CN104752262B - Block disc detector, detection method, reaction chamber and semiconductor processing equipment - Google Patents
Block disc detector, detection method, reaction chamber and semiconductor processing equipment Download PDFInfo
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- CN104752262B CN104752262B CN201310750296.4A CN201310750296A CN104752262B CN 104752262 B CN104752262 B CN 104752262B CN 201310750296 A CN201310750296 A CN 201310750296A CN 104752262 B CN104752262 B CN 104752262B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
Abstract
The present invention relates to disc detector, detection method, reaction chamber and semiconductor processing equipment is blocked, it includes the first detection components, the second detection components and control unit；First detection components include multiple first detection devices, and the distance between the position intersected with the first detection circuit and transparency window of disk are blocked in the detection of the first detection device；Second detection components include second detection device, the distance between the position intersected with the second detection circuit of second detection device detection support arm and transparency window；Compared with control unit is by the detection data of the first detection device default first normal data corresponding with first detection device, and by compared with the detection data of second detection device default second normal data corresponding with second detection device；And determine to block whether disk deviates home, and it is in normal place relative to disc transport apparatus is blocked.Deviate home and during relative to the normal place for blocking disc transport apparatus at it, it can be corrected in time.
Description
Technical field
The present invention relates to semiconductor equipment manufacturing field, and in particular, to one kind block disc detector, detection method,
Reaction chamber and semiconductor processing equipment.
Background technology
Physical vapour deposition (PVD)（Physical Vapor Deposition, hereinafter referred to as PVD）Equipment is widely used for pair
Workpiece to be machined carries out sputter deposition craft；Its detailed process is：In technical process, to the reaction chamber in vacuum state
Process gas is inside passed through, and it is plasma to be excited；Then by above-mentioned plasma bombardment target, make target molecule or
Atom departs from from target material surface, and deposits to being located on the workpiece to be machined of generated beneath, so as to be obtained on workpiece to be machined
Obtain required film.
In practical applications, after above-mentioned PVD equipment disables and enters air in a period of time or reaction chamber, on target
Oxide or other impurities can be produced.In the case, generally with removed by way of sputtering target material surface oxide and
Impurity, i.e.,：Process gas is passed through into reaction chamber, it is plasma to be excited；Then by plasma bombardment target,
Oxide and impurity is set to depart from from target material surface.
Fig. 1 is the structure diagram of the reaction chamber of existing PVD equipment.As shown in Figure 1, reaction chamber 100 includes carrying
Device 104, target 164, block disk 114, lifting drive 124 and transmitting device.Wherein, bogey 104 is arranged on reaction
Inside chamber 100, for carrying workpiece to be machined 112.Target 164 is arranged on the top of bogey 104, it is used to provide sputtering
Deposited in deposition process to the material on workpiece to be machined 112.Lifting drive 124 is arranged under reaction chamber 100
Side, the bottom wall of its drive shaft through reaction chamber 100 are connected with bogey 104, for driving bogey 104 in vertical side
To making elevating movement.Disk 114 is blocked to be used to be covered in bogey 104 when removing the oxide and impurity on 164 surface of target
On, covered, to prevent the oxide and impurity that depart from from 164 surface of target from falling on bogey 104, to bogey
104 pollute.Transmitting device includes support arm 118 and rotating driving device 126；Rotating driving device 126 is arranged on reaction chamber
The lower section of room 100, and the bottom wall of its drive shaft through reaction chamber 100 is extended to inside reaction chamber 100；Support arm 118 is used
Disk 114 is blocked in placing on the upper surface of which, its one end is fixedly connected with the drive shaft of rotating driving device 126；Driven in rotation
Under the driving of dynamic device 126, support arm 118 drives the disk 114 that blocks placed on it to be rotated by home to bogey 104
Top, and by the top of bogey 104 rotation to home；Wherein, home refers in reaction chamber 100 in level
Side is upwardly away from bogey 104, and does not influence sputtering sedimentation of workpiece to be machined 112 for being opposite on bogey 104 etc.
The position of technique.
In above-mentioned PVD equipment, reaction chamber 100 is equipped with sensor component 110, it is used to remove 164 table of target
In the oxide in face and the technique of impurity, detection support arm 118 and block disk 114 whether by the top of bogey 104 exactly
Home is reached, support arm 118 is prevented and block disk 114 not reach or deviateing home, to splashing for workpiece to be machined 112
Depositing operation is penetrated to impact.Specifically, as depicted in figs. 1 and 2, sensor component 110 includes three sensors（202、204
With 206）；Each sensor is included in corresponding transmitting terminal and receiving terminal on vertical direction, and the transmitting terminal and receiving terminal
It is respectively arranged at the top of transparency window 134 and the lower section of transparency window 136 opposite on reaction chamber 100.Also, sensor 202, sensing
Device 204 is set gradually along the center from bogey 104 to the direction for blocking center when disk 114 is located at home, and is passed
202 in the vertical direction of sensor is corresponding on the inside of edge when disk 114 is located at home with blocking, sensor 204 it is vertical just
Upwards with block it is corresponding on the outside of edge when disk 114 is located at home；206 in the vertical direction of sensor and support arm 118
On convex block 220 correspond to.
