CN106544733A - A kind of crystal growth intelligent machine system based on open network - Google Patents
A kind of crystal growth intelligent machine system based on open network Download PDFInfo
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- CN106544733A CN106544733A CN201610908211.4A CN201610908211A CN106544733A CN 106544733 A CN106544733 A CN 106544733A CN 201610908211 A CN201610908211 A CN 201610908211A CN 106544733 A CN106544733 A CN 106544733A
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/16—Oxides
- C30B29/20—Aluminium oxides
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B17/00—Single-crystal growth onto a seed which remains in the melt during growth, e.g. Nacken-Kyropoulos method
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- Crystallography & Structural Chemistry (AREA)
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- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The present invention relates to a kind of crystal growth intelligent machine system based on open network, including：Industrial computer, obtains and shows technological parameter, operational order and crystal growing phase information；Technological Process Management module, receives and preserves many sets technological parameter；Power control module is according to current process state modulator heating power supply power；Melt interface real-time image information in melt vision measurement module collection crystal growing furnace；According to current process parameter, lifting motion-control module realizes that crystal growing process lifts the closed loop control of motor；Crystal weight sensing module obtains crystal weight；Cooling system detection module is controlled to the cooling water state of crystal growing process；Vacuum system control module is controlled to the vacuum of crystal growing furnace.The system is included as adapting to the specialist system of thermal field change based on cross-platform language design, and compared with prior art, the present invention is with efficiency high, calculating analytic function is strong, change adaptable, high reliability to thermal field.
Description
Technical field
The invention belongs to new material Control System for Crystal Growing field, more particularly, to a kind of crystalline substance based on open network
Bulk-growth intelligent machine system.
Background technology
It is as sapphire crystal has excellent optical property, mechanical performance, thermal property and chemical stability etc., wide
It is general to apply in civil areas such as optical system, window material, LED substrate material and intelligent watch, to sapphire on international market
The demand of crystal is also increasing.Sapphire crystal growth method mainly has czochralski method and kyropoulos etc. several.Wherein, kyropoulos
The best growing method of crystal quality is acknowledged as, particularly optical characteristics are substantially better than additive method.Kyropoulos and czochralski method
It is similar, it is that seed crystal is installed on lifting rod, the raw material (usually aluminium sesquioxide powder and biscuit) in tungsten and molybdenum crucible is used
It is resistively heated to more than fusing point, waits raw material all to melt, declines seed crystal and melt contacts (seeding) when melt flows are more steady,
Then melt is grown along seed crystal crystal orientation.Then, heating power is declined with certain gradient, while lifting rod is slowly lifted, makes crystalline substance
Body progressively grows.However, the low important original for always affecting its output increased of large size sapphire crystal growth yield rate
Cause.The low basic reason of yield rate is because that kyropoulos crystal growing furnace adopts resistance heating, and overall thermal field distribution is surrounding heat
Cold in the middle of top, melt produces boiling causes convective instability, and seeding operation difficulty is increased, big to technologist's experience dependency.
Along with long the production cycle, 80 feather weight crystal are come out of the stove from material to crystal and are generally required more than two weeks, as long as period has one
Secondary misoperation or equipment fault may result in whole stove crystal and scrap.Therefore, improve the automatization level of system, improve equipment
Reliability has become an inevitable choice for improving yield rate.
The operation of kyropoulos seeding generally requires the operation of experienced technologist's execute-in-place, crystal mass and seeding personnel
Level is closely related.This is also the major reason that production scale constantly cannot be expanded by kyropoulos growing method.
During seeding, technologist needs constantly to go to observe the streamline state of the thawing situation of seed crystal, melt interface by watch window
Etc., then rule of thumb judge that bath surface carries out seeding operation after reaching stable Convection states.This process is not unified
Standard, the micro-judgment of the technologist that places one's entire reliance upon.In order to find stable melt convection state, technologist needs constantly
Adjustment heating power, this process usually continue several hours, or even more than ten hour.Up to more than 2050 degree of in-furnace temperature,
Technologist observes BF's inner state by the watch window that quartz glass is isolated, it is easy to cause visual fatigue, it is right also to easily cause
The erroneous judgement of seeding state.
