CN109696799B - Roller type ultraviolet nanoimprint device - Google Patents
Roller type ultraviolet nanoimprint device Download PDFInfo
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- CN109696799B CN109696799B CN201710981190.3A CN201710981190A CN109696799B CN 109696799 B CN109696799 B CN 109696799B CN 201710981190 A CN201710981190 A CN 201710981190A CN 109696799 B CN109696799 B CN 109696799B
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- 239000000758 substrate Substances 0.000 claims abstract description 29
- 238000004506 ultrasonic cleaning Methods 0.000 claims abstract description 19
- 229910000831 Steel Inorganic materials 0.000 claims abstract description 13
- 239000010959 steel Substances 0.000 claims abstract description 13
- 239000003292 glue Substances 0.000 claims abstract description 11
- 238000004026 adhesive bonding Methods 0.000 claims abstract description 10
- 238000007790 scraping Methods 0.000 claims abstract description 9
- 238000006073 displacement reaction Methods 0.000 claims description 31
- 238000004049 embossing Methods 0.000 claims description 31
- 239000010410 layer Substances 0.000 claims description 18
- 238000004140 cleaning Methods 0.000 claims description 13
- 238000001035 drying Methods 0.000 claims description 11
- 239000007788 liquid Substances 0.000 claims description 8
- 238000007789 sealing Methods 0.000 claims description 8
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 7
- 229910052782 aluminium Inorganic materials 0.000 claims description 7
- 239000004205 dimethyl polysiloxane Substances 0.000 claims description 6
- 235000013870 dimethyl polysiloxane Nutrition 0.000 claims description 6
- CXQXSVUQTKDNFP-UHFFFAOYSA-N octamethyltrisiloxane Chemical compound C[Si](C)(C)O[Si](C)(C)O[Si](C)(C)C CXQXSVUQTKDNFP-UHFFFAOYSA-N 0.000 claims description 6
- 238000004987 plasma desorption mass spectroscopy Methods 0.000 claims description 6
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 claims description 6
- 239000012790 adhesive layer Substances 0.000 claims description 5
- 239000011521 glass Substances 0.000 claims description 4
- 239000011241 protective layer Substances 0.000 claims description 3
- 239000013589 supplement Substances 0.000 claims 1
- 230000008646 thermal stress Effects 0.000 abstract description 7
- 238000001816 cooling Methods 0.000 abstract description 4
- 230000000694 effects Effects 0.000 abstract description 3
- 238000001125 extrusion Methods 0.000 abstract 1
- 238000005096 rolling process Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 description 8
- 238000005516 engineering process Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 3
- 230000001276 controlling effect Effects 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000001127 nanoimprint lithography Methods 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 1
- 230000003044 adaptive effect Effects 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000003750 conditioning effect Effects 0.000 description 1
- 239000000110 cooling liquid Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
Abstract
The invention discloses a roller type ultraviolet nanoimprint device which comprises a frame, wherein a bearing plate and a supporting plate are fixed on the frame, and an unreeling roller, a reeling roller, a gluing device, a glue scraping device, a supporting device, an adjusting device, a supporting roller I, a supporting roller II, a supporting roller III, a supporting roller IV, a pre-curing device, a supporting roller V, a guide roller, an ultraviolet lamp, a supporting roller V, a servo motor I, a servo motor II and a steel plate are fixed on the supporting plate. The substrate is glued and scraped by the gluing device, then is transferred to the supporting device and the adjusting device for imprinting, is solidified by an ultraviolet lamp, and is finally rolled by the rolling roller. The invention ensures that the template, the substrate and the back roller form good conformal contact by adjusting the precise alignment and extrusion of the imprinting roller and the back roller; the ultrasonic cleaning device is added, so that the residual glue can be removed, the cooling effect can be provided for the imprinting roller, the thermal stress in the template of the imprinting roller is reduced, the template is protected, and the imprinting precision is improved.
Description
Technical Field
The invention relates to a nano imprinting device, in particular to a roller type ultraviolet nano imprinting device, and belongs to the technical field of micro-nano manufacturing.
