CN106350780B - Reaction chamber and semiconductor processing equipment - Google Patents
Reaction chamber and semiconductor processing equipment Download PDFInfo
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- CN106350780B CN106350780B CN201510418680.3A CN201510418680A CN106350780B CN 106350780 B CN106350780 B CN 106350780B CN 201510418680 A CN201510418680 A CN 201510418680A CN 106350780 B CN106350780 B CN 106350780B
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Abstract
The present invention provides a kind of reaction chamber and semiconductor processing equipments.The reaction chamber includes thimble system, base systems and blocks disc system, and the reaction chamber, which can be realized, is monitored the position for blocking disk；The reaction chamber further includes weight sensor, the weight sensor, it is arranged in each thimble lower end, each weight sensor blocks whether disk is located at standard transmission position according to the gravity judgement that each weight sensor detects for detecting the gravity that corresponding thimble affords when blocking disk and being located on multiple thimbles.Reaction chamber and semiconductor processing equipment provided by the invention not only can be improved the accuracy that disc system is blocked in debugging, cause the contaminated risk of base-plates surface in cleaning process and coating processes so as to reduce；But also can be debugged to avoid beginning to speak, so as to save the time, improve debugging efficiency.
Description
Technical field
The invention belongs to microelectronic processing technique fields, and in particular to a kind of reaction chamber and semiconductor processing equipment.
Background technique
Physical vapour deposition (PVD) (Physical Vapor Deposition, hereinafter referred to as PVD) equipment is using than wide
For on the surface of the workpieces to be machined such as substrate deposition film equipment.PVD method include vacuum evaporation, sputter coating and
Arc-plasma plated film, also, up to the present, not only can be with deposited metal and alloy firm, but also can deposition
Close object, ceramics, semiconductor and thin polymer film etc..In addition, generally needing before PVD process progress to being exposed to big compression ring
In border perhaps deactivated a period of time target carry out cleaning process with get rid of the oxide formed on target material surface or other
Impurity, and after the workpiece to be machined for completing preset quantity, need to carry out coating work to the indoor other component of reaction chamber
Skill (that is, one layer of covering of deposition), to prevent the by-product deposited thereon from falling.In order to prevent in above-mentioned cleaning process and coating
The surface of pedestal of carrying workpiece to be machined is polluted in technical process, generally use the surface of blocking disk to the pedestal into
Row blocks.
Fig. 1 is the structural schematic diagram of the existing reaction chamber for having and blocking disk.Referring to Fig. 1, reaction chamber 10 includes
Pedestal 11, for drive pedestal 11 go up and down the first driving unit 12, at least three thimbles 13, for drive thimble 13 go up and down
Second driving unit 14 blocks the garage 16 of disk 15 and blocks disc system for placing.Wherein, pedestal 11 is arranged in reaction chamber
In 10, for carrying workpiece to be machined or blocking disk 15, it is provided on pedestal 11 through its upper and lower surface and with thimble 13 one by one
Corresponding through-hole, by thimble 13 in corresponding through-hole OQ t, it can be achieved that blocking disk 15 in thimble 13 and pedestal
Transmission between 11.Blocking disc system includes transferring arm 17, third driving unit 18 and four laser-correlation sensors 1~4,
In, transferring arm 17 blocks disk 15 for carrying, and the drive shaft 19 of third driving unit 18 is connected with transferring arm 17, to drive
The transferring arm 17 is rotated around the drive shaft 19, so that it is moved between home and transmission location；So-called home
Refer to that pre-set transferring arm 17 is safely located at the position in garage 16 (position where transferring arm 17 as shown in figure 1), institute
Meaning transmission location refers to that pre-set transferring arm 17 realizes the position that disk 15 is blocked with the transmission of pedestal 11 by thimble 13, specifically
Ground can be achieved transmission therebetween by the lifting of transferring arm 17 that thimble 13 is located relatively at transmission location and block disk 15, Yi Jitong
Crossing thimble 13 and 11 OQ t of pedestal can realize that disk 15 is blocked in transmission therebetween.It is embedded on the top cover and bottom wall in garage 16
There is observation window 20, each laser-correlation sensor includes receiving end and transmitting terminal, and receiving end and transmitting terminal are oppositely arranged on garage
The outside for the observation window 20 that 16 top covers and bottom wall embed, specifically, as shown in Fig. 2, laser-correlation sensor 1 and 2 is respectively set
It is being located at the both sides of edges of the transferring arm 17 of home and is leaning at the position of proximal edge, laser-correlation sensor 3 and 4 is set respectively
Set the both sides of edges that disk 15 is blocked on the transferring arm 17 for being located at home and at the position of proximal edge.Each laser-correlation
The working principle of sensor are as follows: receiving end is used to send laser beam to transmitting terminal, if receiving end receives swashing for transmitting terminal sending
Light beam, then the laser-correlation sensor does not issue signal, if receiving end does not receive the laser beam of transmitting terminal sending, the laser
Opposite type sensor issues signal.
