CN100575243C - The large area reverse roller impression method of micro-structural during flexible basic grand electronics is made - Google Patents
The large area reverse roller impression method of micro-structural during flexible basic grand electronics is made Download PDFInfo
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- CN100575243C CN100575243C CN200710019013A CN200710019013A CN100575243C CN 100575243 C CN100575243 C CN 100575243C CN 200710019013 A CN200710019013 A CN 200710019013A CN 200710019013 A CN200710019013 A CN 200710019013A CN 100575243 C CN100575243 C CN 100575243C
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Abstract
The large area reverse roller that the invention discloses micro-structural in the basic grand electronics manufacturing of a kind of flexibility is printed as the type method, adopt contrary roll-in seal technology and corresponding chromatography Alignment Process, ultra-violet curing technology, produce the required 3 d function micro-structural of large-area grand electronic device on the flexible plastic film of ito thin film being coated with.The film that stays that this method has been eliminated conventional impression generation stays film to handle needed additional process thereby exempted; Simultaneously, the required force of impression of this method is little, can effectively reduce the face internal strain of film substrate, has reduced stress and has concentrated; And in electronic functional material, add light curing agent, use cold ultraviolet source to be cured, reduced the thermal deformation of flexible material.This method is applicable to the large format display of can opening a book, Electronic Paper, OLED, film RFID, flexible solar sail, portable x radial imaging instrument, portable radar, space solar electric power supply system and antenna assembly, is attached to the manufacturing of the grand electronic systems such as dynamoelectric intelligent covering on any three-dimensional structure surface.
Description
Technical field
The invention belongs to technical field of micro-nano manufacture, the large area reverse method for stamping of 3 d function micro-structural during the basic grand electronics of particularly a kind of flexibility (electronic device of based thin film transistor (TFT)) is made.This method is mainly used in the large format display of can opening a book, Electronic Paper, OLED, film RFID, flexible solar sail, portable x radial imaging instrument, portable radar, flexible solar electric power system and antenna assembly, is attached to the manufacturing of the grand electronic systems such as dynamoelectric intelligent covering on any three-dimensional structure surface.
Background technology
The glass plate base of based thin film transistor (TFT:Thin-Film-Transitor) or the electronic system of fexible film base constantly tend to large tracts of land integrated (for example monolateral span is above 1 meter), form so-called grand electronic system (Macro electronics), typical grand electronic system product comprises the glass-based PDP and the LCD large-area flat-plate display of at present positive extensive use.Structure organic or inorganic opto-electronic device is regarded as the power of grand electronic system future development on the large area flexible film substrate, and this large-area flexible base optical electronic system is the most outstanding at present is applied as the OLED flexible display, be applied to the Electronic Paper of e-book (e-book) etc., flexible based polyalcohol solar cell etc.The outstanding feature of the grand electronic system of large area flexible base is: cost is low, in light weight, thin form, good pliability and portability, bending fold are arbitrarily arranged.
The main technique node of flexible basic grand electronics manufacturing comprises film substrate (plastic sheeting or inorganic material paper tinsel) preparation, inorganic or organic electronic material preparation and is coated with shop, micro-structural patternization (Micro-patterning), online, encapsulation etc.The grand electronic system manufacturing process of following main flow must embody low temperature, normal atmospheric pressure, continuous feature of making, to reach the requirement of large format, low cost, high production capacity.
Micro-structural patternization on the large area substrates is considered to the most key process procedure in the grand electronics manufacturing.The large tracts of land pattern technology that receives at present bigger concern in the world can be returned into four big categories: jet printing technology, ROM mask programmable read-only memory light removal technology, micro-nano structure inorganic material transfer techniques and micro-embossing forming technique.Wherein the micro-embossing forming technique is considered to a kind of high efficiency, micro-structural manufacturing technology cheaply.In order to improve efficient and the requirement of adaptation large format that micro-embossing is produced, Mold Making becomes the cylindrical roll shape, to realize that continuous rolling is printed as type.Korea S KAIST university and Samsung company cooperate, and have developed the photocuring electronic polymer material, have developed the continuous rolling process of photocuring, can realize the making of the grand electronics of large area flexible base under the normal temperature.
