CN106736875A - A kind of processing method of sapphire dome - Google Patents
A kind of processing method of sapphire dome Download PDFInfo
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- CN106736875A CN106736875A CN201611081078.6A CN201611081078A CN106736875A CN 106736875 A CN106736875 A CN 106736875A CN 201611081078 A CN201611081078 A CN 201611081078A CN 106736875 A CN106736875 A CN 106736875A
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- grinding
- convex
- polishing
- sapphire
- spill
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
The invention discloses a kind of processing method of sapphire dome.It is processed using Pneumatic Pressure double pendulum machine, from C to sapphire material for grinding base material, compression cloth is polishing base material, grinding uses 280# and W7 boron carbide abrasive materials, polishing uses W1 diamond polishing fluids, it is grinding base material to sapphire material that C is selected in this method, overcome and use cast iron plate, diamond pellet etc. grinds base material, and in grinding, easily passivation produces the defects such as surface scratch, it is polishing base material to use compression cloth, overcome the cowling surface face type in polishing yielding so that the defect such as partial face type variation, the present invention is easier the surface face type of control radome fairing and can improve processing efficiency in process, this method be used for process radome fairing product have it is high in machining efficiency, good product quality, easily operated the advantages of.
Description
Technical field
The present invention relates to a kind of processing method of sapphire dome, belong to optical manufacturing field.
Background technology
With developing rapidly for China's national defense cause, national defense industry increases the demand of sapphire dome year by year, many institutes
Known, sapphire material hardness is high, wear-resisting, there is anisotropy, so there is the difficult modification of face type, partial face type in process
It is deteriorated, finish does not reach requirement, the low shortcoming of processing efficiency so that the product quality for processing is low, influences the detection of guided missile
Effect.Currently employed processing method is that, using throwing machine grinding and polishing high, this equipment running orbit is single and repeats so that produce
Product and the grinding tool always many mills of a part, the few mill of a part, can so make product face type and grinding tool face type in process gradually
It is deteriorated, grinding tool will be constantly repaired in order to reach the type requirement of product face, causes the process-cycle to increase；In addition, in the grinding stage,
Because lap Choice of substrate materials is improper, milling time surface long can occur passivation phenomenon, further produce product surface
The defects such as raw line, cut, due to sapphire dome, hardness is high in itself, deep line, cut that the grinding stage produces
It is difficult to remove in the polishing stage, in the stages such as follow-up polishings in order to remove time that some small cuts need often very
It is long, so can also increase the process-cycle；Further, using general polishing cloth or damping in polishing phase polish mould base material
Cloth, this polishing material quality is softer, and because of the anisotropy of sapphire crystal, cowling surface hardness is inconsistent, easily makes
The partial face type on sapphire dome surface is deteriorated, and with the extension of polishing cycle, it is worse that partial face type becomes, and product reaches
Less than processing request.
The content of the invention
For the problem that above-mentioned prior art is present, processing week can be effectively shortened it is an object of the invention to provide one kind
Phase, the crudy of sapphire dome, and the processing method for reducing the sapphire dome of the number of times that repairs a die can be lifted.
