CN106862685A - A kind of electrolysis electric discharge machining method of use plane foil electrode - Google Patents
A kind of electrolysis electric discharge machining method of use plane foil electrode Download PDFInfo
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- CN106862685A CN106862685A CN201710103774.0A CN201710103774A CN106862685A CN 106862685 A CN106862685 A CN 106862685A CN 201710103774 A CN201710103774 A CN 201710103774A CN 106862685 A CN106862685 A CN 106862685A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
- B23H5/00—Combined machining
- B23H5/02—Electrical discharge machining combined with electrochemical machining
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
- B23H9/00—Machining specially adapted for treating particular metal objects or for obtaining special effects or results on metal objects
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Abstract
The invention belongs to micro processing field, more particularly to a kind of the electrolysis electric discharge machining method and its device of use plane foil electrode, the process of the designed device includes：Cell reaction produces bubble, bubble coalescence is closed and formed with insulating barrier, plane electrode Bending Deformation is formed with discharge channel, the ablation of material with dish out, deionization recovers five stages with electrode deformation, realize the Fine Feed of electrode position in processing, solve the problem of electrolysis electrical discharge machining intermediate gap control, compared with the processing method of traditional single-point electric discharge, plane foil electrode can realize the electro-discharge machining of whole plane, substantially increase processing efficiency, apparatus structure is simple, it is with low cost, make high accuracy, low cost, efficient fine machining method is possibly realized, with important theory significance and engineering application value.
Description
Technical field
The invention belongs to micro processing field, more particularly to a kind of electrolysis electrical spark working of use plane foil electrode
Work method and its device.
Background technology
With microscopic dimensions product extensively should in fields such as MEMS, Microfluidics, biomedical test systems
With the processing of miniature parts receives greatly attention.In order to seek efficient, high accuracy, financial cost in modern industry
Low miniature parts machining scheme, researcher is using special processing technologies such as electrical discharge machining, Electrolyzed Processings and is based on
The Micrometer-Nanometer Processing Technology of photoetching technique launches research.In small lot processing, special processing technology is more more economical than photoetching technique
Material benefit.Special processing technology is reached using energy such as electric energy, heat energy, luminous energy, electrochemical energy, chemical energy, acoustic energy and special machine energy
To the purpose of removal material.Include Laser Processing and electrical discharge machining by the processing mode of heat energy, Laser Processing is usually used in pottery
The manufacture of porcelain, polymer and metal material, but this process technology needs expensive equipment and maintenance cost very high, and processing
The presence of middle heat affected area limits its application in Precision Machining.Micro EDM and Wire-cut Electrical Discharge Machining are same
Sample removes material using heat energy, is widely applied in miniature parts processing, but it has the disadvantage to be only capable of processing conductive material.
The Ultrasonic machining and abrasive flow machining that can remove material by special machine achieve good effect in crisp and hard material manufacture,
And need not consider the electric conductivity of rapidoprint, but because cannot processing flexibility material limit its application.By the electrolysis of chemical energy
Processing is capable of achieving the processing of complicated miniature structure, and surface smoothness is good, but it has the disadvantage that scale error is big, cannot process depth
Width is than larger structure.The need for based on commercial Application, various workpieces material can be processed, material hardness, intensity need not be considered, led
Electrical processing method starts to cause the concern of industrial quarters.
Electrolysis electrical discharge machining makes to form high-potential gracient between electrode and workpiece by the bubble that electrochemical reaction is formed, and draws
Spark disruptive discharge is played, the purpose of removal workpiece is reached with the effect such as TRANSIENT HIGH TEMPERATURE and shock wave of spark discharge.Electrolysis electricity
Spark processing has the advantage of Electrolyzed Processing and electrical discharge machining concurrently, compared with traditional special process method, is electrolysed electrical discharge machining
Do not limited by the strength of materials, hardness and electric conductivity, in conductive material and the processing of non-conducting material, hard brittle material and flexible material
In can all apply.
