CN106736875B - A kind of processing method of sapphire dome - Google Patents
A kind of processing method of sapphire dome Download PDFInfo
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- CN106736875B CN106736875B CN201611081078.6A CN201611081078A CN106736875B CN 106736875 B CN106736875 B CN 106736875B CN 201611081078 A CN201611081078 A CN 201611081078A CN 106736875 B CN106736875 B CN 106736875B
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- grinding
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- polishing
- spill
- sapphire
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
Abstract
The invention discloses a kind of processing methods of sapphire dome.It is processed using Pneumatic Pressure double pendulum machine, selection C is to grind base material to sapphire material, compressing cloth is polishing base material, grinding uses 280# and W7 boron carbide abrasive material, polishing uses W1 diamond polishing fluid, selection C is to grind base material to sapphire material in this method, it overcomes using cast iron plate, diamond pellet etc. grinds base material and is easy the defects of passivation generates surface scratch in grinding, compression cloth is used to polish base material, it is easily-deformable thus the defects of making partial face type be deteriorated to overcome the cowling surface face type in polishing, the present invention is easier to control the surface face type of radome fairing in process and can improve processing efficiency, this method is used to process radome fairing product with high in machining efficiency, good product quality, the advantages that easily operated.
Description
Technical field
The present invention relates to a kind of processing methods of sapphire dome, belong to optical manufacturing field.
Background technique
With the rapid development of China's national defense cause, demand of the national defense industry to sapphire dome increases year by year, many institutes
Known, sapphire material hardness is high, and wear-resisting, there are anisotropy, so there are the modifications of face type difficulty, partial face type in process
The disadvantages of variation, finish do not reach requirement, and processing efficiency is low, so that the product quality processed is low, influences the detection of guided missile
Effect.Currently employed processing method is using high throwing machine grinding and polishing, and this equipment running track is single and repeats, so that producing
Product and the grinding tool always more mills of a part, the few mill of a part can make product face type and grinding tool face type in process gradually in this way
It is deteriorated, will constantly modify grinding tool to reach the type requirement of product face, the process-cycle is caused to increase；In addition, in the grinding stage,
Since lap Choice of substrate materials is improper, milling time, which has grown surface, can occur passivation phenomenon, further produce product surface
The defects of raw line, scratch, since sapphire dome hardness itself is high, the deep line of grinding stage generation, scratch
It is difficult to remove in the polishing stage, in the stages such as subsequent polishings in order to remove time that some small scratches need often very
It is long, it also will increase the process-cycle in this way；Further more, using general polishing cloth or damping in polishing phase polish mould base material
Cloth, this polishing material quality is relatively soft, and because of the anisotropy of sapphire crystal, cowling surface hardness is inconsistent, easily makes
The partial face type on sapphire dome surface is deteriorated, and with the extension of polishing cycle, partial face type becomes worse, and product reaches
Less than processing request.
Summary of the invention
Week is processed in view of the above-mentioned problems of the prior art, can effectively shorten the object of the present invention is to provide one kind
Phase is able to ascend the processing quality of sapphire dome, and the processing method for reducing the sapphire dome for the number that repairs a die.
