CN109696799A - A kind of roll shape ultraviolet nanometer imprinting apparatus - Google Patents
A kind of roll shape ultraviolet nanometer imprinting apparatus Download PDFInfo
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- CN109696799A CN109696799A CN201710981190.3A CN201710981190A CN109696799A CN 109696799 A CN109696799 A CN 109696799A CN 201710981190 A CN201710981190 A CN 201710981190A CN 109696799 A CN109696799 A CN 109696799A
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- 239000000758 substrate Substances 0.000 claims abstract description 28
- 238000004506 ultrasonic cleaning Methods 0.000 claims abstract description 17
- 239000003292 glue Substances 0.000 claims abstract description 16
- 230000001105 regulatory effect Effects 0.000 claims abstract description 16
- 229910000831 Steel Inorganic materials 0.000 claims abstract description 11
- 239000010959 steel Substances 0.000 claims abstract description 11
- 238000004026 adhesive bonding Methods 0.000 claims abstract description 5
- 238000006073 displacement reaction Methods 0.000 claims description 34
- 239000010410 layer Substances 0.000 claims description 15
- 238000004140 cleaning Methods 0.000 claims description 14
- 238000001035 drying Methods 0.000 claims description 9
- 238000007789 sealing Methods 0.000 claims description 8
- 238000003892 spreading Methods 0.000 claims description 8
- 230000007480 spreading Effects 0.000 claims description 8
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 7
- 229910052782 aluminium Inorganic materials 0.000 claims description 7
- 230000008878 coupling Effects 0.000 claims description 7
- 238000010168 coupling process Methods 0.000 claims description 7
- 238000005859 coupling reaction Methods 0.000 claims description 7
- 239000004205 dimethyl polysiloxane Substances 0.000 claims description 7
- 235000013870 dimethyl polysiloxane Nutrition 0.000 claims description 7
- CXQXSVUQTKDNFP-UHFFFAOYSA-N octamethyltrisiloxane Chemical compound C[Si](C)(C)O[Si](C)(C)O[Si](C)(C)C CXQXSVUQTKDNFP-UHFFFAOYSA-N 0.000 claims description 7
- 238000004987 plasma desorption mass spectroscopy Methods 0.000 claims description 7
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 claims description 7
- 230000006378 damage Effects 0.000 claims description 6
- 239000011521 glass Substances 0.000 claims description 4
- 239000011241 protective layer Substances 0.000 claims description 3
- 239000007787 solid Substances 0.000 claims description 2
- 239000013589 supplement Substances 0.000 claims description 2
- 238000004804 winding Methods 0.000 claims description 2
- 230000008646 thermal stress Effects 0.000 abstract description 7
- 238000001816 cooling Methods 0.000 abstract description 3
- 230000000694 effects Effects 0.000 abstract description 3
- 238000000034 method Methods 0.000 description 8
- 238000010586 diagram Methods 0.000 description 6
- 230000008859 change Effects 0.000 description 5
- 230000008569 process Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000000465 moulding Methods 0.000 description 3
- 238000009825 accumulation Methods 0.000 description 2
- 230000001276 controlling effect Effects 0.000 description 2
- 238000001723 curing Methods 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 238000004049 embossing Methods 0.000 description 2
- 238000001127 nanoimprint lithography Methods 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 238000007711 solidification Methods 0.000 description 2
- 230000008023 solidification Effects 0.000 description 2
- 238000003848 UV Light-Curing Methods 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 230000003044 adaptive effect Effects 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000009738 saturating Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 238000002604 ultrasonography Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
Abstract
The invention discloses a kind of roll shape ultraviolet nanometer imprinting apparatus, including rack, it is fixed with bearing plate and support plate in rack, let off roll, wind-up roll, glue stations, Frictioning device, support device, regulating device, support roller one, support roller two, support roller three, support roller four, precuring device, support roller five, guide roller, ultraviolet lamp, support roller six, servo motor one, servo motor two and steel plate are fixed in the support plate.It after substrate carries out gluing and frictioning via glue stations, is transmitted at support device and regulating device and is imprinted, and by ultraviolet light curing, finally wound by wind-up roll.The present invention is accurately aligned and squeezes with back flow roll by adjusting roller platen, to make to form good bringing into conformal contact between template, substrate and back flow roll；It joined ultrasonic cleaning equipment, residue glue can be removed and cooling effect can be provided to roller platen, reduce the thermal stress in roller platen template, protect template, improve the precision of coining.
