KR101200833B1 - Apparatus for manufacturing roll stamp and method for manufacturing roll stamp using the same - Google Patents

Abstract

PURPOSE: An apparatus and method for manufacturing a roll stamp are provided to perform a continuous patterning process on the surface of a roll type film. CONSTITUTION: A substrate roll(100) rotates around a substrate roll rotation shaft(110). A master roll(200) transfers a pattern on the substrate roll. A master roll rotation shaft(210) is combined with the center of the master roll. A rotation angle control unit controls and compensates a rotation angle of the master roll. A hardening unit hardens a resist coated on the surface of the substrate roll.

Description

Apparatus for manufacturing roll stamp and method for manufacturing roll stamp using the same}

The present invention relates to a roll stamp manufacturing apparatus and a roll stamp manufacturing method using the same, in more detail, a resist is applied to the surface and the substrate roll for producing a large roll stamp, and in contact with each other so that the pattern is transferred to the substrate roll Including a rotating master roll, to achieve a position compensation of the master roll relative to the substrate roll during the patterning process, to maintain a constant contact surface, and to make a uniform pressurized roll stamp manufacturing apparatus and a roll stamp using the same It relates to a manufacturing method.

In general, in the semiconductor manufacturing process, a shape of a mask or a stamp is transferred to a substrate such as silicon and glass to produce a micrometer or a nanometer-sized microstructure in large quantities.

Recently, the demand for functional optical films with nano-patterns is increasing. Examples of functional optical films include wire grid polarizers (WGPs), and line patterns or dot patterns are repeatedly formed on thin films.

The functional optical film is manufactured by the method of transferring the pattern of a roll to the surface of a film using the roll with a nanopattern.

The production of roll stamps is essential in the functional film manufacturing process using roll stamps, but until now, a technology for manufacturing a seamless large roll stamp has not been developed.

The roll stamp is manufactured by directly utilizing the result obtained through the conventional planar substrate patterning, such as using a flat stamp wound on a roll or connecting a film type stamp in a belt form. Discontinuous shapes are formed that limit the length of roll roll production.

Korean Registered Patent No. 0860953 (Registration Date 2008.09.30, Name: Method for manufacturing roll stamp for imprint) has disclosed a method for manufacturing an imprint roll stamp for forming a pattern on the outer circumferential surface of the roll by direct etching with plasma.

However, the above method is also a conceptual approach, and there are many problems to manufacture large roll stamps, and thus, there is still a need for technology development for manufacturing large roll stamps.

Registered Korean Patent No. 0860953 (Registration date 2008.09.30, Name: Manufacturing method of roll stamp for imprint)

The present invention has been made to solve the above problems, the object of the present invention is a resist is applied to the surface and the substrate roll for producing a large roll stamp, and rotates in contact with each other to transfer the pattern to the substrate roll Roll stamp manufacturing apparatus including a master roll, to achieve a position compensation of the master roll on the basis of the substrate roll during the patterning process, to maintain a constant contact surface, and to make a uniform pressurization and a roll stamp manufacturing method using the same To provide.

The roll stamp manufacturing apparatus of the present invention is a device for manufacturing a roll stamp, the resist is applied to the surface and the substrate roll 100 for rotating around the substrate roll rotation axis 110; A pattern is formed on an outer circumferential surface and disposed in parallel with the substrate roll 100 to rotate in contact with the substrate roll 100 and to transfer the pattern to the substrate roll 100; A master roll rotating shaft 210 coupled to a center of the master roll 200 and having a hollow inside; And a rotation angle controller 300 for adjusting and compensating a rotation angle of the master roll 200 such that the master roll rotation shaft 210 and the substrate roll rotation shaft 110 are horizontal to the bottom surface and rotated at a designated position. Curing means (400) provided inside the master roll rotating shaft (210) to cure a resist applied to a surface of the substrate roll (100); And is formed to include a plurality of protrusions.