To solve that cloud seeding efficiency is low, subjectivity is strong, technologist's easy visual fatigue the problems such as, some insiders are
Jing proposes the method for carrying out automatic seeding using video.But from the point of view of applicable cases, effect is unsatisfactory, many enterprises install
Video detection system, but do not realize real automatic growth in batches.Main cause be between every stove heating for multiple times with
The change of thermal field afterwards can cause situation different, and seeding state image information is difficult to find that unified standard.For example, vaporization at high temperature
The influence degree of thing also can be different etc., and these factors easily cause the erroneous judgement to state to the impact being imaged, and then cause to give up
Product are produced.
The crystal growth control system of current many producers generally adopts and with industrial computer or embedded microprocessor system is
Core, connects the method for external signal and module to set up system by the board in industrial computer or 485 buses, generally with calculating
Machine is core, and information gathering and execution all pass through to insert that the board of industrial computer is completed or to pass through 485 buses complete with external module
Exchange into information.The function high concentration of these systems is in industrial computer, once industrial computer breaks down, it is possible to and cause production to stop
It is stagnant, the operation of crystal growing furnace can be directly affected, risk is larger.On the other hand, as heating furnace power is big, need with high-power
Power supply is powered, and is frequently accompanied by larger electromagnetic interference, and 485 buses require higher complex industrial scene this, no matter from reality
All seem substantially not enough for when property and reliability.Crystal growth cycles even more than 20 days typically for up to more than ten days, Ren Heshe
Standby failure is likely to cause the loss of the aspects such as the larger energy and manpower.Real need is by changing system structure, again
Place function is strengthening reliability, real-time and the intelligent level of equipment.
The content of the invention
The purpose of the present invention is exactly to provide a kind of based on open net to overcome the defect of above-mentioned prior art presence
The crystal growth intelligent machine system of network, strengthens reliability, improves growing efficiency, can preferably meet crystal growing furnace
The requirement of long-time no-failure operation.
The purpose of the present invention can be achieved through the following technical solutions：
A kind of crystal growth intelligent machine system based on open network, including：
Industrial computer, obtains technological parameter, operational order and crystal growing phase information, and shows that crystal growing phase is believed
Breath, real time execution parameter and real-time running state information；
Technological Process Management module, including PLC, are connected with industrial computer by industrial ethernet switch, are received and are preserved
Cover the technological parameter more, a set of technological parameter is selected as current process parameter according to the operational order；
Power control module, is connected with Technological Process Management module by industrial ethernet switch, according to described current
Process parameter control heating power supply power；
Melt vision measurement module, is connected with industrial computer by industrial ethernet switch, is melted in collection crystal growing furnace
Body interface real-time image information is uploaded to the industrial computer；
Lifting motion-control module, is connected with Technological Process Management module by industrial ethernet switch, according to described
Current process parameter realizes that crystal growing process lifts the closed loop control of motor；
Crystal weight sensing module, is connected with Technological Process Management module by fieldbus networks, obtains crystal weight；
Cooling system detection module, is connected with Technological Process Management module by fieldbus networks, according to described current
Technological parameter is controlled to the cooling water state of crystal growing process；
Vacuum system control module, is connected with Technological Process Management module by fieldbus networks, according to described current
Technological parameter is controlled to the vacuum of crystal growing furnace.
The industrial computer includes：
Man machine interface, shows crystal growing phase information, real time execution parameter and real-time running state information, and receives behaviour
Order；
Technological parameter setting unit, arranges and generates many set technological parameters；
Analysis expert unit, generates corresponding suggestion for operation information according to the crystal growing phase information, and is shown in
Man machine interface；
History data store unit, records all data of crystal growing process；
Operation in the industrial computer has the control software based on cross-platform QT Programming with Pascal Language.
The man machine interface includes that real time execution parameter display area, real-time running state information viewing area, melt image show
Show button and manual control button, the real time execution parameter includes heating parameters, crystal parameter, vacuum parameters, cooling water ginseng
Number and lifting kinematic parameter, the manual control button include that vacuum degree control button, lifting motor control button, heater are opened
Close button and temperature control burtons.
The man machine interface also includes warning message viewing area.
The industrial computer also includes：
Priority assignation authentication ' unit, realizes operator's rights management.
