CN102323720B - Flexible micro-positioning platform based on driving of piezoelectric ceramics - Google Patents
Flexible micro-positioning platform based on driving of piezoelectric ceramics Download PDFInfo
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Abstract
The invention discloses a flexible micro-positioning platform based on the driving of piezoelectric ceramics, and is characterized in that the platform comprises a mobile platform, a rigid supporting bracket, three flexible branch chains, a pedestal, and three piezoelectric ceramic drivers; the mobile platform is located at the center position of the rigid supporting bracket; the rigid supporting bracket is used to support the three flexible branch chains and the mobile platform connected with the bracket, and is rigidly connected with the pedestal; the three flexible branch chains have rectangular profiles, and completely same structures, and are uniformly distributed inside the rigid supporting bracket in a circumferential direction; each flexible branch chain comprises eight flexible hinges with a single degree of freedom, wherein four flexible hinges with a single degree of freedom are distributed on a inner-side crossbeam of the rectangular flexible branch chain, and the other four flexible hinges with a single degree of freedom are distributed on a outer-side crossbeam of the rectangular flexible branch chain; the distribution positions of the flexible hinges with a single degree of freedom on the inner-side and outer-side crossbeams correspond to each other; the three piezoelectric ceramic drivers are mounted between connecting beams of the left and right ends of the three flexible branch chains respectively. The positioning platform has high resolution, and high dynamic response speed.
Description
Technical field
The invention belongs to a kind of micro OS of mechanical field, be specially a kind of flexible micro-positioning platform based on Piezoelectric Ceramic.This mini positioning platform has Three Degree Of Freedom, can realize two rectilinear translation actions and a rotational action, is mainly used in imprint lithography system.
Background technology
Nano imprint lithography is a kind of brand-new nano graph clone method, its advantage is fairly obvious, has powerful competitive power, fundamentally show the bright prospects that nano-device is produced, be planned to the gordian technique of 32 nanometer nodes photoetching processes of future generation in the end of the year 2003 by international semiconductor blueprint mechanism.
Locating platform or worktable are the key components of conventional lithography system always.Existing precisely locating platform for etching system adopts air-flotation system more, driven by linear stepping motor, as check an ancient unit of weight and give birth to, the precise positioning work table of using in the X-ray lithography machine (aviation Precision Manufacturing Technology, 3 phases of 34 volumes in 1998,10～12) the Luo Si pula nail (unit of length) litho machine of introducing in and Zhu Yu etc., litho machine ultra precise workbench research (electronics industry specialized equipment, 109 phases in 2004,25～27) the middle domestic first set air supporting precise positioning work table of introducing.The precision positioning mechanism actuating speed of ball bearing type curtain rail and the combining form of threaded screw rod driving mechanism is difficult to reach the rate request of etching system worktable, and range of application is restricted.And adopt stepper motor to drive by friction mechanism, driven the Precision Position Location System of worktable by spherical guide, be difficult to overcome motion intermittently, low speed jerking motion and vibration at high speed, mechanically stable Time Created is long, can't reach the high disadvantages such as motion positions precision.Lee Deug Woo etc., research (the Lee Deug Woo that is used for the Automatic Alignment System of nano-imprint lithography process, Lee Chae Moon, Chee Dong Hwan.A study on auto alignment system of Nanoimprint Lithography (NIL) process.Proceedings of the 1
