CN106324984A - Roller-to-roller ultraviolet nanoimprint device and method - Google Patents
Roller-to-roller ultraviolet nanoimprint device and method Download PDFInfo
- Publication number
- CN106324984A CN106324984A CN201610986093.9A CN201610986093A CN106324984A CN 106324984 A CN106324984 A CN 106324984A CN 201610986093 A CN201610986093 A CN 201610986093A CN 106324984 A CN106324984 A CN 106324984A
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- Prior art keywords
- roll
- roller
- coating
- micromatic setting
- adjusting means
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims abstract description 21
- 239000011248 coating agent Substances 0.000 claims abstract description 31
- 238000000576 coating method Methods 0.000 claims abstract description 31
- 239000003292 glue Substances 0.000 claims description 20
- 239000000758 substrate Substances 0.000 claims description 17
- 239000000919 ceramic Substances 0.000 claims description 6
- 238000007711 solidification Methods 0.000 claims description 4
- 230000008023 solidification Effects 0.000 claims description 4
- 238000012546 transfer Methods 0.000 claims description 4
- 238000004804 winding Methods 0.000 claims 1
- 239000000463 material Substances 0.000 abstract description 4
- 230000005540 biological transmission Effects 0.000 abstract 2
- 238000010073 coating (rubber) Methods 0.000 abstract 1
- 230000001105 regulatory effect Effects 0.000 abstract 1
- 238000005516 engineering process Methods 0.000 description 13
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000007687 exposure technique Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 240000007594 Oryza sativa Species 0.000 description 1
- 235000007164 Oryza sativa Nutrition 0.000 description 1
- 238000004026 adhesive bonding Methods 0.000 description 1
- 238000003851 corona treatment Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000000609 electron-beam lithography Methods 0.000 description 1
- 238000004049 embossing Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000000053 physical method Methods 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 235000009566 rice Nutrition 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Shaping Of Tube Ends By Bending Or Straightening (AREA)
Abstract
The invention relates to a roller-to-roller ultraviolet nanoimprint device and method, and belongs to a nanoimprint device and method. A transmission device is arranged in a shell, a corona device is arranged behind an unreeling roller of the transmission device, a coating device is in threaded connection with a fine tuning device, the fine tuning device is in threaded connection to the shell, an adjusting device is arranged on the side surface of an imprint roller in the imprint device, the adjusting device is connected with a base through screws, and an ultraviolet lamp is arranged beside the imprint roller. According to the invention, the relative positions of the imprint roller fixed by the adjusting device and a support roller can be regulated, thus improving the position accuracy; the adjustable pneumatic coating device is adopted, thus ensuring more uniform rubber coating and fitting in with to-be-imprinted materials with different thicknesses; and the imprint roller is adjusted by the adjusting device composed of a motion guide rail and a micro motion platform, thus realizing accurate control on the depth-width ratio of an imprint pattern and realizing easier demolding.
Description
Technical field
The present invention relates to a kind of nano-imprinting device and method, the most roll-to-roll ultraviolet nanometer imprinting apparatus and employing should
The method of device.
Background technology
In mid-term in 12nd century, semiconductor microelectronic technology and miniaturization both technology weigh from the yardstick of miniaturization
Amount, also rests on the category of micron order technology, along with continuous progress and development scientific and technological afterwards, semiconductor technology and micro-system skill
Art research constantly breaks through with manufacturing technology, and they manufacture yardstick and have stepped into the micro-nano of higher precision and nanoscale category,
Thus promoting the birth of nanofabrication technique, it is achieved that the transformation from micron to nanometer is even jumped.And this progress is not merely
The transition of magnitude, a qualitative leap especially in terms of nanometer technique processing.
After the successful proposition of nanofabrication technique and representing, association area scholar propose successively: nano-ultraviolet light
Learn the novel nano technology such as exposure technique, electron beam lithography, X-ray exposure technology, extreme ultraviolet exposure technique, after this
Nanometer processing industry is the most increasingly watched attentively by people.But, nano-photoetching process technology limits due to principle, its essence
Degree, fidelity cannot be ensured efficiently, thus be caused so-called poor efficiency high cost, limits its commercial value tightly,
For business-like important hidden danger, and just because of the high cost defect of conventional optical lithography technology, promote new non optical method
Exploitation.
