TW201622228A - 三維薄膜電池 - Google Patents
三維薄膜電池 Download PDFInfo
- Publication number
- TW201622228A TW201622228A TW104127703A TW104127703A TW201622228A TW 201622228 A TW201622228 A TW 201622228A TW 104127703 A TW104127703 A TW 104127703A TW 104127703 A TW104127703 A TW 104127703A TW 201622228 A TW201622228 A TW 201622228A
- Authority
- TW
- Taiwan
- Prior art keywords
- layer
- substrate
- fcc
- thin film
- dimensional
- Prior art date
Links
- 239000010409 thin film Substances 0.000 title claims abstract description 71
- 239000000758 substrate Substances 0.000 claims abstract description 135
- 239000003792 electrolyte Substances 0.000 claims abstract description 73
- 238000000034 method Methods 0.000 claims abstract description 32
- 230000008569 process Effects 0.000 claims abstract description 22
- 238000000608 laser ablation Methods 0.000 claims abstract description 7
- 238000000059 patterning Methods 0.000 claims abstract description 7
- 238000000151 deposition Methods 0.000 claims description 55
- 238000004519 manufacturing process Methods 0.000 claims description 23
- 238000007788 roughening Methods 0.000 claims description 7
- 239000010410 layer Substances 0.000 description 152
- 238000012545 processing Methods 0.000 description 22
- 239000000463 material Substances 0.000 description 11
- 230000008021 deposition Effects 0.000 description 10
- 230000004907 flux Effects 0.000 description 8
- 238000004544 sputter deposition Methods 0.000 description 6
- 229910012851 LiCoO 2 Inorganic materials 0.000 description 5
- 239000011324 bead Substances 0.000 description 4
- 238000005422 blasting Methods 0.000 description 4
- 239000011253 protective coating Substances 0.000 description 4
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 3
- 102000040945 Transcription factor Human genes 0.000 description 3
- 108091023040 Transcription factor Proteins 0.000 description 3
- 230000032798 delamination Effects 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 238000013532 laser treatment Methods 0.000 description 3
- 229910052744 lithium Inorganic materials 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910020599 Co 3 O 4 Inorganic materials 0.000 description 2
- 229910012305 LiPON Inorganic materials 0.000 description 2
- 238000000231 atomic layer deposition Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 238000009831 deintercalation Methods 0.000 description 2
- 230000001627 detrimental effect Effects 0.000 description 2
- 239000002001 electrolyte material Substances 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 239000010445 mica Substances 0.000 description 2
- 229910052618 mica group Inorganic materials 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- 238000005546 reactive sputtering Methods 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 230000000007 visual effect Effects 0.000 description 2
- 229910018119 Li 3 PO 4 Inorganic materials 0.000 description 1
- 229910015645 LiMn Inorganic materials 0.000 description 1
- 229910006020 NiCoAl Inorganic materials 0.000 description 1
- 229910005800 NiMnCo Inorganic materials 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- 229910052783 alkali metal Inorganic materials 0.000 description 1
- 150000001340 alkali metals Chemical class 0.000 description 1
- 229910052784 alkaline earth metal Inorganic materials 0.000 description 1
- 150000001342 alkaline earth metals Chemical class 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 239000010405 anode material Substances 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 239000010406 cathode material Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000003750 conditioning effect Effects 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000001351 cycling effect Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005868 electrolysis reaction Methods 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 238000004146 energy storage Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 230000002687 intercalation Effects 0.000 description 1
- 238000009830 intercalation Methods 0.000 description 1
- 238000010849 ion bombardment Methods 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 238000005191 phase separation Methods 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 230000010411 postconditioning Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 238000001552 radio frequency sputter deposition Methods 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000007764 slot die coating Methods 0.000 description 1
- 239000007784 solid electrolyte Substances 0.000 description 1