But there is following deficiency in above-mentioned micro-embossing method:
The first, this method for stamping essence is mechanical forced shaping, needs bigger force of impression, causes the stress in flexible base and the micro-structural to concentrate easily;
Second, this method for stamping forms certain thickness " staying film " inevitably on the electronic material after the shaping, for realizing the function of grand electronic system, must will " stay film " by additional process means removes, for example etching, chemical attack, ion milling etc., the technology of removing " staying film " is very complicated, especially for the basic grand electronic system of large-area flexibility, the applicability problem that has equipment, should be suitable for large-area removal and " stay film ", can not damage flexible substrates and functional three-dimensional microstructures again.
Summary of the invention
Defective or deficiency at above-mentioned prior art exists the objective of the invention is to, and propose the large area reverse roller impression method of micro-structural in the basic grand electronics manufacturing of a kind of flexibility.The film that stays that this method can be eliminated conventional impression generation stays film to handle needed additional process thereby exempted, and has shortened technological process.
To achieve these goals, the present invention takes following technical solution:
The large area reverse roller impression method of micro-structural during the basic grand electronics of a kind of flexibility is made, this method adopts contrary stamping technique, adopt electronic material from the rolling die surface to the pattern transfer of flexible substrates.Be primarily characterized in that at first electronic material being coated surface engraving has on the cylinder rolling die of micro-structural, on the rolling die surface, finish the patternization of electronic material; Then by the continuous rolling mode with die surface the electronic material of patternization transfer on the flexible parent metal; This transfer process realizes at the rheology and the adhesion characteristics of die surface and substrate surface by the control electronic material.
The large area reverse roller impression method of micro-structural during the basic grand electronics of above-mentioned flexibility is made specifically may further comprise the steps:
(1) preparation of flexible base material.The flexible substrates selection has certain tensile strength and the flexible plastic film of light transmission is arranged, and evaporation one deck ito thin film makes plastic sheeting have electric conductivity on flexible plastic film, with the electrode as grand electronic device, carries out O on the ito thin film of flexible substrates
2Etching makes electric slurry then present strong wetability to flexible base to strengthen its surface energy;
(2) rolling die preparation.Rolling die is the pulley type structure, adopts metal material to make; Go out functional micro-structural with laser sintered mode in the rolling die Surface Machining, and on rolling die, produce corresponding alignment mark; Be processed to form after the micro-structural, evaporation one deck Teflon material on the rolling die surface in order to reduce the surface energy of rolling die, makes electric slurry present nonwetting or weak wetability to the rolling die surface;
(3) the roll-in system of micro-structural large tracts of land replica sets up in the grand electronic system.This system comprises feeding link, roll-in replica link, rewinding link.Sending and receiving material structure in wherein feeding, the rewinding link employing printing machinery and the control of corresponding tension force, photoelectric error correction structure.The core link of roll-in system---roll-in replica link comprises: mould be installed part, curtain type shop glue part, platform absorbed portion, motion control partly, the ultraviolet light polymerization part.For realizing different length, being installed of the mould of different-diameter, and be beneficial to the loading and unloading of mould, so that frequent cleaning die, the part that is installed mould adopts the auxiliary structure with the thimble location of scroll chuck transmission, and the thimble bearing is installed on the slippage platform, to realize the loading and unloading that are easy to of mould, each fixes a power sensor above thimble bearing and chuck, with measuring roll pressure; Curtain type shop glue is partly by to continuous parameter control for colloid system, realize that the electronic material of different viscosities reaches evenly, controllable film thickness be coated with the shop; The platform absorbed portion adopts vacuum suction, open and flat being fixed on the roll-in platform of feasible flexible base; Motion control part will guarantee the linear velocity of rotation of rolling die and the coupling of translational velocity, there is not swiping between the micro-structural with micro-structural and institute's replica on the realization rolling die, avoid the replica defective, adopt stepper motor as power source, precision lead screw cooperates as running part with line slideway, and segmentation back transmission realizes the transmission of micron order precision; Ultra-violet curing comprises that partly ultraviolet source, flat ultraviolet light export and corresponding light path part, to realize the uniform exposure in roll-in replica zone;
(4) two-step chromatography alignment measurement systems is set up.The mode of employing ccd image collection is carried out vision measurement to the alignment mark and the mark on the rolling die of both sides on the flexible parent metal, obtain the relative position parameter of flexible parent metal and mould, carry out following two steps then and aim at adjustment: first, little driving by the roll-in platform, carry out position correction, make that the axis of rolling die is parallel with the line of the alignment mark of the both sides of flexible substrates; The second, by vision collecting to the alignment mark on the mould, and with flexible parent metal on the image of alignment mark compare, adjust the corner and the horizontal level of mould, initial replica position is set; By above-mentioned aligning adjustment, can realize impressing the accurate location of multiplelayer microstructure on base material, back.In the continuous rolling process, the mould revolution moves a week, carries out alignment correction one time, repeats above-mentioned two steps and aims at adjustment process.
