WO2014013563A1

WO2014013563A1 - Imprinting device

Info

Publication number: WO2014013563A1
Application number: PCT/JP2012/068170
Authority: WO
Inventors: 正治長谷川; 渚神谷; 高橋　大輔
Original assignee: アイトリックス株式会社
Priority date: 2012-07-18
Filing date: 2012-07-18
Publication date: 2014-01-23

Abstract

The imprinting device (1A) for transferring a pattern with nano-level detail formed on a stamper (4) onto a target resin film (5) comprises: tightly adhering holding units (12A, 12B), which are first holding units for holding the target resin film (5); a vacuum adsorption unit (9), which is a second holding unit for holding the stamper (4); and a first pressing unit (2A) and a second pressing unit (2B) for pressing the resin film (5) and the stamper (4). For the first and second pressing units (2A, 2B), airtight spaces are partitioned off by the resin film (5) that is held by the tightly adhering holding units (12A, 12B) and respective pressure-adjusting units (3A, 3B) for adjusting the pressures of the partitioned airtight spaces of the first and second pressing units (2A, 2B) are provided. The resin film (5) held by the tightly adhering holding units (12A, 12B) can be deformed by a difference in pressure resulting from the pressure-adjusting units (3A, 3B) and is configured from a plastic material.

Description

Imprint device

The present invention relates to an imprint apparatus for transferring a fine structure, and more particularly to an imprint apparatus.

Nanoimprint is a microfabrication technology that transfers a nano-level fine concavo-convex structure on a mold surface as a mold to a workpiece. There are two types of nanoimprinting methods: thermal and UV (ultraviolet irradiation). In thermal nanoimprints, thermoplastic substrates (PET, PMMA), thermosetting resins, etc. that have elasticity at room temperature and are not easily deformed but can be softened by heating to be processed into various shapes are used as work substrates. The concavo-convex structure is transferred to the workpiece by applying it on top and using it. The work used by this method is directly used as, for example, a liquid crystal light guide plate or an optical film. In the UV system, a UV curable resin that chemically changes from a liquid to a solid in response to the light energy of ultraviolet light is applied to the work substrate, and the mold and workpiece are overlapped and irradiated with ultraviolet light. The uneven structure is transferred to the workpiece. The workpiece used by this method can be used as a mask for etching semiconductors.

Further, using the two imprint apparatuses as described above, the first imprint apparatus obtains an intermediate stamp by imprinting a mold pattern onto a plastic polymer foil, and then the intermediate stamp is transferred to the first imprint apparatus. Some of them are sent from the printing apparatus to the second imprinting apparatus, and the second imprinting apparatus imprints the pattern of the intermediate stamp on the target surface of the substrate. (For example, refer to Patent Document 1).

JP 2007-165812 (paragraphs 0104 to 0110, FIGS. 24 to 27)

When imprinting is performed with the imprinting apparatus as described above, it is desirable to faithfully reproduce the pattern of the mold or intermediate stamp of the order of micrometers or nanometers on the workpiece.

However, in the above-mentioned Patent Document 1, air may be mixed between the overlapped mold and the workpiece, and when this air is obstructed and transferred, a pattern on the order of micrometers or nanometers. There is a problem that cannot be faithfully reproduced on the workpiece side.

The present invention has been made paying attention to such problems, and an object thereof is to provide an imprint apparatus capable of reproducing a pattern more faithfully.

In order to solve the above problems, an imprint apparatus according to the present invention provides:
In an imprint apparatus for transferring a pattern formed on a stamper to an object,
A first holding unit for holding one of the stamper and the object;
A second holding part for holding the other of the stamper and the object;
In an airtight space, a pressurizing unit that presses the object and the stamper;
First and second chambers forming the airtight space in the pressurizing section;
A pressure adjusting unit that adjusts the pressure of the airtight space of the pressurizing unit;
Have
The stamper or the object held by the first holding unit is configured by a member that can be deformed by pressure, and separates the airtight space of the pressurizing unit into two,
The pressure adjusting unit adjusts so as to generate a pressure difference in the two airtight spaces separated from each other.
According to this feature, in the pressurizing unit, the airtight space is separated by the stamper or the object held by the first holding unit, and in each separated airtight space, a pressure difference is generated by the pressure adjusting unit. Adjusted. For example, the pressure difference between the two airtight spaces separated by the stamper or the object held by the first holding unit by pressurizing one of the separated airtight spaces by the pressure adjusting unit and depressurizing the other. Thus, the stamper or the object held by the first holding part becomes a partition wall and is deformed by a pressure difference. Since the stamper or the partition member of the target object held by the first holding part is a deformable member, the central part of the partition member is deflected to the decompressed airtight space side by this pressure difference. Become. For this reason, after bringing the stamper of the partition held by the first holding part or the central part of the object into contact with the other central part of the stamper and the object fixedly held by the second holding part, The entire surface of the stamper and the object can be brought into contact with each other. After that, by pressing the object and the stamper by the pressurizing unit, it is possible to reduce the entry of air or the like between the stacked stamper and the object, and the pattern formed on the stamper. Can be reproduced more faithfully. Also, when releasing the mold, for example, the lower airtight space side is pressurized or the upper airtight space side is depressurized, and the stamper or the object serving as the partition wall is gradually bent from the peripheral portion to the depressurized side. Then, the mold can be released and finally the center part can be released. In addition, the lower airtight space side is pressurized, and at the same time, the upper airtight space side is pressurized so that a pressure difference is lower than that of the lower airtight space side. Both can be smoothly peeled off by air entering between them. That is, when a pressure difference is generated, the pressure difference may be generated by pressing one of the separated airtight spaces while pressing the other at a lower pressure. Then, a large force is applied to the stamper and the object at once, and it is released from the stamper without damaging the pattern formed on the object by gradually peeling with a uniform force without giving an impact. And the pattern can be reproduced more faithfully.

In the imprint apparatus of the present invention,
The pressure adjusting unit pressurizes one of the separated airtight spaces or depressurizes the other.
According to this feature, the pressure adjusting unit can generate a pressure difference by pressurizing one of the separated airtight spaces or depressurizing the other. Thereby, a part of one of the stamper and the object held by the first holding part is brought into contact with a part of the other of the stamper and the object held by the second holding part. Therefore, a part of the stamper or the object held by the first holding part contacts the other part of the stamper and the object held by the second holding part. After that, by moving the first and second pressure parts respectively and pressing the object and the stamper, it is possible to prevent air from being mixed between the stacked stamper and the object, The pattern can be reproduced more faithfully. Also, when releasing the mold, a pressure difference is generated by pressurizing one of the separated airtight spaces or by depressurizing the other, and the stamper or the object serving as the partition is decompressed from the peripheral portion. It can be gradually bent to the side to release the mold, and finally the center part can be released. In addition, the lower airtight space side is pressurized, and at the same time, the upper airtight space side is pressurized so that a pressure difference is lower than that of the lower airtight space side. Both can be smoothly peeled off by air entering between them. That is, when a pressure difference is generated, the pressure difference may be generated by pressing one of the separated airtight spaces while pressing the other at a lower pressure. Then, a large force is applied to the stamper and the object at once, and it is released from the stamper without damaging the pattern formed on the object by gradually peeling with a uniform force without giving an impact. And the pattern can be reproduced more faithfully.

