CN206271677U - Fragmentation arrangement for detecting - Google Patents
Fragmentation arrangement for detecting Download PDFInfo
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- CN206271677U CN206271677U CN201621430973.XU CN201621430973U CN206271677U CN 206271677 U CN206271677 U CN 206271677U CN 201621430973 U CN201621430973 U CN 201621430973U CN 206271677 U CN206271677 U CN 206271677U
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- sensor
- fragmentation
- adsorbent equipment
- detecting
- wafer
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Abstract
The utility model provides a kind of fragmentation arrangement for detecting, and the fragmentation arrangement for detecting includes：Adsorbent equipment, tumbler and sensor；Wherein, the adsorbent equipment absorption wafer；The tumbler drives the adsorbent equipment and/or sensor motion so that produced relative rotation between the adsorbent equipment and the sensor；The sensor detects whether the wafer of the adsorbent equipment absorption has breakage.In the fragmentation arrangement for detecting that the utility model is provided, wafer can be adsorbed by adsorbent equipment, when fragmentation situation occurs in wafer, cause to occur the problem do not adsorbed due to placing unstable (such as deflection etc.) or rupture, so that fragmentation wafer is detected；Further, when making the wafer that the adsorbent equipment is adsorbed relative to sensor rotation by tumbler, sensor is completed to the wafer detecting of a week, can be then detected if any fragmentation phenomenon.The detection of fragmentation is realized by the utility model, fragmentation phenomena impair production efficiency is prevented.
Description
Technical field
The utility model is related to technical field of manufacturing semiconductors, more particularly to a kind of fragmentation arrangement for detecting.
Background technology
In technical field of manufacturing semiconductors, wafer is needed by many processing steps, and the wafer in big Alternative is required for
By repeatedly cleaning, the contamination of the types such as particle, organic matter or the metal of crystal column surface, wafer during these are removed
Fragmentation phenomenon can occur unavoidably, if can not find in time, it is possible to board is caused to damage, and causes fragmentation to be cleared up
It is highly difficult, the efficiency of whole production is influenced whether when serious.
In the prior art, wafer is often shifted using mechanical arm, such as after grinding technics, the wafer for just having ground
Need to be transferred to specified location, if now wafer occurs fragmentation without being found, wafer is not it is possible that inclination etc. is put
The problem put, may collide when mechanical arm is continued to move to take wafer by original setting, may make mechanical arm and machine
Platform is impacted and is deformed.Do not collided when mechanical arm takes wafer for example again, but in follow-up transfer process, wafer
Probably due to the problems such as dropping occurs in inclination etc. or riding position is inaccurate, so as to have influence on follow-up technique, causing life
Produce security incident.
In the prior art, generally only detect whether to be in place wafer, but but cannot detect whether wafer goes out
Existing fragmentation phenomenon.Therefore, how to detect whether wafer occurs fragmentation is that those skilled in the art need the technology for solving to ask
Topic.
Utility model content
The purpose of this utility model is to provide a kind of fragmentation arrangement for detecting, to solve that crystalline substance can not be detected in the prior art
There is the problem of fragmentation in circle.
In order to solve the above technical problems, the utility model provides a kind of fragmentation arrangement for detecting, the fragmentation arrangement for detecting
Including：Adsorbent equipment, tumbler and sensor；Wherein, the adsorbent equipment absorption wafer；The tumbler drives described
Adsorbent equipment and/or the sensor are moved so that produced relative rotation between the adsorbent equipment and the sensor；It is described
Sensor detects whether the wafer of the adsorbent equipment absorption has breakage.
Preferably, in the fragmentation arrangement for detecting, the adsorbent equipment includes suction nozzle and connects the tracheae of the suction nozzle.
Preferably, in the fragmentation arrangement for detecting, the tumbler includes the Rotational Cylindrical of connection adsorbent equipment, described
Rotational Cylindrical is driven and rotated by motor.
Preferably, in the fragmentation arrangement for detecting, the tumbler includes sensor holder, sensor track and horse
Reach, the sensor is arranged on the sensor holder, the sensor track drives around the adsorbent equipment, the motor
The sensor holder is rotated on the sensor track.
Preferably, in the fragmentation arrangement for detecting, the fragmentation arrangement for detecting also includes support meanss, the support dress
Telescopic support meanss are set to, the adsorbent equipment is arranged in support meanss.
Preferably, in the fragmentation arrangement for detecting, the support meanss include supporting plate, the support gentle cylinder of panel guide,
The cylinder promotes the supporting plate to be moved on the support panel guide.
Preferably, in the fragmentation arrangement for detecting, the support meanss also include some position sensors.
Preferably, in the fragmentation arrangement for detecting, the fragmentation arrangement for detecting also includes some wafer holders, described
Wafer holder is around the adsorbent equipment.