Description
Technical field
The present invention relates to a kind of nano-imprinting device, espespecially a kind of roll shape ultraviolet nanometer imprinting apparatus belongs to minute manufacturing
Technical field.
Background technique
Nanometer embossing by scientist Zhou Yu of Chinese origin in nineteen ninety-five propose, can because it is compared to conventional lithographic techniques
Realize cheap, quick manufacture micro-nano pattern, thus semiconductor, in terms of there are very big market prospects.
Summary of the invention
For nanometer embossing, either plane imprints plane nano, roller imprints plane nano or roll-to-roll
Nano impression controls being aligned between template and substrate and bringing into conformal contact is all particularly important, being total between template and substrate
Shape contacts pattern accuracy concerning nano impression, between template and substrate can precise alignment then determine the figure of template coining
Whether case can generate offset, also increase the difficulty of adjusting template Yu substrate bringing into conformal contact.If failing reality between template and substrate
Existing good bringing into conformal contact, it will cause the force of impression applied uneven, reduced so as to cause coining precision, or lead to template
Sliding phenomenon occurs between substrate, not only will result only in the failure of multiple quarter of characteristic pattern, it is also quite conceivable to destroy template and lining
Bottom.In response to this problem, the patent disclosure that notification number is CN 103246161 B is a kind of for the adaptive of large-area nano coining
Imprint head is answered, but it is primarily adapted for use in roller and imprints to plane nano, during roll-to-roll nano impression, lacks to other certainly
By the control spent, force of impression applies more difficult with control.Publication No. is that the patent of 106324984 A of CN discloses a kind of roller
To roller ultraviolet nanometer imprinting apparatus and method, imprinted pattern and breadth depth ratio are accurately controlled by moving guide rail and micromotion platform
System, but ignores the depth of parallelism and bringing into conformal contact problem between roller platen and back flow roll.
HyungJun Lim et al. is in entitled Nanoimprint lithography with a soft roller and
Change of the size to soft template of force of impression is referred in the article of focused UV light for flexible substrates
Shape has certain effect, and the region of the deformed pressing of soft template has with ultraviolet lamp exposure curing region and closely contacts, and controls
Flattening area processed can calculate the number of required light bar, avoid the waste for adding excessive light bar, reduce required cost.
Therefore, the bringing into conformal contact between roller platen and back flow roll and application force of impression appropriate become particularly important.
In addition, though ultraviolet nanometer stamping technique is no longer harsh to environmental requirement compared to conventional thermocompression print, to template substrate
Influence smaller, but correlative factor still results in the precision of imprinted pattern and goes wrong.Ankur Jain is in Thermal
Referred in mono- text of Modeling of Ultraviolet Nanoimprint Lithography it is ultraviolet light curing during will
So that photoresist absorbs energy and heat production, and template is transferred heat to, and the thermal stress accumulation of die plate central area is difficult to disappear
It dissipates, it will affect to moulding process.And general roll shape ultraviolet nanometer coining is all made of soft template to be imprinted,
The materials such as generally PDMS, the elasticity modulus and Poisson's ratio of the materials such as PDMS can change with temperature change.One, if not
Temperature is controlled, it would be desirable to inaccurate to sacrifice imprinted pattern caused by processing efficiency carrys out relief of thermal stress as cost
The problem of, if do not dealt with, with the accumulation of thermal stress, in some instances it may even be possible to generate damage to template.The two does not carry out temperature
Control, the material properties of template can accordingly change, it is difficult to be precisely controlled to the revolving speed of knockout press and roller, so as to cause pattern
Transfer is inaccurate.In addition to this, during demoulding, more or less glue-line can all be torn, causes the characteristic pattern of template
Doped with the glue-line of tearing in case, if do not handled it, it will impacted to subsequent moulding process.
