CN208766456U - The nano-imprinting device of large area imprinting is carried out using oversize mantle template - Google Patents
The nano-imprinting device of large area imprinting is carried out using oversize mantle template Download PDFInfo
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- CN208766456U CN208766456U CN201821819846.8U CN201821819846U CN208766456U CN 208766456 U CN208766456 U CN 208766456U CN 201821819846 U CN201821819846 U CN 201821819846U CN 208766456 U CN208766456 U CN 208766456U
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Abstract
The utility model discloses a kind of nano-imprinting devices that large area imprinting is carried out using oversize mantle template, including pedestal；Workbench, guide post, are vertically set on pedestal；Substrate is placed on workbench, and upper surface of substrate spin coating has coining glue-line；Mould holding unit can move up and down in guide post and along guide post；Mantle fixture is set in mould holding unit；Mantle template is set to above coining glue-line, and the face that mantle template is in contact with coining glue-line is equipped with micro-nano imprint pattern, and mantle template one end is fixed with mantle fixture, and the other end and the workbench of mantle template are fixed；Imprinting apparatus is set to above mantle template, and the imprinting apparatus is equipped with pressure roller；UV solidification equipment, be set to mantle template above and can above mantle template horizontal and vertical movement.The utility model can realize uniform, efficient, low cost manufacturing in the non-smooth rigid substrate of oversize, realize the large-area nano transfer graphic of large-scale rigid substrate.
Description
Technical field
The utility model relates to a kind of nano-imprinting devices more particularly to a kind of use oversize mantle template to carry out greatly
The nano-imprinting device of area coining.
Background technique
Existing micro-nano manufacturing technology, such as optical lithography, electron beam lithography, laser interference lithography etc..Currently, can add
The graphical area of the maximum of work is confined to 12 inch wafers, and, high production cost harsh to substrate flatness requirement, manufacture efficiency
It is low.
In recent years, a kind of novel micro nanometer rice processing technology to grow up is Princeton university scientist foreign citizen of Chinese origin week
Strongly fragrant to propose first in nineteen ninety-five in 20th century, which has reached the resolution ratio of superelevation by the means of mechanical transfer, has life
High-efficient, at low cost, simple technological process and other advantages are produced, are that nanometer large area dimensional structure replicates most promising photoetching technique
One of.
CN206057790U discloses a kind of soft imprinting apparatus of big roller ultraviolet light, for the coining glue to substrate surface into
Row coining；The device includes idler wheel, ultraviolet light source is equipped with inside idler wheel, and the ultraviolet luminous energy that ultraviolet light source issues is from rolling
Wheel projects；Mantle template is set to the outer surface of idler wheel, and coining pattern is equipped in mantle template, for substrate table
The coining glue in face is imprinted；Described device structure is simple, can effectively realize large-scale nano impression, but exist in this way
The problem of: it is long that the contact of nanoimprinting process middle line solidifies the time needed, and die life is short, mold manufacture is difficult.
CN206788549U discloses a kind of large-area flat-plate absorption imprinting apparatus, which includes mantle mold, table
Face is provided with imprinted pattern；Mold driving portion, multiple hole bodies are provided in drive surface, and mold driving portion is also connected with absorption driving
Device, absorption driving device driving hole body adsorb mantle mold, and hole body is divided into multiple distribution diameters from the inside to the outside in drive surface
The annular hole body group become larger, each annular hole body group includes the multiple groups of hole bodies circularized, the circle of each annular hole body group
The heart is overlapped, and overlapping position is equipped with a hole body；Bottom plate is provided with sample, is coated with solidification glue on sample；When coining, mold is just
As water ripples are equally gradually pasted to the problems such as going, overcome stress brought by direct pressing in solidification glue, so that pasting more
To be slim and graceful and close, so that the air bubble problem on solidification glue surface is efficiently solved, but large area pressure unevenly will lead to pressure
Figure residual layer thickness is inconsistent after print.
