CN105789103B - Rotating table system and semiconductor processing equipment - Google Patents
Rotating table system and semiconductor processing equipment Download PDFInfo
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- CN105789103B CN105789103B CN201410788977.4A CN201410788977A CN105789103B CN 105789103 B CN105789103 B CN 105789103B CN 201410788977 A CN201410788977 A CN 201410788977A CN 105789103 B CN105789103 B CN 105789103B
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Abstract
The present invention provides a kind of rotating table system and semiconductor processing equipment.The rotating table system includes turntable, rotating driver, positioning ring and origin detector, multiple carrying positions for carrying substrates are provided at circumferentially spaced along it on turntable, turntable is connected with the shaft of rotating driver, to drive turntable to rotate, the diameter of positioning ring is less than the diameter of turntable, the fixed side-wall outer side being nested in shaft of positioning ring；Original point position portion is provided on positioning ring, the check bit of origin detector is setting on the positioning ring circumference where original point position portion, origin detector is used for whether real-time detection original point position portion during positioning ring rotation to rotate to detection position, if, then determine that current dial position is the origin position of turntable, to realize to turntable original point position.Rotating table system provided by the invention guarantees the accurate safe and efficient and stable operation of performance of rotating table system.
Description
Technical field
The invention belongs to microelectronic processing technique fields, and in particular to a kind of rotating table system and semiconductor processing equipment.
Background technique
Semiconductor processing equipment is widely used in semiconductor devices manufacture.Fig. 1 is typical semiconductor processing equipment
Structural schematic diagram.Referring to Fig. 1, the semiconductor processing equipment generally includes transmission chamber 10 and circumferentially sets along transmission chamber 10
Set by the coupled logical loading and unloading chamber 12 of gate valve 11, remove gas chamber 13, pre-cleaning cavity 14 and processing chamber 15.Its
In, rotary machine hand 101 is provided in transmission chamber 10, the rotary machine hand 101 between each chamber for passing substrate
It is defeated；Loading and unloading chamber 12 in it for placing non-technique and the substrate that technique is completed；Remove gas chamber 13 and pre-cleaning cavity
14 are respectively used to carry out degassing step and prerinse step to substrate；Processing chamber 15 be used for be completed degassing step and/or
The substrate of prerinse step carries out the techniques such as sputtering sedimentation or etching.
As shown in Figure 1, being provided with turntable rotating mechanism in processing chamber 15, which includes 151 He of turntable
Rotating driver (not shown) is provided with multiple carrying positions 1~8 for carrying substrates along its circumferential direction on turntable 151；Rotation
Turn driver for driving turntable 151 to rotate, so that each carrying position is rotated to default loading position, which is set
It sets at 11 position of gate valve between processing chamber 15 and transmission chamber 10, carries 1 present position of position as shown in figure 1.
To realize that each carrying position is accurately rotated to default loading and unloading position (that is, turntable is rotated to designated position), realization pair is needed
Turntable is accurately positioned, specifically, preferred to carry out original point position to turntable, then rotates turntable to designated position.For this purpose, existing skill
There is a kind of rotating table system, as shown in Fig. 2, the rotating table system includes transparency window 157,158 and of laser diffusion sensor in art
Protrusion 159, transparency window 157 are arranged on the side wall of processing chamber 15 and at positions corresponding with the side wall of turntable 151, laser
The outside of transparency window 157 is arranged in diffusing reflection sensor 158, and protrusion 159 is arranged at some position on 151 side wall of turntable,
159 position of protrusion is set as turntable origin position, and laser diffusion sensor 158 is for detecting whether protrusion 159 rotates
To the corresponding detection position on 151 side wall of turntable of laser diffusion sensor 158, check bit is set to laser diffusion sensor
Detection track be located at the position on turntable side wall, if so, 151 original point position of turntable can be realized, at this point, where turntable 151
Position or 152 place state of rotating driver are the origin position of turntable 151, and laser diffusion sensor 151 is referred to as original
Point sensor.After original point position, turntable is rotated to designated position again, and the present bit by obtaining rotating driver 152
It sets and judges whether turntable rotates to designated position, if so, turntable accurate positioning is determined, if it is not, then determining turntable positioning failure.