In addition, the roll stamp manufacturing apparatus 1 includes a substrate roll rotating device 120 for rotating the substrate roll 100; Master roll rotating device 220 for rotating the master roll 200; The master roll 200 and the rotation angle control unit 300 is placed on the upper side, the sliding feed unit 500 for horizontally conveying in a direction perpendicular to the master roll rotation axis 210; A master roll holding part 230 coupled to both ends of the master roll rotating shaft 210 to support the master roll rotating shaft 210 and the master roll 200; A substrate roll holding part 130 coupled to both ends of the substrate roll rotating shaft 110 to support the substrate roll rotating shaft 110 and the substrate roll 100; A pressurizing motor unit 600 for pressing the master roll 200 and the rotation angle control unit 300 toward the substrate roll 100 to be transported along the sliding transfer unit 500; And a first stage 700 having an upper surface of the master roll 200, the rotation angle controller 300, and the sliding feeder 500, and which is transported in a horizontal direction with the master roll rotation shaft 210. It may be formed to include.

In addition, the rotation angle control unit 300 is coupled to both sides of the master roll holding unit 230, respectively, the first link 310 and the second link 320 having a predetermined amount of elasticity; A third link 330 connected between the first link 310 and the second link 320 and positioned between the master roll 200 and the pressure motor unit 600; A first fine formed at a portion where the first link 310 and the third link 330 are connected to finely adjust the position of the master roll holding part 230 in a horizontal direction with the first link 310; Adjusting unit 340; A second fine formed at a portion where the second link 320 and the third link 330 are connected to finely adjust the position of the master roll holding part 230 in a direction parallel to the second link 320. Adjusting unit 350; And a second stage 360 connected to the third link 330 and moving in a θy (rolling) direction rotating about a y axis. It may be formed to include.

In addition, the rotation angle control unit 300 so that the distance between the first link 310 and the second link 320 gradually away from the master roll holding unit 230 toward the third link 330 side. Can be formed.

In addition, the roll stamp manufacturing apparatus 1 is the master roll holding unit 230 and the sliding transfer unit 500 is spaced apart a predetermined distance in the direction perpendicular to the bottom surface, the lower side is pointed in the space spaced apart the sliding transfer unit Connection means may be provided to the point 500 and the point contact.

In addition, the curing means 400 is moved in the longitudinal direction of the master roll rotary shaft 210 may be removable or mounted.

In addition, the roll stamp manufacturing apparatus 1 includes a third stage 410 disposed at one end of the master roll holding unit 230; And a sliding fixing part 420 placed on an upper side of the third stage 410 so that the hardening means 400 is fixed, and the hardening means 400 slidingly moving in the longitudinal direction of the master roll rotating shaft 210. ; It may be formed to include.

In addition, the curing means 400 is an ultraviolet irradiation device for curing by irradiating ultraviolet light to the resist, the resist may be a material that is cured by ultraviolet light.

In addition, the curing means 400 is a heater for applying heat to the resist to cure, extending in the longitudinal direction of the master roll rotating shaft 210, the hot wire is wound around the outer surface, the resist may be a thermosetting resist.

Roll stamp manufacturing method using a roll stamp manufacturing apparatus of the present invention comprises the steps of: a) applying a resist to the substrate roll (100); b) pressurizing the master roll 200 to contact the substrate roll 100 by using the pressurized motor part 600; c) a first alignment step of adjusting an angle and a position in a? z (yawing) direction that rotates about a z-axis through the first link 310 and the second link 320 of the rotation angle controller 300; a second alignment step of adjusting an angle and a position in a θy (rolling) direction such that a bottom surface, the master roll rotating shaft 210 and the substrate roll rotating shaft 110 are parallel to each other through the second stage 360; e) a third alignment step of aligning the position of the hardening means 400; f) a rotation step of rotating the master roll 200 and the substrate roll 100; g) a real time alignment step in which the first to third alignment steps are performed in real time while the master roll 200 and the substrate roll 100 are rotated; Characterized in that it comprises a.

In addition, the roll stamp manufacturing method is a patterning repeating step of patterning by moving the substrate roll 100 in the x-axis direction after the patterning is completed by one rotation of the substrate roll 100; Further comprising, when performing the patterning repeating step, steps b) to g) may be performed.

In addition, in the patterning repeating step, the master roll 200 may be moved in the x-axis direction by the length of the master roll 200.

