CN208902622U - A kind of detection device for foreign matter of display panel - Google Patents
A kind of detection device for foreign matter of display panel Download PDFInfo
- Publication number
- CN208902622U CN208902622U CN201821297669.1U CN201821297669U CN208902622U CN 208902622 U CN208902622 U CN 208902622U CN 201821297669 U CN201821297669 U CN 201821297669U CN 208902622 U CN208902622 U CN 208902622U
- Authority
- CN
- China
- Prior art keywords
- foreign matter
- motor
- display panel
- image acquisition
- acquisition device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
The utility model embodiment discloses a kind of detection device for foreign matter of display panel.The device includes: the first image that the first image acquisition device is used to acquire the surface to be measured of display panel to be measured；Processor is used to determine foreign matter in the X-coordinate range and Y-coordinate range of XOY plane according to the first image；Positioner is used to control the second image acquisition device or display panel to be measured and moves along the direction for being parallel to XOY plane, keep the second image acquisition device corresponding with foreign matter in the coordinate position of XOY plane, and the second image acquisition device of control or XOY plane are moved along Z-direction, to acquire thin-film encapsulation layer in multiple second images of the multiple positions of Z-direction；Processor is connect with the second image acquisition device, for determining the Z coordinate range of foreign matter according to multiple second images, finally obtains position and size of the foreign matter in the thin-film encapsulation layer.The embodiment of the utility model realizes the detection of the position to foreign matter in thin-film encapsulation layer.
Description
Technical field
The utility model embodiment is related to the foreign bodies detection dress of display panel detection technique more particularly to a kind of display panel
It sets.
Background technique
Encapsulation is in the production of Organic Light Emitting Diode (Organic Light-Emitting Diode, OLED) display panel
An essential process, the purpose of encapsulation are to avoid steam and oxygen from intruding into inside OLED display panel, and cause interior
Portion's component failure.The encapsulation technology of OLED display panel is updated with the rise iteration in the market OLED, the metal cover since most
Plate encapsulation has gradually excessively arrived glass cover-plate encapsulation, further develops to thin-film package.
Foreign matter is to one of the problem of display panel aging effects maximum in thin film encapsulation technology, as shown in Figure 1, to OLED
When 101 surface of device layer carries out thin-film package, if device surface falls a foreign matter 102, ideal thin-film package knot at this time
Fruit be inorganic layer 103 perfectly cover on foreign matter surface；But refer to Fig. 2, actually inorganic layer 103 when covering foreign matter,
Edge easily forms defect 104, and water oxygen can penetrate into OLED device layer 101 from defect 104 at this time, causes component failure.And
Afterwards when 103 surface of inorganic layer prepares organic layer, it is necessary to which perfection covering foreign matter, the inorganic layer thin-film package prepared again are just intentional
Justice.Position of the foreign matter 102 in thin-film encapsulation layer has an important influence the packaging effect of display panel, detects foreign matter thin
Position in film encapsulated layer is of great significance for the failure research of subsequent display panel.
Utility model content
The utility model provides a kind of detection device for foreign matter of display panel, to realize to foreign matter in thin-film encapsulation layer
The detection of position.
The utility model embodiment provides a kind of detection device for foreign matter of display panel, which includes:
First image acquisition device, the second image acquisition device, positioner and processor；
Plane where defining the surface to be measured of display panel to be measured or its parallel surface are XOY plane, flat perpendicular to the XOY
The direction in face is Z-direction；
The first image collector is used to acquire first image on the surface to be measured of display panel to be measured；
The processor is connect with the first image collector, for determining foreign matter in XOY according to the first image
The X-coordinate range and Y-coordinate range of plane；
The positioner is parallel to institute for controlling second image acquisition device or the display panel edge to be measured
The direction for stating XOY plane is mobile, keeps second image acquisition device corresponding with the foreign matter in the coordinate position of XOY plane,
And control second image acquisition device or the display panel is moved along the Z-direction, to acquire display panel to be measured
Multiple second images of thin-film encapsulation layer in the multiple positions of Z-direction；
The processor is connect with second image acquisition device, described different for being determined according to multiple described second images
The Z coordinate range of object finally obtains position and size of the foreign matter in the thin-film encapsulation layer.
Optionally, second image acquisition device includes that conjugation focusing microscope and first camera, the first camera are used for
The thin-film encapsulation layer that detects of conjugation focusing microscope is shot in the picture of the multiple positions of Z-direction.