The specific work process of the above-mentioned reaction chamber of detailed hereafter.Specifically, original state is to carry to block
The transferring arm 17 of disk 15 is located at home, and thimble 13 and pedestal are respectively positioned on default low level.It is needing to carry out cleaning process or painting
When coating process, comprising the following steps: step S10, third driving unit 18, which drives, carries the transferring arm 17 for blocking disk 15 rotation
To transmission location (that is, outbound), then the second driving unit 14 driving thimble 13 rises to a default high position, will be located at transmission position
The jack-up of disk 15 is blocked on the transferring arm 17 set, realizes that blocking disk 15 is transmitted to thimble 13 from transferring arm 17 at this time；Step S11,
Third driving unit 18 drives unloaded transferring arm 17 to rotate to home (that is, storage), also, works as laser-correlation sensor
1 sending signal and laser-correlation sensor 2 is not when issuing signal, then transferring arm 17 reaches home, and then the first driving is single
Member 12 drives pedestal 11 to rise to a default high position, and the disk 15 that blocks on thimble 13 is held up, and realizes block the transmission of disk 15 at this time
To pedestal 11, it can realize due to blocking disk 15 and block pedestal 11, can start to carry out cleaning process or coating processes.?
After cleaning process or coating processes are completed, comprising the following steps: step S20, the first driving unit 12 drive pedestal 11 to decline
It will block disk 15 to be located at the lower section of transmission location to default low level and be transferred to thimble 13, third driving unit 18 drives
Unloaded 17 outbound of transferring arm, at this point, the rotation of transferring arm 17 then second is driven to blocking 15 lower section of disk and being located at 11 top of pedestal
Moving cell 14 drives thimble 13 to drop to default low level, so that disk 15 is blocked in the picking-up of transferring arm 17, realize makes to block disk 15 at this time
It is transferred to transferring arm 17；Step S21, third driving unit 18, which drives, carries the transferring arm 17 for blocking disk 15 storage, works as laser
When opposite type sensor 1~3 issues signal and laser-correlation sensor 4 and do not issue signal, at this point, transferring arm 17 reaches security bit
It sets, third driving unit 18 stops driving, can start to carry out PVD process in the reaction chamber.
In practical applications, the cooperation of 2~3 people is often needed to block disc system to debug before technique, with determination
Standard transmission position, so-called standard transmission position refer to that blocking on transferring arm 17 can be complete when disk 15 is transmitted on pedestal 11
Block the transmission location of pedestal 11.Debugging process specifically: first need reaction chamber switching to atmospheric environment from vacuum, then open
Chamber, which is estimated carrying out naked eyes, blocks the current location of disk, and last relative standard's transmission location debugs current location, due to
The position for blocking disk is debugged in such a way that naked eyes are estimated, it is not only time-consuming therefore, it is necessary to begin to speak to debug repeatedly, but also can make
At the poor accuracy of debugging, base is not completely covered it is possible to causing to block disk 15 during cleaning process and coating processes
The upper surface of seat 11 also there is the risk that pedestal 11 is contaminated (for example, being coated with metal).
Summary of the invention
The present invention is directed at least solve one of the technical problems existing in the prior art, a kind of reaction chamber and half are proposed
Conductor process equipment, by mechanical calculating, accurately the position of disk in the chamber is blocked in monitoring, is positioned and is adjusted with indirect labor
Section, the accuracy of debugging can be improved in this way, cause base-plates surface in cleaning process and coating processes to not only can reduce
Contaminated risk；But also the number begun to speak can be reduced, the time is saved, debugging efficiency is improved.
