CN211841667U

CN211841667U - Automatic positioning workbench for nano-imprinting equipment

Info

Publication number: CN211841667U
Application number: CN202020364595.XU
Authority: CN
Inventors: 冀然
Original assignee: Germanlitho Co ltd
Current assignee: Germanlitho Co ltd
Priority date: 2020-03-21
Filing date: 2020-03-21
Publication date: 2020-11-03
Anticipated expiration: 2030-03-21

Abstract

The utility model discloses an automatic positioning workbench for nano-imprinting equipment, which comprises a supporting plate, wherein a tray is assembled on the upper surface of the supporting plate, a through hole is arranged on the upper surface of the tray, the supporting plate is assembled with a lifting supporting thimble in the through hole, a nano-imprinting substrate is placed on the upper surface of the lifting supporting thimble, a vacuum adsorption groove is arranged on the upper surface of the tray, an inductor storage groove is symmetrically arranged on the upper surface of the tray, an inductor is assembled in the inductor storage groove, a movable positioning clamping device is uniformly assembled on the upper surface of the supporting plate, when in operation, a lifting supporting thimble is firstly lifted, the nano-imprinting substrate is placed on the lifting supporting thimble, the sensor senses the existence of the nano-imprinting substrate, a central control system sends out an order, the positioning clamping device is utilized to clamp, the lifting supporting thimble descends, and the telescopic rod returns to the initial position, and the nano-imprinting substrate falls on the upper surface of the tray, is fixed by virtue of the vacuum adsorption tank, and continues to perform the next imprinting flow.

Description

Automatic positioning workbench for nano-imprinting equipment

Technical Field

The utility model relates to a positioning workbench technical field specifically is an automatic positioning workbench for nanometer impression equipment.

Background

The nano-imprinting technology is a novel micro-nano processing technology, a micro-nano structure on a template is transferred to a substrate to be processed through nano-imprinting glue, the substrate needs to be imprinted as many as possible for improving the substrate utilization rate and reducing the production cost, and the imprinted structure is complete, so that the substrate needs to be accurately aligned, the original workbench substrate needs to be positioned manually to support and lock, time and labor are wasted, and the right side is certain in danger and is very inconvenient.

SUMMERY OF THE UTILITY MODEL

The utility model aims at providing an automatic positioning workstation for nanometer impression equipment to solve the problem that proposes among the above-mentioned background art.

In order to achieve the above object, the utility model provides a following technical scheme: the utility model provides an automatic positioning table for nanometer impression equipment, includes the backup pad, the upper surface of backup pad is equipped with the tray, the through hole has been seted up to the upper surface of tray, it is equipped with the lift and supports the thimble all to run through the backup pad in the through hole, the nanometer impression basement has been placed to the upper surface that the lift supported the thimble, the vacuum adsorption groove has been seted up to the upper surface of tray, and the upper surface symmetry of tray has seted up the inductor storage tank, be equipped with the inductor in the inductor storage tank, the upper surface of backup pad evenly is equipped with the location clamping device that can remove.

Preferably, the diameter of the through hole is at least 1.5 times larger than that of the lifting supporting thimble.

Preferably, the number of the through holes is 3, and the through holes are uniformly arranged at triangular positions.

Preferably, a fixing plate is assembled between the three lifting supporting thimbles, and a storage groove is formed in the upper surface of the tray.

Preferably, the spout has been seted up to the upper surface of backup pad, location clamping device includes the mount, all be equipped with first telescopic link in the mount, the inboard surface of first telescopic link all is equipped with the second telescopic link, the lower surface of second telescopic link all is equipped with the slide, the slide sliding assembly is in the spout, the inboard surface of second telescopic link all is equipped with the arc clamp splice, the inboard surface of arc clamp splice all laminates with the surface of nanometer impression basement.

Preferably, the arc-shaped clamping block is a rubber arc-shaped block.

