CN213634096U - Gas-assisted ultraviolet nano-imprinting device - Google Patents
Gas-assisted ultraviolet nano-imprinting device Download PDFInfo
- Publication number
- CN213634096U CN213634096U CN202022317515.8U CN202022317515U CN213634096U CN 213634096 U CN213634096 U CN 213634096U CN 202022317515 U CN202022317515 U CN 202022317515U CN 213634096 U CN213634096 U CN 213634096U
- Authority
- CN
- China
- Prior art keywords
- fixed
- screw
- working platform
- gas
- platform
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Landscapes
- Shaping Of Tube Ends By Bending Or Straightening (AREA)
Abstract
The utility model discloses a gaseous supplementary ultraviolet nanometer impression device, the device includes the frame, elevating gear, the imprinting device, work platform, gas device, Z axle micro-motion device, the dress card rubber coating substrate, elevating gear control imprinting device descends, make its and work platform closely laminate and form the closed cavity, soft template is pressed close to Z axle micro-motion device control substrate, gas device bleeds to the closed cavity and forms negative pressure environment, make soft template move down and carry out the impression, ultraviolet lamp solidifies the impression glue, gas device aerifys the closed cavity and accomplishes the drawing of patterns, last imprinting device rises, take out the substrate that has the micro-structure, accomplish the impression. The device uses a vacuum negative pressure pressing technology, when a curved substrate is imprinted, the soft template and the substrate can form better conformal contact, and the uniformity of imprinting force and demolding force is effectively improved, so that the filling rate of imprinting glue is increased, the problems of soft template damage and substrate warping are solved, and the precision and the fidelity of pattern transfer are improved.
Description
Technical Field
The utility model relates to an ultraviolet nanoimprint lithography field indicates a gaseous supplementary ultraviolet nanoimprint lithography device especially.
Background
In the application of current nanoimprint technology, it is often necessary to prepare nanopatterns on some special surfaces because of the demand. For example, optical materials with light trapping properties, super-hydrophobic materials with self-cleaning properties, and the like are prepared, and some of the materials are curved materials, and for nanoimprinting, many difficulties are often accompanied when imprinting is performed on the curved materials, so that how to perform imprinting on the curved materials becomes a big hot spot of research on the nanoimprinting technology nowadays.
Nanoimprinting has the advantages of low cost, high resolution, mass production and the like, and is popular in grating preparation. In the nanoimprint process flow, the application of imprinting force is particularly important, and the external force applied to the template promotes the polymer between the template and the substrate to flow and deform, so that the transfer of the pattern is realized. The non-uniformity of the imprinting force on the template, which has a significant effect on the uniformity of the imprinting force due to the choice of the pressing mode, is a critical issue in the nanoimprinting process, especially for imprinting on curved substrates, because the pattern distortion caused by the non-uniformity of the imprinting force is more severe, which results in insufficient polymer flow and non-uniform deformation on the template. The nano-imprinting can be applied in various ways, such as solid double-plate pressing, roller-type pressing, electrostatic force-assisted pressing, electromagnetic force-assisted pressing, vacuum negative pressure pressing, and the like, wherein the vacuum negative pressure pressing technology in the gas-assisted pressing technology is a novel pressing way, and the template is driven to press the substrate or the substrate to the template by pumping air into the closed chamber to form a negative pressure environment, so that the template and the substrate are contacted to perform imprinting, and then the closed chamber is inflated to restore the air pressure to complete demolding, which is a feasible and effective pressing way for imprinting of curved substrates. A roller type uv soft imprint method proposed in publication No. CN 102183875 a can achieve large-size uniform imprint of a substrate with curvature and surface irregularities. The method has certain defects that the imprinting method is limited by mechanical force when imprinting a substrate with bending and uneven surface, and the filling rate is poor; secondly, the template is easy to damage, and the substrate is easy to warp during demoulding, so that the final finished product has poor precision and can not meet the imprinting requirement.