The roll stamp manufacturing apparatus and roll stamp manufacturing method using the same of the present invention includes a substrate roll for applying a resist on the surface and to produce a large roll stamp, and a master roll to rotate in contact with each other so that the pattern is transferred to the substrate roll, In order to achieve the position compensation of the master roll based on the substrate roll during the patterning process, the contact surface may be kept constant and uniform pressurization may be performed.

That is, the roll stamp manufacturing apparatus of the present invention and the roll stamp manufacturing method using the same have the advantage of forming a uniform pattern stably by achieving the position compensation of the master roll in real time during the patterning process.

In addition, the roll stamp manufacturing apparatus and the roll stamp manufacturing method using the same of the present invention has the advantage that the process is made smoothly by the ultraviolet or heat generated from the curing means is applied to the contact surface accurately.

In addition, the roll stamp manufacturing apparatus and roll stamp manufacturing method using the same of the present invention can perform a continuous patterning on the surface of the roll-shaped film having a width of several hundred mm or more, it is easy to manufacture a large roll stamp, through which future display It can be applied to various fields such as industry.

1 is a conceptual diagram of a roll stamp manufacturing apparatus according to an embodiment of the present invention.
Figure 2 is a conceptual diagram of the pressurization and process performed in the roll stamp manufacturing apparatus according to an embodiment of the present invention.
3 is a definition of the rotation direction of the master roll.
4 is a conceptual diagram for the initial value compensation of the angle of θz (yawing) direction of the master roll.
5 is a conceptual diagram for real-time compensation of the angle of θz (yawing) direction of the master roll.
6 is a conceptual diagram for initial value and real-time compensation of the angle [theta] z (yawing) direction of a master roll.
7 is a conceptual diagram for initial value compensation of the angle of θy (rolling) direction of a master roll.
8 is a conceptual diagram showing the configuration of a curing means.
9 is a conceptual view of an apparatus for detaching, mounting and positioning of the hardening means.
10 is a conceptual diagram illustrating mounting and detachment in a system of hardening means.
Fig. 11 is a conceptual definition and direction diagram for positioning of the hardening means.

Hereinafter, a roll stamp manufacturing apparatus and a roll stamp manufacturing method using the same of the present invention as described above will be described in detail with reference to the accompanying drawings.

1 is a conceptual diagram of a roll stamp manufacturing apparatus according to an embodiment of the present invention, Figure 2 is a conceptual diagram of the pressure and process performed in the roll stamp manufacturing apparatus according to an embodiment of the present invention, Figure 3 is a rotation of the master roll 4 is a conceptual diagram for initial value compensation of the θz (yawing) direction angle of the master roll, FIG. 5 is a conceptual diagram for real time compensation of the θz (yawing) direction angle of the master roll, and FIG. A conceptual diagram for initial value and real time compensation of the θz (yawing) direction angle of the master roll, Figure 7 is a conceptual diagram for the initial value compensation of the θy (rolling) direction angle of the master roll, Figure 8 shows the configuration of the hardening means 9 is a conceptual diagram of an apparatus for detaching, mounting and positioning of the hardening means, FIG. 10 is a conceptual diagram showing mounting and detachment in the system of the hardening means, and FIG. 11 is a direction of positioning of the hardening means. Definition and conceptual diagram The.

The roll stamp manufacturing apparatus 1 of the present invention includes a substrate roll 100, a master roll 200, a rotation angle control unit, a rotating shaft, and a hardening means. The master roll 200 includes the substrate roll 100. Larger roll stamp fabrication may be used by allowing smaller patterns, shorter lengths, and continuous patterning to be performed on the surface of the roll-shaped film having a width of several hundred mm or more.

The substrate roll 100 is a resist is applied to the surface, the roll stamp is produced through the patterning, it can be made of glass, silicon or metal.

The master roll 200 is a pattern formed on the outer circumferential surface to transfer the pattern to the substrate roll 100, the substrate roll 100 and the rotation axis is arranged in parallel with the substrate roll 100 in linear contact with the rotation do.

The central portion in the longitudinal direction of the master roll 200 is formed to include a master roll rotating shaft 210 for rotating the master roll 200 inside the hollow.

The rotation angle controller adjusts and compensates the rotation angle of the master roll 200 such that the substrate roll rotation shaft 110 and the master roll rotation shaft 210 are horizontal to the bottom surface and rotated at a designated position.

