CN106575017B - 平面波束形成和操纵的光学相控阵列芯片以及使用其的方法 - Google Patents

平面波束形成和操纵的光学相控阵列芯片以及使用其的方法 Download PDF

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CN106575017B
CN106575017B CN201580043763.7A CN201580043763A CN106575017B CN 106575017 B CN106575017 B CN 106575017B CN 201580043763 A CN201580043763 A CN 201580043763A CN 106575017 B CN106575017 B CN 106575017B
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L.埃尔达达
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Quinagi Systems Inc
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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
    • G02F1/292—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection by controlled diffraction or phased-array beam steering
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    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G01S7/4811—Constructional features, e.g. arrangements of optical elements common to transmitter and receiver
    • G01S7/4813—Housing arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G01S7/4814—Constructional features, e.g. arrangements of optical elements of transmitters alone
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G01S7/4817—Constructional features, e.g. arrangements of optical elements relating to scanning

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  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
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Abstract

一维平面波束形成和操纵光学相控阵列芯片是二维波束形成和操纵固态激光雷达的简单构建模块，使得能够通过使用多个所述芯片以高产量和低成本制造所述激光雷达。遵循制造设计规则的新兴光子集成电路芯片架构使得所述构建模块成为可能。

Description

平面波束形成和操纵的光学相控阵列芯片以及使用其的方法
相关申请的交叉引用
本申请要求于2014年6月30日提交的美国专利申请No.14/318716的优先权，其内容通过引用并入本文。
技术领域
本发明总体上涉及环境感测领域，并且更具体地涉及飞行时间(ToF)激光雷达传感器的使用，用于实时三维绘图和物体检测、跟踪、识别和/或分类。
背景技术
激光雷达传感器是光检测和测距传感器。它是光学远程感测模块，通过使用来自激光器的脉冲(或替代地调制信号)用光照射目标或场景并测量光子行进到所述目标或场景并且在反射之后返回到激光雷达模块中的接收器的时间，其可以测量到场景中的目标或物体的距离。反射脉冲(或调制信号)被检测，其中飞行时间和脉冲(或调制信号)的强度分别是感测物体的距离和反射率的测量。
传统的激光雷达传感器利用机械移动部件来扫描激光束。在一些系统中，包括在汽车应用中使用的某些系统，例如高级驾驶员辅助系统(ADAS)和自动驾驶系统，由于各种潜在的优点，包括但不限于更高的传感器可靠性、更长的传感器寿命、更小的传感器尺寸、更低的传感器重量和更低的传感器成本，优选地使用固态传感器。
几十年前，用于创建雷达相控阵列的射频(RF)延迟线被用于雷达信号的固态操纵。二十年前，使用基于光子集成电路(PIC)的延迟线与检测器和RF天线阵列组合来提高雷达信号的固态操纵中的延迟的精度。具有微米级和纳米级器件的PIC可以用于产生用于激光束的固态操纵的光学相控阵列(OPA)，包括可调谐光学延迟线和光学天线。
到目前为止生产的光学领域中的相控阵列是复杂的、昂贵的和/或具有与波束形成和波束操纵不同的目的；一些组合了空间滤波器、光放大器和环形激光器(US 7,339,727)，一些涉及多个光输入光束(US 7,406,220)，一些涉及体积衍射光栅和多个输入方向(US 7,428,100)，一些组合了多个波长的波束(US 7,436,588)，一些具有光学相位参考源和增益元件(US 7,489,870)，一些具有视场中的预定区域和多个波束形成元件(US 7,532,311)，并且一些具有多个频率和多个光学相位参考源(US 7,555,217)。