Background
The nanoimprint technology was proposed by the chinese scientist Zhou Yuyu in 1995, and has a great market prospect in the semiconductor, bioengineering and other fields because it can realize the low-cost and rapid manufacturing of micro-nano patterns compared with the traditional photolithography technology.
Disclosure of Invention
For nanoimprint technology, whether it is planar-to-planar nanoimprint, roll-to-planar nanoimprint or roll-to-roll nanoimprint, it is particularly important to control alignment and conformal contact between the template and the substrate, the conformal contact between the template and the substrate is related to the pattern precision of nanoimprint, whether the pattern of template imprinting is offset or not is determined by accurate alignment between the template and the substrate, and the difficulty of adjusting the conformal contact between the template and the substrate is increased. If good conformal contact between the template and the substrate is not achieved, uneven applied imprinting force can be caused, so that the imprinting precision is reduced, or a slippage phenomenon can occur between the template and the substrate, so that not only can the repeated imprinting of the characteristic pattern be failed, but also the template and the substrate are extremely likely to be damaged. To this problem, patent publication No. CN 103246161B discloses an adaptive imprint head for large-area nanoimprinting, but is mainly applicable to roll-to-planar nanoimprinting, and in the roll-to-roll nanoimprinting process, control over other degrees of freedom is lacking, and imprint force application and control are difficult. The patent with publication number CN 106324984A discloses a roll-to-roll ultraviolet nanoimprinting device and method, which accurately controls imprinting patterns and the aspect ratio through a movable guide rail and a micro-motion platform, but ignores parallelism and conformal contact between an imprinting roll and a back roll.
HyungJun Lim et al mentions in the article titled Nanoimprint lithography with a soft roller and focused UV light for flexible substrates that the magnitude of the imprinting force has a certain effect on the deformation of the soft template, and the deformed and flattened area of the soft template is closely related to the exposure and solidification area of the ultraviolet lamp, so that the control and flattening area can calculate the quantity of required lamp bands, the waste of adding excessive lamp bands is avoided, and the required cost is reduced. Thus, conformal contact between the platen roller and the back roller and application of appropriate platen forces becomes particularly important.
In addition, although the ultraviolet nanoimprint technology is less demanding on the environment than the traditional hot imprint technology, the influence on the template substrate is less, but related factors still cause problems on the precision of the imprinted pattern. Ankur Jain mentions in Thermal Modeling of Ultraviolet Nanoimprint Lithography that during curing by an ultraviolet lamp, the photoresist absorbs energy to generate heat and transfer the heat to the template, and thermal stress accumulation in the central area of the template is difficult to dissipate, which will have a certain influence on the imprinting process. In addition, the roll type ultraviolet nanoimprint is carried out by adopting a soft template, and is generally made of materials such as PDMS, and the elastic modulus and the Poisson ratio of the materials such as PDMS can be changed along with the change of temperature. One, if the temperature is not controlled, it would be desirable to alleviate the problem of inaccuracy of the embossed pattern caused by thermal stress at the expense of processing efficiency, and if left untreated, damage may even occur to the template as thermal stress builds up. The temperature is not controlled, the material property of the template can be changed correspondingly, and the demolding force and the rotating speed of the roller are difficult to control accurately, so that the pattern transfer is inaccurate. In addition, during the demolding process, the adhesive layer is torn more or less, so that the torn adhesive layer is doped in the characteristic pattern of the template, and if the torn adhesive layer is not treated, the subsequent imprinting process is affected.
To sum up, the current roll-to-roll ultraviolet nanoimprint device has the following disadvantages: the parallelism and conformal contact between the embossing roller and the back roller need to be accurately regulated; the residual glue layer in the embossing roller needs to be removed efficiently and with low damage so as to reduce the influence of the residual glue layer on the embossing precision; a certain cooling mode is required to solve the influence of thermal stress on the die plate and the processing efficiency.
Disclosure of Invention
The invention aims to solve the problems that alignment and conformal contact between a template and a substrate are difficult to realize in a roll-to-roll ultraviolet nanoimprint process, imprinting precision and machining efficiency are affected by thermal stress in an ultraviolet curing process, and the like.
