CN211180527U

CN211180527U - Nano-imprinting equipment

Info

Publication number: CN211180527U
Application number: CN202020154309.7U
Authority: CN
Inventors: 冀然
Original assignee: Germanlitho Co ltd
Current assignee: Germanlitho Co ltd
Priority date: 2020-02-06
Filing date: 2020-02-06
Publication date: 2020-08-04
Anticipated expiration: 2030-02-06

Abstract

The utility model discloses a nanometer stamping device, which comprises a stainless steel main body, wherein the right side wall of the inner cavity of the stainless steel main body is articulated with an ultraviolet exposure component, the left side of the lower side wall of the inner cavity of the stainless steel main body is fixedly provided with a vacuum device, the left side wall of the inner cavity of the stainless steel main body is fixedly provided with a soft mold clamp, the right side of the lower side wall of the inner cavity of the stainless steel main body is fixedly provided with a lifting table, and the lower side wall of the stainless steel main body is uniformly and fixedly provided with universal wheels and foot cups, the device of the utility model has reasonable structure, convenient use and convenient movement, the bottom surface of the cavity is symmetrically provided with universal wheel components and foot cup components, the movement and leveling of the whole device are convenient, the ultraviolet exposure device and the soft mold clamp are positioned on the inner wall of the cavity, the whole space of the device, when the substrate is separated from the soft mold, the whole base station slowly descends, is uniformly stressed and is easier to separate.

Description

Nano-imprinting equipment

Technical Field

The utility model relates to a nanometer impression technical field specifically is a nanometer impression equipment.

Background

The nano-imprinting technology has the advantages of simple operation, high resolution, low cost, high repeatability and the like, and is highly valued by domestic and foreign research institutions in recent years, the general steps of nano-imprinting are divided into 3 steps, firstly, colloid is coated on a substrate, the colloid is changed into a layer of solid film from a liquid state through heating or ultraviolet curing of the colloid, then, the substrate is separated from the colloid film, and the pattern on the substrate is transferred to the colloid film.

The existing nanoimprint equipment is large in size and difficult to move, different environments are different in ground level conditions, the equipment is not level due to the fact that the ground is not level, the thickness of a film layer is not uniform finally, if the nanoimprint equipment which saves space, is convenient to move and is convenient to level can be designed, the problems can be solved, and therefore the nanoimprint equipment is provided.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a nanoimprint equipment to solve the problem of proposing among the above-mentioned background art.

In order to achieve the above object, the utility model provides a following technical scheme: a nanoimprint equipment comprises a stainless steel main body, wherein an ultraviolet exposure assembly is hinged and assembled on the right side wall of an inner cavity of the stainless steel main body, a vacuum device is fixedly assembled on the left side of the lower side wall of the inner cavity of the stainless steel main body, a soft mold clamp is fixedly assembled on the left side wall of the inner cavity of the stainless steel main body, a lifting table is fixedly installed on the right side of the lower side wall of the inner cavity of the stainless steel main body, and universal wheels and foot cups are uniformly and fixedly installed on the lower side wall of the stainless steel main body;

the ultraviolet exposure assembly comprises an ultraviolet exposure support, the ultraviolet exposure support is hinged to the right side wall of the inner cavity of the stainless steel main body, an ultraviolet lamp is fixedly mounted on the lower side wall of the ultraviolet exposure support, a heat dissipation fan is fixedly mounted on the upper side wall of the ultraviolet exposure support, and the ultraviolet lamp and the heat dissipation fan are respectively connected to an external power supply through wires;

the vacuum device comprises a vacuum sucker and a vacuum pump, the vacuum sucker is assembled on the upper side wall of the lifting platform, the vacuum pump is fixedly installed on the lower side wall of the inner cavity of the stainless steel main body, a substrate is placed on the upper side wall of the vacuum sucker, and a vacuum tube is fixedly communicated between the vacuum pump and the vacuum sucker;

the soft mold clamp comprises a soft mold clamp support, the soft mold clamp support is mounted on the left side wall of the inner cavity of the stainless steel main body, a transparent plate is hinged to the outer side wall of the soft mold clamp support, a vacuum groove is formed in the right side wall of the transparent plate, and a vacuum tube is fixedly communicated between the vacuum groove and the vacuum pump.

Preferably, the upper surface of the vacuum chuck is uniformly provided with an annular groove and a linear groove, and the linear groove is communicated with the annular groove.

Preferably, the elevating platform includes the motor, and the motor is connected to external power supply through the wire, motor fixed mounting is lateral wall under the inner chamber of stainless steel main part, the output fixed mounting of motor has the lead screw, the lateral wall of lead screw is equipped with the base station, and vacuum chuck places on the base station.