Optionally, second image acquisition device further includes first memory, and the first memory is respectively with described
One camera is connected with the processor, for storing multiple described second images of the first camera shooting.
Optionally, the device further include:
Foreign matter position memory, the foreign matter position memory are connected to the processor, and are existed for storing the foreign matter
The position of the thin-film encapsulation layer and size.
Optionally, the first image collector includes second camera and second memory, the second memory difference
It is connect with the second camera and the processor, for storing the first image of the second camera shooting.
Optionally, the second camera is that time delays integrate (Time Delay Integration, TDI) scanning phase
Machine.
Optionally, the positioner is also used to control the second camera and moves along the Z-direction.
Optionally, the positioner includes master controller, first motor, the second motor, third motor and the 4th electricity
Machine；The master controller connects with the first motor, second motor, the third motor and the 4th motor respectively
It connects, for controlling the operation of the first motor, second motor, the third motor and the 4th motor；
The first motor and second motor are respectively used to control the display panel to be measured along the x axis and Y-axis
Direction movement；Wherein, the X-direction and the Y direction are mutually perpendicular to, and each parallel to the XOY plane；
The third motor is moved for controlling second image acquisition device along the Z-direction；
4th motor is moved for controlling the second camera along the Z-direction.
Optionally, the first motor, second motor, the third motor and the 4th motor are servo motor
Or stepper motor.
Optionally, the master controller includes programmable logic controller (PLC) (Programmable Logic
Controller, PLC).
The detection device for foreign matter of the utility model embodiment includes the first image acquisition device, the second image acquisition device, position
Controller and processor acquire first image on surface to be measured by the first image acquisition device, to determine foreign matter in XOY plane
X-coordinate range and Y-coordinate range, and by positioner control the second image acquisition device XOY plane coordinate position with
The foreign matter is corresponding, multiple second images of different level inside thin-film encapsulation layer is obtained, to determine the Z coordinate model of foreign matter
It encloses, realizes the position to foreign matter in thin-film encapsulation layer and the detection of size, display panel failure research is provided to be subsequent
Foundation.
Detailed description of the invention
Fig. 1 is one of display panel thin-film package process foreign matter schematic diagram；
Fig. 2 is another foreign matter schematic diagram during display panel thin-film package；
Fig. 3 is the schematic diagram of the detection device for foreign matter of one of the utility model embodiment display panel；
Fig. 4 is a kind of schematic diagram of display panel provided by the embodiment of the utility model；
Fig. 5 is a kind of schematic diagram along Z-direction acquisition position provided by the embodiment of the utility model；
Fig. 6 is the schematic diagram of the detection device for foreign matter of another display panel provided by the embodiment of the utility model；
Fig. 7 is the schematic diagram of the detection device for foreign matter of another display panel provided by the embodiment of the utility model；
Fig. 8 is the schematic diagram of the detection device for foreign matter of another display panel provided by the embodiment of the utility model；
Fig. 9 is a kind of structure chart of the detection device for foreign matter of display panel provided by the embodiment of the utility model；
Figure 10 is the structure chart of the detection device for foreign matter of another display panel provided by the embodiment of the utility model.
Specific embodiment
The utility model is described in further detail with reference to the accompanying drawings and examples.It is understood that herein
Described specific embodiment is used only for explaining the utility model, rather than the restriction to the utility model.It further needs exist for
It is bright, part relevant to the utility model is illustrated only for ease of description, in attached drawing rather than entire infrastructure.
Present embodiments provide a kind of detection device for foreign matter of display panel.Fig. 3 is one in the utility model embodiment
The schematic diagram of the detection device for foreign matter of kind display panel, Fig. 4 is a kind of showing for display panel provided by the embodiment of the utility model
It is intended to, with reference to Fig. 3 and Fig. 4, the detection device for foreign matter of the display panel includes:
First image acquisition device 10, the second image acquisition device 20, positioner 30 and processor 40；
The 100 place plane of surface to be measured and its parallel surface for defining display panel to be measured are XOY plane, flat perpendicular to XOY
The direction in face is Z-direction；
First image acquisition device 10 is used to acquire first image on the surface to be measured 100 of display panel to be measured；
Processor 40 is connect with the first image acquisition device 10, for determining foreign matter in the X of XOY plane according to the first image
Coordinate range and Y-coordinate range；
Positioner 30 is parallel to XOY plane for controlling the second image acquisition device 20 or display panel to be measured edge
Direction is mobile, keeps the second image acquisition device 20 corresponding with foreign matter in the coordinate position of XOY plane, and controls the second Image Acquisition
Device 20 or XOY plane are moved along the Z-direction, to acquire the thin-film encapsulation layer of display panel to be measured in the multiple positions of Z-direction
The second image of multiple set；
Processor 40 is connect with the second image acquisition device 20, for determining the Z coordinate model of foreign matter according to multiple second images
It encloses, finally obtains position and size of the foreign matter in the thin-film encapsulation layer.