To sum up, roll-to-roll ultraviolet nanometer imprinting apparatus has the disadvantages that needs are accurate and adjusts roller platen and back flow roll at present
Between the depth of parallelism and bringing into conformal contact；Remaining glue-line in the elimination roller platen of efficient, low damage is needed, to reduce it to coining precision
Influence；Certain type of cooling is needed to solve influence of the thermal stress to template and processing efficiency.
Summary of the invention
The invention aims to solve to be difficult to realize be aligned between template and substrate in roll-to-roll ultraviolet nanometer moulding process
Influencing coining and remaining glue-line with thermal stress in bringing into conformal contact, UV curing process influences coining precision and processing efficiency etc. and asks
Topic, provides a kind of roll shape ultraviolet nanometer imprinting apparatus.
A kind of roll shape ultraviolet nanometer imprinting apparatus that purpose according to the present invention proposes, which is characterized in that including rack, branch
Fagging, let off roll, wind-up roll, bearing plate, glue stations, Frictioning device, support device, regulating device, substrate, support roller one,
Support roller two, support roller three, support roller four, precuring device, support roller five, guide roller, ultraviolet lamp, support roller six, servo electricity
Machine one, servo motor two and steel plate, wherein support plate and bearing plate are fixed in rack by screw, and let off roll is connected by bearing
It connects on the supporting plate, and is connected with the servo motor one for being fixed on support plate back side by screw, wind-up roll is connected by bearing
On the supporting plate, and with the servo motor two for being fixed on support plate back side by screw it is connected, support roller one, support roller two, branch
Support roller three, support roller four, support roller five, support roller six by bearing connect on the supporting plate, glue stations, Frictioning device and in advance
Solidification equipment is fixed in support plate by screw, and guide roller is connected on the supporting plate by bearing, and support device passes through screw
It is fixed in support plate, ultraviolet lamp is fixed on the support device back side by screw, passes through screw and support plate on the right side of regulating device
It is connected, left end is connected by screw with steel plate, and steel plate is connected to guarantee the firm of regulating device with bearing plate by screw.
A kind of roll shape ultraviolet nanometer imprinting apparatus that purpose according to the present invention proposes, which is characterized in that the guiding
Roller surface adheres to a protective layer to reduce the damage to gluing substrate surface.
A kind of roll shape ultraviolet nanometer imprinting apparatus that purpose according to the present invention proposes, which is characterized in that the rack
Including 4040 aluminum profiles, floor and support rod, 4040 aluminum profiles are connected and fixed by floor and screw, and support rod is solid by screw
Due to rack two sides.
A kind of roll shape ultraviolet nanometer imprinting apparatus that purpose according to the present invention proposes, which is characterized in that the frictioning
Device, including differential is first and spreading knife, Frictioning device are fixed in support plate by screw, differential are first with spreading knife phase
Even, for controlling bondline thickness to specified thickness.
A kind of roll shape ultraviolet nanometer imprinting apparatus that purpose according to the present invention proposes, which is characterized in that the support
Device, including supporting plate, sealing plate, back flow roll, movable block, gusset, elastic layer, support frame and through-hole, wherein supporting plate passes through spiral shell
Nail is fixed in support plate, has gusset to be fixed on supporting plate, support frame is fixed by screw and supporting plate, and back flow roll is by transparent
Glass is made, and is placed in movable block by air bearing cooperation, and support frame places elastic layer and movable block by groove, leads to
It crosses sealing plate to be fixed, to limit the displacement of elastic layer transverse direction, has through-hole on rear side of supporting plate, for passing through ultraviolet light.