StInternational Conference on Positioning Technology Japan:Hamamatsu, 2004.97 the hemispheric air bearing marking press of introducing～101) utilizes the draught damper controlled pressure, realize the depth of parallelism adjustment of wafer-supporting platform by hemispheric air bearing, cost is low, simple in structure, has much room for improvement but adjust precision.In addition, adopt the novel precise positioning system of piezoelectric ceramics and linear electric motors combination flooding flowing mode, although effectively raise the bearing accuracy of nano impression equipment, reduced the system stability time, but passive mode is all adopted in the depth of parallelism adjustment of end-effector in the existing Embosser, the elastic deformation that namely produces in moulding process by flexible material realizes the self-adaptation adjustment of wafer-supporting platform pose, limited the raising of impression precision and quality, such as B.J.Choi etc., the design of stepping flash imprint lithography locating platform, (B.J.Choi, S.V.Sreenivasan, S.Jonhson, M.Colburn, C.G.Wilson, Design of orientation stage for step and flash imprint lithography, Precision Engineering, 2001,25 (3): 192-199.), Jae-Jong Lee etc., design and analysis (Jae-Jong Lee for the preparation of the nano-imprint lithography equipment of 100nm live width feature, Kee-Bong Choi, Gee-Hong Kim, Design and analysis of the single-step nanoimprinting lithography equipment for sub-100nm linewidth, Current Applied Physics 2006 has just reported equipment and the correlation technique of this type in 6:1007-1011.).Also some researcher adopts the mode that passive adaptation, active levelling and manual setting combine, as: the thin autumn of model etc., development (the China Mechanical Engineering of the high alignment precision nano impression of wide region model machine, 2005,16 volume supplementary issues, 64-67), Yan Le etc., development (the China Mechanical Engineering of cold blocking photoetching process precise positioning work table, 2004,1 phase of 15 volumes, 75-78) this type of precise positioning work table design of middle report; Other researchers then ward off new footpath in addition, such as, Dong Xiaowen etc., the design of Bellows Cylinder Type UV Nanoimprint Lithography System (semiconductor optoelectronic,, 5 phases of 28 volumes, 676-684) the middle technology of introducing in 2007.In addition, each large imprint lithography apparatus commercial undertaking development aspect the development of nano impression positioning system of the whole world is also obvious to all.2008, European informationization technology research committee develop first generation bussiness class ultraviolet nanometer imprint lithography apparatus.October in the same year, world-leading nano-imprinting apparatus supplier SUSS declaration, its manual litho machine adds a nano impression assembly, just can repeat to large-area graphs the impression of sub-50 nm.
In sum, the existing precise positioning work table that is used for nano-imprint lithography technique adopts self-adaptation to adjust structure more, namely realize the pose adjustment of plummer in the moulding process based on the elastic property of material itself, although it is simple in structure, compact and with low cost that self-adaptation is adjusted exquisite system, but its bearing accuracy, especially the adjustment precision of the depth of parallelism is lower, has limited the raising of machining precision and quality.Although and the other precision positioning mechanism has been introduced active accommodation mechanism, but still adopt the piezoelectric ceramics direct drive mode to only have the part degree of freedom to realize adjustment initiatively, and the method also is subject to compensating the restriction of parallelism error in the moulding process.Therefore, the bearing accuracy that adopts the active accommodation Precision Position Location System to improve in the moulding process realizes that effective parallelism error compensation is the work with challenge meaning, has wide scientific research and application prospect.
Summary of the invention
For the deficiencies in the prior art, the technical matters that quasi-solution of the present invention is determined is that a kind of flexible micro-positioning platform based on Piezoelectric Ceramic is provided.This locating platform has Three Degree Of Freedom, can realize two rectilinear translation actions and a rotational action, and has the characteristics such as high rigidity, high precision, low inertia, compact conformation, error free accumulation, machinery-free friction, gapless.