The invention provides a roller type ultraviolet nanoimprinting device which is characterized by comprising a frame, a support plate, an unreeling roller, a wind-up roller, a bearing plate, a gluing device, a scraping device, a support device, an adjusting device, a substrate, a support roller I, a support roller II, a support roller III, a support roller IV, a pre-curing device, a support roller IV, a guide roller, an ultraviolet lamp, a support roller VI, a servo motor I, a servo motor II and a steel plate, wherein the support plate and the bearing plate are fixed on the frame through screws, the unreeling roller is connected on the support plate through bearings and is connected with the servo motor I which is fixed on the back side of the support plate through screws, the wind-up roller is connected on the support plate through bearings and is connected with the servo motor II which is fixed on the back side of the support plate through screws, the support roller I, the support roller II, the support roller III, the support roller IV and the support roller VI are connected on the support plate through bearings, the gluing device, the scraping device and the pre-curing device are fixed on the support plate through screws, the guide roller is connected on the support plate through bearings, the support plate through the support plate, the support device is fixed on the support plate through screws, the support plate and the ultraviolet lamp is fixed on the support plate and the support plate through screws, the support plate is connected with the right side through screws, and the steel plate is connected with the right side through adjusting device through screws and through screws.
The roller type ultraviolet nanoimprint device provided by the invention is characterized in that a protective layer is attached to the surface of the guide roller to reduce damage to the surface of a rubberized substrate.
The roller type ultraviolet nanoimprint device is characterized in that the frame comprises 4040 aluminum profiles, rib plates and supporting rods, the 4040 aluminum profiles are fixedly connected with screws through the rib plates, and the supporting rods are fixed on two sides of the frame through the screws.
The invention provides a roller type ultraviolet nanoimprint device which is characterized by comprising a first differential head and a doctor blade, wherein the doctor device is fixed on a supporting plate through screws, and the first differential head is connected with the doctor blade and is used for controlling the thickness of a glue layer to be a specified thickness.
The roller type ultraviolet nanoimprint device is characterized by comprising a support plate, a sealing plate, a back roller, a moving block, a rib plate, an elastic layer, a support frame and a through hole, wherein the support plate is fixed on the support plate through screws, the rib plate is fixed on the support plate, the support frame is fixed with the support plate through the screws, the back roller is made of transparent glass and is matched with the moving block through an air bearing, the elastic layer and the moving block are placed in the support frame through grooves and are fixed through the sealing plate to limit the transverse displacement of the elastic layer, and the through hole is formed in the rear side of the support plate and is used for allowing ultraviolet light to pass through.
The invention provides a roller type ultraviolet nanoimprint device which is characterized by comprising an imprint roller, a fixed block, a first high-precision manual displacement platform, a second high-precision manual displacement platform, a drying device, a high-precision electric control translation platform, a hydraulic rod and an ultrasonic cleaning device, wherein the first high-precision manual displacement platform comprises a second differential head, the second high-precision manual displacement platform comprises a third differential head, the second high-precision manual displacement platform is fixed on a sliding block through a screw, the first high-precision manual displacement platform is fixed on the second high-precision manual displacement platform through a screw, the fixed block is fixed on the first high-precision manual displacement platform through a screw, the imprint roller is matched in the fixed block through an air bearing, the surface of the imprint roller is wrapped with a layer of PDMS soft template, the bottom end of the hydraulic rod is fixed on the second high-precision manual displacement platform through a screw, the upper end of the hydraulic rod is connected with the ultrasonic cleaning device, and the drying device is connected with the side wall of the fixed block through a screw.
The roller type ultraviolet nanoimprint device is characterized by comprising a sliding block, a ball screw, a screw supporting seat, a coupler and a servo motor III, wherein the ball screw is connected with the servo motor III through the coupler and is fixed through the screw supporting seat, and the sliding block is matched with the ball screw through a bearing.
The roller type ultraviolet nanoimprint device provided by the invention is characterized in that the ultrasonic cleaning device comprises cleaning liquid, constant-temperature cleaning liquid can be continuously supplemented, and the roller type ultraviolet nanoimprint device is used for cleaning residual glue on an imprint roller.
