CN219533616U - Be provided with nanometer impression device and semiconductor device of many adsorption area sucking discs - Google Patents

Abstract

The utility model belongs to the technical field of semiconductor processing, and provides a nano imprinting device with a plurality of sucking discs in a sucking area and semiconductor equipment, comprising: a displacement table provided with a positioning member for positioning the substrate; the imprinting assembly is erected above the displacement table and is used for bonding the die and the substrate, and comprises an upper sucker provided with a plurality of adsorption areas and a pressure regulating device communicated with the adsorption areas and used for positive and negative pressure conversion of the adsorption areas; and the lifting device is used for pressing the die and the substrate, is connected with the imprinting assembly and drives the imprinting assembly to move up and down along the height direction of the displacement table. The nano imprinting device is provided with the nano imprinting workbench with the sucking discs with multiple adsorption areas, so that bubbles can be effectively prevented from occurring between the die and the substrate, the die is stressed uniformly and flatly, and the lamination quality is effectively improved.

Description

Be provided with nanometer impression device and semiconductor device of many adsorption area sucking discs

Technical Field

The utility model relates to the field of semiconductor processing, in particular to a nano imprinting device with a plurality of sucking discs in a sucking area and semiconductor equipment.

Background

Nanoimprinting is a completely new pattern transfer technique, different from traditional photolithography, that can "copy" the nanopattern from the template onto the substrate, with the advantages of high yield, low cost, and simple process. The nano-imprinting glue on the substrate enters the nano-structure of the template by pressure, and then the nano-imprinting glue is solidified and molded by a heating or ultraviolet exposure method, so that the microstructure on the template can be copied to the substrate.

When the nano imprinting device in the prior art imprints a substrate coated with imprinting glue, a die provided with a nano microstructure is flattened and tensioned through a tensioning mechanism, and then is rolled to the substrate through a press roller, so that the operation is performed in the mode, requirements on the uniformity of a gap between the press roller and the substrate, the flatness of the die and the like are high, and therefore, in the imprinting process, the imprinting quality is easily influenced by factors such as uneven stress of the die, uneven die and the like.

Disclosure of Invention

In view of the above, the embodiment of the utility model provides a nano imprinting device with a plurality of suction areas, which is used for solving the technical problems that in the imprinting process, the stress of a die is uneven, the die is uneven, bubbles are generated between the die and a substrate, and the like, so that the imprinting quality is affected.

In a first aspect, an embodiment of the present utility model provides a nanoimprint apparatus provided with a suction cup with multiple suction areas, including: a displacement table provided with a positioning member for positioning the substrate; the imprinting assembly is erected above the displacement table and is used for bonding the die and the substrate, and comprises an upper sucker provided with a plurality of adsorption areas and a pressure regulating device communicated with the adsorption areas and used for positive and negative pressure conversion of the adsorption areas; the lifting device is used for pressing and splitting the die and the substrate, is connected with the imprinting assembly and drives the imprinting assembly to move up and down along the height direction of the displacement table.

Preferably, when the suction areas are all set to be negative pressure, the die is sucked to the upper suction cup; when the adsorption areas are sequentially adjusted from the middle part to the periphery from negative pressure to positive pressure, the die and the substrate are gradually attached from the middle part to the periphery.

Preferably, the embossing assembly further comprises a mounting seat which extends horizontally to two sides of the upper sucker and is fastened with the power output end of the lifting device.

Preferably, the adsorption area is provided with a plurality of mutually communicated annular adsorption channels, and the annular adsorption channels are sequentially arranged from inside to outside along the horizontal direction of the adsorption surface.

Preferably, the upper sucker is provided with a plurality of adsorption channels respectively connected with the adsorption areas in a penetrating way, and each adsorption channel is connected with the pressure regulating device.

Preferably, the locating part sets up to down the sucking disc, down the sucking disc set up in the top of displacement platform, the displacement platform with install the solid lamp of UV light down between the sucking disc, just down the sucking disc adopts transparent material processing to form.