A kind of roll shape ultraviolet nanometer imprinting apparatus that purpose according to the present invention proposes, which is characterized in that the adjusting
Device, including roller platen, fixed block, high-precision manual displacement platform one, high-precision manual displacement platform two, drying device, height
Precision electronic control translation stage, hydraulic stem and ultrasonic cleaning equipment, wherein high-precision manual displacement platform one includes differential head two,
High-precision manual displacement platform two includes differential head three, and high-precision manual displacement platform two is fixed on sliding block by screw, high
Precision manual displacement platform one is fixed on high-precision manual displacement platform two by screw, and fixed block is fixed on height by screw
On precision manual displacement platform one, roller platen is cooperated in fixed block by air bearing, and the coining roller surface is surrounded by one
Layer PDMS soft template, hydraulic stem bottom end are fixed by screws on high-precision manual displacement platform two, upper end and ultrasonic cleaning
Device is connected, and drying device is connected by screw with the side wall of fixed block.
A kind of roll shape ultraviolet nanometer imprinting apparatus that purpose according to the present invention proposes, which is characterized in that described is high-precision
Electronic control translation stage, including sliding block, ball-screw, lead screw support base, shaft coupling and servo motor three are spent, ball-screw passes through shaft coupling
Device is connected with servo motor three, and ball-screw is fixed by lead screw support base, and sliding block and ball-screw pass through bearing fit.
A kind of roll shape ultraviolet nanometer imprinting apparatus that purpose according to the present invention proposes, which is characterized in that the ultrasound
Include cleaning solution inside wave cleaning device, and supplement constant temperature cleaning solution can be continued, for cleaning the residue glue on roller platen.
The present invention has following clear superiority: so that roller platen is preferably aligned and squeezes with back flow roll, to make template, lining
Good bringing into conformal contact is formed between bottom and back flow roll, can imprint out more accurate micro-nano pattern；It joined ultrasonic cleaning
Device reduces the influence of adhesion strength by ultrasonic wave, can efficiently remove the residue glue in removing template, improves the essence of pattern
Degree；Because roller platen is immersed in the constant temperature cleaning solution in ultrasonic cleaning equipment, constant temperature cleaning solution can provide for roller platen
Cooling effect reduces destruction of the thermal stress to imprinted pattern and the change to template property, protects template and improve pressure
Print precision.
Detailed description of the invention
Fig. 1 is a kind of structural schematic diagram of roll shape ultraviolet nanometer imprinting apparatus of the invention；
Fig. 2 is a kind of front view of roll shape ultraviolet nanometer imprinting apparatus of the invention；
Fig. 3 is a kind of side view of roll shape ultraviolet nanometer imprinting apparatus of the invention；
Fig. 4 is a kind of structural schematic diagram of the rack of roll shape ultraviolet nanometer imprinting apparatus of the invention；
Fig. 5 is a kind of structural schematic diagram of the Frictioning device of roll shape ultraviolet nanometer imprinting apparatus of the invention；
Fig. 6 is a kind of structural schematic diagram of the support device of roll shape ultraviolet nanometer imprinting apparatus of the invention；
Fig. 7 is a kind of left view of the support device of the removal sealing plate of roll shape ultraviolet nanometer imprinting apparatus of the invention；
Fig. 8 is a kind of rearview of the support device of roll shape ultraviolet nanometer imprinting apparatus of the invention；
Fig. 9 is a kind of structural schematic diagram of the regulating device of roll shape ultraviolet nanometer imprinting apparatus of the invention；
Figure 10 is a kind of front view of the regulating device of roll shape ultraviolet nanometer imprinting apparatus of the invention；
Figure 11 is a kind of structural schematic diagram of the ultrasonic cleaning equipment of roll shape ultraviolet nanometer imprinting apparatus of the invention.
