US20110217578A1 - Method for high volume manufacture of electrochemical cells using physical vapor deposition - Google Patents

Method for high volume manufacture of electrochemical cells using physical vapor deposition Download PDF

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US20110217578A1
US20110217578A1 US13/103,008 US201113103008A US2011217578A1 US 20110217578 A1 US20110217578 A1 US 20110217578A1 US 201113103008 A US201113103008 A US 201113103008A US 2011217578 A1 US2011217578 A1 US 2011217578A1
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material
substrate
lithium
electrode layer
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Fabio Albano
Chia-Wei Wang
Ann Marie Sastry
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Sakti3 Inc
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Sakti3 Inc
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Priority to US12/484,966 priority patent/US9249502B2/en
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/54Apparatus specially adapted for continuous coating
    • C23C16/545Apparatus specially adapted for continuous coating for coating elongated substrates
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M10/00Secondary cells; Manufacture thereof
    • H01M10/05Accumulators with non-aqueous electrolyte
    • H01M10/052Li-accumulators
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M10/00Secondary cells; Manufacture thereof
    • H01M10/05Accumulators with non-aqueous electrolyte
    • H01M10/058Construction or manufacture
    • H01M10/0587Construction or manufacture of accumulators having only wound construction elements, i.e. wound positive electrodes, wound negative electrodes and wound separators
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00Electrodes
    • H01M4/02Electrodes composed of or comprising active material
    • H01M4/04Processes of manufacture in general
    • H01M4/0402Methods of deposition of the material
    • H01M4/0421Methods of deposition of the material involving vapour deposition
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00Electrodes
    • H01M4/02Electrodes composed of or comprising active material
    • H01M4/13Electrodes for accumulators with non-aqueous electrolyte, e.g. for lithium-accumulators; Processes of manufacture thereof
    • H01M4/139Processes of manufacture
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M10/00Secondary cells; Manufacture thereof
    • H01M10/05Accumulators with non-aqueous electrolyte
    • H01M10/056Accumulators with non-aqueous electrolyte characterised by the materials used as electrolytes, e.g. mixed inorganic/organic electrolytes
    • H01M10/0561Accumulators with non-aqueous electrolyte characterised by the materials used as electrolytes, e.g. mixed inorganic/organic electrolytes the electrolyte being constituted of inorganic materials only
    • H01M10/0562Solid materials
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M10/00Secondary cells; Manufacture thereof
    • H01M10/05Accumulators with non-aqueous electrolyte
    • H01M10/056Accumulators with non-aqueous electrolyte characterised by the materials used as electrolytes, e.g. mixed inorganic/organic electrolytes
    • H01M10/0564Accumulators with non-aqueous electrolyte characterised by the materials used as electrolytes, e.g. mixed inorganic/organic electrolytes the electrolyte being constituted of organic materials only
    • H01M10/0565Polymeric materials, e.g. gel-type or solid-type
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00Enabling technologies or technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/10Energy storage
    • Y02E60/12Battery technologies with an indirect contribution to GHG emissions mitigation
    • Y02E60/122Lithium-ion batteries
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product
    • Y02P70/54Manufacturing of lithium-ion, lead-acid or alkaline secondary batteries

Abstract

Embodiments of the present invention relate to apparatuses and methods for fabricating electrochemical cells. One embodiment of the present invention comprises a single chamber configurable to deposit different materials on a substrate spooled between two reels. In one embodiment, the substrate is moved in the same direction around the reels, with conditions within the chamber periodically changed to result in the continuous build-up of deposited material over time. Another embodiment employs alternating a direction of movement of the substrate around the reels, with conditions in the chamber differing with each change in direction to result in the sequential build-up of deposited material over time. The chamber is equipped with different sources of energy and materials to allow the deposition of the different layers of the electrochemical cell.

Description

    CROSS-REFERENCES TO RELATED APPLICATIONS
  • This application claims the benefit of U.S. Provisional Patent Application No. 61/074,448, filed Jun. 20, 2008, entitled “Method for High Volume Manufacture of Electrochemical Cells Using Physical Vapor Deposition,” the contents of which is hereby incorporated by reference in its entirety.
  • BACKGROUND OF THE INVENTION
  • Electrochemical cells are finding ever-increasing use as power supplies for a large number of different applications. Examples of devices commonly run off of battery power include but are not limited to mobile electronic devices such as cell phones, laptop computers, and portable media players. The demand for increased power by these devices has resulted in the fabrication of electrochemical cells from a variety of materials arranged in different architectures.
  • Conventional approaches to the fabrication of electrochemical cells have formed the elements of an electrochemical cell (such as the anode, cathode, and electrolytic material) by depositing a series of layers. Commonly, these electrochemical cells are fabricated utilizing batch processes, utilizing separate chambers to deposit different layers.
  • U.S. Pat. No. 5,411,592 describes an apparatus for the formation of thin-film batteries utilizing a substrate that is moved between two rolls. By rotating the rolls, the substrate is moved through a plurality of chambers, in which a film is deposited.
  • While the approach of the U.S. Pat. No. 5,411,592 may be effective to fabricate an electrochemical cell, it may offer certain disadvantages. One possible disadvantage is bulk, in that each of the films making up the electrochemical cell must be formed in a separate chamber. By allocating each fabrication step to a different chamber, the size of the apparatus is increased.
  • Moreover, by allocating the formation of each layer of the electrochemical cell to a different chamber, the apparatus of U.S. Pat. No. 5,411,592 may suffer from a lack of flexibility. Specifically, a change in the structure of the electrochemical cell requires a new device with different chambers to be created. Where batteries are to be formed from different materials or with different architectures, the conventional batch-type apparatuses may be impractical.
  • From the above, it is seen that cost effective and efficient techniques for manufacturing of semiconductor materials are desirable.
  • SUMMARY OF THE INVENTION
  • Embodiments of the present invention relate to apparatuses and methods for fabricating electrochemical cells. One embodiment of the present invention comprises a single chamber configurable to deposit different materials on a substrate spooled between two reels. In one embodiment, the substrate is moved in the same direction around the reels, with conditions within the chamber periodically changed to result in the continuous build-up of deposited material over time. Another embodiment employs alternating a direction of movement of the substrate around the reels, with conditions in the chamber differing with each change in direction to result in the sequential build-up of deposited material over time. The chamber is equipped with different sources of energy and materials to allow the deposition of the different layers of the electrochemical cell.
  • According to an embodiment of the present invention, an apparatus for deposition of electrochemical cells is provided. The apparatus includes a deposition chamber in fluid communication with a first material source and with a second material source, a first gate in fluid communication with the deposition chamber and configured to be maintained under gas and pressure conditions similar to conditions within the deposition chamber, and a second gate in fluid communication with the deposition chamber and configured to be maintained under gas and pressure conditions similar to conditions within the deposition chamber. A substrate is positioned between two reels and extending through the first gate, the deposition chamber, and the second gate, and a controller is configured to rotate the reels in concert to move the substrate in a direction through the deposition chamber while material from the material source is deposited on the substrate.
  • According to another embodiment of the present invention, a process for forming an electrochemical cell is provided. The process includes moving a substrate spooled between two reels in a first direction through a deposition chamber, depositing an anode or a cathode layer on the substrate in the chamber under a first set of deposition conditions, and moving the anode or cathode layer back into the chamber. An electrolyte layer is deposited over the anode or cathode layer within the chamber under a second set of deposition condition. The electrolyte layer is moved back into the chamber, and an other of the anode or cathode layer is deposited over the electrolyte layer within the chamber under a third set of deposition conditions, to form the electrochemical cell.
  • According to a specific embodiment of the present invention, an apparatus for forming an electrochemical cell is provided. The apparatus includes a substrate spooled between two reels through a deposition chamber, a controller in electronic communication with the reels and the deposition chamber, and a computer-readable storage medium in electronic communication with the controller. The computer readable storage medium has stored thereon, code directed to instruct the controller to move a substrate through the deposition chamber in a first direction, instruct the deposition chamber to deposit an anode or a cathode layer on the substrate in the chamber under a first set of deposition conditions, and instruct the reels to move the anode or cathode layer back into the chamber. Code stored on the computer-readable storage medium instructs the deposition chamber to deposit an electrolyte layer over the anode or cathode layer within the chamber under a second set of deposition condition, instructs the reels to move the electrolyte layer back into the chamber; and instructs the deposition chamber to deposit an other of the anode or cathode layer over the electrolyte layer within the chamber under a third set of deposition conditions, to form the electrochemical cell.
  • According to another specific embodiment of the present invention, a method for depositing material on a substrate is provided. The method includes passing materials through evaporation sources for heating to provide a vapor using at least one method selected from the group consisting of evaporation, physical vapor deposition, chemical vapor deposition, sputtering, radio frequency magnetron sputtering, microwave plasma enhanced chemical vapor deposition (MPECVD), pulsed laser deposition (PLD), laser ablation, spray deposition, spray pyrolysis, spray coating or plasma spraying. Oxygen gas or other oxidizing species is passed into the evaporation chamber to mix with the material vapor and create an oxide to be deposited. Nitrogen gas or other species is passed into the evaporation chamber to mix with the material vapor and create a nitrate to be deposited, and a substrate is conveyed adjacent the evaporation sources for deposition of the vapor onto the substrate.