到目前为止生产的光学领域中的二维波束形成和操纵相控阵列具有低产量并且是昂贵的，因为它们在二维中以复杂的二维像素阵列操纵。
发明内容
一维(1D)平面波束形成和操纵光学相控阵列芯片是二维(2D)波束形成和操纵固态激光雷达的简单构建模块，使得能够通过使用多个所述芯片以高产量和低成本制造所述激光雷达。遵循制造设计(DFM)规则的新型光子集成电路(PIC)芯片架构使得所述构建模块成为可能。
附图说明
下面的附图是本发明的实施例的说明，并且不旨在限制由形成本申请的一部分的权利要求所包括的本发明。
图1的示意图描绘了1D平面波束形成和操纵光学相控阵列芯片的分路部分，所述分路部分包括1xL个Y分支树20，其后是1xM个多模干涉耦合器30，产生了1xN个分路器(其中LxM＝N，例如8x128＝1024)。
图2的示意图描绘了1D平面波束成形和操纵光学相控阵列芯片，所述芯片包括激光器10、包括Y分支树20和多模干涉耦合器30的分路部分、光学移相器40和以一维像素阵列配置布置的面外光耦合器120。渐变折射率(GRIN)透镜140用于减小垂直于操纵方向的尺寸中的光斑尺寸。可替代地，可以使用标准几何折射透镜、衍射光学元件(DOE)、全息光学元件(HOE)或片上光栅来实现所述光斑尺寸减小。
图3的示意图描绘了1D平面波束成形和操纵光学相控阵列芯片，所述芯片包括激光器10、包括Y分支树20和多模干涉耦合器30的分路部分、以推拉配置的两个分组线性欧姆加热电极40的形式的光学移相器和面外光学耦合器120。
图4的示意图描绘了1D平面波束成形和操纵光学相控阵列芯片，所述芯片包括激光器10、包括Y分支树20和多模干涉耦合器30的分路部分、以推拉配置的两组线性欧姆加热电极50的形式的光学移相器和面外光学耦合器120。
图5的示意图描绘了1D平面波束成形和操纵光学相控阵列芯片，所述芯片包括激光器10、包括Y分支树20和多模干涉耦合器30的分路部分、两个分组的线性欧姆加热电极40形式的光学移相器和两个分组的非线性欧姆加热电极60形式的光学移相器(线性和非线性加热电极都具有推拉配置)，以及面外光学耦合器120。
图6的示意图描绘了1D平面波束成形和操纵光学相控阵列芯片，所述芯片包括激光器10、包括Y分支树20和多模干涉耦合器30的分路部分、两对分组的线性欧姆加热电极形式的光移相器(一对40用于粗略相位调节，一对70用于精细相位调节，所述电极对都具有推拉配置)、一个相偏移电极80，以及面外光学耦合器120。
图7的示意图描绘了1D平面波束成形和操纵光学相控阵列芯片，所述芯片包括激光器10、包括Y分支树20和多模干涉耦合器30的分路部分、两对分组的线性欧姆加热电极形式的光移相器(每个欧姆加热器包括串联的线性加热器，一对90用于粗相位调节，一对100用于精细相位调节，所述电极对都具有推拉配置)、一组相偏移电极110，以及面外光学耦合器120。
图8的示意图类似于图7的示意图，具有用于延伸操纵范围的附加凹透镜130。
图9的示意图包括多个图7中所示的光子集成电路(PIC)，其中激光器在两个PIC之间共享。可替代地，每个PIC可以提供有单独的激光器。
具体实施方式
基于激光雷达的设备和方法用于使用光子集成电路(PIC)的激光束的固态操纵。集成光学设计和制造微米和纳米技术用于生产芯片级光分路器，其将来自激光器的光信号基本均匀地分配到像素阵列，所述像素包括可调光学延迟线和光学天线。所述天线实现光的面外耦合。
当所述阵列中的所述包含天线的像素的延迟线被调谐时，每个天线发射特定相位的光，以通过这些发射的干涉形成期望的远场辐射图案。所述阵列用作固态光学相控阵列(OPA)的功能。
通过结合大量天线，可以通过OPA实现高分辨率远场图案，支持固体晶状体中需要的辐射图形波束形成和操控，以及在三维全息术、光学存储器、用于光学空间分割复用的模式匹配、自由空间通信和生物医学科学中所需要的任意辐射图案的产生。来自阵列的成像通常通过像素的强度传输，OPA允许通过控制从单个源接收相干光波的像素的光学相位来进行成像。
一维(1D)平面波束形成和操纵的光学相控阵列芯片是固态激光雷达的简单构建模块，使得能够以低成本制造激光雷达。
光斑尺寸的垂直尺寸(即垂直于操纵方向的尺寸)用至少一个片上光栅或至少一个片外透镜减小。
所述片外透镜的类型包括但不限于：
-折射透镜
-渐变折射率(GRIN)透镜
-衍射光学元件(DOE)
-全息光学元件(HOE)
一个或多个1D波束形成和操纵电路可以用于实现期望的水平视场(FOV)或操纵范围。
用分束光学装置的任何子集实现波束分路，包括但不限于：
-Y分支
-定向耦合器
-多模干涉(MMI)耦合器
用于分束的优选实施例包括后面有MMI耦合器的Y分支分路器。
相位偏移用移相光学装置的任何子集进行控制，包括但不限于：
-增益元件
-全通滤波器
-布拉格光栅
-分散材料
-波长调谐
-相位调谐
当使用相位调谐时，用于调谐所述延迟线的致动机构以及当它们可调谐时的所述光分路器可以是多种机制中的任一种，包括但不限于：
-热光致动
-电光致动
-电吸收致动
-自由载流子吸收致动
-磁光致动
-液晶致动
-全光学致动
每个像素可以具有独立的相位控制，用于最大灵活性和对远场辐射图案的最佳控制，或者分组(有时称为带化)可以用于利用一个控制信号向多个像素提供相位调谐，以简化设计、制造、测试、控制和操作。
分组相移用以下任何子集控制：
-一个或多个线性(三角形)电极-串联或并联；相同或粗略和精细调节电极
-一个或多个非线性(子线性或超线性)电极-串联或并联；相同或粗略和精细调节电极
一个或多个多边形形状(例如矩形)的相位偏移电极-串联或并联；相同或粗略和精细调节电极-加或减；推-推或推-拉配置。
光学天线可以是可以将光耦合到PIC平面之外的各种纳米结构中的任何一种，包括但不限于：
-光栅
-全息光学元件(HOE)
-反射镜
-全内反射(TIR)界面
-透镜
包含OPA PIC的芯片优选地与互补金属氧化物半导体(CMOS)工艺兼容。

