CN106482719B - 物理量检测装置及其制造方法、电子设备以及移动体 - Google Patents

物理量检测装置及其制造方法、电子设备以及移动体 Download PDF

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Publication number
CN106482719B
CN106482719B CN201610719483.XA CN201610719483A CN106482719B CN 106482719 B CN106482719 B CN 106482719B CN 201610719483 A CN201610719483 A CN 201610719483A CN 106482719 B CN106482719 B CN 106482719B
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pattern
detection
detection signal
signal pattern
adjustment
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CN106482719A (zh
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西泽竜太
山口啓一
中川啓史
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Seiko Epson Corp
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Seiko Epson Corp
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
    • G01C19/5614—Signal processing

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Signal Processing (AREA)
  • Gyroscopes (AREA)
CN201610719483.XA 2015-08-26 2016-08-24 物理量检测装置及其制造方法、电子设备以及移动体 Active CN106482719B (zh)

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CN202110318966.XA CN113048967B (zh) 2015-08-26 2016-08-24 物理量检测装置的制造方法

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JP2015166480 2015-08-26
JP2015-166480 2015-08-26
JP2016-117700 2016-06-14
JP2016117700A JP6733333B2 (ja) 2015-08-26 2016-06-14 物理量検出デバイス、物理量検出デバイスの製造方法、電子機器及び移動体

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Families Citing this family (3)

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Publication number Priority date Publication date Assignee Title
JP6950444B2 (ja) * 2017-10-18 2021-10-13 セイコーエプソン株式会社 物理量センサー、電子機器、および移動体
CN109269489A (zh) * 2018-11-02 2019-01-25 广西大学 一种谐振陀螺仪固有刚性轴的检测装置及方法
JP7283140B2 (ja) * 2019-03-11 2023-05-30 セイコーエプソン株式会社 振動デバイス、電子機器および移動体

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03276013A (ja) * 1990-03-27 1991-12-06 Matsushita Electric Ind Co Ltd 角速度センサ
CN103245339A (zh) * 2012-02-14 2013-08-14 精工爱普生株式会社 振动片、传感器单元以及电子设备
CN103363974A (zh) * 2012-03-28 2013-10-23 精工爱普生株式会社 振动片、陀螺仪传感器、电子设备和移动体
CN103363971A (zh) * 2012-03-29 2013-10-23 精工爱普生株式会社 振动片、传感器单元及电子设备
CN104101339A (zh) * 2013-04-05 2014-10-15 精工爱普生株式会社 振动元件、电子装置、电子设备以及移动体
CN104422789A (zh) * 2013-09-10 2015-03-18 精工爱普生株式会社 物理量传感器、振动装置、电子设备以及移动体
JP2015094716A (ja) * 2013-11-13 2015-05-18 セイコーエプソン株式会社 振動素子およびその製造方法、物理量検出装置、電子機器、並びに移動体
CN104702240A (zh) * 2013-12-05 2015-06-10 精工爱普生株式会社 振动元件、振子、振动装置、电子设备以及移动体

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4070365B2 (ja) * 1999-07-30 2008-04-02 日本碍子株式会社 振動型ジャイロスコープ
JP2008117040A (ja) * 2006-11-01 2008-05-22 Seiko Epson Corp 磁気インク文字が印刷された記録媒体の処理方法および小切手読取装置
WO2009037751A1 (ja) * 2007-09-19 2009-03-26 Murata Manufacturing Co., Ltd. 複合センサおよび加速度センサ
JP5368181B2 (ja) * 2009-06-12 2013-12-18 セイコーエプソン株式会社 物理量検出装置並びに物理量検出装置の制御方法、異常診断システム及び異常診断方法
JP5838749B2 (ja) * 2011-11-16 2016-01-06 セイコーエプソン株式会社 振動子、振動デバイスおよび電子機器

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03276013A (ja) * 1990-03-27 1991-12-06 Matsushita Electric Ind Co Ltd 角速度センサ
CN103245339A (zh) * 2012-02-14 2013-08-14 精工爱普生株式会社 振动片、传感器单元以及电子设备
CN103363974A (zh) * 2012-03-28 2013-10-23 精工爱普生株式会社 振动片、陀螺仪传感器、电子设备和移动体
CN103363971A (zh) * 2012-03-29 2013-10-23 精工爱普生株式会社 振动片、传感器单元及电子设备
CN104101339A (zh) * 2013-04-05 2014-10-15 精工爱普生株式会社 振动元件、电子装置、电子设备以及移动体
CN104422789A (zh) * 2013-09-10 2015-03-18 精工爱普生株式会社 物理量传感器、振动装置、电子设备以及移动体
JP2015094716A (ja) * 2013-11-13 2015-05-18 セイコーエプソン株式会社 振動素子およびその製造方法、物理量検出装置、電子機器、並びに移動体
CN104702240A (zh) * 2013-12-05 2015-06-10 精工爱普生株式会社 振动元件、振子、振动装置、电子设备以及移动体

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JP6733333B2 (ja) 2020-07-29
CN113048967A (zh) 2021-06-29
JP2017044686A (ja) 2017-03-02
CN113048967B (zh) 2023-11-28
CN106482719A (zh) 2017-03-08

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