CN105951060B - Tubular type PECVD graphite boat process point provisions for disengagement - Google Patents
Tubular type PECVD graphite boat process point provisions for disengagement Download PDFInfo
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- CN105951060B CN105951060B CN201610481307.7A CN201610481307A CN105951060B CN 105951060 B CN105951060 B CN 105951060B CN 201610481307 A CN201610481307 A CN 201610481307A CN 105951060 B CN105951060 B CN 105951060B
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- Prior art keywords
- graphite boat
- process point
- push
- graphite
- plate
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 80
- 229910002804 graphite Inorganic materials 0.000 title claims abstract description 80
- 239000010439 graphite Substances 0.000 title claims abstract description 80
- 238000000034 method Methods 0.000 title claims abstract description 64
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 title claims abstract description 15
- 238000004519 manufacturing process Methods 0.000 claims abstract description 16
- 238000003860 storage Methods 0.000 claims abstract description 11
- 238000009434 installation Methods 0.000 claims abstract description 3
- 239000007787 solid Substances 0.000 claims description 2
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000005713 exacerbation Effects 0.000 description 1
- 238000005429 filling process Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electromagnetism (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Mechanical Engineering (AREA)
- Materials Engineering (AREA)
- Furnace Charging Or Discharging (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
The present invention relates to a kind of tubular type PECVD graphite boats process point provisions for disengagement, including graphite boat conveying device, process point push-off device and process point storage device, process point push-off device is arranged in the surface of graphite boat conveying device, and process point storage device is removably mounted at the underface of graphite boat conveying device.The present invention includes the mobile device of graphite boat stationary fixture and driving graphite boat stationary fixture movement, after installation is fixed equipped with the graphite boat of process point on graphite boat stationary fixture, the graphite boat fixed is moved to the underface of guide plate using mobile device, guide plate is moved down by lifting gear and is contacted with the upper surface of process point on graphite boat, process point is released to the fabrication hole of graphite boat finally by process point push-off device, whole processes are automatically performed by machine, save manpower, removal efficiency is improved, labor productivity is improved.
Description
Technical field
The present invention relates to solar battery sheet manufacturing technology fields, more particularly, to a kind of tubular type PECVD graphite boat techniques
Point provision for disengagement.
Background technology
In the manufacturing process of solar battery sheet, when silicon chip carries out its surface coating process, need uncoated silicon
Piece is inserted on the loader of PECVD vacuum coating equipments, currently, the graphite boat that loader generally use is as shown in Figure 8, specific to grasp
It is as process：Silicon chip is inserted into graphite boat and is positioned thereon by graphite boat process point, then, the graphite boat of silicon chip will be loaded with
It is placed in PECVD vacuum coating equipments, plated film is carried out to silicon chip using pecvd process.
Existing graphite boat process point is mainly installed by fixture block and for the cylinder shape in graphite boat piece mounting hole
Portion forms, and fixture block is two and to be symmetrically distributed in mounting portion both ends of the surface, and fixture block is tapered from the outside to the core cylinder, end face
Arc-shaped transitional surface is used between side, and the card for engaging silicon chip is respectively formed between the root of fixture block and the end face of mounting portion
Slot.Existing graphite boat is when using 30run (secondary), it may appear that edge blushing, and it is more serious to the later stage, and doing
When MUL and NY techniques, process point can be burnt, and when especially doing MUL techniques, process point burns exacerbation, burnt ratio and be more than once
30%.Therefore in daily production, the repair of tubular type PECVD graphite boats and maintenance are more frequent, and the process point of graphite boat length is more,
If only manually dismantling, labor workload is very big, and removal efficiency is relatively low.
Invention content
The technical problem to be solved by the present invention is to：In order to overcome tubular type PECVD graphite boats repair in the prior art and safeguard
More frequently, the process point of graphite boat length is more, if only manually dismantling, labor workload is very big, and removal efficiency is lower
Problem provides a kind of tubular type PECVD graphite boats process point provision for disengagement.
The technical solution adopted by the present invention to solve the technical problems is：A kind of tubular type PECVD graphite boat process points dismounting
Device, it is characterised in that：Including graphite boat conveying device, process point push-off device and process point storage device, the process point
Push-off device is arranged in the surface of the graphite boat conveying device, and the process point storage device is removably mounted at the stone
The underface of black boat conveying device.