The technical scheme that the present invention solve the technical problem is: design a kind of flexible micro-positioning platform based on Piezoelectric Ceramic, it is characterized in that this locating platform mainly comprises a moving platform, three flexible side chains, three piezoelectric ceramic actuators, a rigid cage and a base;
Described rigid cage is the inequilateral hexagonal-shaped frame, comprises that rigid cage is screwed with described base and is connected along three long margin frame framves and three minor face frameworks of circumferentially interval setting; Described moving platform is triangular structure, is installed in the center of described rigid cage, and three corner positions of moving platform are connected with the inboard crossbeam point midway of described three flexible side chains respectively; The outside crossbeam point midway of three flexible side chains is rigidly connected with rigid cage respectively; Described flexible side chain is rectangular configuration, the structure of three flexible side chains is identical, be installed in respectively between three long margin frame framves of described moving platform and rigid cage, and three long margin frame frame center lines of rigid support overlap with the left-right symmetric line of three flexible side chains; Three left-right symmetric lines of three flexible side chains are parallel with three limits of Triangle platform respectively simultaneously;
The inboard crossbeam of each flexible side chain has first group of semicircle groove from left to right successively, second group of semicircle groove, the 3rd group of semicircle groove and the 4th group of semicircle groove, upper and lower two semicircle grooves of each group are symmetrically distributed on the upper/lower terminal face of inboard crossbeam, first group of semicircle groove is consistent with the groove shapes of the 4th group of semicircle groove, and distribute with respect to the center line left-right symmetric of inboard crossbeam, and the depth of groove of the depth of groove of described first group of semicircle groove and the 4th group of semicircle groove is the dark of upper surface, lower surface shallow; Second group of semicircle is consistent with the groove shapes of the 3rd group of semicircle groove, and distributes with respect to the center line left-right symmetric of inboard crossbeam; And the depth of groove of the depth of groove of described second group of semicircle groove and the 3rd group of semicircle groove is the shallow of upper surface, lower surface dark; As a same reason, have successively from right to left the 5th group of semicircle groove on the outside crossbeam of each flexible side chain, the 6th group of semicircle groove, the 7th group of semicircle groove and the 8th group of semicircle groove, upper and lower two semicircle grooves of each group are symmetrically distributed on the upper/lower terminal face of outside crossbeam, the 5th group of semicircle groove is consistent with the groove shapes of the 8th group of semicircle groove, and distribute with respect to the center line left-right symmetric of outside crossbeam, and the depth of groove of the depth of groove of described the 5th group of semicircle groove and the 8th group of semicircle groove is the shallow of upper surface, lower surface dark; Described the 6th group of semicircle groove is consistent with the groove shapes of the 7th group of semicircle groove, and distribute with respect to the center line left-right symmetric of outside crossbeam, and the depth of groove upper surface of the depth of groove of described the 6th group of semicircle groove and the 7th group of semicircle groove is dark, lower surface shallow;
Described three piezoelectric ceramic actuators are installed in respectively between the tie-beam of three flexible side chain arranged on left and right sides, the left end of piezoelectric ceramic actuator withstands on the center, right side of flexible side chain left side tie-beam, and its right-hand member withstands on the center, left side of flexible side chain right side tie-beam;
Described base is not wait the hexagonal-shaped frame structure, also comprises along three base long margin frame framves and three base minor face frameworks of circumferentially interval setting; During installation, base by thread is rigidly secured to the below of described rigid cage, three long margin frame framves and three the minor face frameworks with rigid cage are corresponding one by one respectively with three base minor face frameworks for its three base long margin frame framves, and guarantee that its inside edge aligns with the inside edge of rigid cage.
Compared with prior art, flexible micro-positioning platform of the present invention has following advantage:
1. adopt the flexible parallel connection structure, have the advantages such as high rigidity, high precision, low inertia, compact conformation, error free accumulation.
2. based on the elastic deformation of single-freedom and flexible hinge, the variation of hinge corner and the executor tail end work space that produce are all very small, can effectively eliminate the shortcomings such as parallel institution unintentional nonlinearity.
3. has Three Degree Of Freedom, can realize two rectilinear translation actions and a rotational action, and resolution is high, rapid dynamic response speed, can be used as the auxiliary positioning platform of nano-imprint lithography positioning system, adopt piezoelectric ceramic actuator to promote to drive link, can realize active accommodation, microfeed and the precision positioning of relative position between template and substrate in the nano-imprint lithography process.
Description of drawings
Fig. 1 is the one-piece construction schematic diagram that the present invention is based on a kind of embodiment of flexible micro-positioning platform of Piezoelectric Ceramic;
Fig. 2 is the flexible branched structure schematic diagram that the present invention is based on a kind of embodiment of flexible micro-positioning platform of Piezoelectric Ceramic;
Fig. 3 is the rigid base schematic diagram that the present invention is based on a kind of embodiment of flexible micro-positioning platform of Piezoelectric Ceramic;
Fig. 4 is the diagrammatic cross-section that the present invention is based on a kind of embodiment of flexible micro-positioning platform flexible branched structure shown in Figure 2 of Piezoelectric Ceramic.