Description of symbols: 1- rack, 2- support plate, 3- let off roll, 4- wind-up roll, 5- bearing plate, 6- glue stations, 7-
Frictioning device, 8- support device, 9- regulating device, 10- substrate, 11- support roller one, 12- support roller two, 13- support roller three,
14- support roller four, 15- precuring device, 16- support roller five, 17- guide roller, 18- ultraviolet lamp, 19- support roller six, 20- servo
Motor one, 21- servo motor two, 22- steel plate, 101-4040 aluminum profile, 102- floor, 103- support rod, 701- differential is first,
702- spreading knife, 801- supporting plate, 802- sealing plate, 803- back flow roll, 804- movable block, 805- gusset, 806- elastic layer, 807-
Support frame, 808- through-hole, 901- roller platen, 902- fixed block, 903- high-precision manual displacement platform one, 904- high-precision manual
Displacement platform two, 905- drying device, 906- high precision electric control translation stage, 907- ultrasonic cleaning equipment, 908- hydraulic stem,
90301- differential head two, 90401- differential head three, 90601- sliding block, 90602- ball-screw, 90603- lead screw support base,
90604- shaft coupling, 90605- servo motor three.
Specific embodiment
The present invention is described in detail with specific embodiment below in conjunction with the accompanying drawings.
As shown in Figure 1, 2, 3, a kind of roll shape ultraviolet nanometer imprinting apparatus, including rack 1, support plate 2, let off roll
3, wind-up roll 4, bearing plate 5, glue stations 6, Frictioning device 7, support device 8, regulating device 9, substrate 10, support roller 1,
Support roller 2 12, support roller 3 13, support roller 4 14, precuring device 15, support roller 5 16, guide roller 17, ultraviolet lamp 18, branch
Roller 6 19, servo motor 1, servo motor 2 21 and steel plate 22 are supportted, wherein support plate 2 is fixed on bearing plate 5 by screw
In rack 1, let off roll 3 is connected in support plate 2 by bearing, and be fixed on by screw 2 back side of support plate servo electricity
Machine 1 is connected, and wind-up roll 4 is connected in support plate 2 by bearing, and with servo that 2 back side of support plate is fixed on by screw
Motor 2 21 is connected, and support roller 1, support roller 2 12, support roller 3 13, support roller 4 14 are connected to support plate 2 by bearing
On, glue stations 6, Frictioning device 7 and precuring device 15 are fixed in support plate 2 by screw, and guide roller 17 passes through bearing
It is connected in support plate 2, and in a surface attachment protective layer to reduce the damage to 10 surface of gluing substrate, support device 8
It is fixed in support plate 2 by screw, and is fixed by gusset 805, ultraviolet lamp 18 is fixed on support device 8 by screw
The back side is connected on the right side of regulating device 9 with support plate 2 by screw, and left side passes through screw and is connected with steel plate 22, and steel plate 22 passes through spiral shell
Nail is connected to guarantee the firm of regulating device 9 with bearing plate 5.
As shown in figure 4, the rack 1 includes 103,4040 aluminum profile of 4040 aluminum profiles 101, floor 102 and support rod
101 and floor 102 fixed by screw, support rod 103 is fixed on 1 two sides of rack by screw.
As shown in figure 5, the Frictioning device 7 includes differential first 701 and spreading knife 702, Frictioning device 7 passes through screw
It is fixed in support plate 2, differential first 701 is connected with spreading knife 702, for controlling bondline thickness to specified thickness.
As shown in Fig. 6,7,8, the support device 8 includes supporting plate 801, sealing plate 802, back flow roll 803, movable block
804, gusset 805, elastic layer 806, support frame 807 and through-hole 808, wherein supporting plate 801 is fixed on support plate 2 by screw
On, there is gusset 805 to be fixed on supporting plate 801, support frame 807 is fixed by screw and supporting plate 801, and back flow roll 803 is by saturating
Bright glass is made, and is placed in movable block 804 by air bearing cooperation, and support frame 807 places elastic layer 806 by groove
It with movable block 804, is fixed by sealing plate 802, to limit the lateral displacement of elastic layer 806, is had on rear side of supporting plate 801
Through-hole 808, for make UV light permeability through-hole 808 and be made of transparent glass 803 pairs of back flow roll imprint the pattern that finishes into
Row solidification.