To achieve the above object, the technical solution adopted by the present invention is that: a kind of processing method of sapphire dome, including
Following steps:
Step 1: the concave side of the good sapphire dome blank of milling is adhered into the convex of plate clamp in convex with pitch
On shape face, plate clamp bottom in convex is installed in the machine spindle of double pendulum machine after cooling；
Step 2: multiple C uniformly grinding sapphire dome convex surface: are pasted onto spill grinding tool to sapphire wafers
Concave panel on as grinding base material, and by the stylus of double pendulum machine insertion spill grinding tool mounting base I on, by spill
The concave panel of grinding tool is combined together with plate clamp in the convex of bonding sapphire dome blank, is driven using stylus recessed
Shape grinding tool is ground, and is selected 280# boron carbide first to be roughly ground as grinding agent, after thick scratch is ground away, then is used W7
Boron carbide carries out fine grinding, and fine grinding time 10h adds suspension additive in abrasive material when fine grinding and water, weight ratio are boron carbide: suspending
Additive: water=25:1:74, double pendulum machine equipment speed of mainshaft 50-60rpm when grinding, slew rate 20-35rpm, left and right slew rate difference
10-15rpm, pressure 15-18Kg；
Step 3: after the completion of grinding, unloading spill grinding tool, and sapphire dome convex surface is polished on double pendulum machine: will
Compression cloth is pasted on the concave panel of spill polishing abrasive tool as polishing base material, and the stylus of double pendulum machine insertion spill is thrown
Tarry matter has rear portion, and plate clamp in the convex of the concave panel of spill polishing abrasive tool and installation sapphire dome blank is cooperated one
It rises, drives spill polishing abrasive tool to be polished using stylus, the dispersing agent of 1vol% is added into W1 diamond polishing fluid, and instil
Sodium hydroxide is to pH value 9-9.5, and machine spindle revolving speed is 40-50rpm when polishing, slew rate 15-30rpm, and left and right slew rate differs 10-
15rpm, pressure 8-10Kg, polishing time 9h；
Step 4: after the completion of polishing, by plate clamp in convex and spill grinding tool respectively from machine spindle and stylus
It unloads, separates the sapphire dome blank for processing convex surface with plate clamp in convex, and coat protective paint on convex surface, then
Convex surface is adhered in spill on the concave panel of plate clamp with pitch, stylus is inserted into spill in the mounting base of plate clamp, starts to add
The concave surface of work sapphire dome blank；
Step 5: multiple C uniformly grinding sapphire dome concave surface: are pasted onto convex grinding tool to sapphire wafers
Convex on as grinding base material, and convex grinding tool is installed in machine spindle, will installation C to sapphire circle
The convex grinding tool convex of piece and the concave panel of plate clamp in the spill of installation sapphire dome blank are combined together,
It drives plate clamp in spill to be ground using stylus, selects 280# boron carbide to be roughly ground as grinding agent, thick scratch is ground
After grinding off, then with W7 boron carbide carry out fine grinding, fine grinding time 10h adds suspension additive and water, weight ratio in abrasive material when fine grinding
For boron carbide: suspension additive: water=25:1:74, double pendulum machine equipment speed of mainshaft 50-60rpm, slew rate 20- when grinding
35rpm, left and right slew rate differ 10-15rpm, pressure 15-18Kg；
Step 6: after the completion of grinding, unloading convex grinding tool from machine spindle, and it is whole that sapphire is polished on double pendulum machine
Stream cover concave surface: compression cloth is pasted on the convex of convex polishing abrasive tool as polishing base material, and convex is polished and is ground
Tool is installed in machine spindle, makes plate clamp in the convex of convex polishing abrasive tool and the spill of installation sapphire dome blank
Concave panel be combined together, the concave surface of plate clamp polishing sapphire dome blank in spill is driven using stylus, when polishing
The dispersing agent of 1vol% is added into W1 diamond polishing fluid, and sodium hydroxide to the pH value that instils reaches 9-9.5, equipment master when polishing
Axis revolving speed is 40-50rpm, slew rate 15-30rpm, left and right slew rate difference 10-15rpm, pressure 8-10Kg, polishing time 9h.
Preferably, double pendulum machine equipment speed of mainshaft 50rpm, slew rate in the grinding steps of the step 2 and step 5
35rpm, left and right slew rate differ 15rpm, pressure 15Kg.
Preferably, machine spindle revolving speed is 40rpm, slew rate 30rpm, a left side in the polishing step of the step 3 and step 6
Right slew rate differs 15rpm, pressure 8Kg.
Preferably, the stylus of the double pendulum machine is connected to apparatus body by Pneumatic connecting rod.Using Pneumatic Pressure, can pass through
Pressure gauge adjusts pressure size, and more accurate compared to adjusting with pouring weight moulding pressure, the operation is more convenient.