Further, the graphite boat conveying device includes graphite boat stationary fixture and driving graphite boat stationary fixture movement
Mobile device, the graphite boat stationary fixture is slidably mounted in the mobile device.
Further, in order to preferably fix graphite boat, the graphite boat stationary fixture includes bottom plate, solid on the bottom plate
Dingan County is equipped with mounting blocks, is provided on the mounting blocks always open, and two mounting blocks are symmetrical arranged, and are provided on the bottom plate
Threaded hole, the threaded hole internal thread are equipped with screw, are provided on the bottom plate several corresponding with fabrication hole on graphite boat
Technique through-hole.
Further, the process point push-off device includes guider and push-off device, the guider with it is described
Push-off device is oppositely arranged.
Further, the guider includes the lifting gear of guide plate and driving guide plate lifting, the guide plate
Be fixedly mounted on the lifting gear, be provided with several pilot holes on the guide plate, several pilot holes on graphite boat
Fabrication hole it is corresponding.
Further, the push-off device includes the lifting gear of push plate and driving push plate lifting, and peace is fixed in the push plate
On the lifting gear, several push rods corresponding with fabrication hole on graphite boat, institute are installed in the push plate
It states push rod and the pilot hole is concentric.
Further, in order to simplify the overall structure of the present invention, the mobile device is screw rod driving device, including silk
Bar, lead screw tumbler, guide rail and sliding block with sliding slot, the screw rod driving device is fixedly connected with the lead screw, described
Sliding block is connect with the screw rod transmission, and the sliding block is slidably mounted in the guide rail.
Further, in order to simplify the overall structure of the present invention, the lifting gear is to push cylinder.
Further, in order to simplify the present invention overall structure, it is easy to disassemble after process point collection, the process point
Storage device is containing box.
The beneficial effects of the invention are as follows:The present invention includes that graphite boat stationary fixture and driving graphite boat stationary fixture move
Mobile device will be fixed after installation is fixed equipped with the graphite boat of process point on graphite boat stationary fixture using mobile device
Good graphite boat is moved to the underface of guide plate, and guide plate moves down into the upper table with process point on graphite boat by lifting gear
Face contact, finally by process point push-off device by process point release graphite boat fabrication hole, whole processes by machine from
It is dynamic to complete, manpower is saved, removal efficiency is improved, improves labor productivity.
Description of the drawings
Present invention will be further explained below with reference to the attached drawings and examples.
Fig. 1 is the three-dimensional assembling schematic diagram of the present invention；
Fig. 2 is the front view of the present invention；
Fig. 3 is the three-dimensional assembling schematic diagram of graphite boat conveying device and guider in the present invention；
Fig. 4 is the three-dimensional assembling schematic diagram of graphite boat stationary fixture and graphite boat in the present invention；
Fig. 5 is the three-dimensional assembling schematic diagram of graphite boat stationary fixture in the present invention；
Fig. 6 is the schematic three dimensional views of guide plate in the present invention；
Fig. 7 is the schematic three dimensional views of push plate in the present invention；
Fig. 8 is the vertical view of graphite boat.
In figure：1. bottom plate, 2. mounting blocks, 3. is always open, 4. screws, 5. technique through-holes, 6. guide plates, 7. pilot holes,
8. containing box, 9. push plates, 10. push rods, 11. lead screws, 12. guide rails, 13. motors, 14. lifting cylinders, 15. pedestals, 16. holders,
17. crossbeam, 18. graphite boats.
Specific implementation mode
Presently in connection with attached drawing, the present invention will be further described in detail.These attached drawings are simplified schematic diagram, only with
Illustration illustrates the basic structure of the present invention, therefore it only shows the composition relevant to the invention.
A kind of tubular type PECVD graphite boats process point provision for disengagement as depicted in figs. 1 and 2, including pedestal 15, on pedestal 15
Equipped with two closed slides 12, lead screw 11 is rotatably installed on pedestal 15, and lead screw 11 is driven by motor 13 and rotated, on lead screw 11
Sliding block is installed in transmission, bottom plate 1 is fixedly mounted on sliding block, as shown in Figure 3.Two intervals of bottom plate 1 are installed, fixed on the bottom plate 1
Mounting blocks 2 are installed, always open 3 are provided on the mounting blocks 2, two mounting blocks 2 are symmetrical arranged, on the bottom plate 1
It is provided with threaded hole, the threaded hole internal thread is equipped with screw 4, and several techniques on graphite boat 18 are provided on the bottom plate 1
The corresponding technique through-hole 5 in hole, as shown in Figure 5.
