CN207663210U - It is a kind of can roll change ultraviolet nanometer imprinting apparatus - Google Patents

It is a kind of can roll change ultraviolet nanometer imprinting apparatus Download PDF

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Publication number
CN207663210U
CN207663210U CN201820035487.0U CN201820035487U CN207663210U CN 207663210 U CN207663210 U CN 207663210U CN 201820035487 U CN201820035487 U CN 201820035487U CN 207663210 U CN207663210 U CN 207663210U
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CN
China
Prior art keywords
roll
fixed
outer container
roller platen
roller
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201820035487.0U
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Chinese (zh)
Inventor
谷岩
周岩
易正发
董青青
张群
李景鹏
郑恭承
戴得恩
冯开拓
曹东旭
王点正
田旭
康洺硕
杨继犇
张成龙
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Changchun University of Technology
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Changchun University of Technology
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Priority to CN201820035487.0U priority Critical patent/CN207663210U/en
Application granted granted Critical
Publication of CN207663210U publication Critical patent/CN207663210U/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Abstract

The utility model discloses it is a kind of can roll change ultraviolet nanometer imprinting apparatus, which includes outer container, let off roll, wind-up roll, support roller, back flow roll, glue spreading apparatus, changing rig, micromatic setting, ultraviolet lamp, substrate.First, substrate is discharged by let off roll, glue spreading apparatus carries out gluing on its surface, substrate is moved under the action of wind-up roll between changing rig and back flow roll, then adjusts the distance between roller platen and back flow roll by micromatic setting to apply suitable pressure, is then cured via ultraviolet lamp, it is wound by wind-up roll after solidification, directly substrate is fixed on let off roll if imprinted next time, roller need not be changed, directly rotating changing rig, then fixed roller platen is imprinted again.The utility model does not have to change roller platen when imprinting different pattern, can directly rotate changing rig, avoid dismounting and change template and carry out cumbersome and time-consuming adjustment to roller platen, reduce cost, and greatly improve production efficiency.