Preferably, the C to sapphire wafers diameter be 20mm, with a thickness of 10mm.It is easy to modify using such size
Disc surface curvature, and it is more permanent using the time after processing is completed.
The present invention use double pendulum Pneumatic Pressure equipment, due to equipment tool there are two balance staff and each balance slew rate it is inconsistent,
Left and right balance rotation will drive shrinking connecting-rod and make irregular stretching motion, and shrinking connecting-rod drives the stylus of front end to make nothing in turn
The movement of rule, so that the running track of grinding tool is complicated and without repeating, so that the grinding speed of workpiece and each position of abrasive surface
Rate is almost the same, and face type is held essentially constant in process for such product and grinding tool, very few modifications grinding tool in process,
And face type stablizes easily finishing；In addition it can change in process stylus in the way of Pneumatic Pressure as needed to production
The pressure on product surface so that grinding, polishing efficiency it is higher, improve processing efficiency on the whole, it is easy to operate.The present invention grinds rank
Duan Caiyong C is to grind base material to sapphire material, since C is identical as the sapphire dome crystal orientation of processing to sapphire,
Hardness is consistent, avoids the long surface of milling time that passivation phenomenon occurs, so as to avoid the generation of scratch；When W7 is refined, lapping liquid
Automatic cycle supplies, and the water and suspension additive of best proportion are added in abrasive material, improves the service efficiency and removal rate of abrasive material,
To also improve product processing efficiency；In the polishing stage, polishing fluid selects the W1 diamond polishing fluid of the dispersing agent containing 1vol%, and
Sodium hydroxide, adjustment pH value to 9-9.5 are added, mechanical polishing and chemical attack carry out simultaneously, not only improved processing efficiency but also changed
Surface quality has been apt to it, the compression cloth that when polishing selects is more much bigger than general polishing cloth surface hardness, makes to rectify in polishing process
It is consistent to cover each crystal orientation removal rate in surface, polishing time is shortened, but also product surface partial face type substantially improves, to guarantee
Product quality.
Detailed description of the invention
Fig. 1 is the structural schematic diagram on present invention grinding convex surface；
Fig. 2 is the structural schematic diagram of present invention grinding concave surface；
Fig. 3 is the schematic diagram of spill grinding tool and spill polishing abrasive tool of the present invention；
Fig. 4 is the schematic diagram of convex grinding tool and convex polishing abrasive tool of the present invention；
Fig. 5 is the schematic diagram of sapphire dome blank；
In figure, 10. sapphire dome blanks, 11. eccentric balances, 12. shrinking connecting-rods, 13. Pneumatic connecting rods, 14. styluses,
15. machine spindle, plate clamp in 20. convexs, plate clamp in 30. spills, 40. spill grinding tools, 41. mounting bases I, 50. is recessed
Shape polishing abrasive tool, 60. convex grinding tools, 70. convex polishing abrasive tools, 80.C compress cloth to sapphire wafers, 90..
Specific embodiment
The present invention is described in further detail below in conjunction with the accompanying drawings.
As shown in Figure 1, the equipment double pendulum machine that the present invention uses includes the eccentric balance 11 being symmetrical set, two bias
Balance 11 is linked together by shrinking connecting-rod 12, and rotation is driven by motor in eccentric balance 11 respectively, and left and right slew rate is different,
Left and right balance rotation will drive shrinking connecting-rod 12 and constantly make irregular stretching motion.By pneumatically connecting among shrinking connecting-rod 12
Bar 13 connects stylus 14, and the lower section of stylus 14 is machine spindle 15.