Processing clearance control is always the problem for being electrolysed electrical discharge machining, and current ball-screw adds AC servo motor or straight
Line motor is the servo drive of main flow, and with advances in technology, the precision of both drive mechanisms is also being improved constantly, and is matched somebody with somebody
Closing the linear electric motors of high-accuracy grating scale can reach feed accuracy higher, but independent use still cannot fully meet electrolysis
The requirement that electrical discharge machining elaborate servo is fed and stabilization is processed.Meanwhile, the fluid for improving small processing gap electrolyte inside is moved
Mechanical condition, sets up rational flow field, it is ensured that it is also smoothly to improve to be electrolysed the important of EDM Performance that electrolysate is excluded
Means.As the proposition of micro- factory's concept, the device dedicated for processing micro- part start appearance, its basic skills is by tradition
Digital control system is minimized, and can effectively solve this problem using MEMS in process.
For example, CN105269094A provides a kind of ultrasonic vibration assist electricity towards the processing of non-conductive hard brittle material
Solution wire electric discharge machine method and device.Processing method of the present invention utilizes ultrasonic vibration along the axial excitation work of wire electrode
There is cell reaction in part, wire electrode, make to separate out hydrogen around wire electrode in the electrolytic solution with auxiliary electrode, and then formation air film makes
Wire electrode insulate with electrolyte.Processing unit (plant) of the present invention includes bed piece, electrolysis-wire electric discharge machining device, ultrasonic vibration
Unit and workbench；Bed piece is provided with wire storage tube, driving wheel, tensioning apparatus, wheel bracket；Electrolysis-Wire EDM
Device includes the clamping device of fixed workpiece, workpiece, main shaft, wire drive device, wire electrode, the working liquid container for filling electrolyte, auxiliary
Help electrode, electrolysis-electric spark power supply；Auxiliary electrode connects the positive pole of electrolysis-electric spark power supply, and wire electrode passes through outside wire feeder
Negative pole is connect, the program is suitable only for wire cutting.
In addition, CN103611994A provides a kind of complex-curved answered without recast layer list/group hole Multi-station electrical spark-electrolysis
Close machining tool, including machine body, cathod system, working solution circulating system, power-supply system and control system, power-supply system its
Control circuit controls the switching of different wave power supply according to different process requirements, and power supply signal is applied to instrument electricity through output circuit
Pole and workpiece power-supply system, using single loop or multiloop power supply mode, are carried out independently-powered to tool-electrode；Working solution is circulated
Switching device can realize the specific demand of fliud flushing free switching inside and outside electric spark-pipe electrode needed for electrolysis Compound Machining, the program
The algorithm of precision machine tool and high sensor and complexity is needed to control gap.
The content of the invention
In view of the technical problem that prior art is present, the invention provides a kind of electrolysis of use plane foil electrode
Spark discharge processing unit (plant), including：Fixed structure, feeding adjusting device, the pulse power, plane foil electrode and work
Part, solution tank, feeding adjusting device are fixed on fixed structure, and plane foil electrode is installed under feeding adjusting device
Side, workpiece is installed in solution tank, and positioned at plane foil base part, feeding adjusting device is driven using servomotor,
Can realize that the grand feeding of electrode upright position makes foil be 5 μm -50 μm with workpiece spacing by programme-control；Foil
An electric capacity C is formed with workpiece, foil is respectively the two poles of the earth of electric capacity C with workpiece, and the two poles of the earth are connected shape with the pulse power respectively
Into electrolytic cell, pulse power voltage is about 5v-100v, and electrolyte is loaded with inside solution tank, can be adjusted by pump and is electrolysed
The height of liquid.It is specific as shown in Figure 1.
It is preferred that workpiece material can be metal such as 304 stainless steels, affiliated electrolyte is passivation electrolyte sodium nitrate, is electrolysed immersion
No workpiece.Sodium nitrate solution is 20g/l, and solvent is deionized water.
Wherein, used as tool-electrode, tool-electrode can use zigzag or channel-shaped electrode, tool-electrode to plane lamina electrode
Deformation quantity be directly proportional to length and be inversely proportional to the thickness, with wide association less, it is general from electrode plane electrode for thickness is
30 μm, width is 2500 μm, and length is 6000 μm of rectangular shape, is pressed from both sides by being installed on the fixing device below feeding adjusting device
Hold, preferred scheme is fixed on clamping device for plane electrode one end, and the other end is unlocked, rides on clamping device.