- 239000011029 spinel Substances 0.000 description 1
- 229910052596 spinel Inorganic materials 0.000 description 1
- 238000005118 spray pyrolysis Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 238000011282 treatment Methods 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M4/00—Electrodes
- H01M4/02—Electrodes composed of, or comprising, active material
- H01M4/64—Carriers or collectors
- H01M4/70—Carriers or collectors characterised by shape or form
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M10/00—Secondary cells; Manufacture thereof
- H01M10/04—Construction or manufacture in general
- H01M10/0436—Small-sized flat cells or batteries for portable equipment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M10/00—Secondary cells; Manufacture thereof
- H01M10/05—Accumulators with non-aqueous electrolyte
- H01M10/052—Li-accumulators
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M10/00—Secondary cells; Manufacture thereof
- H01M10/05—Accumulators with non-aqueous electrolyte
- H01M10/056—Accumulators with non-aqueous electrolyte characterised by the materials used as electrolytes, e.g. mixed inorganic/organic electrolytes
- H01M10/0561—Accumulators with non-aqueous electrolyte characterised by the materials used as electrolytes, e.g. mixed inorganic/organic electrolytes the electrolyte being constituted of inorganic materials only
- H01M10/0562—Solid materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M10/00—Secondary cells; Manufacture thereof
- H01M10/05—Accumulators with non-aqueous electrolyte
- H01M10/058—Construction or manufacture
- H01M10/0585—Construction or manufacture of accumulators having only flat construction elements, i.e. flat positive electrodes, flat negative electrodes and flat separators
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M4/00—Electrodes
- H01M4/02—Electrodes composed of, or comprising, active material
- H01M4/04—Processes of manufacture in general
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M4/00—Electrodes
- H01M4/02—Electrodes composed of, or comprising, active material
- H01M4/04—Processes of manufacture in general
- H01M4/0402—Methods of deposition of the material
- H01M4/0404—Methods of deposition of the material by coating on electrode collectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M4/00—Electrodes
- H01M4/02—Electrodes composed of, or comprising, active material
- H01M4/13—Electrodes for accumulators with non-aqueous electrolyte, e.g. for lithium-accumulators; Processes of manufacture thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M4/00—Electrodes
- H01M4/02—Electrodes composed of, or comprising, active material
- H01M4/13—Electrodes for accumulators with non-aqueous electrolyte, e.g. for lithium-accumulators; Processes of manufacture thereof
- H01M4/139—Processes of manufacture
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M2300/00—Electrolytes
- H01M2300/0017—Non-aqueous electrolytes
- H01M2300/0065—Solid electrolytes
- H01M2300/0068—Solid electrolytes inorganic
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M2300/00—Electrolytes
- H01M2300/0017—Non-aqueous electrolytes
- H01M2300/0065—Solid electrolytes
- H01M2300/0068—Solid electrolytes inorganic
- H01M2300/0071—Oxides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M4/00—Electrodes
- H01M4/02—Electrodes composed of, or comprising, active material
- H01M4/04—Processes of manufacture in general
- H01M4/0402—Methods of deposition of the material
- H01M4/0421—Methods of deposition of the material involving vapour deposition
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M4/00—Electrodes
- H01M4/02—Electrodes composed of, or comprising, active material
- H01M4/04—Processes of manufacture in general
- H01M4/0402—Methods of deposition of the material
- H01M4/0421—Methods of deposition of the material involving vapour deposition
- H01M4/0423—Physical vapour deposition
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M4/00—Electrodes
- H01M4/02—Electrodes composed of, or comprising, active material
- H01M4/04—Processes of manufacture in general
- H01M4/0402—Methods of deposition of the material
- H01M4/0421—Methods of deposition of the material involving vapour deposition
- H01M4/0423—Physical vapour deposition
- H01M4/0426—Sputtering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M4/00—Electrodes
- H01M4/02—Electrodes composed of, or comprising, active material
- H01M4/04—Processes of manufacture in general
- H01M4/0402—Methods of deposition of the material
- H01M4/0421—Methods of deposition of the material involving vapour deposition