Description

It is a kind of can roll change ultraviolet nanometer imprinting apparatus
Technical field
The utility model is related to nano impression field, it is espespecially a kind of can roll change ultraviolet nanometer imprinting apparatus.
Background technology
Nano impression concept is proposed in nineteen ninety-five so far, nanometer pressure since scientist Stephen Y. Chou of Chinese origin are taught Print technology has developed into one of core nanoparticles technology in scientific revolution, because it is compared to conventional lithographic techniques, can realize Inexpensively, micro-nano pattern is quickly manufactured, therefore there are prodigious market prospects in semiconductor, bioengineering etc..
Currently, nanometer embossing has formd three kinds of main types such as hot padding, Soft lithograph and ultraviolet stamping, pass The nano-imprinting method of system needs replacing a kind of pattern under could imprinting after template after a kind of micro-nano imprint patterns, Frequent dismounting and change template is time-consuming and laborious, reduces the productivity of coining, serious to affect its industrialized production.Except this it Outside, error is inevitably will produce during replacement, and needs to carry out cumbersome and time-consuming adjustment to roller platen to keep it horizontal simultaneously With substrate alignment, the pattern resolution of coining otherwise will be caused to reduce even failure.These resulted in imprint time it is long, at The problems such as this is high.
Invention content
Purpose of the utility model is to solve a kind of micro-nano figure has been imprinted in roll-to-roll ultraviolet nanometer moulding process It needs to dismantle roller after case, changes the problems such as imprint time when the roller platen of another micro-nano pattern is imprinted is long, of high cost, carry Supplied it is a kind of can roll change ultraviolet nanometer imprinting apparatus.
Purpose according to the present utility model propose it is a kind of can roll change ultraviolet nanometer device, which is characterized in that including outer Case, let off roll, glue spreading apparatus, support roller, back flow roll, changing rig, micromatic setting, ultraviolet lamp, wind-up roll, substrate, servo motor One and servo motor two, wherein let off roll couples with servo motor two and is fixed on outer container, and substrate is coated on let off roll and receives On winding up roller, glue spreading apparatus is fixed by screws on outer container, and support roller by bearing fit on outer container, by bearing matched by back flow roll It closes on outer container, ultraviolet lamp is fixed by screws on outer container, and wind-up roll couples with servo motor one and is fixed on outer container, changes Roller arrangement is fastened on by bearing on micromatic setting across outer container, and micromatic setting is fixed on by screw on outer container.
Purpose according to the present utility model propose it is a kind of can roll change ultraviolet nanometer device, which is characterized in that it is described Outer container includes:Bottom plate, preceding babinet, rear box, upper cover plate, wherein floor level are placed in the horizontal plane, preceding babinet and rear box It is fixed by screws on bottom plate, before upper cover plate is fixed by screws on babinet.
Purpose according to the present utility model propose it is a kind of can roll change ultraviolet nanometer device, which is characterized in that it is described Changing rig includes:Rotary shaft, turntable one, roller platen one, turntable two, fixing device one, fixing device two, roller platen two and pressure Print roller three, wherein roller platen one, roller platen two, roller platen three are loaded between turntable one and turntable two, fixing device one with it is solid Determine device two and be assemblied on upper cover plate and block turntable one, rotary shaft is fixed on by bearing on micromatic setting.
Purpose according to the present utility model propose it is a kind of can roll change ultraviolet nanometer device, which is characterized in that it is described Fixing device one is identical with fixing device two, and inside is equipped with spring so that fixing device one is blocked always with fixing device two Live in turntable one.
Purpose according to the present utility model propose it is a kind of can roll change ultraviolet nanometer device, which is characterized in that it is described Micromatic setting includes:Shell, ball-screw, shaft coupling, servo motor three, sliding block and guide rail, wherein outer casing bottom passes through screw It is fixed on the bottom plate in outer container, guide rail is fixed by screws on shell, and sliding block is loaded on guide rail, and servo motor three passes through Screw is fixed on cover top portion, and shaft coupling one end is connected to servo motor three, and the other end is connected with ball-screw.
Purpose according to the present utility model propose it is a kind of can roll change ultraviolet nanometer device, which is characterized in that it is described Roller platen one, roller platen two have different micro-structures on roller platen three, can be imprinted out on the substrate of gluing different micro- Receive pattern.