The realization of (5) roll-in process: the first, under tension force control, feeding roller rotates, and makes gentle material move the length (being the length of roll-in platform) of a breadth, discharges tension force then, makes flexible parent metal be in the state of approaching zero tension force; The second, the roll-in platform rises, and contacts with flexible parent metal and its vacuum suction is fixed; The 3rd, two steps of carrying out described in step (4) are aimed at adjustment process; The 4th, the flexible parent metal that the roll-in platform drives vacuum suction rises, and is pressed on the rolling die, and forms certain roller pressure; The 5th, start for colloid system, start the motion control part and the ultra-violet curing part of roll-in system, motion control partly guarantees mould rotational line speed and translation linear velocity coupling, and ultra-violet curing guarantees that partly the electronic material that mould contacts out with flexible parent metal evenly solidifies.
For the grand electronic system of multiplelayer microstructure, adopt the described roll-in process of step (5), for the grand electronic device of individual layer micro-structural, do not need level to level alignment chromatography process, remove the step of the 3rd in the step (5) aligning adjustment process and get final product.
Curtain type described in the present invention is coated with to mat formation to put and adopts the container of elongated gap that the cylindrical roll die surface is supplied glue continuously, electric slurry for little viscosity, by vacuumizing vacuum in the control container, make container be in the negative pressure state, with the gravity effect of balance door curtain made of cloth pasty film; Electric slurry to big viscosity, then start the ultrasound-driven film of container bottom configuration, pressure in the container is changed by supersonic frequency dynamically, by the coupling of supersonic frequency and electric slurry viscosity, make under the effect of big viscosity electric slurry under this fluctuation pressure in the container and evenly from linear slit, flow out; The thickness of door curtain made of cloth slurry is by the decision of the linear slit width of cylindrical roll draught line speed and container, and the linear slit width-adjustable of container is coated with the electric slurry of realizing different viscosities and is taped against preset thickness; Be coated with in the process of shop, electronic material enters container by the electronic material compensating port, makes the interior electronic material of container reach dynamic equilibrium.
Electric slurry described in the present invention uses the polyester polyols alcohols to be matrix, adds the cationic polymerization light trigger therein, gives its ultraviolet light polymerization characteristic, adds adhesion promoter simultaneously in the primary electron material matrix, and adjusts its physical viscosity.
The grand electronics micro-structural that method of the present invention is shaped, its architectural feature depends on the three-dimensional microstructures feature on the rolling die fully; For the grand electronic system of multilayer, the interlayer chromatography precision depends on the precision of optical measuring system precision and the little driving control of roll-in platform, the control of mould corner; The grand electronic device breadth that forms depends on the size of roll-in platform.
The film that stays that method of the present invention has been eliminated conventional impression generation stays film to handle needed additional process thereby exempted; Simultaneously, the required force of impression of this method is little, can effectively reduce the face internal strain of film substrate, has reduced stress and has concentrated; And in electronic functional material, add light curing agent, use cold ultraviolet source to be cured, reduced the thermal deformation of flexible material.
Description of drawings
Accompanying drawing 1～Fig. 7 is the large area reverse imprint process flow chart of micro-structural during flexible basic grand electronics is made.Label among the figure is represented respectively: 1, flexible substrates, 2, ito thin film, 3, be used to strengthen the bioactive molecule of surface energy, 4, rolling die, 5, bossing on the rolling die, 6, teflon film, 7, flexible substrates stores roller, 8, the flexible substrates collecting drum, 9, micro-structural after the typing, 10, the ultraviolet light polymerization light source, 11, curtain type electric slurry film, 12, curtain type shop adhesive dispenser, 13, the electric slurry of patternization behind the even glue, 14, the mould direction of rotation, 15, base material collecting drum direction of rotation, 16, the drive motors that mould rotates, 17, scroll chuck, 18, the roll-in platform, 19, system's base, 20, the photoelectric error correction system, 21, system frame, 22, line slideway, 23, ball-screw, 24, the drive motors of mould translation, 25, vacuum orifice, 26, a Jiao Zui of curtain type shop glue, 27, the ultrasonic oscillation film, 28, the electronic material compensating port, 29, the alignment mark of rolling die, 30, alignment mark on the flexible substrates, 31, semi-transparent semi-reflecting lens, 32, ccd video camera, 33, total reflective mirror.