Preferably, in the fragmentation arrangement for detecting, the sensor is laser sensor or infrared ray sensor.
Preferably, in the fragmentation arrangement for detecting, the fragmentation arrangement for detecting also includes alarm.
Preferably, in the fragmentation arrangement for detecting, the alarm includes audio communication alarm and/or display alarm.
Preferably, in the fragmentation arrangement for detecting, the audio communication alarm is buzzer or loudspeaker.
Preferably, in the fragmentation arrangement for detecting, the display alarm is warning light or display screen.
In the fragmentation arrangement for detecting that the utility model is provided, wafer can be adsorbed by adsorbent equipment, when wafer goes out
During existing fragmentation situation, cause to occur the problem do not adsorbed due to placing unstable (such as deflection etc.) or rupture, it may appear that true
Sky detection is not up to standard, so that fragmentation wafer is detected；Further, make what the adsorbent equipment was adsorbed by tumbler
When wafer is relative to sensor rotation, sensor is completed to the wafer detecting of a week, can be then detected if any fragmentation phenomenon.Cause
This, the detection of fragmentation is realized by the utility model, prevents fragmentation phenomena impair production efficiency.
Brief description of the drawings
Fig. 1 is the sectional view of the fragmentation arrangement for detecting of embodiment of the present utility model；
Fig. 2 is the sectional view of the fragmentation arrangement for detecting with support meanss of embodiment of the present utility model；
Fig. 3 is the section view of the fragmentation arrangement for detecting with support meanss of another implementation method of embodiment of the present utility model
Figure；
Fig. 4 is the section view of the fragmentation arrangement for detecting with support meanss of embodiment a further embodiment of the present utility model
Figure；
Wherein, 10- adsorbent equipments, 11- suction nozzles, 12- tracheaes, 20- sensors, 21- sensor tracks, 30- wafers, 41-
Rotational Cylindrical, 42- motors, 51- support panel guides, 52- supporting plates, 53- cylinders, 54- position sensors, 60- support members.
Specific embodiment
In order that the purpose of this utility model, feature and advantage can be more obvious understandable, accompanying drawing is referred to.It should be clear that this
Structure, ratio, size depicted in specification institute accompanying drawings etc., are only used to coordinate the content disclosed in specification, for ripe
The personage for knowing this technology understands and reads, and is not limited to the enforceable qualifications of the utility model, therefore do not have technically
Essential meaning, the modification of any structure, the change of proportionate relationship or the adjustment of size can be produced the utility model is not influenceed
Under raw effect and the purpose to be reached, all should still fall obtain the scope that can cover in the technology contents disclosed in the utility model
It is interior.
As shown in figure 1, the utility model provides a kind of fragmentation arrangement for detecting, including：Adsorbent equipment 10, tumbler and biography
Sensor 20；Wherein, the absorption of the adsorbent equipment 10 wafer 30；The tumbler drives the adsorbent equipment 30 and/or described
Sensor 20 is moved so that produced relative rotation between the adsorbent equipment 30 and the sensor 20；The sensor 20 is examined
Whether the wafer 30 for surveying the absorption of the adsorbent equipment 10 has breakage.
With continued reference to shown in Fig. 1, the adsorbent equipment 10 includes suction nozzle 11 and connects the tracheae 12 of the suction nozzle 11, tracheae
12 sources of the gas for providing negative pressure, enable suction nozzle 11 to adsorb wafer 30, when wafer 30 occurs fragmentation problem, are then likely to occur placement not
Surely (such as deflection etc.) or rupture causes the problem that suction nozzle does not adsorb wafer occurs, it may appear that vacuum detecting is not up to standard, from
And pass through adsorbent equipment 10 and play a part of to detect wafer 30, when wafer is complete, adsorbent equipment 10 then plays absorption and fixes
The effect of wafer 30, so as to carry out other follow-up operations.
As shown in Figures 2 and 3, the tumbler includes Rotational Cylindrical 41 and motor 42, and the adsorbent equipment 10 is arranged on
In the Rotational Cylindrical 41, the Rotational Cylindrical 41 is driven by motor 42, drives Rotational Cylindrical 41 to rotate by motor 42, so that real
The rotation of the wafer 30 of the existing absorption of adsorbent equipment 10, for example, Rotational Cylindrical can select the interior column structure for setting rotary shaft, rotary shaft exists
It is rotatable on base, and axle rotation is rotated by motor, motor can be rotated axle using modes such as belt or gears.