Embodiment
Below in conjunction with embodiment and accompanying drawing thereof, technical solution of the present invention is described in further details.
Simply say, locating platform of the present invention is characterised in that, it comprises moving platform, rigid cage, three flexible side chains, base and three piezoelectric ceramic actuators, moving platform is positioned at the rigid cage center, rigid cage is used for supporting three flexible side chains and continuous moving platform thereof, and being rigidly connected of realization and base, three flexible side chain external forms are rectangular, structure is identical, and along circumferentially being evenly distributed on rigid cage inside, each flexible side chain all comprises eight single-freedom and flexible hinges, wherein four single-freedom and flexible hinges are distributed on the inboard crossbeam of the flexible side chain of rectangle, four single-freedom and flexible hinges are distributed on the crossbeam of the flexible side chain of the rectangle outside in addition, the distributing position of single-freedom and flexible hinge is corresponding one by one on inside and outside two crossbeams, and three piezoelectric ceramic actuators are installed in respectively between the tie-beam at two ends, the left and right sides of three flexible side chains.
Specifically, the flexible micro-positioning platform based on Piezoelectric Ceramic of the present invention's design (is called for short locating platform, referring to Fig. 1-4), it is characterized in that this locating platform mainly comprises a moving platform 1, three flexible side chains 2, three piezoelectric ceramic actuators 3, a rigid cage 6 and a base 4.
Described rigid cage 6 is the inequilateral hexagonal-shaped frame, comprise along three long margin frame framves 62 and three minor face frameworks 63 of circumferentially interval setting, the angle that each bar long margin frame frame 62 of embodiment is adjacent between a side (right side) the minor face framework is 98.5 °, the angle that is adjacent between opposite side (left side) the minor face framework is 141.5 °, the point midway of each bar frame edge has an edge of the same size through hole 61, and rigid cage 6 is fixedly connected with described base 4 usefulness screws 5 by described six edge through holes 61; Described moving platform 1 is triangular structure, be installed in the center of described rigid cage 6, three corner positions of moving platform 1 are connected with inboard crossbeam (near the crossbeam of moving platform 1 or the rigid cage 6 centers one side) point midway of described three flexible side chains 2 respectively; The outside crossbeam of three flexible side chains 2 (away from the crossbeam of moving platform 1 or rigid cage 6 centers one side) point midway is rigidly connected with rigid cage 6 respectively; Described flexible side chain 2 is rectangular configuration, the structure of three flexible side chains 2 is identical, be installed in respectively between three long margin frame framves of described moving platform 1 and rigid cage 6, described three flexible side chains 2 evenly distribute along the circumferential direction of the rigid cage 6 of hexagonal-shaped frame in other words, angle in twos is 120 °, and three long margin frame frame center lines of rigid cage 6 overlap with the left-right symmetric line of three flexible side chains 2; Three left-right symmetric lines of three flexible side chains 2 are parallel with three limits of Triangle platform 1 respectively simultaneously.