SUMMERY OF THE UTILITY MODEL
The utility model aims at providing a gaseous supplementary ultraviolet nanometer impression device to easy distortion, the easy damage of template and the easy problem that takes place the warpage of substrate of figure transfer when solving present impression curved surface substrate.
According to the utility model aims at providing a gaseous supplementary ultraviolet nanometer impression device, its characterized in that: the automatic stamping machine comprises a frame, a lifting device, an embossing device, a working platform, a gas device and a Z-axis micro-motion device, wherein the frame is horizontally placed on the ground, the lifting device is fixed on an upper base plate of the frame through screws, the embossing device is fixed on a moving platform of the lifting device through bolts, the working platform is fixed on a lower base plate of the frame through screws, the gas device is fixed on the lower base plate of the frame through screws and is communicated with the working platform, and the Z-axis micro-motion device is fixed on the lower base plate of the frame through screws and is matched with the working platform.
According to the utility model aims at providing a gaseous supplementary ultraviolet nanometer impression device, its characterized in that: the frame comprises a lower bottom plate, a guide rod and an upper bottom plate, wherein the lower bottom plate is horizontally placed on the ground, the lower end of the guide rod is fixedly connected with the lower bottom plate, the upper end of the guide rod is fixedly connected with the upper bottom plate, and the frame is a framework of the whole device.
According to the utility model aims at providing a gaseous supplementary ultraviolet nanometer impression device, its characterized in that: the lifting device comprises a first servo motor, a first support table, a first gear, a second gear, a first bearing sleeve, a bearing, a second bearing sleeve, a screw nut, a first ball screw and a movable platform, wherein the first servo motor is fixed on the first support table through a screw, the first support table is fixed on an upper base plate through a screw, the first gear is installed on the first support table through a stud, is matched with the first servo motor and is meshed with the second gear, the second gear is connected with the second bearing sleeve through a screw, the first bearing sleeve is fixed on the upper base plate through a screw, an inner ring of the first bearing sleeve is matched with the bearing, an inner ring of the bearing is matched with the second bearing sleeve, the screw nut is connected with the second bearing sleeve through a screw, the first ball screw is connected with the movable platform through a bolt and is matched with the screw nut, the movable platform penetrates through a guide rod.
According to the utility model aims at providing a gaseous supplementary ultraviolet nanometer impression device, its characterized in that: the imprinting device comprises a support frame, a cavity, through holes, ultraviolet lamps, an observation window, an elastic film and a soft template, wherein the support frame is fixed on a moving platform through bolts, the cavity is fixedly connected to the support frame, the four through holes are attached to the upper portion of the cavity, the ultraviolet lamps are fixed in the cavity, the observation window is located on the side face of the cavity, the elastic film is fixed in the cavity, the soft template is installed on the elastic film, and the imprinting device is responsible for imprinting and curing.
According to the utility model aims at providing a gaseous supplementary ultraviolet nanometer impression device, its characterized in that: the working platform comprises a horizontal platform, an air exhaust hole, an air inflation hole, a groove and a rubber pad, wherein the horizontal platform is fixed on the lower bottom plate through a screw, the horizontal platform is provided with four air exhaust holes and four air inflation holes, the groove is positioned on the horizontal platform, the rubber pad is arranged in the groove, and the working platform, the imprinting device and the Z-axis micro-motion device form a closed cavity.
According to the utility model aims at providing a gaseous supplementary ultraviolet nanometer impression device, its characterized in that: the air device comprises an air pump, an air exhaust pipeline, an inflator pump and an inflation pipeline, wherein the air pump is fixed on the lower base plate through a screw, the air exhaust pipeline on the air pump is communicated with an air exhaust hole of the horizontal platform, the inflator pump is fixed on the lower base plate through a screw, the inflation pipeline on the inflator pump is communicated with an inflation hole of the horizontal platform, and the air device controls the air pressure in the closed cavity through pumping and inflating air.