Preferably, the pressure regulating device comprises a vacuum pump, a pneumatic pump, a first air pipe connected with the vacuum pump, a second air pipe connected with the pneumatic pump, a multi-channel joint connected with the first air pipe and the second air pipe, and a plurality of fourth air pipes connected with the multi-channel joint respectively, wherein the fourth air pipes are connected with the corresponding adsorption channels respectively; the first air pipe and the second air pipe are provided with pressure regulating valve assemblies, and the first air pipe, the second air pipe and the fourth air pipe are provided with electromagnetic valve assemblies.

Preferably, the vacuum pump, the pneumatic pump, the pressure regulating valve assembly and the electromagnetic valve assembly are all electrically connected with an external electric control device.

Preferably, when the die and the substrate are in a bonding state and a pressing state, the outer edge of the die is always adsorbed on the upper sucker; when the die sheet is separated from the substrate after light fixation, the die sheet is adsorbed by negative pressure of a plurality of adsorption areas of the upper sucker.

In a second aspect, an embodiment of the present utility model provides a semiconductor device including any one of the nano-imprinting apparatus provided with the suction cup with multiple suction areas thereon.

In summary, the beneficial effects of the utility model are as follows:

according to the nano imprinting device and the semiconductor device provided with the suction cups with the multiple suction areas, provided by the embodiment of the utility model, the die and the substrate can be gradually attached from inside to outside through the arrangement of the suction cups with the multiple suction areas and the pressure regulating device, so that bubbles generated during attachment can be effectively avoided; meanwhile, the die plate and the substrate can be better pressed by the arrangement of the lifting device, so that the stamping quality is effectively improved.

Drawings

In order to more clearly illustrate the technical solution of the embodiments of the present utility model, the drawings required to be used in the embodiments of the present utility model will be briefly described, and it is within the scope of the present utility model to obtain other drawings according to these drawings without inventive effort for a person skilled in the art.

FIG. 1 is a schematic diagram of a nanoimprint apparatus provided with a suction cup with multiple adsorption areas according to the present utility model during lamination;

FIG. 2 is a schematic view of the bonded part of FIG. 1;

FIG. 3 is a schematic plan view of the suction surface of the suction cup of the present utility model;

FIG. 4 is a cross-sectional view taken along section A-A of FIG. 3;

FIG. 5 is an enlarged schematic view of FIG. 3 at B;

fig. 6 is a schematic diagram of a pressure regulating device according to the present utility model.

Parts and numbers in the figures: 1-a displacement table; 2-lifting device; 3-upper sucking disc; 31-a mounting base; 32-adsorption channels; 4-a lower sucker; 5-a substrate; 6-die; 71-a solenoid valve assembly; 72-multichannel linker; 73-a pressure regulating valve assembly; 74-a vacuum pump; 75-pneumatic pump.

Detailed Description

In order to make the objects, technical solutions and advantages of the embodiments of the present utility model more clear, the technical solutions of the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model. It is noted that relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. In the description of the present utility model, it should be understood that the terms "center," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like indicate orientations or positional relationships based on the orientation or positional relationships shown in the drawings, merely to facilitate describing the present utility model and simplify the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present utility model. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising … …" does not exclude the presence of other like elements in a process, method, article or apparatus that comprises the element. If not conflicting, the embodiments of the present utility model and the features of the embodiments may be combined with each other, which are all within the protection scope of the present utility model.

Referring to fig. 1 and 2, an embodiment of the present utility model provides a nanoimprint apparatus provided with a suction cup with multiple suction areas, the apparatus including: the displacement table 1 is provided with a positioning piece for positioning a substrate, is used for bearing a needed stamping workpiece and can bear the pressure during stamping, and has a displacement function; the embossing assembly is erected above the displacement table 1 and is used for bonding the die 6 and the substrate 5, and comprises an upper sucker 3 provided with a plurality of adsorption areas and a pressure regulating device communicated with the adsorption areas and used for positive and negative pressure conversion of the adsorption areas, wherein the pressure regulating device is connected with lifting devices 2 on two sides and driven by the lifting devices 2 to move up and down so as to realize an embossing function; the lifting devices 2 are arranged on two sides of the displacement table 1 and used for pressing the die 6 and the substrate 5, and meanwhile, the lifting devices 2 can also be used for detaching the die 6 and the substrate 5 after pattern transfer, and are connected with the imprinting assembly to drive the imprinting assembly to move up and down along the height direction of the displacement table.