The invention has the following obvious advantages: the embossing roller and the back roller are aligned and extruded better, so that good conformal contact is formed among the template, the substrate and the back roller, and a more accurate micro-nano pattern can be printed out; the ultrasonic cleaning device is added, the influence of adhesive force is reduced through ultrasonic waves, the residual glue in the template can be removed efficiently, and the precision of patterns is improved; because the embossing roller is immersed in the constant-temperature cleaning liquid in the ultrasonic cleaning device, the constant-temperature cleaning liquid can provide a cooling effect for the embossing roller, so that the damage of thermal stress to the embossed pattern and the change of the property of the template are reduced, the template is protected, and the embossing precision is improved.
Drawings
FIG. 1 is a schematic view of a roll-type UV nanoimprint apparatus according to the present invention;
FIG. 2 is a front view of a roll-type UV nanoimprint apparatus according to the present invention;
FIG. 3 is a side view of a roll-type UV nanoimprint apparatus of the present invention;
FIG. 4 is a schematic view of a frame of a roll-type ultraviolet nanoimprint apparatus according to the present invention;
FIG. 5 is a schematic structural view of a doctor blade device of a roll-type UV nanoimprint apparatus according to the present invention;
FIG. 6 is a schematic structural view of a supporting device of a roll-type ultraviolet nanoimprint apparatus according to the present invention;
FIG. 7 is a left side view of a supporting device for removing a sealing plate of a roll-type ultraviolet nanoimprint apparatus of the present invention;
FIG. 8 is a rear view of a support device for a roll-type ultraviolet nanoimprint apparatus of the present invention;
FIG. 9 is a schematic structural view of an adjusting device of a roll-type ultraviolet nanoimprint apparatus according to the present invention;
FIG. 10 is a front view of a conditioning device of a roll-type ultraviolet nanoimprint apparatus of the present invention;
fig. 11 is a schematic structural view of an ultrasonic cleaning device of a roll-type ultraviolet nanoimprint apparatus according to the present invention.
Reference numerals illustrate: the device comprises a frame, a 2-supporting plate, a 3-unreeling roller, a 4-wind-up roller, a 5-bearing plate, a 6-gluing device, a 7-scraping device, a 8-supporting device, a 9-adjusting device, a 10-substrate, a 11-supporting roller I, a 12-supporting roller II, a 13-supporting roller III, a 14-supporting roller IV, a 15-pre-curing device, a 16-supporting roller V, a 17-guiding roller, a 18-ultraviolet lamp, a 19-supporting roller VI, a 20-servo motor I, a 21-servo motor II, a 22-steel plate, a 101-4040 aluminum profile, a 102-rib plate, 103-supporting rods, 701-differential head I, 702-scraping knives, 801-supporting plates, 802-sealing plates, 803-backing rollers, 804-moving blocks, 805-rib plates, 806-elastic layers, 807-supporting frames, 808-through holes, 901-embossing rollers, 902-fixing blocks, 903-high-precision manual displacement platforms I, 904-high-precision manual displacement platforms II, 905-drying devices, 906-high-precision electric control translation platforms, 908-cleaning devices, 907-differential hydraulic heads, 701-differential heads, 301-differential heads, 6283-differential heads, a lead screw rods, a 62601-differential bearings, a 90601-differential screw rods, a 6283-differential shafts, a 90601-differential shaft, a bearing device.
Detailed Description
The invention will now be described in detail with reference to the drawings and specific examples.