To achieve the above object, the technical solution adopted by the present invention is：A kind of processing method of sapphire dome, including
Following steps：
Step one：The concave side pitch of the good sapphire dome blank of milling is adhered into the convex of plate clamp in convex
On shape face, plate clamp bottom in convex is installed in the machine spindle of double pendulum machine after cooling；
Step 2：Grinding sapphire dome convex surface：Multiple C is uniformly pasted onto spill grinding tool to sapphire wafers
Concave panel on as grinding base material, and the stylus of double pendulum machine is inserted in the mounting seat I of spill grinding tool, by spill
The concave panel of grinding tool is combined together with plate clamp in the convex for bonding sapphire dome blank, is driven using stylus recessed
Shape grinding tool is ground, and is first roughly ground as grinding agent from 280# boron carbides, after thick cut grinds away, then uses W7
Boron carbide carries out fine grinding, and fine grinding time 10h adds suspension additive and water in abrasive material during fine grinding, weight ratio is boron carbide：Suspend
Additive：Water=25:1:74, double pendulum machine equipment speed of mainshaft 50-60rpm during grinding, slew rate 20-35rpm, left and right slew rate difference
10-15rpm, pressure 15-18Kg；
Step 3：After the completion of grinding, concave grinding tool is unloaded, sapphire dome convex surface is polished on double pendulum machine：Will
Compression cloth is pasted onto on the concave panel of spill polishing abrasive tool as polishing base material, and the stylus insertion spill of double pendulum machine is thrown
Light grinding tool rear portion, the concave panel of spill polishing abrasive tool is coordinated one with plate clamp in the convex for installing sapphire dome blank
Rise, drive spill polishing abrasive tool to be polished using stylus, to the dispersant of addition 1vol% in W1 diamond polishing fluids, and instil
To pH value 9-9.5, machine spindle rotating speed is 40-50rpm, slew rate 15-30rpm, left and right slew rate difference 10- to NaOH during polishing
15rpm, pressure 8-10Kg, polishing time 9h；
Step 4：After the completion of polishing, by plate clamp in convex and spill grinding tool difference slave unit main shaft and stylus
Unload, the sapphire dome blank for processing convex surface is separated with plate clamp in convex, and protective paint is coated on convex surface, then
Convex surface is adhered in spill on the concave panel of plate clamp with pitch, in stylus insertion spill in the mounting seat of plate clamp, starts to add
The concave surface of work sapphire dome blank；
Step 5：Grinding sapphire dome concave surface：Multiple C is uniformly pasted onto convex grinding tool to sapphire wafers
Convex on as grinding base material, and convex grinding tool is installed in machine spindle, C will be installed and justified to sapphire
The convex grinding tool convex of piece is combined together with the concave panel of plate clamp in the spill for installing sapphire dome blank,
Drive plate clamp in spill to be ground using stylus, roughly ground as grinding agent from 280# boron carbides, thick cut grinds
After grinding off, then fine grinding is carried out with W7 boron carbides, fine grinding time 10h adds suspension additive and water, weight ratio in abrasive material during fine grinding
It is boron carbide：Suspension additive：Water=25:1:74, double pendulum machine equipment speed of mainshaft 50-60rpm, slew rate 20- during grinding
35rpm, left and right slew rate difference 10-15rpm, pressure 15-18Kg；
Step 6：After the completion of grinding, convex grinding tool is unloaded on slave unit main shaft, sapphire is polished on double pendulum machine whole
Stream cover concave surface：Compression cloth is pasted onto on the convex of convex polishing abrasive tool as polishing base material, and convex is polished into mill
Tool is installed in machine spindle, makes the convex of convex polishing abrasive tool and plate clamp in the spill for installing sapphire dome blank
Concave panel be combined together, using stylus drive spill on plate clamp polish sapphire dome blank concave surface, during polishing
To the dispersant that 1vol% is added in W1 diamond polishing fluids, and NaOH to the pH value that instils reaches 9-9.5, equipment master during polishing
Rotating speed is 40-50rpm, slew rate 15-30rpm, left and right slew rate difference 10-15rpm, pressure 8-10Kg, polishing time 9h.
Preferably, double pendulum machine equipment speed of mainshaft 50rpm, slew rate in the grinding steps of the step 2 and step 5
35rpm, left and right slew rate difference 15rpm, pressure 15Kg.
Preferably, machine spindle rotating speed is 40rpm, slew rate 30rpm, a left side in the polishing step of the step 3 and step 6
Right slew rate differs 15rpm, pressure 8Kg.
Preferably, the stylus of the double pendulum machine is connected to apparatus body by Pneumatic connecting rod.Using Pneumatic Pressure, can pass through
Pressure gauge adjusts pressure size, more precisely, is operated easier compared to the regulation of pouring weight moulding pressure.
Preferably, to a diameter of 20mm of sapphire wafers, thickness is 10mm to the C.Modification is easy to using such size
Disc surface curvature, and it is more permanent to machine rear use time.