Still a further object of the present invention is to provide a kind of electrolysis electric discharge machining method of use plane foil electrode, is made
With foregoing processing unit (plant), including：(1) cell reaction produces bubble, (2) bubble coalescence to merge and insulating barrier formation, (3) plane
Electrode bending deformation and discharge channel are formed, the ablation of (4) material and dish out, (5) deionization and electrode deformation recovery.
The concrete scheme of the processing method includes：(1) cell reaction produce bubble, after cell reaction starts, hydrogen and
Oxygen bubble is produced on plane foil electrode and workpiece respectively；(2) when supply voltage is higher than certain threshold value, plane
The speed of the speed more than hydrogen emersion liquid level of electrolyte of the generation hydrogen of electrode, hydrogen starts to be collected around in plane electrode,
Until being formed about a gas-insulated layer in plane electrode；(3) this insulating barrier can block the electricity of interpolar in a short time
Stream causes interpolar to form high field, because the effect of high field makes to form electrostatic force, flat thin metal between the two poles of the earth
Plate electrode bends deformation in the presence of electrostatic force to workpiece direction, reduces anode-cathode distance so as to cause electricity between the two poles of the earth
Field intensity continues to increase, and when workpiece and sufficiently small plane electrode distance, dielectric is breakdown, produces spark discharge, reaches
Remove the purpose of material.(4) instantaneous specific substantial amounts of heat is pointed out in electric discharge, the workpiece material of point of discharge is melted and gasified, together
When produce that very big explosive force will be melted and the workpiece material that gasify is dished out, form the pit that discharges.(5) present invention in workpiece and
While forming spark discharge between electrode, the electric charge of interpolar is also released, and is gradually reduced interpolar electrostatic force, flat thin metal
The deformation of plate electrode also recovers therewith, the distance between workpiece and electrode is become big again, it is to avoid the generation of irregular electric arc,
Also contribute to the discharge of scrap in electro-discharge machining.After the deformation of electrode recovers completely, the state of cell reaction is returned to, repeated
This process, plane foil electrode is formed in the presence of the pulse power using the gas-insulated layer in cell reaction
High field, so as to the driving in electrostatic force realizes that Fine Feed carries out electro-discharge machining.
It is preferred that step (1) the cell reaction stage, as shown in Fig. 2 including, fed by adjusting means it is close to workpiece,
Plane foil electrode (instrument) electrode is immersed in electrolyte, tool-electrode is connected with pulse power negative pole, used as electricity
Solve the negative electrode of reaction.The positive pole of the pulse power is connected with workpiece, used as the anode of cell reaction, after the pulse power is powered, instrument
Potential difference is produced between electrode and auxiliary electrode, cation is mobile to tool-electrode (negative electrode) in electrolyte, and anion is to workpiece
(anode) movement is moved, makes to be chemically reacted in electrolyte.Plane foil (negative electrode) surrounding as tool-electrode starts
Hydrogen gas bubbles are produced, and the generation speed of hydrogen gas bubbles has relation with pulse power voltage, pulsewidth, voltage is higher, and bubble is produced
Speed is faster, and pulsewidth is bigger, and bubble produces speed faster.
It is preferred that step (2) bubble coalescence merge with insulating barrier formation include：When pulse power voltage and pulsewidth are higher, gas
When bubble produces speed to be more than certain threshold limit value, the speed of the generation hydrogen of tool-electrode is more than hydrogen emersion liquid level of electrolyte
Speed, hydrogen starts to be collected around in tool-electrode, and as shown in Fig. 3 (a), bubble gradually merges after aggregation, until
Tool-electrode is formed about a gas-insulated layer, shown in such as Fig. 3 (b).Because gas-insulated layer resistance is very big, electric charge is caused to exist
Workpiece surface aggregation near plane electrode and insulating barrier, forms a plane-parallel capacitor, insulating barrier is hindered in a short time
The electric current of disconnected interpolar, interpolar forms high field.
