CN107479336A - A kind of precise positioning work table - Google Patents
A kind of precise positioning work table Download PDFInfo
- Publication number
- CN107479336A CN107479336A CN201710822444.7A CN201710822444A CN107479336A CN 107479336 A CN107479336 A CN 107479336A CN 201710822444 A CN201710822444 A CN 201710822444A CN 107479336 A CN107479336 A CN 107479336A
- Authority
- CN
- China
- Prior art keywords
- sliding seat
- platform
- work table
- precise positioning
- positioning work
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 abstract description 5
- 230000000694 effects Effects 0.000 abstract description 4
- 238000000034 method Methods 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000001127 nanoimprint lithography Methods 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70716—Stages
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25H—WORKSHOP EQUIPMENT, e.g. FOR MARKING-OUT WORK; STORAGE MEANS FOR WORKSHOPS
- B25H1/00—Work benches; Portable stands or supports for positioning portable tools or work to be operated on thereby
- B25H1/14—Work benches; Portable stands or supports for positioning portable tools or work to be operated on thereby with provision for adjusting the bench top
- B25H1/18—Work benches; Portable stands or supports for positioning portable tools or work to be operated on thereby with provision for adjusting the bench top in inclination
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Machine Tool Units (AREA)
Abstract
The invention discloses a kind of precise positioning work table, including base, sliding seat and platform, platform is positioned at the top of sliding seat, the sliding seat of gig is above base, the direction that product conveys is defined as front, sliding seat is provided with the movable moving drive mechanism of driving sliding seat, and the lower section of platform is provided with supporting mechanism；Moving drive mechanism includes baffle plate, screw mandrel and motor, and baffle plate is fixed on the rear end of base, and motor is fixed on baffle plate, and one end of screw mandrel and the output axis connection of motor, the other end of screw mandrel are threadedly coupled with sliding seat.The present invention is not only rational in infrastructure, without manually adjusting levelness, improves production and processing efficiency, and plays anti-skidding effect, improves the accuracy of its processing.
Description
Technical field
The invention belongs to mechanical scanning technical field, more particularly to a kind of precise positioning work table.
Background technology
Nano-device can be widely applied to electronics, optics, micro-mechanical device, novel computer etc., be current new material
With research field most dynamic in new device research field, and the master of component miniaturization, intelligent, highly integrated etc.
Flow developing direction.Nano imprint lithography is a kind of brand-new nano graph clone method, and its advantage is fairly obvious, is had strong
Big competitiveness, the bright prospects of nano-device production are fundamentally illustrated, therefore in the end of the year 2003 by international semiconductor blueprint
Mechanism is planned to the key technology of 32 nanometer nodes photoetching processes of future generation.
Vibration amplitude is larger in the course of the work for the workbench of prior art, has had a strong impact on the essence of table positions processing
Degree, the depth of parallelism of workbench are difficult to adjust, levelling comparatively laborious manually, human factor be present, influence to produce and process quality.
The content of the invention
It is not only rational in infrastructure the present invention solves the technical problem of a kind of precise positioning work table of offer, without people
Work adjusts levelness, improves production and processing efficiency, and plays anti-skidding effect, improves the accuracy of its processing.
In order to solve the above technical problems, one aspect of the present invention is：A kind of precise positioning work table, including
Base, sliding seat and platform, the platform be positioned at the top of the sliding seat, the sliding seat of gig above the base,
The direction that product conveys is defined as front, the sliding seat is provided with the mobile driving machine for driving the sliding seat movable
Structure, the lower section of the platform are provided with supporting mechanism；
The moving drive mechanism includes baffle plate, screw mandrel and motor, and the baffle plate is fixed on the rear end of the base,
The motor is fixed on the baffle plate, one end of the screw mandrel and the output axis connection of the motor, the screw mandrel
The other end be threadedly coupled with the sliding seat；
The supporting mechanism is provided with four, and the supporting mechanism is symmetrically distributed in the surrounding of the platform, the support
Mechanism includes piezoelectric actuator and flexible support, and the piezoelectric actuator is fixed on sliding seat, the flexible support
One end be connected with sliding seat, and the other end of the flexible support is connected with the platform；
The upper surface of the platform is provided with anti-skid bulge, and the anti-skid bulge includes the small raised of center and several are big convex
Rise, the big projection is positioned at the small raised periphery and is uniformly distributed.
Further say, the flexible support includes upper end, bottom and connects the upper end and the bottom
Flexible sheets.
Further say, the upper surface of the base is provided with guide rail, and fore-and-aft direction of the guide rail along the base
Set, the lower surface of the sliding seat is provided with the structure that matches with the guide rail so that the sliding seat is along the guide rail
Move in direction.
Further say, the cross section of the guide rail is rectangle, trapezoidal or semicircle.
Further say, the sliding seat has screw, and the inner surface of the screw is provided with the external screw thread with the screw mandrel
The internal thread to match.