- H01M4/0428—Chemical vapour deposition
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/10—Energy storage using batteries
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Inorganic Chemistry (AREA)
- Secondary Cells (AREA)
- Cell Electrode Carriers And Collectors (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201462042557P | 2014-08-27 | 2014-08-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW201622228A true TW201622228A (zh) | 2016-06-16 |
Family
ID=55400610
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW104127703A TW201622228A (zh) | 2014-08-27 | 2015-08-25 | 三維薄膜電池 |
Country Status (6)
| Country | Link |
|---|---|
| EP (1) | EP3186850A4 (enExample) |
| JP (1) | JP2017530518A (enExample) |
| KR (1) | KR20170044730A (enExample) |
| CN (1) | CN106663841A (enExample) |
| TW (1) | TW201622228A (enExample) |
| WO (1) | WO2016033379A1 (enExample) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20170301926A1 (en) * | 2016-04-14 | 2017-10-19 | Applied Materials, Inc. | System and method for maskless thin film battery fabrication |
| KR102054326B1 (ko) * | 2016-08-25 | 2019-12-11 | 주식회사 엘지화학 | 미세 홀들을 포함하고 있는 이차전지용 전극 |
| US10431847B2 (en) | 2016-09-19 | 2019-10-01 | International Business Machines Corporation | Stacked film battery architecture |
| US20180287185A1 (en) * | 2017-03-30 | 2018-10-04 | International Business Machines Corporation | Three-dimensional thin-film battery device |
| US10622680B2 (en) | 2017-04-06 | 2020-04-14 | International Business Machines Corporation | High charge rate, large capacity, solid-state battery |
| KR102682126B1 (ko) * | 2017-08-04 | 2024-07-08 | 삼성전자주식회사 | 고체 전해질, 그 제조방법 및 이를 포함한 리튬전지 |
| DE102017218130A1 (de) | 2017-10-11 | 2019-04-11 | Robert Bosch Gmbh | Verfahren zur Herstellung eines Stromableiters, Elektrode und Batteriezelle |
| CN109755615B (zh) * | 2019-01-24 | 2021-05-28 | 深圳市致远动力科技有限公司 | 具有三维微纳结构的全固态薄膜燃料电池的制备方法 |
| FR3109944B1 (fr) * | 2020-05-11 | 2022-08-12 | Accumulateurs Fixes | Traitement d’une surface de lithium par procédé laser |
| CN111682200B (zh) * | 2020-07-14 | 2021-10-22 | 万华化学集团股份有限公司 | 用于锂离子电池的正极材料及其制备方法 |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000100443A (ja) * | 1998-09-25 | 2000-04-07 | Mitsubishi Chemicals Corp | 二次電池用電極基材フィルム及び二次電池 |
| KR100296741B1 (ko) * | 1999-05-11 | 2001-07-12 | 박호군 | 트렌치 구조를 갖는 전지 및 그 제조방법 |
| JP2005108521A (ja) * | 2003-09-29 | 2005-04-21 | Hitachi Maxell Ltd | 薄膜電極とその製造方法およびその薄膜電極を用いたリチウム二次電池 |
| US7901829B2 (en) * | 2005-09-13 | 2011-03-08 | 3M Innovative Properties Company | Enhanced catalyst interface for membrane electrode assembly |
| US20070172735A1 (en) * | 2006-01-26 | 2007-07-26 | David R. Hall | Thin-film Battery |
| CN102290605A (zh) * | 2006-07-18 | 2011-12-21 | 西姆贝特公司 | 用于固态微电池光刻制造、切单和钝化的方法和设备 |
| US7682733B2 (en) * | 2006-08-25 | 2010-03-23 | Motorola, Inc. | Thin film battery having textured layer |
| KR100964017B1 (ko) * | 2007-12-13 | 2010-06-15 | 지에스나노텍 주식회사 | 전극의 표면적 및 전극과 전해질의 접촉면적을 증가시킨박막형 전지 및 그의 제조방법 |
| JP2009289585A (ja) * | 2008-05-29 | 2009-12-10 | Sony Corp | 負極および二次電池 |
| EP2311122A4 (en) * | 2008-08-05 | 2014-04-02 | Sakti3 Inc | ELECTROCHEMICAL CELL WITH FUNCTIONALLY DEGRADED COMPONENTS |
| DE102010029060A1 (de) * | 2010-05-18 | 2011-11-24 | Robert Bosch Gmbh | Verfahren zur Herstellung einer Dünnschichtbatterie und entsprechende Dünnschichtbatterie |
| JP5666839B2 (ja) * | 2010-06-30 | 2015-02-12 | 古河電気工業株式会社 | ２次電池用負極、負極集電体、２次電池及びこれらの製造方法 |
| JP6049708B2 (ja) * | 2011-06-17 | 2016-12-21 | アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ | マスクレス電解質堆積による薄膜バッテリ製造 |
| US20130260183A1 (en) * | 2012-03-28 | 2013-10-03 | International Business Machines Corporation | Three dimensional solid-state battery integrated with cmos devices |
| JP2014032893A (ja) * | 2012-08-06 | 2014-02-20 | Sharp Corp | 薄膜電池 |
-
2015
- 2015-08-25 TW TW104127703A patent/TW201622228A/zh unknown
- 2015-08-27 CN CN201580044474.9A patent/CN106663841A/zh active Pending
- 2015-08-27 WO PCT/US2015/047286 patent/WO2016033379A1/en not_active Ceased
- 2015-08-27 JP JP2017511263A patent/JP2017530518A/ja active Pending
- 2015-08-27 KR KR1020177008178A patent/KR20170044730A/ko not_active Withdrawn
- 2015-08-27 EP EP15835274.0A patent/EP3186850A4/en not_active Withdrawn
Also Published As
| Publication number | Publication date |
|---|---|
| JP2017530518A (ja) | 2017-10-12 |
| EP3186850A4 (en) | 2018-01-24 |
| CN106663841A (zh) | 2017-05-10 |
| WO2016033379A1 (en) | 2016-03-03 |
| EP3186850A1 (en) | 2017-07-05 |
| KR20170044730A (ko) | 2017-04-25 |
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