One of in order to solve the above problem, the present invention provides a kind of reaction chambers, including thimble system, base systems and screening
Block plate system, the reaction chamber, which can be realized, is monitored the position for blocking disk；The reaction chamber further includes that weight passes
Sensor, the weight sensor, in each thimble lower end, each weight sensor is used to block disk positioned at multiple for setting
The gravity that corresponding thimble affords is detected when on the thimble, the gravity detected according to each weight sensor
Block whether disk is located at standard transmission position described in judgement.
Preferably, the reaction chamber further includes detection device, for detecting transferring arm or blocking on transferring arm
Whether disk is moved accurately to home.
Preferably, the detection device includes: light source, optical sensor and processor, wherein the light source is fixed on
Above the masking disk, for towards the transferring arm or blocking any fixed position transmitting optical signal of panel surface；The light
Sensor is learned, is electrically connected with the processor, the optical sensor is used to receive the table for blocking disk or the transferring arm
The optical signal of face reflection, and by the optical signal prosessing of reflection at being transmitted to the processor after electric signal；The processor, is used for
The transferring arm or the mobile message for blocking disk are obtained according to the electric signal, and according to the mobile message and are moved to
The standard mobile message of the home judges the transferring arm or described blocks whether disk is accurately moved to security bit
It sets.
Preferably, the processor, for blocking working as disk or the transferring arm according to mobile message judgement
Whether front position is moved to the corresponding home of the standard mobile message or home range, if so, described in determining
Transferring arm or the disk that blocks accurately are moved to home, if it is not, then determining the transferring arm or described to block disk not quasi-
Really it is moved to home.
Preferably, the mobile message of the transferring arm and standard mobile message include moving direction and moving distance.
Preferably, the reaction chamber further include: range sensor, for being detected when the pedestal is located at default low level
The distance between the range sensor and the pedestal；Described in whether being lower than according to pedestal upper surface described in the Distance Judgment
Transferring arm lower surface, if so, the driver drives the transferring arm to move between home and transmission location；If
It is no, the default low level is adjusted, so that being located at the pedestal its upper surface in the default low level is lower than the transferring arm
Lower surface.
Preferably, the reaction chamber further include: display, the weight sensor, the gravity for being detected
It is sent to the display；The processor is sent to for will obtain the transferring arm or the mobile message for blocking disk
The display；The display, for showing the gravity, the mobile message and the standard mobile message.
Preferably, fixation position of the light source direction close to the transferring arm or the motion track midpoint for blocking disk
Emit optical signal.
Preferably, the detection device further includes lens, and the lens are used for the transferring arm or described block dish cart
It retransmits after the optical signal convergence of face reflection to the optical sensor.
It is described the present invention also provides a kind of semiconductor processing equipment, including reaction chamber as another technical solution
Reaction chamber uses the reaction chamber of the above-mentioned offer of the present invention.
The invention has the following advantages:
Reaction chamber provided by the invention, by the way that weight sensor, each weight sensor is arranged in each thimble lower end
The gravity that corresponding thimble affords is detected when blocking disk and being located on multiple thimbles, is detected according to each weight sensor
To gravity judgement block whether disk is located at standard transmission position.It is hidden that is, the gravity that weight sensor detects can be used as judgement
Whether block plate is located at the foundation of standard transmission position, this with directlyed adopt in the prior art not according to any detection data naked eyes
Estimation carries out debugging and compares, and the accuracy of debugging can be improved, make to not only can reduce in cleaning process and coating processes
At the contaminated risk of base-plates surface；But also the number begun to speak can be reduced, the time is saved, debugging efficiency is improved.
Semiconductor processing equipment provided by the invention can not only be mentioned by using reaction chamber provided by the invention
The accuracy of disc system is blocked in height debugging, causes base-plates surface contaminated in cleaning process and coating processes so as to reduce
Risk；But also can be debugged to avoid beginning to speak, so as to save the time, improve debugging efficiency.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the existing reaction chamber for having and blocking disk；
Fig. 2 is that reaction chamber shown in FIG. 1 removes the top view after top cover；
Fig. 3 is the structural schematic diagram of reaction chamber provided in an embodiment of the present invention；
Fig. 4 is the work flow diagram for carrying out debugging using reaction chamber shown in Fig. 3 and blocking disc system；
Fig. 5 is the top view of reaction chamber shown in Fig. 3；
Fig. 6 is the state diagram shown on display；And
Fig. 7 is the work flow diagram for the position that disk is blocked in detection.