However, can find following problems using existing rotating table system in practical applications: after used a period of time
The problem of being easy to happen position inaccurate, thus it cannot be guaranteed that the accurate safe and efficient and stable operation of performance of rotating table system.
Summary of the invention
The present invention is directed at least solve one of the technical problems existing in the prior art, a kind of rotating table system and half are proposed
Conductor process equipment can guarantee the accurate safe and efficient and stable operation of performance of rotating table system.
One of in order to solve the above problem, the present invention provides a kind of rotating table systems, including turntable, rotating driver, positioning
Ring and origin detector are provided at circumferentially spaced multiple carrying positions for carrying substrates, the turntable along it on the turntable
It is connected with the shaft of the rotating driver, to drive the turntable to rotate, the diameter of the positioning ring is less than the turntable
Diameter, the fixed side-wall outer side being nested in the shaft of the positioning ring；And it is fixed that origin is provided on the positioning ring
Position portion, the check bit of the origin detector setting on the positioning ring circumference where the original point position portion, examine by the origin
It surveys device and is used for whether the original point position portion described in real-time detection during positioning ring rotation to rotate to the detection position,
If so, determining that presently described turntable position is the origin position of the turntable, the turntable origin is determined to realize
Position.
Wherein, multiple carrying positions along the circumferentially-spaced of the turntable and are uniformly arranged, and the rotating table system further includes
First arrives bit detector and the first auxiliary positioning portion, the quantity one of the quantity in first auxiliary positioning portion and the carrying position
It causes, multiple first auxiliary positioning portions are along the circumferentially-spaced of the positioning ring and are uniformly arranged；Described first arrives bit detector
Check bit setting on the positioning ring circumference where multiple first auxiliary positioning portions, described first to bit detector sets
Set mode are as follows: any one of first auxiliary positioning portion when its check bit is accurately rotated setting in the turntable to designated position
Position；Described first continues after rotating specified time to bit detector for the turntable after original point position,
Detect whether first auxiliary positioning portion rotates to its detection position, if so, determine the turntable accurate positioning, if it is not,
Then determine the turntable positioning failure；The specified time refers to that the turntable goes to the designated position in original point position back spin
The required time.
Wherein, the multiple carrying position along the circumferentially-spaced of the turntable and is uniformly arranged, and the rotating table system further includes
Second auxiliary positioning portion and second arrives bit detector, the quantity one of the quantity in second auxiliary positioning portion and the carrying position
It causes, multiple second auxiliary positioning portions are along the circumferentially-spaced of the turntable and are uniformly arranged；Described second arrives bit detector
For check bit setting on the disk peripheral where multiple second auxiliary positioning portions, described second arrives the setting side of bit detector
Formula are as follows: its check bit setting in when the turntable is rotated to designated position institute of any one of second auxiliary positioning portion it is in place
Set place；Described second continues after rotating specified time to bit detector for the turntable after original point position, detects institute
State whether the second auxiliary positioning portion rotates to its detection position, if so, the turntable accurate positioning is determined, if it is not, then determining
The turntable positioning failure；The preset time refers to the turntable needed for original point position back spin goes to the designated position
Time.
Wherein, there are differences in height for the original point position portion and the surface of the positioning ring；The origin detector is distance
Sensor.
Wherein, the original point position portion is the notch being arranged on the surface of the positioning ring, and the origin detector is
Emission sensor.
Wherein, there are differences in height for first auxiliary positioning portion and the surface of the positioning ring；Described first detects in place
Device is range sensor.
Wherein, first auxiliary positioning portion is the notch being arranged on the surface of the positioning ring, and described first in place
Detector is emission sensor.
Wherein, there are differences in height for second auxiliary positioning portion and the surface of the turntable；Described second arrives bit detector
For range sensor.
Wherein, the quantity in the original point position portion is one or more, and multiple original point position portions are along the positioning ring
Be provided at circumferentially spaced.
As another technical solution, the present invention also provides a kind of semiconductor processing equipments, including processing chamber, in work
Rotating table system is provided in skill chamber, the rotating table system uses above-mentioned rotating table system provided by the invention.