In recent years, nano impression receives the attention of high degree, because it successfully demonstrates in the most perfect renewal
It has the potentiality that low cost, resolution are high.In latter stage in 20th century, scientist Mr. Zhou Yu of Chinese origin proposes and has developed this technology: receive
Rice stamping technique, is used in nanosecond science and technology, finds to confirm that this is a kind of some effective obtaining nanostructured.And such as
Modern more ripe nanometer embossing specifically includes that the technology such as hot padding, ultraviolet stamping.Ultraviolet stamping and the pressure of hot padding
Print process is all to utilize the template with graphic structure to make pattern transfer on required substrate by physical method, and both sides
Method still also exists problem: impressing glue is smeared uneven；Roller platen imprints poor quality with supporting roller axis uneven causing；Pressure
Print roller cannot adapt to different materials to be imprinted from the distance supported between roller.
Summary of the invention
The present invention provides a kind of roll-to-roll ultraviolet nanometer imprinting apparatus and method, smears uneven with solution impressing glue, pressure
Cause uneven with support roller axis of print roller imprints poor quality, and roller platen cannot adapt to different from the distance supported between roller
The problem of material to be imprinted.
The present invention adopts the technical scheme that: have transmitting device in the enclosure, has corona to fill after the let off roll of transmitting device
Putting, apparatus for coating is threaded connection with micromatic setting, and micromatic setting is threadedly attached on shell, the pressure in imprinting apparatus
There is adjusting means print roller side, and described adjusting means is connected with base by screw, has uviol lamp by roller platen.
The structure of micromatic setting of the present invention is: apparatus for coating connecting plate is connected with fixed frame by flexible hinge,
Piezoelectric ceramics by pretension screw be connected with fixed frame and with apparatus for coating connecting plate apical grafting.
Apparatus for coating of the present invention includes cavity, and cavity has air inlet, glue feeding opening, and cavity bottom connects coating
Roller, there is the fixing screw being connected with adjusting means side.
Adjusting means of the present invention includes guide rail, ball-screw, decelerator, motor three, sliding platform, micromatic setting
Two, wherein, micromatic setting two is threadeded with sliding platform, and forms cavity between micromatic setting two and sliding platform, uses
In laying the motor being connected with roller platen.
Let off roll of the present invention is connected with motor one.
Wind-up roll of the present invention is connected with motor two.
A kind of roll-to-roll ultraviolet nanometer method for stamping, step is as follows:
Substrate on conveyer belt is by after corona unit, and impressing glue uniform application is moved by apparatus for coating to substrate surface, substrate
To imprinting apparatus part, roller platen, by adjusting means regulation and the distance supporting roller, makes the pattern of cylinder surface transfer to base
On the impressing glue of basal surface, make impressing glue pattern solidify by uviol lamp, substrate is taken off, is etched.
The present invention proposes a kind of roll-to-roll ultraviolet nanometer imprinting apparatus, uses adjustable vapour-pressure type apparatus for coating and adjustable
Pitch from imprinting apparatus, obtain the pattern of nanoscale easily, the impressing of large area pipeline system can be realized again simultaneously
Method, improves production efficiency.
The invention have the advantage that
(1) roller platen fixed by adjusting means can adjust relative position with supporting roller, improves positional precision.
(2) use adjustable vapour-pressure type apparatus for coating, while can ensure that gluing is evenly, be adapted to difference
The material to be imprinted of thickness.
(3) roller platen is adjusted by the adjusting means using moving guide rail and micromotion platform composition, can make imprinted pattern
Depth-to-width ratio can accurately control, and the demoulding be easier to.
Accompanying drawing explanation
Fig. 1 is the structural representation of the present invention；
Fig. 2 is the internal structure schematic diagram of the present invention；
Fig. 3 is the axonometric drawing of apparatus for coating of the present invention；
Fig. 4 is the structural representation of adjusting means of the present invention；
Fig. 5 be the present invention be the installation diagram of the corresponding adjusting means of apparatus for coating；
Fig. 6 is the structural representation of adjusting means of the present invention；
In figure:
Shell 1, transmitting device 2, let off roll 201, motor one 201a, help roll one 202a, help roll two 202b, help roll three
202c, wind-up roll 203, motor two 203a, conveyer belt 204, corona unit 3, apparatus for coating 4, cavity 401, air inlet 402, enters
Glue hole 403, fixed screw 404, applicator roll 405, micromatic setting 1, flexible hinge 501, piezoelectric ceramics 502, pretension screw
503, apparatus for coating connecting plate 504, fixed frame 505, imprinting apparatus 6, roller platen 601, support roller 602, adjusting means 7, guide rail
701, ball-screw 702, decelerator 703, motor 3 704, sliding platform 705, micromatic setting 2 706, solidification equipment 8.