Specific embodiment
To make those skilled in the art more fully understand technical solution of the present invention, come with reference to the accompanying drawing to the present invention
The reaction chamber and semiconductor processing equipment of offer are described in detail.
Fig. 3 is the structural schematic diagram of reaction chamber provided in an embodiment of the present invention.Referring to Fig. 3, the embodiment of the present invention mentions
The reaction chamber 30 of confession, which can be realized, is monitored the position for blocking disk S, which includes thimble system, pedestal system
It unites, block disc system, weight sensor 36, range sensor 37, memory, display and detection device 38.Wherein, thimble system
System includes the bracket 32 of multiple thimbles 31 and carrying thimble 31, and base systems include for carrying the pedestal 33 for blocking disk S, pedestal
Be provided on 33 it is through its upper and lower surface and with the one-to-one through-hole of thimble 31；Disc system is blocked to include transferring arm 34 and drive
Dynamic device 35.Wherein, transferring arm 34 blocks disk S for carrying, and driver 35 is for driving transferring arm 34 in home and transmission
It is moved between position, that is, for driving transferring arm 34 to go out to be put in storage, storage refers to being moved to safety from transmission location driver 35
The process of position, outbound refer to the process that transmission location is moved to from home.Specifically, in the present embodiment, it drives
Device 35 is rotating driver, and rotating driver is for driving transferring arm 34 to rotate in the horizontal direction, so that it is in home
Moved between transmission location, by thimble 31 in corresponding through-hole OQ t come realize block disk S be located at pass
It is transmitted between the transferring arm 34 and pedestal 33 of defeated position, specific transmission process is similar with the prior art, and this will not be detailed here.
Weight sensor 36 is arranged between each 31 lower end of thimble and bracket 32, and each weight sensor 36 is for hiding
Block plate S detects the gravity that corresponding thimble 31 affords when being located on multiple thimbles 31, according to each weight sensor 36
The gravity judgement detected blocks whether disk is located at standard transmission position.
It, can be using gravity that weight sensor detects as sentencing from the foregoing, it will be observed that reaction chamber provided in an embodiment of the present invention
It is disconnected to block the foundation whether disk is located at standard transmission position, this with directlyed adopt in the prior art not according to any detection data
Naked eyes estimation carries out debugging and compares, and the accuracy of debugging can be improved, to not only can reduce in cleaning process and coating work
Skill causes the contaminated risk of base-plates surface；But also the number begun to speak can be reduced, the time is saved, debugging efficiency is improved.
Specifically, if judgement blocks disk and is not located at standard transmission position, the weight detected according to each weight sensor
Power adjustment blocks the current location of disk until for standard transmission position.
Be understood that, it is preferable that multiple thimbles 31 it is identical so that the gravity that weight sensor 36 detects when it is unloaded
Equal, this can avoid above-mentioned deterministic process, and to need to consider that each 31 difference of thimble causes each weight sensor to detect initial
The factor that value does not wait；Also, the top of multiple thimbles 31 should block disk on a horizontal plane steadily to support in zero load
S。
In this embodiment, it is preferred that the distribution mode of 31 opposite base 33 of thimble are as follows: the surrounded figure of multiple thimbles 33
Center and pedestal 33 center it is concentric.Block the center of gravity of disk S and the positional relationship at center are as follows: block center of gravity and the center of disk S
With one heart.At above-mentioned kind, according to the gravity that each weight sensor 36 detects, if each weight sensor 36 of judgement is examined
The gravity measured is equal or in default disparity range, then explanation blocks center of gravity (or center), the surrounded figure of thimble 31 of disk S
Center and pedestal 33 center three it is concentric, the center due to blocking the center disk S and pedestal 33 is optimal reality with one heart
It now blocks disk S to complete to block the situation of pedestal 33, therefore can of course determine that current transmission position is standard transmission position.It is so-called pre-
If disparity range refers to that the error of the settings such as the detection error previously according to weight sensor 36, the rigging error of thimble 31 allows
Range.
