CN106024686B - 一种晶片盘推送装置 - Google Patents
一种晶片盘推送装置 Download PDFInfo
- Publication number
- CN106024686B CN106024686B CN201610629436.6A CN201610629436A CN106024686B CN 106024686 B CN106024686 B CN 106024686B CN 201610629436 A CN201610629436 A CN 201610629436A CN 106024686 B CN106024686 B CN 106024686B
- Authority
- CN
- China
- Prior art keywords
- wafer disk
- fixed
- mechanical arm
- conveyer belt
- hand basket
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67796—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations with angular orientation of workpieces
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67766—Mechanical parts of transfer devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
- H01L21/67781—Batch transfer of wafers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Robotics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Specific Conveyance Elements (AREA)
Abstract
Description
Claims (6)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201610629436.6A CN106024686B (zh) | 2014-10-17 | 2014-10-17 | 一种晶片盘推送装置 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201410549877.6A CN104332439B (zh) | 2014-10-17 | 2014-10-17 | 一种晶片盘推送装置 |
CN201610629436.6A CN106024686B (zh) | 2014-10-17 | 2014-10-17 | 一种晶片盘推送装置 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201410549877.6A Division CN104332439B (zh) | 2014-10-17 | 2014-10-17 | 一种晶片盘推送装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN106024686A CN106024686A (zh) | 2016-10-12 |
CN106024686B true CN106024686B (zh) | 2018-06-08 |
Family
ID=52407144
Family Applications (6)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201610629412.0A Expired - Fee Related CN106024684B (zh) | 2014-10-17 | 2014-10-17 | 一种晶片盘推送装置 |
CN201410549877.6A Expired - Fee Related CN104332439B (zh) | 2014-10-17 | 2014-10-17 | 一种晶片盘推送装置 |
CN201610629436.6A Active CN106024686B (zh) | 2014-10-17 | 2014-10-17 | 一种晶片盘推送装置 |
CN201610629423.9A Active CN106206389B (zh) | 2014-10-17 | 2014-10-17 | 一种晶片盘推送装置 |
CN201610629437.0A Expired - Fee Related CN106024687B (zh) | 2014-10-17 | 2014-10-17 | 一种晶片盘推送装置 |
CN201610629425.8A Active CN106024685B (zh) | 2014-10-17 | 2014-10-17 | 一种晶片盘推送装置 |
Family Applications Before (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201610629412.0A Expired - Fee Related CN106024684B (zh) | 2014-10-17 | 2014-10-17 | 一种晶片盘推送装置 |
CN201410549877.6A Expired - Fee Related CN104332439B (zh) | 2014-10-17 | 2014-10-17 | 一种晶片盘推送装置 |
Family Applications After (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201610629423.9A Active CN106206389B (zh) | 2014-10-17 | 2014-10-17 | 一种晶片盘推送装置 |
CN201610629437.0A Expired - Fee Related CN106024687B (zh) | 2014-10-17 | 2014-10-17 | 一种晶片盘推送装置 |
CN201610629425.8A Active CN106024685B (zh) | 2014-10-17 | 2014-10-17 | 一种晶片盘推送装置 |
Country Status (1)
Country | Link |
---|---|