To make diameter 150mm, for losing high 26mm sapphire dome, the spherical surface body radius on sapphire dome convex surface
For SR2, the spherical surface body radius of concave surface is SR1.Product requirement: flatness 5N, local aperture 0.5N, III grade of finish.It is specific to add
Work method includes the following steps:
Step 1: the concave side of the good sapphire dome blank 10 of milling is adhered into plate clamp 20 in convex with pitch
Convex on, 20 bottom of plate clamp in convex is installed in the machine spindle 15 of double pendulum machine after cooling；
Step 2: grinding sapphire dome convex surface: as shown in Figure 1, multiple C are uniformly pasted onto sapphire wafers 80
As grinding base material on the concave panel of spill grinding tool 40, and the stylus of double pendulum machine 14 is inserted into spill grinding tool 40
Mounting base I 41 on, by the concave panel of spill grinding tool 40 and bonding sapphire dome blank 10 convex on plate clamp
20 are combined together, and drive spill grinding tool 40 to be ground using stylus 14, select 280# boron carbide as grinding agent elder generation
It is roughly ground, after thick scratch is ground away, then with W7 boron carbide carries out fine grinding, fine grinding time 10h, addition is outstanding in abrasive material when fine grinding
Floating additive and water, weight ratio are boron carbide: suspension additive: water=25:1:74, double pendulum machine equipment speed of mainshaft when grinding
50rpm, left swing slew rate 35rpm, right pendulum slew rate 20rpm, pressure 15Kg；Since there are two balance staff and each balance slew rates for equipment tool
Inconsistent, left and right balance rotation will drive shrinking connecting-rod 12 and make irregular stretching motion, shrinking connecting-rod 12 and then drive front end
Stylus 14 make irregular movement so that the running track of spill grinding tool 40 is complicated and without repeating, sapphire dome
The removal rates of each position in 10 surface of blank are almost the same, and face type is kept not substantially in process for such product and grinding tool
Become, very few modifications grinding tool in process, and face type stablizes easily finishing；
Step 3: after the completion of grinding, unloading spill grinding tool 40, and sapphire dome convex surface is polished on double pendulum machine:
Compression cloth 90 is pasted on the concave panel of spill polishing abrasive tool 50 as polishing base material, and the stylus of double pendulum machine 14 is inserted
Enter 50 rear portion of spill polishing abrasive tool, it will be in the convex of the concave panel of spill polishing abrasive tool 50 and installation sapphire dome blank 10
Plate clamp 20 is combined together, and is driven spill polishing abrasive tool 50 to be polished using stylus 14, is added into W1 diamond polishing fluid
The dispersing agent of 1vol%, and the sodium hydroxide that instils is to pH value 9-9.5, machine spindle revolving speed is 40rpm, left swing slew rate when polishing
30rpm, right pendulum slew rate 15rpm, pressure 8Kg, polishing time 9h；
Step 4: after the completion of polishing, by plate clamp 20 in convex and spill grinding tool 40 respectively from 15 He of machine spindle
It is unloaded on stylus 14, separates the sapphire dome blank 10 for processing convex surface with plate clamp 20 in convex, and applied on convex surface
Upper protective paint is then adhered on convex surface in spill on the concave panel of plate clamp 30 with pitch, and stylus 14 is inserted into plate clamp in spill
In 30 mounting base, start the concave surface for processing sapphire dome blank 10；
Step 5: grinding sapphire dome concave surface: as shown in Fig. 2, first multiple C are uniformly pasted to sapphire wafers 80
As grinding base material on the convex of convex grinding tool 60, and convex grinding tool 60 is installed to machine spindle 15
On, spill of the C to 60 convex of convex grinding tool of sapphire wafers 80 and installation sapphire dome blank 10 will be installed
The concave panel of upper plate clamp 30 is combined together, and is driven plate clamp 30 in spill to be ground using stylus 14, is selected 280# carbon
Change boron to be roughly ground as grinding agent, after thick scratch is ground away, then with W7 boron carbide carries out fine grinding, fine grinding time 10h, fine grinding
When abrasive material in add suspension additive and water, weight ratio be boron carbide: suspension additive: water=25:1:74, double pendulum machine when grinding
Machine spindle revolving speed 50rpm, left swing slew rate 35rpm, right pendulum slew rate 20rpm, pressure 15Kg；
Step 6: after the completion of grinding, unloading convex grinding tool 60 from machine spindle 15, polishes on double pendulum machine blue precious
Stone radome fairing concave surface: compression cloth 90 is pasted on the convex of convex polishing abrasive tool 70 as polishing base material, and will be convex
Shape polishing abrasive tool 70 is installed in machine spindle 15, makes the convex and installation sapphire dome blank of convex polishing abrasive tool 70
The concave panel of plate clamp 30 is combined together in 10 spill, drives the polishing of plate clamp 30 sapphire in spill whole using stylus 14
The concave surface for flowing cover blank 10, the dispersing agent of 1vol% is added when polishing into W1 diamond polishing fluid, and the sodium hydroxide that instils is to PH
Value reaches 9-9.5, and machine spindle revolving speed is 40rpm, left swing slew rate 30rpm, right pendulum slew rate 15rpm, pressure 8Kg, throwing when polishing
9h between light time.