The hardening means is formed in the master roll rotating shaft 210 to include a hardening means for curing the resist applied to the surface of the substrate roll (100).

Example 1

In Embodiment 1, the roll stamp manufacturing apparatus 1 of this invention is concretely demonstrated.

As shown in FIG. 1, the roll stamp manufacturing apparatus 1 of the present invention rotates the substrate roll 100, and is connected to one end of the substrate roll rotating shaft 110, and is formed of a motor and an encoder. It may be formed including a roll rotating device (120).

In addition, the roll stamp manufacturing apparatus 1 of the present invention rotates the master roll 200, is connected to one end of the master roll rotating shaft 210, substrate roll rotating device 120 consisting of a motor and an encoder It may be formed to include.

In addition, the roll stamp manufacturing apparatus 1 of the present invention further comprises a sliding transfer unit 500, the master roll holding unit 230, the substrate roll holding unit 130, the pressurized motor unit 600 and the first stage 700. It may be formed to include.

The sliding conveyance unit 500 is disposed so that the master roll 200 and the rotation angle control unit 300 is placed on the upper side, the master roll 200 and the rotation angle in a direction perpendicular to the master roll rotation axis 210. The control unit 300 is formed to be horizontally conveyed.

The sliding transfer unit 500 may be in the form of a rail, in addition to this can be changed in various forms.

The master roll holding unit 230 is coupled to both ends of the master roll rotating shaft 210 to support the master roll rotating shaft 210 and the master roll 200.

As shown in FIGS. 1 and 2, the master roll holding part 230 is placed on the sliding feed part 500 and coupled to the end of the master roll rotating shaft 210.

The substrate roll holding unit 130 is coupled to both ends of the substrate roll rotating shaft 110 to support the substrate roll rotating shaft 110 and the substrate roll 100.

As shown in FIG. 2, the pressure motor unit 600 presses the rotation angle control unit 300 and the master roll 200 toward the substrate roll 100 so as to rotate the rotation angle along the sliding transfer unit 500. The controller 300 and the master roll 200 are horizontally transferred to the substrate roll 100.

At this time, the pressurized motor unit 600 is located at the end of the sliding conveying unit 500, so that the rotation angle control unit 300 and the master roll 200 is transferred by the operation of the motor, accordingly the master The roll 200 comes into contact with the substrate roll 100, and meshes with the substrate roll 100 to rotate.

The first stage 700 is formed in a plate shape so that the master roll 200, the rotation angle control unit 300 and the sliding conveyance unit 500 is placed on the upper side, vertical or horizontal with the master roll rotation axis 210 It is conveyed in the direction can be set the initial position of the master roll 200.

Example 2

In Example 2, the rotation angle and position compensation of the master roll 200 according to the rotation angle controller 300 will be described.

FIG. 3 defines the position movement and rotation direction of the master roll 200 when the substrate roll 100 is used as a reference, and the x-axis direction ends the process through one rotation of the substrate roll 100. Then, it means a direction to move horizontally to the next position, the substrate roll 100 should not occur in the position change in the x-axis direction while the process through one rotation is performed.

In this case, the θx (pitching) direction refers to a direction in which the process is performed by rotating the master roll 200 and the substrate roll 100 about the master roll rotation shaft 210 and the substrate roll rotation shaft 110.

The y-axis direction is a direction in which the substrate roll 100 is pressed against the master roll 200 so that the pattern is transferred, and the master roll 200 is moved forward or backward in the y-axis direction through the pressurizing motor. to be.

θy (rolling) direction is a very important direction so that the substrate roll 100 and the master roll 200 are in line contact with each other to perform pattern transfer, and the substrate roll rotating shaft 110 and the master roll rotating shaft 210 are Side by side with each other can be in line contact with each other in parallel with the bottom surface, accurate pattern transfer can be made.

If the z-axis direction is within a certain range in the direction in which the master roll 200 moves in the height direction, there is no difference, but must always maintain a constant value.

θz (yawing) direction is a factor that causes pressure deviation of both sides in the longitudinal direction when the pressure is made between the substrate roll 100 and the master roll 200, if a pressure deviation occurs, after the process is made, The pattern transfer result may differ depending on the location.