Specifically, surface to be measured, that is, display panel to be measured thin-film encapsulation layer is close to the face of display panel light emission side to be measured.
First image can be gray scale image, and processor 40 determines the X in XOY plane of foreign matter by being handled the first image
Coordinate range and Y-coordinate range.Positioner 30 can be by the second image acquisition device 20 of control along being parallel to XOY plane
Direction action can also be moved along the direction for being parallel to XOY plane by controlling display panel to be measured, make the second image acquisition device
20 are located at position corresponding with foreign matter, and illustratively, the second image acquisition device 20 can be located at foreign matter at the center of XOY plane
Position can also be located at other positions.Positioner 30 passes through the second image acquisition device 20 of control or display surface to be measured
Plate is moved along Z-direction, changes the focal position of the second image acquisition device 20, thus to the different level inside thin-film encapsulation layer
It takes pictures, specifically, between positioner 30 can control the second image acquisition device 20 or display panel to be measured to set
Away from movement, every multiple second images of movement one acquisition, processor 40 is different to determine by being handled multiple second images
Z coordinate range of the object in thin-film encapsulation layer, according to X coordinate range, Y-coordinate range and the available foreign matter of Z coordinate range
Size and location.
Fig. 5 is a kind of schematic diagram along Z-direction acquisition position provided by the embodiment of the utility model, illustratively, ginseng
Fig. 5 is examined, thin-film encapsulation layer includes the inorganic layer 103 and organic layer 105 being stacked, and OLED device layer 101 and nothing can be set
Described in the contact surface of machine layer 103 position, i.e., first position 1 be Z-direction co-ordinate zero point, the second image can be set and adopt
The initial position of the focal plane of storage is located at first position 1, controls the second image acquisition device by positioner and equidistantly shoots
Or the constant duration shooting in uniform motion, illustrative second image acquisition device can once rise 0.1 micron, rise one
Secondary focal plane reaches the second position 2, rises and reaches the third place 3 twice, and so on, the second image acquisition device successively acquires first
Position 1, the second position 2, the third place 3, the 4th position 4, the 5th position 5, the 6th position 6, the 7th position 7 and 8 positions
Thin-film package tomographic image at 8, available one or more image, the present embodiment do not do specific limit at each position
It is fixed.If inorganic layer 103 with a thickness of 0.3 micron, organic layer 105 with a thickness of 0.5 micron, then as shown in figure 4, along Z-direction from
After the continuous rising in first position 1 has shot the thin-film package tomographic image of 8 positions, foreign matter 102 can be calculated and closing on OLED
Between the inorganic layer 103 and organic layer 105 of device layer 101, about 0.3-0.4 microns of height.
It should be noted that can be using this when processor handles the first image and the second image in the present embodiment
The arbitrary image processing technique that field technical staff can obtain, since present invention point is not here, the present embodiment pair
This is simultaneously not specifically limited.
The detection device for foreign matter of the present embodiment include the first image acquisition device, the second image acquisition device, positioner and
Processor acquires first image on display panel to be measured surface to be measured by the first image acquisition device, to determine that foreign matter is flat in XOY
The X-coordinate range and Y-coordinate range in face, and by positioner control the second image acquisition device be moved to it is corresponding with foreign matter
Position obtains multiple second images of different level inside thin-film encapsulation layer, to determine that Z of the foreign matter inside thin-film encapsulation layer is sat
Range is marked, the position to foreign matter in thin-film encapsulation layer and the detection of size are realized, is failed to be subsequent to display panel to be measured
Research provides foundation.
Fig. 6 is the schematic diagram of the detection device for foreign matter of another display panel to be measured provided by the embodiment of the utility model,
Optionally, with reference to Fig. 6, the second image acquisition device 20 includes that conjugation focusing microscope 21 and first camera 22, first camera 22 are used for
Picture of the thin-film encapsulation layer that shooting conjugation focusing microscope 21 detects in the multiple position different levels of Z-direction.
