CN106476151A - A kind of multi-line cutting machine cutting area mortar pressure gauge - Google Patents
A kind of multi-line cutting machine cutting area mortar pressure gauge Download PDFInfo
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- CN106476151A CN106476151A CN201510551455.7A CN201510551455A CN106476151A CN 106476151 A CN106476151 A CN 106476151A CN 201510551455 A CN201510551455 A CN 201510551455A CN 106476151 A CN106476151 A CN 106476151A
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Abstract
The invention discloses a kind of multi-line cutting machine cutting area mortar pressure gauge.In the multi-wire saw course of processing, the mortar thin film that cutting area is formed is a key factor of impact chipping qualities and efficiency.Because cutting area narrow it is difficult to detect cutting area mortar to form the pressure of thin layer thus the reasonable selection to technological parameter brings difficulty, impact chipping qualities and efficiency.Described cutting area pressure gauge includes pressure sensing transmitter, intermediate mass, side crystal block, pressure-display device, sealing gasket, by the conduction hole of intermediate mass, the acquisition port of narrow and small cutting area and pressure sensing transmitter is formed the UNICOM region of a mortar thus realizing the measurement of pressure.Present invention achieves the measurement of cutting area mortar pressure, quantifier elimination cutting parameter and cutting area mortar pressure dependence can be determined, to raising chipping qualities, working (machining) efficiency, there is larger practical significance.
Description
Technical field
The present invention relates to a kind of multi-line cutting machine cutting area mortar pressure gauge, for measuring the pressure of the cutting mortar formation thin film of narrow and small cutting area in the free abrasive multi-wire saw course of processing, belong to quasiconductor hard brittle material slice processing field.
Background technology
IC chip, solar battery sheet and light emitting diode etc. are required for for the very high crystalline material of hardness thinly slicing shape, and the requirement of dimensional accuracy and surface figure accuracy is very high.Because crystalline material has the characteristics that hardness height, fragility are big, slice processing difficulty is big.Multi-wire cutting technology be fast-developing in recent years get up a kind of hard brittle material advanced slicing technology, be widely used in monocrystal silicon, polysilicon and sapphire slice processing.Multi-line cutting machine section principle is to form the gauze of parallel distance by the steel wire being wrapped on guide wheel, gauze high-speed motion is driven during guide wheel high-speed rotation, square mortar spray pipe sprays mortar on the net online, the saw working bench being simultaneously fixed with crystal ingot makees feed motion towards gauze, mortar is brought into cutting area and crystal ingot is ground process by the steel wire of motion, and crystal ingot is progressively cut into the thin slice of hundreds of thousands of simultaneously.Multi-line cutting machine with its high efficiency high, material deterioration inside is few, be widely used in crystalline material slice processing in high precision.
In the multi-wire saw course of processing, cutting area is the narrow slit of 0.15-0.4 millimeter, and in cutting area, cutting mortar forms thin film between steel wire and workpiece, and the pressure of thin film directly influences efficiency and the quality of cutting.Because cutting area is narrow, traditional sensor is difficult to detect the pressure condition of cutting area.Some research workers are analyzed to pressure by simulation software.But, the actual value of pressure does not also have experimental provision can qualitatively measure.The pressure how measuring cutting area mortar during multi-wire saw becomes a difficult problem.This difficult problem, one is the exploration constraining cutting mechanism, and two is the guidance that parameter adjustment lacks theory during actual cutting processing, makes cutting technique unstable.
Content of the invention
The present invention is directed to the problem that in the multi-wire saw course of processing, cutting area narrow mortar pressure is difficult to effectively measure, there is provided a kind of multi-line cutting machine cutting area mortar pressure gauge.
Realize purpose of the present invention technical scheme as follows：
A kind of multi-line cutting machine cutting area mortar pressure gauge, it is structurally characterized in that, including pressure sensing transmitter；Described pressure sensing transmitter is threadedly secured on intermediate mass；Described intermediate mass is fixed on the crystal block of side by glue；Described side crystal block is fixed on cushion block by glue；Described cushion block is fixed on iron bar by glue；Described iron bar is fixed in crystal holder by glue；Described crystal holder is fixed on saw working bench.