The invention has the following advantages:
Rotating table system provided by the invention, in the side-wall outer side of the shaft of the rotating driver for driving turntable to rotate
It is provided with positioning ring, the diameter of positioning ring is less than the diameter of turntable, original point position portion, origin detector are provided on positioning ring
Check bit setting on the positioning ring circumference where original point position portion, origin detector is used to examine in real time in positioning ring rotation
Survey whether original point position portion rotates to detection position, if so, determine that current dial position is the origin position of turntable, from
And it realizes to turntable original point position.Rotating table system provided by the invention, the diameter of positioning ring are less than the diameter of turntable, also,
The diameter of positioning ring can be arranged smaller as far as possible, and the protrusion as original point position portion of this and existing rotating table system is directly set
It sets and is compared on the side wall of the very big turntable of diameter, the distance between original point position portion and shaft can be made smaller, thus can
To reduce the amplification of position error, position error is controlled within a certain error range, thereby may be ensured that rotating table system is accurate
The safe and efficient and stable operation of performance.
Semiconductor processing equipment provided by the invention comprising the rotating table system that another technical solution of the present invention provides,
It thereby may be ensured that the stable operation of the safe and efficient and performance of semiconductor processing equipment.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of typical semiconductor processing equipment；
Fig. 2 applies the structural schematic diagram of existing rotating table system in the process chamber；
Fig. 3 is the structural schematic diagram in process cavity indoor application rotating table system provided in an embodiment of the present invention；
Fig. 4 is the top view of positioning ring in Fig. 3；
Fig. 5 is the top view of processing chamber shown in Fig. 3；
Fig. 6 is the structural schematic diagram of the processing chamber of semiconductor processing equipment provided in an embodiment of the present invention；And
Fig. 7 is the top view of processing chamber shown in fig. 6.
Specific embodiment
To make those skilled in the art more fully understand technical solution of the present invention, come with reference to the accompanying drawing to the present invention
The rotating table system and semiconductor processing equipment of offer are described in detail.
Fig. 3 is the structural schematic diagram in process cavity indoor application rotating table system provided in an embodiment of the present invention；Fig. 4 is Fig. 3
The top view of middle positioning ring；Fig. 5 is the top view of processing chamber shown in Fig. 3.Also referring to Fig. 3~Fig. 5, the present embodiment is mentioned
The rotating table system of confession is applied in processing chamber 15 comprising turntable 20, rotating driver 21, positioning ring 22 and origin detector
23.Wherein, multiple carrying positions 1~8 for carrying substrates are provided at circumferentially spaced along it on turntable 20, each carrying position is logical
The structures such as hole.Turntable 20 is connected with the shaft 211 of rotating driver 21, to drive turntable 20 to rotate.22 fixing sleeve of positioning ring
Set the side-wall outer side in shaft 211, with realize positioning ring 22 and turntable 2 with 211 synchronous rotary of shaft, positioning ring 22 it is straight
Diameter is less than the diameter of turntable 20.Be provided with original point position portion 221 on positioning ring 22, the check bit of origin detector 23 setting in
On positioning ring circumference S1 where original point position portion 221, which is original point position portion 221 as shaft 211 is revolved
The rotational trajectory turned, the detection path that check bit is set to origin detector 23 reach the position of positioning ring.Origin detector 23 is used
During positioning ring rotates real-time detection original point position portion 221 whether rotate to detection position 231, if so, determine
20 position of current dial is the origin position of turntable 20, to realize to 20 original point position of turntable.
From the foregoing, it will be observed that rotating table system provided in this embodiment, it is provided with diameter in the side-wall outer side of shaft 211 and is less than and turn
The positioning ring 22 of 20 diameter of disk, the diameter of positioning ring 22 can be arranged as much as possible with respect to the diameter of turntable 20 it is smaller, this with it is existing
The protrusion as original point position portion of some rotating table systems, which is set up directly on the lateral wall of the very big turntable of diameter, to be compared, can be with
So that distance of the original point position portion 221 apart from shaft 211 is smaller, thus it can reduce the amplification of position error, by position error
Control thereby may be ensured that the accurate safe and efficient and stable operation of performance of rotating table system within a certain error range.