The present invention uses double pendulum Pneumatic Pressure equipment, because equipment is with two balance staffs and each balance slew rate is inconsistent,
The rotation of left and right balance can drive shrinking connecting-rod to make irregular stretching motion, shrinking connecting-rod and then drive the stylus of front end to make nothing
The movement of rule so that the running orbit of grinding tool is complicated and without repetition so that the grinding speed of workpiece and each position of abrasive surface
Rate is basically identical, and face type is held essentially constant in process for such product and grinding tool, very few modifications grinding tool in process,
And the easily finishing of face type stabilization；It can in addition contain stylus in changing process using the mode of Pneumatic Pressure as needed to producing
The pressure on product surface so that grinding, polishing efficiency are higher, and processing efficiency is improve on the whole, easy to operate.Present invention grinding rank
Duan Caiyong C are grinding base material to sapphire material, because C is identical with the sapphire dome crystal orientation of processing to sapphire,
Hardness is consistent, it is to avoid milling time surface long occurs passivation phenomenon, so as to avoid the generation of cut；When W7 is refined, lapping liquid
Automatic cycle is supplied, and the water and suspension additive of best proportion are added in abrasive material, improves the service efficiency and clearance of abrasive material,
So as to also improve Product processing efficiency；In the polishing stage, polishing fluid selects the W1 diamond polishing fluids containing 1vol% dispersants, and
Addition NaOH, adjustment pH value to 9-9.5, mechanical polishing and chemical attack are carried out simultaneously, have not only been improve processing efficiency but also have been changed
Surface quality has been apt to it, the compression cloth selected during polishing is more much bigger than general polishing cloth case hardness, makes rectification in polishing process
The cover each crystal orientation clearance in surface is consistent, shortens polishing time, also causes that product surface partial face type is substantially improved, so as to ensure
Product quality.
Brief description of the drawings
Fig. 1 is the structural representation on present invention grinding convex surface；
Fig. 2 is the structural representation of present invention grinding concave surface；
Fig. 3 is the schematic diagram of spill grinding tool of the present invention and spill polishing abrasive tool；
Fig. 4 is the schematic diagram of convex grinding tool of the present invention and convex polishing abrasive tool；
Fig. 5 is the schematic diagram of sapphire dome blank；
In figure, 10. sapphire dome blank, 11. eccentric balances, 12. shrinking connecting-rods, 13. Pneumatic connecting rods, 14. styluses,
15. machine spindles, plate clamp in 20. convexs, plate clamp in 30. spills, 40. spill grinding tools, 41. mounting seats I, 50. is recessed
Shape polishing abrasive tool, 60. convex grinding tools, 70. convex polishing abrasive tools, 80.C compresses cloth to sapphire wafers, 90..
Specific embodiment
The present invention is described in further detail below in conjunction with the accompanying drawings.
As shown in figure 1, the equipment double pendulum machine that the present invention is used includes the eccentric balance 11 being symmetrical set, two bias
Balance 11 is linked together by shrinking connecting-rod 12, and eccentric balance 11 is driven by motor rotate respectively, and left and right slew rate is different,
Left and right balance rotation can drive shrinking connecting-rod 12 constantly to make irregular stretching motion.Pass through pneumatic company in the middle of shrinking connecting-rod 12
Bar 13 connects stylus 14, and the lower section of stylus 14 is machine spindle 15.