In above-mentioned PVD equipment, after the completion of the oxide and the technique of impurity for removing 164 surface of target, rotation driving
Device 126 drives support arm 118 and blocks disk 114 by 104 upper direction of bogey to home, meanwhile, each sensing
Device（202nd, 204 and 206）Transmitting terminal to receiving terminal launch laser beam.If block driving of the disk 114 in rotating driving device 126
Lower in-position 208, as shown in figure 3, the laser beam of 202 ＇ of the transmitting terminal transmittings of sensor 202 is blocked, disk 114 is stopped, its
202 〞 of receiving terminal can not be received, and 204 〞 of receiving terminal of sensor 204 can then receive swashing for 204 ＇ of its transmitting terminal transmittings
Light beam；In the case, sensor 202 and 204 sends signal to controller 190, and expression blocks disk 114 without departing from security bit
Put；If the in-position 222 under the driving of rotating driving device 126 of disk 114 is blocked, as shown in figure 3, the transmitting of sensor 202
Hold the laser beam disk 114 that is blocked that 204 ＇ of transmitting terminal of 202 ＇ and sensor 204 launches to be stopped, 202 〞 of its receiving terminal and
204 〞 can not receive laser beam, and in the case, sensor 202 and 204 sends signal to controller 190, represents to block
Disk 114 deviates home.Sensor 206 determines whether support arm 118 deviates by the convex block 220 detected on support arm 118
The principle of home is similar with the above process, and details are not described herein.
Above-mentioned PVD equipment is inevitably present following problems in actual use, i.e.,：Only disk 114 is being blocked along holding
Carry put 104 center and block the rectilinear direction deviation home where center when disk 114 be located at home, and partially
The distance of shifting be more than sensor 202 202 ＇ of transmitting terminal launch laser beam and 204 204 ＇ of transmitting terminal transmitting laser beam it
Between apart from when, sensor 202 and 204, which could detect, to be blocked disk 114 and deviate from home.And deviate peace blocking disk 114
The laser beam and the laser of 204 204 ＇ of transmitting terminal transmittings that 202 ＇ of transmitting terminal that the distance of all positon is less than sensor 202 launches
The distance between beam, or block disk 114 along other directions deviate home when, sensor 202 and 204 will not be to controller
190 send represent block disk 114 deviate home signal, but to controller 190 send expression block disk 114 without departing from
The signal of home.Similarly, sensor 206 also can send expression when support arm 118 deviates home to controller 190
Support arm 118 is in the signal of home.In these cases, sputter deposition craft is being carried out to workpiece to be machined 112, risen
During drop driving device driving bogey 104 makees elevating movement, that deviates home blocks disk 114 and/or support
Arm 118 may produce collision with bogey 104, workpiece to be machined 112, so as to cause to block disk 114, support arm 118, hold
The damage for putting 104 or workpiece to be machined 112 is carried, produces unnecessary loss.
The content of the invention
It is contemplated that at least solve one of technical problem existing in the prior art, it is proposed that one kind blocks disk detection dress
To put, detection method, reaction chamber and semiconductor processing equipment, it can exactly detect and block whether disk deviates home,
And disk is blocked relative to blocking whether disc transport apparatus is in normal place, so as to block disk deviation home
When, it can be corrected in time, the disk that blocks for preventing from deviateing home collides with bogey, causes to block
Disk, the damage for blocking disc transport apparatus, bogey or workpiece to be machined.
One kind is provided blocks disc detector to achieve the object of the present invention, block whether disk deviates reaction for detecting
The indoor home of chamber, and detection block whether disk is in normal place relative to blocking disc transport apparatus, described to block
Disc detector includes the first detection components, the second detection components and control unit；First detection components include multiple the
One detection device, the multiple first detection device are fixedly installed on the outside of reaction chamber, and are in described blocking disk position
In plane where when home；Second detection components include second detection device, and the second detection device is consolidated
Surely the outside of reaction chamber is arranged at, and is used to carry the support arm place plane for blocking disk in disc transport apparatus in blocking
On；The reaction chamber at the position opposite in the horizontal direction with the multiple first detection device of its chamber wall, and
Transparency window is equipped with position opposite in the horizontal direction with the second detection device；Each first detection device has level
First detection circuit, and it is described first detection circuit be located at home the disk that blocks intersect；First detection device
Blocked described in detection disk between transparency window where its first position for intersecting of detection circuit and first detection device away from
From, and detected data and be sent to control unit；The second detection device has the second horizontal detection circuit, and described
Second detection circuit intersects with the support arm positioned at standard initial position；The second detection device detect the support arm with
The distance between transparency window where its second position for intersecting of detection circuit and the second detection device, and detected data
It is sent to control unit；Described control unit is corresponding with first detection device by the detection data of each first detection device
Default first normal data is compared, and the detection data of second detection device are corresponding with second detection device default
Second normal data is compared；If the detection data of multiple first detection devices and default first normal data are completely the same,
And the detection data of second detection device are consistent with default second normal data, then control unit determine it is described block disk without departing from
Home, and the disk that blocks is in normal place relative to the disc transport apparatus that blocks；If conversely, one or more the
Default first normal data that the detection data of one detection device are corresponding is inconsistent, and/or, the detection of second detection device
Data and corresponding default second normal data are inconsistent, then control unit determines that the disk that blocks deviates home, and/
Or, the disk that blocks is not in normal place relative to the disc transport apparatus that blocks；First detection device is corresponding pre-
It is described to block disk and the first detection of first detection device if the first normal data refers to block disk without departing from home
The distance between transparency window where position that circuit intersects and first detection device；The second detection device is corresponding default
When second normal data refers to that support arm is in standard initial position, the second inspection with the second detection device of the support arm
The distance between transparency window where position that survey line road is intersected and the second detection device.