  • Further understanding of the nature and advantages of the present invention may be realized by reference to the latter portions of the specification and attached drawings.
  • BRIEF DESCRIPTION OF THE DRAWINGS
  • FIG. 1 is a simplified schematic diagram illustrating an apparatus for depositing battery material onto a substrate according to an embodiment of the present invention.
  • FIG. 2 is a simplified view of a particular embodiment of an apparatus in accordance with the present invention.
  • FIG. 2A is a simplified flow diagram showing steps of an embodiment of a process for forming an electrochemical cell utilizing the apparatus of FIG. 2.
  • FIG. 2B is a simplified view of an alternative embodiment of an apparatus in accordance with the present invention.
  • FIG. 2C is a simplified flow diagram showing steps of an embodiment of a process for forming an electrochemical cell utilizing the apparatus of FIG. 2B.
  • FIG. 3A shows an example of a battery in a wound prismatic form.
  • FIG. 3B shows an example of a battery in a wound cylindrical form.
  • FIG. 4 shows the location of an electrochemical cells formed on a coiled substrate in accordance with one embodiment.
  • FIG. 5 shows an example of plurality of discrete electrochemical cells on a substrate and connected by leads.
  • FIG. 6A is a simplified cross-sectional view showing an electrochemical cell formed according to an embodiment of the present invention having electrodes with a flat thin-film morphological design.
  • FIG. 6B is a simplified cross-sectional view showing an electrochemical cell formed according to an embodiment of the present invention having electrodes with a sinusoidal shaped morphological design.
  • FIG. 7 is a simplified cross-sectional view showing an embodiment of a stacked electrochemical cell formed according to an embodiment of the present invention.
  • DETAILED DESCRIPTION OF SPECIFIC EMBODIMENTS
  • Embodiments in accordance with the present invention relate to techniques for manufacturing electrochemical cells. FIG. 1 is a simplified schematic diagram illustrating an apparatus for depositing battery material onto a substrate according to an embodiment of the present invention.
  • In particular, the apparatus of FIG. 1 comprises a vacuum deposition chamber 6. The vacuum deposition chamber is configured to deposit thin films of materials making up an electrochemical cell. In particular, the vacuum deposition chamber is in fluid communication with a plurality of material sources allowing deposition of one or more of the following layers: an anode, a cathode, an electrolyte, a current collector, and a lead connecting one or more discrete electrochemical cells.
  • Specifically, the vacuum deposition chamber is configured to have at least one evaporation source to deposit a layer of battery cathode material onto a current collector. The current collector may be provided on the substrate ready-made, or may itself be formed utilizing the deposition chamber.
  • The deposition chamber is also configured to have at least one evaporation source to deposit a layer of electrolyte material onto the cathode battery material. The electrolyte material may be deposited as a gel or in the solid-state. The deposition chamber is also configured to have at least one evaporation source to deposit a layer of battery anode material onto the electrolyte layer.
  • The deposition chamber is provided with input and output gas gates 4 and 9 respectively. These gas gates maintain an inert or oxidizing vacuum atmosphere in the chamber during deposition.
  • FIG. 2 shows a more detailed view of an embodiment of an apparatus in accordance with the present invention. As shown in FIG. 2, one embodiment of the present invention comprises a processing chamber configurable to deposit different materials on a substrate spooled between two reels.
  • The apparatus may include a gas supply such that an oxidizing atmosphere can be maintained as needed at the same time of deposition. A gas supply valve connected to the deposition chamber, may allow a reactive gas atmosphere to be maintained as needed at the same time of deposition. Another gas supply valve, connected to the deposition chamber, may allow an inert gas atmosphere to be maintained in the chamber while the processed substrate is moved out of the chamber.
  • The chamber is equipped with different sources of energy and materials to allow the deposition of the different layers of the electrochemical cell. For example, the chamber may be equipped with heating or cooling elements to control the thermal environment therein. These temperature control elements may be global, for example in the form of heat lamps or peltier heaters or coolers. Alternatively, or in conjunction with global heat sources/sinks, the apparatus may be equipped with localized temperature control elements, such as lasers or jets of cryogenic fluids, that are able to be directed at specific portions of the deposited materials.
  • The chamber may also be equipped to expose the materials therein to radiation. Examples of radiation sources in accordance with the present invention include but are not limited to UV radiation sources, microwave radiation sources, and electron beams. Other possible sources of radiation for use in the chamber include infrared radiation sources, pulsed lasers, nanosecond lasers, low energy lasers (for example having a power on the order of mJ/cm2) and high energy lasers (for example having a power on the order of J/cm2), and neutron, electrons, photons or other atomic particles scattering.
  • The apparatus includes a supply chamber connected in series with the deposition chamber. A substrate material is fed to the deposition chamber. The substrate material is kept in the same gas atmosphere of the deposition chamber and it is unrolled and passed to the deposition chamber continuously or sequentially.
  • The input/output gates may comprise evacuation chambers connected in series with the deposition chamber and kept at the same gas atmosphere. The substrate material, upon which the battery has been deposited, passes through the evacuation chamber and is collected in a roll.
  • This embodiment of the apparatus can be adapted to deposit a stack of solid state battery cells onto the substrate. In this embodiment, the supply and evacuation chambers are reversible. Therefore, when the roll of substrate material has undergone one pass through the deposition chamber, the direction of the substrate can be reversed and the substrate passed through the deposition chamber again to allow formation of another layer of the electrochemical cell.
  • Thus, in the particular embodiment shown in FIG. 2, a direction of movement of the substrate around the reels is alternated. Conditions within the chamber are varied with each change in direction, in order to result in the sequential build-up of deposited material over time. In particular, a controller is in electrical communication with each of the reels and the chamber. The controller is also in communication with a computer readable storage medium, having stored thereon code configured to direct the alternating movement of the substrate in conjunction with deposition of the different layers of material of the electrochemical cell.
  • FIG. 2A is a simplified diagram showing the steps of a process flow 200 of forming a battery structure utilizing this approach. Specifically, in a first step 201, the reels are rotated to move a substrate in a first direction through the deposition chamber.
  • In a second step 202, the current collector material is deposited on the substrate if the substrate is not electrically conducting. In a third step 203, the material of a first electrode is deposited on the substrate. In certain embodiments, the material of the anode is deposited first. In other embodiments, the material of the cathode may be deposited first.
  • In a fourth step 204, the direction of rotation of the reels is changed, and the substrate bearing the deposited electrode material is moved in the opposite direction back through the chamber. In fifth step 205, the material of the electrolyte is deposited over the first electrode.
  • In a sixth step 206, the direction of rotation of the reels is again reversed to the original direction, and the substrate bearing the deposited electrolyte material is again moved back through the chamber. In seventh step 207, the material of the second electrode (anode or cathode) is deposited over the electrolyte. In an eighth step 208, the material of the current collector is deposited on the second electrode.
  • The above sequence of steps provides a process according to an embodiment of the present invention. As shown, the method uses a combination of steps including a changes in direction of the movement of the substrate through the chamber, coupled with changes in deposition conditions within the chamber. Other alternatives can also be provided where steps are added, one or more steps are removed, or one or more steps are provided in a different sequence without departing from the scope of the claims herein. Further details of the present method can be found throughout the present specification.
  • In an alternative approach, the substrate may be moved in the same direction around the reels, with conditions within the chamber periodically changed to result in the continuous build-up of deposited material over time. FIG. 2B shows a simplified schematic view of an embodiment of an apparatus configured to form a battery structure according to such an approach. In particular, a controller is in electrical communication with the reels and the deposition chamber. The controller is also in communication with a computer readable storage medium having stored thereon code to direct the controller to consistently rotate the reels in the same direction to first form an electrode layer. After a certain amount of time when the substrate is covered with the electrode layer, code stored on the computer readable storage medium causes the controller to instruct the chamber to change the deposition conditions to deposit an electrolyte layer. Subsequently, the controller instructs the deposition chamber to change conditions within the chamber yet again to deposit the material of the other of the electrodes (anode or cathode).
  • FIG. 2C is a simplified chart summarizing the flow 220 of steps of forming a battery structure utilizing this approach. In a first step 222, the reels are rotated to move the substrate through the chamber. In a second step 223, while the reels are being rotated in the same direction, a current collector material is deposited on the substrate if the substrate is not electrically conducting.
  • In a third step 224, while the reels are being rotated in the same direction, an electrode material (anode or cathode) is deposited on the substrate, or the current collector material if the substrate is non-conducting. In a fourth step 226, once the substrate has been covered with the electrode material, conditions within the chamber are changed to deposit an electrolyte material on the electrode.
  • In a fifth step 228, once the first electrode material has been covered with the electrolyte, conditions within the chamber are again changed and a second (cathode or anode) material is deposited. In a sixth step 229, the current collector material is deposited on the second electrode.
