CN106461385B - 用于物体几何测量的装置和方法 - Google Patents
用于物体几何测量的装置和方法 Download PDFInfo
- Publication number
- CN106461385B CN106461385B CN201580026472.7A CN201580026472A CN106461385B CN 106461385 B CN106461385 B CN 106461385B CN 201580026472 A CN201580026472 A CN 201580026472A CN 106461385 B CN106461385 B CN 106461385B
- Authority
- CN
- China
- Prior art keywords
- distance
- support
- reference body
- sensor
- bracket
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/16—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring distance of clearance between spaced objects
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/20—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring contours or curvatures, e.g. determining profile
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102014007201.0 | 2014-05-19 | ||
| DE102014007201.0A DE102014007201B4 (de) | 2014-05-19 | 2014-05-19 | Vorrichtung und Verfahren zur geometrischen Vermessung eines Objekts |
| PCT/EP2015/000986 WO2015180826A2 (de) | 2014-05-19 | 2015-05-13 | Vorrichtung und verfahren zur geometrischen vermessung eines objekts |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106461385A CN106461385A (zh) | 2017-02-22 |
| CN106461385B true CN106461385B (zh) | 2019-08-30 |
Family
ID=54140387
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201580026472.7A Expired - Fee Related CN106461385B (zh) | 2014-05-19 | 2015-05-13 | 用于物体几何测量的装置和方法 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US10371511B2 (enExample) |
| EP (1) | EP3146293B1 (enExample) |
| JP (2) | JP6370928B2 (enExample) |
| CN (1) | CN106461385B (enExample) |
| DE (1) | DE102014007201B4 (enExample) |
| WO (1) | WO2015180826A2 (enExample) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102014007201B4 (de) * | 2014-05-19 | 2016-03-10 | Luphos Gmbh | Vorrichtung und Verfahren zur geometrischen Vermessung eines Objekts |
| JP6769883B2 (ja) * | 2017-01-20 | 2020-10-14 | 株式会社日立ビルシステム | エレベーター用計測装置およびその計測方法 |
| EP3418681B1 (en) * | 2017-06-22 | 2020-06-17 | Hexagon Technology Center GmbH | Calibration of a triangulation sensor |
| CN109556880A (zh) * | 2017-09-27 | 2019-04-02 | 裕隆汽车制造股份有限公司 | 影像式车辆防撞模块的测试装置以及测试方法 |
| CN108120412B (zh) * | 2018-01-24 | 2023-08-22 | 三一汽车制造有限公司 | 间隙检测装置和机械设备 |
| EP3608626A1 (de) * | 2018-08-10 | 2020-02-12 | Taylor Hobson Limited | Vorrichtung und verfahren zur geometrischen vermessung eines objekts |
| DE102018129766A1 (de) * | 2018-11-26 | 2020-05-28 | Gom Gmbh | Vorrichtung und Verfahren für die Vermessung von Objekten |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6008901A (en) * | 1997-08-22 | 1999-12-28 | Canon Kabushiki Kaisha | Shape measuring heterodyne interferometer with multiplexed photodetector aaray or inclined probe head |
| JP2000266524A (ja) * | 1999-03-17 | 2000-09-29 | Canon Inc | 3次元形状測定機およびその測定方法 |
| CN101915554A (zh) * | 2009-03-11 | 2010-12-15 | 富士能株式会社 | 三维形状测量方法及装置 |
| CN103075963A (zh) * | 2013-01-09 | 2013-05-01 | 广州创特技术有限公司 | 一种室内定位系统和方法 |
| US20130308139A1 (en) * | 2011-02-11 | 2013-11-21 | Luphos Gmbh | Method and device for measuring surfaces in a highly precise manner |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3584151B2 (ja) * | 1997-08-22 | 2004-11-04 | キヤノン株式会社 | 面形状測定装置 |
| JPH11211427A (ja) | 1998-01-29 | 1999-08-06 | Fuji Xerox Co Ltd | 面形状測定装置 |
| US6072569A (en) | 1998-06-09 | 2000-06-06 | Eastman Kodak Company | Apparatus and a method for measurement of wedge in optical components |
| DE19827788C2 (de) | 1998-06-23 | 2003-08-28 | Dieter Dirksen | Vorrichtung und Verfahren zur dreidimensionalen Erfassung charakteristischer Messpunkte des Zahnbogens |
| JP2001165629A (ja) * | 1999-12-03 | 2001-06-22 | Ricoh Co Ltd | 形状測定装置及び形状測定方法 |
| EP1519144A1 (en) * | 2003-09-29 | 2005-03-30 | Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO | Free-form optical surface measuring apparatus and method |
| JP4520276B2 (ja) | 2004-10-26 | 2010-08-04 | オリンパス株式会社 | 測定用治具 |
| DE102004054876B3 (de) | 2004-11-12 | 2006-07-27 | Sirona Dental Systems Gmbh | Vermessungseinrichtung zur 3D-Vermessung von Zahnmodellen, Verschiebeplatte und Verfahren dazu |