The utility model can need not change roller platen after a kind of micro-nano imprint patterns finish, it is only necessary to Rotation With Changing Roller arrangement can be carried out the coining of another micro-nano pattern, avoids dismounting and change template and carries out cumbersome to roller platen and consume When adjustment, reduce cost, and greatly improve production efficiency.
Description of the drawings
Fig. 1 be it is a kind of can roll change ultraviolet nanometer imprinting apparatus internal structure schematic diagram;
Fig. 2 be it is a kind of can roll change ultraviolet nanometer imprinting apparatus structural schematic diagram;
Fig. 3 be it is a kind of can roll change ultraviolet nanometer imprinting apparatus changing rig structural schematic diagram;
Fig. 4 be it is a kind of can roll change ultraviolet nanometer imprinting apparatus micromatic setting structural schematic diagram.
Reference sign:It is let off roll 2, glue spreading apparatus 3, support roller 4, back flow roll 5, changing rig 6, micromatic setting 7, ultraviolet Lamp 8, wind-up roll 9, substrate 10, servo motor 1, servo motor 2 12, bottom plate 101, preceding babinet 102, rear box 103, upper cover Plate 104, rotary shaft 601, turntable 1, roller platen 1, turntable 2 604, fixing device 1, fixing device 2 606, Roller platen 2 607, roller platen 3 608, shell 701, ball-screw 702, shaft coupling 703, servo motor 3 704, sliding block 705, Guide rail 706.
Specific implementation mode
In conjunction with attached drawing to it is a kind of can the occupation mode of ultraviolet nanometer imprinting apparatus of roll change describe.
As shown in Figure 1, 2, it is described it is a kind of can roll change ultraviolet nanometer imprinting apparatus, including outer container 1, let off roll 2, gluing Device 3, support roller 4, back flow roll 5, changing rig 6, micromatic setting 7, ultraviolet lamp 8, wind-up roll 9, substrate 10, one 11 and of servo motor Servo motor 2 12, wherein outer container 1 includes bottom plate 101, preceding babinet 102, rear box 103, upper cover plate 104, and bottom plate 101 is horizontal It places in the horizontal plane, preceding babinet 102 is fixed by screws in rear box 103 on bottom plate 101, and upper cover plate 104 passes through screw Before being fixed on babinet 102, let off roll 2 couples with servo motor 2 12 and on the rear box 103 that is fixed in outer container 1, substrate 10 are coated on let off roll 2 on wind-up roll 9, and for support roller 4 by bearing fit on rear box 103, glue spreading apparatus 3 passes through screw It is fixed on the rear box 103 in outer container 1, back flow roll 5 is fixed by screws in outer container 1 on preceding babinet 102, and ultraviolet lamp 8 passes through Screw is fixed in outer container 1 on preceding babinet 102, before wind-up roll 9 couples and is fixed on servo motor 1 on babinet 102, is changed Roller arrangement 6 passes through the preceding babinet 102 in outer container 1 by bearing fit on sliding block 705 in micromatic setting 7, and micromatic setting 7 is logical It crosses on the bottom plate 101 that screw is fixed in outer container 1.
As shown in figure 3, a kind of described changing rig 6 that can be in the ultraviolet nanometer imprinting apparatus of roll change, including rotary shaft 601, turntable 1, roller platen 1, turntable 2 604, fixing device 1, fixing device 2 606,2 607 and of roller platen Roller platen 3 608, wherein roller platen 1, roller platen 2 607, roller platen 3 608 are loaded on turntable 1 and turntable two Between 604, fixing device 1 is assemblied on upper cover plate 104 with fixing device 2 606 and blocks turntable 1, rotary shaft 601 are fixed on by bearing on the sliding block 705 in micromatic setting 7.
As shown in figure 4, it is described it is a kind of can roll change ultraviolet nanometer imprinting apparatus include shell 701, ball-screw 702, Shaft coupling 703, servo motor 3 704, sliding block 705 and guide rail 706, wherein 701 bottom of shell is fixed by screws in outer container 1 In bottom plate 101 on, guide rail 1 is fixed on shell 701, and sliding block 705 is loaded on guide rail 706, can be on guide rail 706 Mobile, servo motor 3 704 is fixed by screws in 701 top of shell, and 703 one end of shaft coupling connects servo motor 3 704, separately One end is connected with ball-screw 702.
With reference to Fig. 1-Fig. 4, the implementing procedure of the utility model is described further.
Start servo motor 1 and servo motor 2 12 so that the fortune synchronous with servo motor 2 12 of servo motor 1 Turn, 2 release liners 10 of let off roll, when substrate 10 is by glue spreading apparatus 3, glue spreading apparatus 3 is in 10 surface coating of substrate, then substrate 10 are transmitted to again between roller platen 1 and back flow roll 5, then start servo motor 3 704 simultaneously so that and sliding block 705 moves down, The distance between roller platen 1 and back flow roll 5 are adjusted, to control force of impression, roller platen 1 is on the substrate 10 for having applied glue After being imprinted, then by ultraviolet lamp 8 glue is cured, substrate 10 is finally furled by wind-up roll 9, completes the flow of coining, If carry out a kind of coining of lower micro-nano pattern, upper cover plate 104 is opened, changing rig 6 is rotated, is rotated 120 °, and lead to 2 606 clamping of fixing device 1 and fixing device is crossed, next step coining can be carried out by repeating the above imprint step, be prepared into To the substrate 10 with another different micro-structures.

