CN106663841A - 三维薄膜电池 - Google Patents

三维薄膜电池 Download PDF

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Publication number
CN106663841A
CN106663841A CN201580044474.9A CN201580044474A CN106663841A CN 106663841 A CN106663841 A CN 106663841A CN 201580044474 A CN201580044474 A CN 201580044474A CN 106663841 A CN106663841 A CN 106663841A
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CN
China
Prior art keywords
layer
substrate
fcc
electrode layer
thin film
Prior art date
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Pending
Application number
CN201580044474.9A
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English (en)
Chinese (zh)
Inventor
宋道英
秉圣·利奥·郭
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Applied Materials Inc
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Applied Materials Inc
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Publication of CN106663841A publication Critical patent/CN106663841A/zh
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00Electrodes
    • H01M4/02Electrodes composed of, or comprising, active material
    • H01M4/64Carriers or collectors
    • H01M4/70Carriers or collectors characterised by shape or form
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M10/00Secondary cells; Manufacture thereof
    • H01M10/04Construction or manufacture in general
    • H01M10/0436Small-sized flat cells or batteries for portable equipment
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M10/00Secondary cells; Manufacture thereof
    • H01M10/05Accumulators with non-aqueous electrolyte
    • H01M10/052Li-accumulators
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M10/00Secondary cells; Manufacture thereof
    • H01M10/05Accumulators with non-aqueous electrolyte
    • H01M10/056Accumulators with non-aqueous electrolyte characterised by the materials used as electrolytes, e.g. mixed inorganic/organic electrolytes
    • H01M10/0561Accumulators with non-aqueous electrolyte characterised by the materials used as electrolytes, e.g. mixed inorganic/organic electrolytes the electrolyte being constituted of inorganic materials only
    • H01M10/0562Solid materials
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M10/00Secondary cells; Manufacture thereof
    • H01M10/05Accumulators with non-aqueous electrolyte
    • H01M10/058Construction or manufacture
    • H01M10/0585Construction or manufacture of accumulators having only flat construction elements, i.e. flat positive electrodes, flat negative electrodes and flat separators
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00Electrodes
    • H01M4/02Electrodes composed of, or comprising, active material
    • H01M4/04Processes of manufacture in general
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00Electrodes
    • H01M4/02Electrodes composed of, or comprising, active material
    • H01M4/04Processes of manufacture in general
    • H01M4/0402Methods of deposition of the material
    • H01M4/0404Methods of deposition of the material by coating on electrode collectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00Electrodes
    • H01M4/02Electrodes composed of, or comprising, active material
    • H01M4/13Electrodes for accumulators with non-aqueous electrolyte, e.g. for lithium-accumulators; Processes of manufacture thereof
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00Electrodes
    • H01M4/02Electrodes composed of, or comprising, active material
    • H01M4/13Electrodes for accumulators with non-aqueous electrolyte, e.g. for lithium-accumulators; Processes of manufacture thereof
    • H01M4/139Processes of manufacture
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M2300/00Electrolytes
    • H01M2300/0017Non-aqueous electrolytes
    • H01M2300/0065Solid electrolytes
    • H01M2300/0068Solid electrolytes inorganic
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M2300/00Electrolytes
    • H01M2300/0017Non-aqueous electrolytes
    • H01M2300/0065Solid electrolytes
    • H01M2300/0068Solid electrolytes inorganic
    • H01M2300/0071Oxides
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00Electrodes
    • H01M4/02Electrodes composed of, or comprising, active material
    • H01M4/04Processes of manufacture in general
    • H01M4/0402Methods of deposition of the material
    • H01M4/0421Methods of deposition of the material involving vapour deposition
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00Electrodes
    • H01M4/02Electrodes composed of, or comprising, active material
    • H01M4/04Processes of manufacture in general
    • H01M4/0402Methods of deposition of the material
    • H01M4/0421Methods of deposition of the material involving vapour deposition
    • H01M4/0423Physical vapour deposition
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00Electrodes
    • H01M4/02Electrodes composed of, or comprising, active material
    • H01M4/04Processes of manufacture in general
    • H01M4/0402Methods of deposition of the material
    • H01M4/0421Methods of deposition of the material involving vapour deposition
    • H01M4/0423Physical vapour deposition
    • H01M4/0426Sputtering
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00Electrodes
    • H01M4/02Electrodes composed of, or comprising, active material
    • H01M4/04Processes of manufacture in general
    • H01M4/0402Methods of deposition of the material
    • H01M4/0421Methods of deposition of the material involving vapour deposition
    • H01M4/0428Chemical vapour deposition
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/10Energy storage using batteries
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

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  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Inorganic Chemistry (AREA)
  • Secondary Cells (AREA)
  • Cell Electrode Carriers And Collectors (AREA)
CN201580044474.9A 2014-08-27 2015-08-27 三维薄膜电池 Pending CN106663841A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201462042557P 2014-08-27 2014-08-27
US62/042,557 2014-08-27
PCT/US2015/047286 WO2016033379A1 (en) 2014-08-27 2015-08-27 Three-dimensional thin film battery

Publications (1)

Publication Number Publication Date
CN106663841A true CN106663841A (zh) 2017-05-10

Family

ID=55400610

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201580044474.9A Pending CN106663841A (zh) 2014-08-27 2015-08-27 三维薄膜电池

Country Status (6)

