CN206348588U - A kind of ultraviolet nanometer imprinting apparatus - Google Patents
A kind of ultraviolet nanometer imprinting apparatus Download PDFInfo
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- CN206348588U CN206348588U CN201621430939.2U CN201621430939U CN206348588U CN 206348588 U CN206348588 U CN 206348588U CN 201621430939 U CN201621430939 U CN 201621430939U CN 206348588 U CN206348588 U CN 206348588U
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- screw
- imprinting apparatus
- workbench
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Abstract
A kind of ultraviolet nanometer imprinting apparatus, the device includes adjusting means, imprinting apparatus, transmitting device, solidification equipment and stripper apparatus.Adjusting means carries out feedback regulation by grating rule displacement sensor and laser centring device to six degree of freedom workbench, its rear pattern plate is adjacent to via the control of six degree of freedom workbench with gluing substrate alignment, alignment is passed through air after being adjacent to and template and gluing substrate is imprinted, transmitted to ultraviolet light and solidified by transmitting device after the completion of impressing, it is then moved back to above six degree of freedom workbench, the open-type demoulding is finally carried out by stripper apparatus.The utility model can make template accurately align with gluing substrate to be adjacent to, press using gas, it is ensured that uniform force, lift imprinted pattern precision, be easy to demoulding.
Description
Technical field
The utility model is related to nano-imprint lithography field, espespecially ultraviolet nanometer imprinting apparatus.
Background technology
Due to the market demand, microelectronics industry reduces characteristic direction development towards continuous, it is often necessary to manufacture tens nanometer or
The nano graph of hundreds of nanometers of fine structure.This kind of fine structure is manufactured generally using light or the photolithography method of photon beam, is needed
Expend great man power and material.Latter stage in 20th century, the Stephen Y.Chou in Princeton University nanostructured laboratory
Professor proposes nano imprint lithography, reduces the cost of pattern transfer.Nano impression is using with nano-pattern
Photoresist film on substrate is embossed into nano graph by template by the method for machinery, then to nano-pattern on substrate at
Reason, is finally made the semiconductor structure with nanostructured.
Current nano imprint lithography includes ultraviolet nanometer impressing, hot padding and micro- contact photoetching technique.It is wherein purple
Outer nano imprint lithography is a kind of method of new micro-nano graph, with high-resolution, Ultra Low Cost and high production
The method of rate, especially has significant advantage in large area micro-nano structure and complicated nanostructured manufacture view.It is by Dezhou
What college professor C GWillson were proposed, solve and temperature, colloid expansion damage template are difficult to control in conventional hot press printing technology
The problems such as causing to be stripped difficulty with colloid deformation., can be to thin because the bubble in the process not heated, photoresist is difficult to discharge
Micro-structural causes defect, it requires that template is pushed more uniform.
Current ultraviolet nanometer stamping technique also generally existing some the problem of, impressing needs template and substrate to realize first
Accurate alignment is adjacent to.Secondly, the overall demoulding after the completion of plane nano impressing needs very big knockout press, and imprint area is got over
Greatly, depth-to-width ratio is bigger, and ejection resistance is bigger, and damage is easily caused to template and pattern.
In summary, current ultraviolet nanometer impressing is primarily present problems with：
1. need to realize that template is accurately aligned with substrate and be adjacent to；
2. need to realize uniform pressure to discharge the bubble in photoresist；
3. the knockout press needed for the overall demoulding of plane impressing is generally larger, damage is easily caused to template and pattern.
The content of the invention
The purpose of this utility model is to provide a kind of ultraviolet nanometer imprinting apparatus, to overcome existing apparatus can not serve as a contrast template
Bottom Accurate align, it is difficult to the problems such as uniform pressure and difficult demoulding.
A kind of ultraviolet nanometer imprinting apparatus, including shell, uviol lamp, six degree of freedom are proposed according to the purpose of this utility model
Workbench, imprinting apparatus, transmitting device, workbench and bottom plate, there is six degree of freedom workbench in shell, solid by screw
There is impressing to fill due on bottom plate, having above six-freedom worktable above vacuum cup, vacuum cup absorption workbench, workbench
Put, be connected through a screw thread with shell, there is transmitting device on outer casing inner wall, be connected by screw with outer casing inner wall, transmitting device end
There is uviol lamp at end.
A kind of ultraviolet nanometer imprinting apparatus is proposed according to the purpose of this utility model, wherein described six degree of freedom work is flat
Platform includes contiguous block, hydraulic stem, bottom plate, fixed block, objective table, and the bottom plate is connected by screw with fixed block, the hydraulic pressure
Bar is connected through a screw thread with fixed block and contiguous block, and three contiguous blocks are fixed on objective table by screw, three fixed blocks
It is fixed on by screw on bottom plate, described six-freedom worktable is fixed on bottom plate by screw, and vacuum cup passes through spiral shell
Nail is fixed on objective table.