According to the utility model aims at providing a gaseous supplementary ultraviolet nanometer impression device, its characterized in that: the Z-axis micro-motion device comprises a substrate, a substrate chuck, a supporting table, a Z-axis working platform I and a Z-axis working platform II, wherein the substrate is clamped on the substrate chuck, the substrate chuck is fixedly connected with the supporting table, the supporting table is fixed on a rib plate I of the Z-axis working platform I and a rib plate II of the Z-axis working platform II through screws, the Z-axis working platform I and the Z-axis working platform II are fixed on a lower bottom plate through screws, and the Z-axis micro-motion device is responsible for finely adjusting the position of the substrate.
According to the utility model aims at providing a gaseous supplementary ultraviolet nanometer impression device, its characterized in that: the first Z-axis working platform comprises a first rib plate, a first slider, a housing, a second servo motor, a coupler, a second ball screw, a guide rail, a first screw support seat and a second screw support seat, the first rib plate is fixed on the slider through screws, the slider is in threaded connection with the second ball screw and is in sliding connection with the guide rail, the housing is fixed on a lower bottom plate through screws, the second servo motor is connected with the coupler, the coupler is connected with the second ball screw, the second ball screw is fixed by the first screw support seat and the second screw support seat, the guide rail is fixed on the housing, the first screw support seat and the second screw support seat are fixed on the housing through screws, and the second Z-axis working platform is identical to the first Z-axis working platform in structure and works.
The utility model has the advantages of it is following:
(1) the vacuum negative pressure pressing technology is used in the imprinting process, so that the soft template can be tightly attached to the substrate when the curved substrate is imprinted, the soft template and the substrate are in better conformal contact, the filling rate of imprinting glue is increased, the problem that the pattern is easy to distort when the curved substrate is imprinted is remarkably improved, and the precision and the fidelity of the pattern are improved.
(2) Because of the uniformity of the imprinting force and the demolding force, the soft template has less damage during imprinting and demolding, and the problem that the substrate is easy to warp during demolding is improved.
Drawings
FIG. 1 is a front view of a gas-assisted ultraviolet nanoimprinting apparatus;
FIG. 2 is a front view of a frame of a gas-assisted ultraviolet nanoimprinting apparatus;
FIG. 3 is a front view of a lifting device of a gas-assisted ultraviolet nanoimprinting apparatus;
FIG. 4 is a top view of a lifting device of a gas-assisted UV nanoimprinting apparatus;
FIG. 5 is a schematic diagram of a partial structure of an imprinting apparatus of a gas-assisted ultraviolet nanoimprinting apparatus;
FIG. 6 is a front view of an imprinting apparatus of a gas-assisted ultraviolet nanoimprinting apparatus;
FIG. 7 is a schematic structural diagram of a working platform of a gas-assisted ultraviolet nanoimprinting apparatus;
FIG. 8 is a schematic diagram of a gas apparatus of a gas-assisted ultraviolet nanoimprinting apparatus;
FIG. 9 is a side view of a Z-axis micro-motion device of a gas-assisted UV nanoimprinting apparatus;
FIG. 10 is a front view of a first Z-axis stage of a gas-assisted UV nanoimprinting apparatus.
Description of reference numerals:
a frame-1, a lifting device-2, a stamping device-3, a working platform-4, a gas device-5, a Z-axis micro-motion device-6, a lower bottom plate-101, a guide rod-102, an upper bottom plate-103, a servo motor-201, a support table-202, a gear-203, a gear-204, a bearing sleeve-205, a bearing-206, a bearing sleeve-207, a screw nut-208, a ball screw-209, a moving platform-210, a support frame-301, a cavity-302, a through hole-303, an ultraviolet lamp-304, an observation window-305, an elastic film-306, a soft template-307, a horizontal platform-401, an air suction hole-402, an air inflation hole-403, a groove-404 and a rubber cushion-405, the device comprises an air pump-501, an air pumping pipeline-502, an air pump-503, an air charging pipeline-504, a substrate-601, a substrate chuck-602, a support platform-603, a Z-axis working platform I-604, a Z-axis working platform II-605, a ribbed plate I-60401, a sliding block-60402, a shell-60403, a servo motor II-60404, a coupling-60405, a ball screw II-60406, a guide rail-60407, a screw support seat I-60408, a screw support seat II-60409 and a ribbed plate II-60501.