Specifically, in the present embodiment, there are differences in height with 22 surface of positioning ring in original point position portion 221, more specifically, former
Point location portion 221 can be notch, protrusion or groove, and origin detector 23 is range sensor.Origin detector 23 detects original
The rotation of point location portion 221 detects the working principle of position to it are as follows: since original point position portion 221 and 22 surface of positioning ring have height
It is poor to spend, so that the detection when original point position portion 221 and 22 surface of positioning ring rotate detect position to it respectively of origin detector 23
To distance be respectively first distance and second distance, first distance is not equal to second distance, and therefore, origin detector 23 is fixed
In the rotary course of position ring 22 real-time detection its with detection the distance between position, and judge whether it is according to this distance first away from
From, if so, the rotation of original point position portion 221 extremely detection position, to realize to turntable original point position.
Preferably, Fig. 3 and Fig. 4 are please referred to, original point position portion 221 is the notch being arranged on the surface of positioning ring 22, former
Spot detector 23 is emission sensor.Emission sensor includes the transmitting terminal being arranged in above and below positioning ring 22
231 and receiving end 232, the edge of positioning ring 22 is arranged in original point position portion 221, and emission sensor has groove structure, fixed
The edge of position ring 22 is located in the groove of groove structure, and transmitting terminal 231 is constantly being directed towards reception during positioning ring 22 rotates
End 232 sends signal, and receiving end 232 is used to receive the signal of the transmission of transmitting terminal 231, if receiving end 232 receives transmitting terminal 231
The signal of transmission, then original point position portion 221 (that is, notch) rotation to detection position, to realize to turntable original point position.
It is appreciated that realize by emission sensor and notch to turntable original point position, this in the prior art by
The protrusion being arranged on laser diffusion sensor and turntable side wall is compared, and not only can solve the detection of laser diffusion sensor
The wider problem for influencing its detection accuracy difference of distance, but also can solve since the surface of detected material (that is, protrusion) is caused
The problem of diffusing reflection sensor makes erroneous judgement, cannot correctly find origin, it is fixed so as to further increase turntable origin
The accuracy of position, and then can be further improved the accuracy of turntable positioning；Furthermore it is possible to reduce the machine in original point position portion 221
The requirement of tool machining accuracy, and the electric adjustment time can be reduced.
In the present embodiment, multiple carrying positions 1~8 along the circumferentially-spaced of turntable 20 and are uniformly arranged, and rotating table system also wraps
First is included to bit detector 24 and the first auxiliary positioning portion 222, the quantity and the number of carrying position 1~8 in the first auxiliary positioning portion 22
Amount is consistent, and multiple first auxiliary positionings portion 222 is along the circumferentially-spaced of positioning ring 22 and is uniformly arranged.First arrives bit detector 24
For check bit setting on the positioning ring circumference S2 where multiple first auxiliary positionings portion 222, which is multiple the
The rotational trajectory that one auxiliary positioning portion 222 is rotated with shaft 211, check bit are set to the first detection path for arriving bit detector 24
Reach the position of positioning ring.First arrives the set-up mode of bit detector 24 are as follows: its check bit accurately rotates extremely setting in turntable 20
Any one 222 position of the first auxiliary positioning portion when designated position.In the present embodiment, designated position includes turntable 20
To the location of when rotating each carrying position to predeterminated position, predeterminated position includes loading position and process station for rotation
Deng in this case, the adjacent rotational positioning of turntable twice needs turntable 20 to rotate one or more stations, so that each turntable
Rotational positioning is to designated position.Therefore, in the present embodiment, the check bit of first to bit detector 24 is accurate setting in turntable 20
Rotation is to any one 222 position of the first auxiliary positioning portion when rotating any one carrying position to predeterminated position.
First continues after rotating specified time to bit detector 24 for the turntable 20 after original point position, specified time
Refer to the time needed for turntable goes to designated position in original point position back spin, the first auxiliary positioning portion 222 of detection whether rotate to
It detects position, if so, the rotation of turntable 20 then determines 20 accurate positioning of turntable to designated position, if it is not, turntable 20 do not rotate to
Designated position then determines the positioning failure of turntable 20.
Therefore, from the foregoing, it will be observed that being to the available turntable 20 of bit detector 24 by the first auxiliary positioning portion 222 and first
It is no to rotate to the feedback signal of designated position, it is whether accurate so as to monitor turntable positioning, and then may further ensure that and turn
The accurate safe and efficient and stable operation of performance of disc system.
