EP3186850A4 - Three-dimensional thin film battery - Google Patents

Three-dimensional thin film battery Download PDF

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Publication number
EP3186850A4
EP3186850A4 EP15835274.0A EP15835274A EP3186850A4 EP 3186850 A4 EP3186850 A4 EP 3186850A4 EP 15835274 A EP15835274 A EP 15835274A EP 3186850 A4 EP3186850 A4 EP 3186850A4
Authority
EP
European Patent Office
Prior art keywords
thin film
film battery
dimensional thin
dimensional
battery
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP15835274.0A
Other languages
German (de)
French (fr)
Other versions
EP3186850A1 (en
Inventor
Daoying SONG
Byung Sung Leo Kwak
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applied Materials Inc
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Publication of EP3186850A1 publication Critical patent/EP3186850A1/en
Publication of EP3186850A4 publication Critical patent/EP3186850A4/en
Withdrawn legal-status Critical Current

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Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00Electrodes
    • H01M4/02Electrodes composed of, or comprising, active material
    • H01M4/64Carriers or collectors
    • H01M4/70Carriers or collectors characterised by shape or form
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M10/00Secondary cells; Manufacture thereof
    • H01M10/04Construction or manufacture in general
    • H01M10/0436Small-sized flat cells or batteries for portable equipment
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M10/00Secondary cells; Manufacture thereof
    • H01M10/05Accumulators with non-aqueous electrolyte
    • H01M10/052Li-accumulators
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M10/00Secondary cells; Manufacture thereof
    • H01M10/05Accumulators with non-aqueous electrolyte
    • H01M10/056Accumulators with non-aqueous electrolyte characterised by the materials used as electrolytes, e.g. mixed inorganic/organic electrolytes
    • H01M10/0561Accumulators with non-aqueous electrolyte characterised by the materials used as electrolytes, e.g. mixed inorganic/organic electrolytes the electrolyte being constituted of inorganic materials only
    • H01M10/0562Solid materials
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M10/00Secondary cells; Manufacture thereof
    • H01M10/05Accumulators with non-aqueous electrolyte
    • H01M10/058Construction or manufacture
    • H01M10/0585Construction or manufacture of accumulators having only flat construction elements, i.e. flat positive electrodes, flat negative electrodes and flat separators
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00Electrodes
    • H01M4/02Electrodes composed of, or comprising, active material
    • H01M4/04Processes of manufacture in general
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00Electrodes
    • H01M4/02Electrodes composed of, or comprising, active material
    • H01M4/04Processes of manufacture in general
    • H01M4/0402Methods of deposition of the material
    • H01M4/0404Methods of deposition of the material by coating on electrode collectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00Electrodes
    • H01M4/02Electrodes composed of, or comprising, active material
    • H01M4/13Electrodes for accumulators with non-aqueous electrolyte, e.g. for lithium-accumulators; Processes of manufacture thereof
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00Electrodes
    • H01M4/02Electrodes composed of, or comprising, active material
    • H01M4/13Electrodes for accumulators with non-aqueous electrolyte, e.g. for lithium-accumulators; Processes of manufacture thereof
    • H01M4/139Processes of manufacture
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M2300/00Electrolytes
    • H01M2300/0017Non-aqueous electrolytes
    • H01M2300/0065Solid electrolytes
    • H01M2300/0068Solid electrolytes inorganic
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M2300/00Electrolytes
    • H01M2300/0017Non-aqueous electrolytes
    • H01M2300/0065Solid electrolytes
    • H01M2300/0068Solid electrolytes inorganic
    • H01M2300/0071Oxides
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00Electrodes
    • H01M4/02Electrodes composed of, or comprising, active material
    • H01M4/04Processes of manufacture in general
    • H01M4/0402Methods of deposition of the material
    • H01M4/0421Methods of deposition of the material involving vapour deposition
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00Electrodes
    • H01M4/02Electrodes composed of, or comprising, active material
    • H01M4/04Processes of manufacture in general
    • H01M4/0402Methods of deposition of the material
    • H01M4/0421Methods of deposition of the material involving vapour deposition
    • H01M4/0423Physical vapour deposition
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00Electrodes
    • H01M4/02Electrodes composed of, or comprising, active material
    • H01M4/04Processes of manufacture in general
    • H01M4/0402Methods of deposition of the material
    • H01M4/0421Methods of deposition of the material involving vapour deposition
    • H01M4/0423Physical vapour deposition
    • H01M4/0426Sputtering
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00Electrodes
    • H01M4/02Electrodes composed of, or comprising, active material
    • H01M4/04Processes of manufacture in general
    • H01M4/0402Methods of deposition of the material
    • H01M4/0421Methods of deposition of the material involving vapour deposition
    • H01M4/0428Chemical vapour deposition
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/10Energy storage using batteries
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Inorganic Chemistry (AREA)
  • Secondary Cells (AREA)
  • Cell Electrode Carriers And Collectors (AREA)
EP15835274.0A 2014-08-27 2015-08-27 Three-dimensional thin film battery Withdrawn EP3186850A4 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201462042557P 2014-08-27 2014-08-27
PCT/US2015/047286 WO2016033379A1 (en) 2014-08-27 2015-08-27 Three-dimensional thin film battery

Publications (2)

Publication Number Publication Date
EP3186850A1 EP3186850A1 (en) 2017-07-05
EP3186850A4 true EP3186850A4 (en) 2018-01-24