Three flexible side chains 2 of the present invention (referring to Fig. 1,2,4) shape and structure is identical, be installed between rigid cage 6 and the described moving platform 1 along described three long margin frame framves 62, inboard crossbeam center and the described moving platform 1 of each flexible side chain 2 are rigidly connected; The crossbeam center, the outside of each flexible side chain 2 and described long margin frame frame 62 inboard centers are rigidly connected; The inboard crossbeam of each flexible side chain 2 has first group of semicircle groove 21 from left to right successively, second group of semicircle groove 22, the 3rd group of semicircle groove 23 and the 4th group of semicircle groove 24, upper and lower two semicircle grooves of each group are symmetrically distributed on the upper/lower terminal face of inboard crossbeam, first group of semicircle groove 21 is consistent with the groove shapes of the 4th group of semicircle groove 24, and distribute with respect to the center line left-right symmetric of inboard crossbeam, and the depth of groove of the depth of groove of described first group of semicircle groove 21 and the 4th group of semicircle groove 24 is the dark of upper surface, lower surface shallow; Second group of semicircle groove 22 is consistent with the groove shapes of the 3rd group of semicircle groove 23, and distributes with respect to the center line left-right symmetric of inboard crossbeam; And the depth of groove of the depth of groove of described second group of semicircle groove 22 and the 3rd group of semicircle groove 23 is the shallow of upper surface, lower surface dark; As a same reason, have successively from right to left the 5th group of semicircle groove 25 on the outside crossbeam of each flexible side chain 2, the 6th group of semicircle groove 26, the 7th group of semicircle groove 27 and the 8th group of semicircle groove 28, each group upper, lower two semicircle grooves are symmetrically distributed in the upper of outside crossbeam, on the lower both ends of the surface, the 5th group of semicircle groove 25 is consistent with the groove shapes of the 8th group of semicircle groove 28, and distribute with respect to the center line left-right symmetric of outside crossbeam, and the depth of groove of the depth of groove of described the 5th group of semicircle groove 25 and the 8th group of semicircle groove 28 is the shallow of upper surface, lower surface dark; Described the 6th group of semicircle groove 26 is consistent with the groove shapes of the 7th group of semicircle groove 27, and distribute with respect to the center line left-right symmetric of outside crossbeam, and the depth of groove upper surface of the depth of groove of described the 6th group of semicircle groove 26 and the 7th group of semicircle groove 27 is dark, lower surface shallow.
Three piezoelectric ceramic actuators 3 of the present invention are installed in respectively between the tie- beam 29,20 of described three flexible side chain 2 arranged on left and right sides, the left end of described piezoelectric ceramic actuator 3 withstands on the center, right side of flexible side chain 2 left side tie-beams 29, and its right-hand member withstands on the center, left side of flexible side chain 2 right side tie-beams 20.In the course of work, described piezoelectric ceramic actuator 3 separates with described flexible side chain 2, during installation, adopt interference fit method, utilize the elastic properties of materials characteristic, described piezoelectric ceramic actuator 3 is pressed between the tie- beam 29,20 of the left and right sides of flexible side chain 2, and stable the compression.
Further feature of the present invention is a described moving platform 1, three flexible side chains 2 and the rigid cage 6 and connect and adopt the disposable acquisition of whole processing mode (referring to Fig. 4) of.This will be conducive to improve the precision of locating platform itself, and significantly cut down finished cost.
Locating platform of the present invention can be used as the auxiliary positioning platform of nano-imprint lithography positioning system, realizes microfeed and precision positioning in the nano impression process.But do not get rid of in other positioning systems that are applied to the similar techniques requirement.
Mini positioning platform of the present invention can be realized the active accommodation of two translational degree of freedom of x-y-θ z and a rotational freedom.For its working method is described, at first set the x axle, the y axle is positioned at surface level, the center that makes moving platform 1 is the initial point of coordinate system, the direction of getting any one place, edge that is parallel to Triangle platform 1 is the x direction of principal axis, be the y axle along the direction perpendicular to this limit and mistake moving platform 1 center then, and the z axle is perpendicular to the x axle, the plane that the y axle forms, and the three satisfies right-hand rule.
The course of work of mini positioning platform of the present invention is as follows:
Applying identical driving voltage drives simultaneously three piezoelectric ceramic actuators 3 its length is increased, transmission through eight grooves (being the single-freedom and flexible hinge) 21,22,23,24,25,26,27,28 on the flexible side chain 2, so that the inboard crossbeam of flexible side chain 2 approaches piezoelectric ceramic actuator 3 gradually, thereby drive the rotation that moving platform 1 is realized around the z direction.When the driving voltage that applies on three piezoelectric ceramic actuators 3 is removed by identical Changing Pattern, three piezoelectric ceramic actuators 3 gradually return to original length, so in the effect of material self elastic property, eight grooves (single-freedom and flexible hinge) 21,22,23,24,25,26,27,28 on the flexible side chain 2 restore to the original state gradually, drive flexible side chain 2 inboard crossbeams to the direction motion away from piezoelectric ceramic actuator 3, thereby drive the counter-rotation that moving platform 1 is realized around the z direction.