It is preferred that step (3) plane electrode Bending Deformation formed with discharge channel：After interpolar forms high field, electric charge
Start the plane-parallel capacitor two ends aggregation constituted in plane lamina electrode and workpiece, gradually rise the voltage of interpolar, work as pole
Between voltage reach certain threshold value when, plane lamina electrode be in a critical equilbrium position, when electric charge continue assemble, voltage
After continuing to increase, plane lamina electrode takes place Bending Deformation under the driving of electrostatic force, make the distance of electrode and workpiece by
Decrescence small, such as shown in Fig. 4 (a), interpolar electric-field intensity gradually increases while die opening is gradually reduced, when interpolar electric-field intensity foot
When enough big and die opening is sufficiently small, the planar electrode surface as negative electrode starts runaway electron, high-strength between plane-parallel capacitor
Quickly moved to the workpiece surface as anode in the presence of degree electric field, electronics occurs during motion with the particle of interpolar
Collision, cation and electronics are ionized into by contrasted between solid dielectric, and the gas-insulated layer between plane lamina electrode and workpiece is breakdown, puts down
Discharge channel is formed between face electrode and workpiece, shown in such as Fig. 4 (b).
It is preferred that step (4) material ablation with dish out including：After discharge channel being formed between plane electrode and workpiece, arteries and veins
Rush power supply to continue to interpolar applied voltage, electronics in discharge channel is moved to workpiece (positive pole) at a high speed, cation at a high speed to
Plane lamina electrode (negative pole) is moved, and charged particle collides in high speed motions, and colliding the heat for producing makes electric discharge
Temperature in passage is quickly raised, and instantaneous specific substantial amounts of heat is pointed out in electric discharge, and the workpiece material of point of discharge is melted and gasified,
Produce very big explosive force to be melted simultaneously and the workpiece material that gasify is dished out, formation electric discharge pit as shown in Figure 5.
It is preferred that step ((5) deionization and electrode deformation recover to include：Forming discharge channel in interpolar carries out material ablation
During, the electric charge on plane lamina electrode is promptly released into interpolar, makes the voltage of interpolar and reduces, and causes to be applied to flat thin
Electrostatic force on plate electrode is also gradually reduced, when elastic force of the electrostatic force less than bending cantilever, the deformation of plane lamina electrode
Start to recover, electrode is moved to the direction away from workpiece, and anode-cathode distance becomes larger, and discharge channel is stretched, the grain in passage
Son is mutually neutralized and gradually decreased, until returning to the state before electric discharge.At the same time, electrolyte flows into interpolar, makes point of discharge
Temperature reduction, and the scrap dished out after ablation is washed away interpolar, interpolar is returned to cell reaction state, into next
Electrostatic drive is electrolysed the discharge cycle of electrical discharge machining.The characteristics of plane electrode deformation recovers after present invention formation discharge channel adds
The speed deionization of interpolar, Fine Feed and micro- rollback are realized using the deformation of plane lamina electrode, can effectively reduce electrolysis electricity
The generation of irregular electric arc in spark processing, improves electrolysis EDM Performance.Meanwhile, plane lamina electrode drives in electrostatic force
Reciprocating motion under dynamic also makes the process-cycle more regular, interpolar is realized self adaptation electro-discharge machining, the workpiece after processing
As shown in Figure 6.
As the preferred scheme of processing method, the present invention first by fine electric spark linear cutter or fusion sediment into
Type method processes micro-electrode on plane foil, and feed arrangement is arranged on using the metal bridge architecture of bending cantilever
Lower section, designed feed arrangement adjusts the grand feed motion for realizing electrode position by motor.By pulse signal control
Switch mosfet comes between control plane foil electrode and workpiece to charge, and makes connection sheet metal using electrostatic force
Metal bridge-type malformation with bending cantilever is subjected to displacement, and realizes the Fine Feed of electrode upright position.
The present invention includes relative to the beneficial effect of prior art：
The present invention uses plane foil electrode for the problem proposition that electrolysis electrical discharge machining intermediate gap controls is a kind of
Electrolysis electric discharge machining method and its device, design micro- servo feed mechanism using electrostatic theory, and using the pulse power with
The self adaptation discharge mechanism of electrostatic drive Fine Feed realizes electro-discharge machining, by changing processing gap, improves the flowing of working solution
Situation, it is ensured that electrolysis electrical discharge machining product smooth discharge, solve servo feed precision not enough, processing clearance control it is not smart
Really, the problems such as etched matter discharge is difficult, to meet the requirement of fine precision processing, the processing method phase discharged with traditional single-point
Than plane foil electrode can realize the electro-discharge machining of whole plane, substantially increase processing efficiency, apparatus structure letter
It is single, it is with low cost, make it possible high accuracy, inexpensive, efficient fine machining method, with important theory significance and
Engineering application value.