The specific implementation mode is as follows:
as shown in fig. 1, the gas-assisted ultraviolet nanoimprint lithography device comprises a frame 1, a lifting device 2, an imprinting device 3, a working platform 4, a gas device 5 and a Z-axis micro-motion device 6, wherein the frame 1 is horizontally placed on the ground, the lifting device 2 is fixed on an upper base plate 103 of the frame 1 through screws, the imprinting device 3 is fixed on a moving platform 210 of the lifting device 2 through bolts, the working platform 4 is fixed on a lower base plate 101 of the frame 1 through screws, the gas device 5 is fixed on the lower base plate 101 of the frame 1 through screws and is communicated with the working platform 4, and the Z-axis micro-motion device 6 is fixed on the lower base plate 101 of the frame 1 through screws and is matched with the working platform 4.
As shown in fig. 2, the frame 1 includes a lower plate 101, a guide rod 102, and an upper plate 103, wherein the lower plate 101 is horizontally placed on the ground, the lower end of the guide rod 102 is fixedly connected to the lower plate 101, the upper end of the guide rod is fixedly connected to the upper plate 103, and the frame 1 is a frame of the whole apparatus.
As shown in fig. 3 and 4, the lifting device 2 includes a first servo motor 201, a first support table 202, a first gear 203, a second gear 204, a first bearing sleeve 205, a bearing 206, a second bearing sleeve 207, a screw nut 208, a first ball screw 209, and a movable platform 210, wherein the first servo motor 201 is fixed on the support table 202 by screws, the support table 202 is fixed on the upper base plate 103 by screws, the first gear 203 is mounted on the support table 202 by studs, is matched with the first servo motor 201, and is engaged with the second gear 204, the second gear 204 is connected with the second bearing sleeve 207 by screws, the first bearing sleeve 205 is fixed on the upper base plate 103 by screws, an inner ring of the first bearing sleeve 205 is matched with the bearing 206, an inner ring of the bearing 206 is matched with the second bearing sleeve 207, the screw nut 208 is connected with the second bearing sleeve 207 by screws, the first ball screw 209 is connected with the movable platform 210 by screws, and is matched with a lead screw nut 208, a moving platform 210 passes through the guide rod 102, and the lifting device 2 controls the lifting of the stamping device 3.
As shown in fig. 5 and 6, the imprinting apparatus 3 includes a supporting frame 301, a cavity 302, through holes 303, an ultraviolet lamp 304, an observation window 305, an elastic film 306, and a soft template 307, wherein the supporting frame 301 is fixed on the moving platform 210 by bolts, the cavity 302 is fixedly connected to the supporting frame 301, four through holes 303 are attached above the cavity 302, the ultraviolet lamp 304 is fixed inside the cavity 302, the observation window 305 is located on a side surface of the cavity 302, the elastic film 306 is fixed inside the cavity 302, the soft template 307 is installed on the elastic film 306, and the imprinting apparatus 3 is responsible for imprinting and curing.
As shown in fig. 7, the working platform 4 includes a horizontal platform 401, suction holes 402, inflation holes 403, a groove 404, and a rubber pad 405, wherein the horizontal platform 401 is fixed on the lower base plate 101 by screws, the horizontal platform 401 is attached with four suction holes 402 and four inflation holes 403, the groove 404 is located on the horizontal platform 401, the rubber pad 405 is installed in the groove 404, and the working platform 4, the imprinting device 3, and the Z-axis micro-moving device 6 form a closed chamber.