Whether above-mentioned rollers type nano-imprinting device or plate nano-imprinting device are carrying out large format nanometer
All exist when coining mantle template be easy to collapse, do not allow to be fixed easily, template and rigid substrate the large area difficulty that uniformly presses it is high, big
The big problem of area bringing into conformal contact difficulty, and nano impression low efficiency, nano-imprinting device are excessively complicated.
Summary of the invention
Above-mentioned to solve the problems, such as, the utility model provides a kind of using oversize mantle template progress large area
The nano-imprinting device of coining can realize uniform, efficient, low cost manufacturing in the non-smooth rigid substrate of oversize, real
The large-area nano transfer graphic of existing large-scale rigid substrate.
The technical scheme in the invention for solving the above technical problem are as follows: carried out using oversize mantle template big
The nano-imprinting device of area coining, including pedestal；
Workbench, guide post, are vertically set on pedestal, and spacing is reserved between workbench and guide post；
Substrate is placed on workbench, and upper surface of substrate spin coating has coining glue-line；
Mould holding unit can move up and down in guide post and along guide post；
Mantle fixture is set in mould holding unit, and mantle fixture can be along mould holding unit horizontal transverse movement；
Mantle template is set to above coining glue-line, and the face that mantle template is in contact with coining glue-line is equipped with micro-nano pressure
It is patterned, mantle template one end is fixed with mantle fixture, and the other end and the workbench of mantle template are fixed；
Imprinting apparatus is set to above mantle template, and the imprinting apparatus is equipped with pressure roller, and imprinting apparatus can be in mantle template
Top lateral or longitudinal movement, imprinting apparatus be equipped with pressure sensor, mantle fixture transverse shifting in mould holding unit,
The elasticity of mantle template in moulding process is adjusted in real time, and imprinting apparatus driving pressure roller pushes until making on mantle template and substrate
Coining glue-line be bonded compress；Then driving pressure roller in mantle template uniform roll, simultaneously clamped by coordinated control mold
The transverse shifting of the lifting of unit and mantle fixture realizes that the linear homogeneous of oversize mantle template and substrate imprints, coining
After the completion, imprinting apparatus driving pressure roller rises, and makes it away from mantle template；
UV solidification equipment, be set to mantle template above and can above mantle template horizontal and vertical movement, work as coining
After device driving pressure roller is far from mantle template, UV solidification equipment is displaced downwardly to above mantle template, is solidified to coining glue.
The above-mentioned nano-imprinting device that large area imprinting is carried out using oversize mantle template, table on the workbench
Face is embedded with vacuum chuck, and the vacuum chuck top is attracting with substrate floor, is equipped with support far from guide post one end in workbench
The thickness that block, the substrate and coining glue-line are added is identical as the thickness of supporting block, and the supporting block is equipped with soft for positioning
The positioning pin of film template.
The above-mentioned nano-imprinting device that large area imprinting is carried out using oversize mantle template, the mold clamping are single
Member includes the mold supporting frame being slidably connected with guide post, and the driving mold supporting frame connecting with mold supporting frame is sliding along guide post
Dynamic driving device, the mold supporting frame are equipped with accommodating cavity, and unidirectional damping track is equipped in accommodating cavity, and mantle fixture is set
It is in contact in accommodating cavity and with unidirectional damping track.
The above-mentioned nano-imprinting device that large area imprinting is carried out using oversize mantle template, the driving device are adopted
With the electric cylinder being connect with mold supporting frame or using the lead screw being connect with mold supporting frame and by motor-driven mode.
The above-mentioned nano-imprinting device that large area imprinting is carried out using oversize mantle template, the unidirectional damping rail
Road is with periodic concaveconvex structure, and the unidirectional damping track material is the high molecular polymer with smaller deformation quantity.
The above-mentioned nano-imprinting device that large area imprinting is carried out using oversize mantle template, on the mantle fixture
Equipped with the clamp port for clamping mantle template.