Compared with the prior art, the beneficial effects of the utility model are that: the utility model discloses the device is rational in infrastructure, high durability and convenient use, be convenient for remove, universal wheel subassembly and foot cup subassembly are installed symmetrically to the cavity bottom surface, the removal and the leveling of the whole device of being convenient for, ultraviolet exposure device and soft mould anchor clamps are located the cavity inner wall, the whole space of equipment has been saved, elevating platform and soft membrane anchor clamps are parallel, ensure the homogeneity and the roughness of mould, during the impression, the elevating platform rises slowly, soft membrane and substrate remain balanced all the time, be favorable to reducing the bubble, when substrate and soft mould separate, whole base station slowly descends, the atress is even, change in separately.

Drawings

Fig. 1 is a schematic view of the overall structure of the present invention.

Fig. 2 is a schematic structural diagram of the present invention during imprinting.

Fig. 3 is a schematic structural diagram of the utility model after demoulding.

Fig. 4 is a schematic structural view of the soft mold clamp of the present invention.

Fig. 5 is a schematic structural view of the vacuum chuck of the present invention.

In the figure: 1. the device comprises a stainless steel main body, 2, an ultraviolet exposure component, 21, an ultraviolet lamp, 22, a heat dissipation fan, 23, an ultraviolet exposure support, 3, a vacuum device, 31, a vacuum chuck, 311, an annular groove, 312, a linear groove, 32, a vacuum tube, 33, a vacuum pump, 4, a soft film clamp, 41, a transparent plate, 42, a vacuum groove, 43, a soft film clamp support, 5, a lifting platform, 51, a motor, 52, a lead screw, 53, a base platform, 6, a substrate, 7, a universal wheel, 8 and a foot cup.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1, fig. 2, fig. 3, fig. 4 and fig. 5, the present invention provides a technical solution: a nanometer impression equipment comprises a stainless steel main body 1, the whole device is made of a stainless steel plate and has increased strength, the right side wall of the inner cavity of the stainless steel main body 1 is hinged with an ultraviolet exposure component 2, the ultraviolet exposure component 2 is used for exposure work, the left side of the lower side wall of the inner cavity of the stainless steel main body 1 is fixedly provided with a vacuum device 3, the vacuum device 3 is used for providing vacuum environment for a vacuum suction disc 31 and a transparent plate 41 so as to fix a substrate 6, the left side wall of the inner cavity of the stainless steel main body 1 is fixedly provided with a soft mold clamp 4, the ultraviolet exposure component 2 and the soft mold clamp 4 are respectively provided with a movable component for controlling the ultraviolet exposure component 2 and the soft mold clamp 4 to rotate, when the ultraviolet exposure component 2 and the soft mold clamp 4 rotate to the lowest side position, the movable components are parallel to a base platform 53 of a lifting platform 5, the right side of the lower side wall of the inner, universal wheels 7 and foot cups 8 are uniformly and fixedly installed on the lower side wall of the stainless steel main body 1, the device is convenient to move through the universal wheels 7, and the height of four corners of the device can be adjusted by utilizing the foot cups 8, so that leveling is realized;

the ultraviolet exposure assembly 2 comprises an ultraviolet exposure support 23, the ultraviolet exposure support 23 is hinged to the right side wall of the inner cavity of the stainless steel main body 1, an ultraviolet lamp 21 is fixedly installed on the lower side wall of the ultraviolet exposure support 23, the ultraviolet lamp 21 is electrified to provide ultraviolet illumination, a heat dissipation fan 22 is fixedly installed on the upper side wall of the ultraviolet exposure support 23, and the ultraviolet lamp 21 and the heat dissipation fan 22 are respectively connected to an external power supply through conducting wires;

the vacuum device 3 comprises a vacuum chuck 31 and a vacuum pump 33, the vacuum chuck 31 is assembled on the upper side wall of the lifting platform 5, the vacuum pump 33 is fixedly installed on the lower side wall of the inner cavity of the stainless steel main body 1, the substrate 6 is placed on the upper side wall of the vacuum chuck 31, the vacuum pipe 32 is fixedly communicated between the vacuum pump 33 and the vacuum chuck 31, and when the vacuum pump 33 works, the annular groove 311 and the linear groove 312 on the vacuum chuck 31 generate suction through the vacuum pipe 32, so that the substrate 6 is fixed;

soft mould anchor clamps 4 include soft mould anchor clamps support 43, and soft mould anchor clamps support 43 installs in the inner chamber left side wall of stainless steel main part 1, the lateral wall of soft mould anchor clamps support 43 articulates there is transparent plate 41, vacuum groove 42 has been seted up to the right side wall of transparent plate 41, and fixed intercommunication has vacuum tube 32 between vacuum groove 42 and the vacuum pump 33, vacuum tube 32 when being connected with vacuum groove 42 receives vacuum pump 33 during operation, make transparent plate 41 department can adsorb the fixed mantle, and drive its removal, later through the mantle and the base plate 6 surface contact after the point is glued, accomplish the impression work.