To make diameter 150mm, as a example by mistake 26mm sapphire domes high, the spherical surface body radius on sapphire dome convex surface
It is SR2, the spherical surface body radius of concave surface is SR1.Product requirement：Flatness 5N, local aperture 0.5N, III grade of finish.It is specific to add
Work method comprises the following steps：
Step one：The concave side pitch of the good sapphire dome blank 10 of milling is adhered into plate clamp 20 in convex
Convex on, the bottom of plate clamp in convex 20 is installed in the machine spindle 15 of double pendulum machine after cooling；
Step 2：Grinding sapphire dome convex surface：As shown in figure 1, multiple C is uniformly pasted onto to sapphire wafers 80
As grinding base material on the concave panel of spill grinding tool 40, and the stylus 14 of double pendulum machine is inserted into spill grinding tool 40
Mounting seat I 41 on, by the concave panel of spill grinding tool 40 and plate clamp in the convex for bonding sapphire dome blank 10
20 are combined together, and drive spill grinding tool 40 to be ground using stylus 14, from 280# boron carbides as grinding agent elder generation
Roughly ground, after thick cut grinds away, then fine grinding is carried out with W7 boron carbides, fine grinding time 10h is added outstanding during fine grinding in abrasive material
Floating additive and water, weight ratio are boron carbide：Suspension additive：Water=25:1:74, double pendulum machine equipment speed of mainshaft during grinding
50rpm, left swing slew rate 35rpm, right pendulum slew rate 20rpm, pressure 15Kg；Because equipment has two balance staffs and each balance slew rate
Inconsistent, left and right balance rotation can drive shrinking connecting-rod 12 to make irregular stretching motion, shrinking connecting-rod 12 and then drive front end
Stylus 14 make irregular movement so that the running orbit of spill grinding tool 40 is complicated and without repeating, sapphire dome
The removal rates of each position of surface of blank 10 are basically identical, and face type keeps not substantially in process for such product and grinding tool
Become, very few modifications grinding tool in process, and the easily finishing of face type stabilization；
Step 3：After the completion of grinding, concave grinding tool 40 is unloaded, sapphire dome convex surface is polished on double pendulum machine：
Compression cloth 90 is pasted onto on the concave panel of spill polishing abrasive tool 50 as polishing base material, and the stylus 14 of double pendulum machine is inserted
Enter the rear portion of spill polishing abrasive tool 50, in the convex by the concave panel of spill polishing abrasive tool 50 with installation sapphire dome blank 10
Plate clamp 20 is combined together, and drives spill polishing abrasive tool 50 to be polished using stylus 14, is added in W1 diamond polishing fluids
The dispersant of 1vol%, and the NaOH to pH value 9-9.5 that instils, machine spindle rotating speed is 40rpm, left swing slew rate during polishing
30rpm, right pendulum slew rate 15rpm, pressure 8Kg, polishing time 9h；
Step 4：After the completion of polishing, plate clamp in convex 20 and spill grinding tool 40 are distinguished into the He of slave unit main shaft 15
Unloaded on stylus 14, the sapphire dome blank 10 for processing convex surface is separated with plate clamp in convex 20, and applied on convex surface
Upper protective paint, is then adhered in spill on the concave panel of plate clamp 30 convex surface with pitch, plate clamp in the insertion spill of stylus 14
In 30 mounting seat, start to process the concave surface of sapphire dome blank 10；
Step 5：Grinding sapphire dome concave surface：As shown in Fig. 2 first multiple C is uniformly pasted to sapphire wafers 80
As grinding base material on the convex of convex grinding tool 60, and convex grinding tool 60 is installed to machine spindle 15
On, convex grinding tool 60 convex and the spill of installing sapphire dome blank 10 of the C to sapphire wafers 80 will be installed
The concave panel of upper plate clamp 30 is combined together, and drives plate clamp 30 in spill to be ground using stylus 14, from 280# carbon
Change boron to be roughly ground as grinding agent, after thick cut grinds away, then fine grinding, fine grinding time 10h, fine grinding are carried out with W7 boron carbides
When abrasive material in add suspension additive and water, weight ratio be boron carbide：Suspension additive：Water=25:1:74, double pendulum machine during grinding
Machine spindle rotating speed 50rpm, left swing slew rate 35rpm, right pendulum slew rate 20rpm, pressure 15Kg；
Step 6：After the completion of grinding, convex grinding tool 60 is unloaded on slave unit main shaft 15, polished on double pendulum machine blue precious
Stone radome fairing concave surface：Compression cloth 90 is pasted onto on the convex of convex polishing abrasive tool 70 as polishing base material, and will be convex
Shape polishing abrasive tool 70 is installed in machine spindle 15, is made the convex of convex polishing abrasive tool 70 and is installed sapphire dome blank
The concave panel of plate clamp 30 is combined together in 10 spill, drives the polishing of plate clamp 30 sapphire in spill whole using stylus 14
The concave surface of stream cover blank 10, to the dispersant that 1vol% is added in W1 diamond polishing fluids, and the NaOH to PH that instils during polishing
Value reaches 9-9.5, and machine spindle rotating speed is 40rpm, left swing slew rate 30rpm, right pendulum slew rate 15rpm, pressure 8Kg during polishing, is thrown
Light time 9h.