As shown in fig. 8, the gas device 5 includes an air pump 501, an air exhaust pipeline 502, an air pump 503, and an air inflation pipeline 504, wherein the air pump 501 is fixed on the lower base plate 101 by screws, the air exhaust pipeline 502 on the air pump 501 is communicated with the air exhaust hole 402 of the horizontal platform 401, the air pump 503 is fixed on the lower base plate 101 by screws, the air inflation pipeline 504 on the air pump 503 is communicated with the air inflation hole 403 of the horizontal platform 401, and the gas device 5 controls the air pressure in the closed chamber by exhausting and inflating gas.
As shown in fig. 9, the Z-axis micro-motion device 6 includes a substrate 601, a substrate chuck 602, a support table 603, a first Z-axis working platform 604, and a second Z-axis working platform 605, wherein the substrate 601 is mounted on the substrate chuck 602, the substrate chuck 602 is fixedly connected to the support table 603, the support table 603 is fixed to a first rib 60401 of the first Z-axis working platform 604 and a second rib 60501 of the second Z-axis working platform 605 by screws, the first Z-axis working platform 604 and the second Z-axis working platform 605 are fixed to the lower base plate 101 by screws, and the Z-axis micro-motion device 6 is responsible for fine-tuning the position of the substrate 601.
As shown in fig. 9 and 10, the first Z-axis working platform 604 includes a first ribbed plate 60401, a slider 60402, a housing 60403, a second servo motor 60404, a coupling 60405, a second ball screw 60406, a guide rail 60407, a first screw support 60408, and a second screw support 60409, the first ribbed plate 60401 is fixed to the slider 60402 by screws, the slider 60402 is in threaded connection with the second ball screw 60406 and is in sliding connection with the guide rail 60407, the housing 60403 is fixed to the lower base plate 101 by screws, the second servo motor 60404 is connected to the coupling 60405, the coupling 60405 is connected to the second ball screw 60406, the second ball screw 60406 is fixed by the first screw support 60408 and the second screw support 60409, the guide rail 60407 is fixed to the housing 60403, the first screw support 60408 and the second screw support 60409 are fixed to the housing 60403 by screws, and the second Z-axis working platform 605 and the first Z-axis working platform 604 have the same structure and work cooperatively.
The following describes the present invention with reference to fig. 1 to 10.
Installing the soft template 307 on the elastic film 306, coating a layer of imprinting glue on the surface of the substrate 601, installing and clamping the imprinting glue on the substrate chuck 602, respectively setting the air suction value of the air suction pump 501 and the air inflation value of the air inflation pump 503, starting the first servo motor 201, moving the imprinting device 3 downwards under the control of the lifting device 2, closing the first servo motor 201 when the imprinting device 3 and the working platform 4 are tightly attached to each other, driving the substrate 601 to slowly move upwards by the cooperation of the first Z-axis working platform 604 and the second Z-axis working platform 605, observing the positions of the soft template 307 and the substrate 601 through the observation window 305 at the same time, and stopping the movement of the substrate 601 by stopping the cooperation of the first Z-axis working platform 604 and the second Z-axis working platform 605 when the substrate 601 is about to reach the position contacted with the soft template 307.
After the substrate 601 is moved, starting the air pump 501, pumping air in a closed chamber formed by the imprinting device 3, the working platform 4 and the Z-axis micro-motion device 6, enabling the flexible template 307 to move downwards due to elastic deformation of the elastic film 306 under the action of air pressure, automatically closing the air pump 501 when the pumped air amount reaches a set value, completely pressing the flexible template 307 into the substrate 601 for imprinting, starting the ultraviolet lamp 304 to cure the imprinting adhesive, after the curing is completed, closing the ultraviolet lamp 304, starting the air pump 503 to fill air into the closed chamber to enable the elastic film 306 to rebound, separating the flexible template 307 from the substrate 601 at the moment, automatically closing the air pump 503 when the filled air amount reaches the set value, demoulding the flexible template 307 and the substrate 601 at the moment, starting the servo motor one 201 after the demoulding is completed, and enabling the imprinting device 3 to move upwards under the control of the lifting device 2, and when the substrate rises to a certain height, the first servo motor 201 is closed, and finally the substrate 601 is taken out, so that the substrate 601 with the microstructure is obtained.