Specifically, the upper surface of the vacuum chuck 31 is uniformly provided with the annular groove 311 and the linear grooves 312, and the linear grooves 312 are communicated with the annular groove 311, so that the substrate 6 can be uniformly sucked and fixed.

Specifically, the lifting table 5 includes a motor 51, the motor 51 is connected to an external power supply through a wire, the motor 51 is fixedly mounted on the lower side wall of the inner cavity of the stainless steel main body 1, a lead screw 52 is fixedly mounted at an output end of the motor 51, a structure of the lead screw 52 is a commonly known technology, which is commonly used in the prior art, and therefore details are not described herein, a base table 53 is mounted on an outer side wall of the lead screw 52, and the vacuum chuck 31 is placed on the base table 53, wherein the base table 53 is moved to realize lifting movement by using the function of the lead screw 52, and the moving speed realized by using the lead screw 52 is slower.

The working principle is as follows: when the nano-imprinting equipment is used, a substrate 6 is placed on a vacuum chuck 31, the annular groove 311 and the linear groove 312 of the vacuum chuck 31 are vacuumized to fix the substrate 6, dispensing is completed, a soft film is installed on a soft film clamp 4, a vacuum pump 33 is enabled to vacuumize the vacuum groove 42 through a vacuum tube 32 connected with the vacuum groove 42 to adsorb and fix the soft film, the soft film clamp 4 is controlled to rotate downwards to be parallel to a base platform 53, the vacuum chuck 31 and the substrate 6, an ultraviolet exposure assembly 2 is rotated downwards to be parallel to the base platform 53, the base platform 53 is enabled to move upwards slowly until a colloid on the substrate 6 contacts the soft film on the transparent clamp 4, imprinting work is started at the moment, and after imprinting is completed, the base platform 53 moves downwards slowly to complete separation between the substrate 6 and the soft film, so that a nano-imprinting process is completed.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims

1. A nanoimprinting apparatus characterized by: the ultraviolet exposure device comprises a stainless steel main body (1), wherein an ultraviolet exposure component (2) is hinged and assembled on the right side wall of an inner cavity of the stainless steel main body (1), a vacuum device (3) is fixedly assembled on the left side of the lower side wall of the inner cavity of the stainless steel main body (1), a soft mold clamp (4) is fixedly assembled on the left side wall of the inner cavity of the stainless steel main body (1), a lifting table (5) is fixedly installed on the right side of the lower side wall of the inner cavity of the stainless steel main body (1), and universal wheels (7) and foot cups (8) are uniformly and fixedly installed on the lower side wall of the stainless;

the ultraviolet exposure assembly (2) comprises an ultraviolet exposure support (23), the ultraviolet exposure support (23) is hinged to the right side wall of the inner cavity of the stainless steel main body (1), an ultraviolet lamp (21) is fixedly installed on the lower side wall of the ultraviolet exposure support (23), a heat dissipation fan (22) is fixedly installed on the upper side wall of the ultraviolet exposure support (23), and the ultraviolet lamp (21) and the heat dissipation fan (22) are respectively connected to an external power supply through wires;

the vacuum device (3) comprises a vacuum sucker (31) and a vacuum pump (33), the vacuum sucker (31) is assembled on the upper side wall of the lifting table (5), the vacuum pump (33) is fixedly installed on the lower side wall of the inner cavity of the stainless steel main body (1), a substrate (6) is placed on the upper side wall of the vacuum sucker (31), and the vacuum pump (33) is fixedly communicated with the vacuum sucker (31) through a vacuum tube (32);

the soft mold clamp (4) comprises a soft mold clamp support (43), the soft mold clamp support (43) is installed on the left side wall of the inner cavity of the stainless steel main body (1), the outer side wall of the soft mold clamp support (43) is hinged to a transparent plate (41), a vacuum groove (42) is formed in the right side wall of the transparent plate (41), and a vacuum tube (32) is fixedly communicated between the vacuum groove (42) and the vacuum pump (33).

2. A nanoimprinting apparatus as defined in claim 1, characterized in that: the upper surface of the vacuum chuck (31) is uniformly provided with an annular groove (311) and a linear groove (312), and the linear groove (312) is communicated with the annular groove (311).

3. A nanoimprinting apparatus as defined in claim 1, characterized in that: elevating platform (5) include motor (51), and motor (51) are connected to external power supply through the wire, lateral wall under the inner chamber of motor (51) fixed mounting in stainless steel main part (1), the output fixed mounting of motor (51) has lead screw (52), the lateral wall of lead screw (52) is equipped with base station (53), and vacuum chuck (31) place on base station (53).