After the completion of convex surface and concave surface polishing after testing, the sapphire dome flatness processed using this method can reach
2N, local aperture reaches 0.1N, and finish reaches I grade, beyond product requirement.
Claims (5)
1. a kind of processing method of sapphire dome, it is characterised in that comprise the following steps：
Step one：The concave side pitch of the good sapphire dome blank (10) of milling is adhered into plate clamp in convex (20)
Convex on, plate clamp in convex (20) bottom is installed in the machine spindle of double pendulum machine (15) after cooling；
Step 2：Grinding sapphire dome convex surface：Multiple C is uniformly pasted onto spill grinding tool to sapphire wafers (80)
(40) as grinding base material on concave panel, and the stylus (14) of double pendulum machine is inserted the installation of spill grinding tool (40)
On seat I (41), by the concave panel of spill grinding tool (40) and plate clamp in the convex for bonding sapphire dome blank (10)
(20) it is combined together, drives spill grinding tool (40) to be ground using stylus (14), from 280# boron carbides as grinding
Grinding agent is first roughly ground, and after thick cut grinds away, then fine grinding, fine grinding time 10h, during fine grinding in abrasive material is carried out with W7 boron carbides
Addition suspension additive and water, weight ratio are boron carbide：Suspension additive：Water=25:1:74, double pendulum machine equipment main shaft during grinding
Rotating speed 50-60rpm, slew rate 20-35rpm, left and right slew rate difference 10-15rpm, pressure 15-18Kg；
Step 3：After the completion of grinding, concave grinding tool (40) is unloaded, sapphire dome convex surface is polished on double pendulum machine：Will
Compression cloth (90) is pasted onto on the concave panel of spill polishing abrasive tool (50) as polishing base material, and by the stylus of double pendulum machine
(14) spill polishing abrasive tool (50) rear portion is inserted, by the concave panel of spill polishing abrasive tool (50) and installation sapphire dome blank
(10) plate clamp (20) is combined together in convex, drives spill polishing abrasive tool (50) to be polished using stylus (14), to
The dispersant of 1vol%, and the NaOH to pH value 9-9.5 that instils, machine spindle rotating speed during polishing are added in W1 diamond polishing fluids
It is 40-50rpm, slew rate 15-30rpm, left and right slew rate difference 10-15rpm, pressure 8-10Kg, polishing time 9h；
Step 4：After the completion of polishing, by plate clamp in convex (20) and spill grinding tool (40) difference slave unit main shaft (15)
Unloaded with stylus (14), the sapphire dome blank (10) for processing convex surface is separated with plate clamp in convex (20), and
Protective paint is coated on convex surface, then convex surface is adhered on the concave panel of plate clamp in spill (30) with pitch, stylus (14) insertion
In spill in the mounting seat of plate clamp (30), start to process the concave surface of sapphire dome blank (10)；
Step 5：Grinding sapphire dome concave surface：Multiple C is uniformly pasted onto convex grinding tool to sapphire wafers (80)
(60) as grinding base material on convex, and convex grinding tool (60) is installed in machine spindle (15), will be pacified
Dress C is on convex grinding tool (60) convex of sapphire wafers (80) and the spill of installation sapphire dome blank (10)
The concave panel of plate clamp (30) is combined together, and drives plate clamp (30) in spill to be ground using stylus (14), selects
280# boron carbides are roughly ground as grinding agent, after thick cut grinds away, then fine grinding, fine grinding time are carried out with W7 boron carbides
10h, adds suspension additive and water in abrasive material during fine grinding, weight ratio is boron carbide：Suspension additive：Water=25:1:74, grinding