  • The above sequence of steps provides a process according to an embodiment of the present invention. As shown, the method uses a combination of steps including movement of the substrate through the chamber in a consistent direction, coupled with changes in deposition conditions within the chamber. Other alternatives can also be provided where steps are added, one or more steps are removed, or one or more steps are provided in a different sequence without departing from the scope of the claims herein. Further details of the present method can be found throughout the present specification.
  • The deposition chamber may be configured to deposit materials by at least one method selected from evaporation, physical vapor deposition (PVD), chemical vapor deposition (CVD), sputtering, radio frequency magnetron sputtering, microwave plasma enhanced chemical vapor deposition (MPECVD), pulsed laser deposition (PLD), laser ablation, spray deposition, spray pyrolysis, spray coating, or plasma spraying.
  • Conditions for deposition may, but need not, take place in a reduced pressure environment. Thus, the deposition chamber may be he deposition chamber may be configured to deposit materials by at least one.
  • In particular embodiments, the apparatus is configured to deposit materials utilizing microwave hydrothermal synthesis to create nanoparticles. Nanoparticles deposited according to embodiments of the present invention may exhibit at least one of the shapes selected from the group consisting of: spheres, nanocubes, pseudocubes, ellipsoids, spindles, nanosheets, nanorings, nanospheres, nanospindles, dots, rods, wires, arrays, tubes, nanotubes, belts, disks, rings, cubes, mesopores, dendrites, propellers, flowers, hollow interiors, hybrids of the listed structures, and other complex superstructures. Particular embodiment of apparatuses according to the present invention can be configured to deposit particles using microwave exposure to induce at least one of the following mechanisms: nucleation, aggregation, recrystallization, and dissolution-recrystallization.
  • In particular embodiments, the apparatus may be configured to deposit materials utilizing laser ablation, thermal evaporation, vapor transport, or a combination of these techniques, to deposit nanowire, nanotube, or nanobelt structures, or a combination of them. The materials that can be deposited in these embodiments include, but are not limited to, Group III-IV semiconductor nanowires (e.g. silicon), zinc (Zn) and zinc oxide (ZnO) nanowires, nanobelts of semiconducting oxides (oxides of zinc, tin, indium, cadmium, and gallium), carbon nanotubes and carbon meso-structures.
  • Embodiments of the present invention may offer a number of benefits over conventional approaches. For example, embodiments of the present invention facilitate the scalable manufacture of single or multiple, high-performance, thin-film electrochemical cells, particularly as compared with conventional batch-type manufacturing processes.
  • Embodiments of the present invention also offer a high degree of flexibility as compared with conventional approaches. In particular, embodiments of the present invention allow multiple manufacturing techniques to be employed utilizing a single chamber. This approach creates a system that is capable of utilizing multiple deposition techniques specific to optimized layers or graded materials, within one or multiple cells.
  • Certain embodiments of the present invention allow for the fabrication of a plurality of electrochemical cells in a vertical (stacked) configuration. Thus, particular embodiments of the present invention may also include at least one evaporation source adapted to deposit current collector layers between the second electrode of a first deposited battery and the first electrode of the next deposited battery in a stack, and also a top conductive metal layer upon the second electrode of the last deposited battery in a stack.
  • Alternatively, embodiments of the present invention may allow for the horizontal formation of batteries/electrochemical cells on a ribbon-type substrate. In particular embodiments, such a ribbon may be coiled in a wound prismatic form, as is shown in FIG. 3A. In alternative embodiments, such a ribbon may be coiled in a wound cylindrical form, as is shown in FIG. 3B.
  • As shown in FIG. 4, in certain embodiments the deposition of materials on the substrate may be limited to particular locations. In particular, deposited materials may be excluded from portions of the substrate expected to be the location of a sharp turn in the coil, thereby avoiding high stresses and possible defects associated with winding.
  • In particular embodiments, a plurality of electrochemical cells may be formed in a horizontal series on a ribbon-type substrate, with electrical communication between the discrete electrochemical cells established through conducting lead structures. Such a embodiment is shown in FIG. 5.
  • Where such leads are relatively thin and fragile, the tight turns of a coil could impose physical stress on them, possibly resulting in fracture. Accordingly, particular embodiments of the present invention may space the discrete batteries/cells with increasing spacing. Such spacing would accommodate a larger amount of material in successive turns as the material is wound, reducing physical stress.
  • EXAMPLES Example 1 Manufacture of a Thin-Film Li Battery
  • This example demonstrates the process of manufacturing a new electrochemical cell. In particular, two different morphological designs of electrodes are shown. FIG. 6A is a simplified cross-sectional view showing an electrochemical cell formed according to an embodiment of the present invention having electrodes with a flat thin-film morphological design. FIG. 6B is a simplified cross-sectional view showing an electrochemical cell formed according to an embodiment of the present invention having electrodes with a sinusoidal shaped morphological design.
  • The materials for the three-dimensional electrochemical cells are copper as anode current collector (16 in FIG. 6A, 21 in FIG. 6B), lithium metal as anode (17 in FIG. 6A, 22 in FIG. 6B), polymer with lithium salts as the electrolyte (18 in FIG. 6A, 23 in FIG. 6B), lithium manganese oxide as cathode (19 in FIG. 6A, 24 in FIG. 6B), and aluminum as cathode current collector (20 in FIG. 6A, 25 in FIG. 6B). Because a polymer electrolyte is used, a separator is unnecessary.
  • These materials used here are for illustrative purposes only. In accordance with alternative embodiments, other materials could be used to form the electrochemical cell and still remain within the scope of the present invention.
  • In the flat electrode configuration of FIG. 6A, the substrate is the first current collector (copper). Successive layers of materials, active and inactive, are deposited via PVD on the substrate in the deposition chamber.
  • In the sinusoidal configuration, a ridged polymeric film is used as the substrate. A first metallic layer (copper) is deposited on the substrate, followed by successive layers of materials, active and inactive, which are deposited via PVD in the chamber.
  • Example 2 Manufacture of a Stacked Set of Cells, Producing a Higher Voltage, and Energy, Battery
  • This example demonstrates the process of manufacturing a stacked cell. FIG. 6 shows two flat thin-film cells stacked together. The materials for the three-dimensional electrochemical cells are copper as anode current collector (26 and 31), lithium metal as anode (27 and 32), polymer with lithium salts as the electrolyte (28 and 33), lithium manganese oxide as cathode (29 and 34), and aluminum as cathode current collector (30 and 35). Because a polymer electrolyte is used, a separator is not required.
  • The particular materials listed here are for illustrative purposes only. Other materials could be employed by alternative embodiments and still remain within the scope of the present invention.
  • In this particular example, multiple layers are deposited in sequence using the first flat metallic layer (copper current collector) as the substrate. PVD is used to deposit the successive active and inactive materials.
  • While the above-embodiments describe electrochemical cells fabricated from particular materials, the present invention is not limited to the use of such materials. Alternative embodiments could deposit a wide variety of deposited materials for the anode, electrolyte, and cathode, and remain within the scope of the present invention. For example, TABLE 1 is a non-exhaustive list of examples of the materials making up various types of electrolytic cells.