The industrial computer is connected with upper management module by ICP/IP protocol.
The crystal growing phase information includes crystal weight, 5 minutes rate of growth, 30 minutes rate of growth and melt interface realities
When image information.
The power control module includes Continental Europe table, and the Continental Europe table is connected with heater.
It is described lifting motion-control module realized by PROFINET I/O devices, including：
Lifting motor control unit, is manually or automatically controlled to lifting motor；
Information acquisition unit, capturing and coding device information, grating scale displacement data and electronic hand wheel information.
The cooling system detection module includes distributed I/O chip and many with what the distributed I/O chip was connected respectively
Individual sensor group, the plurality of sensor components cloth are arranged at the inlet and outlet of cooling duct, and the sensor group includes
Temperature sensor and flow transducer.
Compared with prior art, real-time and reliability of the present invention from system, proposes based on open network mould
The system structure of formula, has the advantages that：
(1) present invention not only includes industrial computer, also includes realizing the technique stream that communicates with industrial computer by EPA
It is thread management module, power control module, melt vision measurement module, lifting motion-control module, crystal weight sensing module, cold
But system detectio module, vacuum system control module etc. realize Technological Process Management, lifting motor motion control, power control respectively
The module of the Core Features such as system., by Core Feature distributed treatment, the effect of industrial computer is mainly in operational order, parameter for the present invention
Arrange, information (include melt state image information) shows, transmission, and by the management of technological process, the motion control of lifting motor
The Core Features such as system, the control of power are respectively allocated to the higher PLC of reliability or Continental Europe table carrys out complete independently.Even if industrial computer
Break down, system still can be run according to arrange parameter.The present invention not using industrial computer as unique core, but
Critical function is scattered in into multiple PLC or embedded system module, is greatly reduced systematic failure probability, real-time, reliability
Property and automaticity are improved significantly.
(2) industrial computer of the present invention is provided with man machine interface, can show crystal growth running status, with real-time it is good, can grasp
The property made is strong, friendly interface the features such as.
(3) industrial computer of the present invention is completed and Technological Process Management module, melt shape by EPA (PROFINET)
The information exchange of state vision measurement module and the communication of live other information sensing module and performing module, PROFINET are realized
Longitudinal direction communication from field level to management level is integrated, on the one hand, facilitate management level to obtain the data of field level, on the other hand, former
This has also extended into field level in the data safety sex chromosome mosaicism that management level are present.
(4) analysis expert unit is provided with industrial computer of the present invention, can be according to the practical operation situation of crystal growing furnace, reference
The expertise data of system storage, provide suggestion for operation, it is not necessary to be completely dependent on eye-observation, improve the efficiency of decision-making, avoid
The subjectivity of decision-making, improves the reliability of melt flows state recognition.
(5) control software of industrial computer operation of the present invention is designed using cross-platform language QT, and transplantability is good, modularity
Degree is high, can run on many operating platforms such as Windows, Linux.
(6) intelligent machine system network architecture efficiency high proposed by the present invention, calculate that analytic function is strong, reliability is high, can
Preferably to meet the requirement of crystal growing furnace long-time no-failure operation, changed according to service data, except with traditional
Outside operational factor history curve, the display function of data, can also be by calculating the variation tendency for providing key parameter；Can to having
The parameter over range phenomenon that can occur carries out early warning.
Description of the drawings
Fig. 1 is the structural representation of the present invention；
Fig. 2 is the schematic diagram of industrial computer man machine interface of the present invention；
Fig. 3 is melt flows schematic diagram.
Specific embodiment
The present invention is described in detail with specific embodiment below in conjunction with the accompanying drawings.The present embodiment is with technical solution of the present invention
Premised on implemented, give detailed embodiment and specific operating process, but protection scope of the present invention be not limited to
Following embodiments.