Wherein, the support arm upper surface or lower surface are equipped with convex portion, and the convex portion is in same with second detection device
On horizontal plane；And when the support arm is in standard initial position, the convex portion is located at the of the second detection device
On two detection circuits；When the support arm deviates standard initial position, the of the second detection device is deviateed in the convex portion
Two detection circuits.
Wherein, the support arm upper surface is equipped with multiple pillars, and the multiple pillar, which will be used to support, described blocks disk；Institute
State second detection device to be in same level with the multiple pillar, also, standard start bit is in the support arm
When putting, a pillar in the multiple pillar is located on the second detection circuit of the second detection device；In the support
When arm deviates standard initial position, which deviates the second detection circuit of the second detection device.
Wherein, the quantity of the second detection device is multiple.
Wherein, first detection device and second detection device are displacement sensor.
Wherein, institute's displacement sensors are laser displacement sensor.
Wherein, the resolution ratio of the laser displacement sensor is less than 7 μm, and range is more than 20mm.
As another technical solution, the present invention also provides one kind to block disk detection method, on provided by the invention
State to block disc detector detection and block disk and whether deviate home, and whether be in mark relative to blocking disc transport apparatus
Level is put, and the disk detection method of blocking comprises the following steps：Step S10, blocks disc transport apparatus driving and blocks disk and reach and pacify
All positon；Step S20, detection block on disk positioned at each first detection device first detection circuit on position and this first
The distance between transparency window where detection device；And positioned at the second detection circuit of second detection device on detection support arm
On position and second detection device where the distance between transparency window；Step S30, the detection of more each first detection device
Data default first normal data corresponding with first detection device, and compare the detection data and the of second detection device
Corresponding default second normal data of two detection devices；If the detection data of multiple first detection devices are with corresponding default the
One normal data is consistent, and the detection data of second detection device are consistent with corresponding default second normal data, it is determined that hides
Block plate is in normal place without departing from home, and relative to disc transport apparatus is blocked；Conversely, if one or more first is examined
It is inconsistent to survey detection data and corresponding default first normal data of device, and/or, the detection data of second detection device with
Corresponding default second normal data is inconsistent, it is determined that and block disk and deviate home, and/or, disk is blocked relative to blocking
Disc transport apparatus is not in normal place.
Wherein, in step s 30, however, it is determined that block disk and deviate home, and/or, block disk and passed relative to disk is blocked
Defeated device is not in normal place, then carries out following step：Step S40, school is carried out to the position for blocking disk and/or support arm
Just, make to block disk and be located at home；And support arm is in standard initial position, transmitted so as to block disk relative to disk is blocked
Device is in normal place.
As another technical solution, the present invention also provides a kind of reaction chamber, including bogey, block disk, block
Disc transport apparatus detects dress with disc detector, the disc detector that blocks is blocked using the above-mentioned disk that blocks provided by the invention
Put.
It is described anti-the present invention also provides a kind of semiconductor processing equipment, including reaction chamber as another technical solution
Chamber is answered to use above-mentioned reaction chamber provided by the invention.
The invention has the advantages that：
It is provided by the invention to block disc detector, when blocking disk deviation home, its multiple first detection device
In at least one detection data can be inconsistent with corresponding default first normal data；Deviate standard start bit in support arm
When putting, the detection data of second detection device can be inconsistent with corresponding default second normal data；Pass through it to compare
The detection data of first detection device and corresponding default first normal data, and detection data of second detection device and right
Default second normal data answered, determines to block whether disk deviates home, whether support arm deviates mark according to comparative result
Quasi- initial position, so that it is determined that blocking whether disk is located at home, and is in normal place relative to disc transport apparatus is blocked；
And then home is not in blocking disk, and/or, disk is blocked relative to when blocking disc transport apparatus and being not in normal place,
The position for blocking disk and support arm is corrected, avoids the disk that blocks for deviateing home, and/or, deviate standard start bit
The support arm put influences the process treatment process to workpiece to be machined, and prevent from blocking disk and/or support arm and bogey or
Collide between workpiece to be machined, cause unnecessary loss；Further, it is also possible to disc transport apparatus is being blocked to bogey
Top transmission is when blocking disk, avoids producing due to blocking disk relative to blocking caused by disc transport apparatus is not in normal place
Block disk to deviate relative to bogey, it is impossible to the problem of being completely covered by bogey.
It is provided by the invention to block disk detection method, by comparing the detection data of the first detection device and corresponding default
First normal data, and the detection data of second detection device and corresponding default second normal data, according to comparative result
Determine to block whether disk deviates home, whether support arm deviates standard initial position, so that it is determined that blocking whether disk is located at
Home, and it is in normal place relative to disc transport apparatus is blocked；And then it is not in home blocking disk, and/
Or, disk is blocked relative to when blocking disc transport apparatus and being not in normal place, the position for blocking disk and support arm can be carried out
Correction, avoids the disk that blocks for deviateing home, and/or, deviateing the support arm of standard initial position influences to workpiece to be machined
Process treatment process, and prevent from blocking between disk and/or support arm and bogey or workpiece to be machined and collide, cause
Unnecessary loss；Further, it is also possible to block disc transport apparatus to when disk is blocked in transmission above bogey, avoid producing by
Deviated in blocking disk relative to bogey relative to blocking disc transport apparatus and be not in blocking disk caused by normal place, no
The problem of bogey being completely covered by.