  • TABLE 1 CURRENT SUBSTRATE ANODE ELECTROLYTE CATHODE COLLECTOR LEAD copper (Cu) foil graphite (C) lithium phosphorus layered metal oxide aluminum (Al) copper oxynitride (LIPON) materials (Cu) (e.g. LiCoO2) copper (Cu) foil graphite (C) lithium phosphorus spinel materials aluminum (Al) copper oxynitride (LIPON) (e.g. LiMn2O4) (Cu) copper (Cu) foil graphite (C) lithium phosphorus olivine materials aluminum (Al) copper oxynitride (LIPON) (e.g. LiFePO4) (Cu) copper (Cu) foil graphite (C) lithium phosphorus Li(Ni1/3Mn1/3Co1/3)O2 aluminum (Al) copper oxynitride (LIPON) (Cu) copper (Cu) foil graphite (C) lithium phosphorus LiNixCoyAl(1−x−y)O2 aluminum (Al) copper oxynitride (LIPON) (NCA) (Cu) copper (Cu) foil graphite (C) lithium phosphorus LiNixMnyCo(1−x−y)O2 aluminum (Al) copper oxynitride (LIPON) (NCM) (Cu) copper (Cu) foil meso- lithium phosphorus layered metal oxide aluminum (Al) copper carbon (C) oxynitride (LIPON) materials (Cu) (e.g. LiCoO2) copper (Cu) foil meso- lithium phosphorus spinel materials aluminum (Al) copper carbon (C) oxynitride (LIPON) (e.g. LiMn2O4) (Cu) copper (Cu) foil meso- lithium phosphorus olivine materials aluminum (Al) copper carbon (C) oxynitride (LIPON) (e.g. LiFePO4) (Cu) copper (Cu) foil meso- lithium phosphorus Li(Ni1/3Mn1/3Co1/3)O2 aluminum (Al) copper carbon (C) oxynitride (LIPON) (Cu) copper (Cu) foil meso- lithium phosphorus LiNixCoyAl(1−x−y)O2 aluminum (Al) copper carbon (C) oxynitride (LIPON) (NCA) (Cu) copper (Cu) foil meso- lithium phosphorus LiNixMnyCo(1−x−y)O2 aluminum (Al) copper carbon (C) oxynitride (LIPON) (NCM) (Cu) copper (Cu) foil lithium lithium phosphorus layered metal oxide aluminum (Al) copper titanium oxynitride (LIPON) materials (Cu) oxide (e.g. LiCoO2) (Li4Ti5O12) copper (Cu) foil lithium lithium phosphorus spinel materials aluminum (Al) copper titanium oxynitride (LIPON) (e.g. LiMn2O4) (Cu) oxide (Li4Ti5O12) copper (Cu) foil lithium lithium phosphorus olivine materials aluminum (Al) copper titanium oxynitride (LIPON) (e.g. LiFePO4) (Cu) oxide (Li4Ti5O12) copper (Cu) foil lithium lithium phosphorus Li(Ni1/3Mn1/3Co1/3)O2 aluminum (Al) copper titanium oxynitride (LIPON) (Cu) oxide (Li4Ti5O12) copper (Cu) foil lithium lithium phosphorus LiNixCoyAl(1−x−y)O2 aluminum (Al) copper titanium oxynitride (LIPON) (NCA) (Cu) oxide (Li4Ti5O12) copper (Cu) foil lithium lithium phosphorus LiNixMnyCo(1−x−y)O2 aluminum (Al) copper titanium oxynitride (LIPON) (NCM) (Cu) oxide (Li4Ti5O12) copper (Cu) foil lithium lithium phosphorus layered metal oxide aluminum (Al) copper metal (Li) oxynitride (LIPON) materials (Cu) (e.g. LiCoO2) copper (Cu) foil lithium lithium phosphorus spinel materials aluminum (Al) copper metal (Li) oxynitride (LIPON) (e.g. LiMn2O4) (Cu) copper (Cu) foil lithium lithium phosphorus olivine materials aluminum (Al) copper metal (Li) oxynitride (LIPON) (e.g. LiFePO4) (Cu) copper (Cu) foil lithium lithium phosphorus Li(Ni1/3Mn1/3Co1/3)O2 aluminum (Al) copper metal (Li) oxynitride (LIPON) (Cu) copper (Cu) foil lithium lithium phosphorus LiNixCoyAl(1−x−y)O2 aluminum (Al) copper metal (Li) oxynitride (LIPON) (NCA) (Cu) copper (Cu) foil lithium lithium phosphorus LiNixMnyCo(1−x−y)O2 aluminum (Al) copper metal (Li) oxynitride (LIPON) (NCM) (Cu) copper (Cu) foil graphite (C) lithium salts/poly- layered metal oxide aluminum (Al) copper ethylene oxide (PEO), materials (Cu) lithium salts/poly- (e.g. LiCoO2) vinylidene fluoride (PVDF), lithium salts/PEO/PVDF copper (Cu) foil graphite (C) lithium salts/poly- spinel materials aluminum (Al) copper ethylene oxide (PEO), (e.g. LiMn2O4) (Cu) lithium salts/poly- vinylidene fluoride (PVDF), lithium salts/PEO/PVDF copper (Cu) foil graphite (C) lithium salts/poly- olivine materials aluminum (Al) copper ethylene oxide (PEO), (e.g. LiFePO4) (Cu) lithium salts/poly- vinylidene fluoride (PVDF), lithium salts/PEO/PVDF copper (Cu) foil graphite (C) lithium salts/poly- Li(Ni1/3Mn1/3Co1/3)O2 aluminum (Al) copper ethylene oxide (PEO), (Cu) lithium salts/poly- vinylidene fluoride (PVDF), lithium salts/PEO/PVDF copper (Cu) foil graphite (C) lithium salts/poly- LiNixCoyAl(1−x−y)O2 aluminum (Al) copper ethylene oxide (PEO), (NCA) (Cu) lithium salts/poly- vinylidene fluoride (PVDF), lithium salts/PEO/PVDF copper (Cu) foil graphite (C) lithium salts/poly- LiNixMnyCo(1−x−y)O2 aluminum (Al) copper ethylene oxide (PEO), (NCM) (Cu) lithium salts/poly- vinylidene fluoride (PVDF), lithium salts/PEO/PVDF copper (Cu) foil meso- lithium salts/poly- layered metal oxide aluminum (Al) copper carbon (C) ethylene oxide (PEO), materials (Cu) lithium salts/poly- (e.g. LiCoO2) vinylidene fluoride (PVDF), lithium salts/PEO/PVDF copper (Cu) foil meso- lithium salts/poly- spinel materials aluminum (Al) copper carbon (C) ethylene oxide (PEO), (e.g. LiMn2O4) (Cu) lithium salts/poly- vinylidene fluoride (PVDF), lithium salts/PEO/PVDF copper (Cu) foil meso- lithium salts/poly- olivine materials aluminum (Al) copper carbon (C) ethylene oxide (PEO), (e.g. LiFePO4) (Cu) lithium salts/poly- vinylidene fluoride (PVDF), lithium salts/PEO/PVDF copper (Cu) foil meso- lithium salts/poly- Li(Ni1/3Mn1/3Co1/3)O2 aluminum (Al) copper carbon (C) ethylene oxide (PEO), (Cu) lithium salts/poly- vinylidene fluoride (PVDF), lithium salts/PEO/PVDF copper (Cu) foil meso- lithium salts/poly- LiNixCoyAl(1−x−y)O2 aluminum (Al) copper carbon (C) ethylene oxide (PEO), (NCA) (Cu) lithium salts/poly- vinylidene fluoride (PVDF), lithium salts/PEO/PVDF copper (Cu) foil meso- lithium salts/poly- LiNixMnyCo(1−x−y)O2 aluminum (Al) copper carbon (C) ethylene oxide (PEO), (NCM) (Cu) lithium salts/poly- vinylidene fluoride (PVDF), lithium salts/PEO/PVDF copper (Cu) foil lithium lithium salts/poly- layered metal oxide aluminum (Al) copper titanium ethylene oxide (PEO), materials (e.g. (Cu) oxide lithium salts/poly- LiCoO2) (Li4Ti5O12) vinylidene fluoride (PVDF), lithium salts/PEO/PVDF copper (Cu) foil lithium lithium salts/poly- spinel materials (e.g. aluminum (Al) copper titanium ethylene oxide (PEO), LiMn2O4) (Cu) oxide lithium salts/poly- (Li4Ti5O12) vinylidene fluoride (PVDF), lithium salts/PEO/PVDF copper (Cu) foil lithium lithium salts/poly- olivine materials (e.g. aluminum (Al) copper titanium ethylene oxide (PEO), LiFePO4) (Cu) oxide lithium salts/poly- (Li4Ti5O12) vinylidene fluoride (PVDF), lithium salts/PEO/PVDF copper (Cu) foil lithium lithium salts/poly- Li(Ni1/3Mn1/3Co1/3)O2 aluminum (Al) copper titanium ethylene oxide (PEO), (Cu) oxide lithium salts/poly- (Li4Ti5O12) vinylidene fluoride (PVDF), lithium salts/PEO/PVDF copper (Cu) foil lithium lithium salts/poly- LiNixCoyAl(1−x−y)O2 aluminum (Al) copper titanium ethylene oxide (PEO), (NCA) (Cu) oxide lithium salts/poly- (Li4Ti5O12) vinylidene fluoride (PVDF), lithium salts/PEO/PVDF copper (Cu) foil lithium lithium salts/poly- LiNixMnyCo(1−x−y)O2 aluminum (Al) copper titanium ethylene oxide (PEO), (NCM) (Cu) oxide lithium salts/poly- (Li4Ti5O12) vinylidene fluoride (PVDF), lithium salts/PEO/PVDF copper (Cu) foil lithium lithium salts/poly- layered metal oxide aluminum (Al) copper metal (Li) ethylene oxide (PEO), materials (Cu) lithium salts/poly- (e.g. LiCoO2) vinylidene fluoride (PVDF), lithium salts/PEO/PVDF copper (Cu) foil lithium lithium salts/poly- spinel materials aluminum (Al) copper metal (Li) ethylene oxide (PEO), (e.g. LiMn2O4) (Cu) lithium salts/poly- vinylidene fluoride (PVDF), lithium salts/PEO/PVDF copper (Cu) foil lithium lithium salts/poly- olivine materials aluminum (Al) copper metal (Li) ethylene oxide (PEO), (e.g. LiFePO4) (Cu) lithium salts/poly- vinylidene fluoride (PVDF), lithium salts/PEO/PVDF copper (Cu) foil lithium lithium salts/poly- Li(Ni1/3Mn1/3Co1/3)O2 aluminum (Al) copper metal (Li) ethylene oxide (PEO), (Cu) lithium salts/poly- vinylidene fluoride (PVDF), lithium salts/PEO/PVDF copper (Cu) foil lithium lithium salts/poly- LiNixCoyAl(1−x−y)O2 aluminum (Al) copper metal (Li) ethylene oxide (PEO), (NCA) (Cu) lithium salts/poly- vinylidene fluoride (PVDF), lithium salts/PEO/PVDF copper (Cu) foil lithium lithium salts/poly- LiNixMnyCo(1−x−y)O2 aluminum (Al) copper metal (Li) ethylene oxide (PEO), (NCM) (Cu) lithium salts/poly- vinylidene fluoride (PVDF), lithium salts/PEO/PVDF
  • It is further understood that the examples and embodiments described herein are for illustrative purposes only and that various modifications or changes in light thereof will be suggested to persons skilled in the art and are to be included within the spirit and purview of this application and scope of the appended claims.

