CN106019646B - 基板装配装置和使用该装置的基板装配方法 - Google Patents

基板装配装置和使用该装置的基板装配方法 Download PDF

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Publication number
CN106019646B
CN106019646B CN201610090266.9A CN201610090266A CN106019646B CN 106019646 B CN106019646 B CN 106019646B CN 201610090266 A CN201610090266 A CN 201610090266A CN 106019646 B CN106019646 B CN 106019646B
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substrate
adhesive
upper substrate
adhesive dowel
displaced
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Chinese (zh)
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CN106019646A (zh
Inventor
市村久
真锅仁志
齐藤正行
海津拓哉
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Ai Meike Technology Co Ltd
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Ai Meike Technology Co Ltd
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    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303Apparatus specially adapted to the manufacture of LCDs

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Optics & Photonics (AREA)
  • Manufacturing & Machinery (AREA)
  • Engineering & Computer Science (AREA)
  • Liquid Crystal (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Mathematical Physics (AREA)
  • Automatic Assembly (AREA)
CN201610090266.9A 2015-03-31 2016-02-18 基板装配装置和使用该装置的基板装配方法 Active CN106019646B (zh)

Priority Applications (1)

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CN201910268239.XA CN109839766B (zh) 2015-03-31 2016-02-18 基板装配装置以及基板装配装置的平台构造

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2015073046A JP5837247B1 (ja) 2015-03-31 2015-03-31 基板組立装置とそれを用いた基板組立方法
JP2015-073046 2015-03-31

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CN201910268239.XA Division CN109839766B (zh) 2015-03-31 2016-02-18 基板装配装置以及基板装配装置的平台构造

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CN106019646A CN106019646A (zh) 2016-10-12
CN106019646B true CN106019646B (zh) 2019-04-23

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CN201910268239.XA Active CN109839766B (zh) 2015-03-31 2016-02-18 基板装配装置以及基板装配装置的平台构造

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Country Link
JP (1) JP5837247B1 (ko)
KR (1) KR101765728B1 (ko)
CN (2) CN106019646B (ko)
TW (1) TWI619191B (ko)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110549237A (zh) * 2019-07-26 2019-12-10 湖北三江航天红峰控制有限公司 液控阀的阀芯和阀套智能配研磨装置
JP7286493B2 (ja) * 2019-09-13 2023-06-05 キオクシア株式会社 基板貼合装置
JP6942908B1 (ja) * 2020-11-13 2021-09-29 信越エンジニアリング株式会社 ワーク粘着チャック装置及びワーク貼り合わせ機
JP7156753B1 (ja) * 2021-03-31 2022-10-19 ボンドテック株式会社 接合装置、接合システムおよび接合方法

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1669796A (zh) * 2004-02-23 2005-09-21 周星工程股份有限公司 用于制造显示基板的装置及装配在其中的喷头组合
CN1291272C (zh) * 2002-06-11 2006-12-20 富士通株式会社 制造粘合基板的装置
CN101075036A (zh) * 2006-05-17 2007-11-21 株式会社日立工业设备技术 基板组装装置及使用它的基板组装方法
CN101441338A (zh) * 2007-11-23 2009-05-27 爱德牌工程有限公司 衬底贴合设备
KR20130004012A (ko) * 2011-07-26 2013-01-09 박웅기 평판 디스플레이의 모듈 접합 방법 및 장치
TW201510613A (zh) * 2013-09-13 2015-03-16 Evest Corp 基板貼合的裝置與對位方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3363308B2 (ja) * 1996-04-18 2003-01-08 株式会社日立製作所 基板組立方法及び液晶表示セルの製造方法
JP2003098533A (ja) * 2001-09-26 2003-04-03 Shibaura Mechatronics Corp 基板の貼合わせ装置、及び貼合わせ方法
US7416010B2 (en) * 2002-03-08 2008-08-26 Lg Display Co., Ltd. Bonding apparatus and system for fabricating liquid crystal display device
TWI266104B (en) * 2002-03-14 2006-11-11 Sharp Kk Manufacturing method of liquid crystal display apparatus and substrate assembling apparatus
JP4078487B2 (ja) * 2005-05-25 2008-04-23 株式会社日立プラントテクノロジー 基板組立装置及び方法
CN100495149C (zh) * 2006-08-17 2009-06-03 株式会社爱发科 贴合方法及贴合基板制造装置
WO2009060861A1 (ja) * 2007-11-08 2009-05-14 Ulvac, Inc. 貼合せ基板製造装置および貼合せ基板製造方法
KR101247900B1 (ko) * 2010-02-23 2013-03-26 가부시키가이샤 히타치플랜트테크놀로지 액정 기판 접합 시스템
JP5654155B1 (ja) 2014-04-04 2015-01-14 信越エンジニアリング株式会社 ワーク貼り合わせ装置

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1291272C (zh) * 2002-06-11 2006-12-20 富士通株式会社 制造粘合基板的装置
CN1669796A (zh) * 2004-02-23 2005-09-21 周星工程股份有限公司 用于制造显示基板的装置及装配在其中的喷头组合
CN101075036A (zh) * 2006-05-17 2007-11-21 株式会社日立工业设备技术 基板组装装置及使用它的基板组装方法
CN101441338A (zh) * 2007-11-23 2009-05-27 爱德牌工程有限公司 衬底贴合设备
KR20130004012A (ko) * 2011-07-26 2013-01-09 박웅기 평판 디스플레이의 모듈 접합 방법 및 장치
TW201510613A (zh) * 2013-09-13 2015-03-16 Evest Corp 基板貼合的裝置與對位方法

Also Published As

Publication number Publication date
TW201635411A (zh) 2016-10-01
JP5837247B1 (ja) 2015-12-24
CN109839766B (zh) 2022-05-10
JP2016191883A (ja) 2016-11-10
CN109839766A (zh) 2019-06-04
KR101765728B1 (ko) 2017-08-07
KR20160117175A (ko) 2016-10-10
CN106019646A (zh) 2016-10-12
TWI619191B (zh) 2018-03-21

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