The above-mentioned nano-imprinting device that large area imprinting is carried out using oversize mantle template, the imprinting apparatus packet
It includes and the longitudinal extension bracket of pressure roller rotation connection and the transversal stretching bracket being connect with longitudinal extension cradle top, the pressure
The outer surface of roller is equipped with elastic layer.
The above-mentioned nano-imprinting device that large area imprinting is carried out using oversize mantle template, the UV solidification equipment
For UV cure lamp, the transversal stretching frame for being connected with longitudinal extension frame with UV cure lamp and being connect with longitudinal extension top of the trellis.
The above-mentioned nano-imprinting device that large area imprinting is carried out using oversize mantle template is set in the accommodating cavity
There is the electric cylinder that can drive mantle fixture transverse shifting.
The utility model has the beneficial effects that: passing through the cooperation of mould holding unit, positioning pin, imprinting apparatus, realize
Mantle template and the coining glue-line of spin coating on substrate are linear, sequentially contact printing, the outer surface of pressure roller are arranged elasticity layer, make
Force of impression distribution is more uniform, can be achieved with the complete transfer that glue is imprinted in mantle template to substrate with lesser force of impression, together
When avoid the generation of bubble in moulding process；By the cooperation of guide post, mould holding unit and positioning pin, solve because soft
Film template area is easy to collapse greatly, mantle template is easy fold or mantle template caused by stretching not exclusively on micro-nano imprint figure
Case transfers incomplete problem, ensure that the complete transfer of large format nano-imprinted pattern to substrate；Meanwhile it realizing on substrate
Pattern after coining curable adhesive layer is automatically separated with micro nano structure imprinted pattern in mantle template.
Detailed description of the invention
Fig. 1 is the original operating state figure of the utility model；
Fig. 2 is the stamp work state diagram of the utility model；
Fig. 3 is the curing molding working state figure of the utility model；
Fig. 4 is the attachment structure schematic diagram one of mould holding unit and mantle fixture；
Fig. 5 is the attachment structure schematic diagram two of mould holding unit and mantle fixture.
Specific embodiment
With reference to the accompanying drawing and specific embodiment is described in further details the utility model.
Embodiment 1
As shown in Figure 1,2,3, 4, the nano-imprinting device of large area imprinting is carried out using oversize mantle template, including
Pedestal 1；
Workbench 2, guide post 3 are vertically set on pedestal 1 and fixed with pedestal 1, pre- between workbench 2 and guide post 3
There are spacing, can be 1CM-50CM according to the setting distance of the demand spacing of different process；2 upper surface of workbench is embedding
There is vacuum chuck 4, its top is concordant with 2 upper surface of workbench when vacuum chuck 4 works,
Substrate 5 is placed on workbench 2, and 5 upper surface spin coating of substrate has coining glue-line 6；The coining glue-line is ultraviolet exposure
Light-cured type imprints gel coating, and 4 top of vacuum chuck is attracting with 5 bottom surface of substrate, when substrate 5 is adsorbed on vacuum chuck 4
Its bottom surface is bonded with the upper surface of workbench 2；
Mould holding unit 7 can move up and down in guide post 3 and along guide post 3；The mould holding unit 7
Including the mold supporting frame 8 being slidably connected with guide post 3, the driving mold supporting frame 8 connecting with mold supporting frame 8 is along guide post
The driving device 9 of 3 slidings, the driving device 9 is using the electric cylinder or use and mold supporting frame connecting with mold supporting frame 8
8 connection lead screws and by motor-driven mode, two ways is the prior art, no longer detailed to repeat；
Mantle template 10, is set to 6 top of coining glue-line, and the face that mantle template 10 is in contact with coining glue-line 6 is equipped with micro-
Nano-imprinted pattern；
Mantle fixture 11 is set in mould holding unit 7, and mantle fixture 11 can be moved along 7 horizontal cross of mould holding unit
It is dynamic；The mantle fixture 11 is equipped with the clamp port 12 for clamping mantle template 10；The mold supporting frame 8 is equipped with accommodating