In the accompanying drawing, Fig. 1 is preparation electrode and surface treatment on flexible substrates, Fig. 2 carries out structure after the surface treatment for rolling die, Fig. 3 is contrary roll-in replidcation process schematic diagram, Fig. 4 is the tomograph of contrary roll-in system, Fig. 5 is curtain type shop colloid system structure, and Fig. 6 is a two-step chromatography alignment measurement systems schematic diagram, and Fig. 7 is the alignment mark layout drawing of large tracts of land chromatography.
Below in conjunction with accompanying drawing technological process of the present invention is described in further detail.
The specific embodiment
Referring to accompanying drawing, Fig. 1～Fig. 7 has represented the large area reverse imprint process flow chart of micro-structural in the grand electronics manufacturing of flexible base respectively.
Basic functional principle of the present invention is: electronic material is coated the die surface that is carved with micro-structural, finishes the patternization of electronic material, then by the continuous rolling mode with die surface the electronic material of patternization transfer on the flexible parent metal.In electronic functional material, add light curing agent, use the curing after cold ultraviolet source carries out contrary impression.The at the uniform velocity rotating while translation of mould roller, the linear velocity and the translational velocity of rotation are complementary, and do not have swiping between the micro-structural with micro-structural and institute's replica on the realization mould.When printing the multilayer circuit pattern, existing circuit feature pattern carries out the optical alignment adjustment earlier on pattern on the mould and the film substrate, carries out chromatography then.
The main technical factor of the large area reverse roller of micro-structural seal technology comprises in the flexible basic grand electronics manufacturing: the preparation of rolling die 4, the surface treatment of flexible substrates 1 (surface has prepared the ITO electrode), the filling of electronic material 13 on rolling die 4 are coated with coupling, the ultra-violet curing of barrier material, the multilayer chromatography alignment procedures of the speed of roller pressure in shop process, the roll-in process and rolling die velocity of rotation and horizontal movement.Wherein, to rotate coupling and multilayer chromatography process with translational velocity be the critical process key element of micro-structural roll-in replica to the setting, rolling die 4 that be coated with roller pressure in shop, the roll-in process of the curtain type of electronic material 13.The setting that is coated with shop thickness and roller pressure of electronic material 13 is relevant with the microstructure height of want replica, must guarantee enough electronic material patternizations and transfers on the flexible substrates 1; Rolling die rotates the sidewall pattern that speeds match with horizontal movement directly influences micro-structural after the replica in the roll-in process; The multilayer chromatography precision directly influences the yield rate of functional grand electronic device.
As flexible substrates 1, the large area reverse imprint process of micro-structural comprises following several stages in the flexible basic grand electronics manufacturing with plastic sheeting PET material:
(1) surface treatment of rolling die 4 and flexible parent metal 1 (surface has prepared ITO electrode 2): as Fig. 1, shown in Figure 2: rolling die 4 is the pulley type structure, adopts metal material to make, and external diameter processes the bossing 5 on the rolling die.Go out microstructure features with ultrafast laser or wet etching method in the Surface Machining of rolling die 4.To alignment request, make the alignment mark 29 of rolling die 4 for ease of the location in the roll-in replidcation process.On rolling die 4, form after the microstructure features, evaporation one deck Teflon (Teflon) material layer 6 on the outer surface of rolling die 4, with reduce its surface can, make electric slurry to rolling die 4 surfaces present do not soak into or or weak wetability; And the ito thin film 2 of flexible substrates pet sheet face is carried out O
2Etching or other chemical treatment to strengthen its surface energy, make electric slurry present strong wetability to flexible substrates 1; Surface treatment by to rolling die 4 and flexible base 1 matches the surface property of the two, so that electronic material can be transferred on the flexible substrates 1 from the surface of rolling die 4 smoothly.
(2) the cylindrical roll die surface supplies colloid system continuously---the foundation of curtain type shop colloid system 12, as shown in Figure 5.Adopt the container of elongated gap that the cylindrical roll die surface is supplied glue continuously.For the electric slurry of little viscosity, vacuum orifice 25 work, the vacuum with in the control container makes container be in the negative pressure state, with the gravity effect of balance door curtain made of cloth pasty film; Electric slurry to big viscosity, then start the ultrasonic vibration film 27 of container bottom configuration, produce the ultrasonic wave of frequency adjustable, the pressure that container drips glue mouth 26 places is dynamically changed by supersonic frequency, by the coupling of supersonic frequency and electronic material viscosity, make under the effect of big viscosity electric slurry under this fluctuation pressure in the container and evenly from drip glue mouth 26, flow out; By electronic material compensating port 28, make electronic material constantly add in the container, set up the dynamic equilibrium of electronic material in the container; The thickness of door curtain made of cloth slurry is by a cylindrical roll draught line speed and glue mouth 26 a width decision like this.Drip the width-adjustable of glue mouth 26, the electric slurry that can realize different viscosities is coated with and is taped against preset thickness.