It is arranged with conduction hole, its diameter is between 0.2-0.4 millimeter on described intermediate mass.
Equipped with sealing gasket between described intermediate mass and pressure sensing transmitter.
Described conduction hole UNICOM cutting area and the liquid acquisition mouth of pressure sensing transmitter front end, make cutting area mortar enter into the sensing device further of pressure sensing transmitter.
Described pressure sensing transmitter is connected with pressure-display device by electric wire.
The line space P of described conduction hole is equal to the spacing that steel wire on guide wheel forms gauze, and its column pitch is equal to 0.5-0.8 millimeter；Conduction hole distribution is in the range of the liquid acquisition mouth diameter d of pressure sensing transmitter front end；Conduction hole when mounted often row centrage face the steel wire on guide wheel.
Above the gauze that on described guide wheel, steel wire is formed, mortar spray pipe is had to spray mortar on the steel wire of motion.
A kind of multi-line cutting machine cutting area mortar pressure gauge that the present invention provides, by conduction hole is processed on intermediate mass, the mortar of cutting area is incorporated in the acquisition port of pressure sensing transmitter, according to pascal's principle, the pressure-sensing device in pressure sensing transmitter for the pressure transmission of mortar thin film in cutting narrow slit, thus realize the pressure measxurement to cutting area mortar.The size of cutting area mortar pressure and the distribution along cutting area, directly influence the quality of section.By the measurement to cutting area mortar pressure, the relation between cutting area pressure and cutting parameter can be obtained, such that it is able to be better understood by cutting area Material Removal Mechanism and for adjustment cutting parameter provide theories integration, with ensure cut into slices quality and working (machining) efficiency.
Brief description
Fig. 1 is apparatus of the present invention main sectional view；
Fig. 2 is apparatus of the present invention main sectional view cutting area enlarged drawing；
Fig. 3 is the left sectional view of apparatus of the present invention；
Fig. 4 is apparatus of the present invention left sectional view cutting area enlarged drawing；
Fig. 5 is intermediate mass front view；
Fig. 6 is intermediate mass upward view.
In in figure：
1- guide wheel；2- steel wire；3- mortar；4-- mortar spray pipe；5- pressure-display device；6- electric wire；7- side crystal block；8- intermediate mass；9- sealing gasket；10- pressure sensing transmitter；11- cushion block；12- glue；13- iron bar；14- crystal holder；15- saw working bench；16- conduction hole.
Specific embodiment
With reference to the accompanying drawings and examples, the present invention is described in detail.It is emphasized that following examples are merely to illustrate the application, but scope of the present application is not defined.This embodiment not all embodiments, all other embodiment that those of ordinary skill in the art are obtained under the premise of not making creative work for the section Example of the application, broadly fall into the scope of the application protection.Fig. 1 is apparatus of the present invention main sectional view,
Fig. 2 is apparatus of the present invention main sectional view cutting area enlarged drawing, and Fig. 3 is the left sectional view of apparatus of the present invention, and Fig. 4 is apparatus of the present invention left sectional view cutting area enlarged drawing, and Fig. 5 is intermediate mass front view, and Fig. 6 is intermediate mass upward view.
A kind of multi-line cutting machine cutting area mortar pressure gauge, including pressure sensing transmitter 10；Described pressure sensing transmitter 10 is threadedly secured on intermediate mass 8；Described intermediate mass 8 is fixed on side crystal block 7 by glue 12；Described side crystal block 7 is fixed on cushion block 11 by glue 12；Described cushion block 11 is fixed on iron bar 13 by glue 12；Described iron bar 13 is fixed in crystal holder 14 by glue；Described crystal holder 14 is fixed on saw working bench 15.
It is arranged with conduction hole 16, its diameter is between 0.2-0.4 millimeter on intermediate mass 8 as described in Fig. 5, Fig. 6.
As shown in Figures 1 and 2, equipped with sealing gasket 9 between described intermediate mass 8 and pressure sensing transmitter 10, the effect of sealing gasket 9 is to prevent from entering into the mortar 3 of the acquisition port of pressure sensing transmitter 10 to overflow from the junction of intermediate mass 8 and pressure sensing transmitter 10, makes the result of measurement inaccurate.
