CN214427744U

CN214427744U - Glue controllable nanometer impression equipment in layer

Info

Publication number: CN214427744U
Application number: CN202120671237.8U
Authority: CN
Inventors: 冀然
Original assignee: Germanlitho Co ltd
Current assignee: Germanlitho Co ltd
Priority date: 2021-04-01
Filing date: 2021-04-01
Publication date: 2021-10-19
Anticipated expiration: 2031-04-01

Abstract

The utility model discloses a controllable nanometer impression equipment of glue film, including equipment casing, stamp-pressing device and thick controlling means of membrane, stamp-pressing device includes, impression pole and platform dish, the upper end fixed mounting platform dish of equipment casing, the upper end surface of platform dish all is equipped with a set of vacuum tank, all be equipped with the vacuum hole in every vacuum tank of a set of vacuum tank, the upper end movable mounting of a set of vacuum tank has the substrate, thick controlling means of membrane includes, dog, locating pin, lifter and elevator motor, the upper and lower both sides of platform dish all are equipped with a set of locating pin, the upper end fixed mounting dog of locating pin, the lower extreme fixed mounting elevator motor of platform dish, the output fixed mounting of elevator motor goes up and down; this controllable nanometer impression equipment of glue film, simple structure, convenient operation, through reasonable impression device and membrane back controlling means cooperation operation, the final glue film's of accurate control impression thickness to guarantee the roughness and the homogeneity of glue film.

Description

Glue controllable nanometer impression equipment in layer

Technical Field

The utility model relates to a nanometer printing technology field specifically is a controllable nanometer impression equipment in rubber coating.

Background

The nano-imprinting technology is a novel micro-nano processing technology, achieves ultrahigh resolution by means of mechanical transfer, is expected to replace the traditional photoetching technology in the future and becomes an important processing means in the fields of microelectronics and materials, the technology is invented in the middle of the 90 s of the 20 th century by the professor Stephen. Y.Chou of the university of Princessant of the United states, and the final quality of nano-imprinting is determined by two parameters: 1. impressing the thickness of the final glue layer; 2. the homogeneity of whole piece glue film thickness, two above indexes are difficult to obtain, need the distance of active control substrate and PET, and nanometer lithography apparatus among the prior art has certain defect, for example, the final glue film thickness of control impression that can not be accurate, and the roughness and the homogeneity of glue film can't be guaranteed equally, consequently need a neotype controllable nanometer impression equipment of glue film, solve above-mentioned problem.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a controllable nanometer impression equipment in rubber coating to solve the problem of proposing among the above-mentioned background art.

In order to achieve the above object, the utility model provides a following technical scheme: the utility model provides a controllable nanometer impression equipment in adhesive tape, includes equipment casing, coining device and thick controlling means of membrane, the coining device includes, impression pole and platform dish, the upper end fixed mounting of equipment casing the platform dish, the upper end surface of platform dish all is equipped with a set of vacuum groove, all be equipped with the vacuum hole in every vacuum groove in a set of vacuum groove, the upper end movable mounting in a set of vacuum groove has the substrate, thick controlling means of membrane includes, dog, locating pin, lifter and elevator motor, the upper and lower both sides of platform dish all are equipped with a set of the locating pin, the upper end fixed mounting of locating pin the dog, the lower extreme fixed mounting of platform dish elevator motor, elevator motor's output fixed mounting the lifter.

Preferably, the upper end of the substrate is movably provided with a PET rod, and the upper end of the PET rod is slidably provided with the stamping rod.

Preferably, the length of the stamping rod is greater than the width of the table plate, the size of the PET rod is greater than that of the substrate, and the width of the PET rod is smaller than that of the stamping rod.

Preferably, the lower end of the positioning pin is fixedly connected with the lifting rod, and limiting blocks are fixedly mounted on the left side and the right side of the lower end of the stop block.

Compared with the prior art, the beneficial effects of the utility model are that: this controllable nanometer impression equipment of glue film, simple structure, convenient operation, through reasonable impression device and membrane back controlling means cooperation operation, the final glue film's of accurate control impression thickness to guarantee the roughness and the homogeneity of glue film.

Drawings

Fig. 1 is a front view of the present invention;

fig. 2 is a side view of the present invention;

fig. 3 is a top view of the present invention.

In the figure: 10 equipment shells, 1 imprinting device, 11 imprinting rods, 12 tables, 13 groups of vacuum grooves, 14 vacuum holes, 2 film rear control devices, 21 stoppers, 22 positioning pins, 23 lifting rods, 24 lifting motors, 25 limiting blocks, 3PET rods, 4 colloids and 5 substrates.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1, fig. 2 and fig. 3, the present invention provides a technical solution: a glue layer controllable nano imprinting device comprises a device shell 10, an imprinting device 1 and a film thickness control device 2, wherein the imprinting device 1 comprises an imprinting rod 11 and a table disc 12, the table disc 12 is fixedly installed at the upper end of the device shell 10, a group of vacuum grooves 13 are formed in the upper end surface of the table disc 12, a vacuum hole 14 is formed in each vacuum groove of the group of vacuum grooves 13, a substrate 5 is movably installed at the upper end of the group of vacuum grooves 13, the film thickness control device 2 comprises a stop block 21, a positioning pin 22, a lifting rod 23 and a lifting motor 24, a group of positioning pins 22 are arranged on the upper side and the lower side of the table disc 12, the stop block 21 is fixedly installed at the upper end of the positioning pin 22, the lifting motor 24 is fixedly installed at the lower end of the table disc 12, and the lifting rod 23 is fixedly installed at the output end of the lifting motor 24;