Through detecting behind convex surface and concave surface polishing completion, the sapphire dome flatness processed using this method be can reach
2N, local aperture reach 0.1N, and finish reaches I grade, exceed product requirement.
Claims (5)
1. a kind of processing method of sapphire dome, which comprises the steps of:
Step 1: the concave side of the good sapphire dome blank (10) of milling is adhered into plate clamp in convex (20) with pitch
Convex on, plate clamp in convex (20) bottom is installed in the machine spindle (15) of double pendulum machine after cooling；
Step 2: multiple C uniformly grinding sapphire dome convex surface: are pasted onto spill grinding tool to sapphire wafers (80)
(40) it is used as grinding base material on concave panel, and the stylus of double pendulum machine (14) are inserted into the installation of spill grinding tool (40)
On I (41) of seat, by plate clamp in the convex of the concave panel of spill grinding tool (40) and bonding sapphire dome blank (10)
(20) it is combined together, drives spill grinding tool (40) to be ground using stylus (14), select 280# boron carbide to be used as and grind
Grinding agent is first roughly ground, and after thick scratch is ground away, then with W7 boron carbide carries out fine grinding, fine grinding time 10h, when fine grinding in abrasive material
Adding suspension additive and water, weight ratio is boron carbide: suspension additive: water=25:1:74, double pendulum machine equipment main shaft when grinding
Revolving speed 50-60rpm, slew rate 20-35rpm, left and right slew rate differ 10-15rpm, pressure 15-18Kg；
Step 3: after the completion of grinding, unloading spill grinding tool (40), and sapphire dome convex surface is polished on double pendulum machine: will
Compression cloth (90) is pasted on the concave panel of spill polishing abrasive tool (50) as polishing base material, and by the stylus of double pendulum machine
(14) it is inserted into spill polishing abrasive tool (50) rear portion, by the concave panel of spill polishing abrasive tool (50) and installation sapphire dome blank
(10) plate clamp (20) is combined together in convex, drives spill polishing abrasive tool (50) to be polished using stylus (14), to
Add the dispersing agent of 1vol% in W1 diamond polishing fluid, and the sodium hydroxide that instils is to pH value 9-9.5, machine spindle revolving speed when polishing
For 40-50rpm, slew rate 15-30rpm, left and right slew rate differs 10-15rpm, pressure 8-10Kg, polishing time 9h；
Step 4: after the completion of polishing, by plate clamp in convex (20) and spill polishing abrasive tool (50) respectively from machine spindle (15)
It is unloaded on stylus (14), separates the sapphire dome blank (10) for processing convex surface with plate clamp in convex (20), and
Protective paint is coated on convex surface, is then adhered to convex surface with pitch on the concave panel of plate clamp in spill (30), stylus (14) insertion
In spill in the mounting base of plate clamp (30), start the concave surface for processing sapphire dome blank (10)；
Step 5: multiple C uniformly grinding sapphire dome concave surface: are pasted onto convex grinding tool to sapphire wafers (80)
(60) as grinding base material on convex, and convex grinding tool (60) is installed on machine spindle (15), will be pacified
C is filled on convex grinding tool (60) convex of sapphire wafers (80) and the spill of installation sapphire dome blank (10)
The concave panel of plate clamp (30) is combined together, and is driven plate clamp (30) in spill to be ground using stylus (14), is selected
280# boron carbide is roughly ground as grinding agent, after thick scratch is ground away, then with W7 boron carbide carries out fine grinding, fine grinding time