In other words, there may be a problem that the pattern transfer is well done on one side in the longitudinal direction of the substrate roll 100, the pattern transfer is not well done on the other side, or a difference occurs in the depth of the pattern on one side and the other side.

In particular, since the substrate roll 100 and the master roll 200 are cylindrical workpieces, when considering the degree of cylinder management, the rotation angle and position should be compensated in real time during the process.

As described above, the rotation angle control unit 300 is for compensating and adjusting a position and an angle of the translation direction and the rotation direction in the x, y, and z axes, respectively, on both sides of the master roll holding unit 230. A first link 310 and a second link 320, each coupled and having a predetermined amount of elasticity; A third link 330 connected between the first link 310 and the second link 320 and positioned between the master roll 200 and the pressure motor unit 600; A first fine formed at a portion where the first link 310 and the third link 330 are connected to finely adjust the position of the master roll holding part 230 in a horizontal direction with the first link 310; Adjusting unit 340; A second fine formed at a portion where the second link 320 and the third link 330 are connected to finely adjust the position of the master roll holding part 230 in a direction parallel to the second link 320. Adjusting unit 350; And a second stage 360 connected to the third link 330 and moving in a θy (rolling) direction rotating about a y axis. It may be formed to include.

As shown in Figure 5, the roll stamp manufacturing apparatus 1 of the present invention through the master roll holding unit 230, the first link 310, the second link 320 and the third link (330) By using the 4-bar Linkage Flexure Mechanism, the rotation angle and position of the master roll 200 are compensated initially and compensated in real time.

That is, the rotation angle control is composed of the first link 310 and the second link 320 of the guide shape of the flexure hinge having a certain amount of elasticity on both sides in the longitudinal direction of the master roll 200, the movement direction By allowing the master roll 200 and the substrate roll 100 to rotate about the center A of the contact surface, the master roll 200 and the substrate roll 100 can be maintained so that slippage is not caused in the longitudinal direction even during rotation angle compensation.

In this case, the rotation angle control unit 300 gradually distances from the master roll holding unit 230 toward the third link 330 toward the third link 330. As such, the master roll holding part 230, the first link 310, the second link 320, and the third link 330 are formed in a trapezoidal shape.

In particular, the roll stamp manufacturing apparatus 1 of the present invention is the master roll holding unit 230 and the sliding conveying unit 500 is spaced a predetermined distance in a direction perpendicular to the bottom surface, the lower side is pointed in the space spaced above the By being provided with the connecting means in contact with the sliding conveying unit 500, it is possible to prevent sagging of the master roll 200 that can occur in the flexure mechanism made of a cantilever shape.

As shown in FIG. 6, the rotation angle controller 300 may compensate for the rotation angle to θz (yawing) in real time while the process is performed through the angle compensation method using the elasticity of the flexure mechanism.

At this time, θz (yawing) may have a very large error of the angle according to the initial assembly situation, when the initial angle of the error is large, the first link 310 and the second link 320 generated after the rotation angle compensation Due to the elastic force of the), the contact pressure of both sides of the master roll 200 and the substrate roll 100 in the longitudinal direction may be different.

Accordingly, the rotation angle controller 300 initially manages θz (yawing) within a predetermined range. As shown in FIG. 4, initial position adjustment and fixing of the first link 310 and the second link 320 are performed. Manage initial values through.

On the other hand, the rotation angle control unit 300 manages the angle of θy (rolling) so that the substrate roll rotation axis 110 and the master roll rotation axis 210 are located side by side from the bottom surface, the second rotation about the y axis The stage 360 manages the initial value of θy (rolling).

As shown in FIG. 7, the rotation angle control unit 300 measures the height to the surfaces of the substrate roll 100 and the master roll 200 based on the bottom surface, and then the heights of both ends in the longitudinal direction. The second stage 360 is rotated and adjusted to fix the same.

Accordingly, the roll stamp manufacturing apparatus 1 of the present invention to achieve the position compensation of the master roll 200 with respect to the substrate roll 100 during the patterning process, so that the contact surface is kept constant, and uniform pressurization Can be done.