Further say, the big raised height is more than the small raised height.
The beneficial effects of the invention are as follows：
The supporting mechanism of the present invention is provided with four, and supporting mechanism is symmetrically distributed in the surrounding of platform, and supporting mechanism includes
Piezoelectric actuator and flexible support, the levelness of platform is adjusted by piezoelectric ceramics brake, it is rational in infrastructure, reduce processing
During caused vibration, without manually adjusting levelness, improve production and processing efficiency；
The upper surface of platform is provided with anti-skid bulge, and anti-skid bulge includes small raised and several big projections at center, big convex
Rise positioned at small raised periphery and be uniformly distributed, play anti-skidding effect, product is put among platform, and big projection can prevent product
Drop, improve the accuracy of platform processing.
Brief description of the drawings
Fig. 1 is the structural representation of the present invention；
Each several part mark is as follows in accompanying drawing：
Base 1, sliding seat 2, guide rail 21, platform 3, small by raised 31, big by raised 32, moving drive mechanism 4, baffle plate 41, silk
Bar 42, motor 43, supporting mechanism 5, piezoelectric actuator 51, upper end 52, bottom 53 and flexible sheets 54.
Embodiment
Presently preferred embodiments of the present invention is described in detail below in conjunction with the accompanying drawings, so that advantages and features of the invention energy
It is easier to be readily appreciated by one skilled in the art, apparent is clearly defined so as to be made to protection scope of the present invention.
Embodiment：A kind of precise positioning work table, as shown in figure 1, including base 1, sliding seat 2 and platform 3, the platform
3 be to be defined as the direction that product conveys positioned at the top of base 1 positioned at the top of the sliding seat 2, the sliding seat 2
Front, the sliding seat 2 are provided with the moving drive mechanism 4 for driving the sliding seat 2 movable, and the lower section of the platform 3 is set
There is supporting mechanism 5；
The moving drive mechanism 4 includes baffle plate 41, screw mandrel 42 and motor 43, and the baffle plate 41 is fixed on the bottom
The rear end of seat 1, the motor 43 are fixed on the baffle plate 41, and one end of the screw mandrel 42 is defeated with the motor 43
Go out axis connection, the other end of the screw mandrel 42 is threadedly coupled with the sliding seat 2；
The supporting mechanism 5 is provided with four, and the supporting mechanism 5 is symmetrically distributed in the surrounding of the platform 3, the branch
Support mechanism 5 includes piezoelectric actuator 51 and flexible support, and the piezoelectric actuator 51 is fixed on sliding seat 2, described
One end of flexible support is connected with sliding seat 2, and the other end of the flexible support is connected with the platform 3；
The upper surface of the platform 3 is provided with anti-skid bulge, the anti-skid bulge include center small raised 31 and several
Big projection 32, described big raised 32 is located at described small raised 31 periphery and is uniformly distributed.
The flexible support includes upper end 52, bottom 53 and connects the soft of the upper end 52 and the bottom 53
Property piece 54.
The upper surface of the base 1 is provided with guide rail 21, and fore-and-aft direction of the guide rail along the base 1 is set, institute
The lower surface for stating sliding seat 2 is provided with the structure to match with the guide rail so that direction of the sliding seat 2 along the guide rail
It is mobile.
The cross section of the guide rail is rectangle, trapezoidal or semicircle.
The sliding seat 2 has screw, and the inner surface of the screw is provided with what is matched with the external screw thread of the screw mandrel 42
Internal thread.
Big raised 32 height is more than small raised 31 height.
The operation principle of the present invention is as follows：The present invention supporting mechanism be provided with four, and supporting mechanism be symmetrically distributed in it is flat
The surrounding of platform, supporting mechanism include piezoelectric actuator and flexible support, and the water of platform is adjusted by piezoelectric ceramics brake
Pingdu, it is rational in infrastructure, without manually adjusting levelness, improve production and processing efficiency；
The upper surface of platform is provided with anti-skid bulge, and anti-skid bulge includes small raised and several big projections at center, big convex
Rise positioned at small raised periphery and be uniformly distributed, play anti-skidding effect, product is put among platform, and big projection can prevent product
Drop, improve the accuracy of platform processing.
Embodiments of the invention are the foregoing is only, are not intended to limit the scope of the invention, it is every to utilize this hair
The equivalent structure transformation that bright specification and accompanying drawing content are made, or other related technical areas are directly or indirectly used in,
Similarly it is included within the scope of the present invention.