Brief description of the drawings
Fig. 1, plane foil electrolysis electric discharge machining apparatus schematic diagram.
Fig. 2, cell reaction forms bubble schematic diagram.
Fig. 3, insulating barrier forms schematic diagram, wherein, 3 (a) bubble coalescence schematic diagram, 3 (b) bubble merges, and insulating barrier is formed
Schematic diagram.
Fig. 4, discharge channel forms schematic diagram, wherein, 4 (a) motor Bending Deformation schematic diagram, 4 (b) discharge channel is formed and shown
It is intended to.
Fig. 5, material forms pit schematic diagram after being removed.
Fig. 6, the workpiece schematic diagram after process finishing.
Fig. 7, processes workpiece schematic diagram, wherein, Fig. 7 (a) is the workpiece block schematic illustration before processing；After Fig. 7 (b) is for processing
Workpiece photo.
Specific embodiment
The specific embodiment of the inventive method is discussed in detail below in conjunction with the accompanying drawings, but the present invention is not limited to this：
Embodiment 1
A kind of electrolysis spark discharge processing unit (plant) of use plane foil electrode, including：Fixed structure, feeding are adjusted
Regulating device, the pulse power, plane foil electrode and workpiece, solution tank, feeding adjusting device are fixed on fixed structure, are put down
Face foil electrode is installed on feeding adjusting device lower section, and workpiece is installed in solution tank, positioned at plane foil electrode
Lower section, feeding adjusting device is driven using servomotor, can realize that the grand feeding of electrode upright position makes by programme-control thin
Sheet metal is 5 μm -50 μm with workpiece spacing；Foil forms an electric capacity C with workpiece, and foil is respectively electricity with workpiece
Hold the two poles of the earth of C, the two poles of the earth are connected to form electrolytic cell with the pulse power respectively, and pulse power voltage is about 5v-100v, in solution tank
Portion is loaded with electrolyte, and the height of electrolyte can be adjusted by pump.
The workpiece material can be metal, and affiliated electrolyte is passivation electrolyte sodium nitrate, electrolyte submergence workpiece.
Wherein, tool-electrode can use zigzag or channel-shaped electrode (size range of microprotrusion is 20 μm, and well width can be
20 μm), as shown in Fig. 2 being clamped by being installed on the fixing device below feeding adjusting device, preferred scheme is plane electrode one end
It is fixed on clamping device, the other end is unlocked, rides on clamping device.
Embodiment 2
Using the processing method of the processing unit (plant) of embodiment 1, step (1) cell reaction stage preferably, as shown in Fig. 2 bag
Include, fed by adjusting means close to workpiece, plane foil electrode (instrument) electrode is immersed in electrolyte, instrument
Electrode is connected with pulse power negative pole, used as the negative electrode of cell reaction.The positive pole of the pulse power is connected with workpiece, anti-as electrolysis
The anode answered, after the pulse power is powered, produces potential difference between tool-electrode and auxiliary electrode, cation is to instrument in electrolyte
Electrode (negative electrode) is mobile, and anion moves (anode) movement to workpiece, makes to be chemically reacted in electrolyte.As tool-electrode
Start to produce hydrogen gas bubbles around plane foil (negative electrode), and hydrogen gas bubbles generation speed and pulse power voltage, arteries and veins
Width has relation, and voltage is higher, and bubble generation speed is faster, and pulsewidth is bigger, and bubble produces speed faster.
It is preferred that step (2) bubble coalescence merge with insulating barrier formation include：When pulse power voltage and pulsewidth are higher, gas
When bubble produces speed to be more than certain threshold limit value, the speed of the generation hydrogen of tool-electrode is more than hydrogen emersion liquid level of electrolyte
Speed, hydrogen starts to be collected around in tool-electrode, and as shown in Fig. 3 (a), bubble gradually merges after aggregation, until
Tool-electrode is formed about a gas-insulated layer, shown in such as Fig. 3 (b).Because gas-insulated layer resistance is very big, electric charge is caused to exist
Workpiece surface aggregation near plane electrode and insulating barrier, forms a plane-parallel capacitor, insulating barrier is hindered in a short time
The electric current of disconnected interpolar, interpolar forms high field.