Specifically, conjugation focusing microscope 21 for detecting to the foreign matter inside thin-film encapsulation layer, is conjugated by adjusting
The position of focusing microscope 21 in the Z-axis direction, thus it is possible to vary focusing surface of the conjugation focusing microscope 21 inside thin-film encapsulation layer, from
And realize the detection to thin-film encapsulation layer inside different level.First camera 22 can be ultra high-definition camera, be taken with improving
The second image clarity, improve the detection accuracy of the second position.
Fig. 7 is the schematic diagram of the detection device for foreign matter of another display panel provided by the embodiment of the utility model, optional
, with reference to Fig. 7, the second image acquisition device 20 further includes first memory 23, first memory 23 respectively with first camera 22 and
Processor 40 connects, for storing multiple second images of the shooting of first camera 22.
Specifically, the second image of the shooting of first camera 22 is more and shooting speed is very fast, first memory 23 can be first
The second image is stored, then processor 40 obtains the second image from first memory 23, in this way can be straight to avoid processor 40
It connects when obtaining image from first camera 22, causes loss of data in image transmitting process.
Optionally, with reference to Fig. 7, the detection device for foreign matter further include: foreign matter position memory 50, foreign matter position memory 50
It is connect with processor 40, for storing position and size of the foreign matter in the thin-film encapsulation layer.
Specifically, foreign matter position memory 50 stores foreign matter position and size, convenient for technologist to positioned at not
Foreign matter with film layer is classified, and anticipation control processing is carried out；After water oxygen invasion causes OLED device to fail, by tracing number
According to the position and size that can inquire failpoint foreign matter, convenient for the subsequent improvement etc. to technique.
Fig. 8 is the schematic diagram of the detection device for foreign matter of another display panel provided by the embodiment of the utility model, optional
, with reference to Fig. 8, the first image acquisition device 10 includes second camera 11 and second memory 12, and second memory 12 is respectively with the
Two cameras 11 and processor 40 connect, for storing the first image of the shooting of second camera 11.
Specifically, second memory 12 can first store the first image, then processor 40 is obtained from second memory 12
The first image is taken, when directly can obtain image from second camera 11 to avoid processor 40 in this way, is caused in image transmitting process
Loss of data.
Optionally, second camera 11 is TDI scanning camera.
Specifically, positioner 30 can control display panel to be measured along the X-direction and/or Y parallel with XOY plane
Axis direction movement, allows TDI scanning camera to be scanned shooting automatically to display panel XOY plane to be measured, and it is flat to obtain XOY
First image in face, wherein X-direction and Y direction are mutually perpendicular to.
Optionally, positioner 30 is also used to control second camera 11 and moves along Z-direction.
In this way, second camera 11 and display panel to be measured can be automatically adjusted along the relative position of Z-direction, make
The image that second camera 11 is shot is more clear, so that the accuracy of X-coordinate range and Y-coordinate range is higher.
Fig. 9 is a kind of structure chart of the detection device for foreign matter of display panel provided by the embodiment of the utility model, optionally,
With reference to Fig. 9, positioner includes master controller 31, first motor 32, the second motor 33, third motor 34 and the 4th motor
35；Master controller 31 is connect with first motor 32, the second motor 33, third motor 34 and the 4th motor 35 respectively, for controlling
The operating status of first motor 32, the second motor 33, third motor 34 and the 4th motor 35；
First motor 32 and the second motor 33 are respectively used to control display panel 60 to be measured and transport along the x axis with Y axis direction
It is dynamic；
Third motor 34 is moved for controlling the second image acquisition device 20 along Z-direction；
4th motor 35 is moved for controlling second camera 11 along Z-direction.
Specifically, display panel 60 to be measured can be placed in detection platform 61, pass through first motor 32 and the second electricity
Machine 33 drives detection platform 61 to move, mobile with Y axis direction along the x axis to control display panel 60 to be measured, can also will be to
It surveys display panel 60 to be set on the fixture of setting, setting clamp movement is driven by first motor 32 and the second motor 33
It is mobile to control display panel 60 to be measured.Second camera 11, first camera 22 and conjugation focusing microscope 21 can be set to
On fixed fixture etc., clamp movement is driven by third motor 34 and the 4th motor 35, to control second camera 11 and the second figure
As collector 20 is moved along Z-direction.
Display panel to be measured and second camera and the second image are adopted it should be noted that the present embodiment is merely exemplary
The fixed form of storage is illustrated, and not to the restriction of the application, can use any ability in other embodiments
The available fixed form of field technique personnel is fixed.
Optionally, first motor 32, the second motor 33, third motor 34 and the 4th motor 35 are servo motor or stepping electricity
Machine, master controller 31 are programmable logic controller (PLC) PLC.