The present embodiment provides a kind of crystal growth intelligent machine system based on open network, for crystal growth mistake
Cheng Jinhang Based Intelligent Controls, crystal growth system include crystal growing furnace, and crystal growing furnace includes crystal growing furnace seed rod, left and right
Electrode, mechanical pump, diffusion pump, front step valve, valve etc. is taken out in advance.As shown in figure 1, the crystal growth intelligent machine system bag of the present embodiment
Include industrial computer 2, industrial ethernet switch 3, Technological Process Management module 4, power control module 5, melt vision measurement module
6th, motion-control module 7, crystal weight sensing module 8, cooling system detection module 9 and vacuum system control module 10 are lifted,
The system adopts distributed processing mode, industrial computer 2 to realize that operational order, parameter setting, information (are believed comprising melt state image
Breath) display and transmission, Technological Process Management module 4 realizes the management of technological process, and lifting motion-control module 7 realizes lifting
The motor control of motor, power control module 5 realize the control of power, cooling system detection module 9 and vacuum system control mould
Block 10 realizes the control of cooling system, vacuum system respectively.
Industrial computer 2 complete operational control, information gathering show, three big task of data communication, for obtain technological parameter, behaviour
Order and crystal growing phase information, and show crystal growing phase information, real time execution parameter and real-time running state letter
Breath.Operator arranges run parameter in touch display screen or clicks on button and assigns operational order, and is sent out by Ethernet
It is sent to the Technological Process Management module 3 of field network.Industrial computer 2 includes man machine interface, technological parameter setting unit, analysis expert
Unit and history data store unit, wherein, man machine interface is used to show crystal growing phase information, real time execution parameter and reality
When running state information, and receive operational order；Technological parameter setting unit is used to arranging and generating many set technological parameters；Expert
Analytic unit is for generating corresponding suggestion for operation information according to crystal growing phase information, and is shown in man machine interface；History
Data storage cell is used for all data for recording crystal growing process.
As shown in Fig. 2 man machine interface includes real time execution parameter display area, real-time running state information viewing area, melt
Image the Show Button and manual control button, real time execution parameter include heating parameters, crystal parameter, vacuum parameters, cooling water
Parameter and lifting kinematic parameter, manual control button include vacuum degree control button, lifting motor control button, heater button
Button and temperature control burtons.The main interface of man machine interface only shows operational factor and status information, does not carry out command operation, with
Prevent the generation of maloperation.
In another embodiment of the present invention, man machine interface also includes warning message viewing area.
The data communication of industrial computer includes two aspects of management level and live functional module, and industrial computer is by based on TCP/IP
Ethernet to workshop (or factory) management module 1 exchange information (operational factor, order and image information etc.)；Meanwhile, Xiang Tong
Cross EPA and technological parameter, operation order etc. are sent to into live functional module, receive the fortune that live functional module is uploaded
Line parameter, image information etc..
In another embodiment of the present invention, industrial computer 2 also includes：Priority assignation authentication ' unit, realizes operator's authority pipe
Reason.
Technological Process Management module 4 includes PLC, is connected with industrial computer 2 by industrial ethernet switch 3, receives and protects
Many set technological parameters are deposited, a set of technological parameter is selected as current process parameter according to operational order.Technological Process Management module 4
Receive the technique arrange parameter and operational order from industrial computer, technological parameter is saved in PLC module；Industrial computer sends tune
After with certain set technological parameter order, the module is automatically using called technological parameter as current operating parameter；Industrial computer sends fortune
After line command, management module is pressed the calculating (heating power, voltage etc.) of power supply operational factor and heating power supply operational factor is sent out
Give power control module 5；Additionally, Technological Process Management module is also performed from the out of service of industrial computer, operation suspension, is added
The orders such as hot device is opened, heater pass.
Power control module 5 is connected with Technological Process Management module 4 by industrial ethernet switch 3, according to current work
Skill state modulator heating power supply power.Power control module 5 is realized by Continental Europe table, is connect by EPA (PROFINET)
By the setting power parameter from Technological Process Management module 4 and order, and closed loop realizes the stability contorting to power.Continental Europe table
Electric current and voltage signal are received, current instantaneous power is calculated.When Continental Europe table receives the power that Technological Process Management module 4 is sent
After parameter, output is adjusted to power settings by the control algolithm in power control module 5.So, even if industry control
Machine 2 and Technological Process Management module 4 break down, and Continental Europe table can also keep the performance number of failure previous moment, will not be right
Crystal production is impacted.