As shown in Figures 3 and 4, described conduction hole 16 UNICOM's cutting area and the liquid acquisition mouth of pressure sensing transmitter 10 front end, make cutting area mortar 3 enter into the sensing device further of pressure sensing transmitter 10, thus measuring the pressure of mortar.
As shown in figure 1, described pressure sensing transmitter 10 is connected with pressure-display device 5 by electric wire 6, pressure is shown.
As shown in Fig. 3, Fig. 4 and Fig. 6, the line space P of described conduction hole 16 is equal to spacing P that steel wire 2 on guide wheel 1 forms gauze, and its column pitch is equal to 0.5-0.8 millimeter.
As shown in Figure 1, Figure 2 and shown in Fig. 6, described conduction hole 16 distribution is in the range of pressure sensing transmitter 10 front end liquid acquisition mouth diameter d.
As shown in figure 1, described conduction hole 16 when mounted often row centerline hole face the steel wire 2 on guide wheel 1.
Below, in conjunction with apparatus of the present invention, introduce specific step taking certain type multi-line cutting machine as a example：
1）Get out workpiece：According to pressure sensing transmitter 10, guide wheel 1 slot pitch P, conduction hole 16 diameter processes intermediate mass 8 and side crystal block 7 it is ensured that the perpendicularity of glue 12 bonding plane and machined surface；
2）Erecting device：Sealing gasket 9 is placed on the screwed hole bottom of intermediate mass 8, pressure sensing transmitter 10 passes through to be threadedly secured on intermediate mass 8 thereon, sealing gasket 9 is compressed simultaneously, intermediate mass 8 is fixed between side crystal block 7 with glue 12, and the cushion block 11 that bonds, bond iron bar 13, connect pressure-display device 5 with electric wire 6, it is fixed in crystal holder 14, it is ensured that the perpendicularity of the row centrage of conduction hole 16 and crystal holder 14 center line during bonding；
3）Cutting area pressure data gathers：Crystal holder 14 is fixed on saw working bench 15, notice that the row centrage ensureing conduction hole 16 faces the cutting steel wire 2 on guide wheel 1, set cutting parameter, the rotation of guide wheel 1 drives steel wire 2 to move, mortar spray pipe 4 sprays mortar 3 to gauze, to lower feeding, with the change of cutting condition, pressure-display device 5 shows the pressure of the mortar 3 of cutting area to saw working bench 15.
A kind of present invention multi-line cutting machine cutting area mortar pressure gauge, described pressure sensing transmitter can spread silicon piezoresistance type pressure transmitter using Danfoss MBS1900 pressure transmitter or BP801, and measurement range is 0-1Mpa.Above in conjunction with accompanying drawing, embodiments of the present invention are described in detail, but the present invention has been not limited to above-mentioned embodiment, those of ordinary skill in the art has made many variations on the premise of can also be without departing from present inventive concept after the content understanding such scheme.
Claims (8)
1. a kind of multi-line cutting machine cutting area mortar pressure gauge, is characterized in that, including pressure sensing transmitter（10）；Described pressure sensing transmitter（10）It is threadedly secured to intermediate mass（8）On；Described intermediate mass（8）By glue（12）It is fixed on side crystal block（7）On；Described side crystal block（7）By glue（12）It is fixed on cushion block（11）On；Described cushion block（11）By glue（12）It is fixed on iron bar（13）On；Described iron bar（13）Crystal holder is fixed on by glue（14）On；Described crystal holder（14）It is fixed to saw working bench（15）On.
2. a kind of multi-line cutting machine cutting area mortar pressure gauge according to claim 1 is it is characterised in that described intermediate mass（8）On be arranged with conduction hole（16）, its diameter is between 0.2-0.4 millimeter.
3. a kind of multi-line cutting machine cutting area mortar pressure gauge according to claim 1 is it is characterised in that described intermediate mass（8）With pressure sensing transmitter（10）Between equipped with sealing gasket（9）.
4. a kind of multi-line cutting machine cutting area mortar pressure gauge according to claim 1 is it is characterised in that described conduction hole（16）UNICOM's cutting area and pressure sensing transmitter（10）The liquid acquisition mouth of front end, makes cutting area mortar（3）Enter into pressure sensing transmitter（10）Sensing device further.