A kind of ultraviolet nanometer imprinting apparatus is proposed according to the purpose of this utility model, wherein described imprinting apparatus include into
Device of air, admission line, obturator, support board, grating rule displacement sensor, vacuum cup, generating laser, small-sized hydraulic
Bar, axle sleeve and hydraulic stem, wherein support board are connected with axle sleeve by pin, and generating laser is connected by screw with support board,
Vacuum cup is fixed on support board by screw, and grating rule displacement sensor is fixed by screws on obturator.Can be with
Template and gluing substrate are imprinted by air pressure.Imprinting apparatus equipped with grating rule displacement sensor, generating laser,
Vacuum cup, can also coordinate six degree of freedom workbench to carry out alignment and be adjacent to and be stripped.
A kind of ultraviolet nanometer imprinting apparatus proposed according to the purpose of this utility model, wherein described transmitting device includes
Servomotor, decelerator, shaft coupling, leading screw eyelid retractor, sliding platform, article carrying platform, guide rail, ball-screw, guide rail and shell
Inwall is connected by screw, and leading screw eyelid retractor is connected by screw with guide rail, and article carrying platform is made up of MULTILAYER COMPOSITE clear glass,
And be connected with sliding platform by hole axle, article carrying platform has four square through holes that may pass through.By the control to servomotor,
Ball screw turns are driven, so as to be transmitted.The article carrying platform made by MULTILAYER COMPOSITE clear glass on transmitting device, can
So that UV light permeability is solidified.
A kind of ultraviolet nanometer imprinting apparatus is proposed according to the purpose of this utility model, wherein described workbench includes fixing
Device, laser pickoff and piece pressing clip.
A kind of ultraviolet nanometer imprinting apparatus is proposed according to the utility model purpose, wherein described fixing device, may pass through
Square through hole is simultaneously rotated by 90 °, and workbench is fixed on article carrying platform so that relative position does not occur in transportation for workbench
Move.
The utility model has following obvious advantage：
1. realize that quick accurate align between template and substrate is adjacent to；
2. using gas pressure, it is ensured that uniform force, lift imprinted pattern precision；
3. open-type is stripped, relatively separated in the past on basal surface direction with glue-line to integral translation, needed for reducing
Knockout press, protection template and pattern, make its not easy damaged.
Brief description of the drawings
Fig. 1：The structure chart of ultraviolet nanometer imprinting apparatus；
Fig. 2：The rearview of ultraviolet nanometer imprinting apparatus；
Fig. 3：The structure chart of the six degree of freedom workbench of ultraviolet nanometer imprinting apparatus；
Fig. 4：The structure chart of the imprinting apparatus of ultraviolet nanometer imprinting apparatus；
Fig. 5：The structure chart of the transmitting device of ultraviolet nanometer imprinting apparatus；
Fig. 6：The structure chart of the workbench of ultraviolet nanometer imprinting apparatus.
Description of reference numerals：1- shells, 2- uviol lamps, 3- six degree of freedom workbenches, 4- imprinting apparatus, 5- transmission dresses
Put, 6- workbench, 7- bottom plates, 301- contiguous blocks, 302- hydraulic stems, 303- bottom plates, 304- fixed blocks, 305- objective tables, 306-
Vacuum cup, 401- inlet ducts, 402- admission lines, 403- obturators, 404- support boards, 405- grating scale displacement sensings
Device, 406- vacuum cups, 407- generating lasers, 408- small-scale liquid depression bars, 409- axle sleeves, 410- hydraulic stems, 501- servos electricity
Machine, 502- decelerators, 503- shaft couplings, 504- leading screw eyelid retractors, 505- sliding platforms, 506- article carrying platforms, 506a- is square logical
Hole, 507- guide rails, 508- ball-screws, 601- fixing devices, 602- laser pickoffs, 603- piece pressing clips.
Embodiment
The occupation mode of ultraviolet nanometer imprinting apparatus is described with reference to accompanying drawing.
As shown in Figure 1 and Figure 2, described ultraviolet nanometer imprinting apparatus includes shell（1）, uviol lamp（2）, six degree of freedom work
Make platform（3）, imprinting apparatus（4）, transmitting device（5）, workbench（6）And bottom plate（7）.