Specifically, there are differences in height for the first auxiliary positioning portion 222 and the surface of positioning ring 22, more specifically, the first auxiliary
Positioning region 222 is notch, protrusion or groove, and first to bit detector 24 is range sensor.First detects to bit detector 24
The rotation of first auxiliary positioning portion 222 detects the working principle of position to it are as follows: due to the first auxiliary positioning portion 222 and positioning ring 22
There are differences in height on surface so that first revolves to bit detector 24 in the first auxiliary positioning portion 222 and 22 surface of positioning ring respectively
Going to it and detecting the distance detected when position is respectively third distance and the 4th distance, and third distance is not equal to the 4th distance,
Therefore, first continues after rotating specified time to turntable 20 of the bit detector 24 after original point position, detects itself and check bit
The distance between set, and third distance is judged whether it is according to this distance, if so, the rotation of turntable 20 then determines to designated position
20 accurate positioning of turntable then determines the positioning failure of turntable 20 if it is not, turntable 20 does not rotate to designated position.
In the present embodiment, Fig. 3 and Fig. 4 are please referred to, it is preferable that the first auxiliary positioning portion 222 is on 22 surface of positioning ring
The notch of upper setting, first to bit detector 24 is emission sensor, and emission sensor includes being separately positioned on positioning ring
Transmitting terminal 241 and receiving end 242 above and below in the of 22, the turntable 20 after original point position continue after rotating specified time,
Transmitting terminal 241 sends signal towards receiving end 242, and receiving end 242 is used to receive the signal of the transmission of transmitting terminal 241, if receiving end
242 receive the signal of the transmission of transmitting terminal 241, then the first auxiliary positioning portion 222 (that is, notch) rotation to detection position, thus
Determine turntable accurate positioning；If receiving end 242 does not receive the signal of the transmission of transmitting terminal 241, turntable positioning failure, hair are determined
Alarm signal out, to inform that operator overhauls.
In addition, in the present embodiment, rotating table system further includes that the second auxiliary positioning portion 201 and second arrives bit detector 25,
The quantity in the second auxiliary positioning portion 201 is consistent with the carrying quantity of position 1~8, and multiple second auxiliary positionings portion 201 is along turntable 20
It is circumferentially-spaced and be uniformly arranged；Second arrives the check bit of bit detector 25 setting in 201 place of multiple second auxiliary positionings portion
On disk peripheral, which is the motion profile in multiple second auxiliary positionings portion 201, and check bit is set to second and detects in place
The detection path of device 25 reaches the position of turntable 20.Second arrive bit detector 25 set-up mode are as follows: its check bit setting in
Any one 201 position of the second auxiliary positioning portion when turntable is accurately rotated to designated position.In the present embodiment, it specifies
Position includes the rotation of turntable 20 to the location of when rotating each carrying position to predeterminated position, and predeterminated position includes loading and unloading position
Set with process station etc., in this case, the adjacent rotational positioning of turntable twice needs turntable 20 to rotate one or more stations,
So that turntable rotational positioning is to designated position every time.Therefore, in the present embodiment, second arrive bit detector 25 check bit set
In turntable 20 accurately rotation to any one 201 institute of the second auxiliary positioning portion when rotating any one carrying position to predeterminated position
At position.
Second continues after rotating specified time to bit detector 25 for the turntable 20 after original point position, specified time
Refer to the time needed for turntable 20 goes to designated position in original point position back spin, whether the second auxiliary positioning portion 201 of detection rotates
Detect position to it, if so, the rotation of turntable 20 then determines turntable accurate positioning to designated position, if it is not, turntable 20 do not rotate to
Designated position then determines turntable positioning failure.
Therefore, from the foregoing, it will be observed that arriving the same available turntable of bit detector 25 by the second auxiliary positioning portion 201 and second
Whether whether 20 rotate to the feedback signal of designated position, accurate so as to further monitor turntable positioning.
It is appreciated that in the present embodiment, not only being cooperated by the first auxiliary positioning portion 222 and first to bit detector 24
Use, be also used cooperatively by the second auxiliary positioning portion 201 and second to bit detector 25 realize monitoring turntable position whether
Accurately, it can equally can be realized monitoring by another in any one failure of the two, thus can play mutually
The effect of lock, so as to be further ensured that the accurate safe and efficient and stable operation of performance of rotating table system.