Compared with the prior art, the beneficial effects of the utility model are that: the utility model discloses be provided with backup pad and second telescopic link, through seting up the spout at the upper surface of backup pad, the lower surface assembly slide of second telescopic link, and with the slide assembly in the spout that slides, can make the second telescopic link remove when removing more stable, the utility model discloses be provided with the lift and support the thimble, through assembling the fixed plate between three support thimble, can increase the support area of contact of nanometer impression basement, prevent the landing when placing.

Drawings

Fig. 1 is a schematic structural diagram of the present invention.

Fig. 2 is a schematic diagram of the explosion structure of the present invention.

Fig. 3 is a schematic view of the sectional structure of the support plate of the present invention.

Fig. 4 is a schematic view of the tray structure of the present invention.

In the figure: 1. the device comprises a supporting plate, 11, a sliding groove, 2, a tray, 21, a through hole, 22, a vacuum adsorption groove, 23, a sensor storage groove, 24, a sensor, 25, a storage groove, 3, a lifting supporting thimble, 31, a fixing plate, 4, a nano-imprinting substrate, 5, a positioning clamping device, 51, a fixing frame, 52, a first telescopic rod, 53, a second telescopic rod, 54, a sliding plate, 55 and an arc-shaped clamping block.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1-4, the present invention provides a technical solution: an automatic positioning workbench for nano-imprinting equipment comprises a supporting plate 1, a tray 2 is assembled on the upper surface of the supporting plate 1, a through hole 21 is formed in the upper surface of the tray 2, a lifting supporting thimble 3 is assembled in the through hole 21 and penetrates through the supporting plate 1, a nano-imprinting substrate 4 is placed on the upper surface of the lifting supporting thimble 3, a vacuum adsorption groove 22 (an external vacuum adsorption instrument is arranged at the bottom of the vacuum adsorption groove 22) is formed in the upper surface of the tray 2, an inductor storage groove 23 is symmetrically formed in the upper surface of the tray 2, an inductor 24 is assembled in the inductor storage groove 23, a movable positioning and clamping device 5 is uniformly assembled on the upper surface of the supporting plate 1, the nano-imprinting equipment is started to run, the lifting supporting thimble 3 is lifted at first, the nano-imprinting substrate 4 coated with transfer printing glue is placed on the lifting supporting thimble 3, the sensor 24 in the tray 2 senses the existence of the nano-imprinting substrate, the central control system (the central control system is composed of the sensor 24, the lifting support thimble 3, the first telescopic rod 52 and the second telescopic rod 53 which are connected in parallel) in the nanoimprint equipment sends out a command, so that the arc-shaped clamping block 55 in the positioning and clamping device 5 is lifted to the position of the horizontal height of the nanoimprint substrate 4 through the second telescopic rod 53, the nanoimprint substrate 4 is accurately positioned right above the tray 2 through the slow-speed inward moving clamping of the first telescopic rod 52, the first telescopic rod 52 retracts firstly, the lifting support thimble 3 descends, meanwhile, the 2 nd telescopic rod 53 descends to the initial position, the nanoimprint substrate 4 falls on the upper surface of the tray 2, the positioning and fixing actions of the nanoimprint substrate 4 in the nanoimprint equipment are finished through the vacuum adsorption groove 22, and the next-step imprinting flow is continued.

Specifically, the diameter of the through hole 21 is at least 1.5 times larger than that of the lifting support thimble 3, and the lifting support thimble 3 is an air-pressure telescopic rod.

Specifically, the through holes 21 are formed in 3 numbers and are uniformly formed in triangular positions, so that the nanoimprint substrate 4 is prevented from inclining when the lifting support thimble 3 descends.

Specifically, a fixing plate 31 is assembled between the three lifting support thimbles 3, a storage groove 25 is formed in the upper surface of the tray 2, and the fixing plate 31 can strengthen the support and is more stable when the nanoimprint substrate 4 is placed.