Detailed description of the invention
Having transmitting device 2 in shell 1, have corona unit 3 after the let off roll 201 of transmitting device 2, apparatus for coating 4 is with micro-
Adjusting device 5 to be threaded connection, micromatic setting 5 is threadedly attached on shell 1, roller platen 601 side in imprinting apparatus 6
Having adjusting means 7, described adjusting means 7 to be connected with base by screw, roller platen 601 is other uviol lamp 8.
The structure of described micromatic setting 5 is: apparatus for coating connecting plate 504 is by flexible hinge 501 with fixed frame 505 even
Connect, piezoelectric ceramics 502 be connected with fixed frame 505 by pretension screw 503 and with apparatus for coating connecting plate 504 apical grafting.
Described apparatus for coating 4 includes cavity 401, and cavity 401 has air inlet 402, and glue feeding opening 403, bottom cavity 401
Connecting applicator roll 405, there is the fixing screw 404 being connected with adjusting means 5 side.
Described adjusting means 7 includes guide rail 701, ball-screw 702, decelerator 703, motor 3 704, sliding platform
705, micromatic setting 2 706, wherein, micromatic setting 2 706 is threadeded with sliding platform 705, and micromatic setting 2 706 with
Cavity is formed, for laying the motor being connected with roller platen between sliding platform 705.
Described let off roll 201 is connected with motor one 201a.
Described wind-up roll 203 is connected with motor two 203a.
A kind of roll-to-roll ultraviolet nanometer method for stamping, step is as follows:
Substrate on conveyer belt is by after corona unit 3, and impressing glue uniform application is moved by apparatus for coating 4 to substrate surface, substrate
Moving imprinting apparatus part, roller platen 601, by adjusting means 7 regulation and the distance supporting roller 602, makes the pattern of cylinder surface
Transfer on the impressing glue of substrate surface, make impressing glue pattern solidify by uviol lamp 8, substrate is taken off, is etched.
The invention will be further described to combine accompanying drawing below.
As shown in Fig. 1 to Fig. 6, let off roll 201, wind-up roll 203, roller platen 601, support roller 602, help roll one 202a,
Help roll two 202b, help roll three 202c use hole axle to coordinate with shell 1, and apparatus for coating 4 and adjusting means 5 use screw thread even
The mode connect.
As depicted in figs. 1 and 2, including shell 1, transmitting device 2, corona unit 3, apparatus for coating 4, micromatic setting 5, impressing
Device 6, adjusting means 7, solidification equipment 8, wherein transmitting device 2 include let off roll 201, conveyer belt 204, wind-up roll 203 and
Help roll one 202a, help roll two 202b, help roll three 202c, let off roll 201 and wind-up roll 203 are by corresponding motor one
201a, motor two 203a control to rotate, and other help rolls are driven, and conveyer belt 204 can be made to be constantly in tense situation, are conducive to
Impressing face smooth；The effect of corona unit 3 is that substrate is carried out sided corona treatment, first opens corona dress before single unit system runs
Putting, make moulding process more smooth, solidification equipment 8 is a ultraviolet lamp tube, can solidify the pattern imprinted.
As it is shown on figure 3, apparatus for coating 4 includes cavity 401, air inlet 402, glue feeding opening 403, fixing screw 404, applicator roll
405, single unit system run time, first pass through glue feeding opening 403 injects in cavity 401 imprint glue, by with apparatus for coating 4 screw thread
The adjusting means 5 connected makes applicator roll 405 be in correct position, closes glue feeding opening 403, then by air inlet 402 to cavity
Apply the air pressure of some strength in 401, make impressing glue uniform application in substrate.
As shown in Figure 4, adjusting means 5 includes flexible hinge 501, piezoelectric ceramics (oscillator) 502 and pretension screw 503, profit
Reach to finely tune the purpose of apparatus for coating 4 by the electrostrictive characteristic of piezoelectric ceramics.
As it is shown in figure 5, apparatus for coating 4 is threaded connection with adjusting means 5.