Claims (23)

1-44. (canceled)
45. A composition comprising:
a substrate material configured to be wound between reels, the substrate material comprising copper (Cu), aluminum (Al), stainless steel, or other suitable conductive alloy in the form of a thin foil and bearing,
a first electrode material comprising at least one of lithium metal (Li), lithium titanium oxide (Li4Ti5O12), graphite (C), or meso-carbon structures;
an electrolyte material overlying the first electrode material and comprising at least one of lithium phosphorus oxynitride (LIPON) or a lithium salt mixed with poly-ethylene oxide (PEO), poly-vinylidene fluoride (PVDF), or a combination of PEO and PVDF; and
a second electrode material overlying the electrolyte material and comprising at least one of a layered metal oxide material, a layered spinel material, or a layered olivine material.
46. The composition of claim 45 wherein the meso-carbon structures comprise at least one of microbeads or other microstructures.
47. (canceled)
48. The composition of claim 45 wherein the layered oxide material comprises LiCoO2, the layered spinel material comprises LiMn2O4, or the layered olivine material comprises LiFePO4, Li(Ni1/3Mn1/3Co1/3)O2, LiNixCoyAl(1-x-y)O2 (NCA), or LiNixMnyCo(1-x-y)O2 (NCM).
49. (canceled)
50. The composition of claim 45 further comprising an electrically conducting lead connecting the plurality of discrete cells.
51. The composition of claim 45 wherein the first electrode material, the electrolyte material, and the second electrode material are formed as part of a vertical stack of a plurality of cells.
52. A solid state battery device comprising a composition, the device comprising:
a roll comprising a substrate collected from a deposition apparatus, the substrate being configured on a non-conductive material; a first current collector formed overlying the substrate; a first electrode layer that is capable of an electrochemical reaction with ions formed overlying current collector; an electrolyte material formed overlying the cathode that is capable of ionic diffusion, the electrolyte material being a solid state material; a second electrode layer formed overlying the electrolyte material; and a second current collector formed overlying the second electrode layer; and wherein the electrolyte material comprising at least one of lithium phosphorus oxynitride (LIPON) or a lithium salt mixed with poly-ethylene oxide (PEO), poly-vinylidene fluoride (PVDF), or a combination of PEO and PVDF and configured as the solid state material.
53. The device of claim 52 wherein the substrate, first current collector, the first electrode, the electrolyte material, and the second electrode layer form a resulting electrochemical cell.
54. The device of claim 53 wherein the first electrode layer comprises at least one of lithium metal (Li), lithium titanium oxide (Li4Ti5O12), graphite (C), or meso-carbon structures.
55. The device of claim 52 further comprising an electrically conducting lead connecting the plurality of discrete cells.
56. The device of claim 52 wherein the first electrode material, the electrolyte material, and the second electrode material are formed as part of a vertical stack of a plurality of cells.
57. A solid state battery cell, the composition comprising:
a substrate;
a first electrode layer overlying substrate, the first electrode layer comprising at least one of lithium metal (Li), lithium titanium oxide (Li4Ti5O12), graphite (C), or meso-carbon structures;
a first current collector formed within a vicinity of the first electrode layer;
an electrolyte material formed overlying the cathode that is capable of ionic diffusion, the electrolyte material being configured as a solid state material;
a second electrode layer formed overlying the electrolyte material; and
a second current collector formed within a vicinity of the second electrode layer.
58. The cell of claim 57 wherein the substrate, first electrode layer, the first current collector, the electrolyte material, the second electrode layer, and the second current collector are configured as a roll.
59. The cell of claim 57 wherein the first electrode layer is the lithium titanium oxide (Li4Ti5O12) or the meso-carbon structures.
60. The cell of claim 57 wherein the first electrode layer is the lithium metal.
61. The cell of claim 57 wherein the electrolyte material comprising at least one of lithium phosphorus oxynitride (LIPON) or a lithium salt mixed with poly-ethylene oxide (PEO), poly-vinylidene fluoride (PVDF), or a combination of PEO and PVDF and configured as the solid state material.
62. The cell of claim 57 wherein the first electrode layer comprises the lithium metal; and the electrolyte material comprises a lithium phosphorus oxynitride.
63. The cell of claim 57 wherein the substrate is made of a non-conductive material.
64. The cell of claim 57 wherein the substrate is made of a conductive material.
65. The cell of claim 57 wherein the first or second electrode layer comprises at least one of a layered metal oxide material, a layered spinel material, or a layered olivine material.
66. The cell of claim 57 wherein the first electrode layer, the electrolyte material, and the second electrode layer are formed as part of a vertical stack of a plurality of cells.
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Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090325063A1 (en) * 2008-06-20 2009-12-31 Sakti3, Inc. Method for high volume manufacture of electrochemical cells using physical vapor deposition
US20110202159A1 (en) * 2008-06-20 2011-08-18 Sakti3, Inc. Computational method for design and manufacture of electrochemical systems
US20120058380A1 (en) * 2011-11-09 2012-03-08 Sakti3, Inc. Monolithically integrated thin-film solid state lithium battery device having multiple layers of lithium electrochemical cells
US8301285B2 (en) 2011-10-31 2012-10-30 Sakti3, Inc. Computer aided solid state battery design method and manufacture of same using selected combinations of characteristics
US8357464B2 (en) 2011-04-01 2013-01-22 Sakti3, Inc. Electric vehicle propulsion system and method utilizing solid-state rechargeable electrochemical cells
US9127344B2 (en) 2011-11-08 2015-09-08 Sakti3, Inc. Thermal evaporation process for manufacture of solid state battery devices
US9627709B2 (en) 2014-10-15 2017-04-18 Sakti3, Inc. Amorphous cathode material for battery device
US9627717B1 (en) 2012-10-16 2017-04-18 Sakti3, Inc. Embedded solid-state battery

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9005755B2 (en) 2007-01-03 2015-04-14 Applied Nanostructured Solutions, Llc CNS-infused carbon nanomaterials and process therefor
US9368772B1 (en) 2009-06-15 2016-06-14 Sakti3, Inc. Packaging and termination structure for a solid state battery
EP2558623A4 (en) * 2010-01-15 2014-03-05 Applied Nanostructured Sols Apparatus and method for the production of carbon nanotubes on a continuously moving substrate
CA2756852A1 (en) * 2009-04-10 2010-10-14 Applied Nanostructured Solutions, Llc Apparatus and method for the production of carbon nanotubes on a continuously moving substrate
WO2012054312A1 (en) * 2010-10-18 2012-04-26 Microvast, Inc. Continuous prismatic cell stacking system and method
CN104247132A (en) * 2012-03-30 2014-12-24 小岛冲压工业株式会社 Process and device for producing lithium-ion secondary battery
CN102634766B (en) * 2012-04-24 2016-01-27 上海华虹宏力半导体制造有限公司 Vacuum sputtering apparatus and method of use
JP6017872B2 (en) * 2012-07-26 2016-11-02 小島プレス工業株式会社 Lithium ion secondary battery, manufacturing method and manufacturing apparatus thereof
US9240584B1 (en) * 2012-12-27 2016-01-19 Sakti3, Inc. Phase change material source for physical vapor deposition
TWI473903B (en) * 2013-02-23 2015-02-21 Hermes Epitek Corp Gas Injector and Cover Plate Assembly for Semiconductor Equipment
JP2015056344A (en) * 2013-09-13 2015-03-23 小島プレス工業株式会社 Lithium ion secondary battery and process of manufacturing the same
TW201529873A (en) * 2014-01-24 2015-08-01 Applied Materials Inc Deposition of solid state electrolyte on electrode layers in electrochemical devices
US20170058389A1 (en) * 2014-05-12 2017-03-02 Jianyong Liu Lithium battery fabrication process using multiple atmospheric plasma nozzles
WO2016049939A1 (en) * 2014-10-03 2016-04-07 GM Global Technology Operations LLC Plasma deposition to fabricate lithium batteries