That is, the roll stamp manufacturing apparatus 1 of the present invention has the advantage of forming a uniform pattern stably by achieving the position compensation of the master roll 200 in real time during the patterning process.

Example 3

In Example 3, the position compensation of the hardening means 400 in the roll stamp manufacturing apparatus 1 of this invention is demonstrated.

The curing means 400 is provided in the master roll rotating shaft 210 so that the master roll 200 pressurizes the substrate roll 100 and the patterning process is performed in the master roll rotating shaft 210. By applying heat or ultraviolet light to the contact surface, the resist is allowed to cure.

At this time, the curing means 400 is an ultraviolet irradiation device for curing by irradiating ultraviolet light to the resist, the resist may be a material that is cured by ultraviolet light.

In addition, the curing means 400 is a heater to apply heat to the resist to cure, extending in the longitudinal direction of the master roll rotating shaft 210 may be formed in the form of a hot wire wound around the outer peripheral surface. In this case, the resist applied to the substrate roll 100 is a thermosetting resist.

Roll stamp manufacturing apparatus 1 of the present invention is the third stage 410 is disposed on one end of the master roll holding portion 230, and the hardening means 400 is placed on the upper side of the third stage (410) The sliding fixing part 420 may be formed to further include the sliding fixing part 420 to allow the hardening means 400 to slide in the longitudinal direction of the master roll rotating shaft 210.

Accordingly, the hardening means 400 is slidably moved in the longitudinal direction of the master roll rotating shaft 210 to adjust the position, freely removable or mounted.

9, in the roll stamp manufacturing apparatus 1 of the present invention, the third stage 410 and the sliding fixing part 420 is disposed on one side of the master roll holding part 230, the curing The means 400 may be formed to be mounted and detached by being moved in the longitudinal direction about the sliding fixing part 420.

The sliding fixing part 420 includes a hardening means through-hole 421 formed therein so as to slide in the longitudinal direction while the hardening means 400 is inserted, and the hardening means 400 is Sliding movement in the longitudinal direction of the master roll rotating shaft 210, the rim portion protruding larger than the width of the hardening means through-hole 421 at one or both ends to be locked to the sliding fixing part 420 430 may be included.

As shown in FIG. 10, the master roll rotating shaft 210 has a hardening means insertion hole 240 larger than the diameter of the hardening means 400 so that the master roll rotating shaft 210 can be slidably moved in a state where the hardening means 400 is inserted therein. ) Is preferably formed.

As shown in Figure 11, the roll stamp manufacturing apparatus 1 of the present invention, the curing means 400 is mounted inside the master roll rotating shaft 210, and then using the pressure motor unit 600 By adjusting in the axial direction, the overall focus is achieved, and in the θz (yawing) direction, the compensation is performed so that the deviation between the focal points formed on both sides in the longitudinal direction can be minimized.

In addition, the roll stamp manufacturing apparatus 1 of the present invention allows the hardening means 400 to be adjusted in the height direction through the third stage 410 so that the position of the focal point is the master roll 200 and the substrate. At the same time as the contact point, it can be adjusted in the direction of θy (rolling) to compensate for the deviation in the height direction between the focal point formed on both sides in the longitudinal direction.

Accordingly, the roll stamp manufacturing apparatus 1 and the roll stamp manufacturing method using the same of the present invention has an advantage that the process is smoothly made by applying ultraviolet rays or heat generated from the curing means 400 to the contact surface accurately.

Example 4

In Example 4, the roll stamp manufacturing method using the roll stamp manufacturing apparatus 1 of this invention is demonstrated.

Roll stamp manufacturing method of the present invention comprises the steps of: a) applying a resist to the substrate roll (100); b) pressurizing the master roll 200 to contact the substrate roll 100 by using the pressurized motor part 600; c) a first alignment step of adjusting an angle and a position in a? z (yawing) direction that rotates about a z-axis through the first link 310 and the second link 320 of the rotation angle controller 300; a second alignment step of adjusting an angle and a position in a θy (rolling) direction such that a bottom surface, the master roll rotating shaft 210 and the substrate roll rotating shaft 110 are parallel to each other through the second stage 360; e) a third alignment step of aligning the position of the ultraviolet irradiation device and adjusting it to be in focus; f) a rotation step of rotating the master roll 200 and the substrate roll 100; g) a real time alignment step in which the first to third alignment steps are performed in real time while the master roll 200 and the substrate roll 100 are rotated; It includes.