Claims (8)
1. A gas-assisted ultraviolet nanoimprint lithography device is characterized in that: the automatic stamping machine comprises a frame, a lifting device, an embossing device, a working platform, a gas device and a Z-axis micro-motion device, wherein the frame is horizontally placed on the ground, the lifting device is fixed on an upper base plate of the frame through screws, the embossing device is fixed on a moving platform of the lifting device through bolts, the working platform is fixed on a lower base plate of the frame through screws, the gas device is fixed on the lower base plate of the frame through screws and is communicated with the working platform, and the Z-axis micro-motion device is fixed on the lower base plate of the frame through screws and is matched with the working platform.
2. A gas-assisted ultraviolet nanoimprinting apparatus as claimed in claim 1, characterized in that: the rack comprises a lower bottom plate, a guide rod and an upper bottom plate, wherein the lower bottom plate is horizontally placed on the ground, the lower end of the guide rod is fixedly connected with the lower bottom plate, and the upper end of the guide rod is fixedly connected with the upper bottom plate.
3. A gas-assisted ultraviolet nanoimprinting apparatus as claimed in claim 1, characterized in that: the lifting device comprises a first servo motor, a first support table, a first gear, a second gear, a first bearing sleeve, a bearing, a second bearing sleeve, a screw nut, a first ball screw and a movable platform, wherein the first servo motor is fixed on the first support table through a screw, the first support table is fixed on an upper base plate through a screw, the first gear is installed on the first support table through a stud, is matched with the first servo motor and is meshed with the second gear, the second gear is connected with the second bearing sleeve through a screw, the first bearing sleeve is fixed on the upper base plate through a screw, an inner ring of the first bearing sleeve is matched with the bearing, an inner ring of the bearing is matched with the second bearing sleeve, the screw nut is connected with the second bearing sleeve through a screw, the first ball screw is connected with the movable platform through a bolt and is matched with the screw nut, and.
4. A gas-assisted ultraviolet nanoimprinting apparatus as claimed in claim 1, characterized in that: the imprinting device comprises a support frame, a cavity, through holes, ultraviolet lamps, an observation window, an elastic film and a soft template, wherein the support frame is fixed on a moving platform through bolts, the cavity is fixedly connected to the support frame, the four through holes are attached to the upper portion of the cavity, the ultraviolet lamps are fixed in the cavity, the observation window is located on the side face of the cavity, the elastic film is fixed in the cavity, and the soft template is installed on the elastic film.
5. A gas-assisted ultraviolet nanoimprinting apparatus as claimed in claim 1, characterized in that: the working platform comprises a horizontal platform, air suction holes, air inflation holes, grooves and rubber cushions, wherein the horizontal platform is fixed on the lower base plate through screws, the horizontal platform is provided with the four air suction holes and the four air inflation holes, the grooves are located on the horizontal platform, and the rubber cushions are arranged in the grooves.
6. A gas-assisted ultraviolet nanoimprinting apparatus as claimed in claim 1, characterized in that: the air device comprises an air pump, an air exhaust pipeline, an inflator pump and an inflation pipeline, wherein the air pump is fixed on the lower base plate through a screw, the air exhaust pipeline on the air pump is communicated with an air exhaust hole of the horizontal platform, the inflator pump is fixed on the lower base plate through a screw, and the inflation pipeline on the inflator pump is communicated with an inflation hole of the horizontal platform.
7. A gas-assisted ultraviolet nanoimprinting apparatus as claimed in claim 1, characterized in that: the Z-axis micro-motion device comprises a substrate, a substrate chuck, a supporting table, a Z-axis working platform I and a Z-axis working platform II, wherein the substrate is clamped on the substrate chuck, the substrate chuck is fixedly connected with the supporting table, the supporting table is fixed on a rib plate I of the Z-axis working platform I and a rib plate II of the Z-axis working platform II through screws, and the Z-axis working platform I and the Z-axis working platform II are fixed on a lower bottom plate through screws.