As shown in Fig. 9,10,11, the regulating device 9 includes roller platen 901, fixed block 902, high-precision manual displacement
Platform 1, high-precision manual displacement platform 2 904, drying device 905, high precision electric control translation stage 906, ultrasonic cleaning
Device 907 and hydraulic stem 908, wherein high-precision manual displacement platform 1 includes differential head 2 90301, for adjusting coining
The height of roller 901, so that the axis formed plane of the axis of roller platen 901 and back flow roll 803 is horizontal, high-precision manual displacement platform
2 904 make 901 axis midpoint of roller platen and 803 axis midpoint of back flow roll for adjusting roller platen 901 including differential head 3 90401
Connected to be in line perpendicular to 901 axis of roller platen, high precision electric control translation stage 906 includes sliding block 90601, ball-screw
90602, lead screw support base 90603, shaft coupling 90604 and servo motor 3 90605, ball-screw 90602 pass through shaft coupling
90604 are connected with servo motor 3 90605, and sliding block 90601 and ball-screw 90602 pass through bearing fit, ball-screw 90602
It is fixed by lead screw support base 90603, for adjusting the gap between roller platen 901 and back flow roll 803, and apply force of impression, it is high
Precision manual displacement platform 2 904 is fixed on sliding block 90601 by screw, and two high-precision manual displacement platforms 1 are logical
It crosses screw to be symmetrically fixed on high-precision manual displacement platform 2 904, fixed block 902 is fixed on high-precision manual by screw
On displacement platform 1, roller platen 901 is matched in fixed block 902 by air bearing, 901 surface of the roller platen packet
Have one layer of PDMS soft template, 908 bottom end of hydraulic stem is fixed by screws on high-precision manual displacement platform 2 904, upper end with
Ultrasonic cleaning equipment 907 is connected, and for adjusting the distance between ultrasonic cleaning equipment 907 and roller platen 901, ultrasonic wave is clear
Include constant temperature cleaning solution in cleaning device 907, and the cleaning solution being constantly lost is supplemented by internal pipeline, for cleaning roller platen
Residue glue on 901, and roller platen 901 is cooled down, drying device 905 is connected by screw with the side wall of fixed block 902,
For the dry roller platen 901 cleaned by ultrasonic cleaning equipment 907.
According to Fig. 1-Figure 11, a specific embodiment of the invention is as follows.
(1) servo motor 1 controls let off roll 3 and is unreeled, and servo motor 2 21 controls wind-up roll 4 and wound, and watches
Take motor 1 and servo motor 2 21 and keep synchronous working so that 10 smooth motion of substrate, substrate 10 via glue stations 6 into
Spreading knife 702 is adjusted to distance to a declared goal by the differential first 701 on adjusting Frictioning device 7 by row gluing, will be on substrate 10
Bondline thickness is scraped to specified thickness, and substrate 10 continues to move to, and precuring is carried out by precuring device 15, by being coated with protection
The guide roller 17 of layer, when the substrate 10 of a part leaves support device 8, after reaching at support roller 6 19, stopping servo motor one
20 and servo motor 2 21 work, carry out the adjusting to roller platen 901 and back flow roll 803.