5. a kind of multi-line cutting machine cutting area mortar pressure gauge according to claim 1 is it is characterised in that described pressure sensing transmitter（10）By electric wire（6）With pressure-display device（5）It is connected.
6. a kind of multi-line cutting machine cutting area mortar pressure gauge according to claim 2 is it is characterised in that described conduction hole（16）Line space P be equal to guide wheel（1）Upper steel wire（2）Form the spacing of gauze, its column pitch is equal to 0.5-0.8 millimeter.
7. a kind of multi-line cutting machine cutting area mortar pressure gauge according to claim 2 is it is characterised in that described conduction hole（16）Distribution is in pressure sensing transmitter（10）In the range of the liquid acquisition mouth diameter d of front end.
8. a kind of multi-line cutting machine cutting area mortar pressure gauge according to claim 2 is it is characterised in that described conduction hole（16）Often row centerline hole faces guide wheel when mounted（1）On steel wire（2）.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201510551455.7A CN106476151B (en) | 2015-09-02 | 2015-09-02 | A kind of multi-line cutting machine cutting area mortar device for pressure measurement |
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| CN201510551455.7A CN106476151B (en) | 2015-09-02 | 2015-09-02 | A kind of multi-line cutting machine cutting area mortar device for pressure measurement |
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| CN106476151A true CN106476151A (en) | 2017-03-08 |
| CN106476151B CN106476151B (en) | 2018-09-21 |
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Citations (7)
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|---|---|---|---|---|
| RU2149093C1 (en) * | 1999-03-29 | 2000-05-20 | Орловский государственный технический университет | Method of controlling glazing of grinding wheel peripheral surface |
| CN201960673U (en) * | 2010-12-06 | 2011-09-07 | 浙江芯能光伏科技有限公司 | Loading mechanism of crystal silicon wafer multi-wire cutting machine |
| CN201970408U (en) * | 2010-11-25 | 2011-09-14 | 浙江昱辉阳光能源有限公司 | Cutting clamp for crystal silicon block |
| CN202517372U (en) * | 2012-04-09 | 2012-11-07 | 上海理工大学 | Grinding fluid dynamic pressure measuring device for plane grinding area |
| CN203210171U (en) * | 2013-04-16 | 2013-09-25 | 河南富耐克超硬材料股份有限公司 | Double-surface lapping machine |
| CN103341919A (en) * | 2013-07-29 | 2013-10-09 | 山东大海新能源发展有限公司 | Pretreatment process capable of increasing slicing rate of polycrystalline silicon rod |
| CN203401616U (en) * | 2013-07-16 | 2014-01-22 | 江西旭阳雷迪高科技股份有限公司 | Device for reducing broken edges of crystal silicon wafer |
-
2015
- 2015-09-02 CN CN201510551455.7A patent/CN106476151B/en not_active Expired - Fee Related
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| RU2149093C1 (en) * | 1999-03-29 | 2000-05-20 | Орловский государственный технический университет | Method of controlling glazing of grinding wheel peripheral surface |
| CN201970408U (en) * | 2010-11-25 | 2011-09-14 | 浙江昱辉阳光能源有限公司 | Cutting clamp for crystal silicon block |
| CN201960673U (en) * | 2010-12-06 | 2011-09-07 | 浙江芯能光伏科技有限公司 | Loading mechanism of crystal silicon wafer multi-wire cutting machine |
| CN202517372U (en) * | 2012-04-09 | 2012-11-07 | 上海理工大学 | Grinding fluid dynamic pressure measuring device for plane grinding area |
| CN203210171U (en) * | 2013-04-16 | 2013-09-25 | 河南富耐克超硬材料股份有限公司 | Double-surface lapping machine |
| CN203401616U (en) * | 2013-07-16 | 2014-01-22 | 江西旭阳雷迪高科技股份有限公司 | Device for reducing broken edges of crystal silicon wafer |
| CN103341919A (en) * | 2013-07-29 | 2013-10-09 | 山东大海新能源发展有限公司 | Pretreatment process capable of increasing slicing rate of polycrystalline silicon rod |
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