Figure 10 is the structure chart of the detection device for foreign matter of another display panel provided by the embodiment of the utility model, optional
, with reference to Figure 10, which further includes industrial computer 70, and processor and foreign matter position memory can be industry
Processor and memory inside skill computer 70.Industrial computer 70 and the first image acquisition device 10 and the second image acquisition device
20 connections, and connect with PLC36.Industrial computer 70 sends control instruction to PLC36, and PLC36 controls the 4th motor 35 and drives
TDI scanning camera is moved along Z-direction Z, adjusts the relative position of TDI scanning camera and display panel 60, and PLC36 passes through control
First motor 32 and the second motor 33 drive detection platform 61 to move, so that display panel 60 be made to move along the x axis with Y direction
It is dynamic, scanning of the TDI scanning camera to XOY plane is realized, to obtain the first image.Industrial computer 70 carries out the first image
Processing determines the X-coordinate range and Y-coordinate range of foreign matter, and sends control instruction, PLC control to PLC36 according to first position
First motor 32 and the second motor 33 drive detection platform 61 to move, to make display panel 60 along the x axis and Y direction
It is mobile, keep the second image acquisition device 20 corresponding with foreign matter, then PLC controls third motor 34 and drives the second image acquisition device 20
It is moved along Z-direction, to obtain multiple second images, industrial computer 70 handle to the second image the Z of determining foreign matter
Coordinate range, and X-coordinate range, Y-coordinate range and Z coordinate range are stored.
It should be noted that each motor is additionally provided with corresponding servo controller, and PLC is logical when each motor is servo motor
It crosses to servo controller and the corresponding motor movement of control instruction control occurs.
Note that above are only the preferred embodiment and institute's application technology principle of the utility model.Those skilled in the art's meeting
Understand, the utility model is not limited to specific embodiment described here, is able to carry out for a person skilled in the art various bright
Aobvious variation, readjustment, substitution and combination is without departing from the protection scope of the utility model.Therefore, although more than passing through
Embodiment is described in further detail the utility model, but the utility model is not limited only to above embodiments,
It can also include more other equivalent embodiments in the case where not departing from the utility model design, and the scope of the utility model
It is determined by the scope of the appended claims.
Claims (10)
1. a kind of detection device for foreign matter of display panel characterized by comprising
First image acquisition device, the second image acquisition device, positioner and processor；
Plane where defining the surface to be measured of display panel to be measured or its parallel surface are XOY plane, perpendicular to the XOY plane
Direction is Z-direction；
The first image collector is used to acquire first image on the surface to be measured of display panel to be measured；
The processor is connect with the first image collector, for determining foreign matter in XOY plane according to the first image
X-coordinate range and Y-coordinate range；
The positioner is parallel to the XOY for controlling second image acquisition device or the display panel edge to be measured
The direction of plane is mobile, it is corresponding with the foreign matter in the coordinate position of XOY plane to make second image acquisition device, and control
Second image acquisition device or the display panel are moved along the Z-direction, to acquire the film envelope of display panel to be measured
Layer is filled in multiple second images of the multiple positions of Z-direction；
The processor is connect with second image acquisition device, for determining the foreign matter according to multiple described second images
Z coordinate range finally obtains position and size of the foreign matter in the thin-film encapsulation layer.
2. detection device for foreign matter according to claim 1, it is characterised in that:
Second image acquisition device includes conjugation focusing microscope and first camera, and the first camera is for shooting the conjugation
Picture of the thin-film encapsulation layer that focusing microscope detects in the multiple positions of Z-direction.
3. detection device for foreign matter according to claim 2, it is characterised in that:
Second image acquisition device further includes first memory, the first memory respectively with the first camera and described
Processor connection, for storing multiple described second images of the first camera shooting.
4. detection device for foreign matter according to claim 1, which is characterized in that further include:
Foreign matter position memory, the foreign matter position memory are connected to the processor, for storing the foreign matter described
The position of thin-film encapsulation layer and size.
5. detection device for foreign matter according to claim 1, it is characterised in that:
The first image collector includes second camera and second memory, the second memory respectively with second phase
Machine is connected with the processor, for storing the first image of the second camera shooting.
6. detection device for foreign matter according to claim 5, it is characterised in that:
The second camera is that time delays integrate TDI scanning camera.
7. detection device for foreign matter according to claim 5, it is characterised in that:
The positioner is also used to control the second camera and moves along the Z-direction.