Reaction chamber provided by the invention, it, which is used, provided by the invention above-mentioned blocks disc detector, it may be determined that hides
Whether block plate is located at home, and is in normal place relative to disc transport apparatus is blocked；So as to be not in pacifying blocking disk
All positon, and/or, disk is blocked relative to when blocking disc transport apparatus and being not in normal place, can be to blocking disk and support arm
Position be corrected, avoid deviateing home blocks disk, and/or, deviateing the support arm of standard initial position influences pair
The process treatment process of workpiece to be machined, and prevent from blocking between disk and/or support arm and bogey or workpiece to be machined and send out
Raw collision, causes unnecessary loss；Further, it is also possible to disk is blocked to transmission above bogey blocking disc transport apparatus
When, avoid producing and disk is blocked caused by disc transport apparatus is not in normal place relative to holding relative to blocking due to blocking disk
Carry and put offset, it is impossible to the problem of being completely covered by bogey.
Semiconductor processing equipment provided by the invention, it uses above-mentioned reaction chamber provided by the invention, it may be determined that hides
Whether block plate is located at home, and is in normal place relative to disc transport apparatus is blocked；So as to be not in pacifying blocking disk
All positon, and/or, disk is blocked relative to when blocking disc transport apparatus and being not in normal place, can be to blocking disk and support arm
Position be corrected, avoid deviateing home blocks disk, and/or, deviateing the support arm of standard initial position influences pair
The process treatment process of workpiece to be machined, and prevent from blocking between disk and/or support arm and bogey or workpiece to be machined and send out
Raw collision, causes unnecessary loss；Further, it is also possible to disk is blocked to transmission above bogey blocking disc transport apparatus
When, avoid producing and disk is blocked caused by disc transport apparatus is not in normal place relative to holding relative to blocking due to blocking disk
Carry and put offset, it is impossible to the problem of being completely covered by bogey.
Brief description of the drawings
Fig. 1 is the structure diagram of the reaction chamber of existing PVD equipment；
Fig. 2 is the local overlooking schematic diagram of reaction chamber shown in Fig. 1；
Fig. 3 is sectional view of the sensor component along A-A；
Fig. 4 is the structure diagram provided in an embodiment of the present invention for blocking disc detector；
Fig. 5 is the top view that disc detector is blocked shown in Fig. 4；
Fig. 6 is that the quantity of second detection device is multiple schematic diagrames；
Fig. 7 is the schematic diagram that support arm lower surface is equipped with convex portion；And
Fig. 8 is the schematic diagram that support arm upper surface is equipped with multiple pillars.
Embodiment
To make those skilled in the art more fully understand technical scheme, come below in conjunction with the accompanying drawings to the present invention
Block disc detector, detection method, reaction chamber and the semiconductor processing equipment provided is described in detail.
Fig. 4 is the structure diagram provided in an embodiment of the present invention for blocking disc detector.It refer to Fig. 4, reaction chamber 1
Including bogey 10, target 11, disk 12 is blocked, block disc transport apparatus 13 and blocks disc detector 14.Wherein, carrying dress
Put 10 to be arranged on inside reaction chamber 1, it is used to carry workpiece to be machined 15.Target 11 is arranged on the top of bogey 10, it is used for
There is provided to the material needed for deposition film on workpiece to be machined 15.Block disk 12 and be located at the indoor home of reaction chamber, it is used
When the oxide and impurity on 11 surface of target is being removed, it is covered on bogey 10, is covered, to prevent from target 11
The oxide and impurity of upper disengaging are fallen on bogey 10, and bogey 10 is polluted；Specifically, home refers to
In the horizontal direction away from bogey 10 in reaction chamber 1, and do not influence the workpiece to be machined being opposite on bogey 10
The technique such as deposition position.Disc transport apparatus 13 is blocked to be used between above home and bogey 10 transmit to block
Disk 12, it includes support arm 131 and driving device 132；Wherein, support arm 131, which is used to carry on the upper surface of which, blocks disk 12；
The drive shaft of driving device 132 is connected with support arm 131, it is used to drive support arm 131 to fill in standard initial position and carrying
It is reciprocating to put 10 tops, disk 12 is blocked on home and bogey 10 so as to fulfill being placed on support arm 131
Transmission between side；Specifically, standard initial position refers to that blocking disk 12 is located at home, and blocks disk 12 relative to blocking
When disc transport apparatus 13 is in normal place, the location of support arm 131；When support arm 131 is in standard initial position,
If blocking disk 12 is located at home, disk 12 is blocked relative to disc transport apparatus 13 is blocked and is in normal place, in this situation
Under, block disc transport apparatus 13 and block disk 12 from home to the transmission of the top of bogey 10, blocking disk 12 can be exactly
It is covered on bogey 10, without producing offset, so that bogey 10 can be completely covered by by blocking disk 12.