As shown in fig. 1, 2 and 3, the roll-type ultraviolet nanoimprinting device comprises a frame 1, a support plate 2, an unreeling roll 3, a reeling roll 4, a bearing plate 5, a gluing device 6, a scraping device 7, a supporting device 8, an adjusting device 9, a substrate 10, a first supporting roll 11, a second supporting roll 12, a third supporting roll 13, a fourth supporting roll 14, a pre-curing device 15, a fifth supporting roll 16, a guide roll 17, an ultraviolet lamp 18, a sixth supporting roll 19, a first servo motor 20, a second servo motor 21 and a steel plate 22, wherein the support plate 2 and the bearing plate 5 are fixed on the frame 1 through screws, the unreeling roll 3 is connected on the support plate 2 through bearings and is connected with the first servo motor 20 fixed on the back side of the support plate 2 through screws, the reeling roll 4 is connected on the support plate 2 through bearings and is connected with the second servo motor 21 fixed on the back side of the support plate 2 through screws, the first supporting roll 11, the second supporting roll 12, the third supporting roll 13, the fourth supporting roll 14 is connected on the support plate 2 through bearings, the gluing device 6, the scraping device 7 and the pre-curing device 15 are fixed on the support plate 2 through the support plate 17 and are connected with the support plate 2 through the right side of the guide roll 17 and are fixed on the back side of the support plate 2 through screws 8 through the support plate 8 and are fixed on the back side of the steel plate 2 through the adjusting device through screws, the back side of the steel plate 8 is fixed on the back side of the steel plate through the steel plate 8 through the adjusting device through screws and the back plate 8 is fixed on the back side of the steel plate 8 through the back plate.
As shown in fig. 4, the frame 1 includes a 4040 aluminum profile 101, a rib plate 102 and support rods 103, the 4040 aluminum profile 101 and the rib plate 102 are fixed by screws, and the support rods 103 are fixed on two sides of the frame 1 by screws.
As shown in fig. 5, the doctor device 7 includes a differential head 701 and a doctor blade 702, the doctor device 7 is fixed on the support plate 2 by a screw, and the differential head 701 is connected to the doctor blade 702 for controlling the thickness of the adhesive layer to a specified thickness.
As shown in fig. 6, 7 and 8, the supporting device 8 includes a supporting plate 801, a sealing plate 802, a backing roller 803, a moving block 804, a rib plate 805, an elastic layer 806, a supporting frame 807 and a through hole 808, wherein the supporting plate 801 is fixed on the supporting plate 2 by a screw, the rib plate 805 is fixed on the supporting plate 801, the supporting frame 807 is fixed on the supporting plate 801 by a screw, the backing roller 803 is made of transparent glass and is placed in the moving block 804 by an air bearing, the elastic layer 806 is placed on the supporting frame 807 by a groove, the elastic layer 806 and the moving block 804 are fixed by the sealing plate 802, so as to limit the lateral displacement of the elastic layer 806, and the through hole 808 is formed at the rear side of the supporting plate 801, so that ultraviolet light can penetrate through the through hole 808 and cure the embossed pattern by the backing roller 803 made of transparent glass.
As shown in fig. 9, 10 and 11, the adjusting device 9 includes a platen 901, a fixed block 902, a first high-precision manual displacement platform 903, a second high-precision manual displacement platform 904, a drying device 905, a high-precision electric control translation platform 906, an ultrasonic cleaning device 907 and a hydraulic rod 908, wherein the first high-precision manual displacement platform 903 includes a second differential head 90301 for adjusting the height of the platen 901, so that the axis of the platen 901 and the axis of the back roller 803 form a plane, the second high-precision manual displacement platform 904 includes a third differential head 90401 for adjusting the platen 901, a straight line formed by connecting the midpoint of the axis of the platen 901 and the midpoint of the back roller 803 is perpendicular to the axis of the platen 901, the high-precision electric control translation platform 906 includes a slider 90601, a ball screw 90602, a screw support seat 90603, a coupling 90604 and a third servo motor 90605, the ball screw 90602 is connected with the third servo motor 90605 through the coupling 90604, the slider 90601 and the ball 90602 are matched with bearings, the ball screw 90602 is fixed through the screw support seat 603, the axis of the platen 901 is used for adjusting the axis of the platen 901 and is fixed on the platen 907, the first high-precision manual displacement platform 907 is fixed on the platen 803 by a constant-temperature screw, the first high-precision manual displacement platform is fixed on the platen 907 is fixed on the surface of the platen 901 by a high-precision ultrasonic cleaning device, the first ultrasonic cleaning device is fixed on the platen 904 by a gap is fixed on the platen 904, the surface of the platen is fixed on the side of the platen is by a high-precision ultrasonic cleaning device, and the platen is fixed by a bottom, and the ultrasonic cleaning device is fixed by a top is by a bottom, and a top is fixed by a top, and a top is a top, a bottom, a top is a bottom, a top is a top, a bottom, and a top is a top, and is a top. And the cleaning liquid which is continuously lost is supplemented by an internal pipeline and is used for cleaning the residual glue on the embossing roller 901, the embossing roller 901 is cooled, and a drying device 905 is connected with the side wall of the fixed block 902 through a screw and is used for drying the embossing roller 901 which is cleaned by the ultrasonic cleaning device 907.