Chamber 13 and the opening 14 communicated with accommodating cavity 13, are equipped with unidirectional damping track 15 in accommodating cavity 13, and mantle fixture 11 is set to
Be in contact in accommodating cavity 13 and with unidirectional damping track 15, the unidirectional damping track 15 be with periodic concaveconvex structure,
15 material of unidirectional damping track is the high molecular polymer with smaller deformation quantity, such as polyurethane, nitrile rubber, silicon rubber
Glue etc.；
Clamp port 12 on 10 one end of mantle template and mantle fixture 11 is fixed, and fixed form is fixed using screw or bolt
Mode, the other end of mantle template 10 and workbench 2 are fixed, specific fixed form are as follows: in workbench 2 far from guide post one end
Equipped with supporting block 17, supporting block 17 is fixed with 2 phase of workbench, and fixed form is welding manner, the substrate 5 and coining glue-line 6
The thickness of addition is identical as the thickness of supporting block 17, and the supporting block 17 is equipped with the positioning pin for positioning mantle template 10
18, positioning pin 18 is threadedly coupled with supporting block 17；
Imprinting apparatus 19 is set to 10 top of mantle template, and the imprinting apparatus 19 is equipped with pressure roller 20, and pressure roller 20 passes through drive
Dynamic motor driven 27, driving motor does not provide in figure, imprinting apparatus 19 can above mantle template 10 lateral or longitudinal movement,
Imprinting apparatus 19 is equipped with pressure sensor, and pressure sensor does not provide in figure, and pressure sensor is specifically located at pressure roller 20
On, the imprinting apparatus 19 include the longitudinal extension bracket 21 being rotatablely connected with pressure roller 20 and with the top of longitudinal extension bracket 21
The transversal stretching bracket 22 of connection, longitudinal extension bracket 21 and transversal stretching bracket 22 can be the electricity being fixed on external equipment
Dynamic cylinder or cylinder, the outer surface of the pressure roller 20 are equipped with elastic layer 23, and elastic layer 23 is rubber sleeve, and mantle fixture 11 is pressed from both sides in mold
Transverse shifting on unit 7 is held, adjusts the elasticity of mantle template 10 in moulding process in real time, imprinting apparatus 19 drives under pressure roller 20
Straightening is bonded compression with the coining glue-line 6 on substrate 5 to making mantle template 10；Then driving motor 27 drives pressure roller 20 in mantle
Uniform roll in template 10 passes through transverse shifting, the reality of the lifting of coordinated control mould holding unit 7 and mantle fixture 11 simultaneously
Existing oversize mantle template 10 and the linear homogeneous of substrate 5 imprint, and after the completion of coining, imprinting apparatus 19 is driven on pressure roller 20
It rises, makes it away from mantle template 10；
UV solidification equipment 24, be set to the top of mantle template 10 and can above mantle template 10 horizontal and vertical movement,
After imprinting apparatus 19 drives pressure roller 20 far from mantle template 10, UV solidification equipment 24 is displaced downwardly to 10 top of mantle template, to pressure
Print glue is exposed solidification, and the UV solidification equipment 24 is UV cure lamp, and UV cure lamp is the prior art, repeats no more, with UV
Cure lamp be connected with longitudinal extension frame 25 and with the transversal stretching frame 26 that is connected at the top of longitudinal extension frame 25, longitudinal extension frame 25
And transversal stretching frame 26 can be the electric cylinder or cylinder being fixed on external equipment.
Embodiment 2
As shown in figure 5, difference from Example 1 is: being equipped in the accommodating cavity 13 can drive mantle fixture 11 horizontal
To mobile electric cylinder 16.
It is above-mentioned although specific embodiments of the present invention are described with reference to the accompanying drawings, but it is not practical new to this
The limitation of type protection scope, those skilled in the art should understand that, based on the technical solution of the present invention, ability
Field technique personnel do not need to make the creative labor the various modifications or changes that can be made still in the protection model of the utility model
Within enclosing.