As shown in figure 3, described six degree of freedom workbench（3）Including institute's contiguous block（301）, hydraulic stem（302）, bottom plate
（303）, fixed block（304）, objective table（305）And vacuum cup（306）, the bottom plate（303）With fixed block（304）It is connected,
The hydraulic stem (302) and fixed block（304）And contiguous block（301）It is connected by screw thread, three contiguous blocks (301) pass through spiral shell
Nail is fixed on objective table (305), three fixed blocks（304）Bottom plate is fixed on by screw（303）On, described objective table
（305）With contiguous block（301）It is connected by screw, described six-freedom worktable（3）Bottom plate is fixed on by screw（7）
On, vacuum cup（306）Objective table is fixed on by screw（305）On.Adjusting means includes six degree of freedom workbench（3）、
Generating laser（407）, laser pickoff（602）With grating rule displacement sensor（405）.Gluing substrate is placed in workbench
（6）Groove in, and by piece pressing clip（603）Clamp, carry out alignment and be adjacent to.Vacuum cup on imprinting apparatus（406）Adsorb
Template, workbench is fixed on by the substrate for scribbling photoresist（6）On.Generating laser（407）Signal is sent, via laser pick-off
Device (602), which is received, feeds back to six degree of freedom workbench（3）.Hydraulic stem（302）Carrying out corresponding stretch makes six degree of freedom work
Platform（3）Multi-angle is swung, so that gluing substrate and template alignment.After alignment is finished, six degree of freedom workbench（3）Upper liquid
Depression bar（302）Elongation moves up platform, via grating rule displacement sensor（405）Template is adjacent to by regulation and control with substrate.
As shown in figure 4, described imprinting apparatus（4）, including inlet duct（401）, admission line（402）, obturator
（403）, support board（404）, grating rule displacement sensor（405）, vacuum cup（406）, generating laser（407）, small-scale liquid
Depression bar（408）, axle sleeve（409）And hydraulic stem（410）.Wherein support board（404）Pass through axle sleeve（409）It is fixed on obturator
（403）On.Generating laser（407）It is fixed by screws in support board（404）On.Vacuum cup（406）Fixed by screw
In support board（404）On.Grating rule displacement sensor（405）It is fixed by screws in obturator（403）On.Alignment is completed
Afterwards, impressing is come into effect.Vacuum cup（406）Stop absorption, template is stayed in into substrate.Now hydraulic stem（410）Upwards
Shrink, small-scale liquid depression bar（408）Elongation makes support board（404）Around axle sleeve（409）60 ° of rotation.Hydraulic stem（410）Elongation makes again
Obtain obturator（403）Template and substrate are covered on, the cavity of a closing is formed.Inlet duct（401）Air inlet, passes through gas
Body pressure implements impressing.
As shown in figure 5, described transmitting device（5）Including servomotor（501）, decelerator（502）, shaft coupling（503）、
Leading screw eyelid retractor（504）, sliding platform（505）, article carrying platform（506）, guide rail（507）, ball-screw（508）.Wherein, guide rail
（507）With shell（1）Inwall is connected by screw, leading screw eyelid retractor（504）With guide rail（507）It is connected by screw, loading is put down
Platform（506）It is made up, and is connected with sliding platform (505) by hole axle, article carrying platform of MULTILAYER COMPOSITE clear glass（506）On have
Four square through holes that may pass through（506a）.
As shown in fig. 6, described workbench（6）It is provided with fixing device（601）, laser pickoff（602）, piece pressing clip
（603）.Pass through transmitting device（5）And workbench（6）Collective effect, it is possible to achieve the transmission to template and gluing substrate.When
After the completion of impressing, the transport to template and gluing substrate is carried out.Hydraulic stem（410）Shrink so that obturator（403）Move up one
Set a distance.Article carrying platform（506）Via servomotor（501）Control moves to workbench（6）Top.Six degree of freedom workbench
（3）Upper hydraulic stem（302）Elongation causes workbench（6）On fixing device（601）Through article carrying platform（506）On it is square logical
Hole（506a）.Now, fixing device（601）It is rotated by 90 °, by workbench（6）It is fixed on article carrying platform（506）On.Vacuum cup
（306）Stop absorption, then by servomotor（501）Control, by workbench（6）Move to uviol lamp（2）Under.
Solidification equipment is uviol lamp（2）, the pattern that impressing is completed can be solidified.
Once curing is completed, workbench（6）Via transmitting device（5）It is moved back to six degree of freedom workbench（3）Top.Vacuum
Sucker（306）Adsorb workbench（6）, fixing device（601）Reversely rotate 90 °, hydraulic stem（302）Shrink so that workbench
（6）Decline, fixing device（601）Through square through hole（506a）, and depart from article carrying platform (506).Article carrying platform (506) via
Workbench is left in servomotor (501) control（6）Top.Stripper apparatus includes six degree of freedom workbench（3）, imprinting apparatus
（4）On vacuum cup（406）And hydraulic stem（410）.Imprinting apparatus（4）Upper small-scale liquid depression bar（408）Shrink so that support board
（404）Rotate to and horizontal plane state.Now hydraulic stem（410）Extend and cause vacuum cup（406）Adsorb template.