As shown in Figure 6, imprinting apparatus 6 includes roller platen 601 and supports roller 602.Roller platen 601 is controlled to rotate by motor,
Roller platen 601 in imprinting apparatus 6 is connected with adjusting means 7, and adjusting means 7 is by guide rail 701, ball-screw 702, decelerator
703, motor 3 704, sliding platform 705, micromatic setting 2 706 is constituted, the structure of micromatic setting two and the knot of micromatic setting one
Structure is identical, by keeping vertically ensuring that roller platen 601 and supporting the axis alignment of roller 602, by adjusting of adjusting means 7
Joint roller platen 601 and the depth-to-width ratio of the distance controlling imprinted pattern supporting roller 602, make the demoulding be easier to.
The present invention utilizes roll-to-roll ultraviolet nanometer method for stamping, it is achieved that the printing effect of large area continuous-flow type, simultaneously
Add adjustable apparatus for coating and imprinting apparatus, make the impressing that single unit system is applicable under different situations, simultaneously by limit
The displacement of adjusting means horizontal direction processed, makes roller platen and supports the axis of roller on a perpendicular.
Claims (7)
1. a roll-to-roll ultraviolet nanometer imprinting apparatus, it is characterised in that: there is transmitting device in the enclosure, putting of transmitting device
Having corona unit after winding up roller, apparatus for coating is threaded connection with micromatic setting, and micromatic setting is threadedly attached on shell,
There is adjusting means roller platen side in imprinting apparatus, and described adjusting means is connected with base by screw, has by roller platen
Uviol lamp.
Roll-to-roll ultraviolet nanometer imprinting apparatus the most according to claim 1, it is characterised in that the knot of described micromatic setting
Structure is: apparatus for coating connecting plate is connected with fixed frame by flexible hinge, piezoelectric ceramics pass through pretension screw be connected with fixed frame,
And with apparatus for coating connecting plate apical grafting.
One the most according to claim 1 roll-to-roll ultraviolet nanometer imprinting apparatus, it is characterised in that described apparatus for coating
Including cavity, cavity having air inlet, glue feeding opening, cavity bottom connects applicator roll, and side has be connected with adjusting means to fix
Screw.
One the most according to claim 1 roll-to-roll ultraviolet nanometer imprinting apparatus, it is characterised in that described adjusting means
Including guide rail, ball-screw, decelerator, motor three, sliding platform, micromatic setting two, wherein, micromatic setting two and sliding platform
Threaded, and form cavity between micromatic setting two and sliding platform, for laying the motor being connected with roller platen.
One the most according to claim 1 roll-to-roll ultraviolet nanometer imprinting apparatus, it is characterised in that described let off roll with
Motor one connects.
One the most according to claim 1 roll-to-roll ultraviolet nanometer imprinting apparatus, it is characterised in that described wind-up roll with
Motor two connects.
7. a roll-to-roll ultraviolet nanometer method for stamping, it is characterised in that step is as follows: the substrate on conveyer belt is filled by corona
Postponing, apparatus for coating is by impressing glue uniform application to substrate surface, and substrate moves to imprinting apparatus part, and roller platen is by regulation
Device regulation and the distance supporting roller, make the pattern of cylinder surface transfer to, on the impressing glue of substrate surface, be made by uviol lamp
Impressing glue pattern solidification, takes off substrate, is etched.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610986093.9A CN106324984A (en) | 2016-11-09 | 2016-11-09 | Roller-to-roller ultraviolet nanoimprint device and method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610986093.9A CN106324984A (en) | 2016-11-09 | 2016-11-09 | Roller-to-roller ultraviolet nanoimprint device and method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106324984A true CN106324984A (en) | 2017-01-11 |
Family
ID=57816914
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610986093.9A Pending CN106324984A (en) | 2016-11-09 | 2016-11-09 | Roller-to-roller ultraviolet nanoimprint device and method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106324984A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109696799A (en) * | 2017-10-20 | 2019-04-30 | 长春工业大学 | A kind of roll shape ultraviolet nanometer imprinting apparatus |
| CN110018611A (en) * | 2018-01-10 | 2019-07-16 | 长春工业大学 | A kind of device and method for the nano impression preparing hierarchical microarchitecture |
| CN110018612A (en) * | 2018-01-10 | 2019-07-16 | 长春工业大学 | A kind of nano-imprinting device preparing complex micro structure |
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| CN110018611A (en) * | 2018-01-10 | 2019-07-16 | 长春工业大学 | A kind of device and method for the nano impression preparing hierarchical microarchitecture |
| CN110018612A (en) * | 2018-01-10 | 2019-07-16 | 长春工业大学 | A kind of nano-imprinting device preparing complex micro structure |
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Application publication date: 20170111 |