CN104795542A (en) * 2015-01-06 2015-07-22 宁波南车新能源科技有限公司 A plasma injection preparing method of a nanometer lithium ion composite anode
WO2017007936A1 (en) 2015-07-07 2017-01-12 Shape Security, Inc. Split serving of computer code
USD825542S1 (en) 2016-02-01 2018-08-14 Racing Shield AB Mobile telephone case
CN105932246B (en) * 2016-05-20 2018-12-18 浙江美达瑞新材料科技有限公司 Nanoscale structures improve the anode material for lithium-ion batteries and preparation method thereof improved
CN106207087A (en) * 2016-08-25 2016-12-07 南京安普瑞斯有限公司 Lithium-ion battery and preparation method thereof
US10128116B2 (en) 2016-10-17 2018-11-13 Lam Research Corporation Integrated direct dielectric and metal deposition
CN107464913A (en) * 2017-07-07 2017-12-12 中国航发北京航空材料研究院 Method and equipment for producing all-solid-state thin film lithium battery
WO2019103282A1 (en) * 2017-11-24 2019-05-31 주식회사 엘지화학 Lithium electrode and lithium secondary battery comprising same
CN108588667A (en) * 2017-12-27 2018-09-28 深圳市华星光电技术有限公司 A kind of air charging system and inflation method, vacuum sputtering equipment of vacuum atm conversion chamber

Citations (69)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2862646A (en) * 1955-02-18 1958-12-02 Haloid Xerox Inc Powder particle aerosol generator
US4009052A (en) * 1975-02-24 1977-02-22 Exxon Research And Engineering Company Chalcogenide battery
US4648347A (en) * 1984-05-30 1987-03-10 Leybold-Heraeus Gmbh Vacuum depositing apparatus
US4854264A (en) * 1986-12-10 1989-08-08 Fuji Seiki Inc. Vacuum evaporating apparatus
US4933889A (en) * 1988-04-29 1990-06-12 International Business Machines Corporation Method for fine decomposition in finite element mesh generation
US5338625A (en) * 1992-07-29 1994-08-16 Martin Marietta Energy Systems, Inc. Thin film battery and method for making same
US5367465A (en) * 1992-06-24 1994-11-22 Intel Corporation Solids surface grid generation for three-dimensional topography simulation
US5377118A (en) * 1992-06-24 1994-12-27 Intel Corporation Method for accurate calculation of vertex movement for three-dimensional topography simulation
US5402366A (en) * 1991-11-14 1995-03-28 Sumitomo Heavy Industries, Ltd. Method and apparatus for simulating a mechanical operation
US5411592A (en) * 1994-06-06 1995-05-02 Ovonic Battery Company, Inc. Apparatus for deposition of thin-film, solid state batteries
US5453934A (en) * 1993-03-26 1995-09-26 Cray Research, Inc. Method for use in designing an arbitrarily shaped object
US5498489A (en) * 1995-04-14 1996-03-12 Dasgupta; Sankar Rechargeable non-aqueous lithium battery having stacked electrochemical cells
US5571749A (en) * 1993-12-28 1996-11-05 Canon Kabushiki Kaisha Method and apparatus for forming deposited film
US5751591A (en) * 1994-11-09 1998-05-12 Nec Corporation Three dimensional wiring inductance calculation system
US5906757A (en) * 1995-09-26 1999-05-25 Lockheed Martin Idaho Technologies Company Liquid injection plasma deposition method and apparatus
US6016047A (en) * 1996-11-21 2000-01-18 U.S. Philips Corporation Battery management system and battery simulator
US6294479B1 (en) * 1992-05-21 2001-09-25 Nissin Electric Co., Ltd Film forming method and apparatus
US6350222B2 (en) * 1999-07-28 2002-02-26 Thermwood Corporation Machine tool with improved tool changer means
US6402443B1 (en) * 1999-08-26 2002-06-11 Deckel Maho Pfronten Gmbh Machining unit on a machine tool
US20020120906A1 (en) * 2000-07-17 2002-08-29 Lei Xia Behavioral modeling and analysis of galvanic devices
US20020169620A1 (en) * 2001-03-29 2002-11-14 Spotnitz Robert M. Method of doing business: customer-driven design of a charge storage device
US20030064292A1 (en) * 2001-09-12 2003-04-03 Neudecker Bernd J. Thin-film electrochemical devices on fibrous or ribbon-like substrates and method for their manufacture and design
US20030068559A1 (en) * 2001-09-12 2003-04-10 Armstrong Joseph H. Apparatus and method for the design and manufacture of multifunctional composite materials with power integration
US20030082446A1 (en) * 2000-10-20 2003-05-01 Yet-Ming Chiang Reticulated and controlled porosity battery structures
US20030099884A1 (en) * 2001-07-27 2003-05-29 A123Systems, Inc. Battery structures, self-organizing structures and related methods
US20030108800A1 (en) * 2001-11-09 2003-06-12 Barbarich Thomas J. Non-aqueous electrolytes for lithium electrochemical cells
US6656234B2 (en) * 2001-09-26 2003-12-02 Ford Global Technologies, Llc Tuning battery electrode porosity technical field
US20040131925A1 (en) * 2003-01-02 2004-07-08 Jenson Mark L. Solid state activity-activated battery device and method
US20040131937A1 (en) * 2003-01-06 2004-07-08 Ga-Lane Chen Lithium ion battery comprising nanomaterials
US20040131761A1 (en) * 2003-01-02 2004-07-08 Stuart Shakespeare Apparatus and method for depositing material onto a substrate using a roll-to-roll mask
US20040144321A1 (en) * 2003-01-28 2004-07-29 Eastman Kodak Company Method of designing a thermal physical vapor deposition system
US20040151985A1 (en) * 1999-06-28 2004-08-05 Lithium Power Technologies, Inc. Lithium ion battery electrodes
US20040185667A1 (en) * 2000-03-24 2004-09-23 Cymbet Corporation Method of continuous processing of thin-film batteries and like devices
US6833031B2 (en) * 2000-03-21 2004-12-21 Wavezero, Inc. Method and device for coating a substrate
US20040258851A1 (en) * 2003-06-23 2004-12-23 Venkat Selvamanickam Apparatus for high-throughput ion beam-assisted deposition (IBAD)
US6884333B2 (en) * 2002-10-09 2005-04-26 Uziel Landau Electrochemical system for analyzing performance and properties of electrolytic solutions
US20050114105A1 (en) * 2003-11-24 2005-05-26 Barber Andrew J. System for predicting the dynamic behavior of physical systems
US20050244580A1 (en) * 2004-04-30 2005-11-03 Eastman Kodak Company Deposition apparatus for temperature sensitive materials
US6962823B2 (en) * 2002-04-02 2005-11-08 Nanosys, Inc. Methods of making, positioning and orienting nanostructures, nanostructure arrays and nanostructure devices
US6982132B1 (en) * 1997-10-15 2006-01-03 Trustees Of Tufts College Rechargeable thin film battery and method for making the same
US20060138350A1 (en) * 2004-12-28 2006-06-29 Asml Netherlands B.V. Lithographic apparatus, illumination system and method for mitigating debris particles
US20060156978A1 (en) * 2004-08-11 2006-07-20 Cornell Research Foundation, Inc. Modular fabrication systems and methods
US7107193B1 (en) * 1999-09-03 2006-09-12 Autodesk, Inc. Defining parameters for a finite elements analysis calculation in a computer-assisted drafting program
US20070110892A1 (en) * 2005-11-15 2007-05-17 Sumitomo Electric Industries, Ltd. Method of operating vacuum deposition apparatus and vacuum deposition apparatus
US20070186852A1 (en) * 2003-02-14 2007-08-16 Junichiro Sakata Manufacturing apparatus
US20070218329A1 (en) * 2005-07-05 2007-09-20 Keith Kepler D Combinatorial method and apparatus for screening electrochemical materials
US7315789B2 (en) * 2004-11-23 2008-01-01 Lg Chem, Ltd. Method and system for battery parameter estimation
US20080079418A1 (en) * 2006-09-29 2008-04-03 Gm Global Technology Operations, Inc. High-precision rogowski current transformer
US7361327B2 (en) * 2003-01-31 2008-04-22 Los Alamos National Security, Llc Microporous crystals and synthesis schemes
US20080118782A1 (en) * 2002-05-02 2008-05-22 Adam Heller Miniature biological fuel cell that is operational under physiological conditions, and associated devices and methods
US20080187832A1 (en) * 2007-02-01 2008-08-07 Hideharu Takezawa Battery, method and apparatus for manufacturing negative electrode thereof
US20080248386A1 (en) * 2007-04-05 2008-10-09 Obrovac Mark N Electrodes with raised patterns
US20080259976A1 (en) * 2005-11-30 2008-10-23 The Governors Of The University Of Alberta Organic Columnar Thin Films
US7490710B1 (en) * 2006-08-19 2009-02-17 Wes-Tech Automation Solutions, Llc Flexible manufacturing system having modular work stations
US20090061090A1 (en) * 2006-05-19 2009-03-05 Ulvac, Inc. Vapor deposition apparatus for an organic vapor deposition material and a method for producing an organic film
US20090157369A1 (en) * 2007-12-14 2009-06-18 Nanoexa,Inc. Fast and High-Throughput Search Engine for Materials for Lithium-Ion Batteries Using Quantum Simulations
US20090217876A1 (en) * 2008-02-28 2009-09-03 Ceramic Technologies, Inc. Coating System For A Ceramic Evaporator Boat
US7618742B2 (en) * 2005-01-28 2009-11-17 Eveready Battery Co., Inc. Electrochemical cell with improved internal contact