Fig. 5 is the top view that disc detector is blocked shown in Fig. 4.Please disc detector is blocked referring to Fig. 4 and Fig. 5 in the lump
14 are used to detect and block whether disk 12 deviates home in reaction chamber 1, and whether detection blocks disk 12 relative to screening
Block plate transmitting device 13 is in normal place, it includes the first detection components, the second detection components and control unit 141.Wherein,
First detection components include multiple first detection devices 142, and multiple first detection devices 142 are fixedly installed on reaction chamber 1
Outside, and multiple first detection devices 142 are in blocking in the plane where when disk 12 is located at home.Second detection group
Part includes second detection device 143, and second detection device 143 is fixedly installed on the outside of reaction chamber 1, and second detection device
143 are in the institute of support arm 131 in the plane.
In the present embodiment, reaction chamber 1 is in its chamber wall and multiple first detection devices 142 phase in the horizontal direction
To position at, and transparency window is equipped with the position opposite in the horizontal direction with second detection device 143.Specifically, with
Transparency window 16 is equipped with the opposite position of multiple first detection devices 142, is set at the position opposite with second detection device 143
There is transparency window 17.
Each first detection device 142 has the first horizontal detection circuit, and the first detection circuit is with being located at safety
The disk 12 that blocks of position intersects；Specifically, in the present embodiment, the first detection device 142 is laser displacement sensor, it is being examined
During survey, to the laser beam for the home emission level for blocking disk 12, so as to form the first detection circuit.
The position intersected with its first detection circuit of disk 12 is blocked in the detection of first detection device 142 and first detection fills
The distance between 142 place transparency windows 16 are put, and the detection data are sent to control unit 141.In the present embodiment, with screening
When block plate 12 is without departing from home, the position intersected with the first detection device 142 the first detection circuit that is blocking disk 12 and
The distance between first detection device, the 142 place transparency window 16 is 142 corresponding default first criterion numeral of the first detection device
According to.It is readily appreciated that, when blocking the deviation home of disk 12, it is inclined along the direction closer or far from transparency window 16 no matter to block disk 12
Deviate home from home, or along other directions, also no matter block the distance that disk 12 deviates home, at least
The detection data of one the first detection device 142 can be corresponding default first normal data it is inconsistent；In the case, may be used
To determine therefrom that blocking disk 12 deviates home.
Second detection device 143 has the second horizontal detection circuit, and the second detection circuit positioned at standard with originating
The support arm 131 of position is intersecting；Specifically, in the present embodiment, second detection device 143 is laser displacement sensor, its
In detection process, to the laser beam of the standard initial position emission level of support arm 131, so as to form the second detection circuit.
Second detection device 143 detects the position intersected with its second detection circuit and second detection of support arm 131
The distance between 143 place transparency window 17 of device, and the detection data are sent to control unit 141.Specifically, in this implementation
In example, second detection device 143 and the side wall of support arm 131 are in same level.In the case, supported by setting
The side wall of arm 131 has specific shape, makes the position intersected with the second detection circuit and transparency window on 131 side wall of support arm
The distance between 17 is inconsistent when support arm 131 is located at standard initial position and deviates standard initial position.In the present embodiment
In, when being in standard initial position with support arm 131, the second inspection with the second detection device 143 on 131 side wall of support arm
The distance between position that survey line road is intersected and the 143 place transparency window 17 of second detection device are the second detection device 143
Corresponding default second normal data.Be readily appreciated that, the detection data of second detection device 143 it is corresponding default second
When normal data is different, it may be determined that support arm 131 deviates standard initial position.
Control unit 141 is corresponding pre- by the detection data of each first detection device 142 and first detection device 142
If the first normal data is compared, and the detection data of second detection device 143 are corresponding with second detection device 143
Default second normal data is compared；If the as described above, detection data of multiple first detection devices 142 and default the
One normal data is completely the same, and the detection data of second detection device 143 are consistent with default second normal data, then control is single
Member 141 can determine that block disk 12 is in standard initial position, may thereby determine that screening without departing from home, support arm 131
Block plate 12 is in normal place relative to disc transport apparatus 13 is blocked；If the conversely, inspection of one or more first detection devices 142
It is inconsistent to survey corresponding default first normal data of data, and/or, the detection data of second detection device 143 with it is corresponding
Default second normal data it is inconsistent, then control unit 141 can determine that blocking disk 12 deviates home, and/or, block
Disk 12 is not in normal place relative to disc transport apparatus 13 is blocked, in this case it is desirable to blocking disk 12 and/or blocking disk
The position of transmitting device 13 is corrected.
In this embodiment, it is preferred that the first detection device 142 and the resolution ratio of second detection device 143 are less than 7 μm,
Range is more than 20mm.
It is provided in this embodiment to block disc detector, when blocking the deviation home of disk 12, its multiple first detection
At least one detection data in device 142 can be inconsistent with corresponding default first normal data；Deviate in support arm 131
During standard initial position, the detection data of second detection device 143 can be inconsistent with corresponding default second normal data；Make it
The detection data for comparing the first detection device 142 and corresponding default first normal data, and the second detection dress can be passed through
143 detection data and corresponding default second normal data are put, is determined to block whether disk 12 deviates safety according to comparative result
Whether position, support arm 131 deviate standard initial position, so that it is determined that whether block disk 12 is located at home, and relative to
Block disc transport apparatus 13 and be in normal place；And then home is not in blocking disk 12, and/or, it is opposite to block disk 12
When blocking disc transport apparatus 13 and being not in normal place, the position for blocking disk 12 and support arm 131 can be corrected, kept away
That exempts to deviate home blocks disk 12, and/or, deviateing the support arm 131 of standard initial position influences to workpiece to be machined 15
Process treatment process, and prevent from blocking and occur between disk 12 and/or support arm 131 and bogey 10 or workpiece to be machined 15
Collision, causes unnecessary loss；Further, it is also possible to disk is blocked to transmission above bogey 10 blocking disc transport apparatus 13
When 12, avoid producing and block disk 12 relative to blocking caused by disc transport apparatus 13 is not in normal place due to blocking disk 12
Deviated relative to bogey 10, it is impossible to the problem of being completely covered by bogey 10.
