CN106716240B - 基于一维转向光学相位阵列的三维映射二维扫描激光雷达及其使用方法 - Google Patents

基于一维转向光学相位阵列的三维映射二维扫描激光雷达及其使用方法 Download PDF

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CN106716240B
CN106716240B CN201580043775.XA CN201580043775A CN106716240B CN 106716240 B CN106716240 B CN 106716240B CN 201580043775 A CN201580043775 A CN 201580043775A CN 106716240 B CN106716240 B CN 106716240B
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L.埃尔达达
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481Constructional features, e.g. arrangements of optical elements
    • G01S7/4814Constructional features, e.g. arrangements of optical elements of transmitters alone
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06Systems determining position data of a target
    • G01S17/08Systems determining position data of a target for measuring distance only
    • G01S17/10Systems determining position data of a target for measuring distance only using transmission of interrupted, pulse-modulated waves
    • GPHYSICS
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    • G01S17/00Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06Systems determining position data of a target
    • G01S17/42Simultaneous measurement of distance and other co-ordinates
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    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/88Lidar systems specially adapted for specific applications
    • G01S17/89Lidar systems specially adapted for specific applications for mapping or imaging
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
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    • G01S7/4817Constructional features, e.g. arrangements of optical elements relating to scanning
    • GPHYSICS
    • G01MEASURING; TESTING
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    • G01S7/00Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481Constructional features, e.g. arrangements of optical elements
    • G01S7/4814Constructional features, e.g. arrangements of optical elements of transmitters alone
    • G01S7/4815Constructional features, e.g. arrangements of optical elements of transmitters alone using multiple transmitters
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    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/005Optical components external to the laser cavity, specially adapted therefor, e.g. for homogenisation or merging of the beams or for manipulating laser pulses, e.g. pulse shaping
    • H01S5/0071Optical components external to the laser cavity, specially adapted therefor, e.g. for homogenisation or merging of the beams or for manipulating laser pulses, e.g. pulse shaping for beam steering, e.g. using a mirror outside the cavity to change the beam direction

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Abstract

多个一维平面光束形成及转向光学相位阵列芯片形成二维扫描固态激光雷达,使得能够由于所述一维光学相位阵列芯片的简单性而以高产量且低成本制造三维映射飞行时间激光雷达。

Description

基于一维转向光学相位阵列的三维映射二维扫描激光雷达及 其使用方法
相关申请的交叉引用
本申请要求于2014年8月15日提交的美国专利申请No.14/460,369的优先权,其内容通过引用并入本文中。
技术领域
本发明通常涉及环境感测领域,并且更具体地涉及用于实时三维映射以及对象检测、跟踪、识别和/或分类的飞行时间(Time of Flight,ToF)激光雷达传感器的使用。
背景技术
激光雷达传感器是光检测和测距传感器。它是一种光学远程感测模块,其能够通过使用来自激光器的脉冲(或替代地使用调制信号),利用光照射目标或场景,并测量光子行进至所述目标或景观并且在反射后返回至激光雷达模块中的接收器所花费的时间来测量到目标或到场景中的对象的距离。检测所反射的脉冲(或调制信号),其中飞行时间和脉冲(或调制信号)的强度分别为所感测对象的距离和反射率的测量值。
传统的激光雷达传感器利用机械移动部件来扫描激光束。在包括汽车应用中所使用的某些系统的一些系统中,诸如高级驾驶辅助系统(ADAS)和自动驾驶系统,优选使用固态传感器,因为其多种潜在的优点,包括但不限于更高的传感器可靠性、更长的传感器寿命、更小的传感器尺寸,更轻的传感器重量、以及更低的传感器成本。
几十年前,用于创建雷达相位阵列的射频(RF)延迟线被用于雷达信号的固态转向(steering)。二十年前,与检测器和RF天线阵列组合的、基于光子集成电路(PIC)的延迟线被用于提高雷达信号的固态转向的延迟的精度。具有微米级和纳米级装置的PIC能够用于产生用于激光束的固态转向的光学相位阵列(OPA),其包括可调谐光学延迟线和光学天线。
当前所生产的光学领域中的相位阵列是复杂的、昂贵的和/或具有与光束形成和光束转向不同的目的;其中一些组合空间滤波器、光学放大器和环形激光器(US 7,339,727)、一些涉及多个光输入光束(US 7,406,220)、一些涉及体衍射光栅和多个输入方向(US7,428,100),一些组合多个波长的光束(US 7,436,588),一些具有光学相位参考源和增益元件(US 7,489,870)、一些具有视场中的预定区域和多个光束形成元件(US 7,532,311),以及一些具有多个频率和多个光学相位参考源(US 7,555,217)。
到目前为止所生产的光学领域中的二维光束形成及转向相位阵列具有低产量并且是昂贵的,因为它们在具有复杂二维像素阵列的两个维度中转向。
发明内容
多个一维(1D)平面光束形成及转向光学相位阵列(OPA)芯片形成二维(2D)扫描固态激光雷达,使得能够由于所述1D OPA芯片的简单性而以高产量且低成本来制造三维(3D)映射飞行时间激光雷达。
附图说明
以下附图示出本发明的实施例并且不意图限制本发明,本发明由形成本申请一部分的权利要求所涵盖。
图1的示意图描绘了多个1D平面光束形成及转向光学相位阵列芯片10。双头箭头20位于视场内的转向平面中。渐变折射率(GRIN)透镜30与每个芯片一起使用,以减小垂直于转向方向的维度中的光斑尺寸。替代地,可以使用几何折射透镜、衍射光学元件(DOE)或全息光学元件(HOE)来实现所述光斑尺寸的减小。
图2的示意图描绘了多个1D平面光束形成及转向光学相位阵列芯片10。双头箭头20位于视场内的转向平面中。利用片上光栅40减小垂直于转向方向的维度中的光斑尺寸。
具体实施方式
基于激光雷达的设备和方法使用光子集成电路(PIC)来固态转向激光束。集成光学设计和制造微米和纳米技术用于芯片级光学分光器的生产,其将来自激光器的光学信号基本上均匀地分配到像素阵列,所述像素包括可调谐光学延迟线和光学天线。所述天线实现光的面外(out-of-plane)耦合。
当所述阵列中的所述包含天线的像素的延迟线被调谐时,每个天线发射特定相位的光,以通过这些发射的干涉形成期望的远场辐射图案。所述阵列充当固态光学相位阵列(OPA)的功能。
通过合并大量天线,能够通过OPA实现高分辨率远场图案,支持在固态激光雷达中需要的辐射图案光束形成及转向,以及在三维全息术、光学存储器、用于光学空分(space-division)复用、自由空间通信,以及生物医学科学的模式匹配中根据需要生成任意的辐射图案。尽管来自阵列的成像通常通过像素的强度传输,OPA允许通过控制从单个源接收相干光波的像素的光学相位来进行成像。
多个一维(1D)平面光束形成及转向光学相位阵列芯片是固态激光雷达中的发射器的简单构造区块,使得能够以高产量且低成本制造激光雷达。
利用至少一个片外透镜或至少一个片上光栅来减小每个所述芯片的光斑尺寸的垂直维度(即,垂直于转向方向的维度)。
所述片外透镜的类型包括但不限于:
-折射透镜
-渐变折射率(GRIN)透镜
-衍射光学元件(DOE)
-全息光学元件(HOE)
包含OPA PIC的每个芯片优选地与互补金属氧化物半导体(CMOS)工艺兼容。
耦合到多个芯片中的光功率可以源自单个激光器或多个激光器。