Melt vision measurement module 6 is connected with industrial computer 2 by industrial ethernet switch 3, in collection crystal growing furnace
Melt interface real-time image information is uploaded to industrial computer.Industrial computer is strengthened to image texture using image processing algorithm, is made
Show in display after image sharpening and suggestion for operation is provided by expert analyzing system；After the completion of each stove crystal growth,
Technologist changes empirical parameter according to the practical situation of crystal, is saved in expert system database.
Lifting motion-control module 7 be connected with Technological Process Management module 4 by industrial ethernet switch 3, according to ought
Front technological parameter realizes that crystal growing process lifts the closed loop control of motor.Lifting motion-control module 7 is by independent PROFINET
I/O device realization, exchanges information with Technological Process Management module 4 by EPA network.Lifting motion-control module is comprising right
It is brilliant rise, crystalline substance turns the control of servomotor and the collection of encoder information, the collection of grating scale displacement data, it is brilliant rise, crystalline substance change hands it is dynamic,
Automatically switch, the collection of electronic hand wheel information.The motion of brilliant lifting motor is divided into automatically and manually both of which, is opened by switching
Close and select；By electronic hand wheel controlling the displacement of grating scale during manual mode.After the completion of feeding every time, need using electricity
Sub- handwheel moves to initial position grating scale and pattern displacement is reset.
Crystal weight sensing module 8 is connected with Technological Process Management module by fieldbus networks, obtains crystal weight.
Crystal weight sensing module 8 is installed on shift mechanism top, by the acquisition of weight information can calculate 5 minutes rate of growth,
30 minutes rate of growth.The speed of the speed of growth is judged by rate of growth information and whether pot is glued.
Cooling system detection module 9 is connected with Technological Process Management module by fieldbus networks, according to current process
Parameter is controlled to the cooling water state of crystal growing process.Cooling system detection module includes distributed I/O chip and difference
The multiple sensor groups being connected with distributed I/O chip, multiple sensor components cloth are arranged at the inlet and outlet of cooling duct
Place, sensor group include temperature sensor and flow transducer.Crystal growth is very sensitive to the temperature and flow of cooling water.This
Inlet and outlet of the system in cooling ducts such as left and right electrode, left and right body of heater and seed rods needs mounting temperature sensor and stream
Quantity sensor, to control the amount of cooling water of each passage.Leaving water temperature is too high to often mean that cooling effect difference or cooling duct blocking,
Discharge and import and export water temperature difference can complete to take away cooling water the calculating of heat and the impact to crystal growth.Due to crystalline substance
Bulk melting point is higher, and power supply heating power is big, and body of heater surrounding enviroment electromagnetic interference is larger, transmits temperature and flow using field network
Signal, disturbs little, speed fast.
Vacuum system control module 10 is connected with Technological Process Management module by fieldbus networks, according to current process
Parameter is controlled to the vacuum of crystal growing furnace.Vacuum system control module 10 is completed to mechanical pump, takes out valve, prime in advance
The control of valve, high threshold and diffusion pump, and using the measurement of vacuum gauge and ionization gauge vacuum values.During crystal stove heat in stove
Vacuum have to be lower than certain value, and otherwise electrode can be oxidized.The control of vacuum system has manually and automatically both of which.
Operation in industrial computer of the present invention has the control software based on cross-platform QT Programming with Pascal Language, can be in multiple operations
Under system run, complete process programming, parameter input, order input, operation information shows, melt state image procossing with show
Show, expert analyzing system etc., it is specific as follows：
1. the display of operational factor
Operational factor is shown by functional areas in display screen, is split with lines by the system.Heating parameters area includes heating
Power, heating voltage, heated current, heater impedance；Crystal weight parameter display area comprising crystal weight, 5 minutes rate of growth,
30 minutes rate of growth；Vacuum parameters viewing area includes coarse vacuum value, high vacuum values, diffusion pump electric current, wherein the switch shape of pump valve
State is shown by pattern mode information；Cooling water parameter viewing area, comprising flow everywhere and out temperature；Lifting motion is aobvious
Show that area includes brilliant lifting speed, brilliant rotary speed and the displacement of brilliant liter.These operation information zone bits are shown in main interface.