In other words, in the method of manufacturing a roll stamp of the present invention, first, the thermosetting or ultraviolet curable resist is evenly applied to the substrate roll 100, and then the master roll 200 and the using the pressurized motor part 600. The substrate roll 100 is subjected to a pressing step to press the line contact.

Compensation or real-time compensation of the rotation angle or position of the master roll 200 in the step before or after the pressing step, aligning the position of the curing means 400 and focusing in the case of ultraviolet irradiation device Can be performed.

This is the first sorting step, the second sorting step, and the third sorting step, which may be performed a plurality of times as necessary, and the order may be changed.

In the manufacturing process using the roll stamp manufacturing method of the present invention as described above using the master roll 200 to complete the one-turn pattern transfer process through the real-time compensation to the substrate roll 100, the master roll 200 ) Further includes a patterning repeating step of patterning by moving in the x-axis direction, and when the patterning repeating step is performed, steps b) to g) described above may be performed as necessary.

In addition, in the manufacturing process using the roll stamp manufacturing method, it is preferable to adjust the position in the translation direction and the rotation direction in the x, y, z axis before the patterning repeating step is performed so that accurate pattern transfer can be made. .

In the patterning repeating step, the master roll 200 is moved in the x-axis direction by the length of the master roll 200 to be rotated and patterned by one turn, which is performed according to the size of the substrate roll 100 to be manufactured. The number of times can be determined.

Accordingly, the roll stamp manufacturing apparatus 1 and the roll stamp manufacturing method using the same of the present invention can perform continuous patterning on the surface of the roll-shaped film having a width of several hundred mm or more, making it easy to manufacture large roll stamps. Through this, it can be applied to various fields such as the display industry in the future.

It will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims. It goes without saying that various modifications can be made.

1: Roll stamp manufacturing device
100: substrate roll
110: substrate roll rotating shaft 120: substrate roll rotating device
130: substrate roll holding part
200: master roll
210: master roll rotating shaft 220: master roll rotating device
230: master roll holding part 240: hardening means insertion hole
300: rotation angle control unit
310: first link 320: second link
330: third link 340: first fine adjustment unit
350: second fine adjustment unit 360: second stage
400: hardening means
410: third stage 420: sliding fixing part
421: hardening means through hole 430: locking portion
500: sliding feed unit
600: pressurized motor
700: Stage 1

Claims (12)