Claims (9)
1. carrying out the nano-imprinting device of large area imprinting using oversize mantle template, it is characterised in that: including pedestal；
Workbench, guide post, are vertically set on pedestal, and spacing is reserved between workbench and guide post；
Substrate is placed on workbench, and upper surface of substrate spin coating has coining glue-line；
Mould holding unit can move up and down in guide post and along guide post；
Mantle fixture is set in mould holding unit, and mantle fixture can be along mould holding unit horizontal transverse movement；
Mantle template is set to above coining glue-line, and the face that mantle template is in contact with coining glue-line is equipped with micro-nano imprint figure
Case, mantle template one end are fixed with mantle fixture, and the other end and the workbench of mantle template are fixed；
Imprinting apparatus is set to above mantle template, and the imprinting apparatus is equipped with pressure roller, and imprinting apparatus can be above mantle template
Lateral or longitudinal movement, imprinting apparatus be equipped with pressure sensor, mantle fixture transverse shifting in mould holding unit, in real time
The elasticity of mantle template in moulding process is adjusted, imprinting apparatus driving pressure roller pushes until making the pressure on mantle template and substrate
Glue-line fitting is printed to compress；Then driving pressure roller in mantle template uniform roll, simultaneously pass through coordinated control mould holding unit
Lifting and mantle fixture transverse shifting, realize that the linear homogeneous of oversize mantle template and substrate imprints, coining is completed
Afterwards, imprinting apparatus driving pressure roller rises, and makes it away from mantle template；
UV solidification equipment, be set to mantle template above and can above mantle template horizontal and vertical movement, work as imprinting apparatus
After driving pressure roller is far from mantle template, UV solidification equipment is displaced downwardly to above mantle template, is solidified to coining glue.
2. the nano-imprinting device according to claim 1 that large area imprinting is carried out using oversize mantle template,
Be characterized in that: the worktable upper surface is embedded with vacuum chuck, and the vacuum chuck top is attracting with substrate floor, in workbench
It is equipped with supporting block far from guide post one end, the thickness that the substrate and coining glue-line are added is identical as the thickness of supporting block, described
Supporting block is equipped with the positioning pin for positioning mantle template.
3. the nano-imprinting device according to claim 1 that large area imprinting is carried out using oversize mantle template,
Be characterized in that: the mould holding unit includes the mold supporting frame being slidably connected with guide post, is connect with mold supporting frame
The driving device that driving mold supporting frame is slided along guide post, the mold supporting frame are equipped with accommodating cavity, set in accommodating cavity
There is unidirectional damping track, mantle fixture is set in accommodating cavity and is in contact with unidirectional damping track.
4. the nano-imprinting device according to claim 3 that large area imprinting is carried out using oversize mantle template,
Be characterized in that: the driving device uses the electric cylinder connecting with mold supporting frame or using the lead screw connecting with mold supporting frame
And pass through motor-driven mode.
5. the nano-imprinting device according to claim 3 that large area imprinting is carried out using oversize mantle template,
Be characterized in that: the unidirectional damping track be with periodic concaveconvex structure, the unidirectional damping track material be with compared with
The high molecular polymer of small deformation quantity.
6. the nano-imprinting device according to claim 1 that large area imprinting is carried out using oversize mantle template,
Be characterized in that: the mantle fixture is equipped with the clamp port for clamping mantle template.
7. the nano-imprinting device according to claim 1 that large area imprinting is carried out using oversize mantle template,
Be characterized in that: the imprinting apparatus includes connecting with the longitudinal extension bracket of pressure roller rotation connection and with longitudinal extension cradle top
The outer surface of the transversal stretching bracket connect, the pressure roller is equipped with elastic layer.
8. the nano-imprinting device according to claim 1 that large area imprinting is carried out using oversize mantle template,
Be characterized in that: the UV solidification equipment be UV cure lamp, with UV cure lamp be connected with longitudinal extension frame and with longitudinal extension frame
The transversal stretching frame of top connection.