Wherein, range sensor 37 be used for when pedestal 33 is located at default low level detecting distance sensor 37 and pedestal 33 it
Between distance；Judge whether 22 upper surface of pedestal is lower than 34 lower surface of transferring arm according to this distance, if so, illustrating pedestal 33 not
It can stop the movement of transferring arm 34, therefore, driver 35 can drive transferring arm 34 (including current in home and transmission location
Transmission location and standard transmission position) between move；If it is not, then illustrate that pedestal 33 is located in the movement routine of transferring arm 34, base
The movement that seat 33 can stop transferring arm 34, therefore, driver 35 can not drive transferring arm 34 home and transmission location it
Between move, and be adjusted default low level so that be located at pedestal 33 in default low level its upper surface lower than under transferring arm 34
Surface.It is appreciated that the above-mentioned detection and deterministic process by range sensor 37 go out the mutual bolt being put in storage as disk S is blocked
Part, so as to improve the reliability and stability of debugging process；In addition, above-mentioned deterministic process not only can may be used also taking human as judgement
To be judged automatically using controller, is judged automatically according to controller, the automation of debugging process not only can be improved, from
And debug time can be saved, in particular, in the case where applying the other components such as the pedestal in base systems to replace or change
It more can further save debug time.Preferably, range sensor 37 includes infrared distance sensor.
In the present embodiment, specifically, the lower section of pedestal 33 is arranged in range sensor 37, as shown in figure 3, Distance-sensing
Device 37 is arranged in the bottom wall outer of reaction chamber 30, and range sensor 37 is used for the height h1 of detection pedestal 33, height h1 and
The thickness h 2 of pedestal calculates first height h=h1+h2 of 33 upper surface of pedestal for being located at default low level in reaction chamber 30, sentences
Whether first height of breaking h is less than second height H of 34 lower surface of transferring arm in reaction chamber 30, if so, driver 35
Driving transferring arm 34 moves between home and transmission location；If it is not, default low level is adjusted, so as to be located at pedestal 33 pre-
If its upper surface is lower than the lower surface of transferring arm 34 when low level.It is appreciated that above-mentioned first height h and the second height H should be
For same benchmark, the comparison of the two just can be carried out in this way, in the present embodiment, as shown in figure 3, the two is to react
On the basis of the bottom wall of chamber 30；In addition, in the present embodiment, since driver 35 is rotating driver, so that transferring arm 34 is only
It moves in the horizontal direction, therefore, the second height is constant.
Memory is for storing standard transmission position and/or default low level adjusted, in order to direct in technical process
Read application.
The gravity that weight sensor 36 is also used to be detected is sent to display (not shown), specifically, shows
Show that device includes host computer interface；Display is easy to implement debugging people for showing the gravity that each weight sensor 36 detects
The gravity that member's reading weight sensor 36 detects.
Application reaction chamber provided in an embodiment of the present invention is described in detail below with reference to Fig. 4 to debug the mistake for blocking disc system
Journey.Specifically, referring to Fig. 4, the following steps are included:
Step S1, driving pedestal 33 are located at default low level；
Step S2, range sensor 37 detect its height h1 between pedestal lower surface, and controller is according to height h1
The first height h is calculated with base thickness h2；
Step S3 judges the first height h whether less than the second height H, if so, S4 is thened follow the steps, if it is not, then executing step
Rapid S10；
Step S4, stores current preset low level, also, driver 35 drives to carry and blocks the transferring arm 34 of disk S to pre-
If transmission location, i.e. outbound；
Step S5, driving thimble 31 rise to a default high position in corresponding through-hole, will be located on transferring arm 34
Block disk S jack-up, each weight sensor 37 detects gravity and sends it to display；
Step S6, driving thimble 31 drop to default low level in corresponding through-hole, so as to block disk S transport to biography
It send on arm 34；
Step S7, commissioning staff judge whether gravity that each weight sensor 37 detects is equal or whether default
In disparity range, if so, S8 is entered step, if it is not, then entering step S9；
Step S8, the current location that disk S is blocked in memory storage is standard transmission position, also, the driving of driver 35 passes
It send arm 34 to home, that is, is put in storage, debugging is completed；
Step S9, commissioning staff drive transferring arm according to the gravity adjust drivers 35 that each weight sensor 37 detects
The position of 34 rotations, i.e. adjustment current transmission position, and return step S5；
Step 10, the difference in height for alarming and showing the first height h and the second height H is issued, commissioning staff is according to the height
Difference adjusts default low level, so as to be located at the lower surface that its upper surface in default low level of pedestal 33 is lower than transferring arm 34.
It is worth noting that above-mentioned debugging process is that disc system is blocked in reaction chamber debugging provided in an embodiment of the present invention
Exemplary citing, do not limit to the above process.