If only drive the piezoelectric ceramic actuator 3 vertical with the x axle its length is increased, two piezoelectric ceramic actuators 3 do not drive in addition, elastic deformation occurs in the flexible side chain on the relevant position 2 so, flexible side chain 2 inboard crossbeams drive the translation that moving platform 1 is realized in the x-direction towards piezoelectric ceramic actuator 3 direction approximations.Perhaps, simultaneously applying identical driving voltage with two piezoelectric ceramic actuators 3 of x axle off plumb, another piezoelectric ceramic actuator 3 does not drive, the elastic deformation of same case occurs in the flexible side chain 2 of two on the relevant position so, so that the displacement that the inboard crossbeam of two flexible side chains 2 all equates towards piezoelectric ceramic actuator 3 direction approximations then drives moving platform 1 and realizes along the reciprocal translation of x.
If only in driving and two piezoelectric ceramic actuators 3 of x axle off plumb increases its length, other two piezoelectric ceramic actuators 3 do not drive, then elastic deformation occurs in the flexible side chain on the correspondence position 2, flexible side chain 2 inboard crossbeams drive moving platform 1 and realize along y positive dirction or the reciprocal translation of y towards piezoelectric ceramic actuator 3 direction approximations.
The present invention does not address part and is applicable to prior art.
What need supplementary notes is, the installation position word of the parts such as description scheme of the present invention described " upper and lower ", " forward and backward ", " left and right " according to shown in the embodiment accompanying drawing or the custom, only has relativity, perhaps only be in order to narrate conveniently, not represent uniqueness and the indispensability of this installation site.
Claims (4)
1. the flexible micro-positioning platform based on Piezoelectric Ceramic is characterized in that this locating platform mainly comprises a moving platform, three flexible side chains, three piezoelectric ceramic actuators, a rigid cage and a base;
Described rigid cage is the inequilateral hexagonal-shaped frame, comprises that rigid cage is screwed with described base and is connected along three long margin frame framves and three minor face frameworks of circumferentially interval setting; Described moving platform is triangular structure, is installed in the center of described rigid cage, and three corner positions of moving platform are connected with the inboard crossbeam point midway of described three flexible side chains respectively; The outside crossbeam point midway of three flexible side chains is rigidly connected with rigid cage respectively; Described flexible side chain is rectangular configuration, the structure of three flexible side chains is identical, be installed in respectively between three long margin frame framves of described moving platform and rigid cage, and three long margin frame frame center lines of rigid cage overlap with the left-right symmetric line of three flexible side chains; Three left-right symmetric lines of three flexible side chains are parallel with three limits of Triangle platform respectively simultaneously;
The inboard crossbeam of each flexible side chain has first group of semicircle groove from left to right successively, second group of semicircle groove, the 3rd group of semicircle groove and the 4th group of semicircle groove, upper and lower two semicircle grooves of each group are symmetrically distributed on the upper/lower terminal face of inboard crossbeam, first group of semicircle groove is consistent with the groove shapes of the 4th group of semicircle groove, and distribute with respect to the center line left-right symmetric of inboard crossbeam, and the depth of groove of the depth of groove of described first group of semicircle groove and the 4th group of semicircle groove is the dark of upper surface, lower surface shallow; Second group of semicircle groove is consistent with the groove shapes of the 3rd group of semicircle groove, and distributes with respect to the center line left-right symmetric of inboard crossbeam; And the depth of groove of the depth of groove of described second group of semicircle groove and the 3rd group of semicircle groove is the shallow of upper surface, lower surface dark; As a same reason, have successively from right to left the 5th group of semicircle groove on the outside crossbeam of each flexible side chain, the 6th group of semicircle groove, the 7th group of semicircle groove and the 8th group of semicircle groove, upper and lower two semicircle grooves of each group are symmetrically distributed on the upper/lower terminal face of outside crossbeam, the 5th group of semicircle groove is consistent with the groove shapes of the 8th group of semicircle groove, and distribute with respect to the center line left-right symmetric of outside crossbeam, and the depth of groove of the depth of groove of described the 5th group of semicircle groove and the 8th group of semicircle groove is the shallow of upper surface, lower surface dark; Described the 6th group of semicircle groove is consistent with the groove shapes of the 7th group of semicircle groove, and distribute with respect to the center line left-right symmetric of outside crossbeam, and the depth of groove of the depth of groove of described the 6th group of semicircle groove and the 7th group of semicircle groove is the dark of upper surface, lower surface shallow;
Described three piezoelectric ceramic actuators are installed in respectively between the tie-beam of three flexible side chain arranged on left and right sides, the left end of piezoelectric ceramic actuator withstands on the center, right side of flexible side chain left side tie-beam, and its right-hand member withstands on the center, left side of flexible side chain right side tie-beam;
Described base is inequilateral hexagonal-shaped frame structure, also comprises along three base long margin frame framves and three base minor face frameworks of circumferentially interval setting; During installation, base by thread is rigidly secured to the below of described rigid cage, three long margin frame framves and three the minor face frameworks with rigid cage are corresponding one by one respectively with three base minor face frameworks for its three base long margin frame framves, and guarantee that its inside edge aligns with the inside edge of rigid cage.