Family

ID=55400610

Family Applications (1)

Application Number Title Priority Date Filing Date
EP15835274.0A Withdrawn EP3186850A4 (en) 2014-08-27 2015-08-27 Three-dimensional thin film battery

Country Status (6)

Country Link
EP (1) EP3186850A4 (en)
JP (1) JP2017530518A (en)
KR (1) KR20170044730A (en)
CN (1) CN106663841A (en)
TW (1) TW201622228A (en)
WO (1) WO2016033379A1 (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20170301892A1 (en) 2016-04-14 2017-10-19 Applied Materials, Inc. Multilayer thin film device encapsulation using soft and pliable layer first
KR102054326B1 (en) * 2016-08-25 2019-12-11 주식회사 엘지화학 Electrode for Secondary Battery Having Fine Holes
US10431847B2 (en) 2016-09-19 2019-10-01 International Business Machines Corporation Stacked film battery architecture
US20180287185A1 (en) * 2017-03-30 2018-10-04 International Business Machines Corporation Three-dimensional thin-film battery device
US10622680B2 (en) 2017-04-06 2020-04-14 International Business Machines Corporation High charge rate, large capacity, solid-state battery
KR20190015134A (en) * 2017-08-04 2019-02-13 삼성전자주식회사 Solid electrolyte, preparing method thereof, and lithium battery comprising the solid electrolyte
DE102017218130A1 (en) 2017-10-11 2019-04-11 Robert Bosch Gmbh Method for producing a current conductor, electrode and battery cell
CN109755615B (en) * 2019-01-24 2021-05-28 深圳市致远动力科技有限公司 Preparation method of all-solid-state thin film fuel cell with three-dimensional micro-nano structure
CN111682200B (en) * 2020-07-14 2021-10-22 万华化学集团股份有限公司 Positive electrode material for lithium ion battery and preparation method thereof

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6495283B1 (en) * 1999-05-11 2002-12-17 Korea Institute Of Science And Technology Battery with trench structure and fabrication method thereof
US20080050656A1 (en) * 2006-08-25 2008-02-28 Eisenbeiser Kurt W Thin film battery having textured layer
KR20090062409A (en) * 2007-12-13 2009-06-17 지에스나노텍 주식회사 Thin film battery having enhanced surface area of electrode and enhanced contact area between electrode and electrolyte and method for producing the same
US20100035152A1 (en) * 2008-08-05 2010-02-11 Sakti3, Inc. Electrochemical cell including functionally graded and architectured components and methods
US20130260183A1 (en) * 2012-03-28 2013-10-03 International Business Machines Corporation Three dimensional solid-state battery integrated with cmos devices

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000100443A (en) * 1998-09-25 2000-04-07 Mitsubishi Chemicals Corp Electrode base material film for secondary battery and secondary battery
JP2005108521A (en) * 2003-09-29 2005-04-21 Hitachi Maxell Ltd Thin film electrode, manufacturing method of the same, and lithium secondary battery using the thin film electrode
US7901829B2 (en) * 2005-09-13 2011-03-08 3M Innovative Properties Company Enhanced catalyst interface for membrane electrode assembly
US20070172735A1 (en) * 2006-01-26 2007-07-26 David R. Hall Thin-film Battery
WO2008011061A1 (en) * 2006-07-18 2008-01-24 Cymbet Corporation Method and apparatus for solid-state microbattery photolithographic manufacture, singulation and passivation
JP2009289585A (en) * 2008-05-29 2009-12-10 Sony Corp Negative electrode, and secondary battery
DE102010029060A1 (en) * 2010-05-18 2011-11-24 Robert Bosch Gmbh Method for manufacturing thin film battery e.g. lithium ion battery, involves successively applying insulation layer and current collector layers on substrate, and separating different areas from previously applied layers via laser beam
JP5666839B2 (en) * 2010-06-30 2015-02-12 古河電気工業株式会社 Negative electrode for secondary battery, negative electrode current collector, secondary battery, and production method thereof
WO2012173874A2 (en) * 2011-06-17 2012-12-20 Applied Materials, Inc. Thin film battery fabrication with mask-less electrolyte deposition
JP2014032893A (en) * 2012-08-06 2014-02-20 Sharp Corp Thin film battery

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6495283B1 (en) * 1999-05-11 2002-12-17 Korea Institute Of Science And Technology Battery with trench structure and fabrication method thereof
US20080050656A1 (en) * 2006-08-25 2008-02-28 Eisenbeiser Kurt W Thin film battery having textured layer
KR20090062409A (en) * 2007-12-13 2009-06-17 지에스나노텍 주식회사 Thin film battery having enhanced surface area of electrode and enhanced contact area between electrode and electrolyte and method for producing the same
US20100035152A1 (en) * 2008-08-05 2010-02-11 Sakti3, Inc. Electrochemical cell including functionally graded and architectured components and methods
US20130260183A1 (en) * 2012-03-28 2013-10-03 International Business Machines Corporation Three dimensional solid-state battery integrated with cmos devices

Also Published As

Publication number Publication date
JP2017530518A (en) 2017-10-12
TW201622228A (en) 2016-06-16
CN106663841A (en) 2017-05-10
KR20170044730A (en) 2017-04-25
WO2016033379A1 (en) 2016-03-03
EP3186850A1 (en) 2017-07-05

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Ipc: H01M 4/13 20100101ALI20171219BHEP

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