(2) by adjusting the differential head 2 90301 of high-precision manual displacement platform 1, the height of roller platen 901 is adjusted
Degree adjusts high-precision manual displacement platform 2 904 so that the axis formed plane of the axis of roller platen 901 and back flow roll 803 is horizontal
Differential head 3 90401, adjust roller platen 901,901 axis midpoint of roller platen made to be connected with 803 axis midpoint of back flow roll institute Cheng Zhi
Line controls servo motor 3 90605 and adjusts the distance between roller platen 901 and back flow roll 803, apply perpendicular to 901 axis of roller platen
Add force of impression, elastic layer 806 is shunk with the application of force of impression, so that roller platen 901 is preferably aligned and squeezes with back flow roll 803
Pressure, to make to form good bringing into conformal contact between roller platen 901, substrate 10 and back flow roll 803, applies force of impression appropriate, makes
The width for obtaining the extruded part of PDMS soft template is slightly larger than the Light source line width of ultraviolet lamp 18, adjusts the height of hydraulic stem 908, makes
The lower end of roller platen 901 is submerged into the cleaning solution of ultrasonic cleaning equipment 907.
(3) start servo motor 1 and servo motor 2 21, substrate 10 continue to move, after roller platen 901 is to precuring
The substrate 10 for being coated with photoresist imprinted, ultraviolet lamp 18 imprints the substrate 10 finished through 808 pairs of through-hole of support device 8
Solidified, at the same time, opens ultrasonic cleaning equipment 907 and drying device 905, roller platen 901 is during rotation
By ultrasonic cleaning equipment 907, cleaned by ultrasonic activation residual in the PDMS soft template wrapped up on removal roller platen 901
Glue, and roller platen 901 is cooled down by constant temperature coolant liquid, then is dried by drying device 905, continue to imprint, receive
4 pairs of winding up roller imprint the substrate 10 finished and are collected.
Claims (8)
- A kind of roll shape ultraviolet nanometer imprinting apparatus described in 1., which is characterized in that including rack, support plate, let off roll, winding Roller, bearing plate, glue stations, Frictioning device, support device, regulating device, substrate, support roller one, support roller two, support roller Three, support roller four, precuring device, support roller five, guide roller, ultraviolet lamp, support roller six, servo motor one, servo motor two And steel plate, wherein support plate and bearing plate are fixed in rack by screw, and let off roll is connected on the supporting plate by bearing, and It is connected with the servo motor one for being fixed on support plate back side by screw, wind-up roll is connected on the supporting plate by bearing, and with By screw be fixed on support plate back side servo motor two be connected, support roller one, support roller two, support roller three, support roller four, Support roller five, support roller six are connected on the supporting plate by bearing, and glue stations, Frictioning device and precuring device pass through screw It is fixed in support plate, guide roller is connected on the supporting plate by bearing, and support device is fixed in support plate by screw, purple Outer lamp is fixed on the support device back side by screw, is connected by screw with support plate on the right side of regulating device, left end passes through screw It is connected with steel plate, steel plate is connected to guarantee the firm of regulating device with bearing plate by screw.
- 2. a kind of roll shape ultraviolet nanometer imprinting apparatus according to claim 1, which is characterized in that the guiding roller surface Adhere to a protective layer to reduce the damage to gluing substrate surface.
- 3. a kind of roll shape ultraviolet nanometer imprinting apparatus according to claim 1, which is characterized in that the rack includes 4040 aluminum profiles, floor and support rod, 4040 aluminum profiles are connected and fixed by floor and screw, and support rod is fixed on by screw Rack two sides.
- 4. a kind of roll shape ultraviolet nanometer imprinting apparatus according to claim 1, which is characterized in that the Frictioning device, First including differential and spreading knife, Frictioning device are fixed in support plate by screw, differential is first to be connected with spreading knife, is used for Bondline thickness is controlled to specified thickness.
- 5. a kind of roll shape ultraviolet nanometer imprinting apparatus according to claim 1, which is characterized in that the support device, Including supporting plate, sealing plate, back flow roll, movable block, gusset, elastic layer, support frame and through-hole, wherein supporting plate is solid by screw Due in support plate, there is gusset to be fixed on supporting plate, support frame is fixed by screw and supporting plate, and back flow roll is by transparent glass It is made, and is placed in movable block by air bearing cooperation, support frame places elastic layer and movable block by groove, by close Sealing plate is fixed, and to limit the displacement of elastic layer transverse direction, has through-hole on rear side of supporting plate, for passing through ultraviolet light.