Preferably, a lower suction cup 4 as a positioning member is carried on the top of the displacement stage 1 for sucking and positioning the substrate 5, and the lower suction cup 4 is provided on the top of the displacement stage 1. After the substrate 5 is absorbed and positioned by the lower sucker 4, the displacement table 1 can be moved to adjust the positioning and align with the imprinting assembly. Wherein the suction surface of the lower suction cup 4 faces upwards towards the embossing assembly and the substrate 5 is arranged above the suction surface.

Preferably, the imprinting assembly is erected above the displacement table 1 and comprises an upper sucker 3 provided with a plurality of suction areas and mounting seats 31 horizontally extending to two sides of the sucker and used for being connected with the lifting device 2. Wherein the upper suction cup 3 is used for sucking the die 6 parallel to the lower suction cup 4, and the sucking surface of the upper suction cup 3 faces downward to the lower suction cup 4.

Further, the substrate 5 is sucked by the lower suction cup 4 of the displacement table 1, the die 6 is sucked by the upper suction cup 3 of the imprinting assembly, then the substrate 5 and the die 6 are aligned by the alignment of the optical alignment system, then the substrate 5 and the die 6 are attached together by the downward movement of the two-side lifting devices 2, and then the pressing of the substrate 5 and the die 6 is realized by the downward pressing of the two-side lifting devices 2.

Referring to fig. 3 to 6, the upper suction cup 3 having a plurality of suction areas includes an upper disc body, a plurality of suction areas are sequentially disposed on a disc surface of the upper disc body from inside to outside, the suction areas are provided with a plurality of annular suction channels which are mutually communicated, the plurality of annular suction channels are sequentially disposed from inside to outside along a horizontal direction of the suction surface, and each suction area is annularly disposed and sequentially outwardly expanded. The upper sucker is also provided with a plurality of adsorption channels which are respectively in through connection with the adsorption areas, and each adsorption channel 32 is connected with the pressure regulating device. Each adsorption passage 32 is provided in the upper tray body, and the air pressure in the corresponding adsorption area is changed by adjusting the air pressure to be positive or negative.

The pressure regulating device in this scheme includes vacuum pump 74, pneumatic pump 75, the first trachea that is connected with vacuum pump 74, the second trachea that is connected with pneumatic pump 75, the multichannel joint 71 that is connected with first trachea and second trachea and the many fourth trachea that are connected with multichannel joint respectively. The plurality of fourth air pipes are respectively connected with the corresponding adsorption channels, the first air pipe and the second air pipe are provided with pressure regulating valve assemblies 73, the first air pipe, the second air pipe and the fourth air pipe are provided with electromagnetic valve assemblies 72, and the air pressure of each adsorption zone can be timely regulated according to the needs. The vacuum pump 74, the pneumatic pump 75, the pressure regulating valve assembly 73 and the electromagnetic valve assembly 72 are all electrically connected with an external electric control device, the air pressure of the corresponding adsorption area can be adjusted to positive pressure or negative pressure according to the required functions, and the whole adsorption area can realize partial positive pressure and partial negative pressure. By adjusting positive and negative pressure, different effects are generated on the adsorbed die 6, the adsorption effect can be generated by using a negative pressure mode, the die 6 can be expanded outwards and pushed out by using a positive pressure mode, and the imprinting of the substrate 5 is realized by switching the two modes. By gradually changing the different adsorption areas, the die 6 can be gradually changed from inside to outside, and the generation of bubbles is reduced when the substrate 5 is attached.

Specifically, in the nanoimprint device designed by adopting the scheme, the upper sucker 3 adsorbs the die sheet 6 on the adsorption surface through the negative pressure mode, and when the nanoimprint device is attached, the negative pressure of a plurality of adsorption areas is gradually switched into positive pressure from inside to outside when the die sheet 6 is adsorbed. When the adsorption area at the central position of the upper sucker 3 is switched from the initial negative pressure to the positive pressure, the adsorbed die 6 is pushed away by the pressure to expand downwards, a small piece of die 6 is downwards protruded at the central position of the die 6 in the range of the adsorption area regulated to the positive pressure, at the moment, the position of the imprinting assembly can be regulated by the lifting devices 2 at the two sides of the upper sucker 3, the die 6 is driven to downwards move until the protruding part of the die 6 is tangential with the substrate 5 below, then the positive pressure area of the upper sucker 3 is gradually enlarged, a plurality of adsorption areas at the periphery are also sequentially regulated to the positive pressure from inside to outside, the downwards-expanded range of the die 6 is gradually increased outwards until the whole die 6 gradually spreads the substrate 5 from inside to outside under the action of the positive pressures of the adsorption areas. By gradually spreading the contact from inside to outside, the die 6 can be gradually attached to the periphery when the die 6 is attached to the substrate 5, and air bubbles are prevented from being generated between the die 6 and the substrate 5.