In addition, by step S1~S10 it can be seen that may be implemented to hide using reaction chamber provided in an embodiment of the present invention
The semi-automation of the debugging process of block plate system improves debugging efficiency and especially applies so as to save debug time
Chamber configures the reaction chamber often changed.
Detection device 38 is described in detail below with reference to Fig. 5 and Fig. 6.Detection device 38 is passed for detecting transferring arm 34 or being located at
It send and blocks whether disk S is accurately moved to home on arm 34.Specifically, in the present embodiment, detection device 38 includes
Light source, optical sensor and processor, wherein light source is fixed on and blocks above disk, for towards transferring arm 34 or blocking disk S
Any fixed position on surface emits optical signal, for example, such as the position P in Fig. 5；Optical sensor is electrically connected with processor, light
It learns sensor to be used to receive transferring arm 34 or the optical signal of the surface reflection of blocking disk S, and by the optical signal prosessing of reflection at electricity
Processor is transmitted to after signal；Processor is used to obtain transferring arm according to electric signal or blocks the mobile message of disk, and according to shifting
It moves information and is moved to the standard mobile message of home to judge transferring arm or block whether disk is accurately moved to safety
Position.Specifically, whether processor is moved to standard movement according to the current location that disk or transferring arm are blocked in mobile message judgement
The corresponding home of information or home range, if so, determining transferring arm or blocking disk to be accurately moved to security bit
It sets, if it is not, then determining transferring arm or blocking disk not to be moved to home accurately.
Wherein, the mobile message of transferring arm and standard mobile message include moving direction and moving distance, that is to say, that
Processor obtains one group of image according to the signal that optical sensor is sent, and is analyzed and processed the image to obtain movement side
To and moving distance.Specifically, processor is digital signal processor.
Since the setting position of above-mentioned light source and the direction of transmitting optical signal are fixed, transferring arm is under the driving of driver
It is horizontally moved, therefore, transferring arm or blocks disk facing light sources and move horizontally, thus moving direction that processor obtains and shifting
Dynamic distance is transferring arm or relative movement direction and the moving distance for blocking disk facing light sources.
In the present embodiment, processor is sent to display for will obtain transferring arm 34 or block the mobile message of disk S
Device；Display is also used to show the mobile message and standard mobile message.In the case, as shown in fig. 6, abscissa in figure
X is horizontal direction shown in Fig. 3, ordinate Y be in Fig. 3 vertical paper inwards and the direction vertical with abscissa X, origin position
O is that transferring arm goes out transferring arm when being put in storage or blocks disk thereon and position when light source just starts to occur relative displacement, display are used
The position of transferring arm 34 is shown in the moving direction and moving distance sent in real time according to processor, therefore, in transferring arm
Can show on display when 34 storage indicates that the cursor of 34 current location of transferring arm is moved from origin position O along motion track L；Separately
Outside, display be also used to mark the corresponding position of display standard mobile message (the stain position in such as Fig. 6 on motion track L) or
The corresponding position range of person (the corresponding position range on motion track L of abscissa X1~X2 in such as Fig. 6)；Judge present bit
Set the position for whether being moved to label display or position range.In this way, by observing whether cursor is moved to stain position or shifting
Move supreme state can determine whether accurately to be moved to home in position range.
Preferably, as shown in figure 5, the close transferring arm 34 of light source direction or the fixed bit at the midpoint motion track L for blocking disk S
Set P transmitting optical signal, when this is put in storage transferring arm 34 transferring arm 34 or block the relative movement distances of disk S facing light sources compared with
Greatly, that is, the moving range of the transferring arm 34 of detection device detection is larger, so that detection accuracy not only can be improved, but also can
To show position of the transferring arm 34 within the scope of bigger relative movement distance over the display, transferring arm can be also observed more
Large-scale position.
Preferably, it blocks and is formed with sags and crests on 34 surface disk S and/or transferring arm, sags and crests are used for reflected light signal.
Additionally preferably, detection device 38 further includes lens, and lens are used for transferring arm 34 or block disk S surface reflection
It retransmits after optical signal convergence to optical sensor, this can further enhance the transmission of optical signal, so as to further mention
High measurement accuracy.