- 6. a kind of roll shape ultraviolet nanometer imprinting apparatus according to claim 1, which is characterized in that the regulating device, Including roller platen, fixed block, high-precision manual displacement platform one, high-precision manual displacement platform two, drying device, high precision electro Control translation stage, hydraulic stem and ultrasonic cleaning equipment, wherein high-precision manual displacement platform one includes differential head two, high-precision Manual displacement platform two includes differential head three, and high-precision manual displacement platform two is fixed on sliding block by screw, high-precision hand Dynamic displacement platform one is fixed on high-precision manual displacement platform two by screw, and fixed block is fixed on high-precision hand by screw On dynamic displacement platform one, roller platen is cooperated in fixed block by air bearing, and the coining roller surface is surrounded by one layer of PDMS Soft template, hydraulic stem bottom end are fixed by screws on high-precision manual displacement platform two, upper end and ultrasonic cleaning equipment phase Even, drying device is connected by screw with the side wall of fixed block.
- 7. a kind of roll shape ultraviolet nanometer imprinting apparatus according to claim 1, which is characterized in that the high precision electric control Translation stage, including sliding block, ball-screw, lead screw support base, shaft coupling and servo motor three, ball-screw pass through shaft coupling and watch It takes motor three to be connected, ball-screw is fixed by lead screw support base, and sliding block and ball-screw pass through bearing fit.
- 8. a kind of roll shape ultraviolet nanometer imprinting apparatus according to claim 1, which is characterized in that the ultrasonic cleaning Include cleaning solution inside device, and supplement constant temperature cleaning solution can be continued, for cleaning the residue glue on roller platen.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710981190.3A CN109696799B (en) | 2017-10-20 | 2017-10-20 | Roller type ultraviolet nanoimprint device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710981190.3A CN109696799B (en) | 2017-10-20 | 2017-10-20 | Roller type ultraviolet nanoimprint device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109696799A true CN109696799A (en) | 2019-04-30 |
| CN109696799B CN109696799B (en) | 2023-11-28 |
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| CN106324984A (en) * | 2016-11-09 | 2017-01-11 | 长春工业大学 | Roller-to-roller ultraviolet nanoimprint device and method |
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| CN207337068U (en) * | 2017-10-20 | 2018-05-08 | 长春工业大学 | A kind of roll shape ultraviolet nanometer imprinting apparatus |
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| US20080202365A1 (en) * | 2005-05-03 | 2008-08-28 | Koninklijke Philips Electronics, N.V. | Method and Device For Transferring a Pattern From a Stamp to a Substrate |
| CN1775546A (en) * | 2005-12-02 | 2006-05-24 | 华中科技大学 | Nano marking press |
| CN101063810A (en) * | 2007-05-29 | 2007-10-31 | 中国科学院光电技术研究所 | Dual-purpose copy arrangement for ultraviolet lighting micro-nano graph air pressure stamping and photolithography |
| JP2009162993A (en) * | 2008-01-07 | 2009-07-23 | Konica Minolta Medical & Graphic Inc | Developing method of photosensitive planographic printing plate and automatic developing machine for photosensitive planographic printing plate |
| CN104216230A (en) * | 2013-06-05 | 2014-12-17 | 中芯国际集成电路制造(上海)有限公司 | Coating device for cylindrical mask plate and coating method |
| CN106444275A (en) * | 2016-09-08 | 2017-02-22 | 深圳先进技术研究院 | Roll-to-roll ultraviolet nano-imprinting device and method for preparing super-hydrophobic surface micro-structure by using roll-to-roll ultraviolet nano-imprinting device |
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