Claims (6)
- A kind of 1. precise positioning work table, it is characterised in that：It is including base (1), sliding seat (2) and platform (3), the platform Positioned at the top of the sliding seat, the sliding seat of gig is defined as front, institute above the base, by the direction that product conveys State sliding seat and be provided with the moving drive mechanism (4) for driving the sliding seat movable, the lower section of the platform is provided with support machine Structure (5)；The moving drive mechanism includes baffle plate (41), screw mandrel (42) and motor (43), the baffle plate and is fixed on the bottom The rear end of seat, the motor are fixed on the baffle plate, one end of the screw mandrel and the output axis connection of the motor, The other end of the screw mandrel is threadedly coupled with the sliding seat；The supporting mechanism is provided with four, and the supporting mechanism is symmetrically distributed in the surrounding of the platform, the supporting mechanism Including piezoelectric actuator (51) and flexible support, the piezoelectric actuator is fixed on sliding seat, the flexible support One end be connected with sliding seat, and the other end of the flexible support is connected with the platform；The upper surface of the platform is provided with anti-skid bulge, and the anti-skid bulge includes small raised (31) at center and several are convex greatly Rise (32), the big projection is positioned at the small raised periphery and is uniformly distributed.
- A kind of 2. precise positioning work table according to claim 1, it is characterised in that：The flexible support includes upper end (52), bottom (53) and the flexible sheets (54) of the connection upper end and the bottom.
- A kind of 3. precise positioning work table according to claim 1, it is characterised in that：The upper surface of the base is provided with and led Rail (21), and fore-and-aft direction of the guide rail along the base is set, the lower surface of the sliding seat is provided with and the guide rail The structure to match is so that direction of the sliding seat along the guide rail is moved.
- A kind of 4. precise positioning work table according to claim 3, it is characterised in that：The cross section of the guide rail is square It is shape, trapezoidal or semicircle.
- A kind of 5. precise positioning work table according to claim 1, it is characterised in that：The sliding seat has screw, institute The inner surface for stating screw is provided with the internal thread to match with the external screw thread of the screw mandrel.
- A kind of 6. precise positioning work table according to claim 1, it is characterised in that：The big raised height is more than institute State small raised height.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710822444.7A CN107479336B (en) | 2017-09-13 | 2017-09-13 | Accurate positioning workbench |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710822444.7A CN107479336B (en) | 2017-09-13 | 2017-09-13 | Accurate positioning workbench |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107479336A true CN107479336A (en) | 2017-12-15 |
| CN107479336B CN107479336B (en) | 2024-03-05 |
Family
ID=60584830
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710822444.7A Active CN107479336B (en) | 2017-09-13 | 2017-09-13 | Accurate positioning workbench |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107479336B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113059537A (en) * | 2021-02-26 | 2021-07-02 | 佛山市华道超精科技有限公司 | Flexible hinge mechanism, ultra-precise linear motion platform and double-workpiece workbench |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2799732Y (en) * | 2005-05-08 | 2006-07-26 | 王群 | Floor with foot massage function |
| CN201624188U (en) * | 2010-01-19 | 2010-11-10 | 陆年学 | Portable anti-skidding shoe cover |
| CN102819186A (en) * | 2012-09-07 | 2012-12-12 | 天津大学 | 3T1R four-degrees-of-freedom precise location workbench |
| CN204893434U (en) * | 2015-04-04 | 2015-12-23 | 浙江师范大学 | Grand little positioning table of asymmetric piezoelectricity driven |
| CN205254260U (en) * | 2016-01-05 | 2016-05-25 | 湖北唯思凌科装备制造有限公司 | Outer spline machining lathe of auto steering ware input shaft |
| CN205737252U (en) * | 2016-07-04 | 2016-11-30 | 徐州徐工挖掘机械有限公司 | A kind of antiskid pedal being applicable to quarry tipper |
-
2017
- 2017-09-13 CN CN201710822444.7A patent/CN107479336B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2799732Y (en) * | 2005-05-08 | 2006-07-26 | 王群 | Floor with foot massage function |
| CN201624188U (en) * | 2010-01-19 | 2010-11-10 | 陆年学 | Portable anti-skidding shoe cover |
| CN102819186A (en) * | 2012-09-07 | 2012-12-12 | 天津大学 | 3T1R four-degrees-of-freedom precise location workbench |
| CN204893434U (en) * | 2015-04-04 | 2015-12-23 | 浙江师范大学 | Grand little positioning table of asymmetric piezoelectricity driven |
| CN205254260U (en) * | 2016-01-05 | 2016-05-25 | 湖北唯思凌科装备制造有限公司 | Outer spline machining lathe of auto steering ware input shaft |
| CN205737252U (en) * | 2016-07-04 | 2016-11-30 | 徐州徐工挖掘机械有限公司 | A kind of antiskid pedal being applicable to quarry tipper |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113059537A (en) * | 2021-02-26 | 2021-07-02 | 佛山市华道超精科技有限公司 | Flexible hinge mechanism, ultra-precise linear motion platform and double-workpiece workbench |
| CN113059537B (en) * | 2021-02-26 | 2022-07-15 | 佛山市华道超精科技有限公司 | Flexible hinge mechanism, ultra-precise linear motion platform and double-workpiece workbench |
Also Published As
| Publication number | Publication date |
|---|---|
| CN107479336B (en) | 2024-03-05 |
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