According to fig. 1-11, embodiments of the present invention are as follows.
(1) The first servo motor 20 controls the unreeling roller 3 to unreel, the second servo motor 21 controls the reeling roller 4 to reel, the first servo motor 20 and the second servo motor 21 keep working synchronously, the substrate 10 moves steadily, the substrate 10 is glued through the gluing device 6, the doctor blade 702 is adjusted to a specified distance through adjusting the first differential head 701 on the doctor device 7, after the thickness of the glue layer on the substrate 10 is scraped to the specified thickness, the substrate 10 continues to move, the pre-curing device 15 is used for pre-curing, the guiding roller 17 coated with the protective layer is used for stopping the working of the first servo motor 20 and the second servo motor 21 after a part of the substrate 10 leaves the supporting device 8 and reaches six positions of the supporting roller 19, and the adjustment of the embossing roller 901 and the backing roller 803 is performed.
(2) The height of the embossing roller 901 is adjusted through adjusting the second differential head 90301 of the first high-precision manual displacement platform 903, so that a plane formed by the axis of the embossing roller 901 and the axis of the back roller 803 is horizontal, the third differential head 90401 of the second high-precision manual displacement platform 904 is adjusted, the embossing roller 901 is adjusted, a straight line formed by connecting the middle point of the axis of the embossing roller 901 and the middle point of the axis of the back roller 803 is perpendicular to the axis of the embossing roller 901, a servo motor three 90605 is controlled to adjust the distance between the embossing roller 901 and the back roller 803, an embossing force is applied, the elastic layer 806 contracts along with the application of the embossing force, the embossing roller 901 and the back roller 803 are better aligned and extruded, good conformal contact is formed among the embossing roller 901, the substrate 10 and the back roller 803, proper embossing force is applied, the width of the extruded part of the PDMS soft template is slightly larger than the light source line width of the ultraviolet lamp 18, the height of the hydraulic rod 908 is adjusted, and the lower end of the embossing roller 901 is immersed in cleaning liquid of the ultrasonic cleaning device 907.
(3) Starting a first servo motor 20 and a second servo motor 21, continuously moving the substrate 10, embossing the pre-cured substrate 10 coated with photoresist by the embossing roller 901, curing the embossed substrate 10 by the ultraviolet lamp 18 through the through hole 808 of the supporting device 8, simultaneously opening the ultrasonic cleaning device 907 and the drying device 905, cleaning the embossing roller 901 through the ultrasonic cleaning device 907 in the rotating process, removing residual glue in the PDMS soft template wrapped on the embossing roller 901 by ultrasonic vibration, cooling the embossing roller 901 by constant temperature cooling liquid, drying by the drying device 905, continuously embossing, and collecting the embossed substrate 10 by the winding roller 4.