CN (6) | CN106024684B (zh) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106024684B (zh) * | 2014-10-17 | 2018-06-15 | 泉州信辉家具有限公司 | 一种晶片盘推送装置 |
CN105173690B (zh) * | 2015-08-18 | 2018-02-06 | 先进光电器材(深圳)有限公司 | 自动进出料装置 |
CN105197583B (zh) * | 2015-10-30 | 2017-06-23 | 江苏比微曼智能科技有限公司 | Pcb板下板机 |
CN105314393B (zh) * | 2015-11-20 | 2017-07-28 | 江苏艾科瑞思封装自动化设备有限公司 | 不停机上料装置 |
CN106629037A (zh) * | 2016-11-25 | 2017-05-10 | 深圳市诚亿自动化科技有限公司 | 一种可实现多种ic不停机拾取装置 |
CN106783677B (zh) * | 2016-12-08 | 2023-12-05 | 江门格兰达物联装备有限公司 | 一种槽式料箱自动上料设备 |
CN109560030B (zh) * | 2017-09-26 | 2024-02-09 | Tcl环鑫半导体(天津)有限公司 | 一种自动圆形硅片倒片机 |
CN109037129B (zh) * | 2018-07-19 | 2024-02-09 | 广州明森科技股份有限公司 | 一种芯片旋转搬运装置 |
CN109772726B (zh) * | 2019-01-03 | 2021-02-02 | 大族激光科技产业集团股份有限公司 | 一种led加工设备及应用其的led加工工艺 |
CN111618885B (zh) * | 2020-07-29 | 2020-10-16 | 山东元旭光电股份有限公司 | 一种晶圆自动上片装置 |
CN112319897A (zh) * | 2020-12-04 | 2021-02-05 | 重庆机电职业技术大学 | 自动化高速芯片智能包装机 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5246218A (en) * | 1992-09-25 | 1993-09-21 | Intel Corporation | Apparatus for securing an automatically loaded wafer cassette on a wafer processing equipment |
CN203481200U (zh) * | 2013-08-28 | 2014-03-12 | 东莞市启天自动化设备有限公司 | 太阳能硅晶片5通道100层篮具全自动上料机 |
CN104332439B (zh) * | 2014-10-17 | 2017-03-01 | 深圳市华科半导体有限公司 | 一种晶片盘推送装置 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000269245A (ja) * | 1999-03-15 | 2000-09-29 | Iwate Toshiba Electronics Kk | 半導体装置の製造装置 |
CN201117644Y (zh) * | 2007-09-20 | 2008-09-17 | 中国电子科技集团公司第二研究所 | 全自动硅片上下料机 |
KR100941447B1 (ko) * | 2007-12-18 | 2010-02-11 | 주식회사제4기한국 | Pcb의 플라즈마 연속 자동 처리장치 |
CN201663151U (zh) * | 2009-03-06 | 2010-12-01 | 东莞市启天自动化设备有限公司 | 全自动硅片上下料机 |
CN201655771U (zh) * | 2009-12-24 | 2010-11-24 | 徐竹林 | 一种全自动硅片上下料机 |
CN201999522U (zh) * | 2010-12-21 | 2011-10-05 | 苏州阿特斯阳光电力科技有限公司 | 一种全自动硅片上下料机 |
CN102358449A (zh) * | 2011-06-21 | 2012-02-22 | 中国电子科技集团公司第二研究所 | 全自动硅片装片机 |
CN102623377A (zh) * | 2012-04-06 | 2012-08-01 | 常州亿晶光电科技有限公司 | 硅片自动上下料机的抓手装置 |
CN203540949U (zh) * | 2013-09-11 | 2014-04-16 | 中国电子科技集团公司第四十八研究所 | 一种适用于太阳能电池片分选设备的下料装置 |
-
2014
- 2014-10-17 CN CN201610629412.0A patent/CN106024684B/zh not_active Expired - Fee Related
- 2014-10-17 CN CN201410549877.6A patent/CN104332439B/zh not_active Expired - Fee Related
- 2014-10-17 CN CN201610629436.6A patent/CN106024686B/zh active Active
- 2014-10-17 CN CN201610629423.9A patent/CN106206389B/zh active Active
- 2014-10-17 CN CN201610629437.0A patent/CN106024687B/zh not_active Expired - Fee Related
- 2014-10-17 CN CN201610629425.8A patent/CN106024685B/zh active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5246218A (en) * | 1992-09-25 | 1993-09-21 | Intel Corporation | Apparatus for securing an automatically loaded wafer cassette on a wafer processing equipment |
CN203481200U (zh) * | 2013-08-28 | 2014-03-12 | 东莞市启天自动化设备有限公司 | 太阳能硅晶片5通道100层篮具全自动上料机 |