When double pendulum machine equipment speed of mainshaft 50-60rpm, slew rate 20-35rpm, left and right slew rate difference 10-15rpm, pressure 15-18Kg；
Step 6：After the completion of grinding, convex grinding tool (60) is unloaded on slave unit main shaft (15), polished on double pendulum machine blue precious
Stone radome fairing concave surface：Compression cloth (90) is pasted onto on the convex of convex polishing abrasive tool (70) as polishing base material, and
Convex polishing abrasive tool (70) is installed in machine spindle (15), is made the convex of convex polishing abrasive tool (70) and sapphire is installed
The concave panel of plate clamp (30) is combined together in the spill of radome fairing blank (10), and disk folder in spill is driven using stylus (14)
The concave surface of tool (30) polishing sapphire dome blank (10), to the dispersion that 1vol% is added in W1 diamond polishing fluids during polishing
Agent, and NaOH to the pH value that instils reaches 9-9.5, machine spindle rotating speed is 40-50rpm, slew rate 15-30rpm, a left side during polishing
Right slew rate differs 10-15rpm, pressure 8-10Kg, polishing time 9h.
2. the processing method of sapphire dome according to claim 1, it is characterised in that the step 2 and step 5
Grinding steps in double pendulum machine equipment main shaft (15) rotating speed 50rpm, slew rate 35rpm, left and right slew rate difference 15rpm, pressure 15Kg.
3. the processing method of sapphire dome according to claim 1, it is characterised in that the step 3 and step 6
Polishing step in machine spindle (15) rotating speed be 40rpm, slew rate 30rpm, left and right slew rate difference 15rpm, pressure 8Kg.
4. the processing method of sapphire dome according to claim 1, it is characterised in that the stylus of the double pendulum machine
(14) apparatus body is connected to by Pneumatic connecting rod (13).
5. the processing method of sapphire dome according to claim 1, it is characterised in that the C is to sapphire wafers
(80) a diameter of 20mm, thickness is 10mm.
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| CN201611081078.6A CN106736875B (en) | 2016-11-30 | 2016-11-30 | A kind of processing method of sapphire dome |
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| CN201611081078.6A CN106736875B (en) | 2016-11-30 | 2016-11-30 | A kind of processing method of sapphire dome |
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| CN108032170A (en) * | 2017-12-29 | 2018-05-15 | 包头市杰明纳光电科技有限公司 | A kind of the bevelling equipment and its bevelling method of small size circle hard brittle material piece |
| CN108972162A (en) * | 2018-08-06 | 2018-12-11 | 大连理工大学 | A kind of sapphire dome plunge grinding method |
| CN110484207A (en) * | 2019-09-20 | 2019-11-22 | 江苏京晶光电科技有限公司 | A kind of preparation method of sapphire wafer fine grinding lapping liquid |
| CN111266933A (en) * | 2020-02-24 | 2020-06-12 | 大连理工大学 | Ultra-precision machining method and device for thin-wall hard and brittle fairing with complex shape |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN108032170B (en) * | 2017-12-29 | 2023-12-05 | 包头市金杰稀土纳米材料有限公司 | Chamfering equipment and chamfering method for small-size round hard and brittle material chips |
| CN108972162A (en) * | 2018-08-06 | 2018-12-11 | 大连理工大学 | A kind of sapphire dome plunge grinding method |
| CN110484207A (en) * | 2019-09-20 | 2019-11-22 | 江苏京晶光电科技有限公司 | A kind of preparation method of sapphire wafer fine grinding lapping liquid |
| CN111266933A (en) * | 2020-02-24 | 2020-06-12 | 大连理工大学 | Ultra-precision machining method and device for thin-wall hard and brittle fairing with complex shape |
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| Publication number | Publication date |
|---|---|
| CN106736875B (en) | 2019-01-11 |
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