Claims (6)

1. it is a kind of can roll change ultraviolet nanometer imprinting apparatus, which is characterized in that including outer container, let off roll, glue spreading apparatus, support Roller, back flow roll, changing rig, micromatic setting, ultraviolet lamp, wind-up roll, substrate, servo motor one and servo motor two, wherein unreel Roller couples with servo motor two and is fixed on outer container, and substrate is coated on let off roll on wind-up roll, and glue spreading apparatus passes through screw It is fixed on outer container, support roller is by bearing fit on outer container, and for back flow roll by bearing fit on outer container, ultraviolet lamp passes through spiral shell Nail is fixed on outer container, and wind-up roll couples with servo motor one and is fixed on outer container, and changing rig passes through bearing across outer container It is fastened on micromatic setting, micromatic setting is fixed on by screw on outer container.
2. it is according to claim 1 it is a kind of can roll change ultraviolet nanometer imprinting apparatus, which is characterized in that the outer luggage It includes:Bottom plate, preceding babinet, rear box, upper cover plate, wherein floor level are placed in the horizontal plane, and preceding babinet passes through spiral shell with rear box Nail is fixed on bottom plate, before upper cover plate is fixed by screws on babinet.
3. it is according to claim 1 it is a kind of can roll change ultraviolet nanometer imprinting apparatus, which is characterized in that the described roll change dress Set including:Rotary shaft, turntable one, roller platen one, turntable two, fixing device one, fixing device two, roller platen two and roller platen Three, wherein roller platen one, roller platen two, roller platen three are loaded between turntable one and turntable two, and fixing device one is filled with fixed It sets two and is assemblied on upper cover plate and blocks turntable one, rotary shaft is fixed on by bearing on micromatic setting.
4. it is according to claim 3 it is a kind of can roll change ultraviolet nanometer imprinting apparatus, which is characterized in that the described fixed dress Set one identical with fixing device two, inside is equipped with spring so that fixing device one blocks turntable always with fixing device two One.
5. it is according to claim 1 it is a kind of can roll change ultraviolet nanometer imprinting apparatus, which is characterized in that the described fine tuning dress Set including:Shell, ball-screw, shaft coupling, servo motor three, sliding block and guide rail, wherein outer casing bottom is fixed by screws in On bottom plate in outer container, guide rail is fixed by screws on shell, and sliding block is loaded on guide rail, and servo motor three is solid by screw It is scheduled on cover top portion, shaft coupling one end is connected to servo motor three, and the other end is connected with ball-screw.
6. it is according to claim 3 it is a kind of can roll change ultraviolet nanometer imprinting apparatus, which is characterized in that the roller platen One, roller platen two, have different micro-structures on roller platen three, different micro-nano figures can be imprinted out on the substrate of gluing Case.
CN201820035487.0U 2018-01-10 2018-01-10 It is a kind of can roll change ultraviolet nanometer imprinting apparatus Expired - Fee Related CN207663210U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201820035487.0U CN207663210U (en) 2018-01-10 2018-01-10 It is a kind of can roll change ultraviolet nanometer imprinting apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201820035487.0U CN207663210U (en) 2018-01-10 2018-01-10 It is a kind of can roll change ultraviolet nanometer imprinting apparatus

Publications (1)

Publication Number Publication Date
CN207663210U true CN207663210U (en) 2018-07-27

Family

ID=62944991

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201820035487.0U Expired - Fee Related CN207663210U (en) 2018-01-10 2018-01-10 It is a kind of can roll change ultraviolet nanometer imprinting apparatus

Country Status (1)

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CN (1) CN207663210U (en)

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GR01 Patent grant
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20180727

Termination date: 20220110

CF01 Termination of patent right due to non-payment of annual fee