It is appreciated that may be implemented whether detection transferring arm 34 is accurately moved to security bit using above-mentioned detection device 38
It sets, this compared with using the detection of four laser-correlation sensors in the prior art, four laser-correlation sensors in the prior art
Installation requirement are as follows: its laser emission path has to pass through close to the marginal position of disk or transferring arm is blocked, if driver rotates
The loosening of error and laser-correlation sensor be easy to cause and is not able to satisfy above-mentioned installation requirement, and based on the above-mentioned detection of the present invention
The working principle of device, it is low to the installation accuracy requirement of detection device, loosened in driver rotation error and sensor etc.
In the case of still be able to meet the requirements, so that the reliability and stability of detection device not only can be improved, but also can drop
Low installation difficulty and debugging difficulty, in addition, causing to tie with the laser-correlation sensor in the prior art using excessive simple function
Structure complexity is compared, and can simplify the structure of detection device.
Reaction chamber provided in an embodiment of the present invention can also realize monitoring by above-mentioned weight sensor and detection device
The position of disk S and transferring arm 34 are blocked, referring to Fig. 7, detecting that transferring arm 34 is accurately moved to safety in detection device 38
After position, according to the gravity that weight sensor 36 detects, whether the gravity for judging that weight sensor 36 detects changes,
If so, explanation is blocked disk S and is located on thimble 31, therefore, it can determine that transferring arm 34 is moved to home, and block S, disk
In on thimble 31, if it is not, then explanation is blocked disk S and is not located on thimble 31, therefore, the transferring arm for carrying and blocking disk S can determine that
34 are moved to home；And after detection device 38 detects that transferring arm 34 is not accurately moved to home, adjust
The driving transferring arm 34 of whole driver 35 is moved to the parameter preset of home.
It should be noted that driving transferring arm 34 in level although driver 35 is rotating driver in the present embodiment
It is rotated on direction, to be moved between home and transmission location；But the present invention is not limited thereto, in practical application
In, driver 35 can also use other driving devices, as long as can be realized transferring arm 34 home and transmission location it
Between it is mobile.
It should also be noted that, although the lower section of pedestal 33 is arranged in range sensor 37 in the present embodiment, to detect
The height of 33 lower surface of pedestal；But the present invention is not limited thereto, in practical applications, range sensor 37 can also be set
It sets in the top of pedestal 33, for the vertical distance between 33 upper surface of detecting distance sensor 37 and pedestal, it is vertical to compare this
Whether distance is greater than the vertical distance between 34 lower surface of transferring arm and range sensor 37, if so, the driving of driver 35 passes
Arm 34 is sent to move between home and transmission location；If it is not, default low level is adjusted, so as to be located at pedestal 33 in default low level
When its upper surface be lower than transferring arm 34 lower surface.
It is further to note that although in the present embodiment, detection device 38 is using the above structure；But it is of the invention
It is not limited thereto, in practical applications, the detection device of other structures can also be used, as long as can be realized detection transferring arm
Whether 34 be accurately moved to home, for example, detection device 38 can be using described in background of invention
Four emission sensors being arranged according to predetermined manner.
As another technical solution, the embodiment of the present invention also provides a kind of semiconductor processing equipment, including reaction chamber
Room, the reaction chamber that reaction chamber uses the above embodiment of the present invention to provide.
Specifically, semiconductor processing equipment includes Pvd equipment.
The accuracy that disc system is blocked in debugging not only can be improved in semiconductor processing equipment provided in an embodiment of the present invention,
The contaminated risk of base-plates surface is caused in cleaning process and coating processes so as to reduce；But also can to avoid begin to speak into
Row debugging improves debugging efficiency so as to save the time.
It is understood that the principle that embodiment of above is intended to be merely illustrative of the present and the exemplary implementation that uses
Mode, however the present invention is not limited thereto.For those skilled in the art, essence of the invention is not being departed from
In the case where mind and essence, various changes and modifications can be made therein, these variations and modifications are also considered as protection scope of the present invention.
Claims (10)
1. a kind of reaction chamber, which is characterized in that including thimble system, base systems and block disc system, the reaction chamber
It can be realized and the position for blocking disk is monitored；The thimble system includes multiple thimbles, multiple surrounded figures of thimble
The center of shape and the center of gravity for blocking disk when being located at standard transmission position are concentric；The reaction chamber further includes weight sensor,
The weight sensor, in each thimble lower end, each weight sensor is used to block disk positioned at multiple for setting
The gravity that corresponding thimble affords is detected when on the thimble, the gravity detected according to each weight sensor
Block whether disk is located at standard transmission position described in judgement.