| EP1992905A1 (en) * | 2007-05-16 | 2008-11-19 | Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO | Optical sensor with tilt error correction |
| JP5204527B2 (ja) * | 2008-03-28 | 2013-06-05 | 株式会社トプコン | 玉型形状測定装置 |
| JP5486379B2 (ja) * | 2009-10-01 | 2014-05-07 | キヤノン株式会社 | 面形状計測装置 |
| KR101422971B1 (ko) | 2010-12-17 | 2014-07-23 | 파나소닉 주식회사 | 표면 형상 측정 방법 및 표면 형상 측정 장치 |
| DE102012017015B4 (de) * | 2012-08-20 | 2015-03-19 | Luphos Gmbh | Verfahren und Vorrichtung zur hochpräzisen Vermessung von Oberflächen |
| DE102014007201B4 (de) * | 2014-05-19 | 2016-03-10 | Luphos Gmbh | Vorrichtung und Verfahren zur geometrischen Vermessung eines Objekts |
| DE102014007203A1 (de) * | 2014-05-19 | 2015-11-19 | Luphos Gmbh | Vorrichtung und Verfahren zur geometrischen Vermessung eines Objekts |
-
2014
- 2014-05-19 DE DE102014007201.0A patent/DE102014007201B4/de not_active Expired - Fee Related
-
2015
- 2015-05-13 EP EP15763487.4A patent/EP3146293B1/de not_active Not-in-force
- 2015-05-13 WO PCT/EP2015/000986 patent/WO2015180826A2/de not_active Ceased
- 2015-05-13 US US15/312,481 patent/US10371511B2/en active Active
- 2015-05-13 CN CN201580026472.7A patent/CN106461385B/zh not_active Expired - Fee Related
- 2015-05-13 JP JP2016568807A patent/JP6370928B2/ja active Active
-
2018
- 2018-07-11 JP JP2018131679A patent/JP2018194555A/ja active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6008901A (en) * | 1997-08-22 | 1999-12-28 | Canon Kabushiki Kaisha | Shape measuring heterodyne interferometer with multiplexed photodetector aaray or inclined probe head |
| JP2000266524A (ja) * | 1999-03-17 | 2000-09-29 | Canon Inc | 3次元形状測定機およびその測定方法 |
| CN101915554A (zh) * | 2009-03-11 | 2010-12-15 | 富士能株式会社 | 三维形状测量方法及装置 |
| US20130308139A1 (en) * | 2011-02-11 | 2013-11-21 | Luphos Gmbh | Method and device for measuring surfaces in a highly precise manner |
| CN103075963A (zh) * | 2013-01-09 | 2013-05-01 | 广州创特技术有限公司 | 一种室内定位系统和方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| EP3146293B1 (de) | 2018-12-05 |
| US10371511B2 (en) | 2019-08-06 |
| WO2015180826A3 (de) | 2016-03-03 |
| CN106461385A (zh) | 2017-02-22 |
| US20170089695A1 (en) | 2017-03-30 |
| JP2018194555A (ja) | 2018-12-06 |
| JP6370928B2 (ja) | 2018-08-08 |
| DE102014007201B4 (de) | 2016-03-10 |
| EP3146293A2 (de) | 2017-03-29 |
| WO2015180826A2 (de) | 2015-12-03 |
| DE102014007201A1 (de) | 2015-11-19 |
| JP2017519203A (ja) | 2017-07-13 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN106461385B (zh) | 用于物体几何测量的装置和方法 | |
| CN106461376B (zh) | 用于物体的几何测量的装置和方法 | |
| US9372079B1 (en) | Optical plate for calibration of coordinate measuring machines | |
| US20090326849A1 (en) | Hysteresis compensation in a coordinate measurement machine | |
| TWI623724B (zh) | Shape measuring device, structure manufacturing system, stage system, shape measuring method, structure manufacturing method, shape measuring program, and computer readable recording medium | |
| CN103968778A (zh) | 一种多激光器检测系统 | |
| JP2020071181A (ja) | 計測用x線ct装置 | |
| US20150330760A1 (en) | Location determination apparatus with an inertial measurement unit | |
| JP2008051696A (ja) | 光軸偏向型レーザ干渉計、その校正方法、補正方法、及び、測定方法 | |
| JP5535031B2 (ja) | レーザ光の光軸方向の測定方法、長さ測定システム、および位置決め精度の検査方法 | |
| JP2018021831A (ja) | 追尾式レーザ干渉計による位置決め機械の検査方法及び装置 | |
| CN108286950A (zh) | 一种反射镜面形的在线检测方法 | |
| JP5649926B2 (ja) | 表面形状測定装置及び表面形状測定方法 | |
| JP5290038B2 (ja) | 測定装置及び測定方法 | |
| JP2016191663A (ja) | 光学式センサーの校正方法、及び三次元座標測定機 | |
| JP2010169636A (ja) | 形状測定装置 | |
| CN112567198B (zh) | 用于物体的几何测量的装置和方法 | |
| CN113029614B (zh) | 高铁轮对测量机几何误差补偿方法及装置 | |
| US20240302159A1 (en) | Coordinate measuring machine and in-line measurement system | |
| JP2007327754A (ja) | 被加工物の真直度測定方法およびワークの平面研削方法 | |
| Qibo et al. | Four degree-of-freedom geometric error measurement system with common-path compensation for laser beam drift | |
| Laubach et al. | A Novel Form Measurement System for Precision Components Using Interferometric Sub-aperture Stitching | |
| JP5226602B2 (ja) | 三次元形状測定方法 | |
| JP6080389B2 (ja) | 形状測定装置 | |
| JP2016130648A (ja) | 測定方法及び測定装置 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20190830 Termination date: 20200513 |