Claims (4)
1. The roll-type ultraviolet nanoimprinting device is characterized by comprising a frame, a support plate, an unreeling roll, a wind-up roll, a bearing plate, a gluing device, a scraping device, a supporting device, an adjusting device, a substrate, a first supporting roll, a second supporting roll, a third supporting roll, a fourth supporting roll, a pre-curing device, a fifth supporting roll, a guide roll, an ultraviolet lamp, a sixth supporting roll, a first servo motor, a second servo motor and a steel plate, wherein the support plate and the bearing plate are fixed on the frame through screws, the unreeling roll is connected on the support plate through bearings and is connected with the first servo motor fixed on the back side of the support plate through screws, the wind-up roll is connected on the support plate through bearings and is connected with the second servo motor fixed on the back side of the support plate through screws, the first supporting roll, the second supporting roll, the third supporting roll, the fourth supporting roll, the fifth supporting roll and the sixth supporting roll are connected on the support plate through bearings, the gluing device, the scraping device and the pre-curing device are fixed on the support plate through screws, the guide roll is connected on the support plate through bearings, the support plate is fixed on the support plate through screws, the ultraviolet lamp is fixed on the support plate through screws, the right side is fixed on the support plate through screws, the support plate is connected with the support plate through screws, and is connected with the right side of the steel plate through adjusting device through screws, and is connected with the steel plate through the adjusting device through the right side through screws;
the support device comprises a support plate, a sealing plate, a back roller, a moving block, a rib plate, an elastic layer, a support frame and a through hole, wherein the support plate is fixed on the support plate through screws, the rib plate is arranged on the support plate for fixing, the support frame is fixed with the support plate through screws, the back roller is made of transparent glass and is matched with the moving block through an air bearing, the elastic layer and the moving block are placed on the support frame through grooves, the support frame is fixed through the sealing plate for limiting the transverse displacement of the elastic layer, and the through hole is formed in the rear side of the support plate for allowing ultraviolet light to pass through;
the adjusting device comprises a stamping roller, a fixed block, a first high-precision manual displacement platform, a second high-precision manual displacement platform, a drying device, a high-precision electric control translation platform, a hydraulic rod and an ultrasonic cleaning device, wherein the first high-precision manual displacement platform comprises a second differential head, the second high-precision manual displacement platform comprises a third differential head, the second high-precision manual displacement platform is fixed on a sliding block through a screw, the first high-precision manual displacement platform is fixed on the second high-precision manual displacement platform through a screw, the fixed block is fixed on the first high-precision manual displacement platform through a screw, the stamping roller is matched in the fixed block through an air bearing, the surface of the stamping roller is wrapped with a layer of PDMS soft template, the bottom end of the hydraulic rod is fixed on the second high-precision manual displacement platform through a screw, the upper end of the hydraulic rod is connected with the ultrasonic cleaning device, and the drying device is connected with the side wall of the fixed block through a screw;
the high-precision electronic control translation table comprises a sliding block, a ball screw, a screw supporting seat, a coupler and a servo motor III, wherein the ball screw is connected with the servo motor III through the coupler and is fixed through the screw supporting seat, and the sliding block is matched with the ball screw through a bearing;
the ultrasonic cleaning device comprises cleaning liquid and can continuously supplement constant-temperature cleaning liquid for cleaning residual glue on the embossing roller.
2. The roll-type ultraviolet nanoimprint apparatus of claim 1 wherein the guide roll surface is attached with a protective layer to reduce damage to the surface of the rubberized substrate.
3. The roll-type ultraviolet nanoimprint device according to claim 1, wherein the frame comprises 4040 aluminum profiles, rib plates and supporting rods, the 4040 aluminum profiles are fixedly connected with screws through the rib plates, and the supporting rods are fixedly arranged on two sides of the frame through the screws.
4. The roll-type ultraviolet nanoimprint apparatus according to claim 1, wherein the doctor apparatus comprises a differential head and a doctor blade, the doctor apparatus is fixed on the support plate by a screw, and the differential head is connected with the doctor blade for controlling the thickness of the adhesive layer to a specified thickness.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710981190.3A CN109696799B (en) | 2017-10-20 | 2017-10-20 | Roller type ultraviolet nanoimprint device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710981190.3A CN109696799B (en) | 2017-10-20 | 2017-10-20 | Roller type ultraviolet nanoimprint device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109696799A CN109696799A (en) | 2019-04-30 |
| CN109696799B true CN109696799B (en) | 2023-11-28 |
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|---|---|---|---|
| CN201710981190.3A Active CN109696799B (en) | 2017-10-20 | 2017-10-20 | Roller type ultraviolet nanoimprint device |
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Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
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| JP5180820B2 (en) * | 2005-05-03 | 2013-04-10 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | Method and apparatus for transferring a pattern from a stamp to a substrate |
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