2. reaction chamber according to claim 1, which is characterized in that the reaction chamber further includes detection device, is used for
Detection transferring arm blocks whether disk is moved accurately to home on transferring arm.
3. reaction chamber according to claim 2, which is characterized in that the detection device includes: light source, optical sensor
And processor, wherein
The light source, be fixed on it is described block above disk, for towards the transferring arm or blocking any fixed bit of panel surface
Set transmitting optical signal；
The optical sensor is electrically connected with the processor, and the optical sensor described blocks disk or described for receiving
The optical signal of the surface reflection of transferring arm, and by the optical signal prosessing of reflection at being transmitted to the processor after electric signal；
The processor, for obtaining the transferring arm or the mobile message for blocking disk according to the electric signal, and according to
The mobile message judges the transferring arm with the standard mobile message of the home is moved to or the disk that blocks is
It is no to be accurately moved to home.
4. reaction chamber according to claim 3, which is characterized in that the processor, for according to the mobile message
Whether the current location that disk or the transferring arm are blocked described in judgement is moved to the corresponding home of the standard mobile message
Or home range, if so, determining that the transferring arm or the disk that blocks accurately are moved to home, if it is not, then
Determine that the transferring arm or the disk that blocks are not moved to home accurately.
5. reaction chamber according to claim 3 or 4, which is characterized in that the mobile message and standard of the transferring arm move
Dynamic information includes moving direction and moving distance.
6. reaction chamber according to claim 1, which is characterized in that the reaction chamber further include: range sensor is used
In detected when the pedestal is located at default low level the range sensor between the pedestal at a distance from；
Whether it is lower than transferring arm lower surface according to pedestal upper surface described in the Distance Judgment, if so, described in driver driving
Transferring arm moves between home and transmission location；If it is not, the adjustment default low level, so that the pedestal is positioned at described
Its upper surface is lower than the lower surface of the transferring arm when default low level.
7. reaction chamber according to claim 3, which is characterized in that the reaction chamber further include: display,
The weight sensor, the gravity for being detected are sent to the display；
The processor is sent to the display for will obtain the transferring arm or the mobile message for blocking disk；
The display, for showing the gravity, the mobile message and the standard mobile message.
8. reaction chamber according to claim 3, which is characterized in that the light source is towards close to the transferring arm or described
Block the fixation position transmitting optical signal at the motion track midpoint of disk.
9. reaction chamber according to claim 3, which is characterized in that the detection device further includes lens, the lens
For will retransmit after the transferring arm or the optical signal convergence for blocking panel surface reflection to the optical sensor.
10. a kind of semiconductor processing equipment, including reaction chamber, which is characterized in that the reaction chamber uses claim 1-9
Reaction chamber described in any one.
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| CN108962709B (en) * | 2017-05-17 | 2020-07-17 | 北京北方华创微电子装备有限公司 | Magnetron sputtering cavity and tray position error detection method |
| CN109778147B (en) * | 2017-11-14 | 2021-05-07 | 北京北方华创微电子装备有限公司 | Reaction chamber and semiconductor processing equipment |
| CN110904424B (en) * | 2018-09-17 | 2022-01-07 | 北京北方华创微电子装备有限公司 | Bracket mechanism and reaction chamber |
| CN111986976B (en) * | 2019-05-22 | 2022-04-22 | 北京北方华创微电子装备有限公司 | Process chamber and semiconductor processing equipment |
| CN112063979B (en) * | 2019-06-11 | 2023-12-22 | 北京北方华创微电子装备有限公司 | Semiconductor processing device and related magnetron sputtering device |
| CN110923642B (en) * | 2019-11-11 | 2022-07-22 | 北京北方华创微电子装备有限公司 | Sputtering device |
| CN113451188A (en) * | 2021-06-25 | 2021-09-28 | 北京北方华创微电子装备有限公司 | Reaction chamber, semiconductor processing equipment and semiconductor processing method |
| CN113687764A (en) * | 2021-09-09 | 2021-11-23 | 合肥钛柯精密机械有限公司 | Semiconductor product processing machine and processing method |
| CN114959609B (en) * | 2022-05-25 | 2023-10-13 | 北京北方华创微电子装备有限公司 | Semiconductor process chamber and shielding disc monitoring method thereof |
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