Specifically, spout 11 has been seted up to the upper surface of backup pad 1, location clamping device 5 includes mount 51, all be equipped with first telescopic link 52 in the mount 51, the inboard surface of first telescopic link 52 all is equipped with second telescopic link 53, the lower surface of second telescopic link 53 all is equipped with slide 54, slide 54 slides and assembles in spout 11, the inboard surface of second telescopic link 53 all is equipped with arc clamp splice 55, the inboard surface of arc clamp splice 55 all laminates with the surface of nanoimprint basement 4, first telescopic link 52 and second telescopic link 53 are electric telescopic handle, during the use raise through second telescopic link 53 to with nanoimprint basement 4 level position, it is tight to move inwards at a slow speed through first telescopic link 52.

Specifically, the arc-shaped clamping block 55 is a rubber arc-shaped block, which has certain elasticity and does not damage the nanoimprint substrate 4 during clamping.

The working principle is as follows: the nano-imprinting device is started to operate, firstly, the lifting support thimble 3 is lifted, the nano-imprinting substrate 4 coated with transfer printing glue is placed on the lifting support thimble 3, the sensor 24 in the tray 2 senses the existence of the nano-imprinting substrate 4, a central control system in the nano-imprinting device sends a command to enable the arc-shaped clamping block 55 in the positioning and clamping device 5 to be lifted to the position at the level with the nano-imprinting substrate 4 through the second telescopic rod 53, the nano-imprinting substrate 4 is moved inwards and clamped slowly through the first telescopic rod 52, so that the nano-imprinting substrate 4 is accurately positioned right above the tray 2, firstly, the first telescopic rod 52 is retracted, then, the lifting support thimble 3 is lowered, meanwhile, the second telescopic rod 53 is lowered to the initial position, the nano-imprinting substrate 4 falls on the upper surface of the tray 2, and the nano-imprinting substrate 4 is positioned in the nano-imprinting device by means of the vacuum, And finishing the fixing action and continuing to perform the next stamping process.

It is obvious to a person skilled in the art that the invention is not restricted to details of the above-described exemplary embodiments, but that it can be implemented in other specific forms without departing from the spirit or essential characteristics of the invention. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.

Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.

Claims

1. An automatic positioning table for nanoimprint equipment, comprising a support plate (1), characterized in that: the upper surface of backup pad (1) is equipped with tray (2), through hole (21) have been seted up to the upper surface of tray (2), all run through backup pad (1) in through hole (21) and be equipped with lift support thimble (3), nano-imprinting basement (4) have been placed to the upper surface that lift supported thimble (3), vacuum adsorption groove (22) have been seted up to the upper surface of tray (2), and the upper surface symmetry of tray (2) has seted up inductor storage tank (23), be equipped with inductor (24) in inductor storage tank (23), the upper surface of backup pad (1) evenly is equipped with location clamping device (5) that can remove.

2. An automatic positioning table for a nanoimprinting apparatus as defined in claim 1, characterized in that: the diameter of the through hole (21) is at least 1.5 times larger than that of the lifting supporting thimble (3).

3. An automatic positioning table for a nanoimprinting apparatus as defined in claim 1, characterized in that: the number of the through holes (21) is 3, and the triangular positions are uniformly arranged.

4. An automatic positioning table for a nanoimprinting apparatus as defined in claim 1, characterized in that: a fixing plate (31) is assembled among the three lifting supporting thimbles (3), and a storage groove (25) is formed in the upper surface of the tray (2).

5. An automatic positioning table for a nanoimprinting apparatus as defined in claim 1, characterized in that: spout (11) have been seted up to the upper surface of backup pad (1), location clamping device (5) are including mount (51), all be equipped with first telescopic link (52) in mount (51), the inboard surface of first telescopic link (52) all is equipped with second telescopic link (53), the lower surface of second telescopic link (53) all is equipped with slide (54), slide (54) sliding assembly is in spout (11), the inboard surface of second telescopic link (53) all is equipped with arc clamp splice (55), the inboard surface of arc clamp splice (55) all laminates with the surface of nanometer impression basement (4).

6. An automatic positioning table for a nanoimprinting apparatus as set forth in claim 5, characterized in that: the arc-shaped clamping blocks (55) are rubber arc-shaped blocks.