US20090304906A1 (en) * 2006-09-29 2009-12-10 Tokyo Electron Limited Evaporating apparatus, apparatus for controlling evaporating apparatus, method for controlling evaporating apparatus, method for using evaporating apparatus and method for manufacturing blowing port
US20090326696A1 (en) * 2008-06-20 2009-12-31 Sakti3, Inc. computational method for design and manufacture of electrochemical systems
US20100015361A1 (en) * 2007-02-28 2010-01-21 Ulvac, Inc. Vapor deposition source, a vapor deposition apparatus and a method for forming an organic thin film
US20100035152A1 (en) * 2008-08-05 2010-02-11 Sakti3, Inc. Electrochemical cell including functionally graded and architectured components and methods
US20100082142A1 (en) * 2005-11-22 2010-04-01 Usadi Adam K Simulation System and Method
US20100190051A1 (en) * 2009-01-29 2010-07-29 Bruce Gardiner Aitken Barrier layer for thin film battery
US20110165326A1 (en) * 2010-01-07 2011-07-07 Primestar Solar, Inc. Automatic feed system and related process for introducing source material to a thin film vapor deposition system
US20110301931A1 (en) * 2010-06-03 2011-12-08 Battelle Energy Alliance, Llc Systems, methods and computer readable media for modeling cell performance fade of rechargeable electrochemical devices
US20110318498A1 (en) * 2009-02-24 2011-12-29 University Of Virginia Patent Foundation Coaxial Hollow Cathode Plasma Assisted Directed Vapor Deposition and Related Method Thereof
US20120040233A1 (en) * 2011-10-27 2012-02-16 Sakti3, Inc. Barrier for thin film lithium batteries made on flexible substrates and related methods
US20120058280A1 (en) * 2011-11-08 2012-03-08 Sakti3, Inc. Thermal evaporation process for manufacture of solid state battery devices

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4047289A (en) * 1974-10-15 1977-09-13 Polaroid Corporation Method for forming a slurry battery cell
JP2612602B2 (en) * 1987-12-17 1997-05-21 東洋インキ製造 株式会社 Method and apparatus for producing continuous deposited film
JPH05320906A (en) 1992-05-21 1993-12-07 Nissin Electric Co Ltd Film forming method and device therefor
JP3067907B2 (en) 1992-10-07 2000-07-24 キヤノン株式会社 Sputtering apparatus, sputtering method, lamination films formed by the sputtering method, a vacuum processing apparatus, and the substrate and which is labeled with the vacuum processing apparatus
CN2434311Y (en) * 2000-08-08 2001-06-13 夏正勋 Magnetic controlled spurting foam nickel winding film coater
US6893086B2 (en) * 2002-07-03 2005-05-17 W.E.T. Automotive Systems Ltd. Automotive vehicle seat insert
CN100582295C (en) 2002-12-26 2010-01-20 凸版印刷株式会社;应用薄膜有限公司 Vacuum deposition apparatus and method of producing vapor-deposited film
US7647116B2 (en) * 2003-03-13 2010-01-12 Medtronic, Inc. Context-sensitive collection of neurostimulation therapy data
JP4588342B2 (en) 2003-04-02 2010-12-01 パナソニック株式会社 Secondary battery and a method of manufacturing the same
WO2005012224A1 (en) * 2003-07-15 2005-02-10 Recordati Industria Chimica E Farmaceutica S.P.A. Sertraline hydrochloride form ii and methods for the preparation thereof
JP2005093373A (en) 2003-09-19 2005-04-07 Matsushita Electric Ind Co Ltd Energy device and its manufacturing method
JP2005093372A (en) * 2003-09-19 2005-04-07 Matsushita Electric Ind Co Ltd Electrochemical element and its manufacturing method
US20050079418A1 (en) * 2003-10-14 2005-04-14 3M Innovative Properties Company In-line deposition processes for thin film battery fabrication
US7227277B2 (en) * 2003-10-29 2007-06-05 The Board Of Trustees Of The University Of Illinois Multiple input DC-DC power converter
DE102004006131B4 (en) * 2004-02-07 2005-12-15 Applied Films Gmbh & Co. Kg Coil coating plant with a vacuum chamber and a coating roll
JP2005353759A (en) 2004-06-09 2005-12-22 Matsushita Electric Ind Co Ltd Semiconductor laser device and its manufacturing method
JP2007335206A (en) * 2006-06-14 2007-12-27 Nissan Motor Co Ltd Bipolar battery
JP2008103204A (en) * 2006-10-19 2008-05-01 Idemitsu Kosan Co Ltd Cathode active material and secondary battery using it
US9249502B2 (en) * 2008-06-20 2016-02-02 Sakti3, Inc. Method for high volume manufacture of electrochemical cells using physical vapor deposition
US8105853B2 (en) * 2008-06-27 2012-01-31 Bridgelux, Inc. Surface-textured encapsulations for use with light emitting diodes

Patent Citations (78)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2862646A (en) * 1955-02-18 1958-12-02 Haloid Xerox Inc Powder particle aerosol generator
US4009052A (en) * 1975-02-24 1977-02-22 Exxon Research And Engineering Company Chalcogenide battery
US4648347A (en) * 1984-05-30 1987-03-10 Leybold-Heraeus Gmbh Vacuum depositing apparatus
US4854264A (en) * 1986-12-10 1989-08-08 Fuji Seiki Inc. Vacuum evaporating apparatus
US4933889A (en) * 1988-04-29 1990-06-12 International Business Machines Corporation Method for fine decomposition in finite element mesh generation
US5402366A (en) * 1991-11-14 1995-03-28 Sumitomo Heavy Industries, Ltd. Method and apparatus for simulating a mechanical operation
US6294479B1 (en) * 1992-05-21 2001-09-25 Nissin Electric Co., Ltd Film forming method and apparatus
US5367465A (en) * 1992-06-24 1994-11-22 Intel Corporation Solids surface grid generation for three-dimensional topography simulation
US5377118A (en) * 1992-06-24 1994-12-27 Intel Corporation Method for accurate calculation of vertex movement for three-dimensional topography simulation
US5338625A (en) * 1992-07-29 1994-08-16 Martin Marietta Energy Systems, Inc. Thin film battery and method for making same
US5453934A (en) * 1993-03-26 1995-09-26 Cray Research, Inc. Method for use in designing an arbitrarily shaped object
US5571749A (en) * 1993-12-28 1996-11-05 Canon Kabushiki Kaisha Method and apparatus for forming deposited film
US5411592A (en) * 1994-06-06 1995-05-02 Ovonic Battery Company, Inc. Apparatus for deposition of thin-film, solid state batteries
US5751591A (en) * 1994-11-09 1998-05-12 Nec Corporation Three dimensional wiring inductance calculation system
US5498489A (en) * 1995-04-14 1996-03-12 Dasgupta; Sankar Rechargeable non-aqueous lithium battery having stacked electrochemical cells
US5906757A (en) * 1995-09-26 1999-05-25 Lockheed Martin Idaho Technologies Company Liquid injection plasma deposition method and apparatus
US6016047A (en) * 1996-11-21 2000-01-18 U.S. Philips Corporation Battery management system and battery simulator
US6982132B1 (en) * 1997-10-15 2006-01-03 Trustees Of Tufts College Rechargeable thin film battery and method for making the same
US20040151985A1 (en) * 1999-06-28 2004-08-05 Lithium Power Technologies, Inc. Lithium ion battery electrodes
US6350222B2 (en) * 1999-07-28 2002-02-26 Thermwood Corporation Machine tool with improved tool changer means
US6402443B1 (en) * 1999-08-26 2002-06-11 Deckel Maho Pfronten Gmbh Machining unit on a machine tool
US7107193B1 (en) * 1999-09-03 2006-09-12 Autodesk, Inc. Defining parameters for a finite elements analysis calculation in a computer-assisted drafting program
US6833031B2 (en) * 2000-03-21 2004-12-21 Wavezero, Inc. Method and device for coating a substrate
US6924164B2 (en) * 2000-03-24 2005-08-02 Cymbet Corporation Method of continuous processing of thin-film batteries and like devices
US7194801B2 (en) * 2000-03-24 2007-03-27 Cymbet Corporation Thin-film battery having ultra-thin electrolyte and associated method
US20040185667A1 (en) * 2000-03-24 2004-09-23 Cymbet Corporation Method of continuous processing of thin-film batteries and like devices
US20020120906A1 (en) * 2000-07-17 2002-08-29 Lei Xia Behavioral modeling and analysis of galvanic devices
US20030082446A1 (en) * 2000-10-20 2003-05-01 Yet-Ming Chiang Reticulated and controlled porosity battery structures
US8168326B2 (en) * 2000-10-20 2012-05-01 A123 Systems, Inc. Battery structures, self-organizing structures and related methods
US7553584B2 (en) * 2000-10-20 2009-06-30 Massachusetts Institute Of Technology Reticulated and controlled porosity battery structures
US20020169620A1 (en) * 2001-03-29 2002-11-14 Spotnitz Robert M. Method of doing business: customer-driven design of a charge storage device
US20030099884A1 (en) * 2001-07-27 2003-05-29 A123Systems, Inc. Battery structures, self-organizing structures and related methods
US7579112B2 (en) * 2001-07-27 2009-08-25 A123 Systems, Inc. Battery structures, self-organizing structures and related methods