specifically, the platen 12 is fixedly mounted on the device housing 10 for supporting and fixing the substrate 5, the upper end surface of the platen 12 is provided with a plurality of square and circular vacuum grooves (as shown in fig. 3), the vacuum groove of each vacuum groove 13 is correspondingly provided with one vacuum hole 14, the vacuum hole 14 is connected with a conventional vacuum pump through an air pipe, the vacuum grooves are vacuumized by a vacuum pump to form a negative pressure device, the substrate is fixed on the vacuum grooves, the lifting motor 24 is mounted on the ground at the lower end of the platen for driving the lifting rod 23 to lift, the lifting motor is a lifting motor of a conventional model PA200, the positioning pins 22 are uniformly arranged along the side edges at the upper and lower sides of the platen 12, and the stoppers 21 are fixedly mounted through the positioning pins, the stainless steel positioning block is used for positioning the stop block 21 at the relative position of the table plate 12, the lower end of the positioning pin is connected with the lifting rod, the lifting motor can push the stop block to move up and down, and the stop block is made of stainless steel materials which are not easy to deform, resist corrosion and wear.

The upper end of the substrate 5 is movably provided with a PET rod 3, and the upper end of the PET rod 3 is slidably provided with the stamping rod 11;

specifically, the PET rod 3 is movably mounted at the upper end of the substrate 5, and the stamping rod 11 is arranged above the table tray 12 and used for pressing the PET rod 3 on the substrate 5 coated with the colloid.

The length of the stamping bar 11 is larger than the width of the table plate 12, the size of the PET bar 3 is larger than that of the substrate 5, and the width is smaller than the length of the stamping bar 11.

The lower end of the positioning pin 22 is fixedly connected with the lifting rod 23, and the left side and the right side of the lower end of the stop block 21 are fixedly provided with limit blocks 25;

specifically, the lower extreme fixed connection of locating pin 22 the lifter 23, the lower extreme of locating pin is connected the lifter, elevator motor can promote the dog reciprocates, stopper 25 is used for the restriction the position of dog.

The working process is as follows: the lifting motor drives the stop block to move above the limiting block, the original position is recorded, and when the stop block returns to the original position, the upper surface of the stop block is flush with the upper surface of the table plate; placing the substrate coated with the nano-imprinting colloid above a vacuum groove with the size corresponding to the table plate, completely covering the vacuum groove with the size by the substrate, starting a vacuum pump to work, connecting the vacuum groove with a vacuum hole through an air pipe, forming negative pressure in the vacuum groove, and fixing the substrate; fixing two ends of a PET rod and placing the PET rod above a table plate; the colloid for nanoimprint is dotted at the center of the substrate to complete the dispensing action; confirming the imprinting thickness according to the final thickness of the glue layer and the thickness of the substrate, wherein the sum of the thicknesses is the distance of the upper surface of the stop block moving upwards relative to the upper surface of the table disc; one end of the PET rod is lowered to the final imprinting position, and the other end of the PET rod is lifted; the impression bar descends to the upper surface of the lower end of the PET bar. The stamping rod slowly moves towards the other side of the PET rod, and the higher end of the PET rod slowly descends until the higher end of the PET rod also descends to the most total stamping position; the distance between the PET rod and the substrate is controlled through the stop block, and the thickness and the uniformity of the glue layer are controlled.

It is obvious to a person skilled in the art that the invention is not restricted to details of the above-described exemplary embodiments, but that it can be implemented in other specific forms without departing from the spirit or essential characteristics of the invention. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.

Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.

Claims

1. The utility model provides a controllable nanometer impression equipment in glue layer, includes equipment casing (10), coining device (1) and thick controlling means (2) of membrane, its characterized in that: the stamping device (1) comprises a stamping rod (11) and a table plate (12), the table plate (12) is fixedly arranged at the upper end of the equipment shell (10), a group of vacuum grooves (13) are arranged on the upper end surface of the table plate (12), each vacuum groove of the group of vacuum grooves (13) is provided with a vacuum hole (14), the upper ends of the group of vacuum grooves (13) are movably provided with a substrate (5), the film thickness control device (2) comprises a stop block (21), a positioning pin (22), a lifting rod (23) and a lifting motor (24), a group of positioning pins (22) are arranged on the upper side and the lower side of the table plate (12), the upper end of the positioning pin (22) is fixedly provided with the stop block (21), the lower end of the table plate (12) is fixedly provided with the lifting motor (24), the output end of the lifting motor (24) is fixedly provided with the lifting rod (23).

2. The glue controllable nanoimprint apparatus of claim 1, characterized in that: the upper end of the substrate (5) is movably provided with a PET rod (3), and the upper end of the PET rod (3) is slidably provided with the stamping rod (11).

3. The glue controllable nanoimprint apparatus of claim 2, characterized in that: the length of the stamping rod (11) is larger than the width of the table plate (12), the size of the PET rod (3) is larger than that of the substrate (5), and the width is smaller than the length of the stamping rod (11).

4. The glue controllable nanoimprint apparatus of claim 1, characterized in that: the lower extreme fixed connection of locating pin (22) lifter (23), equal fixed mounting in the lower extreme left and right sides of dog (21) has stopper (25).