In the imprint apparatus of the present invention,
The first holding part is provided between the first and second chambers,
One of the first and second chambers includes the second holding unit.
According to this feature, since the first holding unit is provided between the first chamber and the second chamber, the airtight space is separated by the stamper or the object held by the first holding unit. Can be made. For example, an elastic holding member such as an O-ring is provided on the end surface of the first chamber, and an elastic holding member such as an O-ring is provided on the end surface of the second chamber. The stamper or the object can be held by the elastic holding member with the chamber.

In the imprint apparatus of the present invention,
The pressure adjusting unit adjusts so that a pressure difference is generated in the airtight space separated into two parts before or after pressing by the pressurizing unit.
According to this feature, before the pressing by the pressurizing unit, the pressure adjusting unit adjusts the pressure difference in the separated airtight space so that the stamper or the object held by the first holding unit is pressurized. Deformation is caused by the difference, and in particular, the stamper held by the first holding part or the center part of the object may be bent toward the airtight space side by the pressure adjusting part on the second pressurizing part side reduced in pressure. It becomes possible. Further, after the pressing by the pressurizing unit, the pressure adjusting unit adjusts so that a pressure difference is generated in the separated airtight space, whereby the stamper held by the first holding unit or the peripheral part of the object is the second. The stamper held by the holding portion and the object can be gradually separated from the other peripheral portion.

In the imprint apparatus of the present invention,
A moving means for moving the stamper or the object after releasing the holding of the stamper or the object held by the first holding unit is provided.
According to this feature, the moving unit can move the stamper or the object to the next imprint apparatus after releasing the holding of the stamper or the object held by the first holding unit.

In the imprint apparatus of the present invention,
The pressurizing unit includes a heating unit for heating or an irradiation unit for irradiating light when pressing the object and the stamper.
According to this feature, the object can be heated by the heating means. For example, by heating the object such as a thermoplastic resin, the pattern of the stamper can be transferred to the object, or irradiation is performed. Since the light can be irradiated by the means, for example, the stamper pattern can be transferred to the object by irradiating the object such as a photocurable resin with light.

1 is an explanatory diagram of an imprint apparatus in Embodiment 1. FIG. It is explanatory drawing which shows a mode that the chamber of the imprint apparatus in Example 1 moves. FIG. 6 is an explanatory diagram illustrating a state in which a pressure unit of the imprint apparatus according to the first embodiment moves. FIG. 6 is an explanatory diagram illustrating a state of pressure adjustment of the imprint apparatus according to the first embodiment. FIG. 6 is an explanatory diagram illustrating a state in which a pressure unit of the imprint apparatus according to the first embodiment moves. FIG. 6 is an explanatory diagram illustrating a state where pressing is performed by a pressing unit of the imprint apparatus according to the first embodiment. FIG. 6 is an explanatory diagram illustrating a state of pressure adjustment of the imprint apparatus according to the first embodiment. FIG. 6 is an explanatory diagram illustrating a state in which a pressure unit of the imprint apparatus according to the first embodiment moves. FIG. 6 is an explanatory diagram illustrating a state of pressure adjustment of the imprint apparatus according to the first embodiment. FIG. 6 is an explanatory diagram illustrating a state of pressure adjustment of the imprint apparatus according to the first embodiment. It is explanatory drawing which shows a mode that the resin film of the imprint apparatus in Example 1 moves. FIG. 10 is an explanatory diagram of an imprint apparatus according to a second embodiment. It is explanatory drawing which shows a mode that the chamber of the imprint apparatus in Example 2 descend | falls. FIG. 10 is an explanatory diagram illustrating a state of pressure adjustment of the imprint apparatus according to the second embodiment. FIG. 10 is an explanatory diagram illustrating a state in which a pressure unit of an imprint apparatus according to a second embodiment moves. FIG. 10 is an explanatory diagram illustrating a state where pressing is performed by a pressing unit of the imprint apparatus according to the second embodiment. FIG. 10 is an explanatory diagram illustrating a state of UV irradiation of the imprint apparatus according to the second embodiment. FIG. 10 is an explanatory diagram illustrating a state of pressure adjustment of the imprint apparatus according to the second embodiment. FIG. 10 is an explanatory diagram illustrating a state in which a pressure unit of an imprint apparatus according to a second embodiment moves. FIG. 10 is an explanatory diagram illustrating a state of pressure adjustment of the imprint apparatus according to the second embodiment. FIG. 10 is an explanatory diagram illustrating a state of pressure adjustment of the imprint apparatus according to the second embodiment. It is explanatory drawing which shows a mode that the resin film of the imprint apparatus in Example 2 moves. FIG. 10 is a configuration diagram of an imprint system according to a third embodiment.

DETAILED DESCRIPTION OF EMBODIMENTS Embodiments for implementing an imprint apparatus and an imprint system according to the present invention will be described below based on examples.

The imprint apparatus and imprint system of Example 1 will be described with reference to FIGS.

FIG. 1 shows a configuration diagram of an imprint apparatus 1A according to the first embodiment, and FIGS. 2 to 11 show manufacturing processes when imprinting is performed in the imprint apparatus 1A. In addition, in FIGS. 1-11, the conceptual diagram is shown based on the front view in the vertical cross section of 1 A of imprint apparatuses.