US20030064292A1 (en) * 2001-09-12 2003-04-03 Neudecker Bernd J. Thin-film electrochemical devices on fibrous or ribbon-like substrates and method for their manufacture and design
US20030068559A1 (en) * 2001-09-12 2003-04-10 Armstrong Joseph H. Apparatus and method for the design and manufacture of multifunctional composite materials with power integration
US6656234B2 (en) * 2001-09-26 2003-12-02 Ford Global Technologies, Llc Tuning battery electrode porosity technical field
US20030108800A1 (en) * 2001-11-09 2003-06-12 Barbarich Thomas J. Non-aqueous electrolytes for lithium electrochemical cells
US6962823B2 (en) * 2002-04-02 2005-11-08 Nanosys, Inc. Methods of making, positioning and orienting nanostructures, nanostructure arrays and nanostructure devices
US20080118782A1 (en) * 2002-05-02 2008-05-22 Adam Heller Miniature biological fuel cell that is operational under physiological conditions, and associated devices and methods
US6884333B2 (en) * 2002-10-09 2005-04-26 Uziel Landau Electrochemical system for analyzing performance and properties of electrolytic solutions
US7294209B2 (en) * 2003-01-02 2007-11-13 Cymbet Corporation Apparatus and method for depositing material onto a substrate using a roll-to-roll mask
US20040131925A1 (en) * 2003-01-02 2004-07-08 Jenson Mark L. Solid state activity-activated battery device and method
US20040131761A1 (en) * 2003-01-02 2004-07-08 Stuart Shakespeare Apparatus and method for depositing material onto a substrate using a roll-to-roll mask
US20040131937A1 (en) * 2003-01-06 2004-07-08 Ga-Lane Chen Lithium ion battery comprising nanomaterials
US20040144321A1 (en) * 2003-01-28 2004-07-29 Eastman Kodak Company Method of designing a thermal physical vapor deposition system
US7361327B2 (en) * 2003-01-31 2008-04-22 Los Alamos National Security, Llc Microporous crystals and synthesis schemes
US20070186852A1 (en) * 2003-02-14 2007-08-16 Junichiro Sakata Manufacturing apparatus
US20040258851A1 (en) * 2003-06-23 2004-12-23 Venkat Selvamanickam Apparatus for high-throughput ion beam-assisted deposition (IBAD)
US20050114105A1 (en) * 2003-11-24 2005-05-26 Barber Andrew J. System for predicting the dynamic behavior of physical systems
US20050244580A1 (en) * 2004-04-30 2005-11-03 Eastman Kodak Company Deposition apparatus for temperature sensitive materials
US20060156978A1 (en) * 2004-08-11 2006-07-20 Cornell Research Foundation, Inc. Modular fabrication systems and methods
US7625198B2 (en) * 2004-08-11 2009-12-01 Cornell Research Foundation, Inc. Modular fabrication systems and methods
US7315789B2 (en) * 2004-11-23 2008-01-01 Lg Chem, Ltd. Method and system for battery parameter estimation
US20060138350A1 (en) * 2004-12-28 2006-06-29 Asml Netherlands B.V. Lithographic apparatus, illumination system and method for mitigating debris particles
US7618742B2 (en) * 2005-01-28 2009-11-17 Eveready Battery Co., Inc. Electrochemical cell with improved internal contact
US20070218329A1 (en) * 2005-07-05 2007-09-20 Keith Kepler D Combinatorial method and apparatus for screening electrochemical materials
US20070110892A1 (en) * 2005-11-15 2007-05-17 Sumitomo Electric Industries, Ltd. Method of operating vacuum deposition apparatus and vacuum deposition apparatus
US20100082142A1 (en) * 2005-11-22 2010-04-01 Usadi Adam K Simulation System and Method
US20080259976A1 (en) * 2005-11-30 2008-10-23 The Governors Of The University Of Alberta Organic Columnar Thin Films
US20090061090A1 (en) * 2006-05-19 2009-03-05 Ulvac, Inc. Vapor deposition apparatus for an organic vapor deposition material and a method for producing an organic film
US7490710B1 (en) * 2006-08-19 2009-02-17 Wes-Tech Automation Solutions, Llc Flexible manufacturing system having modular work stations
US20090304906A1 (en) * 2006-09-29 2009-12-10 Tokyo Electron Limited Evaporating apparatus, apparatus for controlling evaporating apparatus, method for controlling evaporating apparatus, method for using evaporating apparatus and method for manufacturing blowing port
US20080079418A1 (en) * 2006-09-29 2008-04-03 Gm Global Technology Operations, Inc. High-precision rogowski current transformer
US20080187832A1 (en) * 2007-02-01 2008-08-07 Hideharu Takezawa Battery, method and apparatus for manufacturing negative electrode thereof
US20100015361A1 (en) * 2007-02-28 2010-01-21 Ulvac, Inc. Vapor deposition source, a vapor deposition apparatus and a method for forming an organic thin film
US20080248386A1 (en) * 2007-04-05 2008-10-09 Obrovac Mark N Electrodes with raised patterns
US20090157369A1 (en) * 2007-12-14 2009-06-18 Nanoexa,Inc. Fast and High-Throughput Search Engine for Materials for Lithium-Ion Batteries Using Quantum Simulations
US20090217876A1 (en) * 2008-02-28 2009-09-03 Ceramic Technologies, Inc. Coating System For A Ceramic Evaporator Boat
US20110202159A1 (en) * 2008-06-20 2011-08-18 Sakti3, Inc. Computational method for design and manufacture of electrochemical systems
US7945344B2 (en) * 2008-06-20 2011-05-17 SAKT13, Inc. Computational method for design and manufacture of electrochemical systems
US20090326696A1 (en) * 2008-06-20 2009-12-31 Sakti3, Inc. computational method for design and manufacture of electrochemical systems
US20100035152A1 (en) * 2008-08-05 2010-02-11 Sakti3, Inc. Electrochemical cell including functionally graded and architectured components and methods
US20100190051A1 (en) * 2009-01-29 2010-07-29 Bruce Gardiner Aitken Barrier layer for thin film battery
US20110318498A1 (en) * 2009-02-24 2011-12-29 University Of Virginia Patent Foundation Coaxial Hollow Cathode Plasma Assisted Directed Vapor Deposition and Related Method Thereof
US20110165326A1 (en) * 2010-01-07 2011-07-07 Primestar Solar, Inc. Automatic feed system and related process for introducing source material to a thin film vapor deposition system
US20110301931A1 (en) * 2010-06-03 2011-12-08 Battelle Energy Alliance, Llc Systems, methods and computer readable media for modeling cell performance fade of rechargeable electrochemical devices
US20120040233A1 (en) * 2011-10-27 2012-02-16 Sakti3, Inc. Barrier for thin film lithium batteries made on flexible substrates and related methods
US20120058280A1 (en) * 2011-11-08 2012-03-08 Sakti3, Inc. Thermal evaporation process for manufacture of solid state battery devices

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9249502B2 (en) 2008-06-20 2016-02-02 Sakti3, Inc. Method for high volume manufacture of electrochemical cells using physical vapor deposition
US20110202159A1 (en) * 2008-06-20 2011-08-18 Sakti3, Inc. Computational method for design and manufacture of electrochemical systems
US20110212268A1 (en) * 2008-06-20 2011-09-01 Sakti3, Inc. Method for high volume manufacture of electrochemical cells using physical vapor deposition
US9666895B2 (en) 2008-06-20 2017-05-30 Sakti3, Inc. Computational method for design and manufacture of electrochemical systems
US9303315B2 (en) 2008-06-20 2016-04-05 Sakti3, Inc. Method for high volume manufacture of electrochemical cells using physical vapor deposition
US20090325063A1 (en) * 2008-06-20 2009-12-31 Sakti3, Inc. Method for high volume manufacture of electrochemical cells using physical vapor deposition
US8357464B2 (en) 2011-04-01 2013-01-22 Sakti3, Inc. Electric vehicle propulsion system and method utilizing solid-state rechargeable electrochemical cells
US8889285B2 (en) 2011-04-01 2014-11-18 Sakti3, Inc. Electric vehicle propulsion system and method utilizing solid-state rechargeable electrochemical cells
US9929440B2 (en) 2011-04-01 2018-03-27 Sakti3, Inc. Electric vehicle propulsion system and method utilizing solid-state rechargeable electrochemical cells
US8301285B2 (en) 2011-10-31 2012-10-30 Sakti3, Inc. Computer aided solid state battery design method and manufacture of same using selected combinations of characteristics
US9631269B2 (en) 2011-11-08 2017-04-25 Sakti3, Inc. Thermal evaporation process for manufacture of solid state battery devices
US9127344B2 (en) 2011-11-08 2015-09-08 Sakti3, Inc. Thermal evaporation process for manufacture of solid state battery devices
US20120058380A1 (en) * 2011-11-09 2012-03-08 Sakti3, Inc. Monolithically integrated thin-film solid state lithium battery device having multiple layers of lithium electrochemical cells
US9627717B1 (en) 2012-10-16 2017-04-18 Sakti3, Inc. Embedded solid-state battery
US9627709B2 (en) 2014-10-15 2017-04-18 Sakti3, Inc. Amorphous cathode material for battery device

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