Six degree of freedom workbench（3）Upper hydraulic stem（302）Carrying out certain contraction makes it be 4 ° with horizontal plane angle, and continues to shrink
Make workbench（6）Move down, hydraulic stem（410）Shrink upwards simultaneously, carry out the open-type demoulding.
Claims (5)
1. a kind of ultraviolet nanometer imprinting apparatus, it is characterised in that：Described ultraviolet nanometer imprinting apparatus include shell, uviol lamp,
Six degree of freedom workbench, imprinting apparatus, transmitting device, workbench and bottom plate, there is six degree of freedom workbench in shell, lead to
Cross screw to be fixed on bottom plate, have above six-freedom worktable above vacuum cup, vacuum cup absorption workbench, workbench
There is imprinting apparatus, be connected through a screw thread with shell, there is transmitting device on outer casing inner wall, be connected by screw with outer casing inner wall, passed
There is uviol lamp defeated device end.
2. the ultraviolet nanometer imprinting apparatus according to claim 1, it is characterised in that：Described six degree of freedom workbench
It is made up of contiguous block, hydraulic stem, bottom plate, fixed block, objective table, the bottom plate is connected by screw with fixed block, the hydraulic pressure
Bar is connected through a screw thread with fixed block and contiguous block, and three contiguous blocks are fixed on objective table by screw, three fixed blocks
It is fixed on by screw on bottom plate, described six-freedom worktable is fixed on bottom plate by screw, and vacuum cup passes through spiral shell
Nail is fixed on objective table.
3. the ultraviolet nanometer imprinting apparatus according to claim 1, it is characterised in that：Described imprinting apparatus includes air inlet
Device, admission line, obturator, support board, grating rule displacement sensor, vacuum cup, generating laser, small-sized hydraulic
Bar, axle sleeve and hydraulic stem, wherein support board are connected with axle sleeve by pin, and generating laser is connected by screw with support board,
Vacuum cup is fixed on support board by screw, and grating rule displacement sensor is fixed by screws on obturator.
4. the ultraviolet nanometer imprinting apparatus according to claim 1, it is characterised in that：Described transmitting device includes servo
Motor, decelerator, shaft coupling, leading screw eyelid retractor, sliding platform, article carrying platform, guide rail, ball-screw, wherein, guide rail and shell
Inwall is connected by screw, and leading screw eyelid retractor is connected by screw with guide rail, and article carrying platform is made up of MULTILAYER COMPOSITE clear glass,
And be connected with sliding platform by hole axle, article carrying platform has four square through holes that may pass through.
5. the ultraviolet nanometer imprinting apparatus according to claim 1, it is characterised in that：Described workbench is provided with fixation
Device, laser pickoff and piece pressing clip.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621430939.2U CN206348588U (en) | 2016-12-26 | 2016-12-26 | A kind of ultraviolet nanometer imprinting apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621430939.2U CN206348588U (en) | 2016-12-26 | 2016-12-26 | A kind of ultraviolet nanometer imprinting apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206348588U true CN206348588U (en) | 2017-07-21 |
Family
ID=59317451
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621430939.2U Expired - Fee Related CN206348588U (en) | 2016-12-26 | 2016-12-26 | A kind of ultraviolet nanometer imprinting apparatus |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206348588U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107479324A (en) * | 2017-08-31 | 2017-12-15 | 无锡英普林纳米科技有限公司 | A kind of nano-imprinting apparatus that can carry out air circulation |
| CN107479325A (en) * | 2017-08-31 | 2017-12-15 | 无锡英普林纳米科技有限公司 | A kind of suction type nano-imprinting apparatus |
| CN107632496A (en) * | 2017-08-31 | 2018-01-26 | 无锡英普林纳米科技有限公司 | A kind of nano-imprinting apparatus using positioning mechanism |
| CN113031391A (en) * | 2021-03-05 | 2021-06-25 | 中国科学院光电技术研究所 | Simple ultraviolet nano-imprint lithography device |
-
2016
- 2016-12-26 CN CN201621430939.2U patent/CN206348588U/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107479324A (en) * | 2017-08-31 | 2017-12-15 | 无锡英普林纳米科技有限公司 | A kind of nano-imprinting apparatus that can carry out air circulation |
| CN107479325A (en) * | 2017-08-31 | 2017-12-15 | 无锡英普林纳米科技有限公司 | A kind of suction type nano-imprinting apparatus |
| CN107632496A (en) * | 2017-08-31 | 2018-01-26 | 无锡英普林纳米科技有限公司 | A kind of nano-imprinting apparatus using positioning mechanism |
| CN113031391A (en) * | 2021-03-05 | 2021-06-25 | 中国科学院光电技术研究所 | Simple ultraviolet nano-imprint lithography device |
| CN113031391B (en) * | 2021-03-05 | 2023-06-30 | 中国科学院光电技术研究所 | Simple ultraviolet nanoimprint lithography device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170721 Termination date: 20171226 |