Lifting air is fixedly mounted on holder 16 in the equal mounting bracket 16 in both sides of 15 upper plate of pedestal, 1 place guide rail 12
Guide plate 6 is fixedly mounted in the external part of cylinder 14, lifting cylinder 14, several pilot holes 7 is provided on the guide plate 6, such as Fig. 6 institutes
Show, several pilot holes 7 are corresponding with the fabrication hole on graphite boat 18, are provided at the opposite position of pilot hole 7 on pedestal 15
Blanking through-hole, blanking through-hole is also opposite one by one with technique through-hole 5, and the radius of blanking through-hole is more than the radius of technique through-hole 5, accommodates
Case 8 is removably mounted at the lower section of pedestal 15 by screw, corresponding with blanking through-hole.
A crossbeam 17 is fixedly mounted by holder 16 on the pedestal 15, lifting cylinder 14 is fixedly mounted on crossbeam 17,
The external part of lifting cylinder 14 is fixedly connected with push plate 9 as shown in Figure 7, and push plate 9 is located at the surface of guide plate 6, described to push away
Several push rods 10 corresponding with fabrication hole on graphite boat 18, the push rod 10 and the pilot hole 7 are installed on plate 9
It is concentric.
The course of work：
1, the graphite boat 18 equipped with process point is fixedly mounted on the bottom plate 1 that graphite boat installs stationary fixture, such as Fig. 4 institutes
Show, the process point on mounted graphite boat 18 is corresponded with the technique through-hole 5 on bottom plate 1.
2, starting the motor 13 in graphite boat conveying device, motor 13 rotates, and lead screw 11 is driven to rotate, and lead screw 11 rotates,
Band movable slider moves, and sliding block drives bottom plate 1 to be moved to guide plate 6, waits for that bottom plate 1 is moved to the underface of guide plate 6, graphite boat 18
On process point and guide plate 6 in pilot hole 7 when corresponding, motor 13 is closed, due to being equipped with two on a lead screw 11
A bottom plate 1, two interval of bottom plate 1 settings, when a bottom plate 1 is located at 6 underface of guide plate, another bottom plate 1 is far from guiding
Plate 6, it is convenient that graphite boat 18 is installed on bottom plate 1.
3, start driving guide plate 6 lift lifting cylinder 14,14 external part of lifting cylinder stretch out, drive guide plate 6 to
Bottom plate 1 immediately below guide plate 6 moves, and when the lower surface and the upper surface of process point in graphite boat 18 of subject-oriented plate 6 contact, closes
Close lifting cylinder 14.
4, start the lifting cylinder 14 that driving push plate 9 lifts, 14 external part of lifting cylinder stretches out, and drives push plate 9 to guiding
Plate 6 is close, and push rod 10 stretches into pilot hole 7, and the process point in 18 fabrication hole of graphite boat is pushed to move downward, and waits for that process point is detached from
After fabrication hole on graphite boat 18, lifting cylinder 14 is shunk, and drives push plate 9 far from guide plate 6, after lifting cylinder 14 resets, is closed
Close lifting cylinder 14.
5, after process point is detached from the fabrication hole on graphite boat 18, into the technique through-hole 5 on bottom plate 1, then pass through pedestal
Blanking through-hole on 15 eventually enters into storage case 8, after filling process point in case 8 to be accommodated, removes storage case 8, replaces storage case
8。
It is enlightenment with above-mentioned desirable embodiment according to the present invention, through the above description, relevant staff is complete
Various changes and amendments can be carried out without departing from the scope of the technological thought of the present invention' entirely.The technology of this invention
Property range is not limited to the contents of the specification, it is necessary to determine its technical scope according to right.