It is preferred that step (3) plane electrode Bending Deformation formed with discharge channel：After interpolar forms high field, electric charge
Start the plane-parallel capacitor two ends aggregation constituted in plane lamina electrode and workpiece, gradually rise the voltage of interpolar, work as pole
Between voltage reach certain threshold value when, plane lamina electrode be in a critical equilbrium position, when electric charge continue assemble, voltage
After continuing to increase, plane lamina electrode takes place Bending Deformation under the driving of electrostatic force, make the distance of electrode and workpiece by
Decrescence small, such as shown in Fig. 4 (a), interpolar electric-field intensity gradually increases while die opening is gradually reduced, when interpolar electric-field intensity foot
When enough big and die opening is sufficiently small, the planar electrode surface as negative electrode starts runaway electron, high-strength between plane-parallel capacitor
Quickly moved to the workpiece surface as anode in the presence of degree electric field, electronics occurs during motion with the particle of interpolar
Collision, cation and electronics are ionized into by contrasted between solid dielectric, and the gas-insulated layer between plane lamina electrode and workpiece is breakdown, puts down
Discharge channel is formed between face electrode and workpiece, shown in such as Fig. 4 (b).
It is preferred that step (4) material ablation with dish out including：After discharge channel being formed between plane electrode and workpiece, arteries and veins
Rush power supply to continue to interpolar applied voltage, electronics in discharge channel is moved to workpiece (positive pole) at a high speed, cation at a high speed to
Plane lamina electrode (negative pole) is moved, and charged particle collides in high speed motions, and colliding the heat for producing makes electric discharge
Temperature in passage is quickly raised, and instantaneous specific substantial amounts of heat is pointed out in electric discharge, and the workpiece material of point of discharge is melted and gasified,
Produce very big explosive force to be melted simultaneously and the workpiece material that gasify is dished out, formation electric discharge pit as shown in Figure 5.
It is preferred that step (5) deionization and electrode deformation recover to include：Forming discharge channel in interpolar carries out material ablation
During, the electric charge on plane lamina electrode is promptly released into interpolar, makes the voltage of interpolar and reduces, and causes to be applied to flat thin
Electrostatic force on plate electrode is also gradually reduced, when elastic force of the electrostatic force less than bending cantilever, the deformation of plane lamina electrode
Start to recover, electrode is moved to the direction away from workpiece, and anode-cathode distance becomes larger, and discharge channel is stretched, the grain in passage
Son is mutually neutralized and gradually decreased, until returning to the state before electric discharge.At the same time, electrolyte flows into interpolar, makes point of discharge
Temperature reduction, and the scrap dished out after ablation is washed away interpolar, interpolar is returned to cell reaction state, into next
Electrostatic drive is electrolysed the discharge cycle of electrical discharge machining.The characteristics of plane electrode deformation recovers after present invention formation discharge channel adds
The speed deionization of interpolar, Fine Feed and micro- rollback are realized using the deformation of plane lamina electrode, can effectively reduce electrolysis electricity
The generation of irregular electric arc in spark processing, improves electrolysis EDM Performance.Meanwhile, plane lamina electrode drives in electrostatic force
Reciprocating motion under dynamic also makes the process-cycle more regular, interpolar is realized self adaptation electro-discharge machining, the workpiece after processing
As shown in Figure 6.
Embodiment 3
Used as the preferred scheme of the processing method of embodiment 2, the present invention is first by fine electric spark linear cutter or molten
Thaw collapse product the method for forming process micro-electrode on plane foil, using bending cantilever metal bridge architecture be arranged on into
To the lower section of device, designed feed arrangement adjusts the grand feed motion for realizing electrode position by motor.Believed by pulse
Number control switch mosfet come between control plane foil electrode and workpiece charge, and using electrostatic force make connection gold
The metal bridge-type malformation for belonging to the band bending cantilever of piece is subjected to displacement, and realizes the Fine Feed of electrode upright position.
Embodiment 4
Using the machine tool structure of figure one HIT printed words have been cut out according to the size shown in Fig. 7 (a) on the red copper thin slice of 30 μ m-thicks
Plane electrode, this electrode is installed on experiment is processed in electrostatic drive electrochemical machining system.Fig. 7 (b) is after processing
Workpiece photo, workpiece material is stainless steel, and working depth is 100 μm, and process time is 30 minutes, embodies electrostatic drive electrolysis
Advantage high in machining efficiency.