8. detection device for foreign matter according to claim 7, it is characterised in that:
The positioner includes master controller, first motor, the second motor, third motor and the 4th motor；The master control
Device processed is connect with the first motor, second motor, the third motor and the 4th motor respectively, for controlling
State the operation of first motor, second motor, the third motor and the 4th motor；
The first motor and second motor are respectively used to control the display panel to be measured along the x axis and Y direction
Movement；Wherein, the X-direction and the Y direction are mutually perpendicular to, and each parallel to the XOY plane；
The third motor is moved for controlling second image acquisition device along the Z-direction；
4th motor is moved for controlling the second camera along the Z-direction.
9. detection device for foreign matter according to claim 8, it is characterised in that:
The first motor, second motor, the third motor and the 4th motor are servo motor or stepper motor.
10. detection device for foreign matter according to claim 8, it is characterised in that:
The master controller includes programmable logic controller (PLC) PLC.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821297669.1U CN208902622U (en) | 2018-08-13 | 2018-08-13 | A kind of detection device for foreign matter of display panel |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821297669.1U CN208902622U (en) | 2018-08-13 | 2018-08-13 | A kind of detection device for foreign matter of display panel |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208902622U true CN208902622U (en) | 2019-05-24 |
Family
ID=66569080
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821297669.1U Active CN208902622U (en) | 2018-08-13 | 2018-08-13 | A kind of detection device for foreign matter of display panel |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208902622U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111522074A (en) * | 2020-05-29 | 2020-08-11 | 深圳市燕麦科技股份有限公司 | Microphone detection device and microphone detection method |
| CN113814292A (en) * | 2021-08-10 | 2021-12-21 | 天津恒兴机械设备有限公司 | Stamping cracking defect detection device for automobile stamping parts |
-
2018
- 2018-08-13 CN CN201821297669.1U patent/CN208902622U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111522074A (en) * | 2020-05-29 | 2020-08-11 | 深圳市燕麦科技股份有限公司 | Microphone detection device and microphone detection method |
| CN113814292A (en) * | 2021-08-10 | 2021-12-21 | 天津恒兴机械设备有限公司 | Stamping cracking defect detection device for automobile stamping parts |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP6963313B2 (en) | Shaft parts processing equipment | |
| KR101613135B1 (en) | Device and method for detecting position of semiconductor substrate | |
| US7652276B2 (en) | Defect inspection method, defect inspection apparatus having a mounting table with a substrate thereon and an image pickup device are relatively moved for capturing the image of the substrate, and computer readable storage medium storing a program for performing the method | |
| CN206696201U (en) | A kind of multiple dimensioned Automatic Visual Inspection device towards flexible PCB | |
| CN208902622U (en) | A kind of detection device for foreign matter of display panel | |
| CN110006905A (en) | A kind of ultra-clean smooth surface defect detecting device of heavy caliber that line area array cameras combines | |
| WO2017157045A1 (en) | Visual imaging measurement system having adjustable fill light and being capable of automatic loading and unloading | |
| CN202255299U (en) | Solder paste thickness testing device | |
| CN202256191U (en) | Coated glass inside defect tomography display device | |
| KR20220042210A (en) | Systems, methods and apparatus for macroscopic examination of reflective specimens | |
| CN103954625A (en) | Traceable damage threshold measurement technology facing laser film internal defects | |
| CN113418933B (en) | Flying shooting visual imaging detection system and method for detecting large-size object | |
| US20190033461A1 (en) | Live metrology of an object during manufacturing or other operations | |
| CN108010875A (en) | Substrate alignment apparatus and detecting system | |
| CN105987917A (en) | Sapphire crystal growing defect and surface defect optical detecting method and detecting system thereof | |
| CN103994728A (en) | Object detector and robot system | |
| CN113371660A (en) | Bung hole identification and positioning device, filling machine and bung hole identification and positioning method | |
| WO2023131177A1 (en) | Image acquisition system and method, and display panel processing device | |
| EP3662272B1 (en) | Inspection system and method for turbine vanes and blades | |
| KR20170036893A (en) | apparatus for checking parts | |
| CN104515477B (en) | The manufacturing method of three directional measuring device, three-dimensional measurement method and substrate | |
| US6760115B2 (en) | Carrier shape measurement device | |
| CN105588839A (en) | Surface inspection apparatus and method | |
| KR20140141153A (en) | Apparatus and method for inspecting a panel | |
| CN207610995U (en) | A kind of test platform for computer dislocation scanning and imaging system |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |