries out disturbance, so that the ultra micro abrasive particle in solution moves with respect to surface to be machined, reaches the mesh of abrasive particle self renewal
's.Thus micro- milling can be assisted using electrophoresis and supersonic vibration, workpiece to be machined is carried out plane complicated micro- milling or
The micro- Milling Process of three-dimension curved surface, improves cutting ability, reduces cutting force, reduces the roughness of finished surface, reduces residual stress,
Improve the efficiency of Milling Process and realize the processing to difficult-to-machine material.
Claims (8)
1. a kind of electrophoresis assisting ultrasonic machinery composite fine drilling machining device is it is characterised in that include vertical slipway(1), micro-
Thin ultrasonic chief axis(2), fine ultrasonic chief axis power source generator and control panel(3), electrophoresis accessory power supply(4), fine ultrasonic flat
Platform power source generator and control panel(5), kinetic control system(6), micro- three-dimensional movement platform(7), fine ultrasound works platform
(8), drill bit(10), ultra micro abrasive particle(12), electrophoresis auxiliary electrode(13), work tank(14), drill bit(10)Installed by fixture
In rotatable fine ultrasonic chief axis(2)On, fine ultrasonic chief axis(2)Drill bit is made by fixture(10)With fine ultrasonic chief axis
(2)Closely coupled, fine ultrasonic chief axis(2)It is arranged on vertical slipway(1)On, vertical slipway(1)Fine ultrasonic master can be driven
Axle(2)Move up and down in order to carry out when processing slightly to knife, fine ultrasound works platform(8)It is arranged on work tank(14)In,
Workpiece(9)It is installed in fine ultrasound works platform(8)On, and it is immersed in work tank(14)Abrasive material working solution in, drill bit
(10)Processing part be similarly immersed in work tank(14)Abrasive material working solution in, work tank(14)It is installed on micro- three-dimensional
Motion platform(7)On, kinetic control system(6)Control micro- three-dimensional movement platform(7)In three direction motions of X, Y, Z axis and micro-
Carefully ultrasonic platform power generator and control panel(5)With fine ultrasound works platform(8)Connect, fine ultrasonic chief axis(2)With
Fine ultrasonic chief axis power source generator and control panel(3)Connect, electrophoresis accessory power supply(4)Anode and drill bit(10)Connect,
Electrophoresis accessory power supply(4)Negative electrode and electrophoresis auxiliary electrode(13)Connect, electrophoresis auxiliary electrode(13)By electrophoresis auxiliary clamp
(11)It is fixed on work tank(14)On, in drill bit(10)With electrophoresis auxiliary electrode(13)Between formed auxiliary electric field, make work
Ultra micro abrasive particle in liquid(12)It is adsorbed onto drill bit in the presence of electric field force(10)Nearby or be attached directly to drill bit(10)Knife
On sword.
2. electrophoresis assisting ultrasonic according to claim 1 machinery composite fine drilling machining device is it is characterised in that above-mentioned
Fine ultrasonic chief axis(2)And fine ultrasound works platform(8)Respectively can be in fine ultrasonic chief axis power source generator and chain of command
Plate(3)With fine ultrasonic platform power generator and control panel(5)Control under drive drill bit(10)And workpiece(9)Produce super
Sonic vibration, drill bit(10)And workpiece(9)Supersonic vibration can be produced simultaneously, or independent generation supersonic vibration.
3. electrophoresis assisting ultrasonic according to claim 1 machinery composite fine drilling machining device is it is characterised in that above-mentioned
Drill bit(10)Micro drill used by common microfabrication.
4. electrophoresis assisting ultrasonic according to claim 1 machinery composite fine drilling machining device is it is characterised in that above-mentioned
Electrophoresis accessory power supply(4)For adjustable DC power supply.
5. electrophoresis assisting ultrasonic according to claim 1 machinery composite fine drilling machining device is it is characterised in that above-mentioned
Workpiece(9)For metal or nonmetallic difficult-to-machine material.
6. the electrophoresis assisting ultrasonic machinery composite fine drilling machining device according to any one of claim 1 to 5, its feature
It is above-mentioned electrophoresis auxiliary electrode(13)By electrophoresis auxiliary clamp(11)It is fixed on work tank(14)On, by adjusting electrophoresis
Auxiliary clamp(11)Position make electrophoresis auxiliary electrode(13)Drill bit(10)Around wherein.
7. electrophoresis assisting ultrasonic according to claim 6 machinery composite fine drilling machining device is it is characterised in that above-mentioned
Work tank(14)By auxiliary clamp(15)It is installed on micro- three-dimensional movement platform(7)On.
8. electrophoresis assisting ultrasonic according to claim 7 machinery composite fine drilling machining device is it is characterised in that above-mentioned
Micro- three-dimensional movement platform(7)Minimum resolution be all 0.1 micron.
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CN104875081B (en) * | 2015-06-03 | 2017-04-12 | 浙江工业大学 | Microhole precision-machining method based on dielectrophoresis |
CN105312607B (en) * | 2015-11-27 | 2017-06-06 | 北京理工大学 | Based on the micro-hole machining method that cutting fluid ultrasonic cavitation and vibration cutting are combined |
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CN106868570B (en) * | 2017-04-25 | 2019-11-08 | 广东工业大学 | A kind of metal surface modifying device |
CN108057908A (en) * | 2017-12-21 | 2018-05-22 | 广东德新科技孵化器有限公司 | A kind of electrical accessory processing drilling machine |
CN113021084A (en) * | 2021-03-17 | 2021-06-25 | 惠州标点扣具科技有限公司 | Machining method of forming die for plastic fastener production |
CN113399696A (en) * | 2021-07-01 | 2021-09-17 | 西北工业大学 | Ultrasonic vibration assisted drilling machining method for DD6 single crystal superalloy difficult to machine |
CN115446916A (en) * | 2022-07-25 | 2022-12-09 | 广东工业大学 | Sound-control material-increasing and material-decreasing turning manufacturing machine tool and workpiece machining method thereof |
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JPH0794089B2 (en) * | 1989-11-01 | 1995-10-11 | アイセル株式会社 | Polishing equipment |
JP2003220530A (en) * | 2002-01-22 | 2003-08-05 | Kumakura:Kk | Machining vibration table device with ultrasonic vibration and adsorption function |
CN202556162U (en) * | 2012-05-29 | 2012-11-28 | 广东工业大学 | Spindle system of superfine ultrasonic and superfine rotary ultrasonic machining tool |
CN103071910A (en) * | 2013-01-14 | 2013-05-01 | 广东工业大学 | Double-ultrasonic-high-frequency induction combined precision micro-connection device and method |
CN103273386B (en) * | 2013-05-22 | 2016-05-18 | 广东工业大学 | The auxiliary fine ultrasonic machine tool of a kind of electrophoresis and processing method |
CN103551927B (en) * | 2013-11-11 | 2016-08-24 | 广东工业大学 | The device of a kind of electrophoresis assisting ultrasonic vibratory drive grain motion polishing micropore and processing method |
CN203738066U (en) * | 2014-04-04 | 2014-07-30 | 广东工业大学 | Electrophoresis-assisted ultrasonic and mechanical combined micro drilling machining device |
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