Specifically, there are differences in height for the second auxiliary positioning portion 201 and the surface of turntable 20, more specifically, the second auxiliary is fixed
Position portion 201 is notch or protrusion or groove, in the present embodiment, as shown in figure 5, the second auxiliary positioning portion 201 is in turntable 20
Side wall on the protrusion that is arranged, second to bit detector 25 is range sensor.Due to second to the detection of bit detector 25 second
The rotation of auxiliary positioning portion 201 to its working principle for detecting position detects the first auxiliary positioning portion with first to bit detector 24
The working principle that 222 rotations detect position to it is similar, and details are not described herein.
In the present embodiment, detect whether protrusion rotates to detection to bit detector 25 (range sensor) to improve second
The detection accuracy of position, preferably in the following way: first, minimizing dimension D of the protrusion in turntable circumferential direction；Second,
Due to turntable 20 during its rotation its surface there may be the small error that floats up and down, setting protrusion is turning
Thickness L1 in 20 axial direction of disk is more than or equal to turntable 20 itself along its axial thickness L2；Third, range sensor uses laser
Type range sensor.
It should be noted that although the quantity in the original point position portion 221 in the present embodiment is one；But the present invention is simultaneously
It is not limited to this, in practical applications, the quantity in original point position portion 221 can also be it is multiple, multiple original point position portions 221 are along fixed
Position ring 22 is provided at circumferentially spaced, and multiple original point position portions 221 are located on the same circumference of positioning ring 22, that is to say, that multiple
The rotational trajectory in original point position portion 221 is identical, and whether real-time detection during positioning ring 22 rotates of origin detector 23 appoints
The rotation of original point position portion 221 anticipate to detection position, if so, realizing turntable original point position.It is appreciated that by along positioning
Ring 22 is provided at circumferentially spaced multiple original point position portions 221 compared with an original point position portion 221 only is arranged, and positioning ring 22 only needs
Rotating smaller angle can be so that the rotation of one of original point position portion 221 thus can be realized rapidly to detection position
Original point position, i.e. raising original point position rate.
It should also be noted that, although not only being detected in place by the first auxiliary positioning portion 221 and first in the present embodiment
Device 24 is used cooperatively, and is also used cooperatively by the second auxiliary positioning portion 201 and second to bit detector 25 to monitor turntable positioning
It is whether accurate；But the present invention is not limited thereto, in practical applications, it is auxiliary that first can also only be arranged according to the actual situation
Help positioning region 221 and first to bit detector 24, alternatively, the second auxiliary positioning portion 201 and second, which is only arranged, arrives bit detector 25.
It also should be noted that in practical applications, the first auxiliary positioning portion 222 can also be regard as original point position
Portion 221, and 24 devices are detected in place as origin detector 23 using first, this not only can simplify the structure of rotating table system；And
And cost can also be reduced.
Furthermore it should also be noted that, although in the present embodiment being the original judged by detecting distance and according to this distance
Reason judges that original point position portion 221, the first auxiliary positioning 222 and the second auxiliary positioning portion 201 are rotated to corresponding to realize
The detection position of detector；But the present invention is not limited thereto, in practical applications, is also based on other principles and comes in fact
Existing above-mentioned function, for example, it is also possible to be identified by detection image and realize above-mentioned function according to the principle of image judgement.
As another technical solution, the present invention also provides a kind of semiconductor processing equipments, including processing chamber, in work
It is provided with rotating table system in skill chamber, the rotating table system rotating table system described above using the present invention.Fig. 6 is that the present invention is implemented
The structural schematic diagram of the processing chamber for the semiconductor processing equipment that example provides；Fig. 7 is the top view of processing chamber shown in fig. 6.
Fig. 6 and Fig. 7 are please referred to, since rotating table system has been described in detail in the above-described embodiments, details are not described herein.