In the apparatus for manufacturing a roll stamp,
A substrate roll 100 having a resist applied to the surface and rotating about the substrate roll rotating shaft 110;
A pattern is formed on an outer circumferential surface and disposed in parallel with the substrate roll 100 to rotate in contact with the substrate roll 100 and to transfer the pattern to the substrate roll 100;
A master roll rotating shaft 210 coupled to a center of the master roll 200 and having a hollow inside; And
A rotation angle controller 300 for adjusting and compensating a rotation angle of the master roll 200 such that the master roll rotation shaft 210 and the substrate roll rotation shaft 110 are horizontal to the bottom surface and rotated at a designated position;
Curing means (400) provided inside the master roll rotating shaft (210) to cure a resist applied to a surface of the substrate roll (100);
Roll stamp manufacturing apparatus characterized in that it comprises a.
The method of claim 1,
The roll stamp manufacturing apparatus (1)
A substrate roll rotating device (120) for rotating the substrate roll (100);
Master roll rotating device 220 for rotating the master roll 200;
The master roll 200 and the rotation angle control unit 300 is placed on the upper side, the sliding feed unit 500 for horizontally conveying in a direction perpendicular to the master roll rotation axis 210;
A master roll holding part 230 coupled to both ends of the master roll rotating shaft 210 to support the master roll rotating shaft 210 and the master roll 200;
A substrate roll holding part 130 coupled to both ends of the substrate roll rotating shaft 110 to support the substrate roll rotating shaft 110 and the substrate roll 100;
A pressurizing motor unit 600 for pressing the master roll 200 and the rotation angle control unit 300 toward the substrate roll 100 to be transported along the sliding transfer unit 500; And
A first stage 700 having an upper surface of the master roll 200, a rotation angle controller 300, and a sliding feeder 500, and which is transported in a horizontal direction with the master roll rotation shaft 210; Roll stamp manufacturing apparatus characterized in that it comprises a.
The method of claim 2,
The rotation angle control unit 300
First and second links 310 and 320, respectively, coupled to both sides of the master roll holding unit 230 and having a predetermined amount of elasticity;
A third link 330 connected between the first link 310 and the second link 320 and positioned between the master roll 200 and the pressure motor unit 600;
A first fine formed at a portion where the first link 310 and the third link 330 are connected to finely adjust the position of the master roll holding part 230 in a horizontal direction with the first link 310; Adjusting unit 340;
A second fine formed at a portion where the second link 320 and the third link 330 are connected to finely adjust the position of the master roll holding part 230 in a direction parallel to the second link 320. Adjusting unit 350; And
A second stage 360 connected to the third link 330 and moving in a θy (rolling) direction rotating around a y axis;
Roll stamp manufacturing apparatus characterized in that it comprises a.
The method of claim 3, wherein
The rotation angle control unit 300
Roll stamp manufacturing apparatus, characterized in that the distance between the first link 310 and the second link 320 gradually away from the master roll holding unit 230 toward the third link (330) side .
The method of claim 4, wherein
The roll stamp manufacturing apparatus (1)
The master roll holding unit 230 and the sliding transfer unit 500 is spaced apart a predetermined distance in a direction perpendicular to the bottom surface,
Roll side manufacturing apparatus, characterized in that the lower surface is pointed in the spaced space is provided with a connecting means 800 in point contact with the sliding transfer unit (500).
The method of claim 2,
The hardening means 400 is
Roll stamp manufacturing apparatus, characterized in that moved in the longitudinal direction of the master roll rotary shaft 210 is detached or mounted.
The method according to claim 6,
The roll stamp manufacturing apparatus (1)
A third stage 410 disposed at one end of the master roll holding unit 230; And
A sliding fixing part 420 placed on an upper side of the third stage 410 to fix the hardening means 400 and sliding the hardening means 400 in a longitudinal direction of the master roll rotation shaft 210; Roll stamp manufacturing apparatus characterized in that it comprises a.
The method of claim 7, wherein
The hardening means 400 is
UV irradiation device for curing by irradiating UV rays on the resist,
Roll stamp manufacturing apparatus, characterized in that the resist is a material that is cured by ultraviolet light.
The method of claim 7, wherein
The hardening means 400 is
It is a heater that hardens by applying heat to a resist,
Rolling mill manufacturing apparatus, characterized in that extending in the longitudinal direction of the master roll rotating shaft 210, the heating wire is wound around the outer peripheral surface, the resist is a thermosetting resist.
The method of manufacturing a roll stamp using the roll stamp manufacturing apparatus according to any one of claims 1 to 9
a) applying a resist to the substrate roll (100);
b) pressurizing the master roll 200 to contact the substrate roll 100 by using the pressurized motor part 600;
c) a first alignment step of adjusting an angle and a position in a? z (yawing) direction that rotates about a Z axis through the first link 310 and the second link 320 of the rotation angle controller 300;
a second alignment step of adjusting an angle and a position in a θy (rolling) direction such that a bottom surface, the master roll rotating shaft 210 and the substrate roll rotating shaft 110 are parallel to each other through the second stage 360;
e) a third alignment step of aligning the position of the hardening means 400;
f) a rotation step of rotating the master roll 200 and the substrate roll 100;
g) a real time alignment step in which the first to third alignment steps are performed in real time while the master roll 200 and the substrate roll 100 are rotated; Roll stamp manufacturing method comprising a.
The method of claim 10,
The roll stamp manufacturing method
A patterning repetition step of patterning the substrate roll 100 by one rotation to complete the patterning and then moving the master roll 200 in the x-axis direction; More,
Roll pattern manufacturing method characterized in that, when performing the patterning iteration step, steps b) to g) is performed.
12. The method of claim 11,
In the patterning iteration step
Roll master manufacturing method characterized in that for moving the master roll 200 in the x-axis direction by the length of the master roll (200).

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