With continued reference to shown in Fig. 2, in another embodiment, the tumbler includes sensor holder, sensor track 21 and motor,
The sensor 20 is arranged on the sensor holder, and the sensor track 21 is around the adsorbent equipment 10, the motor
Drive the sensor holder to be rotated on the sensor track 21, i.e., drive the sensor 20 to rotate by motor, from
And realize rotation of the sensor 20 relative to wafer 30.By different implementation methods, i.e., absorption dress is realized by Rotational Cylindrical
Put rotation or rotated on sensor track by sensor so that produced between the adsorbent equipment and the sensor relative
Rotate, so that sensor completes the detection of the circle of wafer one.It is understood that tumbler is not limited to above-described embodiment.
Preferably, the fragmentation arrangement for detecting also includes support meanss, and the support meanss are telescopic support meanss,
The adsorbent equipment 10 is arranged in support meanss, and the relative position of wafer 30 is adjusted by telescopic support meanss, from
And facilitate the detection and operating of wafer 30.
With continued reference to shown in Fig. 2, the support meanss include supporting plate 52, support panel guide 51 and cylinder 53, the gas
Cylinder 53 promotes the supporting plate 52 to be moved on the support panel guide 51, supports panel guide 51 and is arranged on the supporting plate and leads
Supporting plate 52 on rail 51, the supporting plate 52 connects a cylinder 53, and supporting plate 52 is promoted in guide rail 51 by controlling cylinder 53
Upper slip, so as to the telescopic adjustment for realizing support meanss is acted on, can adjust and set wafer by telescopic support meanss
Height and position.In other embodiments, telescopic support shaft can be realized directly by other manners such as cylinder promotions.
Preferably, the support meanss also include some position sensors 54, are sensed by some position sensors 54
The flexible height of setting support meanss, for example, can be set the different height such as test position, position of readiness and advanced positions and come
The need for meeting difference, support meanss as shown in Figure 2 are stretched to the advanced positions of contact wafer, support dress as shown in Figure 3
The position of readiness stretched to lower position is put, position sensor both may be provided on support panel guide, it is also possible to be arranged at fragmentation
On its position of arrangement for detecting, it is only necessary to realize being detected by position sensor the shift position of support panel guide.
Preferably, the fragmentation arrangement for detecting also includes some wafer holders 60, and the wafer holder 60 is around institute
Adsorbent equipment 30 is stated, support wafer 50 can be played by wafer holder 12 and acted on, so as to meet the transfer needs of wafer, for example
Wafer is placed in wafer holder by mechanical arm, or is taken away wafer from wafer holder by mechanical arm, for example,
The support member can be that the surface of support curved surface, i.e. support member is the cambered surface for bending, and provide preferable by some support curved surfaces
Support, the phenomenon such as prevent the wafer of fragmentation from occurring dropping.
Preferably, the sensor 20 is laser sensor or infrared ray sensor, by laser sensor or infrared ray
Sensor receives the modes such as reflected signal or blocking signal to judge whether fragmentation occur.It should be noted that sensor needs
Being arranged on according to wafer size or sensor model number etc. can detect the position of wafer, and because sensor can realize multiple spot
Detecting and other detecting modes, the installation position of sensor is equipped with multiple choices.
It should be understood that in implementation method as shown in Figure 2, sensor 20 judges brilliant by detecting the signal that wafer reflects
Whether circle 20 goes out to have fragmentation, and the signal that passback sensor is reflected at fragmentation can not then be received if any fragmentation phenomenon；As shown in Figure 3
In another implementation method, 20 points of the sensor is transmitter and receiver, and when wafer 30 is placed, receiver is due to wafer
Obstruct do not receive the signal for sending of transmitter, after wafer is rotated one week, if fragmentation occurs in wafer, by receiving
Device can be detected in time；In a further embodiment as shown in Figure 4, the sensor 20 is equally divided into transmitter and receiver,
, so as to adapt to the size of detected wafer, can be used to examine by adjusting the angle and distance between transmitter and receiver
The type of different size wafer is surveyed, such as 8 cun of wafer or 12 cun of wafer etc. may detect that.
Preferably, the fragmentation arrangement for detecting also includes alarm, and the alarm connects the sensor and the suction
Adsorption device, when wafer fragmentation is detected, i.e., when sensor detects wafer fragmentation or when adsorbent equipment adsorbs abnormal, leads to
Crossing alarm can send alarm so that engineer's very first time is processed.Preferably, the alarm include audio communication alarm and/
Or display alarm, the message that detects fragmentation is sent by different modes and is given notice.Preferably, the audio communication report
Alert device is buzzer or loudspeaker.Preferably, the display alarm is warning light or display screen.
In the fragmentation arrangement for detecting that the utility model is provided, wafer can be adsorbed by adsorbent equipment, when wafer goes out
During existing fragmentation situation, cause to occur the problem do not adsorbed due to placing unstable (such as deflection etc.) or rupture, it may appear that true
Sky detection is not up to standard, so that fragmentation wafer is detected；Further, make what the adsorbent equipment was adsorbed by tumbler
When wafer is relative to sensor rotation, sensor is completed to the wafer detecting of a week, can be then detected if any fragmentation phenomenon.Cause
This, the detection of fragmentation is realized by the utility model, prevents fragmentation phenomena impair production efficiency.
Foregoing description is only the description to the utility model preferred embodiment, not to any limit of the utility model scope
Calmly, the those of ordinary skill in the utility model field does according to the disclosure above content any change, modification, belonging to right will
Seek the protection domain of book.
Claims (13)
1. a kind of fragmentation arrangement for detecting, it is characterised in that the fragmentation arrangement for detecting includes：
Adsorbent equipment, tumbler and sensor；Wherein, the adsorbent equipment absorption wafer；The tumbler drives described
Adsorbent equipment and/or the sensor are moved so that produced relative rotation between the adsorbent equipment and the sensor；It is described
Sensor detects whether the wafer of the adsorbent equipment absorption has breakage.
2. fragmentation arrangement for detecting according to claim 1, it is characterised in that the adsorbent equipment includes suction nozzle and connection institute
State the tracheae of suction nozzle.
3. fragmentation arrangement for detecting according to claim 1, it is characterised in that the tumbler includes Rotational Cylindrical and horse
Reach, the adsorbent equipment is arranged in the Rotational Cylindrical, the Rotational Cylindrical is driven and rotated by motor.
4. fragmentation arrangement for detecting according to claim 1, it is characterised in that the tumbler includes sensor holder, passes
Sensor track and motor, the sensor are arranged on the sensor holder, and the sensor track surround the adsorbent equipment,
The motor drives the sensor holder to be rotated on the sensor track.
5. fragmentation arrangement for detecting according to claim 1, it is characterised in that the fragmentation arrangement for detecting also includes that support is filled
Put, the support meanss are telescopic support meanss, the adsorbent equipment is arranged in the support meanss.
6. fragmentation arrangement for detecting according to claim 5, it is characterised in that the support meanss include supporting plate, support
Panel guide and cylinder, the cylinder promote the supporting plate to be moved on the support panel guide.
7. fragmentation arrangement for detecting according to claim 5, it is characterised in that the support meanss are also felt including some positions
Answer device.
8. fragmentation arrangement for detecting according to claim 1, it is characterised in that the fragmentation arrangement for detecting also includes some crystalline substances
Circle support member, the wafer holder is around the adsorbent equipment.
9. fragmentation arrangement for detecting according to claim 1, it is characterised in that the sensor is laser sensor or infrared
Line sensor.
10. the fragmentation arrangement for detecting according to any one in claim 1-9, it is characterised in that the fragmentation detecting dress
Putting also includes alarm, and the alarm connects the sensor and the adsorbent equipment.
11. fragmentation arrangement for detecting according to claim 10, it is characterised in that the alarm includes audio communication alarm
And/or display alarm.
12. fragmentation arrangement for detecting according to claim 11, it is characterised in that the audio communication alarm is buzzer or loudspeaker
.
13. fragmentation arrangement for detecting according to claim 11, it is characterised in that the display alarm is warning light or aobvious
Display screen.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621430973.XU CN206271677U (en) | 2016-12-23 | 2016-12-23 | Fragmentation arrangement for detecting |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621430973.XU CN206271677U (en) | 2016-12-23 | 2016-12-23 | Fragmentation arrangement for detecting |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206271677U true CN206271677U (en) | 2017-06-20 |
Family
ID=59047662
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621430973.XU Active CN206271677U (en) | 2016-12-23 | 2016-12-23 | Fragmentation arrangement for detecting |
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| Country | Link |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108511312A (en) * | 2018-03-29 | 2018-09-07 | 长江存储科技有限责任公司 | Wafer bonding plasma processing apparatus |
| CN108520861A (en) * | 2018-06-04 | 2018-09-11 | 上海卓晶半导体科技有限公司 | A kind of wafer and sapphire substrate trimming detection device |
| CN110767563A (en) * | 2019-10-25 | 2020-02-07 | 上海华力集成电路制造有限公司 | Method for detecting wafer integrity and RTP machine |
-
2016
- 2016-12-23 CN CN201621430973.XU patent/CN206271677U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108511312A (en) * | 2018-03-29 | 2018-09-07 | 长江存储科技有限责任公司 | Wafer bonding plasma processing apparatus |
| CN108520861A (en) * | 2018-06-04 | 2018-09-11 | 上海卓晶半导体科技有限公司 | A kind of wafer and sapphire substrate trimming detection device |
| CN110767563A (en) * | 2019-10-25 | 2020-02-07 | 上海华力集成电路制造有限公司 | Method for detecting wafer integrity and RTP machine |
| CN110767563B (en) * | 2019-10-25 | 2022-05-27 | 上海华力集成电路制造有限公司 | Method for detecting wafer integrity and RTP machine |
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