In FIG. 1, an imprint apparatus 1 A for transferring a pattern of a shape formed on a nano-level fine uneven structure formed on a stamper 4 to a resin film 5 as an object holds a resin film 5 as an object. Contact holding

parts

12A and 12B that are one holding part, a vacuum suction part 9 that is a second holding part that holds the stamper 4, a first pressurizing part 2A that presses the resin film 5 and the stamper 4, and The first and

second pressure units

2A and 2B are separated from each other by the resin film 5 held by the close

contact holding units

12A and 12B, and the first and

second pressure units

2A and 2B are separated. The resin film 5 provided with

pressure adjusting parts

3A and 3B for adjusting the pressure in the airtight space of the first and

second pressurizing parts

2A and 2B, respectively, is held in the close

contact holding parts

12A and 12B. By a pressure difference due, a deformable material, consisting of thickness that flex elastically deformed. The resin film 5 is made of a flexible material so that it can be deformed, and it is sufficient that the film can be elastically deformed uniformly when a pressure difference occurs. It functions as a partition that separates the 2B airtight space into two. The resin film 5 can be composed of, for example, a polymer foil or the like, and polycarbonate, polymethyl methacrylate, cycloolefin copolymer, or the like can be used. In this case, the thickness of the polymer foil is, for example, about 0.01 mm to several mm. Can do. Moreover, the resin film 5 is deformed according to the pattern by being provided with plasticity and maintains the pattern, and for example, a thermoplastic resin or the like can be used. The pattern formed on the stamper 4 by being softened when heated can be transferred by the thermoplastic resin. Further, the imprint apparatus 1A includes first and

second chambers

8A and 8B that form airtight spaces in the first and

second pressure units

2A and 2B, respectively. Here, the airtight space is a space formed when the first and

second chambers

8A and 8B are closely closed, and is a sealed space where gas does not leak to the outside. The first and second chambers 8 A and 8 B are provided with the above-described close contact holding parts 12 A and 12 B, and the second chamber 8 B is provided with a vacuum suction part 9. Further, it is possible to provide a moving means for moving the resin film 5 in the left-right direction shown in FIG. 1 after releasing the holding of the resin film 5 held by the close

contact holding parts

12A and 12B.

The first chamber 8A is the upper chamber shown in FIG. 1, the second chamber 8B is the lower chamber, and can be moved up and down by a motor (not shown). When the close

contact holding portions

12A and 12B with the second chamber 8B are contacted and closed, the upper airtight space 11A and the lower airtight space 11B can be formed, respectively. An airtight space 11A formed by the first chamber 8A has a first O-ring 10A (such as rubber, which is a sealing member for sealing) via an annular O-ring 10A (in FIG. 1, two left and right portions are shown for sectional view). A pressurizing unit 2A and a pressure adjusting unit 3A for adjusting the pressure in the airtight space are provided. The pressure adjusting unit 3A has a configuration in which a pressure adjusting path that is connected to the airtight space 11A is provided in the first pressurizing unit 2A. The first pressurizing unit 2A can be moved up and down by a motor (not shown) or the like, and includes a cooling plate 6 on the lower end side thereof. An airtight space 11B formed by the second chamber 8B has a second O-ring 10B made of rubber or the like serving as a sealing member for sealing (two left and right portions are shown in the cross-sectional view in FIG. 1). The pressurizing unit 2B and the pressure adjusting unit 3B for adjusting the pressure in the airtight space are provided, and the second pressurizing unit 2B can be moved up and down by a motor or the like (not shown) via the shaft unit 13, A heating plate 7 and a stamper 4 are provided on the upper end side. The pressure adjustment unit 3B is configured to provide a pressure adjustment path that is connected to the airtight space 11B in the first chamber 8B. The stamper 4 is held on the upper surface side of the second pressurizing unit 2B by a vacuum suction unit 9 that is evacuated by a vacuum pump (not shown), but the periphery of the stamper 4 may be held by a clamp press or the like. . Moreover, you may comprise 1st and 2nd pressurization part 2A * 2B collectively as a pressurization part. When the first pressurizing unit 2A is lowered and the second pressurizing unit 2B is raised, the cooling plate 6 on the lower end side of the first pressurizing unit 2A and the second pressurizing unit 2B The pattern formed on the stamper 4 can be transferred to the resin film 5 by pressing the upper heating plate 7 and the stamper 4 with the resin film 5 sandwiched between them and pressing from above and below. When the resin film 5 is a thermoplastic resin film, when the resin film 5 is pressed, it is pressed by the first and

second pressure portions

2A and 2B while being heated by the heating plate 7, and then cooled by the cooling plate 6. Thus, the pattern transferred to the resin film 5 can be cured.

In the first embodiment, the target resin film 5 is held by being sandwiched between the close contact holding portion 12A provided on the lower side of the first chamber 8A and the close contact holding portion 12B provided on the upper side of the second chamber 8B. The close

contact holding portions

12A and 12B can be formed of an annular O-ring such as rubber which is a sealing member for sealing. The resin film 5 is transported by a moving means (not shown) so that the resin film 5 can move. When the first chamber 8A is moved downward and the second chamber 8B is moved upward, the resin film 5 is provided. It is sandwiched between the close

contact holding parts

12A and 12B such as rings. Thus, an upper airtight space 11A and a lower airtight space 11B are formed through the resin film 5, respectively. At that time, the pressure of the upper airtight space 11A can be adjusted by the pressure adjusting unit 3A, and the pressure of the lower airtight space 11B can be adjusted by the pressure adjusting unit 3B. By providing a pressure difference with 3A and 3B, the resin film 5 held by the close

contact holding portions

12A and 12B is deformed by the pressure difference, and the resin film 5 held by the close

contact holding portions

12A and 12B is deformed. Since this is a possible member, this pressure difference causes the central portion of the member to bend toward the decompressed airtight space. For this reason, after making the center part of the resin film 5 hold | maintained by the contact | adherence holding | maintenance part 12A * 12B contact the center part of the stamper 4 hold | maintained by the vacuum suction part 9, the whole surface of the stamper 4 and the resin film 5 is made. Can be contacted. After that, the stamper 4 and the resin film 5 are pressed by the first and

second pressurizing parts

2A and 2B, so that air or the like is mixed between the stamper 4 and the resin film 5 that are overlapped. The pattern formed on the stamper 4 can be reproduced more faithfully.

Next, an imprint manufacturing method using the imprint apparatus 1A will be described.

First, as shown in FIG. 1, when imprinting is performed, the stamper 4 is set on the second pressure unit 2B. Moreover, the resin film 5 is set in the predetermined position of the 1st and 2nd pressurization part 2A * 2B. In this state, the resin film 5 can be moved by moving means, and the stamper 4 is pressure-bonded at a position on the resin film 5 where a pattern is to be formed by moving from left to right in the drawing. Alignment is performed to match the position.

Next, as shown in FIG. 2, the resin film 5 is sandwiched between the close contact holding portions 12 A and 12 B by lowering the first chamber 8 A from the initial position in the lower direction 20. In this case, the second chamber 8B may be raised while lowering the first chamber 8A, or only the second chamber 8B may be raised. Thus, when the close

contact holding portions

12A and 12B between the first chamber 8A and the second chamber 8B are contacted and closed, an upper airtight space 11A and a lower airtight space 11B are formed, respectively.

Next, the heating plate 7 is heated to heat the stamper 4, and as shown in FIG. 3, the second pressurizing unit 2 B is raised to a predetermined position in the direction of the arrow 21 through the shaft portion 13. In this case, the position of the stamper 4 of the second pressurizing unit 2B is at a predetermined distance from the resin film 5 so that the stamper 4 does not contact the resin film 5 (such as when the resin film 5 is bent). 2nd pressurization part 2B is raised so that it may exist in a position).

Next, the pressure adjustment unit 3B depressurizes the lower airtight space 11B in the direction of the arrow 22B, thereby generating a pressure difference between the upper airtight space 11A and the lower airtight space 11B. Thereby, since the resin film 5 bends downward, the central portion of the resin film 5 held by the close

contact holding portions

12A and 12B is brought into contact with the central portion of the stamper 4 held by the vacuum suction portion 9. be able to. In this case, the pressure adjustment unit 3A may cause the pressure difference between the upper airtight space 11A and the lower airtight space 11B by pressurizing the upper airtight space 11A in the direction of the arrow 22A, or The pressure difference may be provided by adjusting both the pressure adjusting unit 3A and the pressure adjusting unit 3B. Thereby, the resin film 5 bends with respect to the airtight space with a low pressure, and the center part of the resin film 5 can contact the center part of the stamper 4.

Next, as shown in FIG. 5, the first pressurizing unit 2 A is moved in the direction of the arrow 25 so that the stamper 4 and the resin film 5 are in close contact with the lower airtight space 11 B being decompressed. The second pressure member 2B is gradually raised in the direction of the arrow 21. Thereby, after the center part of the resin film 5 contacts the center part of the stamper 4, the center of the resin film 5 is gradually moved by moving the first pressurizing part 2A or the second pressurizing part 2B gradually. From the portion toward the periphery, it can be brought into contact with the entire surface of the stamper 4 and can be brought into close contact without air mixing therein.

Next, as shown in FIG. 6, the stamper 4 and the resin film 5 are brought into close contact with each other, and the temperature of the resin film 5 is increased to the glass transition temperature (Tg) by heating with the heating plate 7. In order to press 5, the pattern of the stamper 4 is transferred to the resin film 5 by gradually raising the second pressurizing part 2 B in the direction of the arrow 21 and pressurizing with a predetermined pressure in the direction of the arrow 26. To do. In this case, the pattern transferred to the resin film 5 can be cured by cooling the resin film 5 with the cooling plate 6 after heating and pressing for a predetermined time.

After that, as shown in FIG. 7, the pressure adjusting unit 3A or the pressure adjusting unit 3B is opened to the atmospheric pressure (

arrows

27A and 27B in FIG. 7), and as shown in FIG. The first pressurizing unit 2 A is isolated from the resin film 5 by being raised in the 28 direction.

Thereafter, as shown in FIG. 9, the pressure adjustment unit 3B pressurizes the lower airtight space 11B in the direction of the arrow 30B, thereby creating a pressure difference between the upper airtight space 11A and the lower airtight space 11B. The resin film 5 is bent upward from the periphery of the resin film 5 and gradually released, and the resin film 5 is gradually peeled off from the stamper 4 with a uniform force. Finally, the center of the resin film 5 is removed from the center portion of the stamper 4. Release the part. By pressurizing the lower airtight space 11B side, the resin film 5 can be flexed upward from the periphery of the resin film 5, and the resin film 5 can be gradually peeled off from the stamper 4 with uniform force. The mold can be released from the stamper 4 without damaging the pattern. In this case, the pressure adjustment unit 3A may cause the pressure difference between the upper airtight space 11A and the lower airtight space 11B by reducing the pressure of the upper airtight space 11A in the direction of the arrow 30A, or A pressure difference may be provided by adjusting both the pressure adjusting unit 3A and the pressure adjusting unit 3B. For example, both the pressure adjusting unit 3A and the pressure adjusting unit 3B are adjusted to pressurize the lower airtight space 11B side, and at the same time, the pressure on the upper airtight space side 11A is lower than that on the lower airtight space 11B side. You may make it pressurize so that a big pressure difference may be made. As a result, air enters between the stamper 4 and the resin film 5 from the periphery of both of them, so that the resin film 5 serving as the partition wall is gradually bent from the peripheral portion to the decompressed side to release the mold, and finally the central portion. Can be released.

Thereafter, as shown in FIG. 10, the pressure adjusting unit 3A or the pressure adjusting unit 3B is opened to the atmospheric pressure. Thereby, the pattern formed on the stamper 4 can be reproduced more faithfully on the resin film 5.

Further, as shown in FIG. 11, the resin film 5 is moved in the right direction 32 by the moving means, and the next imprint can be performed.

In the first embodiment, the pressure adjusting unit 3A or the pressure adjusting unit 3B depressurizes the lower airtight space 11B side to bend the resin film 5 downward, and then the first and second pressurizing units. 2A and 2B are moved to bring the stamper 4 and the resin film 5 into close contact with each other and then pressed, thereby reducing air from being mixed between the stacked stamper 4 and the resin film 5. Can be reproduced more faithfully. Also, when releasing the mold, the lower airtight space 11B side is pressurized or the upper airtight space 11A side is depressurized and gradually bent from the peripheral portion of the resin film 5 to the depressurized side. Finally, the central part can be released, and the resin film 5 is gradually peeled off from the stamper 4 with a uniform force, so that the pattern formed on the resin film 5 can be released from the stamper 4 without damaging the pattern. Can be made. Further, simultaneously with pressurization of the lower airtight space 11B side, the upper airtight space 11A side is pressurized so that a pressure difference is generated so that the pressure is lower than that of the lower airtight space 11B side. Since air enters between the resin film 5 and the periphery of the both, the two can be smoothly separated.

Next, the imprint apparatus and the imprint system of Example 2 will be described with reference to FIGS.

FIG. 12 shows a configuration diagram of the imprint apparatus 1B according to the second embodiment, and FIGS. 13 to 22 show manufacturing steps when imprinting is performed in the imprint apparatus 1B. 12 to 22 are conceptual diagrams based on a front view in a vertical section of the imprint apparatus 1B. In addition, the description of the same configuration as the first embodiment is omitted.

In the first embodiment, the thermal imprint apparatus 1A is shown. However, in the second embodiment, the UV imprint apparatus 1B is described, and a pattern formed on the resin stamper 18 is used as an object. A case where the workpiece 17 is transferred onto the UV (ultraviolet) curable resin 16 applied to the substrate surface will be described.

The imprint apparatus 1B according to the second embodiment uses a UV panel 14 and quartz at the lower end side of the first pressurizing unit 2A instead of the cooling plate 6 provided at the lower end side of the first pressurizing unit 2A in the first embodiment. A plate 15 is provided, and instead of providing the heating plate 7 and the stamper 4 on the upper end side of the second pressure unit 2B in the first embodiment, a workpiece 17 coated with a UV curable resin 16 is provided. Instead of the resin film 5, the resin stamper 18 is held by the close contact holding part 12A · 1B.

With such a configuration, the close

contact holding portions

12A and 12B, which are the first holding portions, hold the resin stamper 18, and the airtight space is separated by the resin stamper 18 held by the close

contact holding portions

12A and 12B. The resin stamper 18 is formed of a transparent member and, like the resin film 5, is made of a material having flexibility so that it can be deformed by the pressure difference between the

pressure adjusting portions

3A and 3B. It is only necessary that the film can be elastically deformed uniformly when sag occurs, and the film functions as a partition that separates the airtight spaces of the first and

second pressure units

2A and 2B into two. Alternatively, instead of the resin stamper 18, a material made of other metal such as nickel electroforming or nickel phosphorus, silicon, silicon carbide, glass or the like in a thin film shape may be used as the stamper. That is, the stamper serving as the partition wall may be made of a material and a thickness that have a property of being elastically deformed and bent due to the pressure difference between the

pressure adjusting portions

3A and 3B. In this case, for example, the thickness of the nickel electroformed thin film can be set to about 0.03 mm to several mm, and other materials have a thickness enough to bend by elastic deformation. Further, the resin stamper 18 is attached to a plate-like substrate made of a material having a property of being elastically deformed and bent, and the plate-like substrate and the resin stamper 18 are separated into two airtight spaces in the pressurizing portion. It may be used as a partition wall. In this case, instead of the resin stamper 18, a stamper made into a thin film made of other metal such as nickel electroforming or nickel phosphorus, silicon, silicon carbide, glass or the like is attached to the plate-like substrate. May be. In Example 1, the resin film 5 after the pattern formed on the stamper 4 is transferred can also be used as the resin stamper 18. Further, it is possible to provide moving means for moving the resin stamper 18 in the left-right direction shown in FIG. 12 after releasing the holding of the resin stamper 18 held by the close

contact holding parts

12A and 12B. The vacuum suction unit 9 sucks and holds the workpiece 17 coated with the UV curable resin 16. When the resin stamper 18 and the workpiece 17 are pressed by the first and

second pressure units

2A and 2B, a pattern is formed by the resin stamper 18 on the UV curable resin 16 applied to the substrate surface of the workpiece 17. After that, the UV panel 14 is irradiated with ultraviolet rays to irradiate the UV curable resin 16 with ultraviolet rays through the quartz plate 15 and the resin stamper 18 to cure the resin, and the workpiece 17 is formed on the substrate surface. Keep the pattern.

An imprint manufacturing method using the imprint apparatus 1B according to the second embodiment will be described.

First, as shown in FIG. 12, when imprinting is performed, a work 17 coated with a UV curable resin 16 is set on the second pressure unit 2B. A resin stamper 18 is set at a predetermined position of the first and

second pressure units

2A and 2B. In this state, the resin stamper 18 can be moved by the moving means, and is moved from the left to the right in the drawing, so that the position of the resin stamper 18 is on the workpiece 17 coated with the UV curable resin 16. Positioning is performed so as to match the position where the pattern is to be formed.

Next, as shown in FIG. 13, the resin stamper 18 is sandwiched between the close contact holding portions 12 A and 12 B by lowering the first chamber 8 A from the initial position in the lower direction 33. In this case, the second chamber 8B may be raised while lowering the first chamber 8A, or only the second chamber 8B may be raised. Thus, when the close

contact holding portions

Next, as shown in FIG. 14, the pressure adjusting unit 3B depressurizes the lower airtight space 11B in the direction of the arrow 36, so that the diluted solvent 35 of the applied UV curable resin 16 is blown into the space. Can do. By reducing the pressure, the diluted solvent 35 of the UV curable resin 16 is diffused from the surface of the workpiece 17 into the space, and the remaining film of the UV curable resin 16 on the surface of the workpiece 17 can be made as thin as possible.

Further, as shown in FIG. 15, the second pressurizing part 2B is raised to a predetermined position in the direction of arrow 37 via the shaft part 13, and the lower airtight space 11B is moved in the direction of arrow 36 by the pressure adjusting part 3B. Further pressure reduction causes a pressure difference between the upper airtight space 11A and the lower airtight space 11B. As a result, the resin stamper 18 bends downward, so that the center portion of the resin stamper 18 held by the

contact holding parts

12A and 12B is coated with the UV curable resin 16 held by the vacuum suction part 9. The center part of 17 can be contacted. In this case, the pressure adjustment unit 3A may pressurize the upper airtight space 11A to cause a pressure difference between the upper airtight space 11A and the lower airtight space 11B, or the pressure adjustment unit You may adjust both 3A and the pressure adjustment part 3B, and may provide a pressure difference. Thereby, the resin stamper 18 bends with respect to the airtight space with a low pressure, and the central portion of the resin stamper 18 can contact the central portion of the workpiece 17.

Next, as shown in FIG. 16, the first pressurization is performed so that the work 17 coated with the UV curable resin 16 and the resin stamper 18 are in close contact with the lower airtight space 11 B being decompressed. The part 2A is gradually lowered in the direction of the arrow 39, and the second pressurizing part 2B is gradually raised in the direction of the arrow 37. Thus, after the central portion of the resin stamper 18 comes into contact with the central portion of the workpiece 17 coated with the UV curable resin 16, the first pressurizing unit 2A or the second pressurizing unit 2B is gradually moved to thereby form the resin. The stamper 18 can be brought into contact with the entire surface of the work 17 from the central portion toward the periphery, and can be brought into close contact without air being mixed therein. The

first pressurizing units

2A and 2B pressurize from the direction of the arrow 38 after the work 17 and the resin stamper 18 are in close contact with each other.

Next, as shown in FIG. 17, the workpiece 17 and the resin stamper 18 coated with the UV curable resin 16 are pressurized for a predetermined time and then irradiated with the ultraviolet rays 40 by the UV panel 14 for a predetermined time, whereby the UV curable resin 16. Is cured to form a pattern on the workpiece 17. In this case, the ultraviolet ray 40 is irradiated after pressing for a predetermined time, whereby the pattern formed on the resin stamper 18 is transferred to the UV curable resin 16 on the workpiece 17 substrate, and the transferred pattern is cured. The pattern can be maintained.

Thereafter, after the UV curable resin 16 is cured, as shown in FIG. 18, the pressure adjustment unit 3B adjusts the pressure in the direction of the arrow 41 to open the lower airtight space 11B to atmospheric pressure. As shown in FIG. 19, the first pressurizing unit 2 A is raised in the direction of the arrow 42 to isolate the first pressurizing unit 2 A from the resin stamper 18.

After that, as shown in FIG. 20, the pressure adjustment unit 3A depressurizes the upper airtight space 11A in the direction of arrow 43, or the pressure adjustment unit 3B pressurizes the lower airtight space 11B in the direction of arrow 41. By creating a pressure difference between the upper airtight space 11A and the lower airtight space 11B, the workpiece 17 is coated with the UV curable resin 16 by bending upward from the periphery of the resin stamper 18 and gradually releasing the mold. Then, the resin stamper 18 is gradually peeled off with a uniform force, and finally, the central portion of the resin stamper 18 is released from the central portion of the work 17 coated with the UV curable resin 16. By pressurizing the lower airtight space 11B in the direction of the arrow 41, the resin stamper 18 can be flexed upward from the periphery of the resin stamper 18, and the resin stamper 18 can be gradually separated from the workpiece 17 with a uniform force. It is possible to release the mold from the resin stamper 18 without damaging the pattern formed. In this case, both the pressure adjusting unit 3A and the pressure adjusting unit 3B may be adjusted to provide a pressure difference, or only the pressure adjusting unit 3B may be pressurized. For example, both the pressure adjusting unit 3A and the pressure adjusting unit 3B are adjusted to pressurize the lower airtight space 11B side, and at the same time, the pressure on the upper airtight space side 11A is lower than that on the lower airtight space 11B side. You may make it pressurize so that a big pressure difference may be made. As a result, air enters between the resin stamper 18 and the work 17 from the periphery of both of them, so that the resin stamper 18 serving as the partition wall is gradually bent from the peripheral portion to the decompressed side to release the mold, and finally the central portion. Can be released.

After that, as shown in FIG. 21, the pressure adjustment unit 3A adjusts the pressure in the direction of the arrow 45, thereby opening the upper airtight space 11A to atmospheric pressure. As a result, a work 17 is completed in which the pattern formed on the resin stamper 18 is reproduced more faithfully on the surface of the work 17 coated with the UV curable resin 16.

Further, as shown in FIG. 22, the resin stamper 18 is moved in the right direction 47 by the moving means to shift to the next process, and the workpiece 17A after pattern formation is replaced with a new workpiece 17, and the next imprint is performed. It can be performed.

In the second embodiment, the lower airtight space 11B side is depressurized by the pressure adjusting unit 3A or the pressure adjusting unit 3B, and the diluted solvent 35 of the UV curable resin 16 is diverged, whereby the UV on the surface of the workpiece 17 is obtained. The residual film due to the cured resin 16 can be made as thin as possible, and further, the pressure adjustment part 3A or the pressure adjustment part 3B is used to depressurize the lower airtight space 11B, and the resin stamper 18 is bent downward. Air is mixed between the overlapped workpiece 17 and the resin stamper 18 by moving the first and

second pressurizing parts

2A and 2B to bring the workpiece 17 and the resin stamper 18 into close contact with each other and pressing them. The pattern can be reduced and the pattern can be reproduced more faithfully. In the case of releasing, the lower airtight space 11B side is pressurized and gradually bent from the peripheral portion of the resin stamper 18 to the reduced pressure side, and finally the center portion is released. The resin stamper 18 is gradually peeled off from the work 17 coated with the UV curable resin 16 with a uniform force, so that the pattern formed on the work 17 is not damaged and the UV curable resin 16 is removed from the resin stamper 18. The workpiece 17 coated with can be released. Further, simultaneously with pressurization of the lower airtight space 11B side, the upper airtight space 11A side is pressurized so that a pressure difference is generated so that the pressure is lower than that of the lower airtight space 11B side. Since air enters between the resin stamper 18 from the periphery of both, the both can be smoothly peeled off.

Next, an imprint system when the imprint apparatus 1A of the first embodiment and the imprint apparatus 1B of the second embodiment are used together will be described as a third embodiment with reference to FIG.

As shown in FIG. 23, by imprinting a pattern on the resin film 5 in the imprint apparatus 1A described above, a resin stamper 18 having a pattern is obtained as an intermediate stamp, and then the resin stamper 18 is placed on the imprint apparatus 1B side. Then, in the above-described imprint apparatus 1B, the pattern formed on the resin stamper 18 is imprinted on the surface of the workpiece 17, so that each manufacturing process can be executed continuously, and two units are parallel. By executing the process, a plurality of workpieces can be manufactured in parallel, and mass production becomes easy.

The imprint system according to the third embodiment is a first imprint apparatus that includes a first imprint apparatus 1A and a second imprint apparatus 1B that transfer a pattern formed on a stamper to an object. A moving means for moving the resin stamper 18 from 1A to the second imprint apparatus 1B is provided, and the first imprint apparatus 1A is a first holding unit that holds the resin film 5 as an object.

Parts

12A and 12B, a vacuum suction part 9 as a second holding part for holding the stamper 4, a first pressurizing part 2A and a second pressurizing part 2B for pressing the resin film 5 and the stamper 4, The first and

second pressure parts

2A and 2B are separated from the airtight space by the resin film 5 held by the close

contact holding parts

12A and 12B. The resin film 5 that is provided with

pressure adjusting portions

3A and 3B that adjust the pressure in the airtight spaces of the first and

second pressurizing portions

2A and 2B, respectively, The second imprint apparatus 1B is formed of a material that is deformable and has plasticity due to a pressure difference between 3A and 3B, and the second imprint apparatus 1B is a first holding part that holds the resin stamper 18, and is a close

contact holding part

12A and 12B. A vacuum suction unit 9 that is a second holding unit that holds the workpiece 17 coated with the UV curable resin 16, a first pressurizing unit 2A that presses the resin stamper 18 and the workpiece 17, and a second pressurizing unit. The first and

second pressure units

2A and 2B are separated from each other by the resin stamper 18 held by the close

contact holding parts

12A and 12B, and the separated first and second parts are separated from each other. Pressure unit 2 The resin stamper 18 provided with the

pressure adjusting portions

3A and 3B for adjusting the pressure in the 2B airtight space, respectively, and held by the close

contact holding portions

12A and 12B can be deformed by the pressure difference between the

pressure adjusting portions

3A and 3B. And made of a material having plasticity.

The resin film 5 in Example 3 is wound around the roll 50, and the resin film 5 and the resin stamper 18 can be moved by winding the resin stamper 18 having a pattern on the roll 51 provided on the other side. it can. The completed pattern-formed work 17 A is transferred by the work transfer machine 52 and stocked in the work stocker 53. Also in this embodiment, in the above-described imprint apparatus 1A and imprint apparatus 1B, the resin film 5 or the resin stamper 18 is pressurized by causing a pressure difference between the upper airtight space 11A and the lower airtight space 11B. The center portion of the resin film 5 or the resin stamper 18 can be brought into contact with the center portion of the stamper 4 or the workpiece 17 after being bent with respect to the low airtight space, and then the first pressurizing part 2A or the first 2 is gradually moved in the direction of approaching, so that it can be brought into contact with the entire surface of the stamper 4 or the work 17 from the central portion of the resin film 5 or the resin stamper 18 toward the periphery, and air is mixed in. It can be made to adhere without doing.

In the first imprint apparatus 1A, the resin film 5 is held by the close

contact holding parts

12A and 12B of the first holding part, the stamper 4 is held by the vacuum suction part 9 of the second holding part, and the resin film 5 The stamp 4 can be transferred to the resin film 5 by pressing the stamper 4 with the first pressure unit 2A and the second pressure unit 2B. Thereby, it can be set as the resin stamper 18 in which the pattern was formed. Thereafter, the resin stamper 18 formed by the first imprint apparatus 1A is moved and set by the moving means to the second imprint apparatus 1B. In the second imprint apparatus 1B, the

adhesion holding portions

12A and 12B are set. The resin stamper 18 is held, the workpiece 17 coated with the UV curable resin 16 is held in the vacuum suction unit 9, and the resin stamper 18 and the workpiece 17 coated with the UV curable resin 16 are connected to the first pressure unit 2 A and the first pressurizing unit 2 A. The pattern formed on the resin stamper 18 can be transferred to the workpiece 17 coated with the UV curable resin 16 by being pressed at the second pressure unit 2B. In the first imprint apparatus 1A, the resin film 5 held by the close

contact holding parts

12A and 12B is composed of a member that can be deformed by pressure, and the first pressurizing part 2A and the second pressurizing part 2B. The airtight space is separated into two, and the

pressure adjusting portions

3A and 3B adjust the resin film 5 held by the close

contact holding portions

12A and 12B in order to adjust the pressure difference in the airtight space separated into two. After the central portion is brought into contact with the central portion of the stamper 4 held by the vacuum suction portion 9, the entire surfaces of the stamper 4 and the resin film 5 can be brought into contact with each other. After that, the stamper 4 and the resin film 5 are pressed by the first and

second pressurizing parts

2A and 2B, so that air or the like is mixed between the stamper 4 and the resin film 5 that are overlapped. The pattern formed on the stamper 4 can be reproduced more faithfully. Further, at the time of mold release, as in the first embodiment, the lower airtight space 11B side is pressurized or the upper airtight space 11A side is depressurized to reduce the pressure from the peripheral portion of the resin film 5 Can be gradually bent and released, and finally the center part can be released, and the resin film 5 is gradually peeled off from the stamper 4 with a uniform force, so that the pattern formed on the resin film 5 is damaged. Without releasing from the stamper 4. Further, simultaneously with pressurization of the lower airtight space 11B side, the upper airtight space 11A side is pressurized so that a pressure difference is generated so that the pressure is lower than that of the lower airtight space 11B side. Since air enters between the resin film 5 and the periphery of the both, the two can be smoothly separated. Further, in the second imprint apparatus 1B, the resin stamper 18 held by the close

contact holding parts

12A and 12B is composed of a member that can be deformed by pressure, and the first pressurizing part 2A and the second pressurizing part. 2B is divided into two, and the

pressure adjusting portions

3A and 3B are adjusted so that a pressure difference is generated in the two air-tight spaces, so that the resin stamper held by the close

contact holding portions

12A and 12B After the center portion of 18 is brought into contact with the center portion of the workpiece 17 held by the vacuum suction portion 9, the entire surface of the resin stamper 18 and the workpiece 17 can be brought into contact with each other. After that, the resin stamper 18 and the workpiece 17 are pressed by the first and

second pressure units

2A and 2B, so that air or the like is mixed between the superimposed resin stamper 18 and the workpiece 17. And the pattern formed on the resin stamper 18 can be reproduced more faithfully. When releasing the mold, similarly to the second embodiment, the upper airtight space 11A is depressurized in the direction of arrow 43 by the pressure adjusting unit 3A, or the lower airtight space 11B by the pressure adjusting unit 3B. Is pressed in the direction of the arrow 41 to create a pressure difference between the upper airtight space 11A and the lower airtight space 11B, thereby causing the resin stamper 18 to bend upward from the peripheral portion and gradually release. The resin stamper 18 is gradually peeled off from the workpiece 17 coated with the curable resin 16 with a uniform force, and finally, the central portion of the resin stamper 18 is released from the central portion of the workpiece 17 coated with the UV curable resin 16. it can. For example, both the pressure adjusting unit 3A and the pressure adjusting unit 3B are adjusted to pressurize the lower airtight space 11B side, and at the same time, the pressure on the upper airtight space side 11A is lower than that on the lower airtight space 11B side. You may make it pressurize so that a big pressure difference may be made. As a result, air enters between the resin stamper 18 and the work 17 from the periphery of both of them, so that the resin stamper 18 serving as the partition wall is gradually bent from the peripheral portion to the decompressed side to release the mold, and finally the central portion. Can be released. According to the imprint system in Example 3, a desired pattern can be reproduced more faithfully, each manufacturing process can be executed continuously, and the processes can be executed in parallel by two units. A plurality of workpieces can be manufactured in parallel, and mass production becomes easy.

Although the embodiments of the present invention have been described with reference to the drawings, the specific configuration is not limited to these embodiments, and modifications and additions within the scope of the present invention are included in the present invention. It is.

In the first and third embodiments, the stamper 4 is held on the upper surface side of the second pressurizing unit 2B, and the cooling plate 6 is provided on the lower surface side of the first pressurizing unit 2A. The stamper 4 may be disposed on the opposite side, the stamper 4 may be held on the lower surface side of the first pressure unit 2A, and the cooling plate 6 may be provided on the upper surface side of the second pressure unit 2B. In this case, the pressure adjustment between the upper airtight space 11A and the lower airtight space 11B is such that when the resin film 5 is brought into contact with the stamper 4, the upper airtight space 11A has a lower pressure than the lower airtight space 11B. What is necessary is just to adjust so that the pressure may be lower in the lower airtight space 11B than in the upper airtight space 11A when the resin film 5 is separated from the stamper 4. In the second and third embodiments, similarly, the arrangement positions of the workpiece 17, the UV panel 14, and the quartz plate 15 may be reversed. The same applies to the third embodiment, and these arrangement positions may be arranged either vertically.

The pressure adjustment unit 3A in the imprint apparatus 1A and the imprint apparatus 1B has a configuration in which a pressure adjustment path is provided in the first pressurization unit 2A, but the first chamber is similar to the pressure adjustment unit 3B. A pressure adjustment path may be provided in 8A. Further, the pressure adjustment unit 3B may have a configuration in which a pressure adjustment path is provided in the second pressurization unit 2B, similarly to the pressure adjustment unit 3A.

The close

contact holding parts

12A and 12B are configured by an annular O-ring that is a sealing member for sealing, but can prevent the fluid from entering and can be sealed so that the internal fluid does not leak to the outside. 5 or any material that can hold the resin stamper 18 may be used.

Moreover, in the said Example 2 and Example 3, although the resin stamper 18 is utilized as a transparent member so that an ultraviolet-ray may permeate | transmit, when the resin stamper 18 is an opaque member, the workpiece | work 17 is glass. It is good also as transparent materials, such as. In this case, the UV panel 14 can be provided below the work 17 and irradiated upward.

Moreover, in the said Example 1 and Example 2, although the UV curable resin 16 apply | coated to the workpiece | work 17 is hardened by irradiating an ultraviolet-ray from the UV panel 14, it irradiates light other than an ultraviolet-ray. It is also possible to use a resin that can be cured.

Also, as the UV panel 14, an LED or other light source can be used, and when using a resin that is cured by irradiating light, it may not be ultraviolet rays.

In the first embodiment, the thermal imprint apparatus is shown. In the second embodiment, the UV imprint apparatus is taken as an example. In the first embodiment, the UV imprint apparatus is used. In the second embodiment, a thermal imprint apparatus may be used. In this case, in the first embodiment, when the UV imprint apparatus is used, instead of the heating plate 7 and the cooling plate 6, the UV panel 14 and the quartz plate 15 are provided on the lower end side of the first pressure unit 2A. The resin film 5 may be a UV curable resin, or the UV curable resin 16 may be applied to a flexible plate-like substrate. The UV curable resin and the stamper 4 of the object are pressed by the first and

second pressure units

2A and 2B, and the pattern of the stamper 4 is formed on the UV curable resin, and then the UV light is irradiated from the UV panel 14. Thus, the UV curable resin can be irradiated with ultraviolet rays through the quartz plate 15 to cure the resin and maintain the pattern. Also in this case, since the resin film 5 of the UV curable resin or the substrate and the UV curable resin is a deformable member, the central portion of these members is caused by the pressure difference between the upper airtight space 11A and the lower airtight space 11B. However, it will bend to the airtight space side reduced pressure. As described above, in Example 1 in which the stamper 4 is fixed and the resin film 5 that is an object of imprinting is used as the partition wall, a UV-type imprinting apparatus can be formed. In the second embodiment, when a thermal imprint apparatus is used, a heating plate 7 and a cooling plate 6 are provided instead of the UV panel 14 and the quartz plate 15 on the lower end side of the first pressure unit 2A. Thus, a thermoplastic resin may be applied to the substrate surface of the workpiece 17 instead of the UV curable resin 16. Thus, in Example 2 where the resin stamper 18 is used as the partition and the imprint object is fixedly held, a thermal imprint apparatus can be formed. Also in these modified examples, the pressure adjusting unit 3A or the pressure adjusting unit 3B pressurizes the upper airtight space 11A side or depressurizes the lower airtight space 11B side to deflect the material to be a partition downward. Then, the first and

second pressurizing portions

2A and 2B are moved to bring the stamper or the object and the material to be the partition into close contact with each other, and then pressed to form the superimposed stamper or the object and the partition. It is possible to reduce the mixing of air with the material and to reproduce the pattern more faithfully. Also, when releasing the mold, the lower airtight space 11B side can be pressurized or the upper airtight space 11A side can be depressurized to gradually release from the peripheral part and finally the central part can be released. . Then, a large force is applied to the stamper and the object at once, and the stamper and the object are gradually peeled off with a uniform force without damaging the pattern formed on the object. The mold can be gradually released from the periphery of the stamper. Also in the third embodiment, the combination of the UV imprint apparatus and the thermal imprint apparatus in the first and second embodiments can be freely combined as appropriate.

1A,

1B Imprinting device

2A,

2B Pressure unit

3A, 3B Pressure adjustment unit 4 Stamper 5 Resin film 6 Cooling plate 7

Heating plate

8A, 8B Chamber 9

Vacuum adsorption unit

10A, 10B O-

ring

11A,

11B Airtight space

12A, 12B Adhesion holding part 13 Shaft part 14 UV panel 15 Quartz plate 16 UV

curable resin

17, 17A, Work piece 18

Resin stamper

50, 51 Roller 52 Work transfer machine 53 Work stocker

Claims

In an imprint apparatus for transferring a pattern formed on a stamper to an object,
A first holding unit for holding one of the stamper and the object;
A second holding part for holding the other of the stamper and the object;
In an airtight space, a pressurizing unit that presses the object and the stamper;
First and second chambers forming the airtight space in the pressurizing section;
A pressure adjusting unit that adjusts the pressure of the airtight space of the pressurizing unit;
Have
The stamper or the object held by the first holding part is composed of a member that can be deformed by pressure, and separates the airtight space of the pressurizing part into two parts.
The imprint apparatus according to claim 1, wherein the pressure adjusting unit adjusts so as to generate a pressure difference in the two airtight spaces separated from each other.
2. The imprint apparatus according to claim 1, wherein the pressure adjusting unit pressurizes one of the separated airtight spaces or depressurizes the other.
The first holding part is provided between the first and second chambers,
3. The imprint apparatus according to claim 1, wherein one of the first and second chambers includes the second holding unit.
4. The pressure adjusting unit according to claim 1, wherein the pressure adjusting unit adjusts so that a pressure difference is generated in the two airtight spaces before or after pressing by the pressurizing unit. 5. Imprint device.
5. The apparatus according to claim 1, further comprising a moving unit that moves the stamper or the object after the holding of the stamper or the object held by the first holding unit is released. Imprint device.
6. The imprint according to claim 1, wherein the pressing unit includes a heating unit that heats or an irradiation unit that irradiates light when pressing the object and the stamper. apparatus.