It should be noted that in the present embodiment, the first detection device 142 and second detection device 143 are laser displacement
Sensor, but the present invention is not limited thereto, in practical applications, the first detection device 142 and second detection device 143 can be with
For other high accuracy displacement sensors or other can realize the first detection device 142 and the function of second detection device 143
Detection device.
It should also be noted that, in the present embodiment, the side wall by setting support arm 131 has specific shape, makes
The distance between the position intersected on 131 side wall of support arm with the second detection circuit and transparency window 17 are in support arm 131 positioned at mark
It is inconsistent when quasi- initial position and deviation standard initial position；But the present invention is not limited thereto, in practical applications, such as Fig. 6 institutes
Show, the quantity that can also set second detection device 143 is multiple, and makes at least one 143 corresponding branch of second detection device
The distance between relevant position and transparency window 17 in brace 131 are located at standard initial position in support arm 131 and deviate standard
It is inconsistent during initial position.In addition to aforesaid way, in practical applications, it can also be set in 131 upper surface of support arm or lower surface
There is convex portion 133, as shown in fig. 7, making convex portion 133 be in second detection device 143 in same level；And in support arm
131 when being in standard initial position, and convex portion 133 is located on the second detection circuit of second detection device 143；In support arm 131
During deviation standard initial position, the second detection circuit of second detection device 143 is deviateed in convex portion 133.In addition, in practical application
In, multiple pillars 134 for being used to support and blocking disk 12 can also be equipped with 131 upper surface of support arm, as shown in figure 8, making second
Detection device 143 is in same level with multiple pillars 134, and when support arm 131 is in standard initial position, is made
A pillar 134 in multiple pillars 134 is located on the second detection circuit of second detection device 143；Deviate in support arm 131
During standard initial position, which deviates the second detection circuit of second detection device 143.
As another technical solution, the embodiment of the present invention also provides one kind and blocks disk detection method, it is based on the present invention
Above-described embodiment provide block disc detector detection block whether disk 12 deviates home, and block disk 12 whether phase
Normal place is in for blocking disc transport apparatus 13, it comprises the following steps：
Step S10, blocks the driving of disc transport apparatus 13 and blocks the arrival home of disk 12；
Step S20, detection block on disk 12 positioned at each first detection device 142 first detection circuit on position and
The distance between first detection device, the 142 place transparency window 16；And it is located at second detection device on detection support arm 131
The distance between position and the 143 place transparency window 17 of second detection device on 143 the second detection circuit；
Step S30, the detection data of more each first detection device 142 and first detection device 142 are corresponding pre-
If the first normal data, and compare the detection data and second detection device 143 corresponding default the of second detection device 143
Two normal datas；If the detection data of multiple first detection devices 142 are consistent with corresponding default first normal data, and the
The detection data of two detection devices 143 are consistent with corresponding default second normal data, it is determined that block disk 12 without departing from safety
Position, and it is in normal place relative to disc transport apparatus 13 is blocked；If conversely, one or more first detection device 142
Detect data and corresponding default first normal data is inconsistent, and/or, the detection data and correspondence of second detection device 143
Default second normal data it is inconsistent, it is determined that block disk 12 and deviate home, and/or, block disk 12 relative to blocking
Disc transport apparatus 13 is not in normal place.
In the step S30 of the present embodiment, however, it is determined that block disk 12 deviate home, and/or, block disk 12 relative to
Block disc transport apparatus 13 and be not in normal place, then following step is carried out after step S30：
Step S40, is corrected the position for blocking disk 12 and/or support arm 131, makes to block disk 12 and is located at security bit
Put；And support arm 131 is in standard initial position, so as to block disk 12 normal bit is in relative to disc transport apparatus 13 is blocked
Put.
Specifically, in above-mentioned steps S30, if the detection data of multiple first detection devices 142 and corresponding default the
One normal data is consistent, and the detection data of second detection device 143 and corresponding default second normal data are inconsistent, it is determined that
Block disk 12 and be not in normal place relative to disc transport apparatus 13 is blocked；In the case, there are following risks：Support arm
131 continue to move under the driving of driving device 132, make to block disk 12 and the chamber wall of reaction chamber 1 collides, need at this time
Control driving device 132 stops driving support arm 131 and moves, and support arm 131 is corrected with the position for blocking disk 12.If
The detection data of second detection device 143 are consistent with corresponding default second normal data, the inspection of multiple first detection devices 142
Survey data and corresponding to preset the first normal data inconsistent, it is determined that block disk 12 relative to blocking disc transport apparatus 13 not
In normal place；In the case, there are following risks：Support arm 131 is driven by bogey 10 in driving device 132
When direction standard initial position is moved, block disk 12 and be not placed on support arm 131, need control driving device 132 to stop at this time
Support arm movement is only driven, and support arm 131 is corrected with the position for blocking disk 12.