Claims (13)

1.一种基于光学相控阵列的一维波束形成和操纵设备，包括：
具有第一视场操纵范围的第一光学相控阵列一维波束形成和操纵集成电路，其邻近于具有第二视场操纵范围的第二光学相控阵列一维波束形成和操纵集成电路，所述第一视场操纵范围和第二视场操纵范围在共同方向上建立增大的水平视场操纵范围，第一光学相控阵列一维波束形成和操纵集成电路和第二光学相控阵列一维波束形成和操纵集成电路每个都是固态激光雷达的构建模块，并且每个都包括：
至少一个光学功率分路器；以及
至少一个光学移相器，该至少一个光学移相器由至少一个移相装置控制，所述至少一个移相装置从以下中选出：增益元件、全通滤波器、布拉格光栅、分散材料、波长调谐装置和相位调谐装置。
2.根据权利要求1所述的设备，还包括至少一个片上光栅或至少一个片外透镜。
3.根据权利要求2所述的设备，其中，所述至少一个片外透镜从以下中选出：折射透镜、渐变折射率透镜、衍射光学元件、以及全息光学元件。
4.根据权利要求1所述的设备，其中，所述至少一个光学功率分路器由功率分路光学装置的任何子集实现，从以下中选出：Y分支、定向耦合器，以及多模干涉耦合器。
5.根据权利要求4所述的设备，其中，所述光学功率分路是利用后面有多模干涉耦合器的Y分支实现的。
6.根据权利要求1所述的设备，其中，所述相位调谐的致动机制利用致动机制的子集，其从以下中选出：热光致动、电光致动、电吸收致动、自由载流子吸收致动、磁光致动、液晶致动、全光学致动。
7.根据权利要求1所述的设备，还包括以一维像素阵列配置布置的面外光耦合器，其中，其中，每个像素具有与其相关联的独立移相器。
8.根据权利要求7所述的设备，其中，多个所述像素通过具有组合移相器来对进行带化。
9.根据权利要求8所述的设备，其中，像素的带化控制是用控制元件实现的，所述控制元件包括从以下中选出的一个或多个：线性电极、非线性电极，以及相位偏移电极。
10.根据权利要求9所述的设备，其中，存在来自线性、非线性和相位偏移电极的集合的至少一种类型的多个电极，并且其中，以复数数量存在的电极以下列方式中的至少一种方式设置：串联、并联、加，以及减。
11.根据权利要求1所述的设备，其与至少一个面外耦合器组合，所述至少一个面外耦合器用光学元件实现，该光学元件从以下中选出：光栅、全息光学元件、反射镜、全内反射界面、透镜。
12.根据权利要求1所述的设备，其与透镜设备组合以延伸所述操纵范围。
13.根据权利要求1所述的设备，其中，所述集成电路与互补金属氧化物半导体制造工艺兼容。
CN201580043763.7A 2014-06-30 2015-06-23 平面波束形成和操纵的光学相控阵列芯片以及使用其的方法 Active CN106575017B (zh)

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US14/318,716 US9753351B2 (en) 2014-06-30 2014-06-30 Planar beam forming and steering optical phased array chip and method of using same
US14/318,716 2014-06-30
PCT/US2015/037246 WO2016022220A2 (en) 2014-06-30 2015-06-23 Planar beam forming and steering optical phased array chip and method of using same

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