(3) chromatography alignment procedures, as Fig. 6, shown in Figure 7: when chromatography, the flexible substrates 1 usefulness base material collecting drum 8 that at first will last time impress is dragged on the roll-in platform 18 to be fixed with vacuum suction.The alignment mark on the rolling die 4 29 is transferred on the flexible substrates 1 when last time impressing, forms the alignment mark 30 on the flexible substrates.The ccd image acquisition system that adopts CCD microscope 32 and CCD light path lens 31 to form, alignment mark 30 to alignment mark on the rolling die 4 29 and flexible substrates 1 both sides carries out vision measurement, obtain both location parameters, by little driving make the roll-in platform along y to, adjust around the rotation θ of z axle, realize position correction, make the rolling die axis parallel with the line of the alignment mark of flexible substrates both sides; By vision collecting to alignment mark on the rolling die 29, and with flexible substrates 1 on the image of mark compare, adjust the corner and the horizontal level of pressing mold tool 4, initial replica position is set; Whole by above-mentioned two steps, can realize the accurate location of chromatography multiplelayer microstructure on base material.In continuous embossed process, can after mould is whenever advanced a circumference, carry out a chromatography and aim at, i.e. chromatography is aimed in segmentation.
(4) roll-in replidcation process, as shown in Figure 3, Figure 4: the first, under tension force control, base material collecting drum 8 rotates, make flexible parent metal move the length (being the breadth length of roll-in platform 18) of a breadth, discharge tension force then, make flexible parent metal be in the state of approaching zero tension force; The second, roll-in platform 18 rises, and contacts with flexible parent metal and it is carried out vacuum suction fix (Fig. 4); The 3rd, to the grand electronic system of multilayer, carry out the chromatography alignment procedures in above-mentioned (3); The 4th, the flexible parent metal that the roll-in platform drives vacuum suction rises, and rolling die 4 is contacted with flexible substrates 1, and apply certain roller pressure on flexible substrates 1; The 5th, start curtain type shop adhesive dispenser 12, beginning roll-in replidcation process.Rolling die 4 is rotating along the direction shown in the direction of rotation 15 of flexible substrates collecting drum 8, carry out the motion of horizontal direction simultaneously, control guarantees that the linear velocity that rolling die 4 rotates is consistent with horizontal movement speed, avoids the relative slip between rolling die 4 and the flexible substrates 1.In the contact position of rolling die 4 with flexible substrates 1, shine through ultraviolet source 10 attached to the electric slurry on the rolling die 4 13, light-sensitive material in the electric slurry 13 is cured, on flexible substrates 1, realized the pattern transfer, soon the micro-structural replica on the rolling die 4 is on flexible substrates 1.
Claims (3)
1, the large area reverse roller impression method of micro-structural is characterized in that this method comprises the following steps: during the basic grand electronics of a kind of flexibility was made
(1) preparation of flexible parent metal
The flexible substrates selection has certain tensile strength and the flexible plastic film of light transmission is arranged, and evaporation one deck ito thin film makes plastic sheeting have electric conductivity on flexible plastic film, with the electrode as grand electronic device, carries out O on the ito thin film of flexible substrates
2Etching makes electric slurry present strong wetability to flexible base to strengthen its surface energy;
(2) rolling die is prepared
Rolling die is the pulley type structure, adopts metal material to make; Go out functional micro-structural with laser sintering processes in the rolling die Surface Machining, and on rolling die, produce corresponding alignment mark; Be processed to form after the micro-structural, evaporation one deck Teflon material again on the rolling die surface, in order to the surface that reduces rolling die can, make electric slurry present nonwetting or weak wetability to the rolling die surface;
(3) roll-in replidcation process
Flexible substrates is sent in the roll-in system, rolling die contacts with flexible substrates, and on flexible substrates, apply certain roller pressure, start curtain type shop adhesive dispenser, beginning roll-in replica, rolling die carries out the motion of horizontal direction simultaneously in rotating process, control guarantees that the linear velocity that mould rotates is consistent with horizontal movement speed, avoids the relative slip between rolling die and the flexible substrates; Contact position in rolling die and flexible substrates, through UV-irradiation, the light-sensitive material in the electric slurry is cured, attached to the electric slurry on the rolling die on flexible substrates, the realization pattern shifts, and promptly the micro-structural replica on the rolling die is on flexible substrates;
(4) chromatography alignment procedures
The flexible substrates that last time impresses is fixed with vacuum suction, make open and flat being fixed on the roll-in platform of flexible substrates, the alignment mark on the rolling die is transferred on the flexible substrates when last time impressing, the ccd image acquisition system that employing CCD microscope and CCD light path lens are formed is carried out vision measurement to the alignment mark of alignment mark on the rolling die and flexible substrates both sides, obtain the location parameter of both alignment marks, little driving by the roll-in system, carry out position correction, make that the axis of rolling die is parallel with the line of the alignment mark of flexible substrates both sides; By vision collecting, and compare, initial replica position be set with the image of alignment mark on the flexible substrates to alignment mark on the rolling die, aim at finish after, repeating step (3) carries out the multilayer chromatography.