Claims (10)

1.一种三维映射二维扫描飞行时间激光雷达测距设备,包括:
垂直维度中的多个一维基于光学相位阵列的激光束形成及转向光子集成电路芯片,每个一维基于光学相位阵列的激光束形成及转向光子集成电路芯片发射特定相位的相干光,所述特定相位的相干光彼此干涉以在垂直于该垂直维度的水平维度中的转向方向上形成远场辐射图案。
2.根据权利要求1所述的三维映射二维扫描飞行时间激光雷达测距设备,其中所述多个一维基于光学相位阵列的激光束形成及转向光子集成电路芯片利用一组元件的至少一个子集作为在垂直于所述多个一维基于光学相位阵列的激光束形成及转向光子集成电路芯片的转向平面的方向上的光束尺寸控制的部件来形成及转向激光束,所述一组元件包括:
至少一个片外透镜;和
至少一个片上光栅。
3.根据权利要求2所述的三维映射二维扫描飞行时间激光雷达测距设备,其中所述至少一个片外透镜包括一组元件的子集,该组元件包括:
至少一个折射透镜;
至少一个渐变折射率透镜;
至少一个衍射光学元件;和
至少一个全息光学元件。
4.根据权利要求1所述的三维映射二维扫描飞行时间激光雷达测距设备,其中耦合到所述多个一维基于光学相位阵列的激光束形成及转向光子集成电路芯片中的光学信号从单个激光器产生。
5.根据权利要求1所述的三维映射二维扫描飞行时间激光雷达测距设备,其中耦合到所述多个一维基于光学相位阵列的激光束形成及转向光子集成电路芯片中的光学信号从多个激光器产生。
6.一种利用二维扫描飞行时间激光雷达测距设备的用于三维映射的方法,所述激光雷达测距设备包括:
垂直维度中的多个一维基于光学相位阵列的激光束形成及转向光子集成电路芯片,每个一维基于光学相位阵列的激光束形成及转向光子集成电路芯片发射特定相位的相干光,所述特定相位的相干光彼此干涉以在垂直于该垂直维度的水平维度中的转向方向上形成远场辐射图案。
7.根据权利要求6所述的利用二维扫描飞行时间激光雷达测距设备的用于三维映射的方法,其中所述多个一维基于光学相位阵列的激光束形成及转向光子集成电路芯片利用一组元件的至少一个子集作为在垂直于所述多个一维基于光学相位阵列的激光束形成及转向光子集成电路芯片的转向平面的方向上的光束尺寸控制的部件来形成及转向激光束,所述一组元件包括:
至少一个片外透镜;和
至少一个片上光栅。
8.根据权利要求7所述的利用二维扫描飞行时间激光雷达测距设备的用于三维映射的方法,其中所述至少一个片外透镜包括一组元件的子集,该组元件包括:
至少一个折射透镜;
至少一个渐变折射率透镜;
至少一个衍射光学元件;和
至少一个全息光学元件。
9.根据权利要求6所述的利用二维扫描飞行时间激光雷达测距设备的用于三维映射的方法,其中耦合到所述多个一维基于光学相位阵列的激光束形成及转向光子集成电路芯片中的光学信号从单个激光器产生。
10.根据权利要求6所述的利用二维扫描飞行时间激光雷达测距设备的用于三维映射的方法,其中耦合到所述多个一维基于光学相位阵列的激光束形成及转向光子集成电路芯片中的光学信号从多个激光器产生。
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