2. the flexible micro-positioning platform based on Piezoelectric Ceramic according to claim 1, it is characterized in that the angle that each bar long margin frame frame of described rigid cage is adjacent between the side minor face framework is 98.5 °, and the angle between its opposite side adjacent short sides framework is 141.5 °; The angle that the described long margin frame frame of each of described base is adjacent between the side minor face framework is 98.5 °, and the angle that is adjacent between the opposite side minor face framework is 141.5 °.
3. the flexible micro-positioning platform based on Piezoelectric Ceramic according to claim 1 is characterized in that adopting the method for interference fit, utilizes the elastic property of material, described piezoelectric ceramic actuator is pressed between the tie-beam of the flexible side chain left and right sides.
4. the flexible micro-positioning platform based on Piezoelectric Ceramic according to claim 1 is characterized in that a described moving platform, three flexible side chains and is connected a rigid cage and connect and adopt the disposable acquisition of whole processing mode.
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| CN103629226A (en) * | 2012-08-20 | 2014-03-12 | 苏州生物医学工程技术研究所 | Flexible hinge displacement executor |
| CN103982587B (en) * | 2013-02-07 | 2016-06-01 | 上海微电子装备有限公司 | The flexible supporting device of lithography machine and flexible strutting piece |
| CN103672317A (en) * | 2013-06-27 | 2014-03-26 | 江西理工大学 | Accuracy-adjustable lamination-type space three-horizontal-moving-flexibility precision positioning platform |
| CN104423171B (en) * | 2013-08-27 | 2016-08-24 | 上海微电子装备有限公司 | A kind of flexible sucker |
| CN104912915B (en) * | 2015-06-16 | 2018-09-21 | 江南大学 | LEMs tension flexible hinges |
| CN106113022B (en) * | 2016-08-24 | 2019-02-22 | 广东工业大学 | A kind of single-freedom and flexible mini positioning platform |
| CN110568728B (en) * | 2018-06-05 | 2020-11-20 | 上海微电子装备（集团）股份有限公司 | Connecting element and movement mechanism of photoetching system |
| CN110716391A (en) * | 2018-07-11 | 2020-01-21 | 上海微电子装备（集团）股份有限公司 | Large-size substrate exposure machine |
| CN109848932B (en) * | 2019-04-09 | 2024-09-13 | 中国科学院宁波材料技术与工程研究所 | Planar three-degree-of-freedom full-flexible parallel positioning platform |
| CN111474662B (en) * | 2020-06-04 | 2021-09-28 | 中国科学院长春光学精密机械与物理研究所 | High-rigidity horizontal focusing mechanism with compact structure |
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| US20100275717A1 (en) * | 2009-04-30 | 2010-11-04 | Benoit Poyet | Precision positioning device |
| CN101726997B (en) * | 2009-12-11 | 2011-12-28 | 天津大学 | Six-freedom-degree precision positioning table for nano-imprint lithography system |
| CN101738855B (en) * | 2009-12-23 | 2012-08-29 | 天津大学 | Flexible micro-positioning stage with two degrees of freedom |
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