Furthermore, when the die 6 is attached to the substrate 5 downwards through positive pressure expansion of the upper sucker 3, the lifting device 2 also continuously lowers the height downwards, and continuously applies downward pressure, so that the pattern on the die is transferred onto the substrate more stably and reliably, and the problem that the concave area of the pattern cannot be filled with the imprinting adhesive paved on the surface of the substrate due to insufficient pressure is avoided, and the imprinting quality is affected. Furthermore, after the imprinting structure on the substrate 5 is solidified under the action of the UV light curing lamp, the entire imprinting assembly is driven to rise by the lifting device, so as to drive the mold sheet 6 to be separated from the substrate 5. The separated die 6 can be absorbed back onto the upper sucker 3 from outside to inside by adjusting the air pressure of the plurality of absorption areas, namely, adjusting the plurality of absorption areas of the upper sucker 3 from outside to inside again, so that the die 6 is absorbed by the upper sucker 3 again, and then enters the next imprinting cycle.

In order to facilitate UV light fixation of the stamped substrate 5, the UV light fixation lamp is arranged on the displacement table 1 below the lower sucker 4, and the lower sucker 4 is formed by processing transparent materials (such as PMMA) and the like, so that UV light can conveniently irradiate onto the stamped substrate 5 with the nano structure through the lower sucker 4, and then the nano stamped structure is solidified. The UV light may also be fixed to the periphery of the lower chuck 4, so as to cure the nanoimprint structure on the substrate 5. The specific structural arrangement of the UV light fixation lamp in this scheme is relatively common in the related art, and detailed description thereof is omitted herein.

Furthermore, the lifting device 2 for erecting the imprinting assembly in the scheme can be set as an electric cylinder or a screw rod mechanism, so that the power output end of the lifting device 2 is fastened with the corresponding mounting seat 31, and then the imprinting assembly is driven to move up and down along the height direction by the lifting device 2, so that the imprinting requirement is met.

According to the nano imprinting device provided with the sucking discs with the multiple sucking areas, the sucking discs are used for sucking the mold pieces, and positive and negative pressures of all the sucking areas in the sucking discs are regulated to play roles in sucking and pushing away the mold pieces for expansion, so that the mold pieces and the substrate can be gradually unfolded and laid out from inside to outside in the imprinting process, imprinting lamination is more uniform, and bubbles are avoided during lamination.

Preferably, the upper suction cup 3 of the imprinting assembly of the nano imprinting device is adjusted to be in a negative pressure mode to adsorb the die 6, and the lower suction cup 4 adsorbs the substrate 5. When the nanoimprint device starts to work, the adsorption area in the center of the upper sucker 3 is firstly adjusted to be in a positive pressure mode by the pressure adjusting device, and the middle part of the die sheet 6 in the range of the adsorption area is pushed out and expanded to form a bulge. The imprinting assembly is lowered by the lifting device 2 until the die 6 is in tangential contact with the substrate 5, and then the positive pressure area is expanded from inside to outside continuously, so that the die 6 is gradually expanded downwards to be in contact with and fit with the substrate 5. Simultaneously, the lifting device 2 continuously descends, more pressure is applied to the lamination of the die 6 and the substrate 5, so that the imprinting is more tightly attached, the stress is more uniform, and the upward rebound of the positive pressure reaction of the imprinting module is prevented, and the imprinting effect is influenced.