In addition, being additionally provided with pedestal jacking system and thimble jacking system in processing chamber 15.Wherein, pedestal lifting system
System includes pedestal 30 and pedestal lift actuator 31.The target position 32 being arranged in the quantity of pedestal 30 and position and processing chamber 15
Quantity and position are corresponding, and multiple pedestals 30 or target position 32 are circumferentially-spaced along its in processing chamber 15 and be uniformly arranged, target position 32
Refer to the position for placing target；Also, corresponding each target position 32 or pedestal 30 are provided with a process station, such as Fig. 7 institute
Show, the quantity of pedestal 30 and target position 32 is four, and each target is different, to complete different process to same substrate, alternatively, respectively
A target is identical, to complete identical technique to different substrates, carries position 2,4,6 and 8 positions correspond to four pedestals
30 or target position 32 process station.Pedestal lift actuator 31 is used to really rotate in carrying level to process station rear-guard moving base
30 rise, so that pedestal 30 jacks up the substrate on the carrying position for being located at process station to predeterminated position, come in the predeterminated position
Technique is carried out to substrate；Pedestal lift actuator 31 is also used to drive pedestal 30 to drop under turntable 20 after the completion of technique
Side, so that substrate is fallen on carrying position.
Thimble elevating mechanism is positioned close at the position of gate valve 50 and be located at the lower section of turntable 20, close to gate valve 50
The place of setting is provided with loading position, as carried 1 present position of position in Fig. 7.The thimble elevating mechanism includes thimble 40 and thimble
Lift actuator 41.Wherein, thimble 40 is used for carrying substrates；Thimble lift actuator 41 is used to really rotate in carrying level to dress
Driving thimble 40 rises after unloading position, will be located at the substrate on carrying position and jack up to the position for pass with manipulator piece,
Or unloaded thimble rises to the position for pass with manipulator piece；Thimble lift actuator 41 is also used to manipulator and thimble
It drives thimble 40 to drop to the lower section of turntable 20 after 40 biography pieces, the substrate loaded on thimble 40 is fallen within into carrying position to realize
On.
In the present embodiment, realize that pallet is accurately positioned by rotating table system, so that carrying level is really rotated to technique
Position and loading position, thus guarantee dial turning motion, pedestal and thimble elevating movement cooperating like clockwork, thus
It can guarantee the stable operation of the safe and efficient and performance of semiconductor processing equipment.
Shown in sum up, semiconductor processing equipment provided in this embodiment, processing chamber is interior to use another skill of the present invention
The rotating table system that art scheme provides, thereby may be ensured that the stable operation of the safe and efficient and performance of semiconductor processing equipment.
It is understood that the principle that embodiment of above is intended to be merely illustrative of the present and the exemplary implementation that uses
Mode, however the present invention is not limited thereto.For those skilled in the art, essence of the invention is not being departed from
In the case where mind and essence, various changes and modifications can be made therein, these variations and modifications are also considered as protection scope of the present invention.
Claims (9)
1. a kind of rotating table system, including turntable and rotating driver, multiple be used for has been provided at circumferentially spaced along it on the turntable
The carrying position of carrying substrates, the turntable are connected with the shaft of the rotating driver, special to drive the turntable to rotate
Sign is, further includes positioning ring and origin detector, and the diameter of the positioning ring is less than the diameter of the turntable, the positioning ring
The fixed side-wall outer side being nested in the shaft；And
Original point position portion is provided on the positioning ring, the check bit of the origin detector is setting in the original point position portion
On the positioning ring circumference at place, the origin detector is used for the origin described in real-time detection during positioning ring rotation
Whether positioning region rotates to the detection position, if so, determining that presently described turntable position is the origin of the turntable
Position, to realize to the turntable original point position；
Multiple carrying positions along the circumferentially-spaced of the turntable and are uniformly arranged, and the rotating table system further includes first examining in place
Device and the first auxiliary positioning portion are surveyed, the quantity in first auxiliary positioning portion is consistent with the carrying quantity of position, multiple described
First auxiliary positioning portion is along the circumferentially-spaced of the positioning ring and is uniformly arranged；
Described first to bit detector check bit setting on the positioning ring circumference where multiple first auxiliary positioning portions,
Described first arrives the set-up mode of bit detector are as follows: its check bit is any when accurately rotating setting in the turntable to designated position
One first auxiliary positioning portion position；
Described first continues after rotating specified time to bit detector for the turntable after original point position, described in detection
Whether the first auxiliary positioning portion, which rotates to it, is detected position, if so, the turntable accurate positioning is determined, if it is not, then determining institute
State turntable positioning failure；
The specified time refers to the time needed for the turntable goes to the designated position in original point position back spin.
2. rotating table system according to claim 1, which is characterized in that the multiple carrying position is between the circumferential direction of the turntable
Every and be uniformly arranged, the rotating table system further includes the second auxiliary positioning portion and second to bit detector, and second auxiliary is fixed
The quantity in position portion is consistent with the carrying quantity of position, multiple second auxiliary positioning portions along the circumferentially-spaced of the turntable and
It is uniformly arranged；
Described second to bit detector check bit setting on the disk peripheral where multiple second auxiliary positioning portions, institute
State the second set-up mode for arriving bit detector are as follows: its check bit setting in when the turntable is rotated to designated position any one
Second auxiliary positioning portion position；
Described second continues after rotating specified time to bit detector for the turntable after original point position, described in detection
Whether the second auxiliary positioning portion, which rotates to it, is detected position, if so, the turntable accurate positioning is determined, if it is not, then determining institute
State turntable positioning failure；
The specified time refers to the time needed for the turntable goes to the designated position in original point position back spin.
3. rotating table system according to claim 1, which is characterized in that the surface in the original point position portion and the positioning ring
There are differences in height；The origin detector is range sensor.
4. rotating table system according to claim 3, which is characterized in that the original point position portion is the table in the positioning ring
The notch being arranged on face, the origin detector are emission sensor.
5. rotating table system according to claim 1, which is characterized in that first auxiliary positioning portion and the positioning ring
There are differences in height on surface；Described first arrives bit detector as range sensor.
6. rotating table system according to claim 5, which is characterized in that first auxiliary positioning portion is in the positioning ring
Surface on the notch that is arranged, described first to bit detector is emission sensor.
7. rotating table system according to claim 2, which is characterized in that the table in second auxiliary positioning portion and the turntable
There are differences in height in face；Described second arrives bit detector as range sensor.
8. rotating table system according to claim 1, which is characterized in that the quantity in the original point position portion is one or more
It is a, multiple original point position portion being provided at circumferentially spaced along the positioning ring.
9. a kind of semiconductor processing equipment, including processing chamber, are provided with rotating table system in processing chamber, which is characterized in that
The rotating table system is using rotating table system described in claim 1-8 any one.
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| CN113137942B (en) * | 2021-04-15 | 2022-12-06 | 珠海格力智能装备有限公司 | Positioning system and positioning method |
| CN113322449B (en) * | 2021-05-26 | 2022-10-21 | 北京北方华创微电子装备有限公司 | Semiconductor process equipment and bearing device thereof |
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| CN101127317A (en) * | 2007-09-18 | 2008-02-20 | 深圳市矽电半导体设备有限公司 | Positioning device and positioning method for wafer sheet |
| CN202540277U (en) * | 2012-02-16 | 2012-11-21 | 西华大学 | Positioning control device for rectangular rotary workbench |
| CN203033554U (en) * | 2012-12-23 | 2013-07-03 | 青岛诚利佳机械有限公司 | Automatic three-position barrel changing device |
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| WO2011151996A1 (en) * | 2010-06-01 | 2011-12-08 | パナソニック株式会社 | Plasma processing device and plasma processing method |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101127317A (en) * | 2007-09-18 | 2008-02-20 | 深圳市矽电半导体设备有限公司 | Positioning device and positioning method for wafer sheet |
| CN202540277U (en) * | 2012-02-16 | 2012-11-21 | 西华大学 | Positioning control device for rectangular rotary workbench |
| CN203033554U (en) * | 2012-12-23 | 2013-07-03 | 青岛诚利佳机械有限公司 | Automatic three-position barrel changing device |
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Address after: 100176 Beijing economic and Technological Development Zone, Wenchang Road, No. 8, No. Applicant after: Beijing North China microelectronics equipment Co Ltd Address before: 100176 Beijing economic and Technological Development Zone, Wenchang Road, No. 8, No. Applicant before: Beifang Microelectronic Base Equipment Proces Research Center Co., Ltd., Beijing |
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