It is provided in this embodiment to block disk detection method, by the detection data and correspondence that compare the first detection device 142
Default first normal data, and the detection data of second detection device 143 and corresponding default second normal data, according to
Comparative result determines to block whether disk 12 deviates home, and whether support arm 131 deviates standard initial position, so that it is determined that hiding
Whether block plate 12 is located at home, and is in normal place relative to disc transport apparatus 13 is blocked；And then blocking disk 12 not
In home, and/or, disk 12 is blocked relative to when blocking disc transport apparatus 13 and being not in normal place, can be to blocking
The position of disk 12 and support arm 131 is corrected, and avoid deviateing home blocks disk 12, and/or, deviate standard start bit
The support arm 131 put influences the process treatment process to workpiece to be machined 15, and prevent from blocking disk 12 and/or support arm 131 with
Collide between bogey 10 or workpiece to be machined 15, cause unnecessary loss；Further, it is also possible to blocking disk transmission
Device 13 to the transmission of the top of bogey 10 block disk 12 when, avoid producing due to blocking disk 12 relative to blocking disc transport apparatus
13 are not in blocking disk 12 caused by normal place and are deviated relative to bogey 10, it is impossible to are completely covered by bogey 10
The problem of.
As another technical solution, the embodiment of the present invention also provides a kind of reaction chamber, it includes bogey, blocks
Disk, block disc transport apparatus and block disc detector, wherein, block the screening that disc detector uses the above embodiment of the present invention
Block plate detection device.
Reaction chamber provided in an embodiment of the present invention, its disk detection of blocking for using the above embodiment of the present invention to provide fill
Put, it may be determined that block whether disk is located at home, and normal place is in relative to disc transport apparatus is blocked；So as to,
Block disk and be not in home, and/or, disk is blocked relative to when blocking disc transport apparatus and being not in normal place, can be right
The position for blocking disk and support arm is corrected, and avoids the disk that blocks for deviateing home, and/or, deviate standard initial position
Support arm influence to the process treatment process of workpiece to be machined, and prevent from blocking disk and/or support arm with bogey or by
Collide between workpieces processing, cause unnecessary loss；Further, it is also possible to disc transport apparatus is being blocked on bogey
Side's transmission is when blocking disk, avoids producing and is hidden due to blocking disk relative to blocking caused by disc transport apparatus is not in normal place
Block plate is deviated relative to bogey, it is impossible to the problem of being completely covered by bogey.
As another technical solution, the embodiment of the present invention also provides a kind of semiconductor processing equipment, it includes reaction chamber
Room, the reaction chamber use the reaction chamber that the above embodiment of the present invention provides.
Semiconductor processing equipment provided in an embodiment of the present invention, it uses the reaction chamber that the above embodiment of the present invention provides
Room, it may be determined that block whether disk is located at home, and normal place is in relative to disc transport apparatus is blocked；So as to,
Block disk and be not in home, and/or, disk is blocked relative to when blocking disc transport apparatus and being not in normal place, can be right
The position for blocking disk and support arm is corrected, and avoids the disk that blocks for deviateing home, and/or, deviate standard initial position
Support arm influence to the process treatment process of workpiece to be machined, and prevent from blocking disk and/or support arm with bogey or by
Collide between workpieces processing, cause unnecessary loss；Further, it is also possible to disc transport apparatus is being blocked on bogey
Side's transmission is when blocking disk, avoids producing and is hidden due to blocking disk relative to blocking caused by disc transport apparatus is not in normal place
Block plate is deviated relative to bogey, it is impossible to the problem of being completely covered by bogey.
It is understood that the principle that embodiment of above is intended to be merely illustrative of the present and the exemplary implementation that uses
Mode, but the present invention is not limited thereto.For those skilled in the art, the essence of the present invention is not being departed from
In the case of refreshing and essence, various changes and modifications can be made therein, these variations and modifications are also considered as protection scope of the present invention.
Claims (10)
1. one kind blocks disc detector, block whether disk deviates the indoor home of reaction chamber, and detection for detecting
Block whether disk is in normal place relative to blocking disc transport apparatus, it is characterised in that the disc detector that blocks includes
First detection components, the second detection components and control unit；First detection components include multiple first detection devices, described
Multiple first detection devices are fixedly installed on the outside of reaction chamber, and are in described blocking place when disk be located at home
Plane on；Second detection components include second detection device, and the second detection device is fixedly installed on reaction chamber
Outside, and in block in disc transport apparatus be used for carry block disk support arm institute in the plane；
The reaction chamber at the position opposite in the horizontal direction with the multiple first detection device of its chamber wall, and
Transparency window is equipped with position opposite in the horizontal direction with the second detection device；
Each first detection device has the first horizontal detection circuit, and the first detection circuit is with being located at home
Disk is blocked to intersect；Blocked described in first detection device detection disk the position intersected with its first detection circuit and this first
The distance between transparency window where detection device, and detected data and be sent to control unit；
The second detection device has the second horizontal detection circuit, and the second detection circuit is with being located at standard start bit
The support arm put intersects；The second detection device detects the position intersected with its second detection circuit and the institute of the support arm
The distance between transparency window where stating second detection device, and detected data and be sent to control unit；
Described control unit marks the detection data of each first detection device corresponding with first detection device default first
Quasi- data are compared, and by the detection data of second detection device default second criterion numeral corresponding with second detection device
According to being compared；If the detection data of multiple first detection devices and default first normal data are completely the same, and the second detection
The detection data of device are consistent with default second normal data, then control unit determines the disk that blocks without departing from home,
And the disk that blocks is in normal place relative to the disc transport apparatus that blocks；If the conversely, detection dress of one or more first
Corresponding default first normal data of the detection data put is inconsistent, and/or, the detection data of second detection device with it is right
Default second normal data answered is inconsistent, then control unit determines that the disk that blocks deviates home, and/or, the screening
Block plate is not in normal place relative to the disc transport apparatus that blocks；
It is described to block when corresponding default first normal data of first detection device refers to block disk without departing from home
Between transparency window where position that first detection circuit of disk and first detection device intersects and first detection device away from
From；When corresponding default second normal data of the second detection device refers to that support arm is in standard initial position, the branch
Between transparency window where the position intersected with the second detection circuit of the second detection device of brace and the second detection device
Distance；
First detection device and second detection device are displacement sensor.