Preferably, during the imprinting process, the adsorption area at the outermost periphery of the upper sucker 3 always maintains a negative pressure state to adsorb the die 6, and the internal adsorption area maintains a positive pressure for a certain period of time, so as to ensure sufficient imprinting of the die 6 and the substrate 5. The embossed structure of the substrate 5 is cured by a UV light curing lamp to complete the embossing. When the die 6 is separated from the substrate 5, the whole imprinting assembly is driven to ascend by the lifting device 2, and meanwhile, the suction area of the upper sucker 3 is also sequentially adjusted from positive pressure to negative pressure from outside to inside, so that the die 6 is again sucked by the upper sucker 3, and then the next imprinting is prepared.

In order to achieve still another object of the present utility model, a semiconductor device is provided, which includes the above nano-imprinting apparatus provided with the suction cup with multiple suction areas, so that the beneficial effects of any one of the above nano-imprinting apparatus can be obtained, and will not be described herein. Therefore, the nano imprinting device with the sucking discs with multiple adsorption areas of the semiconductor equipment can avoid air bubbles generated in the attaching process by changing the pressure of the adsorption areas to attach the die sheet 6 to the substrate 5 gradually, so that the pressing stress is more uniform, and the pressing quality is improved.

Finally, it should be noted that: the above embodiments are only for illustrating the technical solution of the present utility model, and not for limiting the same; although the utility model has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some or all of the technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit of the utility model.

Claims (10)

1. A nanoimprint apparatus provided with a suction cup of a multi-suction area, comprising:

a displacement table provided with a positioning member for positioning the substrate;

the imprinting assembly is erected above the displacement table and is used for bonding the die and the substrate, and comprises an upper sucker provided with a plurality of adsorption areas and a pressure regulating device communicated with the adsorption areas and used for positive and negative pressure conversion of the adsorption areas;

the lifting device is used for pressing and splitting the die and the substrate, is connected with the imprinting assembly and drives the imprinting assembly to move up and down along the height direction of the displacement table.

2. The nanoimprinting apparatus according to claim 1, wherein the die is adsorbed to the upper suction cup when a plurality of the adsorption areas are each set to a negative pressure; when the adsorption areas are sequentially adjusted from the middle part to the periphery from negative pressure to positive pressure, the die and the substrate are gradually attached from the middle part to the periphery.

3. The nanoimprinting apparatus according to claim 1, wherein the imprinting assembly further comprises a mounting base horizontally extending to both sides of the upper chuck and fastened to a power output end of the lifting device.

4. The nanoimprinting apparatus according to claim 2, wherein the adsorption zone is provided with a plurality of mutually penetrating annular adsorption channels, and the plurality of annular adsorption channels are sequentially arranged from inside to outside along a horizontal direction of the adsorption surface.

5. The nanoimprinting apparatus according to claim 4, wherein the upper suction cup is provided with a plurality of suction channels respectively connected to the suction areas in a penetrating manner, and each suction channel is connected to the pressure regulating means.

6. The nanoimprinting apparatus according to claim 5, wherein the positioning member is configured as a lower chuck, the lower chuck is disposed at a top of the displacement table, a UV light fixture is installed between the displacement table and the lower chuck, and the lower chuck is formed by processing a transparent material.

7. The nanoimprint apparatus according to claim 4, wherein the pressure regulating means comprises a vacuum pump, a pneumatic pump, a first air pipe connected to the vacuum pump, a second air pipe connected to the pneumatic pump, a multi-channel joint connected to the first air pipe and the second air pipe, and a plurality of fourth air pipes connected to the multi-channel joint, respectively, the plurality of fourth air pipes being connected to the corresponding adsorption channels, respectively; the first air pipe and the second air pipe are provided with pressure regulating valve assemblies, and the first air pipe, the second air pipe and the fourth air pipe are provided with electromagnetic valve assemblies.

8. The nanoimprinting apparatus according to claim 7, wherein the vacuum pump, the pneumatic pump, the pressure regulating valve assembly, and the solenoid valve assembly are all electrically connected to an external electronic control device.

9. The nanoimprint apparatus of claim 8 wherein an outer edge of the die is always attached to the upper chuck when the die is in a bonded state and a pressed state with the substrate; when the die sheet is separated from the substrate after light fixation, the die sheet is adsorbed by negative pressure of a plurality of adsorption areas of the upper sucker.

10. A semiconductor device comprising a nano-imprinting apparatus according to any one of claims 1 to 9 provided with a multi-suction zone chuck.