2. the display of running status
Running status shows that the running status comprising network and heater button state, brilliant liter, crystalline substance turn servomotor operation
State etc.；Network operation state is shown by network structure, is represented with color that connection is normal to show green, and connection disconnects
Show Lycoperdon polymorphum Vitt；Heater and brilliant liter, brilliant rotating motor show that with image heating is opened electric furnace heating wire and shows red, and pass shows Lycoperdon polymorphum Vitt；It is brilliant to rise
Drive correspondence motor and show green, close and show Lycoperdon polymorphum Vitt.State is distinguished with color can allow shop personnel to see with being apparent from
The running status of equipment.
3. the Real-time image display of melt state
In the seeding stage of kyropoulos sapphire crystal growth, the display in real time of melt state is particularly critical.Due to seed crystal
Position belongs to cold spot, and surrounding and bottom temp are higher, causes liquid level temperature fluctuation present in the form of liquid fluid line.Lifting
Electric rotating machine can present more obvious liquid fluid line with 5 turns per the speed electric rotating machine for dividing.Liquid stream is made by image enhancement technique
Line and seed crystal profile are apparent；" melt image " button is pressed in crystal growth interface and will eject the display interface of melt image,
Such as Fig. 3.
The expert analyzing system that industrial computer is included according to the image and seed crystal image of liquid fluid line over time, using mould
Formula recognition principle can identify liquid level temperature and fluctuation situation.May determine that according to default experts database system and reasonably draw
The brilliant moment.The image of sample area in stove is not only shown by the program that QT writes, fluid curl, fluctuation journey can be also calculated
The reference data information such as degree, seed crystal thawing degree；Suggestion for operation is provided according to specialist system.
4. manual control operation
Comprising the manual operation to vacuum measurement system valve, pump, the manual operation to lifting motor, to heater button
Manual operation can be completed by point touching screen the corresponding button.When brilliant liter lifts automatic slow running, speed is limited
In -20mm/ hours～20mm/ hours, to prevent brilliant lifting speed, too fast to cause seed rod to be pushed up disconnected；Brilliant rotary speed is restricted to-
20 revs/min～20 revs/min.Brilliant lifting speed minimum can arrange 0.1mm/ hours, and can carry out speed change crystalline substance lift operations；Brilliant rotating speed
Degree minimum can arrange 0.1 rev/min, and can carry out brilliant turn of operation of speed change.
5. temperature control
In power control module, Continental Europe table function is various, and operates button few, it is often necessary to operated by composite-key, right
A part of operator's difficulty is larger.The system is doing the touch button of multiple common functions on a display screen, realizes common work
One key operation of energy, makes operating process simple and clear.
6. the display of warning message
Another feature of the system is perfect warning function, and sound and light alarm and word glitter to report to the police and combine.Each warning
Packet can be all recorded containing time of fire alarming, abort situation, alarm times etc..On the one hand equipment ejects aobvious to fault message at the scene
Show, sound and light alarm, and workshop or factory level management module (1) are sent to by Ethernet.
7. process programming
The system carries out the setting and programming of technological parameter by talking with the man machine interface of frame, friendly interface, directly perceived, easily
With.6 sets of process datas can be recorded simultaneously, call any a set of operation as needed；
8. the record of historical data, analysis
The system realizes the survey of the scheduling controlling to whole system, sensor information by based on cross-platform QT language
Amount, collection of melt interface image information etc., can run under multiple operating systems.The record of historical data can be reviewed whole
Individual growth course, provides foundation to analyze the problem in production process.Heating voltage, heated current, heating power, vacuum,
The data messages such as cooling water temperature, flow can be represented by intuitively geometrical curve information.According to different demands, can
The calibration curve information (for example show for 12 hours, show for 24 hours etc.) of different time sections is called every time, allows past information weight
It is existing.
9. system administration
The system arranges authority to different operators, and operator needs first to be authenticated into before system, in regulation model
Enclose interior operation.The system can be preserved with document form to the data during production, and the staff to having permission can be led to
Cross USB flash disk and extract associated data files.