Country Link
EP (1) EP3186850A4 (enExample)
JP (1) JP2017530518A (enExample)
KR (1) KR20170044730A (enExample)
CN (1) CN106663841A (enExample)
TW (1) TW201622228A (enExample)
WO (1) WO2016033379A1 (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109390627A (zh) * 2017-08-04 2019-02-26 三星电子株式会社 固体电解质、制备其的方法、和包括固体电解质的锂电池
CN109755615A (zh) * 2019-01-24 2019-05-14 深圳市致远动力科技有限公司 具有三维微纳结构的全固态薄膜燃料电池的制备方法
CN111682200A (zh) * 2020-07-14 2020-09-18 万华化学集团股份有限公司 用于锂离子电池的正极材料及其制备方法

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20170301926A1 (en) * 2016-04-14 2017-10-19 Applied Materials, Inc. System and method for maskless thin film battery fabrication
KR102054326B1 (ko) * 2016-08-25 2019-12-11 주식회사 엘지화학 미세 홀들을 포함하고 있는 이차전지용 전극
US10431847B2 (en) 2016-09-19 2019-10-01 International Business Machines Corporation Stacked film battery architecture
US20180287185A1 (en) * 2017-03-30 2018-10-04 International Business Machines Corporation Three-dimensional thin-film battery device
US10622680B2 (en) 2017-04-06 2020-04-14 International Business Machines Corporation High charge rate, large capacity, solid-state battery
DE102017218130A1 (de) 2017-10-11 2019-04-11 Robert Bosch Gmbh Verfahren zur Herstellung eines Stromableiters, Elektrode und Batteriezelle
FR3109944B1 (fr) * 2020-05-11 2022-08-12 Accumulateurs Fixes Traitement d’une surface de lithium par procédé laser

Citations (5)

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Publication number Priority date Publication date Assignee Title
US6495283B1 (en) * 1999-05-11 2002-12-17 Korea Institute Of Science And Technology Battery with trench structure and fabrication method thereof
US20080050656A1 (en) * 2006-08-25 2008-02-28 Eisenbeiser Kurt W Thin film battery having textured layer
KR20090062409A (ko) * 2007-12-13 2009-06-17 지에스나노텍 주식회사 전극의 표면적 및 전극과 전해질의 접촉면적을 증가시킨박막형 전지 및 그의 제조방법
US20100035152A1 (en) * 2008-08-05 2010-02-11 Sakti3, Inc. Electrochemical cell including functionally graded and architectured components and methods
CN103367680A (zh) * 2012-03-28 2013-10-23 国际商业机器公司 与cmos器件集成的三维固态电池

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JP2000100443A (ja) * 1998-09-25 2000-04-07 Mitsubishi Chemicals Corp 二次電池用電極基材フィルム及び二次電池
JP2005108521A (ja) * 2003-09-29 2005-04-21 Hitachi Maxell Ltd 薄膜電極とその製造方法およびその薄膜電極を用いたリチウム二次電池
US7901829B2 (en) * 2005-09-13 2011-03-08 3M Innovative Properties Company Enhanced catalyst interface for membrane electrode assembly
US20070172735A1 (en) * 2006-01-26 2007-07-26 David R. Hall Thin-film Battery
CN102290605A (zh) * 2006-07-18 2011-12-21 西姆贝特公司 用于固态微电池光刻制造、切单和钝化的方法和设备
JP2009289585A (ja) * 2008-05-29 2009-12-10 Sony Corp 負極および二次電池
DE102010029060A1 (de) * 2010-05-18 2011-11-24 Robert Bosch Gmbh Verfahren zur Herstellung einer Dünnschichtbatterie und entsprechende Dünnschichtbatterie
JP5666839B2 (ja) * 2010-06-30 2015-02-12 古河電気工業株式会社 2次電池用負極、負極集電体、2次電池及びこれらの製造方法
JP6049708B2 (ja) * 2011-06-17 2016-12-21 アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated マスクレス電解質堆積による薄膜バッテリ製造
JP2014032893A (ja) * 2012-08-06 2014-02-20 Sharp Corp 薄膜電池

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6495283B1 (en) * 1999-05-11 2002-12-17 Korea Institute Of Science And Technology Battery with trench structure and fabrication method thereof
US20080050656A1 (en) * 2006-08-25 2008-02-28 Eisenbeiser Kurt W Thin film battery having textured layer
KR20090062409A (ko) * 2007-12-13 2009-06-17 지에스나노텍 주식회사 전극의 표면적 및 전극과 전해질의 접촉면적을 증가시킨박막형 전지 및 그의 제조방법
US20100035152A1 (en) * 2008-08-05 2010-02-11 Sakti3, Inc. Electrochemical cell including functionally graded and architectured components and methods
CN103367680A (zh) * 2012-03-28 2013-10-23 国际商业机器公司 与cmos器件集成的三维固态电池

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109390627A (zh) * 2017-08-04 2019-02-26 三星电子株式会社 固体电解质、制备其的方法、和包括固体电解质的锂电池
CN109390627B (zh) * 2017-08-04 2023-10-20 三星电子株式会社 固体电解质、制备其的方法、和包括固体电解质的锂电池
US12476277B2 (en) 2017-08-04 2025-11-18 Samsung Electronics Co., Ltd. Solid electrolyte, method of preparing the same, and lithium battery including the solid electrolyte
CN109755615A (zh) * 2019-01-24 2019-05-14 深圳市致远动力科技有限公司 具有三维微纳结构的全固态薄膜燃料电池的制备方法
CN111682200A (zh) * 2020-07-14 2020-09-18 万华化学集团股份有限公司 用于锂离子电池的正极材料及其制备方法

Also Published As

Publication number Publication date
JP2017530518A (ja) 2017-10-12
TW201622228A (zh) 2016-06-16
EP3186850A4 (en) 2018-01-24
WO2016033379A1 (en) 2016-03-03
EP3186850A1 (en) 2017-07-05
KR20170044730A (ko) 2017-04-25

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Application publication date: 20170510