2. the method for claim 1, it is characterized in that, described curtain type shop adhesive dispenser adopts the container of elongated gap that the cylindrical roll die surface is supplied glue continuously, electric slurry for little viscosity, by vacuumizing vacuum in the control container, make container be in the negative pressure state, with the gravity effect of balance door curtain made of cloth pasty film; Electric slurry to big viscosity, then start the ultrasound-driven film of container bottom configuration, pressure in the container is changed by supersonic frequency dynamically, by the coupling of supersonic frequency and electric slurry viscosity, make under the effect of big viscosity electric slurry under this fluctuation pressure in the container and evenly from linear slit, flow out; The thickness of door curtain made of cloth slurry is by the decision of the linear slit width of cylindrical roll draught line speed and container, and the linear slit width-adjustable of container is coated with the electric slurry of realizing different viscosities and is taped against preset thickness; Be coated with in the process of shop, electronic material enters container by the electronic material compensating port, makes the interior electronic material of container reach dynamic equilibrium.
3. the method for claim 1 is characterized in that, described electric slurry uses the polyester polyols alcohols to be matrix, add the cationic polymerization light trigger therein, give its ultraviolet light polymerization characteristic, in the primary electron material matrix, add adhesion promoter simultaneously, and adjust its physical viscosity.
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| CN200710019013A CN100575243C (en) | 2007-11-06 | 2007-11-06 | The large area reverse roller impression method of micro-structural during flexible basic grand electronics is made |
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Families Citing this family (11)
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| CN101900935B (en) * | 2009-05-27 | 2012-09-05 | 比亚迪股份有限公司 | Ultraviolet impressing method and device thereof |
| CN101976019A (en) * | 2010-11-12 | 2011-02-16 | 复旦大学 | Nano-size photoetching method and photoetching equipment for special-shaped surface |
| CN102169289B (en) * | 2011-05-17 | 2012-07-04 | 西安交通大学 | Reverse-roll imprint-moulding method of over-long grating ruler for machine tool |
| CN102193310B (en) * | 2011-05-17 | 2012-09-05 | 西安交通大学 | Method for forming grating for machine tool measurement in two-step solidifying roll-pressing forming method |
| CN102566260A (en) * | 2011-12-30 | 2012-07-11 | 西安交通大学 | Method for rapidly processing graphical surface of ultralong grating ruler rolling die |
| CN103226288B (en) * | 2013-04-27 | 2016-01-20 | 苏州大学 | A kind of ultra-violet curing micro nano structure makeup device and layout technique |
| CN103341540B (en) * | 2013-07-18 | 2014-10-29 | 吉林大学 | Microstructure surface rolling forming device and method |
| CN103660103B (en) * | 2013-12-12 | 2016-08-24 | 上海交通大学 | Film double-sided micro structure volume to volume UV solidifying and molding device based on belt mould |
| CN106004194B (en) * | 2016-05-13 | 2017-06-30 | 华中科技大学 | The patterned surface method and the figuratum product of tool of a kind of flexible-belt |
| CN113607310B (en) * | 2021-06-01 | 2022-07-05 | 武汉大学 | Large-scale preparation method of flexible piezoresistive sensor |
| CN114203773A (en) * | 2021-11-16 | 2022-03-18 | 长沙惠科光电有限公司 | Pixel structure, preparation method thereof and display panel |
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