10h adds suspension additive in abrasive material when fine grinding and water, weight ratio is boron carbide: suspension additive: water=25:1:74, grinding
When double pendulum machine equipment speed of mainshaft 50-60rpm, slew rate 20-35rpm, left and right slew rate differs 10-15rpm, pressure 15-18Kg；
Step 6: after the completion of grinding, unloading convex grinding tool (60) from machine spindle (15), polishes on double pendulum machine blue precious
Stone radome fairing concave surface: compression cloth (90) is pasted on the convex of convex polishing abrasive tool (70) as polishing base material, and
Convex polishing abrasive tool (70) is installed on machine spindle (15), the convex and installation sapphire of convex polishing abrasive tool (70) are made
The concave panel of plate clamp (30) is combined together in the spill of radome fairing blank (10), drives disk folder in spill using stylus (14)
Have the concave surface of (30) polishing sapphire dome blank (10), adds the dispersion of 1vol% when polishing into W1 diamond polishing fluid
Agent, and sodium hydroxide to the pH value that instils reaches 9-9.5, machine spindle revolving speed is 40-50rpm, slew rate 15-30rpm when polishing, left
Right slew rate differs 10-15rpm, pressure 8-10Kg, polishing time 9h.
2. the processing method of sapphire dome according to claim 1, which is characterized in that the step 2 and step 5
Grinding steps in double pendulum machine equipment main shaft (15) revolving speed 50rpm, slew rate 35rpm, left and right slew rate differ 15rpm, pressure 15Kg.
3. the processing method of sapphire dome according to claim 1, which is characterized in that the step 3 and step 6
Polishing step in machine spindle (15) revolving speed be 40rpm, slew rate 30rpm, left and right slew rate differ 15rpm, pressure 8Kg.
4. the processing method of sapphire dome according to claim 1, which is characterized in that the stylus of the double pendulum machine
(14) apparatus body is connected to by Pneumatic connecting rod (13).
5. the processing method of sapphire dome according to claim 1, which is characterized in that the C is to sapphire wafers
(80) diameter is 20mm, with a thickness of 10mm.
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| CN108032170B (en) * | 2017-12-29 | 2023-12-05 | 包头市金杰稀土纳米材料有限公司 | Chamfering equipment and chamfering method for small-size round hard and brittle material chips |
| CN108972162A (en) * | 2018-08-06 | 2018-12-11 | 大连理工大学 | A kind of sapphire dome plunge grinding method |
| CN110484207B (en) * | 2019-09-20 | 2020-05-29 | 江苏京晶光电科技有限公司 | Preparation method of sapphire wafer fine grinding fluid |
| CN111266933A (en) * | 2020-02-24 | 2020-06-12 | 大连理工大学 | Ultra-precision machining method and device for thin-wall hard and brittle fairing with complex shape |
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| JPH02198757A (en) * | 1989-01-23 | 1990-08-07 | Olympus Optical Co Ltd | Grinding method for lens |
| CN104907895A (en) * | 2015-06-16 | 2015-09-16 | 哈尔滨秋冠光电科技有限公司 | Method for quickly processing doubly polished sapphire wafers |
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| JP6357296B2 (en) * | 2012-02-10 | 2018-07-11 | 株式会社フジミインコーポレーテッド | Polishing composition and method for manufacturing semiconductor substrate |
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| JPH02198757A (en) * | 1989-01-23 | 1990-08-07 | Olympus Optical Co Ltd | Grinding method for lens |
| CN104907895A (en) * | 2015-06-16 | 2015-09-16 | 哈尔滨秋冠光电科技有限公司 | Method for quickly processing doubly polished sapphire wafers |
| CN104999365A (en) * | 2015-06-16 | 2015-10-28 | 东莞市中微纳米科技有限公司 | Sapphire wafer grinding and polishing method |
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