Compared with the method for traditional use cylindrical metal bar electrode single-point electro-discharge machining, driven using the electrostatic of plane electrode
Dynamic electrolysis can not only realize the Fine Feed of electrode position, improve the discharged condition of interpolar, the characteristics of plane electrode multiple spot discharges
The processing efficiency of two-dimensional structure part can also be greatly improved.
Presently preferred embodiments of the present invention is the foregoing is only, is not intended to limit the invention, it is all in essence of the invention
Any modification, equivalent and improvement made within god and principle etc., should be included within the scope of the present invention.
Claims (9)
1. a kind of electrolysis spark discharge processing unit (plant) of use plane foil electrode, its feature includes：Fixed structure, enter
To adjusting means, the pulse power, plane foil electrode and workpiece, solution tank, feeding adjusting device is fixed on fixed structure
On, plane foil electrode is installed on feeding adjusting device lower section, and workpiece is installed in solution tank, positioned at plane foil
Base part, feeding adjusting device is driven using servomotor, and the grand feeding of electrode upright position can be realized by programme-control
Foil is set to be 5 μm -50 μm with workpiece spacing；Foil forms an electric capacity C with workpiece, and foil is distinguished with workpiece
It is the two poles of the earth of electric capacity C, the two poles of the earth are connected to form electrolytic cell with the pulse power respectively, and pulse power voltage is about 5v-100v, solution
Electrolyte is loaded with inside groove, the height of electrolyte can be adjusted by pump.
2. processing unit (plant) according to claim 1, it is characterised in that workpiece material is metal, affiliated electrolyte is passivation
Electrolyte sodium nitrate, electrolyte submergence workpiece.
3. processing unit (plant) according to claim 1 and 2, it is characterised in that plane lamina electrode is used as tool-electrode, instrument
Electrode can use zigzag or channel-shaped electrode, be clamped by being installed on the fixing device below feeding adjusting device, and preferred scheme is
Plane electrode one end is fixed on clamping device, and the other end is unlocked, rides on clamping device.
4. a kind of electrolysis electric discharge machining method of use plane foil electrode, it is characterised in that usage right requirement 1 to
Processing unit (plant) described in 3 any claims, including：(1) cell reaction produces bubble, (2) bubble coalescence to merge and insulating barrier
Formed, the formation of (3) plane electrode Bending Deformation and discharge channel, the ablation of (4) material and dish out, (5) deionization and electrode shape
Become and recover.
5. processing method according to claim 4, it is characterised in that including：
(1) cell reaction produces bubble, after cell reaction starts, hydrogen and oxygen bubble respectively in plane foil electrode and
Produced on workpiece；
(2) when supply voltage is higher than certain threshold value, the speed of the generation hydrogen of plane electrode is more than hydrogen emersion electrolyte
The speed of liquid level, hydrogen starts to be collected around in plane electrode, until being formed about a gas-insulated layer in plane electrode；
(3) this insulating barrier can block in a short time interpolar electric current cause interpolar formed high field, due to high-strength
Spending the effect of electric field makes to form electrostatic force between the two poles of the earth, and plane foil electrode is sent out in the presence of electrostatic force to workpiece direction
Raw Bending Deformation, reduces anode-cathode distance so as to electric-field intensity continues to increase between causing the two poles of the earth, when workpiece and plane electrode spacing
From it is sufficiently small when, dielectric is breakdown, produce spark discharge；
(4) instantaneous specific substantial amounts of heat is pointed out in electric discharge, the workpiece material of point of discharge is melted and gasified, while producing very big
Explosive force will be melted and the workpiece material that gasifies is dished out, and form electric discharge pit；
(5) while forming spark discharge between workpiece and electrode, the electric charge of interpolar is also released, and makes interpolar electrostatic force gradually
Reduce, the deformation of plane foil electrode also recovers therewith, the distance between workpiece and electrode is become big again, it is to avoid not
The generation of regular electric arc, it helps the discharge of scrap in electro-discharge machining.