8. A gas-assisted ultraviolet nanoimprinting apparatus as claimed in claim 7, characterized in that: the first Z-axis working platform comprises a first rib plate, a first slider, a housing, a second servo motor, a coupler, a second ball screw, a guide rail, a first screw support seat and a second screw support seat, the first rib plate is fixed on the slider through screws, the slider is in threaded connection with the second ball screw and is in sliding connection with the guide rail, the housing is fixed on a lower bottom plate through screws, the second servo motor is connected with the coupler, the coupler is connected with the second ball screw, the second ball screw is fixed by the first screw support seat and the second screw support seat, the guide rail is fixed on the housing, the first screw support seat and the second screw support seat are fixed on the housing through screws, and the second Z-axis working platform is identical to the first Z-axis working platform in structure and works.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022317515.8U CN213634096U (en) | 2020-10-19 | 2020-10-19 | Gas-assisted ultraviolet nano-imprinting device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022317515.8U CN213634096U (en) | 2020-10-19 | 2020-10-19 | Gas-assisted ultraviolet nano-imprinting device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN213634096U true CN213634096U (en) | 2021-07-06 |
Family
ID=76662050
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202022317515.8U Expired - Fee Related CN213634096U (en) | 2020-10-19 | 2020-10-19 | Gas-assisted ultraviolet nano-imprinting device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN213634096U (en) |
-
2020
- 2020-10-19 CN CN202022317515.8U patent/CN213634096U/en not_active Expired - Fee Related
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN106918987B (en) | Composite nano-imprint lithography machine and working method | |
| KR101990122B1 (en) | Replica mold production equipment for imprint lithography and method for manufacturing the same | |
| CN212160346U (en) | Pressure heating prevent fold 3D nanoimprint lithography apparatus | |
| CN109591323B (en) | Laying device suitable for Z-shaped composite material machine body bulkhead blank | |
| CN212602840U (en) | Vulcanization mold jacking mechanism | |
| KR101094928B1 (en) | Manufacturing device using vacuum and pressure | |
| CN213634096U (en) | Gas-assisted ultraviolet nano-imprinting device | |
| KR100982673B1 (en) | Apparatus for imprinting fine structures | |
| KR100784826B1 (en) | Nano imprinting lithography apparatus using roll-stamp | |
| CN111113918A (en) | Back plate skin composite die and composite method thereof | |
| KR100717971B1 (en) | Apparatus for imprinting the patern | |
| CN107367901B (en) | Roller-to-plane ultraviolet nanoimprint lithography device and method based on lifting platform | |
| CN208914598U (en) | The uniform hot stamping device of guide type large-area nano | |
| CN218866308U (en) | Nano-imprinting device and semiconductor processing equipment | |
| CN111679554A (en) | Double-cavity type uniform-pressure nano-imprinting mechanism, nano-imprinting equipment and method | |
| KR100755233B1 (en) | Imprinting lithography apparatus | |
| CN220569064U (en) | Nanometer stamping device for semiconductor mechanism | |
| CN220188851U (en) | Nanometer stamping device and semiconductor processing equipment | |
| KR20070081578A (en) | Imprint device and imprinting methode using the same | |
| KR100950745B1 (en) | Apparatus and method for supplying stamp in imprinting process | |
| CN220419792U (en) | Nanometer imprint manufacturing equipment and AR lens manufacturing equipment | |
| CN219533616U (en) | Be provided with nanometer impression device and semiconductor device of many adsorption area sucking discs | |
| CN108762001A (en) | A kind of device and its working method of mass manufacture large area micro-nano rice structure | |
| CN110426918B (en) | Magnetofluid-based optical function textured film imprinting device and imprinting method | |
| CN219076563U (en) | Corner board forming equipment |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20210706 Termination date: 20211019 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |