CN208914598U - The uniform hot stamping device of guide type large-area nano - Google Patents
The uniform hot stamping device of guide type large-area nano Download PDFInfo
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- CN208914598U CN208914598U CN201821819829.4U CN201821819829U CN208914598U CN 208914598 U CN208914598 U CN 208914598U CN 201821819829 U CN201821819829 U CN 201821819829U CN 208914598 U CN208914598 U CN 208914598U
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- pedestal
- template
- support base
- pressure plate
- fixing part
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Abstract
The utility model discloses a kind of uniform hot stamping devices of guide type large-area nano, it include: pedestal, guide groove is vertically installed on pedestal, support base, above pedestal, support base is inserted in guide groove and can be vertically moved in guide groove, offers working chamber in support base bottom, top is equipped with opening；Pedestal is placed in the working chamber of base top surface, offers accommodation groove in the upper surface of pedestal；Heating plate is placed in accommodation groove；Substrate is set to above heating plate；Glue is imprinted, is dripped in substrate center；Positioning mounting is fixed on support base top surface；Template is set in mounting groove；Formwork fixing part, in the mounting groove above template；Pressure plate is set to above formwork fixing part；Driving device is connect with pressure plate.The utility model solve the problems, such as Embosser coining large area object nano impression precision is low, yield rate is low in the presence of being stamped when being stamped object, realize templating nanoparticles structure to large-area substrates accurate transfer.
Description
Technical field
The utility model relates to nanometer embossing field, in particular to a kind of uniform hot padding of guide type large-area nano
Device.
Background technique
In recent years, nanometer embossing has remarkable progress.It is filled out by the thermosetting material of original adoption as offset medium
It fills between template and material to be processed, is changed into its cured method using photoresist generation by the method pressurizeed and heated
It is pouring-in to replace stamping type for thermosetting material, it avoids high pressure and heats the damage to processing device, also effectively prevent gas
Steep the influence to machining accuracy.
Nanometer embossing has high-resolution, low cost and high production rate compared with existing micro-nano manufacturing method
The characteristics of, existing nanometer embossing can reach 5 nanometers hereinafter, and to be able to achieve large-area nano graphical.Currently, nanometer pressure
Print technology obtains in high performance solar panels, large scale high definition FPD, the fields such as oversize microflow controlled biochip
It is widely applied, and there is the huge market demands.
When existing plate nano-imprinting apparatus carries out nano impression to the substrate of oversize, have the disadvantage in that
Press mechanism applies pressure or by servo motor to the supporting plate outer edge of bearing substrate to the bearing plate outer edge of carrying template
During applying pressure template and substrate being made to be bonded and compress, the pressure that is subject to by template or substrate-loading mechanism close to outer edge
Greater than the pressure being subject to close to middle part, cause template and substrate be bonded surface pressure be unevenly distributed, template and substrate bringing into conformal contact
The problems such as irregular, influences the precision that template micro nano structure is transferred to substrate, causes large-area nano coining product coining
Precision is low, and molding effect is poor, and molding is irregular, and yield rate is low.
Summary of the invention
Above-mentioned to solve the problems, such as, the utility model provides a kind of uniform hot padding dress of guide type large-area nano
It sets, solves Embosser in existing when being stamped object for coining large area and be stamped that object nano impression precision is low, yield rate is low
The problem of, realize templating nanoparticles structure to large-area substrates accurate transfer.
The technical scheme in the invention for solving the above technical problem are as follows: the uniform hot padding of guide type large-area nano
Device, comprising:
Pedestal is vertically installed with guide groove on pedestal,
Support base is set to above pedestal, and support base is inserted in guide groove and can be vertically moved in guide groove, is being supported
Seat bottom offers working chamber, and top is equipped with opening, and the size for communicating and being open with working chamber that is open is less than the size of working chamber,
The driving mechanism fixed with the insertion portion of support base is equipped in guide groove；
Pedestal is placed in the working chamber of base top surface, offers accommodation groove in the upper surface of pedestal, the size of pedestal is small
In the size of opening；
Heating plate is placed in accommodation groove, the top surface of heating plate and the either flush of pedestal, is heated and is uniformly opened on plate top surface
Equipped with multiple vacuum tanks, vacuum tank is connect with external vacuum pump or aspiration pump；
Substrate is set to above heating plate, for placing coining glue, is firmly adsorbed substrate by the vacuum that vacuum tank generates
On hot plate；
Positioning mounting is fixed on support base top surface, and positioning mounting can transversely and horizontally be moved along support base, support base
Mounting groove is formed between top surface and positioning mounting；
Template is set in mounting groove, and template is adapted to mounting groove, and the working face of template is towards opening, shuttering work face
Upper setting nano-imprinted pattern；
Formwork fixing part is adapted in the mounting groove above template and with mounting groove, is laterally moved by positioning mounting
It is dynamic that template and formwork fixing part are fixedly clamped；
Pressure plate is set to above formwork fixing part, and for pressing to formwork fixing part, pressure plate and formwork fixing part are connect
Contacting surface is equipped with pressure sensor, applies pressure value for real-time detection；
Driving device is set to above pressure plate and connect with pressure plate, for driving pressure plate to do longitudinal movement.
The above-mentioned uniform hot stamping device of guide type large-area nano, the driving mechanism are electric cylinder.
The above-mentioned uniform hot stamping device of guide type large-area nano, the pedestal upper surface are sensed equipped with laser displacement
Device, laser displacement sensor setting are no less than three and are evenly distributed on pedestal top edge position, are used for real-time monitoring substrate
With the bonding position of template.
The above-mentioned uniform hot stamping device of guide type large-area nano, the formwork fixing part are thin plate, formwork fixing part
The edge and center of bottom surface are equipped with vacuum suction slot, and vacuum suction slot is connect with external vacuum pump, for smooth, complete
Full absorption template.
The above-mentioned uniform hot stamping device of guide type large-area nano, the positioning mounting include being opened in support base top
Guide groove on face and the guide-localization block being slidably connected with guide groove, further include the driving gas connecting with guide-localization block
Cylinder.
The above-mentioned uniform hot stamping device of guide type large-area nano, the pressure sensor are at least arranged four groups, pressure
Sensor includes being set to the central presser sensor of pressure plate center and being evenly distributed on centered on pressure plate center
Concentric circles on peripheral pressure sensor.
The above-mentioned uniform hot stamping device of guide type large-area nano, the driving device are the cylinder connecting with pressure plate
Or hydraulic cylinder.
The utility model has the beneficial effects that: addition coining glue, driving device drive straightening under pressure plate on substrate
To after be bonded with formwork fixing part, positioning mounting transverse shifting is locked formwork fixing part and template, make pressure plate and
Formwork fixing part, template, support base are connected as one, and driving device pushes support base to vertically move in guide groove, make template
It is gradually bonded with the coining glue for instilling substrate center, pressure sensor monitors in real time during being gradually bonded and adjusts application
In the force of impression of large area template and substrate, realize that the pressure plate of oversize nano impression applies template and the uniform of substrate
Pressure, coining precision height, high yield rate, formwork fixing part can be picked and placed individually, and be fixed in device external installation and vacuum suction
It is placed in equipment after template, it is user-friendly, and avoid in user operation process because of template operation narrow space,
The problems such as nano-imprinted pattern surface scratches in template caused by during picking and placing template and damage, can be preferably
Guarantee template in the integrality of use process.
Detailed description of the invention
Fig. 1 is the overall structure diagram of the utility model.
Specific embodiment
With reference to the accompanying drawing and specific embodiment is described in further details the utility model.
As shown in Figure 1, a kind of uniform hot stamping device of guide type large-area nano, comprising:
Pedestal 1 is vertically installed with guide groove 2 on pedestal 1,
Support base 3 is set to 1 top of pedestal, and support base 3 is equipped with the guide part 4 being adapted to guide groove 2, and guide part 4 is to lead
Xiang Zhu is repeated no more, and support base 3 is inserted in guide groove 2 and can be vertically moved in guide groove 2, is opened up in 3 bottom of support base
Have a working chamber 5, top is equipped with opening 6, opening 6 communicated with working chamber 5 and be open 6 size less than the size of working chamber 5, leading
The driving mechanism 7 fixed with 3 guide part of support base, 4 insertion portion is equipped with into slot 2, the driving mechanism 7 is electric cylinder；
Pedestal 8, the center being placed in the working chamber 5 of 1 top surface of pedestal is simultaneously fixed with pedestal 1, and fixed form can be with
It adopts and is screwed or other fixed forms, offer accommodation groove 9 in the upper surface of pedestal 8, the size of pedestal 8 is less than opening 6
Size, 8 upper surface of pedestal be equipped with laser displacement sensor 10, laser displacement sensor 10 setting no less than three and
It is even to be distributed in 8 top edge position of pedestal；
Heating plate 11 is placed in accommodation groove 9, and heating plate is added by the way of the Resistant heating being set in heating plate
The either flush of the top surface of hot plate 11 and pedestal 8, is uniformly provided with multiple vacuum tanks 12 on 11 top surface of heating plate, vacuum tank 12 with
External vacuum pump or aspiration pump connection, vacuum pump and aspiration pump do not provide in figure；
Substrate 13 is set to the top of heating plate 11, and for placing coining glue 14, the vacuum that is generated by vacuum tank 12 is by substrate
13 are firmly adsorbed in heating plate 11；
Glue 14 is imprinted, drop is in massif shape in 13 center of substrate, and the coining glue 14 is to be heating and curing to imprint glue；
Positioning mounting 15 is fixed on 3 top surface of support base, and positioning mounting 15 can transversely and horizontally be moved along support base 3,
The positioning mounting 15 includes the guide groove 16 being opened on 3 top surface of support base and the guiding being slidably connected with guide groove 16
Locating piece 17 further includes the driving cylinder 18 connecting with guide-localization block 17, shape between 3 top surface of support base and positioning mounting 15
At mounting groove 19；
Template 20 is set in mounting groove 19, and template 20 is adapted to mounting groove 19, and nano impression is arranged on 20 working face of template
The working face direction of pattern 21, template 20 is open at 6, and laser displacement sensor 10 is for real-time monitoring substrate 13 and template 20
Bonding position；
Formwork fixing part 22 is adapted in the mounting groove 19 above template 20 and with mounting groove 19, is fixed by positioning
Template 20 and formwork fixing part 22 are fixedly clamped by 15 transverse shifting of part, and the formwork fixing part 22 is thin plate, formwork fixing part
The edge and center of 22 bottom surfaces are equipped with vacuum suction slot 23, and vacuum suction slot 23 is connect with external vacuum pump, vacuum
Pump does not provide in figure, is used for smooth, complete absorption template 20；
Pressure plate 24 is set to 22 top of formwork fixing part, and for pressing to formwork fixing part 22, pressure plate 24 and template are solid
The contact surface for determining part 22 is equipped with pressure sensor 25, applies pressure value for real-time detection, the pressure sensor 25 is at least
It is arranged four groups, pressure sensor 25 includes being set to the central presser sensor 26 of 24 center of pressure plate and being evenly distributed on
Peripheral pressure sensor 27 on concentric circles centered on pressure plate center 24；
Driving device 28 is set to 24 top of pressure plate and connect with pressure plate 24, for driving pressure plate 24 to do longitudinal fortune
Dynamic, the driving device 28 is the cylinder or hydraulic cylinder connecting with pressure plate 24.
Working principle:
15 transverse shifting of positioning mounting is fixedly clamped template 20 and formwork fixing part 22, passes through the driving branch of driving mechanism 7
It supports seat 3 to go up and down, and laser displacement sensor 10 is cooperated to monitor the fitting distance of template 20 and substrate 13 in real time, reached when being bonded distance
To the length travel of 7 fixed supporting seat 3 of setting position rear drive mechanism, and the driving device 28 for controlling 24 top of pressure plate is downward
It is mobile, while being monitored in real time by pressure sensor 25, pass through the cooperation of pressure plate 24, pressure sensor 25, driving device 28
Template 20 and substrate 13 are realized during fitting, i.e., the nano-imprinted pattern 21 of template 20 is pressed into the mistake that substrate 13 imprints glue 14
Cheng Zhong, pressure plate 24 ensure that nano-imprinted pattern 21 is uniformly pressed into template 20 to the uniform pressure of each position of template 20
Glue 14 is imprinted on to substrate 13, and is heating and curing by heating plate 11 and imprints the realization coining of glue 14, ensure that template 20 and substrate
The consistency of 13 bringing into conformal contact effectively increases the precision of large-area nano coining product.
It is above-mentioned although specific embodiments of the present invention are described with reference to the accompanying drawings, but it is not practical new to this
The limitation of type protection scope, those skilled in the art should understand that, based on the technical solution of the present invention, ability
Field technique personnel do not need to make the creative labor the various modifications or changes that can be made still in the protection model of the utility model
Within enclosing.
Claims (7)
1. the uniform hot stamping device of guide type large-area nano characterized by comprising
Pedestal is vertically installed with guide groove on pedestal,
Support base is set to above pedestal, and support base is inserted in guide groove and can be vertically moved in guide groove, at support base bottom
Portion offers working chamber, and top is equipped with opening, and the size for communicating and being open with working chamber that is open is less than the size of working chamber, is leading
The driving mechanism fixed with the insertion portion of support base is equipped with into slot；
Pedestal is placed in the working chamber of base top surface, offers accommodation groove in the upper surface of pedestal, the size of pedestal, which is less than, to be opened
The size of mouth；
Heating plate is placed in accommodation groove, the top surface of heating plate and the either flush of pedestal, is heated and is uniformly provided on plate top surface
Multiple vacuum tanks, vacuum tank are connect with external vacuum pump or aspiration pump；
Substrate is set to heating plate top, and for placing coining glue, substrate is firmly adsorbed on by the vacuum generated by vacuum tank to be added
On hot plate；
Positioning mounting is fixed on support base top surface, and device for positioning and securing can transversely and horizontally be moved along support base, support base top
Mounting groove is formed between face and positioning mounting；
Template is set in mounting groove, and template is adapted to mounting groove, and towards opening, shuttering work is set the working face of template on face
Set nano-imprinted pattern；
Formwork fixing part is adapted in the mounting groove above template and with mounting groove, will by positioning mounting transverse shifting
Template and formwork fixing part are fixedly clamped；
Pressure plate is set to above formwork fixing part, for pressing to formwork fixing part, the contact surface of pressure plate and formwork fixing part
It is equipped with pressure sensor, applies pressure value for real-time detection；
Driving device is set to above pressure plate and connect with pressure plate, for driving pressure plate to do longitudinal movement.
2. the uniform hot stamping device of guide type large-area nano according to claim 1, it is characterised in that: the driving machine
Structure is electric cylinder.
3. the uniform hot stamping device of guide type large-area nano according to claim 1, it is characterised in that: on the pedestal
Surface is equipped with laser displacement sensor, and laser displacement sensor setting is no less than three and is evenly distributed on pedestal top edge position
It sets, the bonding position for real-time monitoring substrate and template.
4. the uniform hot stamping device of guide type large-area nano according to claim 1, it is characterised in that: the template is solid
Determining part is thin plate, and the edge and center of formwork fixing part bottom surface are equipped with vacuum suction slot, vacuum suction slot and outside
Vacuum pump connection, for it is smooth, completely adsorb template.
5. the uniform hot stamping device of guide type large-area nano according to claim 1, it is characterised in that: the positioning is solid
Determining part includes the guide groove being opened on support base top surface and the guide-localization block being slidably connected with guide groove, further includes and leads
The driving cylinder connected to locating piece.
6. the uniform hot stamping device of guide type large-area nano according to claim 1, it is characterised in that: the pressure passes
Sensor is at least arranged four groups, and pressure sensor includes being set to the central presser sensor of pressure plate center and being uniformly distributed
Peripheral pressure sensor on the concentric circles centered on pressure plate center.
7. the uniform hot stamping device of guide type large-area nano according to claim 1, it is characterised in that: the driving dress
It is set to the cylinder or hydraulic cylinder connecting with pressure plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821819829.4U CN208914598U (en) | 2018-11-06 | 2018-11-06 | The uniform hot stamping device of guide type large-area nano |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821819829.4U CN208914598U (en) | 2018-11-06 | 2018-11-06 | The uniform hot stamping device of guide type large-area nano |
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| Publication Number | Publication Date |
|---|---|
| CN208914598U true CN208914598U (en) | 2019-05-31 |
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ID=66711599
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821819829.4U Active CN208914598U (en) | 2018-11-06 | 2018-11-06 | The uniform hot stamping device of guide type large-area nano |
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| CN (1) | CN208914598U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113815305A (en) * | 2021-09-22 | 2021-12-21 | 南京仁洪安装工程有限公司 | Multifunctional turnover type surface transfer printing device for decorative plate and transfer printing method thereof |
-
2018
- 2018-11-06 CN CN201821819829.4U patent/CN208914598U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113815305A (en) * | 2021-09-22 | 2021-12-21 | 南京仁洪安装工程有限公司 | Multifunctional turnover type surface transfer printing device for decorative plate and transfer printing method thereof |
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