6. the processing method according to claim 4 or 5, it is characterised in that step (1) cell reaction stage, including, pass through
Adjusting means feeds close to workpiece, and tool-electrode is immersed in electrolyte, and tool-electrode is connected with pulse power negative pole, arteries and veins
The positive pole for rushing power supply is connected with workpiece, and used as the anode of cell reaction, after the pulse power is powered, piece pole and foil are electric
Potential difference is produced between pole, cation is mobile to tool-electrode (negative electrode) in electrolyte, anion moves (anode) movement to workpiece,
Make to be chemically reacted in electrolyte；Step (2) bubble coalescence merges to be formed with insulating barrier and includes：When pulse power voltage and arteries and veins
Wide higher, when bubble produces speed to be more than certain threshold limit value, the speed of the generation hydrogen of tool-electrode is more than hydrogen emersion
The speed of liquid level of electrolyte, hydrogen starts to be collected around in tool-electrode, and bubble gradually merges after aggregation, until in instrument
Electrode is formed about a gas-insulated layer.
7. the processing method according to claim 4 or 5, it is characterised in that step (3) plane electrode Bending Deformation and electric discharge
Passage is formed, including：After interpolar forms high field, electric charge starts the parallel-plate electricity constituted in plane lamina electrode and workpiece
Container two ends are assembled, and gradually rise the voltage of interpolar, and when the voltage of interpolar reaches certain threshold value, plane lamina electrode is in
One critical equilbrium position, when electric charge continues to assemble, after voltage continues to increase, plane lamina electrode is under the driving of electrostatic force
Bending Deformation takes place, is gradually reduced electrode and the distance of workpiece, interpolar electric-field intensity while die opening is gradually reduced
Gradually increase, when interpolar electric-field intensity is sufficiently large and during sufficiently small die opening, effusion is started as the planar electrode surface of negative electrode
Electronics, quickly moves in the presence of high field between plane-parallel capacitor to the workpiece surface as anode, and electronics is in fortune
Particle in dynamic process with interpolar is collided, and contrasted between solid dielectric is ionized into cation and electronics, plane lamina electrode and work
Gas-insulated layer between part is breakdown, and discharge channel is formed between plane electrode and workpiece；The ablation of step (4) material and throwing
Go out including：After forming discharge channel between plane electrode and workpiece, the pulse power continues, to interpolar applied voltage, to make discharge channel
In electronics at a high speed to workpiece (positive pole) move, cation at a high speed to plane lamina electrode (negative pole) move, charged particle is in height
Collided in fast motion process, colliding the heat for producing makes the temperature in discharge channel quickly raise, and is pointed out instantaneously in electric discharge
Specific substantial amounts of heat, the workpiece material of point of discharge is melted and gasified, while the very big explosive force of generation will be melted and gasify
Workpiece material dish out.
8. the processing method according to claim 4 or 5, it is characterised in that step (5) deionization recovers bag with electrode deformation
Include：During interpolar formation discharge channel carries out material ablation, the electric charge on plane lamina electrode is promptly released into interpolar,
Making the voltage of interpolar reduces, and causes the electrostatic force being applied on plane lamina electrode to be also gradually reduced, when electrostatic force is less than bending
During the elastic force of cantilever, the deformation of plane lamina electrode starts to recover, and electrode is moved to the direction away from workpiece, anode-cathode distance by
Gradual change is big, and discharge channel is stretched, and the particle in passage is mutually neutralized and gradually decreased, until the state before electric discharge is returned to,
At the same time, electrolyte flows into interpolar, and making the temperature of point of discharge reduces, and washes away interpolar by the scrap dished out after ablation, makes
Interpolar returns to cell reaction state, and the discharge cycle of electrical discharge machining is electrolysed into next electrostatic drive.
9. the processing method according to claim 4 or 5, it is characterised in that first by fine electric spark linear cutter
Or fused glass pellet method processes micro-electrode on plane foil, installed using the metal bridge architecture of bending cantilever
In the lower section of feed arrangement, designed feed arrangement adjusts the grand feed motion for realizing electrode position by motor；By arteries and veins
Rush signal control switch mosfet to come between control plane foil electrode and workpiece to charge, and make company using electrostatic force
The metal bridge-type malformation for connecing the band bending cantilever of sheet metal is subjected to displacement, and realizes the Fine Feed of electrode upright position.
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