Claims (4)
1. a kind of tubular type PECVD graphite boats process point provision for disengagement, it is characterised in that：Including graphite boat conveying device, process point
Push-off device and process point storage device, the process point push-off device are arranged in the surface of the graphite boat conveying device,
The process point storage device is removably mounted at the underface of the graphite boat conveying device, the process point push-off device packet
Guider and push-off device are included, the guider is oppositely arranged with the push-off device；
The graphite boat conveying device includes the mobile device of graphite boat stationary fixture and driving graphite boat stationary fixture movement, institute
Graphite boat stationary fixture is stated to be slidably mounted in the mobile device；
The guider includes guide plate（6）With driving guide plate（6）The lifting gear of lifting, the guide plate（6）It is fixed
On the lifting gear, the guide plate（6）On be provided with several pilot holes（7）, several pilot holes（7）With graphite
Boat（18）On fabrication hole it is corresponding；
The push-off device includes push plate（9）With driving push plate（9）The lifting gear of lifting, the push plate（9）It is fixedly mounted on
On the lifting gear, the push plate（9）On be installed with several and graphite boat（18）On the corresponding push rod of fabrication hole
（10）, the push rod（10）With the pilot hole（7）It is concentric；
The process point storage device is containing box（8）.
2. tubular type PECVD graphite boats process point provision for disengagement as described in claim 1, it is characterised in that：The graphite boat is solid
Clamp tool includes bottom plate（1）, the bottom plate（1）On be installed with mounting blocks（2）, the mounting blocks（2）On be provided with right angle and open
Mouthful（3）, two mounting blocks（2）It is symmetrical arranged, the bottom plate（1）On be provided with threaded hole, the threaded hole internal thread installation
There is screw（4）, the bottom plate（1）On be provided with several and graphite boat（18）On the corresponding technique through-hole of fabrication hole（5）.
3. tubular type PECVD graphite boats process point provision for disengagement as described in claim 1, it is characterised in that：The mobile device
For screw rod driving device, including lead screw（11）, lead screw tumbler, the guide rail with sliding slot（12）And sliding block, the lead screw
（11）Driving device and the lead screw（11）It is fixedly connected, the sliding block and the lead screw（11）It is sequentially connected, the sliding block is slided
It is dynamic to be mounted on the guide rail（12）It is interior.
4. tubular type PECVD graphite boats process point provision for disengagement as described in claim 1, it is characterised in that：The lifting gear
To push cylinder.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610481307.7A CN105951060B (en) | 2016-06-27 | 2016-06-27 | Tubular type PECVD graphite boat process point provisions for disengagement |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610481307.7A CN105951060B (en) | 2016-06-27 | 2016-06-27 | Tubular type PECVD graphite boat process point provisions for disengagement |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105951060A CN105951060A (en) | 2016-09-21 |
| CN105951060B true CN105951060B (en) | 2018-09-07 |
Family
ID=56904056
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610481307.7A Active CN105951060B (en) | 2016-06-27 | 2016-06-27 | Tubular type PECVD graphite boat process point provisions for disengagement |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105951060B (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107945391B (en) * | 2017-12-29 | 2021-02-02 | 大连富士冰山自动售货机有限公司 | Automatic vending machine |
| CN108866512B (en) * | 2018-09-13 | 2024-04-05 | 江苏润阳悦达光伏科技有限公司 | Automatic change machine for clamping points of graphite boats |
| CN109161872B (en) * | 2018-09-13 | 2023-11-28 | 江苏润阳悦达光伏科技有限公司 | Automatic change quick-witted mould is changed to graphite boat stuck point |
| CN108914090B (en) * | 2018-09-14 | 2024-01-02 | 江苏润阳悦达光伏科技有限公司 | Semi-automatic graphite boat stuck point replacing machine |
| CN111636058B (en) * | 2020-05-22 | 2022-06-28 | 湖南红太阳光电科技有限公司 | Tubular PECVD preheats system experimental apparatus |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN203683661U (en) * | 2013-12-31 | 2014-07-02 | 上海索日新能源科技有限公司 | Graphite boat sticking point mounting and dismounting device used for high temperature diffusion furnace |
| CN203774265U (en) * | 2014-03-18 | 2014-08-13 | 衡水英利新能源有限公司 | Graphite-boat-piece clamping point replacement tooling table |
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2016
- 2016-06-27 CN CN201610481307.7A patent/CN105951060B/en active Active
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| Publication number | Publication date |
|---|---|
| CN105951060A (en) | 2016-09-21 |
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