Claims (10)
1. a kind of crystal growth intelligent machine system based on open network, it is characterised in that include：
Industrial computer, obtains technological parameter, operational order and crystal growing phase information, and shows crystal growing phase information, reality
When operational factor and real-time running state information；
Technological Process Management module, including PLC, are connected with industrial computer by industrial ethernet switch, receive and preserve many sets
The technological parameter, selects a set of technological parameter as current process parameter according to the operational order；
Power control module, is connected with Technological Process Management module by industrial ethernet switch, according to the current process
State modulator heating power supply power；
Melt vision measurement module, is connected with industrial computer by industrial ethernet switch, melt circle in collection crystal growing furnace
Face real-time image information is uploaded to the industrial computer；
Lifting motion-control module, is connected with Technological Process Management module by industrial ethernet switch, according to described current
Technological parameter realizes that crystal growing process lifts the closed loop control of motor；
Crystal weight sensing module, is connected with Technological Process Management module by fieldbus networks, obtains crystal weight；
Cooling system detection module, is connected with Technological Process Management module by fieldbus networks, according to the current process
Parameter is controlled to the cooling water state of crystal growing process；
Vacuum system control module, is connected with Technological Process Management module by fieldbus networks, according to the current process
Parameter is controlled to the vacuum of crystal growing furnace.
2. the crystal growth intelligent machine system based on open network according to claim 1, it is characterised in that described
Industrial computer includes：
Man machine interface, shows crystal growing phase information, real time execution parameter and real-time running state information, and receives operation life
Order；
Technological parameter setting unit, arranges and generates many set technological parameters；
Analysis expert unit, generates corresponding suggestion for operation information according to the crystal growing phase information, and is shown in man-machine
Interface；
History data store unit, records all data of crystal growing process；
Operation in the industrial computer has the control software based on cross-platform QT Programming with Pascal Language.
3. the crystal growth intelligent machine system based on open network according to claim 2, it is characterised in that described
Man machine interface includes real time execution parameter display area, real-time running state information viewing area, melt image the Show Button and manually
Control knob, the real time execution parameter include heating parameters, crystal parameter, vacuum parameters, cooling water parameter and lifting motion
Parameter, the manual control button include vacuum system pump valve control knob, lifting motor control button, heater button button
And temperature control burtons.
4. the crystal growth intelligent machine system based on open network according to claim 3, it is characterised in that described
Man machine interface also includes warning message viewing area.
5. the crystal growth intelligent machine system based on open network according to claim 2, it is characterised in that described
Industrial computer also includes：
Priority assignation authentication ' unit, realizes operator's rights management.
6. the crystal growth intelligent machine system based on open network according to claim 1, it is characterised in that described
Industrial computer is connected with upper management module by ICP/IP protocol.
7. the crystal growth intelligent machine system based on open network according to claim 1, it is characterised in that described
Crystal growing phase information includes crystal weight, 5 minutes rate of growth, 30 minutes rate of growth and melt interface real-time image informations.
8. the crystal growth intelligent machine system based on open network according to claim 1, it is characterised in that described
Power control module includes Continental Europe table, and the Continental Europe table is connected with heating power supply.
9. the crystal growth intelligent machine system based on open network according to claim 1, it is characterised in that described
Lift motion-control module to be realized by PROFINET I/O devices, including：
Lifting motor control unit, is manually or automatically controlled to lifting motor；
Information acquisition unit, capturing and coding device information, grating scale displacement data and electronic hand wheel information.
10. the crystal growth intelligent machine system based on open network according to claim 1, it is characterised in that institute
Stating cooling system detection module includes distributed I/O chip and the multiple sensor groups being connected with the distributed I/O chip respectively,
The plurality of sensor components cloth is arranged at the inlet and outlet of cooling duct, the sensor group include temperature sensor and
Flow transducer.
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| CN110412916A (en) * | 2019-07-29 | 2019-11-05 | 北京点域科技有限公司 | A kind of automation crystal manufacture control method and device |
| CN113344439A (en) * | 2021-06-29 | 2021-09-03 | 蓝思系统集成有限公司 | Crystal growth control method, device and system and readable storage medium |
| CN114318533A (en) * | 2021-12-28 | 2022-04-12 | 安徽科瑞思创晶体材料有限责任公司 | Intelligent control system for crystal growth |
| CN114561702A (en) * | 2022-02-09 | 2022-05-31 | 新疆蓝晶新材料科技有限公司 | Management method and system of crystal growth furnace |
| CN117568940A (en) * | 2024-01-17 | 2024-02-20 | 天津伍嘉联创科技发展股份有限公司 | Continuous production method and system for crystals |
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