9. the nano-imprinting device according to claim 3 that large area imprinting is carried out using oversize mantle template,
It is characterized in that: being equipped with the electric cylinder that can drive mantle fixture transverse shifting in the accommodating cavity.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201821819846.8U CN208766456U (en) | 2018-11-06 | 2018-11-06 | The nano-imprinting device of large area imprinting is carried out using oversize mantle template |
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| CN201821819846.8U CN208766456U (en) | 2018-11-06 | 2018-11-06 | The nano-imprinting device of large area imprinting is carried out using oversize mantle template |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113075861A (en) * | 2021-04-01 | 2021-07-06 | 青岛天仁微纳科技有限责任公司 | Novel nano-imprinting equipment and imprinting method thereof |
| CN113075860A (en) * | 2021-04-01 | 2021-07-06 | 青岛天仁微纳科技有限责任公司 | Desktop type nano-imprinting equipment and imprinting method thereof |
| CN113858648A (en) * | 2021-10-13 | 2021-12-31 | 安徽晟华光学科技有限公司 | Production equipment of diffusion film for small display |
| CN114228385A (en) * | 2021-12-31 | 2022-03-25 | 浙江兆奕科技有限公司 | Surface decoration method of 3D plate |
| CN114355725A (en) * | 2021-12-29 | 2022-04-15 | 苏州印象镭射科技有限公司 | Double-sided UV (ultraviolet) imprinting device for transparent film |
| CN114536798A (en) * | 2022-02-25 | 2022-05-27 | 南京航空航天大学 | Negative-pressure-assisted roll-to-roll precision rolling manufacturing device and method |
| CN115008892A (en) * | 2022-06-27 | 2022-09-06 | 安徽科技学院 | Full-automatic printing device |
| TWI836452B (en) * | 2021-08-29 | 2024-03-21 | 奇景光電股份有限公司 | Imprinting apparatus |
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2018
- 2018-11-06 CN CN201821819846.8U patent/CN208766456U/en active Active
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113075861A (en) * | 2021-04-01 | 2021-07-06 | 青岛天仁微纳科技有限责任公司 | Novel nano-imprinting equipment and imprinting method thereof |
| CN113075860A (en) * | 2021-04-01 | 2021-07-06 | 青岛天仁微纳科技有限责任公司 | Desktop type nano-imprinting equipment and imprinting method thereof |
| CN113075860B (en) * | 2021-04-01 | 2023-07-25 | 青岛天仁微纳科技有限责任公司 | Desktop type nano imprinting equipment and imprinting method thereof |
| CN113075861B (en) * | 2021-04-01 | 2023-09-19 | 青岛天仁微纳科技有限责任公司 | Novel nano imprinting equipment and imprinting method thereof |
| TWI836452B (en) * | 2021-08-29 | 2024-03-21 | 奇景光電股份有限公司 | Imprinting apparatus |
| CN113858648A (en) * | 2021-10-13 | 2021-12-31 | 安徽晟华光学科技有限公司 | Production equipment of diffusion film for small display |
| CN113858648B (en) * | 2021-10-13 | 2024-05-10 | 安徽晟华光学科技有限公司 | Production equipment of diffusion film for small display |
| CN114355725A (en) * | 2021-12-29 | 2022-04-15 | 苏州印象镭射科技有限公司 | Double-sided UV (ultraviolet) imprinting device for transparent film |
| CN114228385A (en) * | 2021-12-31 | 2022-03-25 | 浙江兆奕科技有限公司 | Surface decoration method of 3D plate |
| CN114536798A (en) * | 2022-02-25 | 2022-05-27 | 南京航空航天大学 | Negative-pressure-assisted roll-to-roll precision rolling manufacturing device and method |
| CN115008892A (en) * | 2022-06-27 | 2022-09-06 | 安徽科技学院 | Full-automatic printing device |
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