CN104332439B (zh) * | 2014-10-17 | 2017-03-01 | 深圳市华科半导体有限公司 | 一种晶片盘推送装置 |
Also Published As
Publication number | Publication date |
---|---|
CN106206389B (zh) | 2018-10-09 |
CN104332439B (zh) | 2017-03-01 |
CN106024686A (zh) | 2016-10-12 |
CN106024687A (zh) | 2016-10-12 |
CN106024687B (zh) | 2019-01-18 |
CN106024684A (zh) | 2016-10-12 |
CN106024685A (zh) | 2016-10-12 |
CN106024684B (zh) | 2018-06-15 |
CN106206389A (zh) | 2016-12-07 |
CN104332439A (zh) | 2015-02-04 |
CN106024685B (zh) | 2019-01-01 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN106024686B (zh) | 一种晶片盘推送装置 | |
CN103832095B (zh) | 标牌激光打标气动自动送料机 | |
CN104400782A (zh) | 用于小块规则物料精准抓放的开合式机械手 | |
CN104302117B (zh) | 一种改进型立式插件机 | |
CN104284524B (zh) | 一种led贴片机 | |
CN207417869U (zh) | 一种泛用上料机构 | |
CN103862345B (zh) | 一种套筒开槽机及其套筒开槽方法 | |
CN103943354A (zh) | 变压器绕线机上料装置及上料方法 | |
CN105171179A (zh) | 一种波峰焊托盘自动解压扣机 | |
CN205961682U (zh) | 一种自动换吸嘴的插件装置 | |
CN102951305A (zh) | 片状产品自动包装装置 | |
CN109746598A (zh) | 一种保温杯吸气剂焊接装置 | |
CN107685192B (zh) | 一种电子元件生产整机传动系统 | |
CN205074642U (zh) | 一种波峰焊托盘自动解压扣机 | |
CN106672606A (zh) | 一种叠式上下料设备 | |
CN204206633U (zh) | 插件机用插件弯折机构 | |
CN204248893U (zh) | 实现开合式机械手精准抓放小块规则物料的z轴模组装置 | |
CN109606808A (zh) | 杯装产品装箱装置 | |
CN208304307U (zh) | 块状配件自动装配机 | |
CN107891100A (zh) | 配电柜钣金自动上料机 | |
CN209023728U (zh) | 一种推升式ccd视觉上料机 | |
CN203883031U (zh) | 太阳能板全自动刷胶排片测试一体机 | |
CN209956940U (zh) | 一种旋转蜡笔调节头上料装置 | |
CN208897377U (zh) | 一种全自动码垛装箱设备 | |
CN210390433U (zh) | 一种丝网印刷设备 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20180511 Address after: 362141 Qian Lin industrial area, Dongling Town, Huian County, Quanzhou, Fujian, China Applicant after: Huian Sanxing Stone Stone Co., Ltd. Address before: 223800 No. 114, East Street, Shuang Cai village, Longhe Town, Sucheng District, Suqian, Jiangsu Applicant before: Hua Kailang |
|
TA01 | Transfer of patent application right | ||
GR01 | Patent grant | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right |
Effective date of registration: 20200910 Address after: No.9, qianting East, qianting village, Fengwei Town, Quangang District, Quanzhou City, Fujian Province Patentee after: QUANZHOU QUANGANG CANPENG MACHINERY EQUIPMENT Co.,Ltd. Address before: 362141 Qian Lin industrial area, Dongling Town, Huian County, Quanzhou, Fujian, China Patentee before: Huian Sanxing Stone Stone Co.,Ltd. |
|
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20201117 Address after: Haimen City Jiangsu city of Nantong province is more than 226100 Zhenan Bridge Village 9 Group No. 102 Patentee after: HAIMEN ZHUOWEI TEXTILE Co.,Ltd. Address before: No.9, qianting East, qianting village, Fengwei Town, Quangang District, Quanzhou City, Fujian Province Patentee before: QUANZHOU QUANGANG CANPENG MACHINERY EQUIPMENT Co.,Ltd. |
|
TR01 | Transfer of patent right |