2. according to claim 1 block disc detector, it is characterised in that the support arm upper surface or lower surface are set
There is convex portion, the convex portion is in same level with second detection device；And
When the support arm is in standard initial position, the convex portion is located at the second detection circuit of the second detection device
On；When the support arm deviates standard initial position, the second detection circuit of the second detection device is deviateed in the convex portion.
3. according to claim 1 block disc detector, it is characterised in that the support arm upper surface is equipped with multiple
Column, the multiple pillar, which will be used to support, described blocks disk；
The second detection device is in same level with the multiple pillar, also,
When the support arm is in standard initial position, a pillar in the multiple pillar is filled positioned at the described second detection
On the second detection circuit put；When the support arm deviates standard initial position, which deviates the second detection device
Second detection circuit.
4. according to claim 1 block disc detector, it is characterised in that the quantity of the second detection device is more
It is a.
5. according to claim 1 block disc detector, it is characterised in that institute's displacement sensors pass for laser displacement
Sensor.
6. according to claim 5 block disc detector, it is characterised in that the resolution ratio of the laser displacement sensor
Less than 7 μm, range is more than 20mm.
7. one kind blocks disk detection method, based on blocking disc detector described in claim 1-6 any one claims
Detection blocks disk and whether deviates home, and whether is in normal place relative to blocking disc transport apparatus, its feature exists
In the disk detection method of blocking comprises the following steps：
Step S10, blocks disc transport apparatus driving and blocks disk arrival home；
The position and first inspection on disk on the first detection circuit of each first detection device are blocked in step S20, detection
The distance between transparency window where surveying device；And on detection support arm on the second detection circuit of second detection device
Position and second detection device where the distance between transparency window；
Step S30, the detection data of more each first detection device default first standard corresponding with first detection device
Data, and compare the detection data and corresponding default second normal data of second detection device of second detection device；It is if more
The detection data of a first detection device are consistent with corresponding default first normal data, and the testing number of second detection device
According to consistent with corresponding default second normal data, it is determined that block disk without departing from home, and transmit relative to disk is blocked
Device is in normal place；If conversely, the detection data of one or more first detection devices and corresponding default first standard
Data are inconsistent, and/or, the detection data of second detection device and corresponding default second normal data are inconsistent, it is determined that
Block disk and deviate home, and/or, disk, which is blocked, relative to disc transport apparatus is blocked is not in normal place.
8. according to claim 7 block disk detection method, it is characterised in that in step s 30, however, it is determined that it is inclined to block disk
From home, and/or, disk is blocked relative to disc transport apparatus is blocked and is not in normal place, then carries out following step：
Step S40, is corrected the position for blocking disk and/or support arm, makes to block disk and is located at home；And make support arm
In standard initial position, normal place is in relative to disc transport apparatus is blocked so as to block disk.
9. a kind of reaction chamber, including bogey, disk is blocked, block disc transport apparatus and blocks disc detector, its feature
It is, the disc detector that blocks blocks disc detector using described in claim 1-6 any one.
10. a kind of semiconductor processing equipment, including reaction chamber, it is characterised in that the reaction chamber uses claim 9 institute
The reaction chamber stated.
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| CN106350780B (en) * | 2015-07-16 | 2018-12-11 | 北京北方华创微电子装备有限公司 | Reaction chamber and semiconductor processing equipment |
| CN106571284B (en) * | 2015-10-09 | 2019-01-18 | 北京北方华创微电子装备有限公司 | Block disc system, reaction chamber and semiconductor processing equipment |
| CN107331634A (en) * | 2016-04-28 | 2017-11-07 | 上海新昇半导体科技有限公司 | Epitaxial device chamber cover plate |
| CN107604305B (en) * | 2017-08-31 | 2020-03-17 | 武汉华星光电半导体显示技术有限公司 | Actuating mechanism of lower light chopper of organic cavity of coating by vaporization machine |
| CN109778147B (en) * | 2017-11-14 | 2021-05-07 | 北京北方华创微电子装备有限公司 | Reaction chamber and semiconductor processing equipment |
| CN110527968B (en) * | 2019-09-26 | 2021-07-13 | 北京北方华创微电子装备有限公司 | Shielding disc detection device, magnetron sputtering chamber and shielding disc detection method |
| CN114959609B (en) * | 2022-05-25 | 2023-10-13 | 北京北方华创微电子装备有限公司 | Semiconductor process chamber and shielding disc monitoring method thereof |
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